JPS4842352B1 - - Google Patents

Info

Publication number
JPS4842352B1
JPS4842352B1 JP5145770A JP5145770A JPS4842352B1 JP S4842352 B1 JPS4842352 B1 JP S4842352B1 JP 5145770 A JP5145770 A JP 5145770A JP 5145770 A JP5145770 A JP 5145770A JP S4842352 B1 JPS4842352 B1 JP S4842352B1
Authority
JP
Japan
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Pending
Application number
JP5145770A
Other languages
Japanese (ja)
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed filed Critical
Publication of JPS4842352B1 publication Critical patent/JPS4842352B1/ja
Pending legal-status Critical Current

Links

Classifications

    • CCHEMISTRY; METALLURGY
    • C23COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
    • C23CCOATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
    • C23C14/00Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material
    • C23C14/22Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material characterised by the process of coating
    • C23C14/50Substrate holders
    • C23C14/505Substrate holders for rotation of the substrates

Landscapes

  • Chemical & Material Sciences (AREA)
  • Chemical Kinetics & Catalysis (AREA)
  • Engineering & Computer Science (AREA)
  • Materials Engineering (AREA)
  • Mechanical Engineering (AREA)
  • Metallurgy (AREA)
  • Organic Chemistry (AREA)
  • Physical Vapour Deposition (AREA)
JP5145770A 1969-06-13 1970-06-13 Pending JPS4842352B1 (de)

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
SE840469A SE335294B (de) 1969-06-13 1969-06-13

Publications (1)

Publication Number Publication Date
JPS4842352B1 true JPS4842352B1 (de) 1973-12-12

Family

ID=20273982

Family Applications (1)

Application Number Title Priority Date Filing Date
JP5145770A Pending JPS4842352B1 (de) 1969-06-13 1970-06-13

Country Status (6)

Country Link
JP (1) JPS4842352B1 (de)
CH (1) CH537986A (de)
DE (1) DE2029020B2 (de)
FR (1) FR2052571A5 (de)
GB (1) GB1317052A (de)
SE (1) SE335294B (de)

Families Citing this family (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US3783821A (en) * 1971-03-02 1974-01-08 K Willmott Planetary workholders
GB2010676B (en) * 1977-12-27 1982-05-19 Alza Corp Diffusional drug delivery device with block copolymer as drug carrier
US4276855A (en) * 1979-05-02 1981-07-07 Optical Coating Laboratory, Inc. Coating apparatus
DE102010032591A1 (de) 2010-07-23 2012-01-26 Leybold Optics Gmbh Vorrichtung und Verfahren zur Vakuumbeschichtung

Also Published As

Publication number Publication date
DE2029020B2 (de) 1973-03-29
CH537986A (de) 1973-06-15
FR2052571A5 (de) 1971-04-09
SE335294B (de) 1971-05-17
GB1317052A (en) 1973-05-16
DE2029020A1 (de) 1971-01-07

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