JPH11309595A - Laser beam machine, and laser beam machining method - Google Patents

Abstract

PROBLEM TO BE SOLVED: To ensure the form of a machined wall surface and the machining quality by providing transfer lens between a mask and a work, and >=2 collimators between a laser beam oscillator and the mask, and moving one collimator on the laser beam. SOLUTION: The work 6 is machined by the laser beam by outputting the laser beam from a laser beam oscillator 1. A mask 4 is arranged between the work 6 and the laser beam oscillator 1, and a transfer lens 5 is arranged between the mask 4 and the work 6. A collimator comprising a fixed lens 2 and a movable lens 3 is equipped between the laser beam oscillator 1 and the mask 4. The movable lens 3 to constitute the collimator is moved on the direction of the optical axis by a driver 8. One lens of the collimator is fixed on the optical axis, and the remaining lens is moved on the laser beam. A control means to control a moving means of the collimator is provided, and the position of the movable lens 3 to save the labor.

Description

DETAILED DESCRIPTION OF THE INVENTION

[0001]

BACKGROUND OF THE INVENTION 1. Field of the Invention The present invention relates to a laser drilling machine for printed circuit boards.

[0002]

2. Description of the Related Art A conventional technique will be described below. FIG. 6 shows an example of a conventional laser drilling machine. FIG.
In the figure, 101 is a laser oscillator, 102 is a collimator, 103 is a mask, 104 is a transfer lens, and 105 is a workpiece, for example, a resin substrate containing glass fiber.

Next, the operation of the conventional technique will be described. The laser beam output from the laser oscillator 101 is enlarged and reduced in beam diameter by a collimator 102 and a mask 103
Is irradiated. The irradiated laser light is partially shielded by the mask 103, and the laser light passes only through the central hole,
An image is formed on the workpiece 105 by the transfer lens 104. Therefore, the shape of the mask 103 is imaged and processed on the workpiece 105.

[0004]

However, in the above-mentioned conventional configuration, a short pulse (about 1 μS) of laser light is used in order to reduce the energy applied to the mask in order to prevent burning of the mask. When the material or the mask diameter changes, the glass fiber remains due to the difference in the energy transmittance or the processing threshold value, the processing bottom surface is damaged, and the processing quality cannot be maintained. Was.

An object of the present invention is to solve the above-mentioned conventional problems, and an object of the present invention is to provide a stable processing quality when laser drilling various kinds of substrate materials using masks having various diameters. I do.

[0006]

In order to achieve the above object, a first means of the present invention is to arrange a laser oscillator for outputting a laser beam, and a laser oscillator arranged between the laser oscillator and a workpiece to be machined by the laser beam. And a transfer lens disposed between the mask and the workpiece and a collimator between the laser oscillator and the mask, and at least one lens constituting the collimator is moved in the optical axis direction. This is provided with a moving means for moving.

The second means is a laser oscillator for outputting a laser beam, a mask disposed between the laser oscillator and a workpiece processed by the laser beam, and a mask disposed between the mask and the workpiece. A transfer lens provided between the laser oscillator and the mask; and a moving means for moving one of the collimators onto the laser beam.

The third means includes a laser oscillator for outputting a laser beam, a mask disposed between the laser oscillator and the workpiece to be processed by the laser beam, and a mask disposed between the mask and the workpiece. In a laser processing apparatus provided with two or more collimators between an arranged transfer lens and the laser oscillator and the mask, at least one lens among the lenses constituting the collimator is fixedly arranged on a laser beam. Then, a moving means for moving the remaining lenses onto the laser beam is provided.

A fourth means is a laser oscillator for outputting a laser beam, a mask arranged between the laser oscillator and a workpiece processed by the laser beam, and a mask arranged between the mask and the workpiece. And a collimator having at least two collimators between the transfer lens and the laser oscillator and the mask, one of which is configured to emit laser light, and the other is configured to converge laser light, and the collimator Is provided with a moving means for moving one of the above on the laser beam.

Fifth means is a laser oscillator for outputting a laser beam, a mask disposed between the laser oscillator and a workpiece processed by the laser beam, and a mask disposed between the mask and the workpiece. A transfer lens, and two or more collimators between the laser oscillator and the mask, wherein one of the collimators is moved on the laser beam, and moving means for moving the collimator in the optical axis direction is provided. Things.

Sixth means is a laser oscillator for outputting a laser beam, a mask disposed between the laser oscillator and a workpiece processed by the laser beam, and a mask disposed between the mask and the workpiece. Provided two or more collimators between the transfer lens and the laser oscillator and the mask, at least one lens of the lenses constituting the collimator is fixedly arranged on the laser beam, the remaining lens A moving means is provided for moving the collimator in the optical axis direction while moving it on the laser beam.

A seventh means is a laser oscillator for outputting a laser beam, a mask disposed between the laser oscillator and a workpiece processed by the laser beam, and a mask disposed between the mask and the workpiece. Provided two or more collimators between the transfer lens and the laser oscillator and the mask, at least one lens of the lenses constituting the collimator is fixedly arranged on the laser beam, the remaining lens Moving means for moving at least one lens constituting the collimator in the optical axis direction while moving the laser beam on the laser beam is provided.

Eighth means is a laser oscillator for outputting a laser beam, a mask disposed between the laser oscillator and a workpiece processed by the laser beam, and a mask disposed between the mask and the workpiece. And a collimator having at least two collimators between the transfer lens and the laser oscillator and the mask, one of which is configured to emit laser light, and the other is configured to converge laser light, and the collimator Moving means for moving one of the collimators on the laser beam and moving the entire collimator in the optical axis direction.

The ninth means is a laser oscillator for outputting a laser beam, a mask disposed between the laser oscillator and a workpiece processed by the laser beam, and a mask disposed between the mask and the workpiece. And a collimator having at least two collimators between the transfer lens and the laser oscillator and the mask, one of which is configured to emit laser light, and the other is configured to converge laser light, and the collimator And moving means for moving the entire collimator in the optical axis direction and moving the entire collimator in the optical axis direction.

The tenth means is a laser oscillator for outputting a laser beam, a mask arranged between the laser oscillator and a workpiece processed by the laser beam, and a mask arranged between the mask and the workpiece. A moving means for moving at least one lens constituting the collimator in the direction of the optical axis, and a control means for controlling at least the moving means. It is a thing.

Eleventh means is a laser oscillator for outputting a laser beam, a mask disposed between the laser oscillator and a workpiece to be processed by the laser beam, and a mask disposed between the mask and the workpiece. A transfer lens, and two or more collimators between the laser oscillator and the mask, a moving means for moving one of the collimators onto the laser beam, and a control means for controlling at least the moving means. It is a thing.

The twelfth means is a laser oscillator for outputting a laser beam, a mask arranged between the laser oscillator and a workpiece processed by the laser beam, and a mask arranged between the mask and the workpiece. Provided two or more collimators between the transfer lens and the laser oscillator and the mask, at least one lens of the lenses constituting the collimator is fixedly arranged on the laser beam, the remaining lens It is provided with a moving means for moving on the laser beam and at least a control means for controlling the moving means.

A thirteenth means is a laser oscillator for outputting a laser beam, a mask disposed between the laser oscillator and a workpiece to be processed by the laser beam, and a mask disposed between the mask and the workpiece. And a collimator having at least two collimators between the transfer lens and the laser oscillator and the mask, one of which is configured to emit laser light, and the other is configured to converge laser light, and the collimator And a control means for controlling at least the moving means.

Fourteenth means is a laser oscillator for outputting a laser beam, a mask arranged between the laser oscillator and a workpiece processed by the laser beam, and a mask arranged between the mask and the workpiece. Moving means for moving one of the collimators on the laser beam, and moving the collimator in the direction of the optical axis, comprising at least two collimators between the transferred transfer lens and the laser oscillator and the mask; and A control means for controlling the moving means is provided.

The fifteenth means is a laser oscillator for outputting a laser beam, a mask disposed between the laser oscillator and a workpiece processed by the laser beam, and a mask disposed between the mask and the workpiece. Provided two or more collimators between the transfer lens and the laser oscillator and the mask, at least one lens of the lenses constituting the collimator is fixedly arranged on the laser beam, the remaining lens A moving means for moving the collimator in the direction of the optical axis while moving it on the laser beam, and a control means for controlling at least the moving means are provided.

Sixteenth means is a laser oscillator for outputting a laser beam, a mask disposed between the laser oscillator and a workpiece to be processed by the laser beam, and a mask disposed between the mask and the workpiece. Provided two or more collimators between the transfer lens and the laser oscillator and the mask, at least one lens of the lenses constituting the collimator is fixedly arranged on the laser beam, the remaining lens A moving means for moving at least one or more lenses constituting the collimator in the direction of the optical axis while moving on the laser beam, and a control means for controlling at least the moving means are provided.

Seventeenth means is a laser oscillator for outputting a laser beam, a mask disposed between the laser oscillator and a workpiece processed by the laser beam, and a mask disposed between the mask and the workpiece. And a collimator having at least two collimators between the transfer lens and the laser oscillator and the mask, one of which is configured to emit laser light, and the other is configured to converge laser light, and the collimator Is moved on the laser beam, and a moving means for moving the entire collimator in the optical axis direction, and a control means for controlling at least the moving means are provided.

Eighteenth means is a laser oscillator for outputting a laser beam, a mask disposed between the laser oscillator and a workpiece processed by the laser beam, and a mask disposed between the mask and the workpiece. And a collimator having at least two collimators between the transfer lens and the laser oscillator and the mask, one of which is configured to emit laser light, and the other is configured to converge laser light, and the collimator Moving means for moving one of the collimators on the laser beam, moving the entire collimator in the optical axis direction, and moving the entire collimator in the optical axis direction, and controlling means for controlling at least the moving means. It is a thing.

The nineteenth means is a laser oscillator for outputting a laser beam, a mask disposed between the laser oscillator and a workpiece processed by the laser beam, and a mask disposed between the mask and the workpiece. Moving the at least one lens constituting the collimator in the optical axis direction by using a laser processing device provided with a collimator between the transfer lens and the laser oscillator and the mask.

A twentieth means is a laser oscillator for outputting a laser beam, a mask disposed between the laser oscillator and a workpiece processed by the laser beam, and a mask disposed between the mask and the workpiece. Moving one of the collimators onto the laser beam using a laser processing apparatus provided with two or more collimators between the transferred lens and the laser oscillator and the mask.

