JPH11300140A - Method of purifying air in clean room and device therefor - Google Patents

Abstract

PROBLEM TO BE SOLVED: To provide a desired removing effect of contaminants without installing a chemical filter and therefore to unnecessitate the stopping of a production line, and to lower the running cost. SOLUTION: The device for purifying air in a clean room has a fan 3 installed on the downstream side of a flow passage 2 for air discharged from the clean room 1. A scrubber 4 for purifying the air from the clean room 1 has a scrubber body 5 packed filled with pure water 6. Packing material 7 installed in the scrubber body 5 is constituted of a lot of plate materials whose sides and planes are formed like an almost corrugated shape and which are integrated. By contacting water with air fed to the clean room 1 or air in the clean room 1 to absorb contaminants contained in the air, the air in the clean room 1 is purified.

Description

DETAILED DESCRIPTION OF THE INVENTION

[0001]

The present invention relates to a method and an apparatus for purifying air in a clean room, and more particularly, to a method and an apparatus for purifying air in a clean room installed in a semiconductor manufacturing factory or the like.

[0002]

2. Description of the Related Art As is well known, a clean room is a limited space in which contamination is controlled, and airborne fine particles and the like in the air are managed to a limited cleanliness level or less. The required cleanliness is maintained for materials, chemicals, water, and the like supplied to the space, and environmental conditions such as temperature, humidity, and pressure are managed as needed.

For example, in the manufacturing process of a semiconductor device or the like, if dust in the air adheres to these materials, the performance of the product is remarkably deteriorated, and the rate of non-defective products is reduced. It must be manufactured in a clean room.

Therefore, in a semiconductor manufacturing plant or the like, the above-described clean room is provided.

As one example, as shown in FIG. 10, for example, there is provided an internal circulation flow path 14a capable of returning air discharged from the clean room 1a to the clean room 1a again to circulate the air, and providing the internal circulation flow path 14a. An air conditioner 17a is provided in the middle of 14a, and a high-performance filtration filter 16a is provided in the internal circulation passage 14a in front of the air inlet of the clean room 1a.

An external flow passage 18a for introducing outside air is connected to the internal circulation flow passage 14a.
a is also provided with a filtration filter called an air conditioner 21a and a pre-filter 20a.

[0007]

In such a conventional facility, the cleanliness in the clean room 1a can be maintained by preventing the inflow of dust and the like from the external flow path 18a to some extent. In the manufacturing plant, there is a problem that not only general dust but also organic substances and inorganic pollutants such as SO _x and NO _x are generated in the clean room 1a, which affects products.

In order to solve this problem, it has been attempted to install a filter for removing contaminants, called a chemical filter 19a, in the external flow path 18a or the internal circulation flow path 14a.

FIG. 10 shows, as an example, a state where the external flow path 18a is provided downstream of the pre-filter 20a.

[0010] However, such a chemical filter is expensive in itself, and its service life as a filter is as short as several months.

[0011] Accordingly, the running cost is accordingly high.

[0012] Further, if such a service life expires, it is necessary to replace the chemical filter, but at the time of the replacement work, the entire production line must be stopped, and the work efficiency is reduced.

In particular, in order to prevent the concentration of pollutants from increasing, it is more effective to provide the internal filter in the internal circulation channel 14a than in the external channel 18a. Problems such as a decrease in work efficiency and an increase in running costs due to the stoppage of the production line are caused by the external flow path 18
The case in which it was provided in the internal circulation channel 14a was more remarkable than the case in which it was provided in a.

The present invention has been made to solve all of the above problems, and can provide a desired effect of removing contaminants without installing a chemical filter as described above. An object of the present invention is to reduce running costs without the need to stop.

[0015]

SUMMARY OF THE INVENTION In order to solve such problems, the present invention has been made as a method and an apparatus for purifying air in a clean room. It is to purify the air in the clean room 1 by bringing water into contact with the air in the clean room 1 or absorbing the contaminants contained in the air.

Another characteristic of the purification method is that water discharged from the clean room 1 is brought into contact with water to absorb contaminants contained in the air, and then the air after absorbing the contaminants is removed from the clean room 1. 1 and purifying the air in the clean room 1 by repeating this.

Further, another characteristic of the purification method is that air circulated in the internal circulation passage 14 for returning the air discharged from the clean room 1 to the clean room 1 again, In a method for purifying air in a clean room, in which outside air is introduced from a passage 18 to purify air in the clean room, air discharged from the clean room 1 is returned to the clean room 1 again separately from the internal circulation flow path 14, or Air is circulated in a circulation channel that supplies the circulation channel 14, and water is brought into contact with air discharged from the clean room 1 in the circulation channel to absorb contaminants contained in the air. The air after absorption is returned to the clean room 1 or
And purifying the air in the clean room 1 by repeating this process.

