JPH1187552A - Semiconductor device - Google Patents

Semiconductor device

Info

Publication number
JPH1187552A
JPH1187552A JP9248625A JP24862597A JPH1187552A JP H1187552 A JPH1187552 A JP H1187552A JP 9248625 A JP9248625 A JP 9248625A JP 24862597 A JP24862597 A JP 24862597A JP H1187552 A JPH1187552 A JP H1187552A
Authority
JP
Japan
Prior art keywords
semiconductor device
semiconductor chip
solder
copper foil
exposed
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Pending
Application number
JP9248625A
Other languages
Japanese (ja)
Inventor
Takashi Nakajima
高士 中島
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Mitsui High Tec Inc
Original Assignee
Mitsui High Tec Inc
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Mitsui High Tec Inc filed Critical Mitsui High Tec Inc
Priority to JP9248625A priority Critical patent/JPH1187552A/en
Publication of JPH1187552A publication Critical patent/JPH1187552A/en
Pending legal-status Critical Current

Links

Classifications

    • HELECTRICITY
    • H01ELECTRIC ELEMENTS
    • H01LSEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L2224/00Indexing scheme for arrangements for connecting or disconnecting semiconductor or solid-state bodies and methods related thereto as covered by H01L24/00
    • H01L2224/01Means for bonding being attached to, or being formed on, the surface to be connected, e.g. chip-to-package, die-attach, "first-level" interconnects; Manufacturing methods related thereto
    • H01L2224/26Layer connectors, e.g. plate connectors, solder or adhesive layers; Manufacturing methods related thereto
    • H01L2224/31Structure, shape, material or disposition of the layer connectors after the connecting process
    • H01L2224/32Structure, shape, material or disposition of the layer connectors after the connecting process of an individual layer connector
    • H01L2224/321Disposition
    • H01L2224/32151Disposition the layer connector connecting between a semiconductor or solid-state body and an item not being a semiconductor or solid-state body, e.g. chip-to-substrate, chip-to-passive
    • H01L2224/32221Disposition the layer connector connecting between a semiconductor or solid-state body and an item not being a semiconductor or solid-state body, e.g. chip-to-substrate, chip-to-passive the body and the item being stacked
    • H01L2224/32225Disposition the layer connector connecting between a semiconductor or solid-state body and an item not being a semiconductor or solid-state body, e.g. chip-to-substrate, chip-to-passive the body and the item being stacked the item being non-metallic, e.g. insulating substrate with or without metallisation
    • HELECTRICITY
    • H01ELECTRIC ELEMENTS
    • H01LSEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L2224/00Indexing scheme for arrangements for connecting or disconnecting semiconductor or solid-state bodies and methods related thereto as covered by H01L24/00
    • H01L2224/01Means for bonding being attached to, or being formed on, the surface to be connected, e.g. chip-to-package, die-attach, "first-level" interconnects; Manufacturing methods related thereto
    • H01L2224/42Wire connectors; Manufacturing methods related thereto
    • H01L2224/47Structure, shape, material or disposition of the wire connectors after the connecting process
    • H01L2224/48Structure, shape, material or disposition of the wire connectors after the connecting process of an individual wire connector
    • H01L2224/4805Shape
    • H01L2224/4809Loop shape
    • H01L2224/48095Kinked
    • HELECTRICITY
    • H01ELECTRIC ELEMENTS
    • H01LSEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L2224/00Indexing scheme for arrangements for connecting or disconnecting semiconductor or solid-state bodies and methods related thereto as covered by H01L24/00
    • H01L2224/01Means for bonding being attached to, or being formed on, the surface to be connected, e.g. chip-to-package, die-attach, "first-level" interconnects; Manufacturing methods related thereto
    • H01L2224/42Wire connectors; Manufacturing methods related thereto
    • H01L2224/47Structure, shape, material or disposition of the wire connectors after the connecting process
    • H01L2224/48Structure, shape, material or disposition of the wire connectors after the connecting process of an individual wire connector
    • H01L2224/481Disposition
    • H01L2224/48151Connecting between a semiconductor or solid-state body and an item not being a semiconductor or solid-state body, e.g. chip-to-substrate, chip-to-passive
    • H01L2224/48221Connecting between a semiconductor or solid-state body and an item not being a semiconductor or solid-state body, e.g. chip-to-substrate, chip-to-passive the body and the item being stacked
    • H01L2224/48225Connecting between a semiconductor or solid-state body and an item not being a semiconductor or solid-state body, e.g. chip-to-substrate, chip-to-passive the body and the item being stacked the item being non-metallic, e.g. insulating substrate with or without metallisation
