JPH1187474A - Sample stage - Google Patents

Abstract

PROBLEM TO BE SOLVED: To obtain a sample stage which can support samples of different thickness while facilitating adjustment of height by providing a plurality of supporting means for keeping the upper surface of samples of different thickness at the same height. SOLUTION: A first supporting means 20 for supporting a sample 14 and a second supporting means 30 for supporting a sample 14' of different thickness are arranged alternately, at the same pitch (60 deg.), on the same circumference of a stage top 12 around the rotational axis thereof. Projecting amount of the externally threaded screw of the first and second supporting means 20, 30 is adjusted (height adjustment) such that the working distance of the sample 14, 14' will be constant. When the stage top 12 is turned to be located in the vicinity of a driver holder 60, the externally threaded screw of the first and second supporting means 20, 30 can be driven. Similarly, the externally threaded screw of the second supporting means 30 is turned using a driver 90 and the holder is shifted to a holding position at the time of setting the sample 14'.

Description

DETAILED DESCRIPTION OF THE INVENTION

[0001]

BACKGROUND OF THE INVENTION 1. Field of the Invention The present invention relates to a sample stage provided in an electron beam writing apparatus or the like,
The present invention relates to a sample stage on which samples having different thicknesses are placed.

[0002]

2. Description of the Related Art Next, a conventional example will be described with reference to the drawings.
FIG. 6 is a configuration diagram of a conventional sample stage provided in a sample chamber of an electron beam writing apparatus.

In the figure, horizontal (X and Y directions) movement,
A stage top 2 is provided on a stage 1 capable of tilting and rotating. Three or four female screw holes 3 (three in this conventional example) are formed on the stage top 2, and in these female screw holes 3, a male screw 5 provided with a ball 4 at the tip is provided. It is screwed.

[0004] A sample 6 is placed on the ball 4 of the male screw 5. Reference numeral 7 denotes an objective lens for focusing an electron beam irradiated on the sample 6. By the way, if the distance (working distance) W between the objective lens 7 and the sample 6 is not a predetermined value, a focus blur or escape of an observation image when the sample is tilted occurs. The height of the sample 6 is adjusted by moving the male screw 5 in the vertical direction along the female screw hole 3, and the working distance W is set to a predetermined value.

[0005]

In the sample stage having the above structure, samples having different thicknesses may be set.

However, in the sample stage having the above structure, when samples having different thicknesses are set on the stage,
It is necessary to open the sample chamber, remove the stage top 2 from the stage 1, adjust the height, return the stage top 2 to the stage 1, and evacuate the sample chamber again.

Therefore, there is a problem that adjustment on site is difficult. The present invention has been made in view of the above problems, and an object of the present invention is to provide a sample stage that can easily adjust the height of samples having different thicknesses.

[0008]

According to a first aspect of the present invention, there is provided a sample stage on which samples having different thicknesses are mounted, the sample stages being provided corresponding to the samples having different thicknesses. A sample stage provided with a plurality of support means for supporting the sample so that the upper surface of each sample is at the same height, and switching means for switching the support means.

When the switching means is operated, the supporting means is switched, the height can be adjusted, and samples having different thicknesses can be easily supported. According to a second aspect of the present invention, in the first aspect of the present invention, the support means can move between a holding position for holding the sample at a predetermined height and a retreat position moved from the holding position to the sample stage side. , A biasing member for biasing the holder in the holding position direction, and a screw member driven by the switching means and capable of pressing the holder in the retracting position direction. This is a sample stage.

When the holder at the holding position is moved to the retracted position, the switching means rotates the screw member. Then, the screw member presses the holder toward the retracted position, and the holder moves toward the retracted position against the urging means.

On the other hand, in order to move the holder at the retracted position to the holding position, the switching means rotates the screw member in the direction opposite to the above. Then, the screw member moves in a direction away from the holder, and the holder moves toward the holding position by the urging force of the urging means.

According to a third aspect of the present invention, the sample stage according to the first or second aspect of the present invention is rotatably provided, and the plurality of supporting means have the same circumference around a rotation axis of the sample stage. It is a sample stage characterized by being arranged above.

[0013] Since each supporting means is arranged on the same circumference around the rotation axis of the sample stage, all the supporting means can be driven by one switching means by rotating the sample stage. it can.

According to a fourth aspect of the present invention, the sample stage according to any one of the first to third aspects is disposed in a closed space, and the switching means can be operated from outside the closed space. This is a sample stage characterized by the following.

Since the switching means can be operated from outside the closed space, the height can be easily adjusted when the height is adjusted.

