JPH11291150A - Machining device for disc-like object - Google Patents

Abstract

PROBLEM TO BE SOLVED: To eliminate uneven machining and to enable even machining by controlling the moving speed of a pressing means and a pressing force. SOLUTION: Wide tapes 3A, 3B for machining which can machine the machining area from an inner periphery to an outer periphery of a discal part 1 are used. Platens 4A, 4B for pressing the tapes 3A, 3B for machining are formed shorter than the width of the tapes 3A, 3B for machining so as to press the tapes 3A, 3B for partial machining. This device is provided with a tape width direction drive means 30 for moving these platens 4A, 4B to the width direction of the tapes 3A, 3B for machining and a control means for controlling the moving speed of the platens 4A, 4B and the pressing force of the platens 4A, 4B by the tape width direction drive means 30.

Description

DETAILED DESCRIPTION OF THE INVENTION

[0001]

BACKGROUND OF THE INVENTION 1. Field of the Invention The present invention relates to a processing apparatus for pressing a processing tape against a flat surface of a disk-shaped object such as a magnetic disk or a wafer to process the flat surface of the disk-shaped object.

[0002]

2. Description of the Related Art A flat surface of a disk-shaped object such as a magnetic disk or a wafer is polished by rotating the disk-shaped object and pressing a processing tape against the disk-shaped object by a pressing means such as a platen, a roller, or an air nozzle. Have gone. In this case, the processing tape uses a wide processing tape capable of sufficiently processing from the inner peripheral portion to the outer peripheral portion of the processing area of the disk-shaped object, and the pressing means has a length corresponding to the processing area. Polishing is performed by uniformly pressing the tape against the plane of the disk-shaped object.

[0003]

When the disk-shaped object is rotated and the processing tape is pressed uniformly on the flat surface of the disk-shaped object by pressing means, the inner peripheral portion and the outer peripheral portion are partially removed. However, there is a problem that the processing amount varies in the radial direction due to different processing conditions.

An object of the present invention is to provide an apparatus for processing a disc-shaped object capable of eliminating processing unevenness and performing uniform processing.

[0005]

According to the present invention, there is provided a spindle for rotating a chuck by chucking a disk-shaped object, and a spindle arranged corresponding to a plane of the disk-shaped object chucked to the spindle. A wide processing tape capable of processing from the inner peripheral portion to the outer peripheral portion of the processing area of the disk-shaped object, and pressing means for pressing the processing tape so that the processing tape is pressed against the disk-shaped object. In the apparatus for processing a disc-shaped object provided, the pressing means is formed to be shorter than the width of the processing tape so as to partially press the processing tape, and A tape width direction driving means for moving in a direction, and a control means for controlling a moving speed of the pressure means and a pressing force of the pressure means by the tape width direction driving means.

[0006]

DETAILED DESCRIPTION OF THE PREFERRED EMBODIMENTS One embodiment of the present invention will be described with reference to FIGS. As shown in FIGS. 1 and 2, a disk-shaped object 1 such as a magnetic disk or a wafer is
It is chucked and rotates. The processing tapes 3A, 3B arranged corresponding to the planes on both surfaces of the disk-shaped object 1 are wound on a take-up reel from a supply reel (not shown) so as to be movable in a direction perpendicular to the drawing. New portions of the processing tapes 3A and 3B are supplied to the portions of the platens 4A and 4B. Processing tape 3
A and 3B are wide enough to allow sufficient processing from the inner peripheral portion to the outer peripheral portion of the processing area of the disk-shaped article 1. The above configuration is the same as the conventional example.

In this embodiment, the processing tape 3
A platen 4 for pressing A, 3B against the plane of the disk-shaped object 1
A and 4B are shorter than the widths of the processing tapes 3A and 3B, and the platens 4A and 4B are connected to the processing tapes 3A and 3B.
Side direction driving means 10 for moving the platens 4A and 4B in the width direction (arrows B and B 'directions) of the processing tapes 3A and 3B. Driving means 30 and tape-side direction driving means 1
0 and control means 5 for controlling the tape width direction driving means 30
0 (see FIG. 3).

First, the structure of the tape-side direction driving means 10 will be described with reference to FIGS. A guide rail 12 disposed in parallel with the axis of the spindle 2 is fixed to a movable plate 11 that is moved in the directions of arrows B and B 'by a tape width direction driving means 30 described later. Sliders 13A and 13B are slidably provided on the guide rail 12, and platens 4A and 4B are fixed to the sliders 13A and 13B via pressing means mounting plates 14A and 14B.

The moving plate 11 has a slider 13A,
Tape-side direction driving cylinders 20A and 20B for moving 13B along the guide rail 12 are fixed. U-shaped operating plates 21A and 21B are fixed to the operating rods of the tape-side direction driving cylinders 20A and 20B, and sliders 1 are mounted on the U-shaped grooves of the operating plates 21A and 21B.
Connecting plates 22A and 22B fixed to 3A and 13B are inserted. The moving plate 11 is also provided with a pressing means pressing cylinder 24 via cylinder mounting plates 23A and 23B.
A and 24B are fixed, and the pressing means pressurizing cylinder 24
A, 24B operating rod is provided with the pressing means mounting plate 14
A, 14B.

