JPH11289151A - Surface protection layer forming method for circuit substrate - Google Patents

Surface protection layer forming method for circuit substrate

Info

Publication number
JPH11289151A
JPH11289151A JP10867398A JP10867398A JPH11289151A JP H11289151 A JPH11289151 A JP H11289151A JP 10867398 A JP10867398 A JP 10867398A JP 10867398 A JP10867398 A JP 10867398A JP H11289151 A JPH11289151 A JP H11289151A
Authority
JP
Japan
Prior art keywords
opening
layer
protective layer
surface protective
circuit board
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Pending
Application number
JP10867398A
Other languages
Japanese (ja)
Inventor
Hideaki Tanaka
秀明 田中
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Nippon Mektron KK
Original Assignee
Nippon Mektron KK
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Nippon Mektron KK filed Critical Nippon Mektron KK
Priority to JP10867398A priority Critical patent/JPH11289151A/en
Publication of JPH11289151A publication Critical patent/JPH11289151A/en
Pending legal-status Critical Current

Links

Landscapes

  • Photosensitive Polymer And Photoresist Processing (AREA)
  • Non-Metallic Protective Coatings For Printed Circuits (AREA)

Abstract

PROBLEM TO BE SOLVED: To accurately form an aperture part without deviations on a surface protective layer, for the purpose of connecting an electronic component, a connector and the like. SOLUTION: This surface protection layer 7 of a circuit substrate is formed while a part of a resist layer 3, to be used for formation of a circuit wiring pattern 2A, is used as a mask 5A for an aperture part 6 of the surface protective layer 7 used for the circuit wiring pattern 2A. An exposure mask 4 for exposing the resist layer 3 is formed in such a manner that the light transmittance of the part corresponding to the aperture part 6 of the surface protection layer 7 and the light transmittance of the part corresponding to the circuit wiring pattern 2A are different.

Description

【発明の詳細な説明】DETAILED DESCRIPTION OF THE INVENTION

【0001】[0001]

【発明の属する技術分野】本発明は、可撓性回路基板等
の回路基板を製作する際、回路基板上に電子部品やコネ
クタ−等を接続する為に表面保護層に設ける開口部をズ
レなく正確に形成する為の回路基板に於ける表面保護層
の形成法及びそれに使用する為の露光マスクに関する。
BACKGROUND OF THE INVENTION 1. Field of the Invention The present invention relates to a method for manufacturing a circuit board, such as a flexible circuit board, which does not shift an opening provided in a surface protective layer for connecting electronic components, connectors and the like on the circuit board. The present invention relates to a method for forming a surface protective layer on a circuit board for accurate formation and an exposure mask used for the method.

【0002】[0002]

【従来の技術】近年、電子機器の高密度化、小型化と共
に、使用される回路基板の構造も回路配線パタ−ンのフ
ァインパタ−ン化は勿論のこと、実装回路基板全体とし
ての高密度化、小型化の要求があり、これに伴って1つ
の回路基板に実装するLSI、チップ等の電子部品数や
コネクタ−部品数等も増大している。
2. Description of the Related Art In recent years, as electronic equipment has become higher in density and smaller in size, the structure of a circuit board to be used has not only been reduced to a fine pattern of circuit wiring patterns, but also to a higher density as a whole mounted circuit board. There is a demand for miniaturization and miniaturization, and accordingly, the number of electronic components such as LSIs and chips mounted on one circuit board, the number of connectors and the like, and the like are increasing.

【0003】この為、カバ−材と通称される表面保護層
には電子部品用ランド、コネクタ−用ランドとして多数
の開口部を有する回路基板が要求されている。特に、可
撓性回路基板は、材料の厚みが他の会と基板と比較して
薄く、放熱性も良いことから高電流容量対応回路基板、
高密度部品実装時の放熱対策回路基板として注目されて
いる。
For this reason, a circuit board having a large number of openings as a land for electronic parts and a land for connectors is required for a surface protective layer commonly called a cover material. In particular, the flexible circuit board has a thinner material than other boards and a better heat dissipation, so the circuit board for high current capacity,
It is drawing attention as a circuit board for heat dissipation when mounting high-density components.

