JPS4921471B1 - - Google Patents
Info
- Publication number
- JPS4921471B1 JPS4921471B1 JP11001470A JP11001470A JPS4921471B1 JP S4921471 B1 JPS4921471 B1 JP S4921471B1 JP 11001470 A JP11001470 A JP 11001470A JP 11001470 A JP11001470 A JP 11001470A JP S4921471 B1 JPS4921471 B1 JP S4921471B1
- Authority
- JP
- Japan
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
Classifications
-
- G—PHYSICS
- G03—PHOTOGRAPHY; CINEMATOGRAPHY; ANALOGOUS TECHNIQUES USING WAVES OTHER THAN OPTICAL WAVES; ELECTROGRAPHY; HOLOGRAPHY
- G03F—PHOTOMECHANICAL PRODUCTION OF TEXTURED OR PATTERNED SURFACES, e.g. FOR PRINTING, FOR PROCESSING OF SEMICONDUCTOR DEVICES; MATERIALS THEREFOR; ORIGINALS THEREFOR; APPARATUS SPECIALLY ADAPTED THEREFOR
- G03F1/00—Originals for photomechanical production of textured or patterned surfaces, e.g., masks, photo-masks, reticles; Mask blanks or pellicles therefor; Containers specially adapted therefor; Preparation thereof
- G03F1/54—Absorbers, e.g. of opaque materials
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
- H01J9/00—Apparatus or processes specially adapted for the manufacture, installation, removal, maintenance of electric discharge tubes, discharge lamps, or parts thereof; Recovery of material from discharge tubes or lamps
- H01J9/20—Manufacture of screens on or from which an image or pattern is formed, picked up, converted or stored; Applying coatings to the vessel
- H01J9/233—Manufacture of photoelectric screens or charge-storage screens
Landscapes
- Physics & Mathematics (AREA)
- General Physics & Mathematics (AREA)
- Engineering & Computer Science (AREA)
- Manufacturing & Machinery (AREA)
- Exposure And Positioning Against Photoresist Photosensitive Materials (AREA)
- Preparing Plates And Mask In Photomechanical Process (AREA)
- Exposure Of Semiconductors, Excluding Electron Or Ion Beam Exposure (AREA)
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| US88824969A | 1969-12-29 | 1969-12-29 |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| JPS4921471B1 true JPS4921471B1 (enExample) | 1974-06-01 |
Family
ID=25392847
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP11001470A Pending JPS4921471B1 (enExample) | 1969-12-29 | 1970-12-09 |
Country Status (7)
| Country | Link |
|---|---|
| US (1) | US3647438A (enExample) |
| JP (1) | JPS4921471B1 (enExample) |
| CA (1) | CA936036A (enExample) |
| DE (1) | DE2063638A1 (enExample) |
| FR (1) | FR2075107A5 (enExample) |
| GB (1) | GB1307010A (enExample) |
| NL (1) | NL7018861A (enExample) |
Families Citing this family (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| US4211834A (en) * | 1977-12-30 | 1980-07-08 | International Business Machines Corporation | Method of using a o-quinone diazide sensitized phenol-formaldehyde resist as a deep ultraviolet light exposure mask |
Family Cites Families (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| US3477848A (en) * | 1964-12-14 | 1969-11-11 | Texas Instruments Inc | Method for producing sets of photomask having accurate registration |
| US3403284A (en) * | 1966-12-29 | 1968-09-24 | Bell Telephone Labor Inc | Target structure storage device using diode array |
-
1969
- 1969-12-29 US US888249A patent/US3647438A/en not_active Expired - Lifetime
-
1970
- 1970-11-13 CA CA098161A patent/CA936036A/en not_active Expired
- 1970-12-09 JP JP11001470A patent/JPS4921471B1/ja active Pending
- 1970-12-23 DE DE19702063638 patent/DE2063638A1/de active Pending
- 1970-12-28 NL NL7018861A patent/NL7018861A/xx unknown
- 1970-12-29 FR FR7046959A patent/FR2075107A5/fr not_active Expired
- 1970-12-29 GB GB6166970A patent/GB1307010A/en not_active Expired
Also Published As
| Publication number | Publication date |
|---|---|
| DE2063638A1 (de) | 1971-07-01 |
| NL7018861A (enExample) | 1971-07-01 |
| FR2075107A5 (enExample) | 1971-10-08 |
| GB1307010A (en) | 1973-02-14 |
| US3647438A (en) | 1972-03-07 |
| CA936036A (en) | 1973-10-30 |