JP3087649B2 - Marking method and device - Google Patents

Description

DETAILED DESCRIPTION OF THE INVENTION

[0001]

BACKGROUND OF THE INVENTION 1. Field of the Invention The present invention relates to a marking method and apparatus for marking characters, figures, and the like on the surface of a workpiece (hereinafter referred to as "work") with a laser beam.

[0002]

2. Description of the Related Art A method of irradiating a laser beam has conventionally been known as one of methods for marking characters, figures, and the like on a work. For example, a laser marking method is used to draw characters / graphics on a work, and the laser marking method is performed as follows. (1) A mask (stencil) inserted in the light is irradiated with laser light, and the work is marked by the laser light passing through the character / graphic pattern applied to the mask. (2) By controlling the movement of the beam irradiation position, a predetermined character /
A figure pattern is marked on a work.

The movement control of the laser beam in the method (2) is performed, for example, by using two sets of galvanometer scanners attached to a motor whose rotation angle is controllable (optical mirrors attached to a motor whose rotation angle is controllable). Using a scanner that scans the image. FIG. 4 is a diagram showing a schematic configuration of a marking device for marking a workpiece by the method (2) described above.
Is a laser that emits a laser beam, 2 is the galvanometer scanner described above, and 3 is a system controller.
In the figure, a laser beam emitted from a laser 1 is reflected by two sets of mirrors of a galvanometer scanner 2 and is irradiated onto a work W. The system controller 3 sends the galvanometer scanner 2 an X-direction position control signal Sx and a Y-direction position control signal Sy corresponding to the character / graphic pattern.
To control the angles of the two mirrors of the galvanometer scanner 2.

FIG. 5 is a view showing the arrangement of mirrors of the galvanometer scanner 2. As shown in the figure, two sets of X-axis mirrors 2a and Y-axis mirrors 2b whose rotation axes are orthogonal to each other are provided, and the X-axis mirror 2a and the Y-axis mirror 2b are controlled by an X-axis scanner 2c and a Y-axis scanner 2d. Driven. Laser light emitted from the laser device 1 is reflected by the X-axis mirror 2a and the Y-axis mirror 2b, and a laser beam is applied to a predetermined position on the work W.

FIG. 6 is a diagram showing an example of the configuration of the galvanometer scanner 2. FIG. 1 shows a circuit configuration for driving the X-axis mirror 2a, but the same applies to a circuit configuration for driving the Y-axis mirror 2b. As shown in the figure, a mirror driving unit 2e and a position sensor unit 2f are connected to the rotation axis of the X-axis mirror 2a.
e is X according to the drive current Ix output from the amplifier Amp1.
The shaft mirror 2a is rotated. The rotation angle of the X-axis mirror 2a is detected by the sensor Sen of the position sensor 2f. The output of the sensor Sen is supplied to an amplifier Amp2, and the amplifier Amp2 outputs a position signal Px corresponding to the rotation angle of the X-axis mirror 2a. On the other hand, the amplifier Amp1
Is an irradiation position control signal Sx given from a control unit described later.
And the position signal Px, and outputs a drive current Ix corresponding to the difference to drive the mirror driver 2e. Therefore, the X-axis mirror 2a is controlled to a rotation angle according to the position control signal Sx.

FIG. 7 is a block diagram showing the configuration of the system shown in FIGS. 4 to 6 described above. That is, the system controller 3 includes a control unit 3a, which outputs the irradiation position control signals Sx and Sy (Sy is a Y-axis position control signal) and controls the laser device 1. The comparison unit 2g of the galvanometer scanner 2
(Corresponding to the amplifier Amp1) corresponds to the position control signal Sx.
, Sy and the position signals Px, Py (Py is the Y-axis position signal) output from the position sensor unit 2f, and outputs drive currents Ix, Iy to the mirror drive unit 2e. The mirror driving section 2e drives the X-axis mirror 2a and the Y-axis mirror 2b according to the driving currents Ix and Iy. X-axis mirror 2
a, the rotation angle of the Y-axis mirror 2b is
f and is fed back to the comparison unit 2g. On the other hand, the laser light emitted from the laser device 1 is reflected by the X-axis mirror 2a and the Y-axis mirror 2b of the galvanometer scanner 2, and is irradiated on the work W. When the work W is irradiated with the laser beam as described above and the work W is marked, the irradiation amount of the laser beam is determined according to the material of the work W. For this reason, it is necessary to scan the laser beam at a constant speed according to the material of the work W, and the X-axis mirror 2a and the Y-axis mirror 2b of the galvanometer scanner 2 are required.
Also need to move at a constant speed. That is, the control unit 3
It is necessary to change the irradiation position control signals Sx and Sy output from a at a constant speed.