A twenty-first means is a laser oscillator for outputting a laser beam, a mask disposed between the laser oscillator and a workpiece processed by the laser beam, and a mask disposed between the mask and the workpiece. Using a laser processing apparatus having two or more collimators between the transferred transfer lens and the laser oscillator and the mask, at least one of the lenses constituting the collimator is fixed on a laser beam. Positioning and moving the remaining lens over the laser beam.

The twenty-second means includes a laser oscillator for outputting a laser beam, a mask disposed between the laser oscillator and a workpiece processed by the laser beam, and a mask disposed between the mask and the workpiece. Using a laser processing apparatus provided with two or more collimators between the transfer lens and the laser oscillator and the mask, one of which has a configuration in which laser light diverges, and the other has a configuration in which laser light converges. And moving one of the collimators over the laser beam.

A twenty-third means is a laser oscillator for outputting a laser beam, a mask arranged between the laser oscillator and a workpiece to be machined by the laser beam, and a mask arranged between the mask and the workpiece. Using a laser processing device having two or more collimators between the transferred transfer lens and the laser oscillator and the mask, one of the collimators is moved on the laser beam, and the collimator is moved in the optical axis direction. It has a moving step.

The twenty-fourth means includes a laser oscillator for outputting a laser beam, a mask disposed between the laser oscillator and a workpiece processed by the laser beam, and a mask disposed between the mask and the workpiece. Using a laser processing apparatus having two or more collimators between the transferred transfer lens and the laser oscillator and the mask, at least one of the lenses constituting the collimator is fixed on a laser beam. And moving the remaining lens over the laser beam and moving the entire collimator in the optical axis direction.

A twenty-fifth means is a laser oscillator for outputting a laser beam, a mask disposed between the laser oscillator and a workpiece processed by the laser beam, and a mask disposed between the mask and the workpiece. Using a laser processing apparatus having two or more collimators between the transferred transfer lens and the laser oscillator and the mask, at least one of the lenses constituting the collimator is fixed on a laser beam. The method includes a step of disposing, moving the remaining lenses on the laser beam, and moving at least one lens constituting the collimator in the optical axis direction.

A twenty-sixth means is a laser oscillator for outputting a laser beam, a mask disposed between the laser oscillator and a workpiece to be processed by the laser beam, and a mask disposed between the mask and the workpiece. Using a laser processing apparatus provided with two or more collimators between the transfer lens and the laser oscillator and the mask, one of which has a configuration in which laser light diverges, and the other has a configuration in which laser light converges. And moving one of the collimators on the laser beam and moving the entire collimator in the optical axis direction.

The twenty-seventh means is a laser oscillator for outputting a laser beam, a mask arranged between the laser oscillator and a workpiece to be machined by the laser beam, and a mask arranged between the mask and the workpiece. Using a laser processing apparatus provided with two or more collimators between the transfer lens and the laser oscillator and the mask, one of which has a configuration in which laser light diverges, and the other has a configuration in which laser light converges. And moving one of the collimators on the laser beam, moving the entire collimator in the optical axis direction, and moving the entire collimator in the optical axis direction.

[0033]

DESCRIPTION OF THE PREFERRED EMBODIMENTS In a construction for realizing the first and tenth means, a beam irradiating a mask is provided by providing a moving means for moving at least one lens constituting a collimator in an optical axis direction. Adjustable diameter,
The brightness and energy of the beam passing through the mask can be controlled, and the processing quality such as the shape and shape of the inner wall of the processing hole due to the change of the material or the mask diameter can be stabilized.

When a short pulse of about 1 μS is output from a gas laser to reduce the energy applied to the mask as in the conventional case, the laser pulse waveform becomes unstable.
When the present invention is used, the energy passing through the mask can be controlled while maintaining a relatively stable laser pulse waveform, for example, around 10 μS, so that the energy reaching the processing point can be stabilized, and the stable processing quality can be obtained. Can be obtained.

In the construction for realizing the second and eleventh means, a moving means for moving one of the collimators on the laser beam is provided so that the beam diameter irradiated on the mask can be adjusted, and It is possible to control the brightness and energy of the generated beam, and to stabilize the processing quality such as the shape and shape of the inner wall of the processing hole due to the change of the material and the change of the mask diameter.

When the gas laser outputs a short pulse of about 1 μS as in the conventional case, the laser pulse waveform becomes unstable. However, when the present invention is used, the laser pulse maintains a relatively stable waveform of, for example, about 10 μS. However, since the energy passing through the mask can be controlled, the energy reaching the processing point can be stabilized, and a stable processing quality can be obtained.

In the configuration for realizing the third and twelfth means, at least one of the lenses constituting the collimator is fixedly arranged on a laser beam, and the remaining lenses are moved on the laser beam. Moving means to adjust the beam diameter irradiated to the mask,
The brightness and energy of the beam passing through the mask can be controlled, and the processing quality such as the shape and shape of the inner wall of the processing hole due to the change of the material or the mask diameter can be stabilized.

When a short pulse of about 1 .mu.S is output from a gas laser as in the prior art, the laser pulse waveform becomes unstable. However, when the present invention is used, a laser pulse having a relatively stable waveform of, for example, about 10 .mu.S is maintained. However, since the energy passing through the mask can be controlled, the energy reaching the processing point can be stabilized, and a stable processing quality can be obtained.

In the configuration for realizing the fourth and thirteenth means, a collimator having a configuration in which one is configured to emit laser light and the other configured to converge laser light is disposed.
And moving means for moving one of the collimators on the laser beam, the diameter of a beam irradiated on the mask can be adjusted, the brightness and energy of the beam passing through the mask can be controlled, and the material can be changed. It is possible to stabilize the processing quality such as the shape and shape of the inner wall of the processing hole due to the change in the diameter of the mask and the diameter of the mask.

When a conventional gas laser outputs a short pulse of about 1 μS, the laser pulse waveform becomes unstable. However, when the present invention is used, the laser pulse maintains a relatively stable waveform of, for example, about 10 μS. However, since the energy passing through the mask can be controlled, the energy reaching the processing point can be stabilized, and a stable processing quality can be obtained.

In the configuration for realizing the fifth and fourteenth means, a moving means for moving one of the collimators on the laser beam and moving the collimator in the optical axis direction is provided, and the mask is irradiated. The beam diameter can be adjusted, the brightness and energy of the beam passing through the mask can be controlled, and the processing quality such as the shape and shape of the inner wall of the processing hole due to the change of the material or the mask diameter can be stabilized. .

When a conventional gas laser outputs a short pulse of about 1 μS, the laser pulse waveform becomes unstable. However, when the present invention is used, the laser pulse maintains a relatively stable waveform, for example, about 10 μS. However, since the energy passing through the mask can be controlled, the energy reaching the processing point can be stabilized, and a stable processing quality can be obtained.

In the arrangement for realizing the sixth and fifteenth means, at least one of the lenses constituting the collimator is fixedly arranged on a laser beam, and the remaining lenses are moved on the laser beam. In addition, a moving means for moving the entire collimator in the optical axis direction is provided, the diameter of the beam irradiated on the mask can be adjusted, the brightness and energy of the beam passing through the mask can be controlled, and the material can be changed or the mask can be changed. It is possible to stabilize the processing quality such as the shape and shape of the inner wall of the processing hole due to the change in the diameter.

When a short pulse of about 1 μS is output from a gas laser as in the prior art, the laser pulse waveform becomes unstable. However, when the present invention is used, the laser pulse maintains a relatively stable waveform of, for example, about 10 μS. However, since the energy passing through the mask can be controlled, the energy reaching the processing point can be stabilized, and a stable processing quality can be obtained.

In the arrangement for realizing the seventh and sixteenth means, at least one of the lenses constituting the collimator is fixedly arranged on a laser beam, and the remaining lenses are moved on the laser beam. Moving means for moving at least one or more lenses constituting the collimator in the direction of the optical axis so that the diameter of the beam irradiated on the mask can be adjusted and the brightness and energy of the beam passing through the mask can be controlled. This makes it possible to stabilize the processing quality such as the shape and shape of the inner wall of the processing hole due to the change of the material and the change of the mask diameter.

When a conventional gas laser outputs a short pulse of about 1 μS, the laser pulse waveform becomes unstable. However, when the present invention is used, the laser pulse maintains a relatively stable waveform of, for example, about 10 μS. However, since the energy passing through the mask can be controlled, the energy reaching the processing point can be stabilized, and a stable processing quality can be obtained.

In the configuration for realizing the eighth and seventeenth means, a collimator having one configuration in which laser light is diverged and the other configuration in which laser light converges is arranged.
And moving means for moving one of the collimators on the laser beam and moving the entire collimator in the direction of the optical axis, so that the diameter of the beam irradiated on the mask can be adjusted, and the brightness of the beam passing through the mask can be adjusted. And the energy can be controlled, and the processing quality such as the shape and shape of the inner wall of the processing hole due to the change of the material and the change of the mask diameter can be stabilized.

When a short pulse of about 1 μS is output from a gas laser as in the prior art, the laser pulse waveform becomes unstable. However, when the present invention is used, the laser pulse maintains a relatively stable waveform of, for example, about 10 μS. However, since the energy passing through the mask can be controlled, the energy reaching the processing point can be stabilized, and a stable processing quality can be obtained.

In the configuration for realizing the ninth and eighteenth means, a collimator having one configuration in which laser light is diverged and the other configured to converge laser light is arranged.
And moving means for moving one of the collimators on the laser beam, moving the entire collimator in the optical axis direction, and moving the entire collimator in the optical axis direction, and providing a beam diameter irradiated on the mask. Can be adjusted, the brightness and energy of the beam passing through the mask can be controlled, and the processing quality such as the shape and shape of the inner wall of the processing hole due to the change of the material and the change of the mask diameter can be stabilized.

When a short pulse of about 1 μS is output from a gas laser as in the prior art, the laser pulse waveform becomes unstable. However, the present invention maintains a relatively stable laser pulse, for example, a waveform of about 10 μS. However, since the energy passing through the mask can be controlled, the energy reaching the processing point can be stabilized, and a stable processing quality can be obtained.

In the twentieth means, one of the collimators is
The method has a method of moving one on the laser beam, adjusting the beam diameter irradiated on the mask, and controlling the brightness of the beam passing through the mask, thereby stabilizing the processing quality such as the shape and shape of the inner wall of the processing hole. Can be

In the twenty-first means, at least one of the lenses constituting the collimator is fixedly arranged on the laser beam, and the remaining lenses are moved on the laser beam to irradiate the mask. It is possible to control the brightness and energy of the beam passing through the mask by adjusting the beam diameter to be formed, and to stabilize the processing quality such as the shape and shape of the inner wall of the processing hole due to the change of the material and the change of the mask diameter. it can.

