JPH1197466A - Package method of ic chip - Google Patents
Package method of ic chipInfo
- Publication number
- JPH1197466A JPH1197466A JP27344997A JP27344997A JPH1197466A JP H1197466 A JPH1197466 A JP H1197466A JP 27344997 A JP27344997 A JP 27344997A JP 27344997 A JP27344997 A JP 27344997A JP H1197466 A JPH1197466 A JP H1197466A
- Authority
- JP
- Japan
- Prior art keywords
- sealing frame
- chip
- sealing
- pcb substrate
- chips
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
Classifications
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L24/00—Arrangements for connecting or disconnecting semiconductor or solid-state bodies; Methods or apparatus related thereto
- H01L24/93—Batch processes
- H01L24/95—Batch processes at chip-level, i.e. with connecting carried out on a plurality of singulated devices, i.e. on diced chips
- H01L24/97—Batch processes at chip-level, i.e. with connecting carried out on a plurality of singulated devices, i.e. on diced chips the devices being connected to a common substrate, e.g. interposer, said common substrate being separable into individual assemblies after connecting
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L2224/00—Indexing scheme for arrangements for connecting or disconnecting semiconductor or solid-state bodies and methods related thereto as covered by H01L24/00
- H01L2224/01—Means for bonding being attached to, or being formed on, the surface to be connected, e.g. chip-to-package, die-attach, "first-level" interconnects; Manufacturing methods related thereto
- H01L2224/42—Wire connectors; Manufacturing methods related thereto
- H01L2224/47—Structure, shape, material or disposition of the wire connectors after the connecting process
- H01L2224/48—Structure, shape, material or disposition of the wire connectors after the connecting process of an individual wire connector
- H01L2224/4805—Shape
- H01L2224/4809—Loop shape
- H01L2224/48091—Arched
Abstract
Description
【0001】[0001]
【発明の属する技術分野】本発明はICチップのパッケ
ージ方法に関するものである。The present invention relates to a method for packaging an IC chip.
【0002】[0002]
【従来の技術】ICチップのパッケージはリードフレー
ムにICチップを搭載して樹脂でモールドするリード挿
入型が主流であったが、表面実装の普及と共に多くのパ
ッケージが開発されてきた。SOP、QFP、BGA、
CSP等が代表的なものであるが、本発明はBGA、C
SPに好適なICチップのパッケージ方法である。2. Description of the Related Art As a package of an IC chip, a lead insertion type in which an IC chip is mounted on a lead frame and molded with a resin is mainly used, but with the spread of surface mounting, many packages have been developed. SOP, QFP, BGA,
Although CSP and the like are typical, the present invention relates to BGA, C
This is an IC chip packaging method suitable for SP.
【0003】QFP(Quad Flat Pack package)は周辺
端子型の多端子パッケージであるが、更に多端子型のパ
ッケージとしてエリアアレイ端子型のBGA(Ball Gri
d Array )、小型化を進めたCSP(Chip Size Packag
e,Chip Scale Package)が実用化されてきている。A QFP (Quad Flat Pack package) is a peripheral terminal type multi-terminal package, and an area array terminal type BGA (Ball Gripper) is further provided as a multi-terminal type package.
d Array), miniaturized CSP (Chip Size Packag)
e, Chip Scale Package) has been put to practical use.
【0004】従来技術によるエリアアレイ端子型のIC
チップのパッケージ方法について説明する。図1はPC
B基板1の斜視図である。図中の12個の角部2はベア
チップを搭載する位置であり、PCB基板1上に形成さ
れた配線は省略してある。図2はICチップ3を搭載
(ダイボンディング)した斜視図である。ICチップ3
のボンディングパッドとPCB基板1に形成されたパッ
ド(共に不図示)はワイヤーボンディングにより接続さ
れる。図3は封止枠4を接着により固定した斜視図であ
る。封止枠4はパッケージを小型にするためのものであ
る。Conventional area array terminal type IC
A chip packaging method will be described. Figure 1 is a PC
FIG. 3 is a perspective view of a B substrate 1. In the figure, twelve corners 2 are positions where a bare chip is mounted, and wiring formed on the PCB substrate 1 is omitted. FIG. 2 is a perspective view in which the IC chip 3 is mounted (die bonding). IC chip 3
And the pads (both not shown) formed on the PCB substrate 1 are connected by wire bonding. FIG. 3 is a perspective view in which the sealing frame 4 is fixed by bonding. The sealing frame 4 is for reducing the size of the package.