Another characteristic of the purification method is that air circulated in the internal circulation passage 14 for returning the air discharged from the clean room 1 to the clean room 1 again, In a method for purifying air in a clean room, in which outside air is introduced from a passage 18 to purify air in the clean room, water is brought into contact with air discharged from the clean room 1 in the internal circulation passage 14 and contained in the air. After absorbing the pollutant, the air after the absorption of the pollutant is returned to the clean room 1, and the above is repeated to purify the air in the clean room 1.

Further, another characteristic of the purification method is that air circulated in the internal circulation flow path 14 for returning the air discharged from the clean room 1 to the clean room 1 again, In the method for purifying air in a clean room in which outside air is introduced from the passage 18 to purify air in the clean room, in the external passage 18, water is brought into contact with air from the outside to remove pollutants contained in the air. After absorption, the air after contaminant absorption is passed through the internal circulation passage 14.
To purify the air in the clean room 1 by supplying the air to the clean room 1 through the clean room.

The purifying apparatus of the present invention is characterized in that water is brought into contact with the air supplied to the clean room 1 or the air in the clean room 1 to absorb the pollutants contained in the air, so that the air in the clean room 1 is absorbed. A gas-liquid contact air purifying means for purifying air is provided.

Another characteristic of the purifying device is that a circulation channel for returning the air discharged from the clean room 1 to the clean room 1 is connected to the clean room 1, and the circulation channel is provided in the circulation channel. Gas-liquid contact air purifying means for purifying air by bringing water into contact with air discharged from the clean room 1 to absorb contaminants contained in the air is provided.

Further, another characteristic of the purifying apparatus is that an internal circulation flow path 14 for returning the air discharged from the clean room 1 to the clean room 1 is connected to the clean room 1 and provided therein. In a clean room air purifying apparatus provided with an external flow path 18 for introducing outside air into the clean room 1, the clean room 1 includes:
Separately from the internal circulation flow path 14, a circulation flow path for returning air discharged from the clean room 1 to the clean room 1 again or supplying the air to the internal circulation flow path (14) is provided and connected. A gas-liquid contact air purifying means for purifying the air by bringing water into contact with the air discharged from the clean room 1 to absorb contaminants contained in the air is provided in the road.

Further, another characteristic of the purifying device is that an internal circulation flow path 14 for returning the air discharged from the clean room 1 to the clean room 1 is connected to the clean room 1 and provided therein. In an air purifier for clean room air provided with an external flow path 18 for introducing outside air into the internal circulation flow path 14, water is brought into contact with air discharged from the clean room 1 in the internal circulation flow path 14, and air Gas-liquid contact air purification means for purifying air by absorbing contaminants contained in the air.

Further, another characteristic of the purifying device is that an internal circulation flow path 14 for returning the air discharged from the clean room 1 to the clean room 1 again is provided connected to the clean room 1, and the internal circulation flow path is provided. In a clean room air purifier provided with an external flow path 18 for introducing outside air into the external flow path 14, the external flow path 18 is contacted with water from the outside and water contained in the air. A gas-liquid contact air purifying means for purifying air by absorbing a substance is provided.

As the gas-liquid contact air purifying means, for example, a washing tower 4 provided with a filler 7 is used.

[0026]

Embodiments of the present invention will be described below with reference to the drawings.

First, the configuration of the apparatus for purifying air in a clean room according to the present embodiment will be described.
Reference numeral 1 denotes a clean room, and a fan 3 is provided on a downstream side of a flow path 2 of air discharged from the clean room 1.

Reference numeral 4 denotes a washing tower for purifying the air from the clean room 1 with pure water.
Pure water 6 is filled.

Numeral 7 denotes a filler provided in the washing tower main body 5, and as shown in FIG. 2, a large number of plate members 8,... I have.

In this filler 7 [Shinko Pantech Co., Ltd., Super Pack 6P (trade name)], the passage formed between the large number of plate members 8,... From the direction, the air discharged from the clean room 1 enters the passage between the plates 8 of the filler 7, and from above, pure water enters the passage between the plates 8 of the filler 7. .

Reference numeral 9 denotes a sprinkler pipe for spraying the pure water onto the filler 7 from above, and is disposed above the filler 7.