[0007]

In the above-described marking apparatus, the improvement of the marking throughput is realized as follows. (1) To increase the scanning speed of the galvanometer scanner. (2) Create characters / graphics so that the movement distance of the mirror of the galvanometer scanner is minimized. For example, as shown in FIG. 8, when marking the character "D", the galvanometer scanner is controlled in the order shown in FIG.

By the way, when the galvanometer scanner is driven at a high speed, the inertia of the movable part of the galvanometer scanner causes the irradiation position control signals Sx and Sy to be X
A follow-up delay of the axis mirror 2a and the Y-axis mirror 2b occurs.
Since the following delay is slightly different between the X direction and the Y direction,
Distortion occurs in the characters / graphics to be marked. FIG. 9 is a diagram showing the following delay. As shown in FIG.
When marking a pattern having a vertex A (solid line in the figure), the actually marked pattern becomes an arc-shaped pattern (dotted line in the figure) due to the following delay. Also,
As shown in FIGS. 8B and 8C, the position of the pattern (dotted line in FIG. 7) that is actually marked is shifted from the ideal pattern (solid line in FIG. 9) due to the following delay.

For example, when marking the character "D" shown in FIG. 8, if the tracking is delayed, the character is distorted as shown in FIG. 10A shows an ideal character “D” pattern (solid line in the figure) and an actually marked “D” pattern (dotted line in the figure), and FIG.
An irradiation position control signal Sx in the axial direction (solid line in the figure) and a position in the X direction to be actually marked (dotted line in the figure) are shown, and (c) is an irradiation position control signal Sy in the Y-axis direction (solid line in the figure). ) And the position in the Y direction where the marking is actually made (the dotted line in the figure). FIG. 10 shows a case where a character “D” composed of straight lines is marked. As shown in FIG. 10, when the character "D" is marked due to the following delay, the vicinity of the vertex becomes an arc shape. Also, between the vertices, the pattern to be actually marked is marked outside the ideal pattern, and between the vertices, the pattern to be actually marked is marked inside the ideal pattern.

As described above, when the galvanometer scanner is driven at a high speed, a tracking delay occurs, giving the impression that the characters / graphics to be marked are drawn in an irregular shape, and may not be adopted as marking characters. come. For this reason, there is a limit in increasing the driving speed of the galvanometer scanner, and there is a limit in improving the marking throughput. SUMMARY OF THE INVENTION The present invention has been made to solve the above-described problems of the related art. Even if the following delay occurs, the character / graphic marking order can be selected without giving a distorted impression. letter/
An object of the present invention is to provide a marking method and apparatus capable of marking a figure and improving the marking throughput.

[0011]

According to the present invention, the above-mentioned problems are solved as follows. (1) Give a position control signal to the galvanometer scanner,
The galvanometer scanner controls the irradiation position of the light beam on the object to be processed and, when marking a character / graphic on the object, delays the galvanometer scanner to follow the line-symmetric portion of the character / graphic to be marked. The marking order of the characters / graphics is selected so that the deviation of the marking position caused by the above becomes line-symmetric. (2) giving a position control signal to the galvanometer scanner,
The galvanometer scanner controls the irradiation position of the light beam on the object to be processed and, when marking the characters / graphics on the object, applies the X / Y axes of the galvanometer scanner to the characters / graphics to be marked. When there is a line symmetrical part with respect to a line parallel to the scanning direction, the character / graphic to be marked is divided into line symmetrical parts, and the light beam is applied so that the scanning direction of the light beam becomes line symmetrical for each line symmetrical part. Scan. In the inventions of claims 1 to 3 of the present invention, since marking is performed as in the above (1) and (2), even if a follow-up delay occurs in the galvanometer scanner, characters / characters are not given an irregular impression. A figure can be marked, and marking throughput can be improved.

[0012]

FIG. 1 is a diagram showing the configuration of a system according to an embodiment of the present invention. 7, the same components as those shown in FIG. 7 are denoted by the same reference numerals, 1 is a laser, 2 is the galvanometer scanner described above, 2a and 2b are X-axis mirrors, and Y-axis. A mirror 2e is a mirror driving unit, 2f is a position sensor unit, and 2g is a comparison unit. Reference numeral 3 denotes the system controller described above, and reference numeral 3a denotes a control unit. The control unit 3a in the present embodiment is provided with a position signal generating means 31 for outputting position control signals Sx and Sy of the laser beam, and a storage unit 32 for storing pattern signals to be marked and their marking order. ing.