【0005】図8は図3のPCB基板を切断治具にセッ
トしたA−A断面図である。切断治具5の上面には台座
6が固定され、台座6の上面にPCB基板1の下面が接
着剤9で接着されている。PCB基板1と封止枠4によ
り形成された凹部には、ICチップ3とボンディングさ
れたワイヤー7を保護するポッティング樹脂8が充填さ
れ熱硬化処理されている。図9は切断後のA−A断面図
である。封止枠4の外周に沿ってカッターで切断するこ
とにより12個のパッケージが完成する。10は切削溝
である。FIG. 8 is a sectional view taken along line AA of FIG. 3 in which the PCB substrate of FIG. 3 is set on a cutting jig. A pedestal 6 is fixed to the upper surface of the cutting jig 5, and the lower surface of the PCB substrate 1 is bonded to the upper surface of the pedestal 6 with an adhesive 9. A concave portion formed by the PCB substrate 1 and the sealing frame 4 is filled with a potting resin 8 for protecting the wire 7 bonded to the IC chip 3 and subjected to a thermosetting treatment. FIG. 9 is an AA sectional view after cutting. By cutting along the outer periphery of the sealing frame 4 with a cutter, 12 packages are completed. 10 is a cutting groove.
【0006】[0006]
【発明が解決しようとする課題】ICチップ毎に封止枠
4を使用するので接着、固定に工数が掛かることを含め
てコスト高になっている。(封止枠を使用しないでポッ
ティング樹脂の流れを防止するためのバリヤ印刷で封止
枠の代替とする方法もあるが、ポッティング樹脂の外周
が斜面になるためワイヤーを保護するためにはポッティ
ング樹脂の面積が大きくなり、結果としてパッケージが
大きくなる。また、ポッティング樹脂の高さにばらつき
が発生しやすく平均してパッケージが厚くなる。)Since the sealing frame 4 is used for each IC chip, the cost is high including the time and labor required for bonding and fixing. (Although there is a method to replace the sealing frame with barrier printing to prevent the flow of the potting resin without using the sealing frame, the outer periphery of the potting resin becomes a slope, so the potting resin is used to protect the wire. ), And as a result, the size of the package is increased, and the height of the potting resin is apt to vary, so that the package becomes thicker on average.)
【0007】封止枠が付いているとパッケージの小型化
の妨げになる。[0007] The presence of the sealing frame hinders miniaturization of the package.
【0008】[0008]
【課題を解決するための手段】多面取りの基板に複数個
のICチップを搭載する工程と、複数個のICチップを
樹脂封止するための封止枠を搭載する工程と、封止用樹
脂を供給し熱硬化させる工程と、個々の電子部品(IC
パッケージ)に分割する工程を有するICチップのパッ
ケージ方法において、封止枠を一体とする。A step of mounting a plurality of IC chips on a multi-chip substrate, a step of mounting a sealing frame for resin-sealing the plurality of IC chips, and a sealing resin And heat curing, and individual electronic components (IC
In the method of packaging an IC chip having a step of dividing the package into packages, the sealing frame is integrated.
【0009】個々の電子部品に分割する工程で封止枠を
除去する。[0009] The sealing frame is removed in the step of dividing into individual electronic components.
【0010】分割にレーザー光線を用いる。A laser beam is used for the division.
