FR2208191A1 - - Google Patents

Info

Publication number
FR2208191A1
FR2208191A1 FR7341234A FR7341234A FR2208191A1 FR 2208191 A1 FR2208191 A1 FR 2208191A1 FR 7341234 A FR7341234 A FR 7341234A FR 7341234 A FR7341234 A FR 7341234A FR 2208191 A1 FR2208191 A1 FR 2208191A1
Authority
FR
France
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
FR7341234A
Other languages
French (fr)
Other versions
FR2208191B1 (ja
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Fujitsu Ltd
Original Assignee
Fujitsu Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Fujitsu Ltd filed Critical Fujitsu Ltd
Publication of FR2208191A1 publication Critical patent/FR2208191A1/fr
Application granted granted Critical
Publication of FR2208191B1 publication Critical patent/FR2208191B1/fr
Expired legal-status Critical Current

Links

Classifications

    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
    • C—CHEMISTRY; METALLURGY
    • C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
    • C23F—NON-MECHANICAL REMOVAL OF METALLIC MATERIAL FROM SURFACE; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL; MULTI-STEP PROCESSES FOR SURFACE TREATMENT OF METALLIC MATERIAL INVOLVING AT LEAST ONE PROCESS PROVIDED FOR IN CLASS C23 AND AT LEAST ONE PROCESS COVERED BY SUBCLASS C21D OR C22F OR CLASS C25
    • C23F4/00—Processes for removing metallic material from surfaces, not provided for in group C23F1/00 or C23F3/00
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L23/00—Details of semiconductor or other solid state devices
    • H01L23/48—Arrangements for conducting electric current to or from the solid state body in operation, e.g. leads, terminal arrangements ; Selection of materials therefor
    • H01L23/482—Arrangements for conducting electric current to or from the solid state body in operation, e.g. leads, terminal arrangements ; Selection of materials therefor consisting of lead-in layers inseparably applied to the semiconductor body
    • H01L23/485—Arrangements for conducting electric current to or from the solid state body in operation, e.g. leads, terminal arrangements ; Selection of materials therefor consisting of lead-in layers inseparably applied to the semiconductor body consisting of layered constructions comprising conductive layers and insulating layers, e.g. planar contacts
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L2924/00—Indexing scheme for arrangements or methods for connecting or disconnecting semiconductor or solid-state bodies as covered by H01L24/00
    • H01L2924/0001—Technical content checked by a classifier
    • H01L2924/0002—Not covered by any one of groups H01L24/00, H01L24/00 and H01L2224/00

Landscapes

  • Engineering & Computer Science (AREA)
  • Chemical & Material Sciences (AREA)
  • Condensed Matter Physics & Semiconductors (AREA)
  • General Physics & Mathematics (AREA)
  • Physics & Mathematics (AREA)
  • Computer Hardware Design (AREA)
  • Microelectronics & Electronic Packaging (AREA)
  • Power Engineering (AREA)
  • Manufacturing & Machinery (AREA)
  • Materials Engineering (AREA)
  • Mechanical Engineering (AREA)
  • Metallurgy (AREA)
  • Organic Chemistry (AREA)
  • Drying Of Semiconductors (AREA)
  • Internal Circuitry In Semiconductor Integrated Circuit Devices (AREA)
  • Manufacturing Of Printed Circuit Boards (AREA)
  • ing And Chemical Polishing (AREA)
  • Electrodes Of Semiconductors (AREA)
FR7341234A 1972-11-22 1973-11-20 Expired FR2208191B1 (ja)

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP11746472A JPS5441870B2 (ja) 1972-11-22 1972-11-22

Publications (2)

Publication Number Publication Date
FR2208191A1 true FR2208191A1 (ja) 1974-06-21
FR2208191B1 FR2208191B1 (ja) 1978-11-10

Family

ID=14712315

Family Applications (1)

Application Number Title Priority Date Filing Date
FR7341234A Expired FR2208191B1 (ja) 1972-11-22 1973-11-20

Country Status (4)

Country Link
JP (1) JPS5441870B2 (ja)
DE (1) DE2357913B2 (ja)
FR (1) FR2208191B1 (ja)
GB (1) GB1410728A (ja)

Families Citing this family (10)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS5127833A (ja) * 1974-09-02 1976-03-09 Nippon Telegraph & Telephone Chitaniumunoshokukokuhoho
JPS5190274A (en) * 1975-02-05 1976-08-07 Fuotomasukuno seizohoho
US3994793A (en) * 1975-05-22 1976-11-30 International Business Machines Corporation Reactive ion etching of aluminum
JPS5287985A (en) * 1976-01-19 1977-07-22 Mitsubishi Electric Corp Plasma etching method
JPS5325244A (en) * 1976-08-20 1978-03-08 Nichiden Varian Kk Method of plasma etching molybdenum
US4211601A (en) * 1978-07-31 1980-07-08 Bell Telephone Laboratories, Incorporated Device fabrication by plasma etching
JPS5679449A (en) * 1979-11-30 1981-06-30 Mitsubishi Electric Corp Production of semiconductor device
JP3526651B2 (ja) * 1995-04-28 2004-05-17 ローム株式会社 半導体装置および配線方法
US5973342A (en) * 1996-04-25 1999-10-26 Rohm Co., Ltd. Semiconductor device having an iridium electrode
JP6739187B2 (ja) 2016-02-22 2020-08-12 株式会社神戸製鋼所 溶接用Ｎｉ基合金ソリッドワイヤおよびＮｉ基合金溶接金属の製造方法

Family Cites Families (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US3615956A (en) * 1969-03-27 1971-10-26 Signetics Corp Gas plasma vapor etching process

Non-Patent Citations (1)

* Cited by examiner, † Cited by third party
Title
NEANT *

Also Published As

Publication number Publication date
JPS5441870B2 (ja) 1979-12-11
DE2357913A1 (de) 1974-05-30
FR2208191B1 (ja) 1978-11-10
JPS4975270A (ja) 1974-07-19
DE2357913B2 (de) 1976-06-24
GB1410728A (en) 1975-10-22

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