JPS4884991A - - Google Patents

Info

Publication number
JPS4884991A
JPS4884991A JP48013321A JP1332173A JPS4884991A JP S4884991 A JPS4884991 A JP S4884991A JP 48013321 A JP48013321 A JP 48013321A JP 1332173 A JP1332173 A JP 1332173A JP S4884991 A JPS4884991 A JP S4884991A
Authority
JP
Japan
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
JP48013321A
Other languages
Japanese (ja)
Other versions
JPS5113919B2 (enrdf_load_stackoverflow
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed filed Critical
Publication of JPS4884991A publication Critical patent/JPS4884991A/ja
Publication of JPS5113919B2 publication Critical patent/JPS5113919B2/ja
Expired legal-status Critical Current

Links

Classifications

    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B24—GRINDING; POLISHING
    • B24B—MACHINES, DEVICES, OR PROCESSES FOR GRINDING OR POLISHING; DRESSING OR CONDITIONING OF ABRADING SURFACES; FEEDING OF GRINDING, POLISHING, OR LAPPING AGENTS
    • B24B37/00—Lapping machines or devices; Accessories
    • B24B37/04—Lapping machines or devices; Accessories designed for working plane surfaces
    • B24B37/07—Lapping machines or devices; Accessories designed for working plane surfaces characterised by the movement of the work or lapping tool
    • B24B37/08—Lapping machines or devices; Accessories designed for working plane surfaces characterised by the movement of the work or lapping tool for double side lapping

Landscapes

  • Engineering & Computer Science (AREA)
  • Mechanical Engineering (AREA)
  • Finish Polishing, Edge Sharpening, And Grinding By Specific Grinding Devices (AREA)
  • Constituent Portions Of Griding Lathes, Driving, Sensing And Control (AREA)
JP48013321A 1972-02-01 1973-02-01 Expired JPS5113919B2 (enrdf_load_stackoverflow)

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
DE19722204581 DE2204581B2 (de) 1972-02-01 1972-02-01 Steuereinrichtung fuer den bearbeitungsdruck einer laepp- oder honmaschine

Publications (2)

Publication Number Publication Date
JPS4884991A true JPS4884991A (enrdf_load_stackoverflow) 1973-11-10
JPS5113919B2 JPS5113919B2 (enrdf_load_stackoverflow) 1976-05-04

Family

ID=5834643

Family Applications (1)

Application Number Title Priority Date Filing Date
JP48013321A Expired JPS5113919B2 (enrdf_load_stackoverflow) 1972-02-01 1973-02-01

Country Status (7)

Country Link
US (1) US3848365A (enrdf_load_stackoverflow)
JP (1) JPS5113919B2 (enrdf_load_stackoverflow)
DD (1) DD103843A5 (enrdf_load_stackoverflow)
DE (1) DE2204581B2 (enrdf_load_stackoverflow)
FR (1) FR2170689A5 (enrdf_load_stackoverflow)
GB (1) GB1386041A (enrdf_load_stackoverflow)
IT (1) IT974177B (enrdf_load_stackoverflow)

Cited By (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS56146666A (en) * 1980-04-14 1981-11-14 Supiide Fuamu Kk Lapping device
JPS56146665A (en) * 1980-04-14 1981-11-14 Supiide Fuamu Kk Lapping process and its device
JPS62120972A (ja) * 1986-11-06 1987-06-02 Supiide Fuamu Kk 加圧装置
US5969521A (en) * 1996-07-18 1999-10-19 Speedfam Co., Ltd. Automatic measuring apparatus having a switching means to generate an output signal only when a sensor is positioned at a predetermined space