    • H01L2224/48227Connecting between a semiconductor or solid-state body and an item not being a semiconductor or solid-state body, e.g. chip-to-substrate, chip-to-passive the body and the item being stacked the item being non-metallic, e.g. insulating substrate with or without metallisation connecting the wire to a bond pad of the item
    • HELECTRICITY
    • H01ELECTRIC ELEMENTS
    • H01LSEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L2224/00Indexing scheme for arrangements for connecting or disconnecting semiconductor or solid-state bodies and methods related thereto as covered by H01L24/00
    • H01L2224/01Means for bonding being attached to, or being formed on, the surface to be connected, e.g. chip-to-package, die-attach, "first-level" interconnects; Manufacturing methods related thereto
    • H01L2224/42Wire connectors; Manufacturing methods related thereto
    • H01L2224/47Structure, shape, material or disposition of the wire connectors after the connecting process
    • H01L2224/49Structure, shape, material or disposition of the wire connectors after the connecting process of a plurality of wire connectors
    • H01L2224/491Disposition
    • H01L2224/4912Layout
    • H01L2224/49171Fan-out arrangements
    • HELECTRICITY
    • H01ELECTRIC ELEMENTS
    • H01LSEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L2224/00Indexing scheme for arrangements for connecting or disconnecting semiconductor or solid-state bodies and methods related thereto as covered by H01L24/00
    • H01L2224/73Means for bonding being of different types provided for in two or more of groups H01L2224/10, H01L2224/18, H01L2224/26, H01L2224/34, H01L2224/42, H01L2224/50, H01L2224/63, H01L2224/71
    • H01L2224/732Location after the connecting process
    • H01L2224/73251Location after the connecting process on different surfaces
    • H01L2224/73265Layer and wire connectors
    • HELECTRICITY
    • H01ELECTRIC ELEMENTS
    • H01LSEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L2924/00Indexing scheme for arrangements or methods for connecting or disconnecting semiconductor or solid-state bodies as covered by H01L24/00
    • H01L2924/15Details of package parts other than the semiconductor or other solid state devices to be connected
    • H01L2924/181Encapsulation
    • HELECTRICITY
    • H05ELECTRIC TECHNIQUES NOT OTHERWISE PROVIDED FOR
    • H05KPRINTED CIRCUITS; CASINGS OR CONSTRUCTIONAL DETAILS OF ELECTRIC APPARATUS; MANUFACTURE OF ASSEMBLAGES OF ELECTRICAL COMPONENTS
    • H05K3/00Apparatus or processes for manufacturing printed circuits
    • H05K3/30Assembling printed circuits with electric components, e.g. with resistor
    • H05K3/32Assembling printed circuits with electric components, e.g. with resistor electrically connecting electric components or wires to printed circuits
    • H05K3/34Assembling printed circuits with electric components, e.g. with resistor electrically connecting electric components or wires to printed circuits by soldering
    • H05K3/341Surface mounted components
    • H05K3/3431Leadless components
    • H05K3/3436Leadless components having an array of bottom contacts, e.g. pad grid array or ball grid array components
    • HELECTRICITY
    • H05ELECTRIC TECHNIQUES NOT OTHERWISE PROVIDED FOR
    • H05KPRINTED CIRCUITS; CASINGS OR CONSTRUCTIONAL DETAILS OF ELECTRIC APPARATUS; MANUFACTURE OF ASSEMBLAGES OF ELECTRICAL COMPONENTS
    • H05K3/00Apparatus or processes for manufacturing printed circuits
    • H05K3/40Forming printed elements for providing electric connections to or between printed circuits
    • H05K3/4092Integral conductive tabs, i.e. conductive parts partly detached from the substrate

Abstract

PROBLEM TO BE SOLVED: To provide a semiconductor device which is hardly affected by α-rays emitted from a solder by a method wherein an electrical connection part where a wiring pattern is exposed from the backside of a board is formed through a through-hole on a board at a position outside a region where a semiconductor chip is mounted. SOLUTION: A semiconductor device mounted with a semiconductor chip 3 and a mother board 10 are connected together by connecting a copper foil 6 exposed through a via V to a semiconductor device connecting pad 11, which is installed to the surface of the board 10, with a cream solder 20. The cream solder 20 is previously applied to the semiconductor device connecting pad 11, and a soldering operation is carried out through a method where the semiconductor device is mounted on the board 10 aligning the semiconductor device connecting pad 11 with the via V, and a prescribed reflow process is carried out. As mentioned above, a soldering operation is carried out outside a region where the semiconductor chip 3 is mounted, so that semiconductor chip 3 is less affected by α-rays emitted from a solder.