[0016]

Embodiments of the present invention will now be described with reference to the drawings. First, the overall configuration of the sample stage of the present embodiment will be described with reference to FIGS. FIG. 1 is a configuration diagram of a sample stage according to an embodiment of the present invention, and FIG.
FIG. 2 is a view in the direction of arrow A in FIG. 1.

In these figures, a stage top 12 is rotatably provided on a stage 11 which can be moved horizontally (X and Y directions) and tilted. On the stage top 12, as shown in FIG.
The first support means 20 and the three second support means 30 supporting a sample 14 ′ having a different thickness from the sample 14 are alternately arranged on the same circumference around the rotation axis 13 of the stage top 12. They are arranged at the same pitch (60 °).

Reference numeral 40 denotes an objective lens for converging an electron beam irradiated on the samples 14, 14 '. On the upper lid 51 of the sample chamber 50, the outer surface of the sample chamber 50 is
A stepped hole 52 whose opening area is set to be larger than the surface on the inner side of 0 is opened. At the step of the stepped hole 52, a glass plate 53 having a hole 54 in the center is provided. An O-ring 55 for ensuring airtightness with the glass plate 53 is provided at the step of the stepped hole 52.

Further, the glass plate 53 is attached by a holding plate 57 attached on the upper lid 51 using screws 56 screwed to the upper lid 51. A driver holder 60 is provided in the hole 54 of the glass plate 53.
The driver holder 60 includes a first driver holder 61
And a second detachable with respect to the first driver holder 61.
And a driver holder 65. The first driver holder 61 has a flange portion 62 that can be brought into contact with the outer surface of the glass plate 53 and a screw hole 6 formed on the end surface on the sample chamber 50 side.
And 3. On the other hand, the second driver holder 65
Has a male screw portion 66 formed on the peripheral surface and capable of being screwed into the female screw hole 63 of the first driver holder 60, and a flange portion 67 capable of abutting on the inner surface of the glass plate 53.

Then, the first driver holder 61 is inserted into the hole 54 from the upper surface (outside) of the glass plate 53.
The second driver holder 65 is fitted into the hole 54 from the lower surface (inner side) of the first driver holder 61, and the external thread portion 66 of the second driver holder 65 is screwed into the female screw hole 63 of the first driver holder 61. , First and second driver holders 6
1, 65 are integrated to form a driver holder 60, and further, a glass plate 53 is sandwiched between a flange portion 62 of a first driver holder 61 and a flange portion 67 of a second driver holder 65. It is attached to the glass plate 53. The collar 62 of the first driver holder 61 is provided with an O-ring 64 for ensuring airtightness with the outer surface of the glass plate 53.

First and second driver holders 61 and 65
Are formed with a first through-hole 71 and a second through-hole 76 which integrally penetrate the driver holder 60 and form a hole 70 for rotatably holding the ball 80.
An O-ring 7 is provided on the inner wall surface of the first through hole 71 to ensure airtightness with the ball 80 with which the inner wall surface of the through hole 71 contacts.
2 are provided.

The ball 80 has a through hole 81 formed therein.
A driver 90 is inserted through the through hole 81. An O-ring 89 for ensuring airtightness with the driver 90 is provided on the inner wall surface of the through hole 81.

Accordingly, the driver 90 is operable from outside the sample chamber 1 and furthermore, is vertically movable with respect to the ball 80.
(In the direction of arrow I in the figure), can rotate around the axis of the driver 90 (in the direction of arrow II in the figure), and can swing about the ball 80 (in the direction of arrow III in the figure).
It has become.

A large diameter portion 91 is formed below the driver 90. On the other hand, in the opening of the second through hole 76 of the second driver holder 65 of the driver holder 60, a leaf spring 77 to which the large-diameter portion 91 can be disengaged is provided. By engaging the large-diameter portion 91 of the driver 90 with the leaf spring 76, the tip of the driver 90 is fixed at a position separated from the stage top 12.

Next, the first and second support means 20 and 30 will be described with reference to FIGS. Note that the first and second
Since the structures of the support means 20 and 30 are the same, the description will be made using the first support means 30 and the description of the second support means will be omitted. FIG. 3 is a configuration diagram of the first support unit located at the holding position, and FIG. 4 is a configuration diagram of the first support unit located at the retracted position.