Next, the structure of the tape width direction driving means 30 will be described with reference to FIGS. A guide rail 32 disposed parallel to the width direction of the processing tapes 3A and 3B is fixed to the base plate 31. A slider 33 is slidably provided on the guide rail 32, and a connecting plate 34 fixed to the moving plate 11 is fixed to the slider 33. A female screw 35 whose axis is disposed parallel to the width direction of the processing tapes 3A and 3B is fixed to the connecting plate 34, and a male screw 36 is screwed to the female screw 35. The male screw 36 is rotatably supported by bearings 37 and 38. Bearing 3
7 and 38 are fixed to a support plate 39, and the support plate 39 is fixed to the base plate 31. A tape width direction driving motor 40 is fixed to the support plate 39, and a timing pulley 41 fixed to the output shaft of the tape width direction driving motor 40 and a timing pulley 42 fixed to the male screw 36 are provided with a timing belt 43. It is hung.

Next, the configuration of the control means 50 will be described with reference to FIG. The pressurizing means pressurizing cylinders 24A and 24B are operated by being evacuated by a vacuum pump 51 via an electronic vacuum regulator 52 and an electromagnetic valve 53. The tape-side driving cylinders 20A and 20B are provided with a compressor 5
Compressed air is sent from the device 4 via the electromagnetic valve 55 to operate. The controller 56 controls the electronic vacuum regulator 52, the solenoid valve 55, the motor driver 58 for driving the motor of the spindle 2 and the motor driver 59 for driving the tape width direction driving motor 40 based on the data set in the setting data memory 57. Control. Setting data memory 57
The platen 4 corresponding to the radial position of the disk-shaped object 1.
A, 4B, a pressing force for pressing the processing tapes 3A, 3B;
That is, the control data of the electronic vacuum regulator 52, the control data of the rotation speed of the spindle 2, the moving speed of the platens 4A and 4B in the width direction corresponding to the radial position of the disk-shaped object 1, that is, the rotation of the motor 40 for driving the tape width direction. Number of control data has been input.

Next, the operation will be described. Platen 4
A, 4B are located outside the outer periphery of the disk-shaped object 1, and operate from a state separated from the processing tapes 3A, 3B. With the spindle 2 rotating, the tape width direction driving motor 40 rotates, and the external thread 36 rotates via the timing pulley 41, the timing belt 43, and the timing pulley 42. When the male screw 36 rotates, the female screw 3
5 moves in the direction of arrow B, and the connecting plate 34, the moving plate 11, and the pressing means mounting plates 14A and 14B also move in the direction of arrow B,
The platens 4A and 4B move to positions corresponding to the outer peripheral portion of the disk-shaped object 1.

Next, the pressurizing means pressurizing cylinders 24A, 2A
4B is turned on, and the pressurizing means pressurizing cylinder 24A,
24B is retracted and the platens 4A and 4B are pressurized, but the tape-side driving cylinder 20A,
Operation plates 20A, 20B provided on an operation rod at 20B
In a state regulated by Subsequently, the tape side driving cylinders 20A and 20B are turned on, and the operating rods of the tape side driving cylinders 20A and 20B protrude. As a result, the sliders 13A and 13B and the pressing means mounting plates 14A and 14B are
1B, the guide rail 12 via the connecting plates 22A, 22B.
Moves in the direction of arrow A along the arrow, and the regulation of the platens 4A and 4B is released, and the platens 4A and 4B
A pressing force is applied to A and 3B, and the processing tapes 3A and 3B are pressed against the disk-shaped object 1.

Next, the tape width direction driving motor 40 rotates again. Thus, the platens 4A and 4B move from the outer peripheral portion to the inner peripheral portion of the disk-shaped object 1 while pressing the processing tapes 3A and 3B against the disk-shaped object 1. Platen 4A,
When 4B moves to the inner peripheral portion of the processing area of the disk-shaped object 1, the tape width direction driving motor 40 rotates in the reverse direction. As a result, the platens 4A and 4B move from the inner peripheral portion to the outer peripheral portion of the disk-shaped object 1 while pressing the processing tapes 3A and 3B against the disk-shaped object 1 in reverse to the above. After repeating this operation a predetermined number of times, the tape side driving cylinder 20A,
20B is turned off, and the platens 4A and 4B move in the direction of arrow B 'and separate from the processing tapes 3A and 3B. Next, the pressurizing means pressurizing cylinders 24A and 24B are turned off, and the processing tapes 3A and 3B by the platens 4A and 4B are used.
The pressure applied to is released. Subsequently, the motor 40 for driving in the tape width direction rotates in the reverse direction, and the platens 4A and 4B move in the direction of arrow A 'and move outward from the outer periphery of the disk-shaped object 1.
Thus, the polishing of the disk-shaped object 1 is completed.