Description

【発明の詳細な説明】DETAILED DESCRIPTION OF THE INVENTION

【0001】[0001]

【発明の属する技術分野】本発明は、半導体装置に関
し、特に、半導体チップの搭載領域外に半田付けのため
の電気的接続部位を設けることにより、半田が放出する
α線の影響を抑制することができる半導体装置に関す
る。
BACKGROUND OF THE INVENTION 1. Field of the Invention The present invention relates to a semiconductor device, and more particularly to a method for suppressing the influence of alpha rays emitted from solder by providing an electrical connection site for soldering outside a semiconductor chip mounting area. The present invention relates to a semiconductor device that can be used.

【0002】[0002]

【従来の技術】電気、電子部品の高性能化に伴い半導体
装置の高集積化および高密度化が強く望まれており、こ
れに対応して、多ピン用の半導体装置のパッケージ構造
は、チップの二辺にボンディングパッドを有する構造か
ら、四辺のすべてにボンディングパッドを有する構造へ
と変化してきた。
2. Description of the Related Art Higher integration and higher density of semiconductor devices are strongly demanded along with higher performance of electric and electronic parts. Has been changed from a structure having bonding pads on two sides to a structure having bonding pads on all four sides.

【0003】さらに、多ピン化対策として、例えば、米
国特許第5148265号では、半導体チップの表面
(機能面側)にエラストマー層を介して、配線パターン
を形成した絶縁性フィルムを配置し、さらに絶縁性フィ
ルムの表面に複数の半田ボールを格子状に配置したBG
A(ボールグリッドアレイ)と指称される半導体装置が
提案されている。
Further, as a countermeasure against the increase in the number of pins, for example, in US Pat. BG with multiple solder balls arranged in a grid on the surface of a conductive film
A semiconductor device called A (ball grid array) has been proposed.

【0004】上記のようなBGA型半導体装置では、当
該半導体装置中で半導体チップの占める部分が多いた
め、チップサイズパッケージと称されており、パッケー
ジの小型化、軽量化が実現される。
In the above-mentioned BGA type semiconductor device, since a semiconductor chip occupies a large portion in the semiconductor device, it is called a chip size package, and the size and weight of the package can be reduced.

【0005】[0005]

【発明が解決しようとする課題】しかし、上記のような
BGAでメモリーデバイスを構成すると、格子状に配置
された半田ボールが放出するα線が半導体チップに影響
を与え、メモリー内容が失われる場合がある。
However, when a memory device is configured with the BGA as described above, the α-rays emitted from the solder balls arranged in a grid form affect the semiconductor chip, and the memory contents are lost. There is.

【0006】特に、半導体チップの下部に配置された半
田ボールからの影響を受けやすいため、従来から当該部
分の半田量を極力抑えることが望まれている。
In particular, since it is susceptible to the influence of the solder balls disposed below the semiconductor chip, it has been conventionally desired to minimize the amount of solder in that portion.

【0007】そこで、本発明は、半田から放出されるα
線の影響を受けにくいチップサイズパッケージの半導体
装置を提供することを目的とする。
[0007] Accordingly, the present invention provides a method for producing α
It is an object of the present invention to provide a semiconductor device of a chip size package that is hardly affected by lines.

【0008】[0008]

【課題を解決するための手段】上記目的を達成するた
め、請求項1記載の発明は、配線パターンが形成された
基板と、前記基板の表面に搭載され、前記配線パターン
に接続された半導体チップと、前記基板の前記半導体チ
ップが搭載されている領域外に形成された貫通孔を介し
て、該基板の裏面から前記配線パターンが露呈した電気
的接続部位とを具備することを特徴とする。
According to one aspect of the present invention, there is provided a substrate having a wiring pattern formed thereon, and a semiconductor chip mounted on a surface of the substrate and connected to the wiring pattern. And an electrical connection portion where the wiring pattern is exposed from the back surface of the substrate via a through hole formed outside a region of the substrate on which the semiconductor chip is mounted.