【0004】更に、可撓性回路基板は、フィルム材料で
構成されていることから屈曲状態での使用が可能であ
り、折曲げて筐体に組み込むことにより小型化を図った
高密度実装回路基板やケ−ブルと一体化した回路基板と
しての展開が実用化されているが現状である。
Further, since the flexible circuit board is made of a film material, it can be used in a bent state. It has been put to practical use as a circuit board integrated with a cable or a cable.

【0005】一般的な可撓性回路基板に用いられるカバ
−材としての表面保護層には、カバ−フィルムとカバ−
コ−トの二種類がある。カバ−フィルムは、接着成分を
付与した絶縁材料のフィルムからなり、開口部の形成手
法としては、べ−ス材との貼り合わせ前に、予め金型な
どにより開口部を形成するフィルムタイプと、カバ−フ
ィルムに感光性のものを使用し、べ−ス材に貼り合わせ
た後、遮光マスクを介して露光、現像して開口部を形成
する露光タイプの二種類が挙げられる。
A surface protective layer as a cover material used for a general flexible circuit board includes a cover film and a cover.
There are two types of coats. The cover film is formed of a film of an insulating material provided with an adhesive component. As a method of forming the opening, a film type in which the opening is formed in advance by a mold or the like before bonding with the base material, There are two types of exposure types, in which a photosensitive film is used for the cover film, which is bonded to a base material, and then exposed and developed through a light shielding mask to form an opening.

【0006】一方、カバ−コ−トは、接着成分を付与し
た絶縁材料の溶液からなり、開口部の形成手法として
は、スクリ−ン印刷機などによる印刷タイプと、感光性
成分を付与したカバ−コ−ト材料をべ−ス材にカ−テン
コ−ト法などで塗布し、遮光マスクを介して露光、現像
して開口部を形成する露光タイプの二種類がある。
On the other hand, the cover coat is made of a solution of an insulating material provided with an adhesive component, and the opening is formed by a printing method using a screen printing machine or the like and a cover provided with a photosensitive component. There are two types of exposure types, in which a coating material is applied to a base material by a curtain coating method or the like, and is exposed and developed through a light shielding mask to form an opening.

【0007】[0007]

【発明が解決しようとする課題】一般的なカバ−材とし
ての表面保護層の形成法には、前記した高密度化要求に
伴って次のような諸問題が発生する。先ず、カバ−フィ
ルムでは、要求が高密度になるに従って、開口部形成の
為には高密度化の金型と打ち抜き装置が必要となるの
で、高価となり金型費用も増大する。
The following problems occur in the method of forming the surface protective layer as a general cover material in accordance with the above-mentioned demand for high density. First, in the case of a cover film, as the demand becomes higher, a high-density die and a punching device are required to form the opening, so that the cost becomes high and the die cost increases.

【0008】また、べ−ス材と貼り合わせる場合、接着
機に設けたガイド棒に材料に形成したガイド穴を差込み
仮固定することから、両者の精度に応じてカバ−の開口
部と設計位置とにズレが発生する。そして、貼り合わせ
時の熱や圧力により接着剤成分の溶融流れ出しがあり、
これによってもカバ−の開口部面積と設計面積とのズレ
が発生する。
Further, when bonding with a base material, a guide hole formed in the material is inserted and temporarily fixed to a guide rod provided in the bonding machine, so that the opening of the cover and the design position are adjusted according to the accuracy of both. A gap occurs between them. Then, there is a melt out of the adhesive component due to heat and pressure at the time of bonding,
This also causes a deviation between the area of the opening of the cover and the design area.

