JPS4327084Y1 - - Google Patents
Info
- Publication number
- JPS4327084Y1 JPS4327084Y1 JP878366U JP878366U JPS4327084Y1 JP S4327084 Y1 JPS4327084 Y1 JP S4327084Y1 JP 878366 U JP878366 U JP 878366U JP 878366 U JP878366 U JP 878366U JP S4327084 Y1 JPS4327084 Y1 JP S4327084Y1
- Authority
- JP
- Japan
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Expired
Links
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP878366U JPS4327084Y1 (ja) | 1966-02-04 | 1966-02-04 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP878366U JPS4327084Y1 (ja) | 1966-02-04 | 1966-02-04 |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| JPS4327084Y1 true JPS4327084Y1 (ja) | 1968-11-09 |
Family
ID=31741282
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP878366U Expired JPS4327084Y1 (ja) | 1966-02-04 | 1966-02-04 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPS4327084Y1 (ja) |
Cited By (8)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS51135369A (en) * | 1975-05-19 | 1976-11-24 | Matsushita Electric Ind Co Ltd | Method of treating surfaces of semiconductor element |
| JPS56118347A (en) * | 1980-02-22 | 1981-09-17 | Hitachi Ltd | Drying device |
| JPS57142841U (ja) * | 1981-03-05 | 1982-09-07 | ||
| JPS57147381A (en) * | 1981-03-06 | 1982-09-11 | Hitachi Denshi Ltd | Delayed transmitting circuit of high frequency signal |
| JPS58111941U (ja) * | 1982-01-25 | 1983-07-30 | 株式会社日立製作所 | チヤツク |
| JPS6281030A (ja) * | 1985-10-03 | 1987-04-14 | Nec Kyushu Ltd | 半導体基板乾燥装置 |
| JPS62188323A (ja) * | 1986-02-14 | 1987-08-17 | Dainippon Screen Mfg Co Ltd | 基板の洗浄並びに乾燥方法及び装置 |
| JPH02201916A (ja) * | 1989-01-30 | 1990-08-10 | Dainippon Screen Mfg Co Ltd | 基板のレジスト除去洗浄方法及びその装置 |
-
1966
- 1966-02-04 JP JP878366U patent/JPS4327084Y1/ja not_active Expired
Cited By (8)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS51135369A (en) * | 1975-05-19 | 1976-11-24 | Matsushita Electric Ind Co Ltd | Method of treating surfaces of semiconductor element |
| JPS56118347A (en) * | 1980-02-22 | 1981-09-17 | Hitachi Ltd | Drying device |
| JPS57142841U (ja) * | 1981-03-05 | 1982-09-07 | ||
| JPS57147381A (en) * | 1981-03-06 | 1982-09-11 | Hitachi Denshi Ltd | Delayed transmitting circuit of high frequency signal |
| JPS58111941U (ja) * | 1982-01-25 | 1983-07-30 | 株式会社日立製作所 | チヤツク |
| JPS6281030A (ja) * | 1985-10-03 | 1987-04-14 | Nec Kyushu Ltd | 半導体基板乾燥装置 |
| JPS62188323A (ja) * | 1986-02-14 | 1987-08-17 | Dainippon Screen Mfg Co Ltd | 基板の洗浄並びに乾燥方法及び装置 |
| JPH02201916A (ja) * | 1989-01-30 | 1990-08-10 | Dainippon Screen Mfg Co Ltd | 基板のレジスト除去洗浄方法及びその装置 |