JPH11295893A5 - - Google Patents

Info

Publication number
JPH11295893A5
JPH11295893A5 JP1998102822A JP10282298A JPH11295893A5 JP H11295893 A5 JPH11295893 A5 JP H11295893A5 JP 1998102822 A JP1998102822 A JP 1998102822A JP 10282298 A JP10282298 A JP 10282298A JP H11295893 A5 JPH11295893 A5 JP H11295893A5
Authority
JP
Japan
Prior art keywords
acid
photoresist composition
positive photoresist
composition according
group
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
JP1998102822A
Other languages
English (en)
Japanese (ja)
Other versions
JP3916188B2 (ja
JPH11295893A (ja
Filing date
Publication date
Application filed filed Critical
Priority to JP10282298A priority Critical patent/JP3916188B2/ja
Priority claimed from JP10282298A external-priority patent/JP3916188B2/ja
Priority to KR10-1999-0012958A priority patent/KR100533402B1/ko
Priority to US09/292,052 priority patent/US6207343B1/en
Publication of JPH11295893A publication Critical patent/JPH11295893A/ja
Publication of JPH11295893A5 publication Critical patent/JPH11295893A5/ja
Application granted granted Critical
Publication of JP3916188B2 publication Critical patent/JP3916188B2/ja
Anticipated expiration legal-status Critical
Expired - Fee Related legal-status Critical Current

Links

JP10282298A 1998-04-14 1998-04-14 ポジ型フォトレジスト組成物 Expired - Fee Related JP3916188B2 (ja)

Priority Applications (3)

Application Number Priority Date Filing Date Title
JP10282298A JP3916188B2 (ja) 1998-04-14 1998-04-14 ポジ型フォトレジスト組成物
KR10-1999-0012958A KR100533402B1 (ko) 1998-04-14 1999-04-13 포지티브 감광성 조성물
US09/292,052 US6207343B1 (en) 1998-04-14 1999-04-14 Positive photosensitive composition

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP10282298A JP3916188B2 (ja) 1998-04-14 1998-04-14 ポジ型フォトレジスト組成物

Publications (3)

Publication Number Publication Date
JPH11295893A JPH11295893A (ja) 1999-10-29
JPH11295893A5 true JPH11295893A5 (enExample) 2005-05-26
JP3916188B2 JP3916188B2 (ja) 2007-05-16

Family

ID=14337726

Family Applications (1)

Application Number Title Priority Date Filing Date
JP10282298A Expired - Fee Related JP3916188B2 (ja) 1998-04-14 1998-04-14 ポジ型フォトレジスト組成物

Country Status (1)

Country Link
JP (1) JP3916188B2 (enExample)

Families Citing this family (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP4121396B2 (ja) 2003-03-05 2008-07-23 富士フイルム株式会社 ポジ型レジスト組成物
JP5039410B2 (ja) * 2007-03-29 2012-10-03 富士フイルム株式会社 ポジ型レジスト組成物およびこれを用いたパターン形成方法

Similar Documents

Publication Publication Date Title
JP2003241379A5 (enExample)
JP2001281849A5 (enExample)
JP2004117688A5 (enExample)
JP2000214588A5 (enExample)
JP2003035948A5 (enExample)
JP2002090988A5 (enExample)
JP2003262952A5 (enExample)
JP2002049156A5 (enExample)
JP2002303978A5 (enExample)
JP2002278053A5 (enExample)
JP2002323768A5 (enExample)
JPH10274845A5 (enExample)
JP2000231194A5 (enExample)
JP2002236358A5 (enExample)
JP2000352822A5 (enExample)
JP2004053822A5 (enExample)
JP2003177537A5 (enExample)
JP2000338676A5 (enExample)
JPH10239846A5 (enExample)
JP2004078105A5 (enExample)
JP2001066779A5 (enExample)
JPH11295893A5 (enExample)
JPH10274844A5 (enExample)
JP2000227659A5 (enExample)
JPH10282669A5 (enExample)