FIG. 2 is a view for explaining the order of marking characters / graphics in the present embodiment.
The marking order of characters / graphics is determined as follows and marking is performed. (1) Check whether the character / graphic to be marked has a line-symmetric part with respect to a line parallel to the X and Y directions, and if the character / graphic to be marked has a line-symmetric part, line-symmetric Divided into two elements. (2) For the line symmetrical portion divided into two, a marking order is selected so that the scanning direction becomes line symmetrical. The X and Y directions are the X and Y directions of the galvanometer scanner described above.
This is the scanning direction of the axis mirror. (3) If the character / graphic to be marked has a line segment parallel to the X and Y directions, the marking order of the line segment is arbitrarily selected. When marking is performed so that they match and the line segment is not connected to the other line segment in an arc, as a general rule, after writing the line segment, start writing from the end point of the other line segment. Select the marking order so that there are no markings. In addition,
When the end point of a line segment matches the end point of another line segment as described above, instead of selecting the marking order as described above,
When marking up to the end point of a line segment, it is possible to stop at that end point and then start writing another line segment.

For example, when the character / graphic to be marked is a circle as shown in FIG. 2A, there are two axisymmetric axes, and the marking order is, for example, as shown in FIG. Selected. In this case, the marking order may be →, →, →, →, or the direction of the arrow in FIG.
It is only necessary that the conditions of (1) and (2) are satisfied. With such a marking order, the pattern to be actually marked has a shape in which a circle slightly expands left and right as shown by a dotted line in FIG. Therefore, it does not give a distorted impression.

Also, for example, as shown in FIG. 2 (b), even if the character / figure to be marked is a rhombus, since there are two axisymmetric axes, the marking order is, for example, as in the case of the circle. The selection is made as shown in FIG. In this case as well, the pattern to be actually marked has a shape in which the rhombus swells slightly to the left and right as shown by the dotted line in the figure due to the following delay, but since the symmetry of up, down, left and right is maintained, the impression is distorted Never give. Further, for example, FIG.
As shown in (c), when the character / figure to be marked is the character "A", since there is only one axis of symmetry, the order of marking is selected as shown by (1) to (4) in FIG. In addition, regarding the line segment → parallel to the X direction, the marking order can be arbitrarily selected. For example, the marking order may be →. Also in this case, the character actually marked due to the following delay has a shape in which the diagonal line of the character "A" swells right and left as shown by the dotted line in the figure, but since the left-right symmetry is maintained, It does not give a distorted impression.

As shown in FIG. 2D, when the character / figure to be marked is the character "D", since there is only one axis of symmetry, the marking order is as shown in FIG.
Is selected as shown in In addition, the line segment of the letter "D" →
Is the end point of another line segment →, →
Therefore, as described in (3) above, after completing the line segment →, the line segment is continued from the end point →
So that you don't start writing
Select the marking order so as to draw a line segment →. Also in this case, the character that is actually marked due to the following delay has a shape in which the curved portion of the character "D" swells to the right as shown by the dotted line in the figure, but since the vertical symmetry is maintained, It does not give a distorted impression.

Similarly, for example, the characters "B" and "C" are composed of a line symmetrical portion and a line segment parallel to the Y direction, so that the marking order is the same as that of the characters "A" and "D". Is selected. Further, in the case of a character obliquely inclined such as a character “θ” having no line-symmetric portion with respect to the X and Y directions, or an obliquely inclined ellipse, even if the character / graphic is slightly distorted due to a delay in following. Since no irregular impression is given, the marking order can be arbitrarily selected within a range that does not cause a great hindrance.

FIG. 3 is a diagram showing the operation of the X-axis mirror 2a and the Y-axis mirror 2b when marking the character "D". FIG. 3A shows an ideal pattern of the character "D" (solid line in FIG. 3). ) And a pattern “D” (dotted line in the figure) that is actually marked, and FIG.
x (solid line in the figure) indicates the position in the X direction (dotted line in the figure) where marking is actually performed, and (c) indicates the irradiation position control signal Sy in the Y-axis direction (solid line in the figure). The position in the Y direction (dotted line in the figure) is shown. Note that FIG.
10 shows a case where the character “D” composed of a straight line is marked as in FIG. 10. In this embodiment, as shown in FIG. 2 (d), the character “D” is marked.
Is symmetrically divided by a dotted line shown in FIG. 9A (the line segment-middle point in the figure), and →, →
Are marked so that the scanning direction is line-symmetric.