Reference numeral 10 denotes a circulation pump for discharging the pure water filled in the washing tower main body 5 from the washing tower main body 5 and supplying the pure water to the water spray pipe 9.

Reference numeral 11 denotes a flow for discharging air purified by absorbing dust and contaminants by gas-liquid contact with the pure water in the filler 7 in the cleaning tower main body 5 from the cleaning tower main body 5. This passage 11 is connected to the clean room 1 for returning the purified air to the clean room 1.

The flow path 2 from the clean room 1 to the cleaning tower 4 and the flow path 11 from the cleaning tower 4 to the clean room 1 form an air circulation flow path.

The flow path 2 and the flow path 11 are
As shown in FIG. 3, in an air purification device having an existing internal circulation channel 14 and an external circulation channel 18, the internal circulation channel 14
It is connected to a clean room 1 provided therein, and is incorporated as a circulation flow path different from the internal circulation flow path 14.

In FIG. 3, 16 is a high-performance filtration filter, 17 is an air conditioner, 19 is a chemical filter, 20 is a pre-filter, and 21 is an air conditioner, all of which are the conventional air purifying apparatus shown in FIG. It is also provided in.

Next, a method of purifying the clean room air by the clean room air purifying apparatus of the present embodiment will be described.

First, the air discharged from the clean room 1 passes through the flow path 2 and is supplied to the washing tower 4 by the fan 3.

The air discharged from the clean room 1 is
It contains dust and contaminants and is purified when passing through the filler 7 in the washing tower 4.

More specifically, the air supplied into the washing tower 4 is supplied from the lateral direction to the filler 7 and enters the passage between the plates 8 of the filler 7.

On the other hand, pure water is sprayed from a water spray pipe 9 provided above the filler 7, and the pure water is applied to the plate 8 of the filler 7,
... penetrating into the path between them from above.

As described above, due to the gas-liquid contact between the air that enters the passage from the lateral direction and the pure water that enters the passage from above, dust and contaminants in the air are absorbed by the pure water.

Therefore, the air that has passed through the filler 7 is discharged from the washing tower 4 with dust and contaminants removed, and
It is returned to the clean room 1 via the flow path 11.

As described above, the air in the clean room 1 passes through the washing tower 4 from the flow path 2 and is returned to the clean room 1 again through the flow path 11, so that the flow path 2 and the flow path 11
Circulates in the circulation channel formed by the

Therefore, even if dust and contaminants are contained in the air in the clean room 1, they pass through the filler 7 in the washing tower 4 when circulating through the flow path 2 and the flow path 11. Purified by gas-liquid contact as described above at 7,
Removal of dust, contaminants, and the like can be suitably performed.

In the above embodiment, the cleaning tower 4 is required to return the air passing through the cleaning tower 4 to the clean room 1.
Was directly connected to the clean room 1 via the flow path 11, but is not limited to this. For example, as shown in FIG.
May be provided.

This has the advantage that the efficiency of removing dust and contaminants is further improved.

In addition, in this manner, the chemical filter
Even when 12 is provided, since the contaminants and the like are suitably removed by the washing tower 4, the life of the chemical filter itself can be greatly extended as compared with the conventional case.

Further, as shown in FIG. 5, a heat exchanger 13 can be provided in a flow path for supplying the pure water 6 in the washing tower 4 to the water spray pipe 9 side.

In this case, there is an advantage that the humidity in the clean room 1 can be adjusted.

That is, in the apparatus as shown in FIG. 1, since the air that has come into gas-liquid contact with the washing tower 4 contains moisture, such air circulates through the flow path 2, the flow path 11, and the clean room 1. By doing so, the humidity in the clean room 1 gradually increases, but the absolute humidity of the air is reduced by lowering the temperature by the heat exchanger 13 as described above. It will be kept constant.

Therefore, with such a heat exchanger 13,
The humidity in the clean room 1 can be suitably maintained.

Reference numeral 10 denotes a circulation pump for discharging pure water filled in the washing tower main body 5 from the washing tower main body 5 and supplying the pure water to the water sprinkling pipe 9.

Further, in the above embodiment, the flow path 2 and the flow path in the clean room 1 provided in the internal circulation flow path 14 of the air purification device having the existing internal circulation flow path 14 and the external flow path 18 are provided. Although the flow path 2 and the flow path 11 are connected as a separate circulation flow path from the internal circulation flow path 14 by connecting the internal flow path 11, the flow path 2 and the flow path It is also possible to use as a single air purification device to which the flow path 11 is connected.

