JPS4937569A - - Google Patents
Info
- Publication number
- JPS4937569A JPS4937569A JP7915872A JP7915872A JPS4937569A JP S4937569 A JPS4937569 A JP S4937569A JP 7915872 A JP7915872 A JP 7915872A JP 7915872 A JP7915872 A JP 7915872A JP S4937569 A JPS4937569 A JP S4937569A
- Authority
- JP
- Japan
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
Landscapes
- Crystals, And After-Treatments Of Crystals (AREA)
- Liquid Deposition Of Substances Of Which Semiconductor Devices Are Composed (AREA)
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP7915872A JPS4937569A (ja) | 1972-08-09 | 1972-08-09 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP7915872A JPS4937569A (ja) | 1972-08-09 | 1972-08-09 |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| JPS4937569A true JPS4937569A (ja) | 1974-04-08 |
Family
ID=13682136
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP7915872A Pending JPS4937569A (ja) | 1972-08-09 | 1972-08-09 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPS4937569A (ja) |
Cited By (8)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS5142468A (en) * | 1974-10-09 | 1976-04-10 | Hitachi Ltd | Kagobutsuhandotaino seizosochi |
| JPS5252461U (ja) * | 1975-10-09 | 1977-04-14 | ||
| JPS5252570A (en) * | 1975-10-27 | 1977-04-27 | Hitachi Ltd | Device for production of compound semiconductor |
| JPS5288275A (en) * | 1976-01-19 | 1977-07-23 | Oki Electric Ind Co Ltd | Liquid-phase epitaxial device |
| JPS5288276A (en) * | 1976-01-19 | 1977-07-23 | Oki Electric Ind Co Ltd | Liquid-phase epitaxial growth |
| JPS59101823A (ja) * | 1982-12-03 | 1984-06-12 | Nec Corp | 液相エピタキシヤル成長装置 |
| JPS59128730U (ja) * | 1983-02-18 | 1984-08-30 | 三洋電機株式会社 | 液相成長装置 |
| JPS63157415A (ja) * | 1986-12-20 | 1988-06-30 | Fujitsu Ltd | 半導体結晶の製造方法 |
-
1972
- 1972-08-09 JP JP7915872A patent/JPS4937569A/ja active Pending
Cited By (13)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS5142468A (en) * | 1974-10-09 | 1976-04-10 | Hitachi Ltd | Kagobutsuhandotaino seizosochi |
| JPS6012776B2 (ja) * | 1974-10-09 | 1985-04-03 | 株式会社日立製作所 | 化合物半導体の製造装置 |
| JPS5515316Y2 (ja) * | 1975-10-09 | 1980-04-09 | ||
| JPS5252461U (ja) * | 1975-10-09 | 1977-04-14 | ||
| JPS5252570A (en) * | 1975-10-27 | 1977-04-27 | Hitachi Ltd | Device for production of compound semiconductor |
| JPS5288275A (en) * | 1976-01-19 | 1977-07-23 | Oki Electric Ind Co Ltd | Liquid-phase epitaxial device |
| JPS5288276A (en) * | 1976-01-19 | 1977-07-23 | Oki Electric Ind Co Ltd | Liquid-phase epitaxial growth |
| JPS5440234B2 (ja) * | 1976-01-19 | 1979-12-03 | ||
| JPS59101823A (ja) * | 1982-12-03 | 1984-06-12 | Nec Corp | 液相エピタキシヤル成長装置 |
| JPH029444B2 (ja) * | 1982-12-03 | 1990-03-02 | Nippon Electric Co | |
| JPS59128730U (ja) * | 1983-02-18 | 1984-08-30 | 三洋電機株式会社 | 液相成長装置 |
| JPH025530Y2 (ja) * | 1983-02-18 | 1990-02-09 | ||
| JPS63157415A (ja) * | 1986-12-20 | 1988-06-30 | Fujitsu Ltd | 半導体結晶の製造方法 |