【0009】露光タイプのカバ−フィルムは、露光マス
クが必要であり、これはべ−ス材のエッチング収縮率に
対応した補正率で製作する必要があり、べ−ス材に収縮
率のバラツキがある場合、開口部の設計値に対するズレ
が発生する。また、露光マスクを固定する際にズレが生
じ、露光と現像処理で形成したカバ−開口部と設計値と
のズレが発生する。更に、材料に感光性成分を付与する
為、材料費も一般のカバ−フィルム材と比べ高価となる
ので、製品原価を悪化させる。
An exposure type cover film requires an exposure mask, which must be manufactured at a correction rate corresponding to the etching shrinkage rate of the base material, and the base material has a variation in shrinkage rate. In some cases, a deviation from the design value of the opening occurs. In addition, a deviation occurs when the exposure mask is fixed, and a deviation between a cover opening formed by exposure and development processing and a design value occurs. Further, since a photosensitive component is added to the material, the cost of the material is higher than that of a general cover film material.

【0010】一方、カバ−コ−トの場合では、印刷機の
ガイド穴の精度に応じてカバ−開口部と設計位置とでズ
レが発生する。また、溶液に粘性が少ない為、にじみ等
の流れ出しが生じ、カバ−の開口部面積と設計面積との
ズレが発生する。
On the other hand, in the case of a cover coat, a deviation occurs between the cover opening and the design position in accordance with the accuracy of the guide holes of the printing press. In addition, since the solution has a low viscosity, a flow such as bleeding occurs, and a gap between an opening area of the cover and a design area occurs.

【0011】露光タイプのカバ−コ−トもフィルムの場
合と同様に露光マスクが必要であるので、この場合で
も、べ−ス材のエッチング収縮率に対応した補正率で製
作する必要があり、べ−ス材に収縮率のバラツキがある
場合、開口部の設計値に対するズレが発生する。また、
マスクを固定する際にズレが生ずるので、露光と現像処
理で形成したカバ−開口部と設計値とのズレが発生す
る。更に、材料に感光性成分を付与する為、材料費も一
般のカバ−コ−ト材と比べ高価となるので、製品原価を
悪化させるという問題がある。
Since the exposure type cover coat also requires an exposure mask as in the case of the film, even in this case, it is necessary to manufacture the exposure type at a correction rate corresponding to the etching shrinkage rate of the base material. If the base material has a variation in shrinkage, a deviation from the design value of the opening occurs. Also,
Since a shift occurs when the mask is fixed, a shift occurs between the cover opening formed by the exposure and the development processing and the design value. Further, since a photosensitive component is added to the material, the cost of the material is higher than that of a general cover coat material.

【0012】そこで、本発明は、可撓性回路基板等の回
路基板を製作する際、回路基板上に電子部品やコネクタ
−等を接続する為に表面保護層に設ける開口部をズレな
く正確に形成する為の回路基板に於ける表面保護層の形
成法及びそれに使用する為の露光マスクを提供するもの
である。
In view of the above, according to the present invention, when fabricating a circuit board such as a flexible circuit board, an opening provided in a surface protective layer for connecting electronic components and connectors on the circuit board can be accurately formed without displacement. An object of the present invention is to provide a method for forming a surface protective layer on a circuit board to be formed and an exposure mask for use in the method.

【0013】また、本発明は、感光性カバ−材による開
口部の形成手法や高精度金型により開口部を設けたカバ
−フィルムの接着による表面保護層の形成手法と比較し
て、開口部の設計値に対するズレを解消した極めて優れ
た開口部の構造を有するものであって、更には、感光性
カバ−材と比べて材料費が安価であり、金型製作と比べ
ても総加工費が安価な極めて優れた回路基板に於ける表
面保護層の形成法及びそれに使用する為の露光マスクを
提供するものである。
Also, the present invention provides a method for forming an opening using a photosensitive cover material and a method for forming a surface protective layer by bonding a cover film having an opening with a high-precision mold. It has an extremely excellent opening structure that eliminates the deviation from the design value of, and furthermore, the material cost is lower than that of the photosensitive cover material, and the total processing cost is lower than that of the mold production. The present invention provides a method of forming a surface protective layer on an inexpensive and extremely excellent circuit board, and an exposure mask for use in the method.

