JPS57142841U - - Google Patents
Info
- Publication number
- JPS57142841U JPS57142841U JP3119481U JP3119481U JPS57142841U JP S57142841 U JPS57142841 U JP S57142841U JP 3119481 U JP3119481 U JP 3119481U JP 3119481 U JP3119481 U JP 3119481U JP S57142841 U JPS57142841 U JP S57142841U
- Authority
- JP
- Japan
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
Landscapes
- Drying Of Solid Materials (AREA)
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP3119481U JPS57142841U (ja) | 1981-03-05 | 1981-03-05 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP3119481U JPS57142841U (ja) | 1981-03-05 | 1981-03-05 |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| JPS57142841U true JPS57142841U (ja) | 1982-09-07 |
Family
ID=29828645
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP3119481U Pending JPS57142841U (ja) | 1981-03-05 | 1981-03-05 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPS57142841U (ja) |
Citations (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS4327084Y1 (ja) * | 1966-02-04 | 1968-11-09 | ||
| JPS5210069A (en) * | 1975-07-14 | 1977-01-26 | Seiko Epson Corp | Automatic apparatus for cleaning and drying wafer |
-
1981
- 1981-03-05 JP JP3119481U patent/JPS57142841U/ja active Pending
Patent Citations (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS4327084Y1 (ja) * | 1966-02-04 | 1968-11-09 | ||
| JPS5210069A (en) * | 1975-07-14 | 1977-01-26 | Seiko Epson Corp | Automatic apparatus for cleaning and drying wafer |