【0009】また、請求項2記載の発明は、請求項1記
載の発明において、前記基板の側面から前記配線パター
ンが露呈した第2の電気的接続部位を具備することを特
徴とする。
According to a second aspect of the present invention, in the first aspect of the present invention, the semiconductor device further comprises a second electrical connection portion in which the wiring pattern is exposed from a side surface of the substrate.

【0010】また、請求項3記載の発明は、請求項1ま
たは請求項2記載の発明において、前記基板は、半田ボ
ールを具備しないことを特徴とする。
According to a third aspect of the present invention, in the first or second aspect, the substrate is not provided with a solder ball.

【0011】[0011]

【発明の実施の形態】以下、本発明に係る半導体装置の
一実施の形態を添付図面を参照して詳細に説明する。
DETAILED DESCRIPTION OF THE PREFERRED EMBODIMENTS One embodiment of a semiconductor device according to the present invention will be described below in detail with reference to the accompanying drawings.

【0012】まず、図3を使用して本発明の概要を説明
する。図3は、本発明に係る半導体装置の構造およびマ
ザーボードに半田付けした状態を示す断面図である。
First, an outline of the present invention will be described with reference to FIG. FIG. 3 is a cross-sectional view showing the structure of the semiconductor device according to the present invention and a state where it is soldered to a motherboard.

【0013】本発明は、同図に示すように、半導体チッ
プ3が搭載されている領域外に、当該半導体チップ3と
ワイヤー2で接続された銅箔6が露呈するようにヴィア
Vを形成し、この露呈した銅箔6とマザーボード10に
設けられた半導体装置接続用パッド11をクリーム半田
20で接続することにより、半田から放出されるα線の
影響を受けにくくするものである。
According to the present invention, as shown in FIG. 1, a via V is formed outside a region where the semiconductor chip 3 is mounted so that the copper foil 6 connected to the semiconductor chip 3 by the wire 2 is exposed. By connecting the exposed copper foil 6 and the semiconductor device connection pads 11 provided on the motherboard 10 with cream solder 20, the influence of α rays emitted from the solder is reduced.

【0014】以下、上述した本発明に係る半導体装置の
構造をさらに詳細に説明する。
Hereinafter, the structure of the semiconductor device according to the present invention will be described in more detail.

【0015】図1は、本発明に係る半導体装置の構造を
示す上面図である。同図に示すように、本発明に係る半
導体装置は、当該装置の機能部となる半導体チップ3
と、銅箔6をソルダーレジスト5から露呈させるウィン
ドウWと、半導体チップ3とウィンドウWから露呈する
銅箔6を接続するワイヤー2と、半導体チップ3、ウィ
ンドウWおよびワイヤー2を封止するモールド樹脂1
と、銅箔6を被覆するソルダーレジスト5を具備し、次
のように配置される。
FIG. 1 is a top view showing the structure of a semiconductor device according to the present invention. As shown in FIG. 1, a semiconductor device according to the present invention includes a semiconductor chip 3 serving as a functional unit of the device.
A window W for exposing the copper foil 6 from the solder resist 5, a wire 2 connecting the semiconductor chip 3 and the copper foil 6 exposed from the window W, and a mold resin for sealing the semiconductor chip 3, the window W and the wire 2 1
And a solder resist 5 covering the copper foil 6, and are arranged as follows.

【0016】半導体チップ3は、装置の中央に搭載さ
れ、その周囲に当該半導体チップの出力端子数に相当す
る数のウィンドウWが形成される。当該各ウィンドウW
から露呈する銅箔6は所定の配線パターンを形成してお
り、当該配線パターンの先端がモールド樹脂1の外部に
半田付け用端子50として形成される。
The semiconductor chip 3 is mounted at the center of the device, and the number of windows W corresponding to the number of output terminals of the semiconductor chip is formed around the semiconductor chip 3. Each window W
Form a predetermined wiring pattern, and the tip of the wiring pattern is formed as a soldering terminal 50 outside the mold resin 1.

