JPH11349140A - Plate-like object to be plated continuous transferring device in plating device - Google Patents

Abstract

PROBLEM TO BE SOLVED: To realize a smooth whole transfer without stumbling by disposing at a forward inclination an upper end of a driving roller to previously contact a lower end with a plate-like object to be plated and to previously move a lower end portion of the plate-like object to be plated. SOLUTION: The point that a plate-like object 3 to be plated of which both surfaces are clamped by vertical rollers 4, 4... including a driving roller 4' is conveyed on a rail 2 having a V shape cross section is the same as the prior art, however, the driving roller 4' is disposed so as to forwardly deviate an upper end portion from a usual dotted line position with an angle α. Thus, a lower end o the plate-like object 3 to be plated is previously contacted with the driving roller 4' and an upward force of an arrow mark is acted on a tip end lower portion F. Therefore, even if a downward stumbling force is acted on the tip end lower portion F, the downward force is denied by the upward force and a smooth conveying can be always realized. The number of the driving rollers 4' can be appropriately changed depending on a size and a length of a device.

Description

DETAILED DESCRIPTION OF THE INVENTION

[0001]

BACKGROUND OF THE INVENTION 1. Field of the Invention The present invention relates to a continuous plating apparatus for continuously transferring a plate-like material to be plated such as a semiconductor substrate.

[0002]

2. Description of the Related Art Conventionally, in order to plate a plate-like object to be plated, a plurality of objects to be plated are attached one by one to a frame connected to a cathode with a fixture, and after plating is completed, one by one is removed. ing. This method is a troublesome operation, and is a factor that hinders the efficiency of the plating operation.

[0003] In recent years, in order to avoid the work of fixing the object to be plated to the frame, in recent years, the objects to be plated have been individually and continuously supplied one by one into the plating tank, and the inside of the plating tank has been moved horizontally.
A method of continuously and efficiently plating has been proposed.

[0004] However, the size of the object to be plated varies in size, and in order to plate evenly on any of them, the arrangement of electrodes, adjustment of liquid level, current density, etc.
It is difficult to finely adjust the plating conditions. Therefore, the present inventor has developed a method of vertically supplying an object to be plated earlier and continuously supplying the object to a plating tank, and has solved the above problems.

[0005]

To vertically transfer a plate-shaped object to be plated in a plating tank, for example, as shown in FIG.
As shown in the figure, the lower end of the plate-shaped workpiece 3 is placed on a rail 2 having a V-shaped cross section extending in the vertical direction of the drawing at the center bottom in the plating tank 1, and a plurality of vertical molds including drive rollers 4 ′ are provided on both sides. The object to be plated 3 is transported by a driving roller while being held between the rollers 4, 4. In FIG. 3, 5 is an electrode, and 6 is a shielding plate. FIG. 4 is a side view mainly showing the vertical roller 4. Among the plurality of vertical rollers 4, for example, one in the middle is used as a driving roller, and the frictional force is utilized by forcibly rotating the driving roller. The plate-like objects 3 are sequentially transferred.

However, there are many kinds of plate-shaped materials to be plated, and the heights thereof are different from each other. Therefore, even if the drive roller is moved to a standard height, the material to be plated has a different height. On the other hand, the feed may not go smoothly. In view of the above, an object of the present invention is to enable a plate-shaped object to be plated of any size to be smoothly transferred.

[0007]

SUMMARY OF THE INVENTION The present invention relates to an apparatus for transporting a plate-like object to be plated, which is vertically mounted on a rail, from both sides by a vertical rotating roller including a driving roller. A plate-like object to be plated is continuously transferred in a plating apparatus, the upper end of which is inclined forward. The inclination of the drive roller is preferably 1 ° to 10 °, more preferably 3 ° to 10 °. The holding roller and the driving roller may be a continuous cylinder from the upper end to the lower end, or may be a discontinuous cylinder. In either case, even if the height of the plate-shaped object to be plated varies, the plate-shaped object to be plated is firmly held at any part of the roller so that the feeding can be made uniform.

When the upper end of the driving roller is arranged to be inclined forward, the lower end comes into contact with the plate-shaped workpiece first, and the lower end of the plate-shaped workpiece is moved first. Then, a slightly upward force acts on the leading end of the plate-shaped object to be plated on the rail, so that stumbling due to the downward force at the leading end does not occur. Therefore, the whole transfer is performed smoothly, and the plating operation is made more efficient.

