FR2052571A5 - - Google Patents

Info

Publication number
FR2052571A5
FR2052571A5 FR7021878A FR7021878A FR2052571A5 FR 2052571 A5 FR2052571 A5 FR 2052571A5 FR 7021878 A FR7021878 A FR 7021878A FR 7021878 A FR7021878 A FR 7021878A FR 2052571 A5 FR2052571 A5 FR 2052571A5
Authority
FR
France
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired
Application number
FR7021878A
Other languages
French (fr)
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
AGA AB
Original Assignee
AGA AB
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by AGA AB filed Critical AGA AB
Application granted granted Critical
Publication of FR2052571A5 publication Critical patent/FR2052571A5/fr
Expired legal-status Critical Current

Links

Classifications

    • C—CHEMISTRY; METALLURGY
    • C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
    • C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
    • C23C14/00—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material
    • C23C14/22—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material characterised by the process of coating
    • C23C14/50—Substrate holders
    • C23C14/505—Substrate holders for rotation of the substrates

Landscapes

  • Chemical & Material Sciences (AREA)
  • Chemical Kinetics & Catalysis (AREA)
  • Engineering & Computer Science (AREA)
  • Materials Engineering (AREA)
  • Mechanical Engineering (AREA)
  • Metallurgy (AREA)
  • Organic Chemistry (AREA)
  • Physical Vapour Deposition (AREA)
FR7021878A 1969-06-13 1970-06-15 Expired FR2052571A5 (de)

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
SE840469A SE335294B (de) 1969-06-13 1969-06-13

Publications (1)

Publication Number Publication Date
FR2052571A5 true FR2052571A5 (de) 1971-04-09

Family

ID=20273982

Family Applications (1)

Application Number Title Priority Date Filing Date
FR7021878A Expired FR2052571A5 (de) 1969-06-13 1970-06-15

Country Status (6)

Country Link
JP (1) JPS4842352B1 (de)
CH (1) CH537986A (de)
DE (1) DE2029020B2 (de)
FR (1) FR2052571A5 (de)
GB (1) GB1317052A (de)
SE (1) SE335294B (de)

Families Citing this family (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US3783821A (en) * 1971-03-02 1974-01-08 K Willmott Planetary workholders
GB2010676B (en) * 1977-12-27 1982-05-19 Alza Corp Diffusional drug delivery device with block copolymer as drug carrier
US4276855A (en) * 1979-05-02 1981-07-07 Optical Coating Laboratory, Inc. Coating apparatus
DE102010032591A1 (de) 2010-07-23 2012-01-26 Leybold Optics Gmbh Vorrichtung und Verfahren zur Vakuumbeschichtung

Also Published As

Publication number Publication date
DE2029020A1 (de) 1971-01-07
SE335294B (de) 1971-05-17
GB1317052A (en) 1973-05-16
CH537986A (de) 1973-06-15
DE2029020B2 (de) 1973-03-29
JPS4842352B1 (de) 1973-12-12

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Legal Events

Date Code Title Description
TP Transmission of property
ST Notification of lapse