【0017】この半田付け用端子50は、図1に示すよ
うに、各端子間のピッチが小さくなるように千鳥状に配
置され、多数の出力端子を形成する。この千鳥状に配置
された各端子間のピッチは、クリーム半田の印刷限界で
ある0.4mmを考慮し、0.5mmピッチとすること
が好ましい。
As shown in FIG. 1, the soldering terminals 50 are arranged in a staggered manner so that the pitch between the terminals is small, and form a large number of output terminals. The pitch between the terminals arranged in a zigzag pattern is preferably 0.5 mm in consideration of the printing limit of cream solder of 0.4 mm.

【0018】各半田付け用端子50は、半田付けの際に
半田との接触面が多くなるように上面に露呈させてお
き、半田付け用端子50やウィンドウW等の外部に露呈
させる必要がある部分以外の銅箔6はソルダーレジスト
5で被覆する。
Each soldering terminal 50 must be exposed on the upper surface so as to increase the contact surface with the solder at the time of soldering, and must be exposed to the outside such as the soldering terminal 50 and the window W. The copper foil 6 other than the portion is covered with the solder resist 5.

【0019】図2は、図1に示す半導体装置のA−A’
断面の構造を示す断面図である。同図に示すように、図
1に示す半導体装置では、絶縁性フィルム7上に銅箔6
が所定のパターンを形成して配設され、その上面をソル
ダーレジスト5が被覆し、当該ソルダーレジストの表面
にAgペースト4を塗布して半導体チップ3が搭載され
た構造となっている。
FIG. 2 is a sectional view of the semiconductor device shown in FIG.
It is sectional drawing which shows the structure of a cross section. As shown in FIG. 1, in the semiconductor device shown in FIG.
Are formed in a predetermined pattern, the upper surface thereof is covered with a solder resist 5, and the semiconductor chip 3 is mounted by applying an Ag paste 4 on the surface of the solder resist.

【0020】そして、絶縁性フィルム7には、銅箔6を
底面側に露呈させるためのヴィアVが形成される。
In the insulating film 7, a via V for exposing the copper foil 6 to the bottom surface side is formed.

【0021】上記のような構造を有する半導体装置をマ
ザーボードに実装すると図3のようになる。前述したよ
うに、本発明に係る半導体装置とマザーボード10との
接続は、ヴィアVから露呈した銅箔6とマザーボード1
0の表面に設けられた半導体装置接続用パッド11とを
クリーム半田20で接続することにより行われる。
FIG. 3 shows a semiconductor device having the above structure mounted on a motherboard. As described above, the connection between the semiconductor device according to the present invention and the motherboard 10 is performed by using the copper foil 6 exposed from the via V and the motherboard 1.
This is performed by connecting the semiconductor device connection pads 11 provided on the surface of the “0” with the cream solder 20.

【0022】このクリーム半田20は、予め半導体装置
接続用パッド11に塗布されており、半田付けは、当該
半導体装置接続用パッドの位置とヴィアVの位置とを合
わせてマザーボードに半導体装置を載置し、所定のリフ
ロー工程を経て行われる。
The cream solder 20 is applied to the semiconductor device connection pads 11 in advance, and the soldering is performed by placing the semiconductor device on the motherboard by matching the positions of the semiconductor device connection pads and the positions of the vias V. Then, it is performed through a predetermined reflow process.

【0023】このように、本発明では、半導体チップが
搭載された領域外で半田付けが行われるように構成して
いるため、半田から放出されるα線の影響を少なくする
ことができる。
As described above, according to the present invention, since the soldering is performed outside the region where the semiconductor chip is mounted, the influence of α rays emitted from the solder can be reduced.

【0024】また、BGA型半導体装置のように半田ボ
ールを使用しないため、半田ボールの形成に関するコス
トを削減できるとともに、パッケージの実装高さを低く
することができる。
Further, since solder balls are not used unlike the BGA type semiconductor device, the cost for forming the solder balls can be reduced, and the mounting height of the package can be reduced.

【0025】次に、以上説明したような本発明に係る半
導体装置の製造方法を説明する。
Next, a method for manufacturing the semiconductor device according to the present invention as described above will be described.

【0026】まず、図4は、本発明に係る半導体装置の
銅箔形成工程を示す断面図である。同図に示すように、
ポリイミドテープからなる絶縁性フィルム7の表面に銅
箔6を貼着する。
First, FIG. 4 is a sectional view showing a step of forming a copper foil of a semiconductor device according to the present invention. As shown in the figure,
A copper foil 6 is attached to the surface of an insulating film 7 made of a polyimide tape.

