JPS529508B2 - - Google Patents

Info

Publication number
JPS529508B2
JPS529508B2 JP9807272A JP9807272A JPS529508B2 JP S529508 B2 JPS529508 B2 JP S529508B2 JP 9807272 A JP9807272 A JP 9807272A JP 9807272 A JP9807272 A JP 9807272A JP S529508 B2 JPS529508 B2 JP S529508B2
Authority
JP
Japan
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired
Application number
JP9807272A
Other versions
JPS4967575A (ja
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed filed Critical
Priority to JP9807272A priority Critical patent/JPS529508B2/ja
Publication of JPS4967575A publication Critical patent/JPS4967575A/ja
Publication of JPS529508B2 publication Critical patent/JPS529508B2/ja
Expired legal-status Critical Current

Links

Landscapes

  • Length Measuring Devices By Optical Means (AREA)
  • Preparing Plates And Mask In Photomechanical Process (AREA)
  • Exposure And Positioning Against Photoresist Photosensitive Materials (AREA)
  • ing And Chemical Polishing (AREA)
JP9807272A 1972-10-02 1972-10-02 Expired JPS529508B2 (ja)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP9807272A JPS529508B2 (ja) 1972-10-02 1972-10-02

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP9807272A JPS529508B2 (ja) 1972-10-02 1972-10-02

Publications (2)

Publication Number Publication Date
JPS4967575A JPS4967575A (ja) 1974-07-01
JPS529508B2 true JPS529508B2 (ja) 1977-03-16

Family

ID=14210128

Family Applications (1)

Application Number Title Priority Date Filing Date
JP9807272A Expired JPS529508B2 (ja) 1972-10-02 1972-10-02

Country Status (1)

Country Link
JP (1) JPS529508B2 (ja)

Families Citing this family (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS5341075B2 (ja) * 1974-12-27 1978-10-31
JPS52120562A (en) * 1976-04-02 1977-10-11 Mitsubishi Electric Corp Removing method of micro-particle
JPS53120377A (en) * 1977-03-30 1978-10-20 Nec Corp Laser machining apparatus for correction of photo masks
ATE80955T1 (de) * 1984-06-20 1992-10-15 Gould Inc Laserverfahren zur photomaskenreparatur.

Also Published As

Publication number Publication date
JPS4967575A (ja) 1974-07-01

Similar Documents

Publication Publication Date Title
FR2204124A5 (ja)
JPS529508B2 (ja)
JPS4988798A (ja)
JPS4998439U (ja)
JPS5153041Y2 (ja)
JPS5318745B2 (ja)
FR2211380A1 (ja)
JPS4899719A (ja)
JPS4935874U (ja)
JPS5229802Y2 (ja)
JPS4886634U (ja)
JPS4897232U (ja)
JPS4945980A (ja)
CH560966A5 (ja)
BG18386A1 (ja)
CH576961A5 (ja)
CH513673A4 (ja)
CH545741A (ja)
CH546010A (ja)
CH555674A4 (ja)
CH322372A4 (ja)
CH560959A5 (ja)
CH1668773A4 (ja)
CH585228A5 (ja)
CH1486873A4 (ja)