It is also possible to use the system having the flow channel 2 and the flow channel 11 in a system different from the embodiment shown in FIG.

Further, in the above embodiment, since the washing tower 4 is provided by providing the flow channel 2 and the flow channel 11 separately from the existing internal circulation flow channel and the external flow channel, the existing equipment can be used as it is. Although there is a preferable effect that only the purifying device can be attached, the present invention is not limited to this. For example, it is also possible to install the purifying device in the internal circulation channel 14 as shown in FIG.

In the embodiment shown in FIG.
Downstream of the chemical filter 15 and upstream of the chemical filter 15.

In the embodiment shown in FIG. 6, a high-performance filtration filter 16 and an air conditioner 17 are provided in the internal circulation passage 14,
Chemical filter 19, pre-filter
20 and an air conditioner 21 are provided.

Further, it is not limited to the inside of the internal circulation passage 14 but may be provided downstream of the outside air intake of the external passage 18 and upstream of the chemical filter 19 as shown in FIG. .

Further, in the embodiment of FIG. 3, the air purified by the gas-liquid contact in the washing tower 4 is returned to the clean room 1 in the circulation channel provided separately from the internal circulation channel 14. The air purified in the circulation channel may be supplied to the internal circulation channel 14, as shown in FIG.

Further, in each of the above embodiments, the cleaning tower 4 is provided so that purified air is supplied to the clean room 1.
Is provided outside the clean room 1, but the washing tower 4 can be provided inside the clean room 1 as shown in FIG.

In this case, the air in the clean room 1 is directly purified by the washing tower 4.

Further, in the above-described embodiment, as the filler 7 provided in the washing tower 4, a filler having a passage formed between a number of plate members 8, which are corrugated as viewed from the lateral direction and the upper direction, is used. Although the material 7 was used, the shape of the filler 7 is not limited to this.

For example, it may be a substantially cylindrical one having a number of passages.

Further, in the above embodiment, the air is supplied to the washing tower 4 from the lateral direction, that is, the direction crossing the water supply direction, with respect to the water sprayed on the washing tower 4 from above. However, it is also possible to supply air to the washing tower 4 from below, that is, from the direction facing the water supply direction.

Further, in the above embodiment, the cleaning tower 4 provided with the filler 7 having a desired shape is used as a means for performing gas-liquid contact between the air discharged from the clean room 1 and pure water. The means for performing is not limited to such a washing tower 4.

For example, the gas-liquid contact may be performed by simply jetting pure water without using the filler 7 as described above.

Further, in the above embodiment, pure water is used as the liquid for gas-liquid contact. However, not only pure water but also ultrapure water can be used, and general tap water can also be used. It is. The point is that water should be used.

[0069]

As described above, according to the present invention, a circulation channel for returning air discharged from a clean room to the clean room again is provided connected to the clean room, and the circulation channel is provided in the circulation channel from the clean room. Gas and liquid contact air purification means that purifies air by contacting water with discharged air and absorbing contaminants contained in the air is provided, so dust and contaminants generated in the clean room are provided. Is absorbed by water in the gas-liquid contact air purifying means, so that dust and contaminants in the air can be suitably removed.

In the present invention, low-concentration pollutants such as pollutants can be removed by 90 to 99%, and particulate matter such as dust can be removed by 90% or more.

In addition, as a result of improving the efficiency of removing contaminants and the like as described above, there is no need to provide a conventional chemical filter in the circulation flow path of the clean room, and therefore, the chemical filter is provided in the circulation flow path of the clean room. There is an effect that there is no need to stop the production line as in the case, and the running cost can be significantly reduced.

Further, since the air in the clean room is brought into gas-liquid contact with the water by the wet purification device while circulating and circulating, the water absorbing the pollutants and the like in the air is discharged and reused as industrial water. There is an advantage that can be.

[Brief description of the drawings]

FIG. 1 is a schematic block diagram of a device for purifying air in a clean room.

FIG. 2 is a schematic perspective view of a filler provided in the washing tower.

FIG. 3 is a schematic block diagram showing a state where the purification device of FIG. 1 is incorporated in an existing purification device.

FIG. 4 is a schematic block diagram of another embodiment.

FIG. 5 is a schematic block diagram of another embodiment.

FIG. 6 is a schematic block diagram of another embodiment.

FIG. 7 is a schematic block diagram of another embodiment.

FIG. 8 is a schematic block diagram of another embodiment.

FIG. 9 is a schematic block diagram of another embodiment.

FIG. 10 is a schematic block diagram showing a conventional apparatus for purifying air in a clean room.

