JPS4928687A - - Google Patents
Info
- Publication number
- JPS4928687A JPS4928687A JP47070243A JP7024372A JPS4928687A JP S4928687 A JPS4928687 A JP S4928687A JP 47070243 A JP47070243 A JP 47070243A JP 7024372 A JP7024372 A JP 7024372A JP S4928687 A JPS4928687 A JP S4928687A
- Authority
- JP
- Japan
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Granted
Links
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP7024372A JPS5315110B2 (ja) | 1972-07-13 | 1972-07-13 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP7024372A JPS5315110B2 (ja) | 1972-07-13 | 1972-07-13 |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| JPS4928687A true JPS4928687A (ja) | 1974-03-14 |
| JPS5315110B2 JPS5315110B2 (ja) | 1978-05-22 |
Family
ID=13425917
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP7024372A Expired JPS5315110B2 (ja) | 1972-07-13 | 1972-07-13 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPS5315110B2 (ja) |
Cited By (6)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS49118413U (ja) * | 1973-02-06 | 1974-10-09 | ||
| JPS51137052U (ja) * | 1975-04-25 | 1976-11-05 | ||
| JPS59217704A (ja) * | 1983-05-25 | 1984-12-07 | Mitsui Toatsu Chem Inc | ポリマ−の改質方法 |
| JPS61254257A (ja) * | 1985-05-01 | 1986-11-12 | Mitsubishi Chem Ind Ltd | ポリイミド溶液の脱塩方法 |
| JPH05234877A (ja) * | 1991-09-03 | 1993-09-10 | Ocg Microelectron Materials Inc | レジスト成分からの金属不純物の除去方法 |
| JPH05234876A (ja) * | 1991-09-03 | 1993-09-10 | Ocg Microelectron Materials Inc | レジスト成分からの金属不純物除去方法 |
Families Citing this family (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS61144300U (ja) * | 1985-02-28 | 1986-09-05 |
-
1972
- 1972-07-13 JP JP7024372A patent/JPS5315110B2/ja not_active Expired
Cited By (9)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS49118413U (ja) * | 1973-02-06 | 1974-10-09 | ||
| JPS5337290Y2 (ja) * | 1973-02-06 | 1978-09-09 | ||
| JPS51137052U (ja) * | 1975-04-25 | 1976-11-05 | ||
| JPS5435240Y2 (ja) * | 1975-04-25 | 1979-10-26 | ||
| JPS59217704A (ja) * | 1983-05-25 | 1984-12-07 | Mitsui Toatsu Chem Inc | ポリマ−の改質方法 |
| JPH0240085B2 (ja) * | 1983-05-25 | 1990-09-10 | Mitsui Toatsu Chemicals | |
| JPS61254257A (ja) * | 1985-05-01 | 1986-11-12 | Mitsubishi Chem Ind Ltd | ポリイミド溶液の脱塩方法 |
| JPH05234877A (ja) * | 1991-09-03 | 1993-09-10 | Ocg Microelectron Materials Inc | レジスト成分からの金属不純物の除去方法 |
| JPH05234876A (ja) * | 1991-09-03 | 1993-09-10 | Ocg Microelectron Materials Inc | レジスト成分からの金属不純物除去方法 |
Also Published As
| Publication number | Publication date |
|---|---|
| JPS5315110B2 (ja) | 1978-05-22 |