JPH11340283A - Flip chip assembly device - Google Patents

Abstract

PROBLEM TO BE SOLVED: To easily and quickly provided a assembly device of a flip chip provided with respective desired processing functions, by dividing the constitution of the flip chip assembly device into the respective functions corresponding to respective processes required for the assembly of the flip chip, and making them into modules. SOLUTION: The constitution of this flip chip assembly device is divided and packaged into the respective processing functions such as a substrate stock module 3, a laminate module 5, a baking module 6, an alignment module 10 and a cure module 11. The respective modules are made freely attachable and detachable and the respective modules are increased, decreased and combined.

Description

DETAILED DESCRIPTION OF THE INVENTION

[0001]

BACKGROUND OF THE INVENTION 1. Field of the Invention The present invention relates to an apparatus for automatically assembling flip chips, and more particularly, to a structure of an apparatus for assembling flip chips corresponding to each step required for assembling flip chips. Each of the divided modules is detachably configured while being divided into modules according to the functions, and the respective modules are appropriately connected or removed as necessary, so that desired processing functions can be obtained. The present invention relates to an improvement of a flip-chip assembling apparatus which can easily and quickly constitute a flip-chip assembling apparatus provided.

[0002]

2. Description of the Related Art A so-called flip chip bonding method has been proposed as one of means for mounting a semiconductor LSI chip on a circuit board. In this flip chip bonding method, for example, a solder bump is previously mounted on an electrode on the chip side, and this chip is superposed on a substrate in a face-down state so that the solder bump matches the electrode on the substrate side. Next, in this state, the solder bumps are melted and soldered by applying required heating and pressing force, thereby enabling high-density mounting. In addition, since the substrate and the semiconductor LSI chip have different linear expansions and the like, problems such as an increase in resistance due to heating and damage to a joint of electrodes occur due to this difference. Therefore, for the purpose of eliminating such adverse effects, the gap between the substrate and the semiconductor LSI chip is filled with a resin material, and the two are adhered with the filled resin. In this way, the impact of this is reduced to improve product reliability. Further, as a means for filling a resin material between the substrate and the semiconductor LSI chip, for example, after mounting the semiconductor LSI chip on the substrate, a liquid resin material (underfill material) is dispensed between the two to cause a capillary phenomenon. Or a liquid resin dispensing method of curing the filled resin material, or attaching a film containing resin-coated silver particles to the substrate in advance, mounting a semiconductor LSI chip on the substrate, and then heating and curing the film. ACF (Anisotrop
ic Conductive Film) method or a method in which a liquid thermosetting resin material is dispensed on the substrate in advance and a semiconductor LSI
ESC for mounting the chip and then curing the resin material
(Epoxy Encapsulated Solder Connection) method and the like have been proposed.

[0003]

The above-mentioned conventional means for filling a resin material between a substrate and a semiconductor LSI chip,
For example, in the liquid resin dispensing method, a washing step for removing a flux or the like used at the time of mounting the semiconductor LSI chip is required, a long time is required for filling the resin, and curing of the filled resin is required. For this reason, it is pointed out that the production efficiency is low, and furthermore, a dedicated flux coating device, an underfill device, a curing device and the like are required, so that the production cost is increased. The ACF method has an advantage that a flux coating step and a dispensing step are not required. However, the cost of the resin-coated silver particle-containing film used in this method is high, and the connection resistance is low. Problems have been pointed out that there are many variations and that the resistance increases under high temperature and high humidity. In addition, the aforementioned ES
In the method C, the flux application step becomes unnecessary,
Although there is an advantage that the resin filling time is shortened, a problem has been pointed out that the performance of the dispenser largely depends on achieving high-efficiency production of a product having high quality.