【0011】[0011]
【発明の実施の形態】以下、本発明の一実施形態につい
て説明する。図4は本発明に係わるPCB基板の斜視図
である。図中の角部12はベアチップを搭載する位置で
ある。エリア14はワイヤボンディング用のエリアであ
り、不図示であるが、多数の端子が集結されている。図
5はICチップ3をダイボンディングした斜視図であ
る。図6はICチップ3の一つにワイヤーボンディング
した斜視図である。ICチップ3のボンディングパッド
とPCB基板11に形成されたパッド(共に不図示)は
ワイヤー7により接続される。図7は封止枠15を接着
により固定した斜視図である。12個のICチップ用の
封止枠は一体に形成され12個の穴が形成されている。DESCRIPTION OF THE PREFERRED EMBODIMENTS One embodiment of the present invention will be described below. FIG. 4 is a perspective view of a PCB substrate according to the present invention. A corner 12 in the figure is a position where a bare chip is mounted. The area 14 is an area for wire bonding, and although not shown, a large number of terminals are gathered. FIG. 5 is a perspective view in which the IC chip 3 is die-bonded. FIG. 6 is a perspective view in which one of the IC chips 3 is wire-bonded. The bonding pads of the IC chip 3 and the pads (both not shown) formed on the PCB substrate 11 are connected by wires 7. FIG. 7 is a perspective view in which the sealing frame 15 is fixed by bonding. The sealing frames for the 12 IC chips are integrally formed and have 12 holes.
【0012】図10は図7のPCB基板11を切断治具
にセットしたB−B断面図である。切断治具16の上面
には台座17が固定され、台座17の上面にPCB基板
11の下面が接着剤18で接着されている。PCB基板
11と封止枠15により形成された凹部には、ICチッ
プ3とボンディングされたワイヤー7を保護するポッテ
ィング樹脂8が充填され熱効果処理されている。図11
は切断後のB−B断面図である。封止枠15の穴の内周
に沿ってカッターで切断することにより12個のパッケ
ージが完成する。19は切削溝である。FIG. 10 is a sectional view taken along the line BB of FIG. 7 in which the PCB 11 is set on a cutting jig. A pedestal 17 is fixed to the upper surface of the cutting jig 16, and the lower surface of the PCB substrate 11 is bonded to the upper surface of the pedestal 17 with an adhesive 18. The recess formed by the PCB substrate 11 and the sealing frame 15 is filled with a potting resin 8 for protecting the wires 7 bonded to the IC chip 3 and subjected to a heat effect treatment. FIG.
FIG. 7 is a sectional view taken along line BB after cutting. By cutting along the inner periphery of the hole of the sealing frame 15 with a cutter, 12 packages are completed. 19 is a cutting groove.
【0013】図12は完成したICパッケージ20をP
CB基板11の裏側から見た斜視図であり、一点鎖線で
示した外形は従来技術によるICパッケージである。本
実施形態のICパッケージが小型化を達成していること
が判る。FIG. 12 shows the completed IC package 20 as P
FIG. 4 is a perspective view of the CB substrate 11 as viewed from the back side, and an external shape indicated by a dashed line is an IC package according to the related art. It can be seen that the IC package of the present embodiment has achieved miniaturization.
【0014】前記実施形態では封止枠を完全に除去して
いるが、封止枠の各桟部の中央を切断すれば、それぞれ
に封止枠が付いている従来技術と同様のICパッケージ
とすることができる。In the above-described embodiment, the sealing frame is completely removed. However, if the center of each cross section of the sealing frame is cut, an IC package similar to the prior art having a sealing frame is provided. can do.
【0015】分割するにはダイシングソーが一般的であ
るが、前述のように台座に接着等で固定して切断しなけ
ればならない。封止枠は使い捨てになってしまう。前記
実施形態のように封止枠が一体で、封止枠の内側をくり
ぬくように切断する場合は、レーザー光線を用いると一
つ一つ切り離すことができるので有効である。封止枠の
適宜場所を固定するだけで台座に接着する必要が無いの
で接着する工程を省略することができる。本発明におい
ては炭酸ガスレーザーが有効である。Although a dicing saw is generally used for the division, it must be cut and fixed to the pedestal with an adhesive or the like as described above. The sealing frame becomes disposable. In the case where the sealing frame is integrally formed as in the above-described embodiment and the inside of the sealing frame is cut out, it is effective to use a laser beam because the laser beam can be cut off one by one. Since it is not necessary to adhere to the pedestal only by fixing an appropriate place of the sealing frame, the step of attaching can be omitted. In the present invention, a carbon dioxide laser is effective.