When a short pulse of about 1 μS is output from a gas laser to reduce the energy applied to the mask as in the prior art, the laser pulse waveform becomes unstable.
When the present invention is used, the energy passing through the mask can be controlled while maintaining a relatively stable laser pulse waveform, for example, around 10 μS, so that the energy reaching the processing point can be stabilized, and the stable processing quality can be obtained. Can be obtained.

In the twenty-second means, a collimator, one of which is configured to diverge the laser beam and the other is configured to converge the laser beam, is arranged, and one of the collimators is moved over the laser beam. By adjusting the diameter of the beam irradiated on the mask, the brightness and energy of the beam passing through the mask can be controlled, and the processing quality such as the shape and shape of the inner wall of the processing hole accompanying the change of the material or the diameter of the mask can be improved. Can be stabilized.

Although the laser pulse waveform becomes unstable when the gas laser outputs a short pulse of about 1 μS as in the prior art, the present invention maintains a relatively stable laser pulse, for example, a waveform of about 10 μS when the present invention is used. However, since the energy passing through the mask can be controlled, the energy reaching the processing point can be stabilized, and a stable processing quality can be obtained.

In the twenty-third means, one of the collimators is
By moving one on the laser beam and moving the collimator in the direction of the optical axis, the beam diameter applied to the mask can be adjusted, and the brightness and energy of the beam passing through the mask can be controlled. It is possible to stabilize the processing quality such as the shape and shape of the inner wall of the processing hole due to the change of the diameter and the mask diameter.

When a short pulse of about 1 .mu.S is output from a gas laser as in the prior art, the laser pulse waveform becomes unstable. However, the present invention maintains a relatively stable laser pulse, for example, about 10 .mu.S. However, since the energy passing through the mask can be controlled, the energy reaching the processing point can be stabilized, and a stable processing quality can be obtained.

In the twenty-fourth means, at least one lens among the lenses constituting the collimator is fixedly arranged on the laser beam, the remaining lenses are moved on the laser beam, and the entire collimator is illuminated. By moving in the axial direction, the diameter of the beam irradiated on the mask can be adjusted, and the brightness and energy of the beam passing through the mask can be controlled. In addition, the processing quality such as the shape can be stabilized.

When a conventional gas laser outputs a short pulse of about 1 μS, the laser pulse waveform becomes unstable. However, when the present invention is used, the laser pulse maintains a relatively stable waveform of, for example, about 10 μS. However, since the energy passing through the mask can be controlled, the energy reaching the processing point can be stabilized, and a stable processing quality can be obtained.

In the twenty-fifth means, at least one lens among the lenses constituting the collimator is fixedly arranged on the laser beam, and the remaining lenses are moved on the laser beam to constitute the collimator. By moving at least one lens in the optical axis direction, the diameter of the beam irradiated on the mask can be adjusted, and the brightness and energy of the beam passing through the mask can be controlled. It is possible to stabilize the processing quality such as the shape and shape of the inner wall of the processing hole due to the change.

When a conventional gas laser outputs a short pulse of about 1 μS, the laser pulse waveform becomes unstable. However, when the present invention is used, the laser pulse maintains a relatively stable waveform of, for example, about 10 μS. However, since the energy passing through the mask can be controlled, the energy reaching the processing point can be stabilized, and a stable processing quality can be obtained.

In the twenty-sixth means, a collimator having one structure for diverging the laser light and the other structure for converging the laser light is arranged, and one of the collimators is moved on the laser beam. By moving the entire collimator in the optical axis direction, the diameter of the beam irradiated on the mask can be adjusted, and the brightness and energy of the beam passing through the mask can be controlled. Accordingly, the processing quality such as the shape and shape of the inner wall of the processing hole can be stabilized.

When a conventional gas laser outputs a short pulse of about 1 μS, the laser pulse waveform becomes unstable. However, when the present invention is used, the laser pulse maintains a relatively stable waveform of, for example, about 10 μS. However, since the energy passing through the mask can be controlled, the energy reaching the processing point can be stabilized, and a stable processing quality can be obtained.

In the twenty-seventh means, a collimator, one of which is configured to diverge the laser beam and the other is configured to converge the laser beam, is arranged, and one of the collimators is moved on the laser beam. Moving the entire collimator in the direction of the optical axis and moving the entire collimator in the direction of the optical axis to adjust the diameter of the beam irradiated on the mask and control the brightness and energy of the beam passing through the mask. This makes it possible to stabilize the processing quality such as the shape and shape of the inner wall of the processing hole due to the change of the material and the change of the mask diameter.

When a conventional gas laser outputs a short pulse of about 1 μS, the laser pulse waveform becomes unstable. However, when the present invention is used, the laser pulse maintains a relatively stable waveform of, for example, about 10 μS. However, since the energy passing through the mask can be controlled, the energy reaching the processing point can be stabilized, and a stable processing quality can be obtained.

(Embodiment 1) An embodiment of the present invention will be described below with reference to the drawings.

FIG. 1 shows the first, tenth, and twentieth embodiments. In FIG. 1A, reference numeral 1 denotes a laser oscillator, and reference numerals 2 and 3 denote lenses constituting a collimator. In this embodiment, a Kepler-type collimator is formed. 4 is a mask, 5 is a transfer lens, 6 is a workpiece, 7 is a driving device for the movable lens 3,
8 is a driver. FIG. 1B shows the state of laser light when the distance between the fixed lens 2 and the movable lens 3 is reduced, as an example of moving the movable lens 3. Hereinafter, the operation of the present embodiment will be described.
In the figure, a Kepler-type collimator is configured, and the diameter of a beam irradiated on the mask 4 can be controlled by changing the distance between the fixed lens 2 and the movable lens 3. FIG.
As shown in (b), when the movable lens 3 is brought closer to the fixed lens 2, the beam tends to spread toward the diverging side, and when the movable lens 3 is moved farther away, a beam that tends to converge is obtained. The diameter can be controlled. Since the diameter of the mask 4 is determined by the diameter required for processing, a beam diameter suitable for the mask diameter can be obtained.

FIG. 2 shows a luminance distribution of a single mode laser beam. As is clear from FIG. 2, the beam has a distribution in which the luminance is high at the center and the luminance decreases toward the periphery. Therefore, when the mask is irradiated with a laser beam having a beam diameter appropriate for the mask diameter, it is possible to control the brightness of the laser beam passing therethrough and the energy passing through the mask, and as a result, the shape and shape of the hole wall surface processed For example, a difference in processing quality due to a change in mask diameter or material can be reduced, and stable processing quality can be ensured. Also,
The driving device 7 can save labor by controlling the position of the movable lens 3 according to the driver 8 instructed by the controller.

(Embodiment 2) FIG. 3 shows a second embodiment of the present invention.
Third, fourth, eleventh, twelfth, thirteenth, twenty-first, second
2. The twenty-third embodiment has been described. In FIG. 3A, 11 is a laser oscillator, 12, 13, and 14 are lenses constituting a collimator. Two sets of Kepler type collimators in the case of this example are constituted, 12 is a fixed lens, and 13 and 14 are fixed lenses. The first movable lens and the second movable lens, and the laser is incident on the second movable lens and irradiates the mask while converging. 15 is a mask, 16 is a transfer lens, 17 is a workpiece, 18 is a driving device for the movable lenses 13 and 14,
19 is a driver. FIG. 3B shows the state of the laser beam when the mask is irradiated while the laser beam enters the first movable lens 13 and diverges, as an example of moving the movable lenses 13 and 14. .

The operation of this embodiment will now be described with reference to the drawings, taking a Kepler-type collimator as an example. The distance between the fixed lens 12 and the first movable lens 13 and the second movable lens 14 is set to be different from each other, and FIG.
When the laser beam is incident on the first movable lens 13 shown in (b), the laser beam is adjusted to a divergent beam and irradiated on the mask 15. On the other hand, when the laser beam is incident on the second movable lens 14 shown in FIG.
5 has been irradiated.

By switching between the two sets of collimators adjusted to different characteristics in this way, it is possible to control the diameter of the beam irradiated on the mask 4.

As is clear from FIG. 2, the beam has a distribution in which the luminance is high at the center and decreases toward the periphery. Therefore, when the mask is irradiated with a laser beam having a beam diameter appropriate for the mask diameter, it is possible to control the brightness of the laser beam passing therethrough and the energy passing through the mask, and as a result, the shape and shape of the hole wall surface processed For example, a difference in processing quality due to a change in mask diameter or material can be reduced, and stable processing quality can be ensured. In particular, in the case of a gas laser, the laser pulse waveform becomes unstable when a short pulse of about 1 μS is output. However, according to the present invention, the laser pulse passes through the mask while maintaining a relatively stable waveform of, for example, about 10 μS. Energy can be controlled, so that the energy reaching the machining point can be stabilized,
It is possible to obtain stable processing quality.

Further, the driving device 7 can save power by controlling the position of the movable lens 3 in accordance with the driver 8 instructed by the controller.

(Embodiment 3) FIG. 4 shows a fifth embodiment of the present invention.
Sixth, fourteenth, fifteenth, nineteenth, twenty-fourth, and twenty-fifth embodiments have been described. In FIG. 4A, 21 is a laser oscillator, 22 and 23 are lenses forming a first collimator, and 24 and 25 are lenses forming a second collimator. In this example, two Galileo collimators are used. It is composed of pairs. In this figure, a laser beam is incident on a Galileo collimator composed of 24 and 25 lenses, and irradiates the mask while diverging. 26 is a mask, 27 is a galvano scanner that scans a predetermined location with a laser beam, 28
Is an f-Θ lens having a transfer lens function, 29 is a workpiece, 30 is a driving device for switching between the two sets of collimators, 31 is a driving device for moving the collimator in the optical axis direction,
32 is a driver. FIG. 4B shows a first movable lens 13 as an example of moving two sets of collimators.
The state of the laser beam when the mask is irradiated while the laser beam enters and converges on the mask is shown.

The operation of the present embodiment will now be described with reference to the drawings, taking a Galileo collimator as an example. The collimators are arranged so that the distance between the first collimator including the lenses 22 and 23 and the second collimator including the lenses 24 and 25 are different from each other. In the example shown in FIG. 4B, when a laser beam is incident on the first collimator, the laser beam is adjusted to a convergent beam and irradiated on the mask 26. On the other hand, in the example shown in FIG. 4A, when a laser beam is incident on the second collimator, the laser beam is adjusted to a divergent beam and is irradiated on the mask 26.