In addition, the flip-chip assembling apparatus includes steps required for assembling the flip-chip, for example, a step of applying a flux to a bonding surface between the substrate and the semiconductor LSI chip, and electrically connecting the substrate and the semiconductor LSI chip. Each processing function for performing a bonding step for connecting, a step of cleaning the above-mentioned flux, a step of supplying a liquid resin material to a gap between both the substrate and the semiconductor LSI chip, a curing step of reheating the resin material, and the like. Provided. All of the processing functions described above are provided so as to be fixedly arranged in one assembly apparatus having the same structure. Further, even in a case where any one of the plurality of processing functions described above is selected and configured as an assembling apparatus having the processing functions, the selected plurality of processing functions are as described above. Similarly, they are provided so as to be fixedly arranged in one assembly apparatus having the same structure. That is, the conventional assembling apparatus is configured so that each of the above-described processing functions is fixedly arranged in one assembling apparatus having the same structure, and as a result, the above-mentioned respective processing functions are mutually connected. Since it is not configured to be detachable, it does not have a positive exchangeability such that the separation and coupling work between the processing functions can be performed simply and quickly. Therefore, the present invention divides the configuration of the flip chip assembling apparatus into modules according to functions corresponding to each step required for assembling flip chips, and makes the divided modules detachably configured. It is a further object of the present invention to provide a flip-chip assembling apparatus having desired processing functions simply and quickly by appropriately connecting or removing the modules as required.

[0005]

According to the present invention, there is provided a flip chip assembling apparatus for solving the above-mentioned technical problems, in which each processing function required for assembling a flip chip is divided into separate units to form a module. The divided modules are configured to be detachable.

Further, the flip chip assembling apparatus according to the present invention for solving the above-mentioned technical problem divides each processing function required for assembling the flip chip and divides the processing functions into a large number from the substrate storage tray via the pickup. A substrate stock module having a function of transferring a substrate to a carrier for transport, and a laminate module having a function of separately applying a tape-shaped resin layer of a tape-shaped resin to each substrate on the carrier. A baking module having a function of heating and drying each substrate on the carrier to which the tape-shaped resin layer is attached, and a semiconductor LSI chip taken out from a semiconductor LSI chip tray via a pickup. Alignment module having a function of pressing and pressing each of the substrates on the carrier in the state of And a curing module having a function of further heating and pressurizing each substrate on the carrier to which the semiconductor LSI chip is crimped to perform gelling of resin, melting of solder, and curing of resin, and each of the divided modules. It is characterized in that the modules are configured to be detachable.

[0007]

According to the present invention, the structure of the flip chip assembling apparatus is divided into modules according to the functions corresponding to the respective steps required for assembling the flip chip, and the modules are detachably connected. Because
By appropriately connecting or removing the modules as required, a flip-chip assembling apparatus having desired processing functions can be easily and quickly constructed.

[0008]

DESCRIPTION OF THE PREFERRED EMBODIMENTS The present invention will be described below in detail with reference to the drawings. FIG. 1 is an overall schematic view of a flip chip assembling apparatus, and shows a state where the main components of the apparatus are divided according to functions. FIG. 2 is a schematic cross-sectional plan view of the assembling apparatus, and shows a state in which the main components of the assembling apparatus are connected to each other. FIG. 3 is a schematic vertical sectional front view of a laminating module which is a main component of the assembling apparatus. 4 and 5
FIG. 3 is an enlarged front view showing a main part of a resin attaching mechanism in the laminate module. FIG. 6 is an enlarged side view showing a main part of a resin attaching mechanism in the laminate module. FIG. 7 is an enlarged end view of the tape-shaped resin used in the laminate module. FIG.
It is an enlarged end view which shows the other structural example of the said tape-shaped resin. FIG. 9 is an enlarged end view showing a cut groove forming state of the tape-shaped resin. 10 and 11 are a schematic vertical sectional front view and a schematic cross-sectional plan view showing a main part of a stocker loading section of a tray for a semiconductor LSI chip in an alignment module which is a main part of the assembling apparatus. FIG. 12 is a schematic plan view showing a tray for semiconductor LSI chips stored in the stocker. FIG. 13 is a schematic plan view showing another example of the shape of the tray. FIG. 14A is a schematic perspective view showing a tray adapter for semiconductor LSI chips, and FIG. 14B is a schematic perspective view showing a small tray transferred to the tray adapter. FIG. 15 is a schematic perspective view showing a state where a small chip tray is stored in the tray adapter.

