JPH1161396A - スパッタリング装置 - Google Patents

スパッタリング装置

Info

Publication number
JPH1161396A
JPH1161396A JP22797497A JP22797497A JPH1161396A JP H1161396 A JPH1161396 A JP H1161396A JP 22797497 A JP22797497 A JP 22797497A JP 22797497 A JP22797497 A JP 22797497A JP H1161396 A JPH1161396 A JP H1161396A
Authority
JP
Japan
Prior art keywords
target
sputtering
backing plate
cathode
thin film
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Abandoned
Application number
JP22797497A
Other languages
English (en)
Japanese (ja)
Other versions
JPH1161396A5 (enExample
Inventor
Masaki Takenouchi
正樹 竹之内
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Sony Corp
Original Assignee
Sony Corp
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Sony Corp filed Critical Sony Corp
Priority to JP22797497A priority Critical patent/JPH1161396A/ja
Publication of JPH1161396A publication Critical patent/JPH1161396A/ja
Publication of JPH1161396A5 publication Critical patent/JPH1161396A5/ja
Abandoned legal-status Critical Current

Links

Landscapes

  • Physical Vapour Deposition (AREA)
JP22797497A 1997-08-25 1997-08-25 スパッタリング装置 Abandoned JPH1161396A (ja)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP22797497A JPH1161396A (ja) 1997-08-25 1997-08-25 スパッタリング装置

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP22797497A JPH1161396A (ja) 1997-08-25 1997-08-25 スパッタリング装置

Publications (2)

Publication Number Publication Date
JPH1161396A true JPH1161396A (ja) 1999-03-05
JPH1161396A5 JPH1161396A5 (enExample) 2004-11-04

Family

ID=16869185

Family Applications (1)

Application Number Title Priority Date Filing Date
JP22797497A Abandoned JPH1161396A (ja) 1997-08-25 1997-08-25 スパッタリング装置

Country Status (1)

Country Link
JP (1) JPH1161396A (enExample)

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