By switching between the two sets of collimators adjusted to different characteristics as described above and further moving each collimator in the optical axis direction by the driving device 31 which moves in the optical axis direction, the beam diameter to be irradiated on the mask 26 is obtained. Can be controlled.

As is clear from FIG. 2, the beam has a distribution in which the brightness is high at the center and the brightness decreases toward the periphery. Therefore, when the mask is irradiated with a laser beam having an appropriate beam diameter with respect to the mask diameter, it is possible to control the brightness of the laser beam passing therethrough and the energy passing through the mask, and as a result, the shape and shape of the processed hole wall surface A difference in processing quality due to a change in mask diameter or material can be reduced, and stable processing quality can be secured.

In particular, in the case of a gas laser, the laser pulse waveform becomes unstable at the time of outputting a short pulse of about 1 μS. However, when the present invention is used, the laser pulse is relatively stable while maintaining a waveform of, for example, about 10 μS. Since the energy passing through the mask can be controlled, the energy reaching the processing point can be stabilized, and stable processing quality can be obtained.

Further, a driving device 30 for switching between two sets of collimators and a driving device 31 for moving each collimator in the optical axis direction control the position of each collimator with respect to the mask 26 according to a driver 32 commanded by a controller. Can save labor.

(Embodiment 4) FIG. 5 shows a seventh embodiment of the present invention.
Eighth, ninth, sixteenth, seventeenth, eighteenth, twenty-sixth, second
Seventh, a twenty-eighth embodiment has been described.

In FIG. 5A, reference numeral 41 denotes a laser oscillator, reference numeral 42 denotes a fixed lens, reference numeral 43 denotes a first movable lens, reference numeral 44 denotes a second movable lens. In this embodiment, two sets of Keplerian collimators are configured. I have. In this figure, the laser light is 4
The light is incident on a Kepler-type collimator composed of 2,44 lenses, and irradiates the mask while diverging. 45
Is a mask, 46 is a transfer lens, 47 is a workpiece, 48 is a driving device for switching the movable lens, 49 is a driving device for moving the movable lenses 43 and 44 in the optical axis direction, 50
Is a driver. FIG. 4B shows the state of the laser beam when the laser beam enters the first movable lens 43 and irradiates the mask while converging, as an example of moving the movable lens.

Next, the operation of this embodiment will be described with reference to the drawings, taking a Kepler type collimator as an example. First composed of a fixed lens 42 and a lens movable lens 43
The collimators are arranged such that the distance between the lenses differs between the second collimator including the collimator, the fixed lens 42, and the movable lens 44. In the example shown in FIG. 4B, when a laser beam is incident on the first collimator, the laser beam is adjusted to a convergent beam and irradiated on the mask 45. On the other hand, FIG.
In the example shown in (a), when a laser beam is incident on the second collimator, the beam is adjusted to a divergent beam and is irradiated on the mask 45.

By switching between the two sets of collimators adjusted to different characteristics as described above, and further moving each collimator in the optical axis direction by the driving device 49 for moving in the optical axis direction, the beam diameter to be irradiated on the mask 45 is obtained. Can be controlled.

As is apparent from FIG. 2, the beam has a distribution in which the luminance is high at the center and the luminance decreases toward the periphery. Therefore, when the mask is irradiated with a laser beam having an appropriate beam diameter with respect to the mask diameter, it is possible to control the brightness of the laser beam passing therethrough and the energy passing through the mask, and as a result, the shape and shape of the processed hole wall surface A difference in processing quality due to a change in mask diameter or material can be reduced, and stable processing quality can be secured.

In particular, in the case of a gas laser, the laser pulse waveform becomes unstable when a short pulse of about 1 μS is output. However, when the present invention is used, the laser pulse is kept relatively stable, for example, while maintaining a waveform of about 10 μS. Since the energy passing through the mask can be controlled, the energy reaching the processing point can be stabilized, and stable processing quality can be obtained.

Further, a driving device 48 for switching between two sets of collimators and a driving device 49 for moving each collimator in the optical axis direction control the position of each collimator with respect to the mask 26 in accordance with a driver 50 instructed by a controller. Can save labor.

As described above, according to each embodiment, the provision of the mechanism for switching the collimator or the position of the lens constituting the collimator and the control means including the driving device of the moving mechanism allow the material or mask diameter to be controlled. If the value changes, it is possible to solve the problems that the glass fiber remains due to the difference in the energy transmittance and the processing threshold value, the processing bottom surface is damaged, and the processing quality cannot be maintained.

[0088]

As described above, according to the present invention, by providing the moving mechanism or the switching mechanism in the collimator, the processing quality such as the form and shape of the processing wall surface can be ensured.
Further, at the time of outputting a short pulse around 1 μS, which is peculiar to a gas laser, the laser pulse waveform avoids an unstable part and can control the energy passing through the mask while maintaining a stable waveform of, for example, around 10 μS. And an excellent laser processing apparatus and a processing method capable of obtaining stable processing quality can be realized.

[Brief description of the drawings]

FIG. 1 is a configuration diagram showing an embodiment of the present invention.

FIG. 2 is a luminance distribution diagram of a laser beam in a radial direction in a single mode laser.

FIG. 3 is a configuration diagram showing a second embodiment of the present invention.

FIG. 4 is a configuration diagram showing a third embodiment of the present invention.

FIG. 5 is a configuration diagram showing a fourth embodiment of the present invention.

FIG. 6 is a configuration diagram showing a conventional laser processing apparatus.

[Explanation of symbols]

REFERENCE SIGNS LIST 1 laser oscillator 2 fixed lens 3 movable lens 4 mask 5 transfer lens 6 workpiece 7 drive device for movable lens 3 8 driver 11 laser oscillator 12 fixed lens 13 first movable lens 14 second movable lens 15 mask 16 transfer lens 17 Workpiece 18 Driving device for the movable lenses 13 and 14 19 Driver 21 Laser oscillator 22, 23 First collimator 24, 25 Second collimator 26 Mask 27 Galvano scanner that scans laser light at a predetermined location 28 f-Θ Lens 29 Workpiece 30 Driving device for switching the two sets of collimators 31 Driving device for moving the collimator in the optical axis direction 32 Driver 41 Laser oscillator 42 Fixed lens 43 First movable lens 44 Second movable lens 45 Mask 46 Transfer lens 47 Processing 48 drive device 50 driver for moving the driving device 49 movable lenses 43 and 44 for switching the movable lens in the optical axis direction

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[Procedure amendment]

[Submission date] June 3, 1999

[Procedure amendment 1]

[Document name to be amended] Statement

[Correction target item name] Full text

[Correction method] Change

[Correction contents]

[Document Name] Statement

Patent application title: Laser processing apparatus and processing method

[Claims]

DETAILED DESCRIPTION OF THE INVENTION

[0001]

BACKGROUND OF THE INVENTION 1. Field of the Invention The present invention relates to a laser drilling machine for printed circuit boards.

[0002]

2. Description of the Related Art A conventional technique will be described below. FIG. 6 shows an example of a conventional laser drilling machine. FIG.
In the figure, 101 is a laser oscillator, 102 is a collimator, 103 is a mask, 104 is a transfer lens, and 105 is a workpiece, for example, a resin substrate containing glass fiber.

Next, the operation of the conventional technique will be described. The laser beam output from the laser oscillator 101 is enlarged and reduced in beam diameter by a collimator 102 and a mask 103
Is irradiated. The irradiated laser light is partially shielded by the mask 103, and the laser light passes only through the central hole,
An image is formed on the workpiece 105 by the transfer lens 104. Therefore, the shape of the mask 103 is imaged and processed on the workpiece 105.

[0004]

However, in the above-mentioned conventional configuration, a short pulse (about 1 μS) of laser light is used in order to reduce the energy applied to the mask in order to prevent burning of the mask. When the material or the mask diameter changes, the glass fiber remains due to the difference in the energy transmittance or the processing threshold value, the processing bottom surface is damaged, and the processing quality cannot be maintained. Was.

An object of the present invention is to solve the above-mentioned conventional problems, and an object of the present invention is to provide a stable processing quality when laser drilling various kinds of substrate materials using masks having various diameters. I do.

[0006]

In order to achieve the above object, a first means of the present invention is to arrange a laser oscillator for outputting a laser beam, and a laser oscillator arranged between the laser oscillator and a workpiece to be machined by the laser beam. Mask, and a transfer lens disposed between the mask and the workpiece and two or more collimators between the laser oscillator and the mask,
A moving means for moving one of the collimators onto the laser beam is provided.

The second means includes a laser oscillator for outputting a laser beam, a mask disposed between the laser oscillator and a workpiece processed by the laser beam, and a mask disposed between the mask and the workpiece. In a laser processing apparatus provided with two or more collimators between an arranged transfer lens and the laser oscillator and the mask, at least one lens among the lenses constituting the collimator is fixedly arranged on a laser beam. Then, a moving means for moving the remaining lenses onto the laser beam is provided.

The third means is a laser oscillator for outputting a laser beam, a mask disposed between the laser oscillator and a workpiece processed by the laser beam, and a mask disposed between the mask and the workpiece. A transfer lens, and two or more collimators between the laser oscillator and the mask, wherein one of the collimators is moved on the laser beam, and moving means for moving the collimator in the optical axis direction is provided. Things.

A fourth means is a laser oscillator for outputting a laser beam, a mask arranged between the laser oscillator and a workpiece processed by the laser beam, and a mask arranged between the mask and the workpiece. Provided two or more collimators between the transfer lens and the laser oscillator and the mask, at least one lens of the lenses constituting the collimator is fixedly arranged on the laser beam, the remaining lens A moving means is provided for moving the collimator in the optical axis direction while moving it on the laser beam.

Fifth means is a laser oscillator for outputting a laser beam, a mask disposed between the laser oscillator and a workpiece processed by the laser beam, and a mask disposed between the mask and the workpiece. Provided two or more collimators between the transfer lens and the laser oscillator and the mask, at least one lens of the lenses constituting the collimator is fixedly arranged on the laser beam, the remaining lens Moving means for moving at least one lens constituting the collimator in the optical axis direction while moving the laser beam on the laser beam is provided.

Sixth means is a laser oscillator for outputting a laser beam, a mask disposed between the laser oscillator and a workpiece processed by the laser beam, and a mask disposed between the mask and the workpiece. And a collimator having at least two collimators between the transfer lens and the laser oscillator and the mask, one of which is configured to emit laser light, and the other is configured to converge laser light, and the collimator Moving means for moving one of the collimators on the laser beam and moving the entire collimator in the optical axis direction.