In the flip chip assembling apparatus, as schematically shown in FIGS. 1 and 2, the main components of the apparatus are divided according to their functions, and they are appropriately connected as necessary, or It is provided so that the configuration of the device having the desired processing functions can be adopted by appropriately removing it. That is, the above-described flip-chip assembling apparatus is a substrate stock module having a function of transferring a large number (10 in the example in the figure) of substrates 1 from a substrate storage tray to a carrier 2 for conveyance via a pickup. 3, a laminate module 5 having a function of separately attaching a tape-shaped resin layer 13 of a tape-shaped resin 4 to be described later to each substrate 1 on the carrier 2;
A baking module 6 having a function of heating and drying each substrate 1a on the carrier 2 to which the tape-shaped resin layer 13 is adhered, and a semiconductor LSI taken out from a semiconductor LSI chip tray 7 via a pickup 8 An alignment module 10 having a function of pressing and pressing the chip 9 to each of the substrates 1a on the carrier 2 in a face-down state, and each substrate 1b on the carrier 2 to which the semiconductor LSI chip 9 is pressed And a curing module 11 having a function of gelling the resin, melting the solder, and curing the resin by further heating and pressing. In addition, the above-mentioned carrier 2 is provided with each of the modules 3
・ It is equipped to circulate in the flip chip assembly device which is constructed by combining, integrating, integrating 5, 6, 10, 11. The substrates 1, 1a, and 1b on the carrier 2 are provided so as to be transferred to predetermined positions in the respective modules and guided to respective processing positions. Furthermore,
The processed substrates 1c which have completed the processes in the respective modules are transferred to the substrate stock module 3 at the original position via the carrier 2, and the processed substrates 1c are picked up via the pickup. It is provided so as to be transferred to a substrate extraction tray.

As described above, the assembling apparatus shown in FIG. 2 integrates and integrates each of the substrate stock module 3, the laminating module 5, the baking module 6, the alignment module 10, and the curing module 11 so as to be integrated. It is configured as a flip chip assembly device having functions. However, as described above, the configuration of this apparatus is provided so as to be able to provide desired processing functions by appropriately connecting or removing as necessary. Therefore, for example, when only two modules, the substrate stock module 3 and the laminate module 5, are combined and integrated, an apparatus configuration as a dedicated apparatus for laminating the substrate 1 can be adopted. Further, for example, when it is not necessary to perform the reheating / redrying process on each substrate 1a on the carrier 2 to which the tape-shaped resin 4 is attached, a configuration of the apparatus in which the baking module 6 is omitted is adopted. Can be. Further, for example, a module having other functions required for this kind of production process, such as various inspection modules, can be added and integrated. That is, since the number of modules can be appropriately increased or decreased in accordance with the actual state of the flip chip assembling work or other working conditions, there is an advantage that the module can be adapted to the actual situation of the work. In addition, there is an advantage that unnecessary functional parts can be omitted from the apparatus configuration, so that the overall equipment cost can be reduced.

The substrate stock module 3 will be described in detail. This module is provided with a loading portion for a substrate tray stocker (not shown) for stocking a substrate tray containing the substrate 1, and the substrate tray stocker. A substrate tray feeder (not shown) for feeding a substrate tray in the inside to a predetermined position is provided. Therefore, as described above, a large number of the unprocessed substrates 1 are transferred from the substrate storage tray via the pickup onto the carrier 2, and the processed substrates 1c are unloaded from the carrier 2 via the pickup. It is provided so that it can be transferred to a tray for use.

The laminating module 5 is provided with a mechanism for adhering the tape-shaped resin 4 to the substrate 1 as described later. As shown in FIG. 7, for example, a tape-like protective film 12 formed of a material having easy removability and a tape-like resin layer 13 adhered on the film 12.
And has a two-layer type structure. In addition, the two-layer type tape-shaped resin 4 is the same as the tape-shaped resin layer 13.
8 is protected by the protective film 12, but as shown in FIG. 8, the tape-shaped resin layer 13 is protected by the protective films 12 and 12a on both sides, respectively. A tape-shaped resin 4a having a type structure may be used.