【0014】[0014]

【課題を解決するための手段】その為に本発明の回路基
板に於ける表面保護層の形成法では、回路基板を製造す
る際、回路配線パタ−ンを形成する為に使用するレジス
ト層の一部を前記回路配線パタ−ンの為の表面保護層の
開口部用のマスクに転用しながら回路基板の表面保護層
を形成することを特徴とするものである。
Therefore, in the method of forming a surface protective layer on a circuit board according to the present invention, when a circuit board is manufactured, a resist layer used for forming a circuit wiring pattern is manufactured. The present invention is characterized in that a surface protective layer of a circuit board is formed while a part thereof is diverted to a mask for an opening of the surface protective layer for the circuit wiring pattern.

【0015】ここで、前記レジスト層には感光性レジス
トを用い、また、前記表面保護層にポリイミドワニスを
使用することができ、また、前記レジスト層を露光する
為の露光マスクには、前記表面保護層の開口部に相当す
る部分の光透過率と、回路配線パタ−ンに相当する部分
との光透過率とが異なるものを用いることにより、所定
のレジスト剥離条件下に於いて前記表面保護層の開口部
に相当する部位に前記レジスト層の一部をマスクとして
残すことができる。
Here, a photosensitive resist may be used for the resist layer, a polyimide varnish may be used for the surface protective layer, and an exposure mask for exposing the resist layer may include the surface resist. By using a material having a different light transmittance from the portion corresponding to the opening of the protective layer and the portion corresponding to the circuit wiring pattern, the surface protection under a predetermined resist peeling condition is performed. A part of the resist layer can be left as a mask at a portion corresponding to the opening of the layer.

【0016】そして、前記レジスト層を露光する為の露
光マスクは、前記表面保護層の開口部に相当する部分の
光透過率と、回路配線パタ−ンに相当する部分との光透
過率とが異なるように形成されたものを使用する。
An exposure mask for exposing the resist layer has a light transmittance of a portion corresponding to an opening of the surface protective layer and a light transmittance of a portion corresponding to a circuit wiring pattern. Use a differently formed one.

【0017】[0017]

【発明の実施の形態】以下、図示の実施例を参照しなが
ら本発明を更に詳述する。本発明では、エッチング法で
回路基板を製作する際、回路配線パタ−ンを形成する場
合に使用したレジスト層の一部をカバ−材としての表面
保護層の開口部の為のマスクに転用することにより、表
面保護層の形成に於ける開口部の設計値とのズレを解消
し得るように案出したものである。
DETAILED DESCRIPTION OF THE PREFERRED EMBODIMENTS The present invention will be described below in further detail with reference to the illustrated embodiments. In the present invention, when a circuit board is manufactured by an etching method, a part of the resist layer used for forming a circuit wiring pattern is diverted to a mask for an opening of a surface protective layer as a cover material. In this way, the present invention has been devised so that deviation from the design value of the opening in the formation of the surface protective layer can be eliminated.

【0018】この場合、レジスト層には感光性レジスト
を用い、また、表面保護層にポリイミドワニスを使用す
ることができるが、両者ともマスク層、表面保護層とし
ての機能を有するものであれば他の材料も適宜使用する
ことができる。
In this case, a photosensitive resist can be used for the resist layer, and a polyimide varnish can be used for the surface protective layer. However, if both have a function as a mask layer and a surface protective layer, they can be used. Can also be used as appropriate.

【0019】ここで、露光マスクは、銅箔等の導電層が
エッチングされる部分の光透過率と回路配線パタ−ンに
相当する部分との光透過率とが異なる一般的なものを用
いるのではなく、更に、表面保護層の開口部に相当する
部分の光透過率が上記した各光透過率と異なるものを用
意する。
Here, a general exposure mask is used in which the light transmittance of a portion where a conductive layer such as a copper foil is etched is different from the light transmittance of a portion corresponding to a circuit wiring pattern. Instead, a material is prepared in which the light transmittance of the portion corresponding to the opening of the surface protective layer is different from the above light transmittance.

