JPH11325817A - レ―ザ干渉計装置 - Google Patents

レ―ザ干渉計装置

Info

Publication number
JPH11325817A
JPH11325817A JP11104815A JP10481599A JPH11325817A JP H11325817 A JPH11325817 A JP H11325817A JP 11104815 A JP11104815 A JP 11104815A JP 10481599 A JP10481599 A JP 10481599A JP H11325817 A JPH11325817 A JP H11325817A
Authority
JP
Japan
Prior art keywords
equation
light beams
turbulence
retarder
measurement
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Pending
Application number
JP11104815A
Other languages
English (en)
Japanese (ja)
Other versions
JPH11325817A5 (https=
Inventor
Paul Zorabedian
ポール・ゾラベディアン
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
HP Inc
Original Assignee
Hewlett Packard Co
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Hewlett Packard Co filed Critical Hewlett Packard Co
Publication of JPH11325817A publication Critical patent/JPH11325817A/ja
Publication of JPH11325817A5 publication Critical patent/JPH11325817A5/ja
Pending legal-status Critical Current

Links

Classifications

    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01B—MEASURING LENGTH, THICKNESS OR SIMILAR LINEAR DIMENSIONS; MEASURING ANGLES; MEASURING AREAS; MEASURING IRREGULARITIES OF SURFACES OR CONTOURS
    • G01B9/00—Measuring instruments characterised by the use of optical techniques
    • G01B9/02—Interferometers
    • G01B9/02001—Interferometers characterised by controlling or generating intrinsic radiation properties
    • G01B9/02007—Two or more frequencies or sources used for interferometric measurement
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01B—MEASURING LENGTH, THICKNESS OR SIMILAR LINEAR DIMENSIONS; MEASURING ANGLES; MEASURING AREAS; MEASURING IRREGULARITIES OF SURFACES OR CONTOURS
    • G01B2290/00—Aspects of interferometers not specifically covered by any group under G01B9/02
    • G01B2290/20—Dispersive element for generating dispersion
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01B—MEASURING LENGTH, THICKNESS OR SIMILAR LINEAR DIMENSIONS; MEASURING ANGLES; MEASURING AREAS; MEASURING IRREGULARITIES OF SURFACES OR CONTOURS
    • G01B2290/00—Aspects of interferometers not specifically covered by any group under G01B9/02
    • G01B2290/70—Using polarization in the interferometer

Landscapes

  • Physics & Mathematics (AREA)
  • General Physics & Mathematics (AREA)
  • Instruments For Measurement Of Length By Optical Means (AREA)
JP11104815A 1998-04-30 1999-04-13 レ―ザ干渉計装置 Pending JPH11325817A (ja)

Applications Claiming Priority (2)

Application Number Priority Date Filing Date Title
US070,473 1998-04-30
US09/070,473 US6157458A (en) 1998-04-30 1998-04-30 Achromatic quarter wave plate for an air turbulence compensating inteferometer

Publications (2)

Publication Number Publication Date
JPH11325817A true JPH11325817A (ja) 1999-11-26
JPH11325817A5 JPH11325817A5 (https=) 2006-06-15

Family

ID=22095507

Family Applications (1)

Application Number Title Priority Date Filing Date
JP11104815A Pending JPH11325817A (ja) 1998-04-30 1999-04-13 レ―ザ干渉計装置

Country Status (3)

Country Link
US (1) US6157458A (https=)
EP (1) EP0953821B1 (https=)
JP (1) JPH11325817A (https=)

Families Citing this family (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2003222724A (ja) 2002-01-31 2003-08-08 Hitachi Ltd １／４波長板、光学ユニット、及びそれを用いた反射型液晶表示装置
DE102005023489B4 (de) * 2005-05-17 2014-01-30 Dr. Johannes Heidenhain Gmbh Positionsmesseinrichtung zur Bestimmung der Position zweier entlang einer Messrichtung zueinander beweglicher Objekte und Verfahren zur Bildung eines Referenzimpulses für eine derartige Positionsmesseinrichtung

Family Cites Families (7)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPH0210201A (ja) * 1988-06-29 1990-01-16 Nippon Seiko Kk 二波長干渉計による測長方法及び装置
US4961634A (en) * 1989-06-14 1990-10-09 The University Of Alabama In Huntsville Infrared achromatic retarder
JP3244769B2 (ja) * 1991-07-11 2002-01-07 キヤノン株式会社 測定方法及び測定装置
US5404222A (en) * 1994-01-14 1995-04-04 Sparta, Inc. Interferametric measuring system with air turbulence compensation
US5677768A (en) * 1996-07-03 1997-10-14 Hewlett-Packard Company Method and interferometric apparatus for measuring changes in displacement of an object in a rotating reference frame
US5838485A (en) * 1996-08-20 1998-11-17 Zygo Corporation Superheterodyne interferometer and method for compensating the refractive index of air using electronic frequency multiplication
US5748313A (en) * 1996-11-14 1998-05-05 Hewlett-Packard Company Signal-to-noise ratio of second harmonic interferometers

Also Published As

Publication number Publication date
EP0953821A2 (en) 1999-11-03
EP0953821A3 (en) 2001-04-25
US6157458A (en) 2000-12-05
EP0953821B1 (en) 2005-12-28

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