[0009]

Embodiments of the present invention will be described below with reference to the drawings. FIG. 1 shows an example of the above-mentioned prior art in that the both sides of a plate-shaped workpiece 3 are sandwiched and transported by a vertical roller 4, including a driving roller 4 ', on a rail 2 having a V-shaped cross section. However, in the present invention, the drive roller 4 'is shifted from the position indicated by the dotted line at the upper end to the angle α.
It is arranged with a. By doing so, the lower end of the plate-shaped object to be plated 3 has the drive roller 4 '
, And an upward force in the direction of the arrow acts on the lower end portion 5. Therefore, even if a downward stumbling force acts on the lower end portion 5 of the tip, the stomach is canceled with the upward force described above, and smooth transfer can always be performed. The number of drive rollers 4 'can be appropriately changed depending on the size and length of the apparatus.

The shape of the driving roller 4 'or the vertical roller 4 may be a discontinuous cylindrical shape as shown in FIG. 2A or a discontinuous abacus ball shape as shown in FIG. In these cases, by shifting the position of the unit roller in each roller between the adjacent rollers, the surface area of the plate-like workpiece 3 at the time of plating can be widened, which contributes to stable plating film formation.

[0011]

According to the present invention, when the plate-shaped objects to be plated are vertically arranged and transported, the individual plate-shaped objects to be plated can be smoothly transported without tripping. And the uniform plating film can be formed.

[Brief description of the drawings]

FIG. 1 is an explanatory diagram of an embodiment of the present invention.

FIGS. 2A and 2B show modified examples of the roller according to the present invention.

FIG. 3 is a conceptual view of a plating apparatus of a type for feeding a plate-shaped object vertically.

FIG. 4 is an explanatory view of a feed roller unit.

[Explanation of symbols]

 DESCRIPTION OF SYMBOLS 1 Plating tank 2 Rail 3 Plate-shaped object to be plated 4 Vertical roller 4 'Drive roller 5 Electrode 6 Shielding plate

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[Procedure amendment]

[Submission date] June 16, 1998

[Procedure amendment 1]

[Document name to be amended] Statement

[Correction target item name] 0005

[Correction method] Change

[Correction contents]

[0005]

To vertically transfer a plate-shaped object to be plated in a plating tank, for example, as shown in FIG.
As shown in the figure, the lower end of the plate-shaped workpiece 3 is placed on a rail 2 having a V-shaped cross section extending in the vertical direction of the drawing at the center bottom in the plating tank 1, and a plurality of vertical molds including drive rollers 4 ' The object to be plated 3 is transported by a driving roller while being held between the rollers 4, 4. In FIG. 3, 5 is a positive electrode, 6 is a shielding plate. FIG. 4 is a side view mainly showing the vertical roller 4. Among the plurality of vertical rollers 4, for example, one in the middle is used as a drive roller 4 ′ to forcibly rotate the roller, thereby reducing the frictional force. The plate-shaped workpieces 3 are sequentially transferred by utilizing them.

[Procedure amendment 2]

[Document name to be amended] Statement

[Correction target item name] 0009

[Correction method] Change

[Correction contents]

[0009]

Embodiments of the present invention will be described below with reference to the drawings. FIG. 1 shows an example of the above-mentioned prior art in that the both sides of a plate-shaped workpiece 3 are sandwiched and transported by a vertical roller 4, including a driving roller 4 ', on a rail 2 having a V-shaped cross section. However, in the present invention, the drive roller 4 'is shifted from the position indicated by the dotted line at the upper end to the angle α.
It is arranged with a. By doing so, the lower end of the plate-shaped object to be plated 3 has the drive roller 4 '
, And an upward force in the direction of the arrow acts on the lower end portion F of the tip. Therefore, even if a downward stumbling force acts on the lower end portion F , the stomach is canceled with the above upward force and can always be smoothly transported. The number of drive rollers 4 'can be appropriately changed depending on the size and length of the apparatus.

[Procedure amendment 3]

[Document name to be amended] Statement

[Correction target item name] Explanation of sign

[Correction method] Change

[Correction contents]

[EXPLANATION OF SYMBOLS] 1 plating tank 2 rail 3 plate object to be plated 4 vertical roller 4 'driven roller 5 positive electrode 6 shield

[Procedure amendment 4]

[Document name to be amended] Drawing

[Correction target item name] Fig. 1

[Correction method] Change

[Correction contents]

FIG.

[Procedure amendment 5]

[Document name to be amended] Drawing

[Correction target item name] Figure 3

[Correction method] Change

[Correction contents]

FIG. 3

Claims (2)

[Claims] 1. A device for transporting a plate-like object to be plated vertically mounted on a rail from both sides by a vertical rotating roller including a driving roller, wherein the upper end of the driving roller is arranged to be inclined forward. A plate-shaped object to be continuously transferred in a plating apparatus. 2. The apparatus according to claim 1, wherein the inclination of the driving roller is 1 ° to 10 °.