In FIG. 3, the stage top 12 includes:
A stepped hole 100 including a large diameter portion 101 and a small diameter portion 102 formed continuously with the large diameter portion 101 is formed. A groove 105 concentric with the stepped hole 100 is formed in the stepped portion of the stepped hole 100. A holder 110 including a first holder 120 and a second holder 130 is arranged in the stepped hole 100. First holder 120
A flange portion 121 is formed in the upper part of the upper part, and a through hole 125 including a small-diameter female screw part 122, a hole part 123, and a large-diameter female screw part 124 is formed in the center part from above.

Further, the flange portion 121 of the first holder 120
The length L of the lower portion is set longer than the depth T of the small diameter portion 102 of the stepped hole 100 of the stage top 12.

The second holder 130 is provided with the first holder 12
A male screw part 131 that can be screwed into the large-diameter female screw part 124 of the through hole 125 and a collar part 132 that can abut the lower surface of the stage top 12.

The first holder 120 is inserted into the stepped hole 100 from the upper surface of the stage top 12.
The second holder 130 is fitted into the stepped hole 100 from the lower surface of the first holder 120, and the large-diameter female screw part 124 of the through hole 125 of the first holder 120 is fitted into the thread part 131 of the second holder 130.
Are screwed into the first and second holders 12.
0, 130 are integrated to form a holder 110.

Then, the integrated holder 110 is
The holding position (the state shown in FIG. 3) where the flange 132 of the holder 130 contacts the lower surface of the stage top 12, and the flange 121 of the first holder 120 contacts the step of the stepped hole 100 of the stage top 12. Evacuation position in contact (state shown in FIG. 4)
It is possible to move between.

Further, a spring 140 is provided in the groove 105 of the stage top 12 to abut against the flange 121 of the first holder 120 and to urge the holder 110 upward.

A male screw 145 having a ball 146 at the tip is screwed into the small diameter female screw portion 122 of the through hole 125 of the first holder 120. The first of this male screw 145
The amount of protrusion of the second holder 130 from the holder 120 can be adjusted using the driver 180 from the through hole 133 side of the second holder 130.

First and second female screw holes 171 and 172 are formed in the peripheral edge of the stepped hole 100 of the stage top 12. First and second female screw holes 171, 172
Are provided with balls 173 and 174 at their ends, and external screws 175 and 176 driven by a driver 90 supported by the driver holder 60 are screwed from above the stage top 12.

Next, the operation of the above configuration will be described. (1) The height is adjusted so that the working distance of the samples 14, 14 'supported by the first and second support means 20, 30 is constant. That is, the first holder 120 of each male screw 145 of the first and second support means 20 and 30 is provided.
Is adjusted using a driver 180.

(2) When the sample 14 is set, the male screw 175, 176 of the second support means 30 is turned using the driver 90 supported by the driver holder 60, and the second
Of the holder 130 is pushed downward against the urging force of the spring 140 to move the holder 110 to the retracted position. Further, using the driver 90, the male screws 175 and 176 of the first support means 20 are turned to move the male screws 175 and 176 upward, and the holder 110 is moved to the holding position.

The driver 90 supported by the driver holder 60 can move vertically with respect to the ball 80.
The ball 80 is rotatable about the axis of the driver 90.
Can be pivoted around the male screw 17
5,176 can be driven.

Further, the first and second support means 20, 30
Are alternately arranged on the same circumference around the rotation axis 13 of the stage top 12, so that the stage top 1
2 is rotated and positioned near the driver holder 60 so that all the first and second support means 20, 3
The 0 external threads 175 and 176 are drivable.

Similarly, when the sample 14 'is set, the male screw 175, 176 of the first support means 20 is turned using the driver 90 supported by the driver holder 60, and the second holder 130 is set. Spring 1 for collar 132
40, the holder 110 is moved downward to the retracted position against the urging force of
By turning 5,176, the holder 110 is moved to the holding position.

(3) When the switching of the first and second support means 20 and 30 is completed, the driver 90 is pulled up and the large-diameter portion 91 is engaged with the leaf spring 77 so that the driver 90
Evacuation.

According to the above configuration, the first and second support means 20 and 30 are provided, and the first and second support means 20 and 30 are switched according to the samples 14 and 14 'having different thicknesses. As a result, the height can be easily adjusted, and the samples 14, 14 'having different thicknesses can be easily supported.

Further, the first and second support means 20, 30
Are arranged on the same circumference around the rotation axis 13 of the stage top 12, so that all of the first and second support means 20, 3 can be provided by a single driver 90 as a switching means.
0 can be switched.

Further, since the driver 90 can be operated outside the sample chamber 50, the height can be easily adjusted when adjusting the height. Note that the present invention is not limited to the above embodiment. For example, the supporting means may be a supporting means 200 as shown in FIG. The stage top 12 has a stepped hole 230 formed by the small diameter portion 231 and the large diameter portion 232.