Next, the operation of this embodiment will be described with reference to FIGS. (1) The position signal generating means 31 of the control unit 3a first sets the X-axis mirrors 2a and Y so that the position marked by the X-axis mirror 2a and the Y-axis mirror 2b becomes the writing start position of the character.
The axis mirror 2b is positioned, and the marking order of the character “D” of the pattern signal stored in the storage unit 32 is read. (2) Next, in order to mark the line segment → of the character “D”, the position signal generating means 31 keeps the position control signal Sx for the X-axis mirror 2a constant while keeping the Y-axis mirror 2b.
Is changed at a predetermined speed. At the same time, the position signal generating means 31 turns on the laser 1 and introduces the laser light into the galvanometer scanner 2. Thereby, as shown in FIGS. 3A, 3B and 3C, the line segment → is marked. When marking the line segment →, as shown in FIG.
Is delayed from the position control signal Sy, but since the X-axis mirror 2a is not driven, the actually marked pattern matches the ideal pattern as shown in FIG.

(3) Next, the position signal generating means 31 reads out a line segment → to be marked next from the storage section 32,
After the laser 1 is turned off, the position control signal Sy for the Y-axis mirror 2b is changed to the writing start position of the line segment → while keeping the position control signal Sx for the X-axis mirror 2a constant. In response, as shown in FIG.
The marking position by the Y-axis mirror 2b moves to. At this time, the position marked by the Y-axis mirror 2b is greatly delayed from the position control signal Sy.
Is off, so there is no effect.

(4) The position signal generating means 31 is a line segment →
Is marked, the position control signal Sx for the X-axis mirror 2a is changed at a predetermined speed while the position control signal Sy for the Y-axis mirror 2b is kept constant. At the same time, the laser 1 is driven to introduce the laser light into the galvanometer scanner 2. As a result, FIG.
(B) As shown in (c), the line segment → is marked. When marking the line segment →, as shown in FIG. 3B, the position to be marked by the X-axis mirror 2a is delayed from the position control signal Sx, but the Y-axis mirror 2b is not driven, so that the marking is actually performed. The pattern shown in FIG. 3A matches the ideal pattern as shown in FIG.

(5) The position signal generating means 31 is a storage unit 32
, A line segment to be next marked → is read out, and the X-axis mirror 2 a and the Y-axis mirror 2 b
Is changed at a predetermined speed. Thereby, as shown in FIGS. 3A, 3B and 3C, the line segment → is marked. When marking the line segment →, as shown in FIG.
The positions marked by the a and Y-axis mirrors 2b lag behind the position control signals Sx and Sy, and the actually marked pattern is marked on the right side of the ideal pattern as shown in FIG.

(6) The position signal generating means 31 is a storage unit 32
Then, the line segment to be marked next is read out, and while the laser 1 is turned on, the position control signal Sx for the X-axis mirror 2a is kept constant, and the position control signal Sy for the Y-axis mirror 2b is changed at a predetermined speed. As a result, FIG.
As shown in (a), (b) and (c), a line segment → is marked. When marking a line segment →
As shown in FIG. 3B, the position marked by the Y-axis mirror 2b is delayed from the position control signal Sy, but since the X-axis mirror 2a is not driven, the pattern actually marked is shown in FIG. So that it matches the ideal pattern.

(7) Next, the position signal generating means 31 reads out the line segment → to be marked next from the storage section 32,
After the laser 1 is turned off, the position control signals Sx and Sy for the X-axis mirror 2a and the Y-axis mirror 2b are changed to the writing start position of the line segment →. In response to this, FIG.
As shown in (c), X-axis mirror 2a, Y-axis mirror 2b
The marking position by moves to. At this time, X
The positions marked by the axis mirror 2a and the Y axis mirror 2b lag behind the position control signals Sx and Sy, but have no effect since the laser 1 is off.

(8) Thereafter, similarly to the above (4) to (6), a line segment →→→ is marked. In the above marking, as in the case of marking the line segment →, when marking the line segment →, the actually marked pattern is marked on the right side of the ideal pattern as shown in FIG. As described above, in the present embodiment, the character “D” to be marked is divided into line-symmetric elements, and marking is performed so that the scanning direction is line-symmetric with respect to → and → of the line-symmetric part. →,
When the marking of the line segment is performed, the symmetry of the character to be marked is maintained even if the actual marking position deviates from the ideal pattern due to the following delay.