The mechanism for attaching the tape-shaped resin 4 to the substrate 1 provided in the laminate module 5 is configured as follows. As shown schematically in FIGS. 3 to 6, the tape-shaped resin sticking mechanism includes a supply reel 14 for the tape-shaped resin 4, winding reels 15 and 16 for the protective film 12, and both reels 14. 15 (16) and the guide roll 17 and the tape-shaped resin 4
A tape supply mechanism (not shown) for supplying a predetermined length corresponding to the size of the substrate, and a tape-shaped resin layer of the tape-shaped resin 4 on the upper surface of the substrate 1 set on the carrier 2 Guide part for connecting and mounting 13
And a tape-shaped resin layer 13 of the tape-shaped resin 4 supplied by the tape supply mechanism and the guide portion 18.
And a heating mechanism 19 for heating and adhering the protective film 12 to the upper surface of the substrate on the carrier 2 and efficiently separating the tape-shaped resin layer 13 and the protective film 12 adhered to the substrate 1 from each other. A cooling gas supply mechanism 20 for ensuring the operation is provided. Further, the above-described two-layer type tape-shaped resin 4 is loaded on the supply reel 14, and the end of the protective film 12 on the sending side is wound on the take-up reel 15 via the guide portion 18. At this time, the tape-shaped resin layer 13 adhered to the protective film 12 is stretched so as to be disposed on the carrier 1 side on the carrier 2. In the case of the above-described three-layer type tape-shaped resin 4a, similarly to the above-described two-layer type tape-shaped resin 4a, the tape is loaded on the supply reel 14 and the end of the protective film 12 on one side serving as the sending side. The part may be wound around the take-up reel 15 via the guide part 18, but the end of the other side of the protective film 12a on the sending side may be wound around the other side of the take-up reel 16. Good. Therefore, regardless of whether the two-layer type or the three-layer type tape-shaped resin 4 or 4a is used, the tape-shaped resin supplied to the guide portion 18 side substantially corresponds to the protective film 12. This is a two-layer type state composed of the tape-shaped resin layer 13 adhered thereto. Also, reference numeral 21 in FIG.
Is a mechanism for forming a cut groove of the tape-shaped resin layer 13 in the tape-shaped resin 4, wherein the tape supplied and transferred by the tape supply mechanism before the tape-shaped resin layer 13 is attached to the substrate 1. An appropriate cutting groove 23 as shown in FIG. 9 is formed at predetermined intervals of the resin layer 13 via a cutter 22, and a tape-shaped resin layer adhered to the upper surface of a substrate described later.
This is provided to easily separate 13a from the resin layer 13 continuous with the resin layer 13 at the cut groove 23. Therefore, since the cut groove forming mechanism 21 is not always essential as a tape-shaped resin sticking mechanism, it may be provided in an auxiliary manner in accordance with, for example, the necessity of work. Further, for the purpose of ensuring reliable positioning of the substrate 1 on the carrier 2 and more reliably setting the same, for example, an appropriate vacuum suction mechanism (not shown) for the substrate 1 may be additionally provided. Good. As means for bonding and mounting the tape-shaped resin layer 13 of the tape-shaped resin 4 on the upper surface of the substrate 1 set on the carrier 2, the guide portion 18 is provided on the substrate 1 side. (In the illustrated example), or conversely, means for moving the substrate 1 toward the guide portion 18 (in the illustrated example, upward). No problem.

As shown in FIGS. 3 to 5, the heating mechanism 19 in the tape-like resin sticking mechanism is capable of moving back and forth toward the substrate 1 on the carrier 2 at the guide portion 18 (in the example shown in FIG. 3). In this case, the tape-shaped resin 4 is provided so as to freely move up and down toward the substrate 1 set at the lower position, and is bonded and mounted on the upper surface of the substrate 1 via the guide portion 18. A heating head 24 is provided for applying heat while pressing the protective film 12 from the protective film 12 toward the substrate 1 with a required pressing force to attach the tape-shaped resin layer 13 to the upper surface of the substrate 1. .