【0027】そして、この表面にフォトレジストを塗布
しフォトリソグラフィーにより、パターニングし、図5
に示すようなレジストパターンRを形成する。図5は、
図4に示す銅箔部にレジストパターンが形成された状態
を示す断面図である。
Then, a photoresist is applied to the surface and patterned by photolithography.
A resist pattern R as shown in FIG. FIG.
FIG. 5 is a cross-sectional view showing a state where a resist pattern is formed on the copper foil part shown in FIG. 4.

【0028】そして、レジストパターンRから露呈した
銅箔6をエッチングし、所定の配線パターンを形成す
る。図6は、図5に示す銅箔に配線パターンが形成され
た状態を示す断面図である。
Then, the copper foil 6 exposed from the resist pattern R is etched to form a predetermined wiring pattern. FIG. 6 is a sectional view showing a state in which a wiring pattern is formed on the copper foil shown in FIG.

【0029】その後、絶縁性フィルム7の裏側表面にフ
ォトレジストを塗布し、フォトリソグラフィーを行って
レジストパターンを形成し、これをマスクとして絶縁性
フィルム7をエッチングし、図7に示すように半田づけ
が行われる領域にヴィアVを形成する。図7は、図6に
示す絶縁性フィルムにヴィアが形成された状態を示す断
面図である。
Thereafter, a photoresist is applied to the back surface of the insulating film 7 and photolithography is performed to form a resist pattern. Using the resist pattern as a mask, the insulating film 7 is etched and soldered as shown in FIG. A via V is formed in a region where the etching is performed. FIG. 7 is a cross-sectional view showing a state where vias are formed in the insulating film shown in FIG.

【0030】そして、図8に示すように銅箔6の表面全
体をソルダーレジスト5で被覆する。図8は、図7に示
す銅箔の表面がソルダーレジストで被覆された状態を示
す断面図である。
Then, as shown in FIG. 8, the entire surface of the copper foil 6 is covered with the solder resist 5. FIG. 8 is a cross-sectional view showing a state where the surface of the copper foil shown in FIG. 7 is covered with a solder resist.

【0031】そして、ソルダーレジスト5の表面にフォ
トレジストを塗布し、フォトリソグラフィーを行ってレ
ジストパターンRを形成する。図9は、図8に示すソル
ダーレジスト表面にレジストパターンが形成された状態
を示す断面図である。
Then, a photoresist is applied to the surface of the solder resist 5 and photolithography is performed to form a resist pattern R. FIG. 9 is a sectional view showing a state where a resist pattern is formed on the surface of the solder resist shown in FIG.

【0032】その後、上記レジストパターンRををマス
クとしてソルダーレジスト5をエッチングし、図10に
示すようにワイヤーが接続される領域にウィンドウWを
形成し、半田付け用端子を形成する領域の銅箔6を露呈
させる。図10は、図9に示すソルダーレジストにウィ
ンドウおよび銅箔露呈部が形成された状態を示す断面図
である。
Thereafter, using the resist pattern R as a mask, the solder resist 5 is etched to form a window W in a region where a wire is connected as shown in FIG. Expose 6. FIG. 10 is a cross-sectional view showing a state in which a window and a copper foil exposed portion are formed in the solder resist shown in FIG.

【0033】そして、ソルダーレジストから露呈した銅
箔にNi/Auメッキを施した後、図11に示すように
ソルダーレジストの上面にAgペースト4を塗布して半
導体チップ3を搭載し、半導体チップ3とウィンドウW
から露呈する銅箔6をワイヤーで接続する。図11は、
図10に示すソルダーレジスト上に半導体チップが搭載
された状態を示す断面図である。
Then, after Ni / Au plating is applied to the copper foil exposed from the solder resist, as shown in FIG. 11, an Ag paste 4 is applied on the upper surface of the solder resist, and the semiconductor chip 3 is mounted. And window W
Are connected by a wire. FIG.
FIG. 11 is a cross-sectional view illustrating a state where a semiconductor chip is mounted on the solder resist illustrated in FIG. 10.

【0034】その後、半導体チップ3、ワイヤー2およ
びウィンドウWを樹脂で封止して図2に示す半導体装置
を得る。
Thereafter, the semiconductor chip 3, the wires 2 and the window W are sealed with a resin to obtain the semiconductor device shown in FIG.