The pressing force for pressing the processing tapes 3A, 3B against the disk-shaped object 1 by the platens 4A, 4B is increased by increasing the degree of vacuum of the pressing means pressing cylinders 24A, 24B by the platens 4A, 4B. Becomes larger. In the case of the same pressing force, since the inner peripheral portion of the disk-shaped object 1 has a larger polishing amount than the outer peripheral portion, the platens 4A, 4A
When B moves from the outer periphery to the inner periphery of the disk-shaped object 1,
The degree of vacuum of the pressurizing means pressurizing cylinders 24A, 24B is controlled so as to be gradually lowered, and when the platens 4A, 4B move from the inner peripheral part to the outer peripheral part of the disk-shaped object 1, the pressure means is reversed. Control is performed so that the degree of vacuum of the pressure cylinders 24A and 24B is gradually increased. Thereby, processing unevenness can be eliminated between the outer peripheral portion and the inner peripheral portion of the disk-shaped article 1, and uniform processing can be performed. This pressurizing means pressurizing cylinder 24
By storing control data of the degree of vacuum of A and 24B (pressing force of the platens 4A and 4B) in the setting data memory 57 in advance, the control unit 56 can control the electronic type corresponding to the radial position of the disk-shaped object 1. The vacuum regulator 52 is controlled to control the degree of vacuum of the pressurizing means pressurizing cylinders 24A and 24B.

The uniform processing can also be performed by the following method. When the platens 4A and 4B move from the outer peripheral portion to the inner peripheral portion of the disk-shaped object 1, the moving speed is controlled to be gradually increased, and the platens 4A and 4B are moved from the inner peripheral portion to the outer peripheral portion of the disk-shaped object 1. On the other hand, when moving to a section, control is performed so that the moving speed is gradually reduced. This platen 4
By storing the control data of the moving speeds A and 4B in the setting data memory 57 in advance, the control unit 56 controls the rotation speed of the tape width direction driving motor 40 in accordance with the radial position of the disk-shaped object 1. Control.

Pressurizing means pressurizing cylinders 24A, 24A,
4B or the rotational speed of the tape width direction drive motor 40 (the platens 4A, 4B).
The control of the processing tapes 3A, 3B in the width direction (B) may be performed using any one of them according to the type of the disc-shaped object 1, or may be used in combination.

In the above embodiment, the case where the platens 4A and 4B are used as the pressurizing means has been described. However, the present embodiment is not limited to the platens 4A and 4B. For example, rollers, air nozzles, etc. may be used instead of the platens 4A, 4B. In the case of an air nozzle, the air nozzle is of course a processing tape 3
A and 3B, the processing tapes 3A and 3B are disc-shaped objects 1 by the air pressure blown out from the air nozzle without contact.
Pressure. Also in this case, uniform polishing can be performed by controlling the distance between the processing tapes 3A and 3B and the air nozzle.

[0019]

According to the present invention, a spindle for chucking and rotating a disk-shaped object, and a spindle which is arranged corresponding to the plane of the disk-shaped object chucked to the spindle and which is located within a processing area of the disk-shaped object. A wide-width processing tape capable of processing an outer peripheral portion from a peripheral portion, and a disk-shaped object processing apparatus including a pressing means for pressing the processing tape so that the processing tape is pressed against the disk-shaped object, Pressing means is formed shorter than the width of the processing tape so as to partially press the processing tape, tape width direction driving means for moving the pressing means in the width direction of the processing tape, Since the configuration is provided with the control means for controlling the moving speed of the pressing means and the pressing force of the pressing means by the tape width direction driving means, processing unevenness can be eliminated and uniform processing can be performed.

[Brief description of the drawings]

FIG. 1 is a front view showing an embodiment of a disk-shaped object processing apparatus according to the present invention.

FIG. 2 is an explanatory diagram of a state in which a platen has processed a processing tape.

FIG. 3 is a block diagram of a control unit.

[Explanation of symbols]

 DESCRIPTION OF SYMBOLS 1 Disc-shaped object 2 Spindle 3A, 3B Processing tape 4A, 4B Platen 10 Tape side direction drive means 20A, 20B Tape side direction drive cylinder 24A, 24B Pressurization means pressurization cylinder 30 Tape width direction drive means 40 Tape width direction Driving motor 50 Control means

Claims (2)

[Claims] 1. A spindle which chucks and rotates a disk-shaped object, and is arranged corresponding to a plane of the disk-shaped object chucked by the spindle, and is arranged from an inner peripheral portion to an outer peripheral portion of a processing area of the disk-shaped object. A wide processing tape that can be processed, and a processing device for a disk-shaped object including a pressing unit that presses the processing tape so that the processing tape is pressed against the disk-shaped object, wherein the pressing unit includes the pressing unit, Tape width direction driving means formed to be shorter than the width of the processing tape so as to partially press the processing tape, and a tape width direction driving means for moving the pressing means in the width direction of the processing tape; And a control means for controlling the moving speed of the pressurizing means and the pressing force of the pressurizing means. 2. The apparatus according to claim 1, wherein said pressurizing means comprises a platen, a roller, an air nozzle or the like.