As shown in FIGS. 3 to 6, the cooling gas supply mechanism 20 in the tape-shaped resin sticking mechanism is
Side surface of the tip portion of the guide portion 18 (side surface of the lower end portion in the illustrated example)
And a gas passage 26 communicating between the gas outlet 25 and a gas supply source (not shown).
The gas blown out from the gas blowout port 25 is supplied to the tape-shaped resin 4 supplied to the guide portion 18.
Is provided to the protective film 12 side. The gas may be any as long as it can cool the tape-shaped resin layer 13. Therefore, for example, air at room temperature, cooling air at a lower temperature than this, or other appropriate cooling gas, etc. Can be used.

The baking module 6 includes:
The carrier 2 on which the tape-shaped resin layer 13 is adhered.
A baking furnace for heating and drying each of the above substrates 1a;
A cooling blower (not shown) for cooling the substrate 1 after the heating is provided.

The alignment module 10 will be described in detail. As shown in FIGS. 10 to 12, this module includes a chip tray stocker 28 for loading a chip tray 27 containing semiconductor LSI chips 9 therein. 2 are provided, and a chip tray feeder 29 for feeding the chip tray 27 in the chip tray stocker 28 to a predetermined position is provided. Further, in this module, although not shown, the semiconductor L
A reversing mechanism (in the illustrated example, face-down by upside down) for performing a pre-process for crimping the bumps of the SI chip 9 to the substrate 1a, and crimping for crimping the semiconductor LSI chip 9 to the substrate 1 A head and the like are provided. Accordingly, as described above, the semiconductor LSI chip 9 taken out from the chip tray 7 set at a predetermined position via the pickup 8 is transferred to the position of the substrate 1a on the carrier 2 in the face-down state. The semiconductor LSI chip 9 is provided so that the semiconductor LSI chip 9 can be press-bonded to the substrate 1a via the press-bonding head.

Further, the above-mentioned chip trays have different shapes due to the pretreatment process. That is, when a chip tray 27 as shown in FIG. 12 is used, it is necessary to equip a chip tray stocker 28, a chip tray feeder 29, a pickup 8 and the like dedicated to the shape of the chip tray 27. Therefore, for example, when a chip tray 30 having a shape smaller than the chip tray 27 as shown in FIG. 13 is used, a chip tray stocker, a chip tray feeder, a pickup, and the like dedicated to the small chip tray 30 must be provided. No. However, such a problem can be solved by using a dedicated chip tray adapter 31 as shown in FIG. That is, the size of the chip tray adapter 31 is formed to be the same size as the chip tray 27, and at the center thereof, a fitting recess in which the small chip tray 30 can be fitted as it is.
32 are formed. Accordingly, for example, by fitting a small chip tray 30 as shown in FIG. 14 (2) into a fitting recess 32 of the chip tray adapter 31 as shown in FIG. Since 30 can be used in the same manner as the chip tray 27, as a result,
These devices can be used as they are without replacing the chip tray stocker 28, chip tray feeder 29, and pickup 8 described above. For this reason, as described above, when it is planned to use chip trays having different shapes, a device for a chip tray having the largest shape is provided, and a chip tray having the largest shape is provided. By preparing a chip tray adapter of the same shape, there is an advantage that it can be used also as a device for a chip tray of a smaller shape.

Further, the cure module 11 is provided with a resin gelling and pressurizing mechanism, a solder melting and resin curing mechanism (not shown), and the like.