【0016】封止枠を残して切断すれば、封止枠の再生
が可能であり、省資源になる。If the cutting is performed while leaving the sealing frame, the sealing frame can be regenerated and resources can be saved.
【0017】[0017]
【発明の効果】封止枠を一体にすることにより、封止枠
の取付が容易になり、また、取付の精度を向上すること
ができる。By integrating the sealing frame, the mounting of the sealing frame is facilitated and the mounting accuracy can be improved.
【0018】封止枠を個々に使用する場合と比較すると
封止枠が安価に出来る。PCB基板自体も小さくできる
ので安価にできる。The cost of the sealing frame can be reduced as compared with the case where the sealing frames are used individually. Since the PCB substrate itself can be made small, it can be inexpensive.
【0019】封止枠を使用してポッティングの精度を向
上しておき、封止後は封止枠を除去するので小型で安定
したICパッケージが製造できる。Since the potting accuracy is improved by using a sealing frame and the sealing frame is removed after sealing, a small and stable IC package can be manufactured.
【0020】分割にレーザー光線を使用することにより
分割工程が容易になり、また、封止枠の再生が可能とな
り、省資源になる。By using a laser beam for the division, the division step is facilitated, and the sealing frame can be regenerated, thereby saving resources.
【図1】PCB基板1の斜視図FIG. 1 is a perspective view of a PCB substrate 1.
【図2】ICチップを搭載(ダイボンディング)した斜
視図FIG. 2 is a perspective view in which an IC chip is mounted (die bonding).
【図3】封止枠4を接着により固定した斜視図FIG. 3 is a perspective view in which a sealing frame 4 is fixed by bonding.
【図4】本発明に係わるPCB基板の斜視図FIG. 4 is a perspective view of a PCB substrate according to the present invention.
【図5】ICチップをダイボンディングした斜視図FIG. 5 is a perspective view in which an IC chip is die-bonded.
【図6】ICチップの一つにワイヤーボンディングした
斜視図FIG. 6 is a perspective view of wire bonding to one of the IC chips.
【図7】封止枠を接着により固定した斜視図FIG. 7 is a perspective view in which a sealing frame is fixed by bonding.
【図8】図3のPCB基板を切断治具にセットしたA−
A断面図FIG. 8 is a view showing A- in which the PCB substrate of FIG. 3 is set in a cutting jig;
A sectional view
【図9】切断後のA−A断面図FIG. 9 is a sectional view taken along the line AA after cutting.
【図10】図7のPCB基板11を切断治具にセットし
たB−B断面図FIG. 10 is a sectional view taken along the line BB of FIG. 7 with the PCB substrate 11 set on a cutting jig;
【図11】切断後のB−B断面図FIG. 11 is a sectional view taken along the line BB after cutting;
【図12】完成したICパッケージをPCB基板の裏側
から見た斜視図FIG. 12 is a perspective view of the completed IC package viewed from the back side of the PCB substrate.