【0035】次に、本発明に係る半導体装置の第2の実
施形態について説明する。
Next, a second embodiment of the semiconductor device according to the present invention will be described.

【0036】図12は、本発明に係る半導体装置の第2
の実施形態を示す上面図である。同図に示す半導体装置
では、千鳥状に配置された半田付け用端子の外側の端子
にハーフスルーホールが形成される。このようなハーフ
スルーホールが形成された端子に対しては、側面からの
半田付けを行うことができる。
FIG. 12 shows a second example of the semiconductor device according to the present invention.
FIG. 3 is a top view showing the embodiment. In the semiconductor device shown in the figure, half through holes are formed in terminals outside the staggered soldering terminals. The terminal having such a half through hole can be soldered from the side.

【0037】上記のようなハーフスルーホールは、パン
チングによって絶縁性フィルムおよび銅箔を切断して形
成する。
The half through hole as described above is formed by cutting an insulating film and a copper foil by punching.

【0038】尚、上記各実施形態では、図2に示すよう
に、本発明に係る半導体装置が絶縁性フィルム7の上に
銅箔6が形成された構造を有している場合を例として説
明したが、本発明は、上記構造に限定されるものではな
く、例えば銅箔6と絶縁性フィルム7との間に接着層を
設けたものにも適用することができる。
In each of the above embodiments, as shown in FIG. 2, a case where the semiconductor device according to the present invention has a structure in which a copper foil 6 is formed on an insulating film 7 will be described as an example. However, the present invention is not limited to the above-described structure, and can be applied to, for example, a device in which an adhesive layer is provided between the copper foil 6 and the insulating film 7.

【0039】また、図2に示す絶縁性フィルム7側に半
導体チップ3を搭載し、ソルダーレジスト5側がマザー
ボードに載置されるように構成してもよい。この場合に
は、絶縁性フィルム7上にボンディングのためのウィン
ドウWを形成し、当該ウィンドウから露呈する銅箔6と
半導体チップ3とをワイヤーで接続する。マザーボード
に対して半田付けされる部分には、絶縁性フィルム7に
ヴィアVを形成し、ソルダーレジスト5を剥離して、銅
箔6を露呈させておく。
Further, the semiconductor chip 3 may be mounted on the insulating film 7 shown in FIG. 2, and the solder resist 5 may be mounted on the motherboard. In this case, a window W for bonding is formed on the insulating film 7, and the copper foil 6 exposed from the window and the semiconductor chip 3 are connected by wires. In a portion to be soldered to the motherboard, a via V is formed in the insulating film 7, the solder resist 5 is peeled off, and the copper foil 6 is exposed.

【0040】[0040]

【発明の効果】以上説明したように、本発明によれば、
半導体チップが搭載された領域外で半田付けが行われる
ように構成しているため、半田から放出されるα線の影
響を少なくすることができる。
As described above, according to the present invention,
Since the configuration is such that soldering is performed outside the region where the semiconductor chip is mounted, the influence of α-rays emitted from the solder can be reduced.

【0041】また、BGA型半導体装置のように半田ボ
ールを使用しないため、半田ボールの形成に関するコス
トを削減できるとともに、パッケージの実装高さを低く
することができる。
Further, since solder balls are not used unlike the BGA type semiconductor device, the cost for forming the solder balls can be reduced, and the mounting height of the package can be reduced.

【図面の簡単な説明】[Brief description of the drawings]

【図1】本発明に係る半導体装置の構造を示す上面図。FIG. 1 is a top view illustrating a structure of a semiconductor device according to the present invention.

【図2】図1に示す半導体装置のA−A’断面の構造を
示す断面図。
FIG. 2 is a sectional view showing the structure of the semiconductor device shown in FIG.

【図3】本発明に係る半導体装置の構造およびマザーボ
ードに半田付けした状態を示す断面図。
FIG. 3 is a cross-sectional view showing a structure of the semiconductor device according to the present invention and a state of being soldered to a motherboard.

【図4】本発明に係る半導体装置の銅箔形成工程を示す
断面図。
FIG. 4 is a sectional view showing a copper foil forming step of the semiconductor device according to the present invention.