Hereinafter, the forming operation of the above-described flip chip assembling apparatus will be described. First, the substrate storage tray in the substrate tray stocker loaded in the substrate stock module 3 is sent out to a predetermined position via the substrate tray feeder, and a large number of each unprocessed substrate 1 is transferred from the substrate storage tray via a pickup. Transfer to carrier 2. Next, each of the substrates 1 is transferred to the laminating module 5 via the carrier 2. And the guide section
Each substrate 1 set on the carrier 2 via 18
The tape-shaped resin layer 13 of the tape-shaped resin 4 is joined and mounted on the upper surface of the resin, and the resin layer 13 is
Its protective film through the heating head 24 in 19
Heat is applied while pressing the substrate 1 from the side 12 toward the substrate 1 with a required pressing force, and the substrate 1 is adhered to the upper surface of the substrate 1. Next, the heating head 24 is retracted from the surface of the protective film 12, and a cooling gas is blown out from a gas outlet 25 through a cooling gas supply mechanism 20 to adhere to the upper surface of the substrate 1. Resin layer 13 continuous with the tape-shaped resin layer 13a
Allow parts to cool. At this time, the resin layer 13a is in a required heating state by the heating head 24, the resin layer 13 following this is in a cooled state, and the resin layer 13a is attached to the substrate 1. Since the substrate 1 and the guide portion 18 are separated again after the attachment, the temperature difference between the two and the guide portion 18 cause the separation between the resin layer 13a and the resin layer 13 continuous with the resin layer 13 due to the separation action. At the boundary line, the resin film 13a is easily cut and separated, and the resin layer 13a on the substrate 1 and the protective film 12 are easily separated. Next, each substrate 1a on the carrier 2 to which the tape-shaped resin layer 13a has been adhered is transferred into a baking furnace in the baking module 6 and is heated and dried. Is cooled by a cooling blower. Next, the respective substrates 1a that have been subjected to the heating and drying treatment are transferred to the alignment module 10 side. In the alignment module 10, the chip tray 7 is previously sent out from the chip tray stocker 28 via the chip tray feeder 29 and is set at a predetermined position. Therefore, the semiconductor LSI chips 9 taken out of the chip tray 7 via the pickup 8 are transferred to the positions of the respective substrates 1a on the carrier 2 in the face-down state, and the semiconductor LSI chips 9 are pressed by the pressure head. The substrate 1a may be pressurized and press-bonded through the substrate. Next, each substrate 1b on the carrier 2 to which the semiconductor LSI chip 9 has been pressed is transferred to the cure module 11 side. Then, the respective substrates 1b are further heated and pressed through a resin gelling / pressurizing mechanism and a solder melting / resin curing mechanism to perform gelling of the resin, melting of the solder and curing of the resin. Next, each of the processed substrates 1c which has been subjected to the curing process and all the processes are completed is transferred to the substrate stock module 3 side at the original position via the carrier 2. Next, the processed substrates 1c transferred to the substrate stock module 3 are transferred from the carrier 2 to a substrate removal tray via a pickup. In addition, each of the processed substrates 1c can be taken out of the apparatus via the board taking-out tray.

The present invention is not limited to the above-described embodiment, but can be arbitrarily and appropriately changed and selected as necessary within a range not departing from the gist of the present invention. It is.

[0022]

According to the apparatus of the present invention, the configuration of the flip chip assembling apparatus is divided into modules according to functions corresponding to the respective steps required for assembling the flip chip, and the modules are detachably connected. Therefore, by appropriately connecting or removing the modules as required, a flip-chip assembling apparatus having desired processing functions can be easily and quickly constructed. Therefore, according to the apparatus of the present invention, it is possible to appropriately increase or decrease the combination of the respective modules in accordance with the actual state of the flip chip assembling work and other working conditions. It has an excellent practical effect that it can be adapted. Further, according to the apparatus of the present invention, unnecessary processing functions can be omitted from the configuration of the apparatus, so that there is an excellent practical effect that the overall equipment cost can be reduced. Things.

[Brief description of the drawings]

FIG. 1 is a schematic exploded perspective view showing the entirety of a flip chip assembling apparatus according to the present invention, and shows a state where the main components of the apparatus are divided according to functions.

FIG. 2 is a schematic cross-sectional plan view of the assembling apparatus corresponding to FIG. 1 and shows a state in which respective main components are connected and configured.

FIG. 3 is a schematic longitudinal sectional front view of a laminating module which is a main component of the assembling apparatus corresponding to FIG.

FIG. 4 is an enlarged front view showing a main part of a resin sticking mechanism in the laminate module corresponding to FIG. 3, showing a state before tape-like resin sticking to a substrate.

