JPS4921340A - - Google Patents
Info
- Publication number
- JPS4921340A JPS4921340A JP6087772A JP6087772A JPS4921340A JP S4921340 A JPS4921340 A JP S4921340A JP 6087772 A JP6087772 A JP 6087772A JP 6087772 A JP6087772 A JP 6087772A JP S4921340 A JPS4921340 A JP S4921340A
- Authority
- JP
- Japan
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Granted
Links
Landscapes
- Drying Of Semiconductors (AREA)
- Internal Circuitry In Semiconductor Integrated Circuit Devices (AREA)
- ing And Chemical Polishing (AREA)
- Manufacturing Of Printed Circuit Boards (AREA)
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP6087772A JPS576691B2 (ja) | 1972-06-17 | 1972-06-17 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP6087772A JPS576691B2 (ja) | 1972-06-17 | 1972-06-17 |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| JPS4921340A true JPS4921340A (ja) | 1974-02-25 |
| JPS576691B2 JPS576691B2 (ja) | 1982-02-06 |
Family
ID=13155033
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP6087772A Expired JPS576691B2 (ja) | 1972-06-17 | 1972-06-17 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPS576691B2 (ja) |
Cited By (6)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS5127833A (ja) * | 1974-09-02 | 1976-03-09 | Nippon Telegraph & Telephone | Chitaniumunoshokukokuhoho |
| JPS5274582A (en) * | 1975-12-18 | 1977-06-22 | Mitsubishi Electric Corp | Washing in gas phase |
| JPS5277840A (en) * | 1975-12-24 | 1977-06-30 | Tokyo Shibaura Electric Co | Device for chemical dry etching |
| JPS5291745A (en) * | 1976-01-29 | 1977-08-02 | Tokyo Shibaura Electric Co | Device for gas plasma etching |
| JPS52114444A (en) * | 1976-03-22 | 1977-09-26 | Nippon Telegraph & Telephone | Plasma etching method |
| JPS52122236A (en) * | 1976-04-07 | 1977-10-14 | Tokyo Shibaura Electric Co | Etching device |
Citations (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS4532249Y1 (ja) * | 1967-12-28 | 1970-12-10 |
-
1972
- 1972-06-17 JP JP6087772A patent/JPS576691B2/ja not_active Expired
Patent Citations (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS4532249Y1 (ja) * | 1967-12-28 | 1970-12-10 |
Cited By (11)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS5127833A (ja) * | 1974-09-02 | 1976-03-09 | Nippon Telegraph & Telephone | Chitaniumunoshokukokuhoho |
| JPS559060B2 (ja) * | 1974-09-02 | 1980-03-07 | ||
| JPS5274582A (en) * | 1975-12-18 | 1977-06-22 | Mitsubishi Electric Corp | Washing in gas phase |
| JPS5277840A (en) * | 1975-12-24 | 1977-06-30 | Tokyo Shibaura Electric Co | Device for chemical dry etching |
| JPS5550114B2 (ja) * | 1975-12-24 | 1980-12-16 | ||
| JPS5291745A (en) * | 1976-01-29 | 1977-08-02 | Tokyo Shibaura Electric Co | Device for gas plasma etching |
| JPS5526188B2 (ja) * | 1976-01-29 | 1980-07-11 | ||
| JPS52114444A (en) * | 1976-03-22 | 1977-09-26 | Nippon Telegraph & Telephone | Plasma etching method |
| JPS559464B2 (ja) * | 1976-03-22 | 1980-03-10 | ||
| JPS52122236A (en) * | 1976-04-07 | 1977-10-14 | Tokyo Shibaura Electric Co | Etching device |
| JPS5526190B2 (ja) * | 1976-04-07 | 1980-07-11 |
Also Published As
| Publication number | Publication date |
|---|---|
| JPS576691B2 (ja) | 1982-02-06 |