1 PCB基板 2 角部 3 ICチップ 4 封止枠 5 切断治具 6 台座 7 ワイヤー 8 ポッティング樹脂 9 接着剤 10 切削溝 11 PCB基板 12 角部 14 ワイヤーボンディング用エリア 15 封止枠 16 切断治具 17 台座 18 接着剤 19 切削溝 20 完成したICパッケージ DESCRIPTION OF SYMBOLS 1 PCB board 2 Corner part 3 IC chip 4 Sealing frame 5 Cutting jig 6 Pedestal 7 Wire 8 Potting resin 9 Adhesive 10 Cutting groove 11 PCB board 12 Corner part 14 Wire bonding area 15 Sealing frame 16 Cutting jig 17 Pedestal 18 Adhesive 19 Cutting groove 20 Completed IC package
Claims (3)
搭載する工程と、複数個のICチップを樹脂封止するた
めの封止枠を搭載する工程と、封止用樹脂を供給し熱硬
化させる工程と、個々の電子部品(ICパッケージ)に
分割する工程を有するICチップのパッケージ方法にお
いて、封止枠が一体であることを特徴とするのICチッ
プのパッケージ方法。1. A step of mounting a plurality of IC chips on a multi-chip substrate, a step of mounting a sealing frame for resin-sealing the plurality of IC chips, and a step of supplying a sealing resin to heat. A method for packaging an IC chip, comprising a step of curing and a step of dividing the electronic chip into individual electronic components (IC packages), wherein the sealing frame is integrated.
を除去することを特徴とする請求項1記載のICチップ
のパッケージ方法。2. The method for packaging an IC chip according to claim 1, wherein the sealing frame is removed in the step of dividing into individual electronic components.
とする請求項2記載のICチップのパッケージ方法。3. The method for packaging an IC chip according to claim 2, wherein a laser beam is used for the division.
Priority Applications (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP27344997A JPH1197466A (en) | 1997-09-18 | 1997-09-18 | Package method of ic chip |
Applications Claiming Priority (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP27344997A JPH1197466A (en) | 1997-09-18 | 1997-09-18 | Package method of ic chip |
Publications (1)
Publication Number | Publication Date |
---|---|
JPH1197466A true JPH1197466A (en) | 1999-04-09 |
Family
ID=17528076
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
JP27344997A Pending JPH1197466A (en) | 1997-09-18 | 1997-09-18 | Package method of ic chip |
Country Status (1)
Country | Link |
---|---|
JP (1) | JPH1197466A (en) |
Cited By (5)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
EP1143508A2 (en) * | 2000-03-23 | 2001-10-10 | Infineon Technologies AG | Apparatus for packaging electronic components |
WO2008006299A1 (en) * | 2006-07-05 | 2008-01-17 | Yuejun Yan | Method for packing resin coating on a substrate |
JP2010010275A (en) * | 2008-06-25 | 2010-01-14 | Hitachi Chem Co Ltd | Semiconductor device, semiconductor mounting wiring board and manufacturing method thereof |
JP2010010276A (en) * | 2008-06-25 | 2010-01-14 | Hitachi Chem Co Ltd | Substrate for mounting semiconductor element and manufacturing method thereof |
JP2017224687A (en) * | 2016-06-14 | 2017-12-21 | 株式会社ジェイデバイス | Method for manufacturing semiconductor package |
-
1997
- 1997-09-18 JP JP27344997A patent/JPH1197466A/en active Pending
Cited By (7)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
EP1143508A2 (en) * | 2000-03-23 | 2001-10-10 | Infineon Technologies AG | Apparatus for packaging electronic components |
EP1143508A3 (en) * | 2000-03-23 | 2004-06-23 | Infineon Technologies AG | Apparatus for packaging electronic components |
WO2008006299A1 (en) * | 2006-07-05 | 2008-01-17 | Yuejun Yan | Method for packing resin coating on a substrate |
JP2010010275A (en) * | 2008-06-25 | 2010-01-14 | Hitachi Chem Co Ltd | Semiconductor device, semiconductor mounting wiring board and manufacturing method thereof |
JP2010010276A (en) * | 2008-06-25 | 2010-01-14 | Hitachi Chem Co Ltd | Substrate for mounting semiconductor element and manufacturing method thereof |
JP2017224687A (en) * | 2016-06-14 | 2017-12-21 | 株式会社ジェイデバイス | Method for manufacturing semiconductor package |
CN107507779A (en) * | 2016-06-14 | 2017-12-22 | 株式会社吉帝伟士 | The manufacture method of semiconductor package part |
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