A seventh means is a laser oscillator for outputting a laser beam, a mask disposed between the laser oscillator and a workpiece processed by the laser beam, and a mask disposed between the mask and the workpiece. And a collimator having at least two collimators between the transfer lens and the laser oscillator and the mask, one of which is configured to emit laser light, and the other is configured to converge laser light, and the collimator And moving means for moving the entire collimator in the optical axis direction and moving the entire collimator in the optical axis direction.

Eighth means is a laser oscillator for outputting a laser beam, a mask disposed between the laser oscillator and a workpiece processed by the laser beam, and a mask disposed between the mask and the workpiece. A transfer lens, and two or more collimators between the laser oscillator and the mask, a moving means for moving one of the collimators onto the laser beam, and a control means for controlling at least the moving means. It is a thing.

The ninth means is a laser oscillator for outputting a laser beam, a mask disposed between the laser oscillator and a workpiece processed by the laser beam, and a mask disposed between the mask and the workpiece. Provided two or more collimators between the transfer lens and the laser oscillator and the mask, at least one lens of the lenses constituting the collimator is fixedly arranged on a laser beam, the remaining lens It is provided with a moving means for moving on the laser beam and at least a control means for controlling the moving means.

The tenth means is a laser oscillator for outputting a laser beam, a mask arranged between the laser oscillator and a workpiece processed by the laser beam, and a mask arranged between the mask and the workpiece. And a collimator having at least two collimators between the transfer lens and the laser oscillator and the mask, one of which is configured to emit laser light, and the other is configured to converge laser light, and the collimator And a control means for controlling at least the moving means.

Eleventh means is a laser oscillator for outputting a laser beam, a mask disposed between the laser oscillator and a workpiece to be processed by the laser beam, and a mask disposed between the mask and the workpiece. Moving means for moving one of the collimators on the laser beam and moving the collimator in the direction of the optical axis, comprising at least two collimators between the transferred transfer lens and the laser oscillator and the mask; and A control means for controlling the moving means is provided.

The twelfth means is a laser oscillator for outputting a laser beam, a mask arranged between the laser oscillator and a workpiece processed by the laser beam, and a mask arranged between the mask and the workpiece. Provided two or more collimators between the transfer lens and the laser oscillator and the mask, at least one lens of the lenses constituting the collimator is fixedly arranged on the laser beam, the remaining lens A moving means for moving the collimator in the direction of the optical axis while moving it on the laser beam, and a control means for controlling at least the moving means are provided.

A thirteenth means is a laser oscillator for outputting a laser beam, a mask disposed between the laser oscillator and a workpiece to be processed by the laser beam, and a mask disposed between the mask and the workpiece. Provided two or more collimators between the transfer lens and the laser oscillator and the mask, at least one lens of the lenses constituting the collimator is fixedly arranged on the laser beam, the remaining lens A moving means for moving at least one or more lenses constituting the collimator in the direction of the optical axis while moving on the laser beam, and a control means for controlling at least the moving means are provided.

Fourteenth means is a laser oscillator for outputting a laser beam, a mask arranged between the laser oscillator and a workpiece processed by the laser beam, and a mask arranged between the mask and the workpiece. And a collimator having at least two collimators between the transfer lens and the laser oscillator and the mask, one of which is configured to emit laser light, and the other is configured to converge laser light, and the collimator Is moved on the laser beam, and a moving means for moving the entire collimator in the optical axis direction, and a control means for controlling at least the moving means are provided.

The fifteenth means is a laser oscillator for outputting a laser beam, a mask disposed between the laser oscillator and a workpiece processed by the laser beam, and a mask disposed between the mask and the workpiece. And a collimator having at least two collimators between the transfer lens and the laser oscillator and the mask, one of which is configured to emit laser light, and the other is configured to converge laser light, and the collimator Moving means for moving one of the collimators on the laser beam, moving the entire collimator in the optical axis direction, and moving the entire collimator in the optical axis direction, and controlling means for controlling at least the moving means. It is a thing.

Sixteenth means is a laser oscillator for outputting a laser beam, a mask disposed between the laser oscillator and a workpiece to be processed by the laser beam, and a mask disposed between the mask and the workpiece. Using a laser processing apparatus having two or more collimators between the transferred transfer lens and the laser oscillator and the mask, at least one of the lenses constituting the collimator is fixed on a laser beam. Positioning and moving the remaining lens over the laser beam.

Seventeenth means is a laser oscillator for outputting a laser beam, a mask disposed between the laser oscillator and a workpiece processed by the laser beam, and a mask disposed between the mask and the workpiece. Using a laser processing apparatus provided with two or more collimators between the transfer lens and the laser oscillator and the mask, one of which has a configuration in which laser light diverges, and the other has a configuration in which laser light converges. And moving one of the collimators over the laser beam.

Eighteenth means is a laser oscillator for outputting a laser beam, a mask disposed between the laser oscillator and a workpiece processed by the laser beam, and a mask disposed between the mask and the workpiece. Using a laser processing device having two or more collimators between the transferred transfer lens and the laser oscillator and the mask, one of the collimators is moved on the laser beam, and the collimator is moved in the optical axis direction. It has a moving step.

The nineteenth means is a laser oscillator for outputting a laser beam, a mask disposed between the laser oscillator and a workpiece processed by the laser beam, and a mask disposed between the mask and the workpiece. Using a laser processing apparatus having two or more collimators between the transferred transfer lens and the laser oscillator and the mask, at least one of the lenses constituting the collimator is fixed on a laser beam. And moving the remaining lens over the laser beam and moving the entire collimator in the optical axis direction.

A twentieth means is a laser oscillator for outputting a laser beam, a mask disposed between the laser oscillator and a workpiece processed by the laser beam, and a mask disposed between the mask and the workpiece. Using a laser processing apparatus having two or more collimators between the transferred transfer lens and the laser oscillator and the mask, at least one of the lenses constituting the collimator is fixed on a laser beam. The method includes a step of disposing, moving the remaining lenses on the laser beam, and moving at least one lens constituting the collimator in the optical axis direction.

A twenty-first means is a laser oscillator for outputting a laser beam, a mask disposed between the laser oscillator and a workpiece processed by the laser beam, and a mask disposed between the mask and the workpiece. Using a laser processing apparatus provided with two or more collimators between the transfer lens and the laser oscillator and the mask, one of which has a configuration in which laser light diverges, and the other has a configuration in which laser light converges. And moving one of the collimators on the laser beam and moving the entire collimator in the optical axis direction.

The twenty-second means includes a laser oscillator for outputting a laser beam, a mask disposed between the laser oscillator and a workpiece processed by the laser beam, and a mask disposed between the mask and the workpiece. Using a laser processing apparatus provided with two or more collimators between the transfer lens and the laser oscillator and the mask, one of which has a configuration in which laser light diverges, and the other has a configuration in which laser light converges. And moving one of the collimators on the laser beam, moving the entire collimator in the optical axis direction, and moving the entire collimator in the optical axis direction.

[0028]

In the structure for realizing the first and eighth means, a moving means for moving one of the collimators on the laser beam is provided so that the beam diameter irradiated on the mask can be adjusted. It is possible to control the brightness and energy of the beam passing through the mask, and to stabilize the processing quality such as the shape and shape of the inner wall of the processing hole due to the change of the material and the change of the mask diameter.

When the gas laser outputs a short pulse of about 1 μS as in the prior art, the laser pulse waveform becomes unstable. However, when the present invention is used, the laser pulse maintains a relatively stable waveform of, for example, about 10 μS. However, since the energy passing through the mask can be controlled, the energy reaching the processing point can be stabilized, and a stable processing quality can be obtained.

In the configuration for realizing the second and ninth means, at least one of the lenses constituting the collimator is fixedly arranged on a laser beam,
A moving means for moving the remaining lens onto the laser beam is provided, the diameter of the beam irradiated on the mask can be adjusted, the brightness and energy of the beam passing through the mask can be controlled, and the material can be changed or the mask diameter can be changed. It is possible to stabilize the processing quality such as the shape and shape of the inner wall of the processing hole due to the change.

When a short pulse of about 1 .mu.S is output from a gas laser as in the prior art, the laser pulse waveform becomes unstable. However, when the present invention is used, the laser pulse maintains a relatively stable waveform of, for example, about 10 .mu.S. However, since the energy passing through the mask can be controlled, the energy reaching the processing point can be stabilized, and a stable processing quality can be obtained.

In a configuration for realizing the tenth means, a collimator having one configuration in which laser light is diverged and the other configuration in which laser light converges is disposed, and one of the collimators is arranged on the laser beam. Is provided, the beam diameter applied to the mask can be adjusted, and the brightness and energy of the beam passing through the mask can be controlled. Processing quality such as form and shape can be stabilized.

When a conventional gas laser outputs a short pulse of about 1 μS, the laser pulse waveform becomes unstable. However, when the present invention is used, the laser pulse maintains a relatively stable waveform, for example, about 10 μS. However, since the energy passing through the mask can be controlled, the energy reaching the processing point can be stabilized, and a stable processing quality can be obtained.

In the configuration for realizing the third and eleventh means, a moving means for moving one of the collimators on the laser beam and moving the collimator in the optical axis direction is provided, and the mask is irradiated. The beam diameter can be adjusted, the brightness and energy of the beam passing through the mask can be controlled, and the processing quality such as the shape and shape of the inner wall of the processing hole accompanying the change of the material or the mask diameter can be stabilized. .

When a conventional gas laser outputs a short pulse of about 1 μS, the laser pulse waveform becomes unstable. However, when the present invention is used, the laser pulse maintains a relatively stable waveform, for example, about 10 μS. However, since the energy passing through the mask can be controlled, the energy reaching the processing point can be stabilized, and a stable processing quality can be obtained.

In the arrangement for realizing the fourth and twelfth means, at least one of the lenses constituting the collimator is fixedly arranged on the laser beam, and the remaining lenses are moved on the laser beam. In addition, a moving means for moving the entire collimator in the optical axis direction is provided, the diameter of the beam irradiated on the mask can be adjusted, the brightness and energy of the beam passing through the mask can be controlled, and the material can be changed or the mask can be changed. It is possible to stabilize the processing quality such as the shape and shape of the inner wall of the processing hole due to the change in the diameter.

When a short pulse of about 1 μS is output from a gas laser as in the prior art, the laser pulse waveform becomes unstable. However, when the present invention is used, a laser pulse having a relatively stable waveform, for example, about 10 μS is maintained. However, since the energy passing through the mask can be controlled, the energy reaching the processing point can be stabilized, and a stable processing quality can be obtained.