【0020】この露光マスクを用いて所定の露光量でレ
ジスト層を露光することによって、回路配線パタ−ン形
成部の露光処理と、その回路配線パタ−ン形成部とは露
光量の異なる表面保護層の開口部の露光処理とが一度に
可能となり、これにより表面保護層の開口部と設計値で
の開口部とのズレを解消することができる。
By exposing the resist layer at a predetermined exposure amount using this exposure mask, the exposure processing of the circuit wiring pattern forming portion and the surface protection of the circuit wiring pattern forming portion having different exposure amounts are performed. Exposure processing of the opening of the layer can be performed at a time, and thereby, the deviation between the opening of the surface protective layer and the opening at the designed value can be eliminated.

【0021】そこで、現像処理によりエッチング部分の
レジスト領域は剥離され、露出した導電層部分をエッチ
ングにより除去すると回路配線パタ−ンを形成すること
ができる。そして、一定のレジスト剥離条件下に於いて
は回路配線パタ−ン形成用のマスクは剥離されるが、露
光量の異なる表面保護層の開口部のレジストは残るの
で、これを表面保護層の開口部のマスクに転用するもの
である。
Then, the resist region of the etched portion is peeled off by the developing process, and the exposed conductive layer portion is removed by etching, so that a circuit wiring pattern can be formed. Under a certain resist stripping condition, the mask for forming the circuit wiring pattern is stripped, but the resist in the opening of the surface protection layer having a different exposure amount remains. It is diverted to a part of the mask.

【0022】この状態で、表面保護層の材料としてポリ
イミドワニスなどをスクリ−ン印刷機やカ−テンコ−ト
或いはバ−コ−タ−などを使用して表面保護層の開口部
には薄くなるように表面全体に塗布し、乾燥後、上記レ
ジスト剥離とは異なる条件で表面保護層の開口部にマス
クとして残っているレジスト部分を除去することによっ
て、設計値とのズレを解消した表面保護層の開口部を形
成することができるので、キュア処理を加えて回路基板
の為の表面保護層を最終的に形成できる。
In this state, polyimide varnish or the like as a material of the surface protective layer is thinned in the opening of the surface protective layer by using a screen printing machine, a curtain coat or a bar coater. After coating the entire surface and drying it, the resist portion remaining as a mask in the opening of the surface protective layer under conditions different from the above-mentioned resist peeling is removed, so that the deviation from the design value is eliminated. Can be formed, so that a surface protection layer for a circuit board can be finally formed by adding a curing process.

【0023】図1の(1)〜(7)はその一製造工程図
であって、同図(1)のように先ず適当な可撓性絶縁べ
−ス材1に接着剤を使用することなく積層した導電層と
しての銅箔2からなる無接着剤銅張積層板を用意し、そ
の銅箔2上にドライフィルムタイプの感光性レジスト層
3を90℃に加熱したロ−ルラミネ−タ−を使用して一
様に貼り合わせた。
FIGS. 1 (1) to 1 (7) are views showing one manufacturing process thereof. First, as shown in FIG. 1 (1), an adhesive is used for a suitable flexible insulating base material 1. An adhesive-free copper-clad laminate composed of a copper foil 2 as a conductive layer without any lamination was prepared, and a dry film type photosensitive resist layer 3 was heated to 90 ° C. on the copper foil 2 by a roll laminator. Were used for uniform bonding.

【0024】そこで、同図(2)の如く感光性レジスト
層3上に露光マスク4を固定した。この露光マスク4
は、銅箔2をエッチングする部分を遮光する未露光領域
4A、表面保護層の開口部に相当する部分を遮光する半
露光領域4B、そして回路配線パタ−ンを形成する為の
全露光領域4Cにより構成されている。
Therefore, an exposure mask 4 was fixed on the photosensitive resist layer 3 as shown in FIG. This exposure mask 4
Are a non-exposed area 4A for shielding the portion where the copper foil 2 is etched, a semi-exposed area 4B for shielding the portion corresponding to the opening of the surface protection layer, and a whole exposed area 4C for forming a circuit wiring pattern. It consists of.