【図5】図4に示す銅箔部にレジストパターンが形成さ
れた状態を示す断面図。
FIG. 5 is a sectional view showing a state where a resist pattern is formed on the copper foil part shown in FIG. 4;

【図6】図5に示す銅箔に配線パターンが形成された状
態を示す断面図。
FIG. 6 is a sectional view showing a state where a wiring pattern is formed on the copper foil shown in FIG. 5;

【図7】図6に示す絶縁性フィルムにヴィアが形成され
た状態を示す断面図。
FIG. 7 is a sectional view showing a state in which a via is formed in the insulating film shown in FIG. 6;

【図8】図7に示す銅箔の表面がソルダーレジストで被
覆された状態を示す断面図。
FIG. 8 is a sectional view showing a state where the surface of the copper foil shown in FIG. 7 is covered with a solder resist.

【図9】図8に示すソルダーレジスト表面にレジストパ
ターンが形成された状態を示す断面図。
FIG. 9 is a sectional view showing a state where a resist pattern is formed on the surface of the solder resist shown in FIG. 8;

【図10】図9に示すソルダーレジストにウィンドウお
よび銅箔露呈部が形成された状態を示す断面図。
FIG. 10 is a sectional view showing a state in which a window and a copper foil exposed portion are formed in the solder resist shown in FIG. 9;

【図11】図10に示すソルダーレジスト上に半導体チ
ップが搭載された状態を示す断面図。
FIG. 11 is a sectional view showing a state where a semiconductor chip is mounted on the solder resist shown in FIG. 10;

【図12】本発明に係る半導体装置の第2の実施形態を
示す上面図。
FIG. 12 is a top view showing a second embodiment of the semiconductor device according to the present invention.

【符号の説明】[Explanation of symbols]

1…モールド樹脂、2…ワイヤー、3…半導体チップ、
4…Agペースト、5…ソルダーレジスト、6…銅箔、
7…絶縁性フィルム、10…マザーボード、11…半導
体装置接続用パッド、20…クリーム半田、50…半田
付け用端子、R…レジストパターン、V…ヴィア、W…
ウィンドウ。
1 ... mold resin, 2 ... wire, 3 ... semiconductor chip,
4 ... Ag paste, 5 ... Solder resist, 6 ... Copper foil,
7: Insulating film, 10: Mother board, 11: Pad for connecting semiconductor device, 20: Cream solder, 50: Terminal for soldering, R: Resist pattern, V: Via, W ...
window.

Claims (3)

【特許請求の範囲】[Claims] 【請求項1】 配線パターンが形成された基板と、 前記基板の表面に搭載され、前記配線パターンに接続さ
れた半導体チップと、 前記基板の前記半導体チップが搭載されている領域外に
形成された貫通孔を介して、該基板の裏面から前記配線
パターンが露呈した電気的接続部位とを具備することを
特徴とする半導体装置。
A substrate on which a wiring pattern is formed; a semiconductor chip mounted on a surface of the substrate and connected to the wiring pattern; and a semiconductor chip formed outside a region of the substrate on which the semiconductor chip is mounted. A semiconductor device comprising: an electrical connection portion where the wiring pattern is exposed from a back surface of the substrate via a through hole.
【請求項2】 前記基板の側面から前記配線パターンが
露呈した第2の電気的接続部位を具備することを特徴と
する請求項1記載の半導体装置。
2. The semiconductor device according to claim 1, further comprising a second electrical connection portion where said wiring pattern is exposed from a side surface of said substrate.
【請求項3】 前記基板は、 半田ボールを具備しないことを特徴とする請求項1また
は請求項2記載の半導体装置。
3. The semiconductor device according to claim 1, wherein the substrate does not include a solder ball.
JP9248625A 1997-09-12 1997-09-12 Semiconductor device Pending JPH1187552A (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP9248625A JPH1187552A (en) 1997-09-12 1997-09-12 Semiconductor device

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP9248625A JPH1187552A (en) 1997-09-12 1997-09-12 Semiconductor device

Publications (1)

Publication Number Publication Date
JPH1187552A true JPH1187552A (en) 1999-03-30

Family

ID=17180906

Family Applications (1)

Application Number Title Priority Date Filing Date
JP9248625A Pending JPH1187552A (en) 1997-09-12 1997-09-12 Semiconductor device

Country Status (1)

Country Link
JP (1) JPH1187552A (en)

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