In the arrangement for realizing the fifth and thirteenth means, at least one of the lenses constituting the collimator is fixedly arranged on the laser beam, and the remaining lenses are moved on the laser beam. Moving means for moving at least one or more lenses constituting the collimator in the direction of the optical axis so that the diameter of the beam irradiated on the mask can be adjusted and the brightness and energy of the beam passing through the mask can be controlled. This makes it possible to stabilize the processing quality such as the shape and shape of the inner wall of the processing hole due to the change of the material and the change of the mask diameter.

When a conventional gas laser outputs a short pulse of about 1 μS, the laser pulse waveform becomes unstable. However, when the present invention is used, the laser pulse maintains a relatively stable waveform of, for example, about 10 μS. However, since the energy passing through the mask can be controlled, the energy reaching the processing point can be stabilized, and a stable processing quality can be obtained.

In the configuration for realizing the above-mentioned sixth and fourteenth means, a collimator having one configuration in which laser light is diverged and the other configured to converge laser light is arranged.
And moving means for moving one of the collimators on the laser beam and moving the entire collimator in the direction of the optical axis, so that the diameter of the beam irradiated on the mask can be adjusted, and the brightness of the beam passing through the mask can be adjusted. And the energy can be controlled, and the processing quality such as the shape and shape of the inner wall of the processing hole due to the change of the material and the change of the mask diameter can be stabilized.

When a short pulse of about 1 .mu.S is output from a gas laser as in the prior art, the laser pulse waveform becomes unstable. However, when the present invention is used, the laser pulse maintains a relatively stable waveform of, for example, about 10 .mu.S. However, since the energy passing through the mask can be controlled, the energy reaching the processing point can be stabilized, and a stable processing quality can be obtained.

In the configuration for realizing the seventh and fifteenth means, a collimator having one configuration in which laser light is diverged and the other configured to converge laser light is arranged.
And moving means for moving one of the collimators on the laser beam, moving the entire collimator in the optical axis direction, and moving the entire collimator in the optical axis direction, and providing a beam diameter irradiated on the mask. Can be adjusted, the brightness and energy of the beam passing through the mask can be controlled, and the processing quality such as the shape and shape of the inner wall of the processing hole due to the change of the material and the change of the mask diameter can be stabilized.

When a short pulse of about 1 μS is output from a gas laser as in the prior art, the laser pulse waveform becomes unstable. However, when the present invention is used, the laser pulse maintains a relatively stable waveform, for example, about 10 μS. However, since the energy passing through the mask can be controlled, the energy reaching the processing point can be stabilized, and a stable processing quality can be obtained.

In the sixteenth means, at least one of the lenses constituting the collimator is fixedly arranged on the laser beam, and the remaining lenses are moved on the laser beam to irradiate the mask. It is possible to control the brightness and energy of the beam passing through the mask by adjusting the beam diameter to be formed, and to stabilize the processing quality such as the shape and shape of the inner wall of the processing hole due to the change of the material and the change of the mask diameter. it can.

When a short pulse of about 1 μS is output from a gas laser to reduce the energy applied to the mask as in the prior art, the laser pulse waveform becomes unstable.
When the present invention is used, the energy passing through the mask can be controlled while maintaining a relatively stable laser pulse waveform, for example, around 10 μS, so that the energy reaching the processing point can be stabilized, and the stable processing quality can be obtained. Can be obtained.

In the seventeenth means, a collimator having one configuration in which the laser beam is diverged and the other configuration in which the laser beam converges is disposed, and one of the collimators is moved on the laser beam. By adjusting the diameter of the beam irradiated on the mask, the brightness and energy of the beam passing through the mask can be controlled, and the processing quality such as the shape and shape of the inner wall of the processing hole accompanying the change of the material or the diameter of the mask can be improved. Can be stabilized.

When a short pulse of about 1 μS is output from a gas laser as in the prior art, the laser pulse waveform becomes unstable. However, when the present invention is used, a relatively stable laser pulse, for example, a waveform near 10 μS is maintained. However, since the energy passing through the mask can be controlled, the energy reaching the processing point can be stabilized, and a stable processing quality can be obtained.

In the eighteenth means, one of the collimators is
By moving one on the laser beam and moving the collimator in the direction of the optical axis, the beam diameter applied to the mask can be adjusted, and the brightness and energy of the beam passing through the mask can be controlled. It is possible to stabilize the processing quality such as the shape and shape of the inner wall of the processing hole due to the change of the diameter and the mask diameter.

When a short pulse of about 1 μS is output from a gas laser as in the prior art, the laser pulse waveform becomes unstable. However, the present invention maintains a relatively stable laser pulse, for example, a waveform of about 10 μS. However, since the energy passing through the mask can be controlled, the energy reaching the processing point can be stabilized, and a stable processing quality can be obtained.

In the nineteenth means, at least one lens of the lenses constituting the collimator is fixedly arranged on the laser beam, the remaining lenses are moved on the laser beam, and the entire collimator is moved by the light. By moving in the axial direction, the diameter of the beam irradiated on the mask can be adjusted, and the brightness and energy of the beam passing through the mask can be controlled. In addition, the processing quality such as the shape can be stabilized.

When a conventional gas laser outputs a short pulse of about 1 μS, the laser pulse waveform becomes unstable. However, when the present invention is used, the laser pulse maintains a relatively stable waveform of, for example, about 10 μS. However, since the energy passing through the mask can be controlled, the energy reaching the processing point can be stabilized, and a stable processing quality can be obtained.

In the twentieth means, at least one of the lenses constituting the collimator is fixedly arranged on the laser beam, and the remaining lenses are moved on the laser beam, and the collimator is constructed. By moving at least one lens in the optical axis direction, the diameter of the beam irradiated on the mask can be adjusted, and the brightness and energy of the beam passing through the mask can be controlled. It is possible to stabilize the processing quality such as the shape and shape of the inner wall of the processing hole due to the change.

When a conventional gas laser outputs a short pulse of about 1 μS, the laser pulse waveform becomes unstable. However, when the present invention is used, the laser pulse maintains a relatively stable waveform, for example, about 10 μS. However, since the energy passing through the mask can be controlled, the energy reaching the processing point can be stabilized, and a stable processing quality can be obtained.

In the above-mentioned twenty-first means, a collimator having one structure in which laser light is diverged and the other structure in which laser light is converged is arranged, and one of the collimators is moved onto the laser beam. By moving the entire collimator in the optical axis direction, the diameter of the beam irradiated on the mask can be adjusted, and the brightness and energy of the beam passing through the mask can be controlled. Accordingly, the processing quality such as the shape and shape of the inner wall of the processing hole can be stabilized.

When a conventional gas laser outputs a short pulse of about 1 μS, the laser pulse waveform becomes unstable. However, when the present invention is used, the laser pulse maintains a relatively stable waveform of, for example, about 10 μS. However, since the energy passing through the mask can be controlled, the energy reaching the processing point can be stabilized, and a stable processing quality can be obtained.

In the above-mentioned twenty-second means, a collimator in which one is configured to diverge the laser beam and the other is configured to converge the laser beam is arranged, and one of the collimators is moved on the laser beam. Moving the entire collimator in the direction of the optical axis and moving the entire collimator in the direction of the optical axis to adjust the diameter of the beam irradiated on the mask and control the brightness and energy of the beam passing through the mask. This makes it possible to stabilize the processing quality such as the shape and shape of the inner wall of the processing hole due to the change of the material and the change of the mask diameter.

When a conventional gas laser outputs a short pulse of about 1 μS, the laser pulse waveform becomes unstable. However, when the present invention is used, the laser pulse maintains a relatively stable waveform, for example, about 10 μS. However, since the energy passing through the mask can be controlled, the energy reaching the processing point can be stabilized, and a stable processing quality can be obtained.

Reference Example Hereinafter , a reference example relating to the present invention will be described with reference to the drawings. In FIG. 1, Leh
Reference examples of the processing apparatus and processing method are shown. FIG.
In FIG. 1A, reference numeral 1 denotes a laser oscillator, and reference numerals 2 and 3 denote lenses constituting a collimator. In this embodiment, a Kepler-type collimator is formed. Reference numeral 2 denotes a fixed lens and reference numeral 3 denotes a movable lens. 4 is a mask, 5 is a transfer lens, 6 is a workpiece, 7
Is a driving device of the movable lens 3, and 8 is a driver. FIG. 1B shows the state of laser light when the distance between the fixed lens 2 and the movable lens 3 is reduced, as an example of moving the movable lens 3.

Hereinafter, the operation of the reference example will be described. In this figure, a Kepler-type collimator is configured, and a fixed lens 2
It is possible to control the diameter of the beam irradiated on the mask 4 by changing the distance between the lens 4 and the movable lens 3.

As shown in FIG. 1B, the fixed lens 2
When the movable lens 3 is moved closer to the beam, the beam tends to spread to the diverging side. Conversely, when the beam is moved farther away, a beam that tends to converge is obtained, and the beam diameter applied to the mask 4 can be controlled. Since the diameter of the mask 4 is determined by the diameter required for processing, a beam diameter suitable for the mask diameter can be obtained.

FIG. 2 shows the luminance distribution of a single mode laser beam. As is clear from FIG. 2, the beam has a distribution in which the luminance is high at the center and the luminance decreases toward the periphery. Therefore, when the mask is irradiated with a laser beam having a beam diameter appropriate for the mask diameter, it is possible to control the brightness of the laser beam passing therethrough and the energy passing through the mask, and as a result, the shape and shape of the hole wall surface processed For example, a difference in processing quality due to a change in mask diameter or material can be reduced, and stable processing quality can be ensured.

The driving device 7 can save labor by controlling the position of the movable lens 3 in accordance with the driver 8 commanded by the controller. ( Embodiment 1 ) FIG. 3 shows first , second , eighth and eighth embodiments of the present invention.
The ninth , tenth , sixteenth , seventeenth , and eighteenth embodiments have been described.

In FIG. 3A, reference numeral 11 denotes a laser oscillator, 12, 13, and 14 denote lenses constituting a collimator. Two sets of Kepler-type collimators in this embodiment are formed, and 12 is a fixed lens. Reference numerals 14 and 14 denote first and second movable lenses, respectively. The laser is incident on the second movable lens and irradiates the mask while converging. Reference numeral 15 denotes a mask, 16 denotes a transfer lens, 17 denotes a workpiece, 18 denotes a driving device for the movable lenses 13 and 14, and 19 denotes a driver.