[Explanation of symbols]

 1. Clean room 4. Cleaning tower 7. Filler

Claims (11)

[Claims] The air in the clean room (1) is absorbed by contacting water with air supplied to the clean room (1) or air in the clean room (1) to absorb contaminants contained in the air. A method for purifying air in a clean room, comprising purifying the air. 2. An air discharged from a clean room (1) is brought into contact with water to absorb contaminants contained in the air, and then the air after absorbing the contaminants is discharged into the clean room.
To the clean room (1)
A method for purifying air in a clean room, comprising purifying air in the room. 3. An internal circulation passage (14) for returning air discharged from the clean room (1) to the clean room (1) again.
In the clean room air purification method of purifying air in the clean room by introducing outside air from the external flow path (18) to the internal circulation flow path (14), and circulating air inside the internal circulation flow path (14). Apart from 14), the air discharged from the clean room (1) is returned to the clean room (1) again or the air is circulated in a circulation flow path to be supplied to the internal circulation flow path (14). After water is brought into contact with the air discharged from the clean room (1) to absorb the contaminants contained in the air, the air after absorbing the contaminants is returned to the clean room (1), or the internal circulation flow path is used. (14),
A method for purifying air in a clean room, wherein the method is repeated to purify air in the clean room (1). 4. An internal circulation passage (14) for returning air discharged from the clean room (1) to the clean room (1) again.
In the clean room air purification method of purifying air in the clean room by introducing outside air from the external flow path (18) to the internal circulation flow path (14), and circulating air inside the internal circulation flow path (14). In 14), water is brought into contact with the air discharged from the clean room (1) to absorb the contaminants contained in the air, and the air after absorbing the contaminants is returned to the clean room (1). A method for purifying air in a clean room, comprising repeatedly purifying air in the clean room (1). 5. An internal circulation passage (14) for returning air discharged from the clean room (1) to the clean room (1) again.
In the method for purifying air in a clean room, in which air is circulated inside and the outside air is introduced into the internal circulation flow path (14) from the external flow path (18) to purify air in the clean room, the external flow path (18 After contacting water from outside with water to absorb the contaminants contained in the air, the air after absorbing the contaminants is transferred to the clean room (1) through the internal circulation flow path (14). A method for purifying air in a clean room, wherein the air in the clean room (1) is purified by supplying the air. 6. The air in the clean room (1) is absorbed by bringing water into contact with the air supplied to the clean room (1) or the air in the clean room (1) to absorb the contaminants contained in the air. An apparatus for purifying air in a clean room, comprising a gas-liquid contact air purifying means for purifying. 7. A circulation path for returning air discharged from the clean room (1) to the clean room (1) again is provided connected to the clean room (1), and the clean room (1) is provided in the circulation path. 1) Gas-liquid contact air purifying means for purifying air by bringing water into contact with air discharged from and absorbing pollutants contained in the air is provided. Purification device. 8. An internal circulation passage (14) for returning air discharged from the clean room (1) to the clean room (1) again.
Is provided in connection with the clean room (1), and is provided with an external flow path (18) for introducing outside air into the internal circulation flow path (14). (1) has an internal circulation passage (1
Apart from 4), the air discharged from the clean room (1) is returned to the clean room (1) again or the internal circulation flow path (1
A circulation flow path for supplying to 4) is connected and provided, and water is brought into contact with air discharged from the clean room (1) in the circulation flow path to absorb contaminants contained in the air. A device for purifying air in a clean room, comprising: a gas-liquid contact air purifying means for purifying air by the means. 9. An internal circulation passage (14) for returning air discharged from the clean room (1) to the clean room (1) again.
Is provided in connection with the clean room (1), and is provided with an external flow path (18) for introducing outside air into the internal circulation flow path (14). In the circulation channel (14), the clean room
(1) Air in a clean room, which is provided with a gas-liquid contact air purifying means for purifying the air by bringing water into contact with the air discharged from the air and absorbing pollutants contained in the air. Purification equipment. An internal circulation flow path (14) for returning air discharged from the clean room (1) to the clean room (1) again.
Is provided in connection with the clean room (1), and is provided with an external flow path (18) for introducing outside air into the internal circulation flow path (14). In the flow path (18), gas-liquid contact air purification means for purifying air by contacting water with air from the outside and absorbing contaminants contained in the air is provided. Clean room air purifier. 11. The gas-liquid contact air purifying means includes a filler
The apparatus for purifying air in a clean room according to any one of claims 6 to 10, which is a washing tower (4) provided with (7).