That is, in the present embodiment, the distortion of the character / figure to be marked cannot be completely removed, but since the distorted portion exists at a symmetrical position, the character does not give a distorted impression. Therefore, it can be adopted as a marking character. In the present embodiment, the characters / graphics to be marked are divided into line-symmetrical elements and the marking is performed so that the scanning direction of the line-symmetrical parts is line-symmetrical. And the number of times the marking position is moved to the writing start position of the line segment with the laser turned off increases. For this reason, it is not possible to perform the marking so that the moving distance of the X-axis mirror 2a and the Y-axis mirror 2b becomes the shortest, and the time required for the marking increases, but the galvanometer scanner can be driven at a high speed. As a result, marking throughput can be improved.

In the above embodiment, the characters / graphics to be marked are divided into two elements which are line-symmetric with respect to a line parallel to the X and Y axes of the galvanometer scanner.
The present invention is not limited to the above-described embodiment.
When the graphic has a line symmetrical portion, the marking order of the characters / graphics may be selected so that the deviation of the marking position caused by the following delay of the galvanometer scanner becomes line symmetrical.

[0028]

As described above, in the present invention, a position control signal is supplied to a galvanometer scanner, and the galvanometer scanner controls the irradiation position of the light beam on the object to be processed, and When marking the characters / graphics, the marking order of the characters / graphics is selected so that the deviation of the marking position caused by the tracking delay of the galvanometer scanner is line-symmetrical with respect to the line symmetrical portion of the characters / graphics to be marked, Since the marking of characters / graphics is performed, even if the galvanometer scanner has a delay in following up, it is possible to mark the characters / graphics without giving an irregular impression.
Marking throughput can be improved.

[Brief description of the drawings]

FIG. 1 is a diagram showing a configuration of an embodiment of the present invention.

FIG. 2 is a diagram illustrating a marking order of characters / graphics according to an embodiment of the present invention.

FIG. 3 is a diagram illustrating an operation when marking a character “D” in the embodiment.

FIG. 4 is a diagram illustrating a configuration of a marking device that controls movement of a beam irradiation position.

FIG. 5 is a diagram showing an arrangement of mirrors of the galvanometer scanner.

FIG. 6 is a diagram illustrating an example of a configuration of a galvanometer scanner.

FIG. 7 is a block diagram of a marking device.

FIG. 8 is a diagram illustrating an example of a marking order of a character “D”.

FIG. 9 is a diagram illustrating a tracking delay when the galvanometer scanner is driven at a high speed.

FIG. 10 is a diagram illustrating an operation when marking a character “D” in the order of FIG. 8;

[Description of Signs] 1 Laser 2 Galvanometer scanner 2a, 2b X-axis mirror, Y-axis mirror 2c X-axis scanner 2d Y-axis scanner 2e Mirror drive unit 2f Position sensor unit 2g Comparison unit 3 System controller 3a Control unit 31 Position signal generation means 32 Storage unit Amp1, Amp2 Amplifier Sen Position sensor

Continuation of the front page (56) References JP-A-6-55282 (JP, A) JP-A-7-290257 (JP, A) JP-A-7-33476 (JP, U) (58) Fields investigated (Int) .Cl. ⁷ , DB name) B23K 26/00-26/08

Claims (3)

(57) [Claims] 1. A marking method for giving a position control signal to a galvanometer scanner, controlling the irradiation position of a light beam on the object by the galvanometer scanner, and marking characters / graphics on the object. A marking order for the characters / graphics to be selected so that the deviation of the marking position caused by the tracking delay of the galvanometer scanner becomes line-symmetrical with respect to the line-symmetrical parts of the characters / graphics to be marked. 2. A marking method for giving a position control signal to a galvanometer scanner, controlling the irradiation position of a light beam on an object to be processed by the galvanometer scanner, and marking characters / graphics on the object to be processed. If the character / graphic to be marked has a line symmetrical portion with respect to a line parallel to the scanning direction of the X and Y axes of the galvanometer scanner, the character / graphic to be marked is divided into line symmetrical portions and each line is A marking method, wherein a light beam is scanned such that a scanning direction of the light beam is line-symmetric with respect to a symmetrical portion. 3. A light beam emitting unit for emitting a light beam, a galvanometer scanner for controlling an irradiation position of the light beam on the object to mark characters / graphics on the object, and a galvanometer scanner. Give the position control signal,
A control unit for driving and controlling the galvanometer scanner, wherein the control unit applies line symmetry to a character / figure to be marked with respect to a line parallel to a scanning direction of the X and Y axes of the galvanometer scanner. When there is a part, the character / graphic to be marked is divided into line-symmetric parts, and a position control signal is supplied to the galvanometer scanner so that the scanning direction of the light beam becomes line-symmetric for each line-symmetric part. apparatus.