FIG. 3B shows an example in which the movable lenses 13 and 14 are moved, and the state of the laser beam when the laser beam is incident on the first movable lens 13 and irradiates the mask while diverging. showed that.

Next, the operation of this embodiment will be described with reference to the drawings, taking a Kepler-type collimator as an example. The distance between the fixed lens 12 and the first movable lens 13 and the second movable lens 14 is set to be different from each other, and FIG.
When the laser beam is incident on the first movable lens 13 shown in (b), the laser beam is adjusted to a divergent beam and irradiated on the mask 15. On the other hand, when the laser beam is incident on the second movable lens 14 shown in FIG.
5 has been irradiated.

By switching between the two sets of collimators adjusted to different characteristics as described above, it is possible to control the beam diameter to be irradiated on the mask 4. As is clear from FIG. 2, the beam has a distribution in which the luminance is high at the center and the luminance decreases toward the periphery. Therefore, when the mask is irradiated with a laser beam having a beam diameter appropriate for the mask diameter, it is possible to control the brightness of the laser beam passing therethrough and the energy passing through the mask, and as a result, the shape and shape of the hole wall surface processed For example, a difference in processing quality due to a change in mask diameter or material can be reduced, and stable processing quality can be ensured. In particular, in the case of a gas laser, the laser pulse waveform becomes unstable when a short pulse of about 1 μS is output. However, according to the present invention, the laser pulse passes through the mask while maintaining a relatively stable waveform of, for example, about 10 μS. Since the energy to be processed can be controlled, the energy reaching the processing point can be stabilized, and a stable processing quality can be obtained.

Further, the driving device 7 can save labor by controlling the position of the movable lens 3 in accordance with the driver 8 instructed by the controller. ( Embodiment 2 ) FIG. 4 shows the third , fourth and first embodiments of the present invention.
The first , twelfth , nineteenth , and twentieth embodiments have been described.

In FIG. 4A, 21 is a laser oscillator, 22 and 23 are lenses constituting a first collimator,
Reference numerals 24 and 25 denote lenses constituting a second collimator. In the case of this example, two sets of Galileo collimators are configured. In this figure, a laser beam is incident on a Galileo collimator composed of 24 and 25 lenses, and irradiates the mask while diverging. 26 is a mask, 27 is a galvano scanner that scans a laser beam at a predetermined location, 28 is an f-Θ lens having a transfer lens function, 29 is a workpiece, 30 is a driving device for switching between the two sets of collimators, 31 Is a driving device that moves the collimator in the optical axis direction,
32 is a driver.

FIG. 4B shows an example of the case where two sets of collimators are moved. The state of the laser beam when the laser beam is incident on the first movable lens 13 and irradiates the mask while converging. Indicated.

The operation of the present embodiment will now be described with reference to the drawings, taking a Galileo collimator as an example. The collimators are arranged so that the distance between the first collimator including the lenses 22 and 23 and the second collimator including the lenses 24 and 25 are different from each other. In the example shown in FIG. 4B, when a laser beam is incident on the first collimator, the laser beam is adjusted to a convergent beam and irradiated on the mask 26.

On the other hand, in the example shown in FIG. 4A, when a laser beam is incident on the second collimator, the beam is adjusted to a divergent beam and is irradiated on the mask 26. The diameter of the beam applied to the mask 26 is controlled by switching between the two sets of collimators adjusted to different characteristics as described above and further moving each collimator in the optical axis direction by the driving device 31 that moves in the optical axis direction. It is possible.

As is clear from FIG. 2, the beam has a distribution in which the luminance is high at the center and decreases toward the periphery. Therefore, when the mask is irradiated with a laser beam having an appropriate beam diameter with respect to the mask diameter, it is possible to control the brightness of the laser beam passing therethrough and the energy passing through the mask, and as a result, the shape and shape of the processed hole wall surface A difference in processing quality due to a change in mask diameter or material can be reduced, and stable processing quality can be secured.

In particular, in the case of a gas laser, the laser pulse waveform becomes unstable when a short pulse of about 1 μS is output. However, when the present invention is used, the laser pulse is kept relatively stable, for example, while maintaining a waveform of about 10 μS. Since the energy passing through the mask can be controlled, the energy reaching the processing point can be stabilized, and stable processing quality can be obtained.

Further, a driving device 30 for switching between two sets of collimators and a driving device 31 for moving each collimator in the direction of the optical axis control the position of each collimator with respect to the mask 26 according to a driver 32 commanded by a controller. Can save labor.

[0075] FIG. 5 (Embodiment 3) fifth invention,
6th , 7th , 13th , 14th , 15th , 21st , 22nd
The embodiment has been described.

In FIG. 5A, reference numeral 41 denotes a laser oscillator, reference numeral 42 denotes a fixed lens, reference numeral 43 denotes a first movable lens, and reference numeral 44 denotes a second movable lens. In this embodiment, two sets of Keplerian collimators are configured. I have. In this figure, the laser light is 4
The light is incident on a Kepler-type collimator composed of 2,44 lenses, and irradiates the mask while diverging. 45
Is a mask, 46 is a transfer lens, 47 is a workpiece, 48 is a driving device for switching the movable lens, 49 is a driving device for moving the movable lenses 43 and 44 in the optical axis direction, 50
Is a driver. Further, in FIG. 5 (b), as an example of moving the movable lens, the laser beam showing a state of laser light in the case that irradiation of the mask while converging incident on the first movable lens 43.

Next, the operation of this embodiment will be described with reference to the drawings.
This will be described using a Kepler type collimator as an example. Fixed
A first lens comprising a lens 42 and a lens movable lens 43
Consisting of a collimator, fixed lens 42 and movable lens 44
The distance between the lenses differs between the second collimators
Place the collimator as shown. Figure5In the example shown in (b)
Is the convergent beam when the laser beam enters the first collimator.
And the mask 45 is irradiated. On the other hand, the figure5
In the example shown in (a), laser light enters the second collimator.
When illuminated, the beam is adjusted to a divergent beam and
Have been.

By switching between the two sets of collimators adjusted to different characteristics as described above, and further moving each collimator in the optical axis direction by the driving device 49 that moves in the optical axis direction, the beam diameter to be irradiated on the mask 45 is obtained. Can be controlled.

As is clear from FIG. 2, the beam has a distribution in which the luminance is high at the center and the luminance decreases toward the periphery. Therefore, when the mask is irradiated with a laser beam having an appropriate beam diameter with respect to the mask diameter, it is possible to control the brightness of the laser beam passing therethrough and the energy passing through the mask, and as a result, the shape and shape of the processed hole wall surface A difference in processing quality due to a change in mask diameter or material can be reduced, and stable processing quality can be secured.

In particular, in the case of a gas laser, the laser pulse waveform becomes unstable at the time of outputting a short pulse near 1 μS. However, when the present invention is used, the laser pulse is relatively stable, for example, while maintaining a waveform near 10 μS. Since the energy passing through the mask can be controlled, the energy reaching the processing point can be stabilized, and stable processing quality can be obtained.

Further, a driving device 48 for switching between two sets of collimators and a driving device 49 for moving each collimator in the optical axis direction control the position of each collimator with respect to the mask 26 in accordance with a driver 50 commanded by a controller. Can save labor.

As described above, according to each of the embodiments, the provision of the mechanism for switching the collimator or moving the position of the lens constituting the collimator and the control means including the driving device of the moving mechanism allow the material or mask diameter to be adjusted. If the value changes, it is possible to solve the problems that the glass fiber remains due to the difference in the energy transmittance and the processing threshold value, the processing bottom surface is damaged, and the processing quality cannot be maintained.

[0083]

As described above, according to the present invention, by providing the moving mechanism or the switching mechanism in the collimator, the processing quality such as the form and shape of the processing wall surface can be ensured.
Further, at the time of outputting a short pulse around 1 μS, which is peculiar to a gas laser, the laser pulse waveform avoids an unstable part and can control the energy passing through the mask while maintaining a stable waveform of, for example, around 10 μS. And an excellent laser processing apparatus and a processing method capable of obtaining stable processing quality can be realized.

[Brief description of the drawings]

FIG. 1 is a configuration diagram showing a reference example according to the present invention.

FIG. 2 is a luminance distribution diagram of a laser beam in a radial direction in a single mode laser.

FIG. 3 is a configuration diagram showing Embodiment 1 of the present invention.

FIG. 4 is a configuration diagram showing a second embodiment of the present invention.

FIG. 5 is a configuration diagram showing a third embodiment of the present invention.

FIG. 6 is a configuration diagram showing a conventional laser processing apparatus.

[Description of Signs] 1 Laser oscillator 2 Fixed lens 3 Movable lens 4 Mask 5 Transfer lens 6 Workpiece 7 Driving device of the movable lens 3 8 Driver 11 Laser oscillator 12 Fixed lens 13 First movable lens 14 Second movable lens 15 Mask 16 Transfer lens 17 Workpiece 18 Driving device for the movable lenses 13 and 14 19 Driver 21 Laser oscillator 22, 23 First collimator 24, 25 Second collimator 26 Mask 27 Galvano for scanning a predetermined location with laser light Scanner 28 f-Θ lens 29 Workpiece 30 Driving device that switches the two sets of collimators 31 Driving device that moves the collimator in the optical axis direction 32 Driver 41 Laser oscillator 42 Fixed lens 43 First movable lens 44 Second movable lens 45 Mask 46 Driver 50 driver for moving the driving device 49 movable lenses 43 and 44 to switch the 47 workpiece 48 the movable lens in the optical axis direction

──────────────────────────────────────────────────続 き Continued on the front page (51) Int.Cl. ⁶ Identification code FI G02B 27/09 H05K 3/00 N H05K 3/00 G02B 27/00 E

Claims (28)