FIG. 5 is an enlarged front view showing a main part of a resin sticking mechanism in the laminate module corresponding to FIG. 4, showing a heated state of the tape-shaped resin bonded to the substrate.

6 is a side view showing a main part of a resin attaching mechanism in the laminate module corresponding to FIG.

FIG. 7 is an enlarged end view of the tape-shaped resin used in the laminate module.

FIG. 8 is an enlarged end view showing another example of the structure of the tape-shaped resin used in the laminate module.

FIG. 9 is an enlarged end view showing a tape-shaped resin cut groove forming state corresponding to FIG. 7;

10 is a schematic vertical sectional front view showing a main part of a loading section of a chip tray stocker in an alignment module which is a main part of the assembling apparatus corresponding to FIG.

11 is a schematic cross-sectional plan view showing a main part of a loading section of the chip tray stocker corresponding to FIG.

FIG. 12 is a schematic enlarged plan view showing a chip tray stored in a chip tray stocker corresponding to FIG.

FIG. 13 is a schematic plan view showing another example of the shape of the chip tray.

FIG. 14 is an explanatory view of a chip tray adapter;
FIG. 14 (1) is a schematic perspective view showing a semiconductor LSI chip tray adapter, and FIG. 14 (2) is a schematic perspective view showing a small chip tray accommodated in the tray adapter.

FIG. 15 is a schematic perspective view showing a state in which a small chip tray is stored in a chip tray adapter corresponding to FIG. 14;

[Explanation of symbols]

 Reference Signs List 1 base plate 1a base plate 1b base plate 1c base plate 2 carrier 3 substrate stock module 4 tape resin 4a tape resin 5 laminate module 6 baking module 7 chip tray 8 pickup 9 semiconductor LSI chip 10 alignment module 11 cure module 12 Protective film 12a Protective film 13 Tape-shaped resin layer 13a Tape-shaped resin layer 14 Supply reel 15 Take-up reel 16 Take-up reel 17 Guide roll 18 Guide section 19 Heating mechanism 20 Cooling gas supply mechanism 21 Cut groove formation Mechanism 22 Cutter 23 Cutting groove 24 Heating head 25 Gas outlet 26 Gas passage 27 Chip tray 28 Chip tray stocker 29 Chip tray feeder 30 Small chip tray 31 Chip tray adapter 32 Fitting recess

Continued on the front page (72) Inventor Masafumi Morisawa 122-2 Magawa, Makishima-cho, Uji-city, Kyoto Prefecture Towa Co., Ltd. System Engineering Dept. 3 Design Department (72) Inventor Katsunobu Yoshimoto 122-2, Makishima-machi, Uji-shi, Kyoto Inside Towa Co., Ltd. (72) Inventor Nobusuke Iwata 122-2 Megimacho, Makishima-cho, Uji-city, Kyoto Towa Co., Ltd. (72) Inventor Takaki Kuno 122-2, Magawa, Makishima-cho, Uji-shi, Kyoto Toh Wa Co., Ltd.

Claims (2)

[Claims] 1. Each of the processing functions required for assembling a flip chip is divided into separate units to form a module.
A flip chip assembling apparatus, wherein each of the divided modules is detachably configured. 2. A substrate stock module having a function of dividing each processing function required for assembling a flip chip and transferring a large number of substrates from a substrate storage tray to a carrier for transport via a pickup; A lamination module having a function of separately attaching a tape-shaped resin layer of a tape-shaped resin to each substrate on the carrier, and heating each substrate on the carrier to which the tape-shaped resin layer is attached. A baking module having a function of drying, and a function of pressing a semiconductor LSI chip taken out from a tray for a semiconductor LSI chip via a pickup onto each of the substrates on the carrier in a face-down state and pressing the same. The alignment module and the substrates on the carrier on which the semiconductor LSI chip has been pressed are further heated and pressurized to form a resin. A flip chip assembling apparatus, comprising: a curing module having a function of gelling, melting of solder, and curing of resin, and wherein each of the divided modules is detachably mounted.