FR2075107A5 - - Google Patents

Info

Publication number
FR2075107A5
FR2075107A5 FR7046959A FR7046959A FR2075107A5 FR 2075107 A5 FR2075107 A5 FR 2075107A5 FR 7046959 A FR7046959 A FR 7046959A FR 7046959 A FR7046959 A FR 7046959A FR 2075107 A5 FR2075107 A5 FR 2075107A5
Authority
FR
France
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired
Application number
FR7046959A
Other languages
French (fr)
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
RCA Corp
Original Assignee
RCA Corp
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by RCA Corp filed Critical RCA Corp
Application granted granted Critical
Publication of FR2075107A5 publication Critical patent/FR2075107A5/fr
Expired legal-status Critical Current

Links

Classifications

    • GPHYSICS
    • G03PHOTOGRAPHY; CINEMATOGRAPHY; ANALOGOUS TECHNIQUES USING WAVES OTHER THAN OPTICAL WAVES; ELECTROGRAPHY; HOLOGRAPHY
    • G03FPHOTOMECHANICAL PRODUCTION OF TEXTURED OR PATTERNED SURFACES, e.g. FOR PRINTING, FOR PROCESSING OF SEMICONDUCTOR DEVICES; MATERIALS THEREFOR; ORIGINALS THEREFOR; APPARATUS SPECIALLY ADAPTED THEREFOR
    • G03F1/00Originals for photomechanical production of textured or patterned surfaces, e.g., masks, photo-masks, reticles; Mask blanks or pellicles therefor; Containers specially adapted therefor; Preparation thereof
    • G03F1/54Absorbers, e.g. of opaque materials
    • HELECTRICITY
    • H01ELECTRIC ELEMENTS
    • H01JELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
    • H01J9/00Apparatus or processes specially adapted for the manufacture, installation, removal, maintenance of electric discharge tubes, discharge lamps, or parts thereof; Recovery of material from discharge tubes or lamps
    • H01J9/20Manufacture of screens on or from which an image or pattern is formed, picked up, converted or stored; Applying coatings to the vessel
    • H01J9/233Manufacture of photoelectric screens or charge-storage screens

Landscapes

  • Physics & Mathematics (AREA)
  • General Physics & Mathematics (AREA)
  • Engineering & Computer Science (AREA)
  • Manufacturing & Machinery (AREA)
  • Exposure And Positioning Against Photoresist Photosensitive Materials (AREA)
  • Preparing Plates And Mask In Photomechanical Process (AREA)
  • Exposure Of Semiconductors, Excluding Electron Or Ion Beam Exposure (AREA)
FR7046959A 1969-12-29 1970-12-29 Expired FR2075107A5 (enExample)

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
US88824969A 1969-12-29 1969-12-29

Publications (1)

Publication Number Publication Date
FR2075107A5 true FR2075107A5 (enExample) 1971-10-08

Family

ID=25392847

Family Applications (1)

Application Number Title Priority Date Filing Date
FR7046959A Expired FR2075107A5 (enExample) 1969-12-29 1970-12-29

Country Status (7)

Country Link
US (1) US3647438A (enExample)
JP (1) JPS4921471B1 (enExample)
CA (1) CA936036A (enExample)
DE (1) DE2063638A1 (enExample)
FR (1) FR2075107A5 (enExample)
GB (1) GB1307010A (enExample)
NL (1) NL7018861A (enExample)

Families Citing this family (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US4211834A (en) * 1977-12-30 1980-07-08 International Business Machines Corporation Method of using a o-quinone diazide sensitized phenol-formaldehyde resist as a deep ultraviolet light exposure mask

Family Cites Families (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US3477848A (en) * 1964-12-14 1969-11-11 Texas Instruments Inc Method for producing sets of photomask having accurate registration
US3403284A (en) * 1966-12-29 1968-09-24 Bell Telephone Labor Inc Target structure storage device using diode array

Also Published As

Publication number Publication date
JPS4921471B1 (enExample) 1974-06-01
DE2063638A1 (de) 1971-07-01
NL7018861A (enExample) 1971-07-01
GB1307010A (en) 1973-02-14
US3647438A (en) 1972-03-07
CA936036A (en) 1973-10-30

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Legal Events

Date Code Title Description
ST Notification of lapse