[Claims] 1. A laser oscillator for outputting a laser beam, a mask disposed between the laser oscillator and a workpiece processed by the laser beam, and a transfer disposed between the mask and the workpiece. A laser processing apparatus comprising: a lens and a collimator between the laser oscillator and the mask; and a moving device for moving at least one lens constituting the collimator in an optical axis direction. 2. A laser oscillator for outputting a laser beam, a mask disposed between the laser oscillator and a workpiece processed by the laser beam, and a transfer disposed between the mask and the workpiece. A laser processing apparatus comprising: a lens and at least two collimators between the laser oscillator and the mask; and a moving unit for moving one of the collimators onto the laser beam. 3. A laser oscillator for outputting a laser beam, a mask disposed between the laser oscillator and a workpiece processed by the laser beam, and a transfer disposed between the mask and the workpiece. A lens and at least two collimators between the laser oscillator and the mask, at least one of the lenses constituting the collimator is fixedly arranged on a laser beam, and the remaining lenses are arranged on the laser beam. A laser processing apparatus provided with a moving means for moving the laser beam. 4. A laser oscillator for outputting a laser beam, a mask disposed between the laser oscillator and a workpiece processed by the laser beam, and a transfer disposed between the mask and the workpiece. A collimator having at least two collimators between the lens and the laser oscillator and the mask, one of which has a configuration in which laser light diverges and the other has a configuration in which laser light converges, and one of the collimators; A laser processing apparatus provided with a moving means for moving the laser beam onto the laser beam. 5. A laser oscillator for outputting a laser beam, a mask disposed between the laser oscillator and a workpiece processed by the laser beam, and a transfer disposed between the mask and the workpiece. A laser processing apparatus comprising: a lens, two or more collimators between the laser oscillator and the mask, and a moving means for moving one of the collimators on the laser beam and moving the collimator in the optical axis direction. . 6. A laser oscillator for outputting a laser beam, a mask disposed between the laser oscillator and a workpiece processed by the laser beam, and a transfer disposed between the mask and the workpiece. A lens and at least two collimators between the laser oscillator and the mask, at least one of the lenses constituting the collimator is fixedly arranged on a laser beam, and the remaining lenses are arranged on the laser beam. And a moving means for moving the entire collimator in the optical axis direction. 7. A laser oscillator for outputting laser light, a mask disposed between the laser oscillator and a workpiece processed by the laser light, and a transfer disposed between the mask and the workpiece. A lens and at least two collimators between the laser oscillator and the mask, at least one of the lenses constituting the collimator is fixedly arranged on a laser beam, and the remaining lenses are arranged on the laser beam. And a moving means for moving at least one lens constituting the collimator in the optical axis direction. 8. A laser oscillator for outputting a laser beam, a mask disposed between the laser oscillator and a workpiece to be processed by the laser beam, and a transfer disposed between the mask and the workpiece. A collimator having at least two collimators between the lens and the laser oscillator and the mask, one of which has a configuration in which laser light diverges and the other has a configuration in which laser light converges, and one of the collimators; A laser processing apparatus provided with a moving means for moving the collimator on the laser beam and moving the entire collimator in the optical axis direction. 9. A laser oscillator for outputting a laser beam, a mask disposed between the laser oscillator and a workpiece processed by the laser beam, and a transfer disposed between the mask and the workpiece. A collimator having at least two collimators between the lens and the laser oscillator and the mask, one having a configuration in which laser light is diverged, and the other having a configuration in which laser light is converged, and one of the collimators; And a moving means for moving the entire collimator in the optical axis direction and moving the entire collimator in the optical axis direction. 10. A laser oscillator for outputting a laser beam,
A mask disposed between the laser oscillator and the workpiece to be processed by the laser light; a transfer lens disposed between the mask and the workpiece; and a collimator between the laser oscillator and the mask. A laser processing apparatus provided with a moving unit for moving at least one lens constituting the collimator in an optical axis direction, and a control unit for controlling at least the moving unit; 11. A laser oscillator for outputting a laser beam,
A mask disposed between the laser oscillator and the workpiece to be processed by the laser beam; and a transfer lens disposed between the mask and the workpiece and at least two masks between the laser oscillator and the mask. A laser processing apparatus comprising: a moving unit that moves one of the collimators onto the laser beam; and a control unit that controls at least the moving unit. 12. A laser oscillator for outputting a laser beam,
A mask disposed between the laser oscillator and the workpiece to be processed by the laser beam; and a transfer lens disposed between the mask and the workpiece and at least two masks between the laser oscillator and the mask. Moving means for fixing at least one lens among the lenses constituting the collimator on the laser beam, and moving the remaining lenses onto the laser beam, and controlling at least the moving means Laser processing device provided with control means. 13. A laser oscillator for outputting laser light,
A mask disposed between the laser oscillator and the workpiece to be processed by the laser beam; and a transfer lens disposed between the mask and the workpiece and at least two masks between the laser oscillator and the mask. A collimator, one of which is configured to diverge the laser light, the other is provided with a collimator configured to converge the laser light, and moving means for moving one of the collimators on the laser beam, at least the 4. The laser processing apparatus according to claim 3, further comprising control means for controlling the moving means. 14. A laser oscillator for outputting a laser beam,
A mask disposed between the laser oscillator and the workpiece to be processed by the laser beam; and a transfer lens disposed between the mask and the workpiece and at least two masks between the laser oscillator and the mask. A laser processing apparatus, comprising: a moving unit that moves one of the collimators on the laser beam and moves the collimator in the optical axis direction; and a control unit that controls at least the moving unit. 15. A laser oscillator for outputting a laser beam,
A mask disposed between the laser oscillator and the workpiece to be processed by the laser beam; and a transfer lens disposed between the mask and the workpiece and at least two masks between the laser oscillator and the mask. And at least one lens among the lenses constituting the collimator is fixedly arranged on the laser beam, and the remaining lenses are moved on the laser beam, and the entire collimator is moved in the optical axis direction. A laser processing apparatus provided with a moving unit and at least a control unit for controlling the moving unit. 16. A laser oscillator for outputting a laser beam,
A mask disposed between the laser oscillator and the workpiece to be processed by the laser beam; and a transfer lens disposed between the mask and the workpiece and at least two masks between the laser oscillator and the mask. At least one lens of the lenses constituting the collimator is fixedly arranged on the laser beam, and the remaining lenses are moved on the laser beam, and at least one or more lenses constituting the collimator are provided. A laser processing apparatus provided with moving means for moving a lens in an optical axis direction and at least control means for controlling the moving means. 17. A laser oscillator for outputting a laser beam,
A mask disposed between the laser oscillator and the workpiece to be processed by the laser beam; and a transfer lens disposed between the mask and the workpiece and at least two masks between the laser oscillator and the mask. A collimator, one of which is configured to diverge laser light, the other is arranged with a collimator configured to converge laser light, and one of the collimators is moved on the laser beam, and the entire collimator is A laser processing apparatus provided with moving means for moving in the optical axis direction, and at least control means for controlling the moving means. 18. A laser oscillator for outputting a laser beam,
A mask disposed between the laser oscillator and the workpiece to be processed by the laser beam; and a transfer lens disposed between the mask and the workpiece and at least two masks between the laser oscillator and the mask. A collimator, one of which is configured to diverge the laser light, the other is arranged with a collimator configured to converge the laser light, and one of the collimators is moved over the laser beam, and the entire collimator is A laser processing apparatus comprising: moving means for moving the entire collimator in the optical axis direction while moving the collimator in the optical axis direction; and control means for controlling at least the moving means. 19. A galvano scanner which has an F- 備 え lens as a transfer lens disposed between the F- に lens and an optical system, and which varies a traveling direction of a laser beam disposed between the F-Θ lens and a mask as an optical system. The laser processing apparatus according to any one of claims 1 to 18, further comprising: 20. A laser oscillator for outputting a laser beam, a mask disposed between the laser oscillator and a workpiece processed by the laser beam, a transfer lens disposed between the mask and the workpiece, and A laser processing method, comprising: using a laser processing device having a collimator between the laser oscillator and the mask, moving at least one lens constituting the collimator in an optical axis direction. 21. A laser oscillator for outputting a laser beam, a mask disposed between the laser oscillator and a workpiece processed by the laser beam, a transfer lens disposed between the mask and the workpiece, and A laser processing method, comprising: using a laser processing apparatus including two or more collimators between the laser oscillator and the mask, and moving one of the collimators onto the laser beam. 22. A laser oscillator for outputting a laser beam, a mask disposed between the laser oscillator and a workpiece processed by the laser beam, a transfer lens disposed between the mask and the workpiece, and Using a laser processing apparatus having two or more collimators between the laser oscillator and the mask, at least one lens among the lenses constituting the collimator is fixedly arranged on a laser beam, and the remaining lenses Laser processing method comprising: moving a laser beam onto a laser beam. 23. A laser oscillator for outputting a laser beam, a mask disposed between the laser oscillator and a workpiece processed by the laser beam, a transfer lens disposed between the mask and the workpiece, and Using a laser processing apparatus having two or more collimators between the laser oscillator and the mask, one is configured to diverge the laser light, and the other is arranged with a collimator configured to converge the laser light, and A laser processing method comprising: moving one of the collimators onto the laser beam. 24. A laser oscillator for outputting a laser beam, a mask disposed between the laser oscillator and a workpiece processed by the laser beam, a transfer lens disposed between the mask and the workpiece, and Using a laser processing apparatus having two or more collimators between the laser oscillator and the mask, a laser having a step of moving one of the collimators on the laser beam and moving the collimator in an optical axis direction. Processing method. 25. A laser oscillator for outputting a laser beam, a mask disposed between the laser oscillator and a workpiece processed by the laser beam, a transfer lens disposed between the mask and the workpiece, and Using a laser processing apparatus having two or more collimators between the laser oscillator and the mask, at least one lens among the lenses constituting the collimator is fixedly arranged on a laser beam, and the remaining lenses A laser processing method comprising: moving a laser beam onto a laser beam and moving the entire collimator in the optical axis direction. 26. A laser oscillator for outputting a laser beam, a mask disposed between the laser oscillator and a workpiece processed by the laser beam, a transfer lens disposed between the mask and the workpiece, and Using a laser processing apparatus having two or more collimators between the laser oscillator and the mask, at least one lens among the lenses constituting the collimator is fixedly arranged on a laser beam, and the remaining lenses A laser processing method comprising moving at least one lens constituting a collimator in a direction of an optical axis while moving the lens on a laser beam. 27. A laser oscillator for outputting a laser beam, a mask disposed between the laser oscillator and a workpiece processed by the laser beam, a transfer lens disposed between the mask and the workpiece, and Using a laser processing apparatus having two or more collimators between the laser oscillator and the mask, one is configured to diverge the laser light, and the other is arranged with a collimator configured to converge the laser light, and A laser processing method comprising moving one of the collimators onto the laser beam and moving the entire collimator in the optical axis direction. 28. A laser oscillator for outputting a laser beam, a mask disposed between the laser oscillator and a workpiece processed by the laser beam, a transfer lens disposed between the mask and the workpiece, and Using a laser processing apparatus having two or more collimators between the laser oscillator and the mask, one is configured to diverge the laser light, and the other is arranged with a collimator configured to converge the laser light, and A laser processing method comprising: moving one of the collimators on the laser beam, moving the entire collimator in the optical axis direction, and moving the entire collimator in the optical axis direction.