Reference numeral 240 denotes a large diameter portion 232 of the stepped hole 230.
And a movably fitted holder. The holder 240 has a main body portion 241 whose outer diameter is set slightly smaller than the inner diameter of the large diameter portion 232 of the stepped hole 230, and a flange portion 24 whose outer diameter is set larger than the inner diameter of the large diameter portion 232 of the stepped hole 230.
It consists of two. A guide groove 243 is formed on a side surface of the main body 241 of the holder 240. On the other hand, the large diameter portion 232 of the stepped hole 230 is provided with a bar 250 that engages with the guide groove 243. Therefore, the holder 24
The rotation of 0 is prohibited, and the holder 240 is movable only in the vertical direction.

At the center of the holder 240, a female screw hole 24 is provided.
5 is formed, and a male screw 256 having a ball 255 at the tip is screwed into the female screw hole 245. The male screw 256 has the same function as the male screw 145 described in the first embodiment, and adjusts the height of a sample to be set so that the working distance is constant. It is.

Further, a circular groove 247 centering on the female screw hole 245 is formed on the top surface of the holder 240. The groove 247 is provided with a spring 260 that contacts the stage top 12 and urges the holder 240 downward. A hole 270 is formed on the lower surface of the stage top 12, and a lever 275 rotatably provided around a shaft 271 is provided in the hole 270. One rotating end of the lever 275 is connected to the collar 24 of the holder 240.
2 and supports the holder 240 urged downward by the spring 260.

A female screw hole 277 is formed in the stage top 12 so as to face the other rotating end of the lever 275. The female screw hole 277 has a ball 279 at the tip.
The male screw 278 provided with is screwed.

In such a configuration, the male screw 287
Is rotated, the lever 275 supporting the holder 240 is rotated, and the holder 240 can be switched between the holding position and the retracted position.

[0048]

As described above, according to the first aspect of the present invention, the sample is provided corresponding to each sample having a different thickness, and the sample is supported so that the upper surface of each sample has the same height. According to the second aspect of the present invention, the supporting means of the first aspect of the present invention is configured such that the sample is moved to a predetermined height. A holder provided to be movable between a holding position for holding the holding member, a retreat position moved from the holding position to the sample stage side, an urging member for urging the holder in the holding position direction, and a driving member driven by the switching means. In addition, since the holder is constituted by the screw member that can be pressed in the retracted position direction, samples having different thicknesses can be supported, and the height can be easily adjusted.

According to the third aspect of the present invention, the sample stage is rotatably provided, and the plurality of support means are arranged on the same circumference around the rotation axis of the sample stage. , All the supporting means can be driven by one switching means.

According to the fourth aspect of the present invention, the sample stage is disposed in a closed space, and the switching means is operable from outside the closed space. Since the switching means can be operated, the height can be easily adjusted when the height is adjusted.

[Brief description of the drawings]

FIG. 1 is a configuration diagram of a sample stage according to an embodiment of the present invention.

FIG. 2 is a view in the direction of arrow A in FIG. 1;

FIG. 3 is a configuration diagram of a first support unit located at a holding position.

FIG. 4 is a configuration diagram of a first support unit located at a retracted position.

FIG. 5 is a main part configuration diagram of another embodiment.

FIG. 6 is a configuration diagram of a conventional sample stage provided in a sample chamber of an electron beam writing apparatus.

[Explanation of symbols]

 14,14 'sample 20 first support means 30 second support means

Claims (4)

[Claims] 1. A sample stage on which samples having different thicknesses are mounted, wherein the sample stages are provided corresponding to the samples having different thicknesses, and the sample is mounted so that the upper surfaces of the samples have the same height. A sample stage, comprising: a plurality of supporting means for supporting; and switching means for switching the supporting means. 2. The apparatus according to claim 1, wherein the supporting unit includes: a holding position for holding the sample at a predetermined height; a holder movably provided between a withdrawal position moved from the holding position to the sample stage side; 2. The sample stage according to claim 1, comprising: an urging member for urging in a holding position direction; and a screw member driven by said switching means and capable of pressing said holder in said retreating position direction. 3. The apparatus according to claim 1, wherein the sample stage is rotatably provided, and the plurality of support means are arranged on the same circumference around a rotation axis of the sample stage.
Sample stage as described. 4. The sample according to claim 1, wherein the sample stage is disposed in a closed space, and the switching unit is operable from outside the closed space. stage.