Families Citing this family (26)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
DE2442081C3 (de) * 1974-09-03 1979-11-15 Jmj-Werkzeugmaschinen Gmbh Fuer Feinbearbeitung, 4020 Mettmann Läppmaschine
JPS54105710U (enrdf_load_stackoverflow) * 1977-12-29 1979-07-25
US4209949A (en) * 1978-01-04 1980-07-01 Staats & Staats, Inc. Method and apparatus for high precision lapping machines
US4194322A (en) * 1978-06-05 1980-03-25 Ford Motor Company Constant force sheet glass cutting drill assembly
JPS5645365A (en) * 1979-09-14 1981-04-25 Ichikawa Seisakusho:Kk Double-face lapping machine
DE2950881C2 (de) 1979-12-18 1983-06-01 Fa. Peter Wolters, 2370 Rendsburg Steuereinrichtung für den Bearbeitungsdruck an Läpp-, Hon- und Schleißmaschinen
DE3520713A1 (de) * 1985-06-10 1986-12-11 Fa. Peter Wolters, 2370 Rendsburg Steuervorrichtung fuer den bearbeitungsdruck an laepp-, hon- und poliermaschinen
DE3600364A1 (de) * 1986-01-09 1987-07-16 Rexroth Mannesmann Gmbh Verfahren und vorrichtung zum ausgleich des auf einen hydraulischen antrieb wirkenden veraenderlichen gewichtes einer masse, insbesondere fuer den senkrecht stehenden antriebszylinder einer laeppmaschine
US4837979A (en) * 1987-03-17 1989-06-13 Sintobrator, Ltd. Polishing device
DE3818159A1 (de) * 1988-05-28 1989-11-30 Wolters Peter Fa Verfahren und vorrichtung zur steuerung des betriebs von hon- oder schleifmaschinen
US4974370A (en) * 1988-12-07 1990-12-04 General Signal Corp. Lapping and polishing machine
EP0444657B1 (en) * 1990-02-27 1996-02-07 Kabushiki Kaisha Toshiba Control robot
US5072881A (en) * 1990-06-04 1991-12-17 Systems Specialties Method of cleaning automated paint spraying equipment
US5573446A (en) * 1995-02-16 1996-11-12 Eastman Kodak Company Abrasive air spray shaping of optical surfaces
US5653622A (en) * 1995-07-25 1997-08-05 Vlsi Technology, Inc. Chemical mechanical polishing system and method for optimization and control of film removal uniformity
CZ102596A3 (en) * 1996-04-09 1997-10-15 Vladimir Ing Hrazdil Apparatus for grinding and/or polishing metallographic patterns
US6036585A (en) * 1997-03-31 2000-03-14 Nippei Toyama Corporation Grinder and grinding method
US5957763A (en) * 1997-09-19 1999-09-28 Speedfam Corporation Polishing apparatus with support columns supporting multiple platform members
JPH11207610A (ja) * 1998-01-26 1999-08-03 Speedfam Co Ltd 研磨量制御システム及びその方法
WO1999056910A1 (en) * 1998-05-01 1999-11-11 Speedfam Corporation Polishing apparatus
JP2002154049A (ja) * 2000-11-15 2002-05-28 Fujikoshi Mach Corp 研磨方法
JP4273056B2 (ja) * 2004-08-12 2009-06-03 不二越機械工業株式会社 研磨装置
KR100702015B1 (ko) * 2005-08-04 2007-03-30 삼성전자주식회사 웨이퍼 연마장치 및 이를 이용한 웨이퍼 연마방법
KR20110056976A (ko) * 2009-11-23 2011-05-31 삼성전자주식회사 휠 팁의 높이를 조절할 수 있는 웨이퍼 연마 장치
EP3268166B1 (en) * 2015-03-13 2019-09-11 Struers ApS A specimen mover and a method of placing specimens in a specimen mover
CN107116370B (zh) * 2016-10-25 2019-02-22 浦江县杰浩进出口有限公司 一种稳定的板材加工装置

Family Cites Families (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US3035377A (en) * 1958-12-22 1962-05-22 Bovensiepen Hans-Friedrich Lapping machine
US3173230A (en) * 1962-12-03 1965-03-16 Wolters Peter Lapping machine
US3691697A (en) * 1970-09-21 1972-09-19 Hamco Mach & Elect Co Pressure control for lapping device

Cited By (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS56146666A (en) * 1980-04-14 1981-11-14 Supiide Fuamu Kk Lapping device
JPS56146665A (en) * 1980-04-14 1981-11-14 Supiide Fuamu Kk Lapping process and its device
JPS62120972A (ja) * 1986-11-06 1987-06-02 Supiide Fuamu Kk 加圧装置
US5969521A (en) * 1996-07-18 1999-10-19 Speedfam Co., Ltd. Automatic measuring apparatus having a switching means to generate an output signal only when a sensor is positioned at a predetermined space

Also Published As

Publication number Publication date
GB1386041A (en) 1975-03-05
IT974177B (it) 1974-06-20
DE2204581A1 (de) 1973-08-16
JPS5113919B2 (enrdf_load_stackoverflow) 1976-05-04
FR2170689A5 (enrdf_load_stackoverflow) 1973-09-14
DD103843A5 (enrdf_load_stackoverflow) 1974-02-12
DE2204581B2 (de) 1977-12-08
US3848365A (en) 1974-11-19

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