【0025】次いで、同図(3)の如く、露光機を使用
して銅箔2をエッチングする部分には未露光部3Aと、
表面保護層の開口部に相当する部分には半露光部3B
と、そして回路配線パタ−ンを形成する部分には全露光
部3Cとを形成するように適宜露光処理を加えた。
Next, as shown in FIG. 3C, a portion where the copper foil 2 is etched by using an exposure machine has an unexposed portion 3A,
A semi-exposed portion 3B is provided at a portion corresponding to the opening of the surface protection layer
Exposure treatment was applied to the portions where the circuit wiring pattern is to be formed so as to form the entire exposed portion 3C.

【0026】ここで、同図(4)のように、1%炭酸ナ
トリウム水溶液を用いて現像処理して未露光部3Aの感
光性レジスト層3の部分を除去し、次いで硫酸銅水溶液
を用いて露出した銅箔2の部分をエッチング除去して所
要の回路配線パタ−ン2Aを形成した。更に、0.25
%水酸化ナトリウム溶液により全露光部3Cの感光性レ
ジスト層3の部分を除去するが、この場合、半露光部3
Bは表面保護層の開口部の為のマスクとして残る。この
結果、回路配線パタ−ン2Aの形成と表面保護層の開口
部の為のマスクとしての半露光部3Bを同時に形成でき
る。
At this point, as shown in FIG. 4D, the photosensitive resist layer 3 in the unexposed portions 3A is removed by developing using a 1% aqueous sodium carbonate solution, and then using an aqueous copper sulfate solution. The exposed portion of the copper foil 2 was removed by etching to form a required circuit wiring pattern 2A. Furthermore, 0.25
A portion of the photosensitive resist layer 3 in the entire exposed portion 3C is removed by using a sodium hydroxide solution.
B remains as a mask for the opening of the surface protection layer. As a result, the formation of the circuit wiring pattern 2A and the semi-exposed portion 3B as a mask for the opening of the surface protection layer can be formed simultaneously.

【0027】次に、同図(5)の如く、塗工機を使用し
て表面保護層の材料としてポリイミドワニス溶液を表面
全体に亘って気相乾燥後に厚さが10μm程度になるよ
うにポリイミドワニス層5を全面塗工処理した。この
際、マスクとして機能する半露光部3Bの部位5Aのポ
リイミドワニスの厚さを適宜薄く形成する。
Next, as shown in FIG. 5 (5), a polyimide varnish solution was used as a material for the surface protective layer using a coating machine so that the thickness of the polyimide varnish solution was about 10 μm after being vapor-phase dried over the entire surface. The varnish layer 5 was entirely coated. At this time, the thickness of the polyimide varnish at the portion 5A of the semi-exposed portion 3B functioning as a mask is appropriately reduced.

【0028】そこで、同図(6)の如く、40℃の3%
水酸化ナトリウム溶液によって薄く形成した部位5Aの
ポリイミドワニスと共にマスクとして機能する半露光部
3Bを除去すると、そこに回路配線パタ−ン2Aの一部
が露出した開口部6を形成することができる。
Therefore, as shown in FIG.
When the semi-exposed portion 3B functioning as a mask is removed together with the polyimide varnish of the portion 5A formed thin with a sodium hydroxide solution, an opening 6 in which a part of the circuit wiring pattern 2A is exposed can be formed.

【0029】最後に、残ったポリイミドワニス層5に2
70℃で所要時間熱処理を加えることにより、同図
(7)の如く電気特性及び耐候性の優れたズレのない開
口部6をもつ表面保護層7を形成することができる。
Finally, 2 is applied to the remaining polyimide varnish layer 5.
By performing the heat treatment at 70 ° C. for a required time, a surface protective layer 7 having an opening 6 having excellent electrical properties and weather resistance and having no deviation can be formed as shown in FIG.

【0030】[0030]

【発明の効果】本発明によれば、表面保護層に形成すべ
き開口部と設計値とのズレを解消した回路基板を安定に
提供することができ、また、従来の高精度金型による表
面保護層の開口部の形成手法や感光性カバ−材料による
開口部の形成手法と比較すると安価に正確な開口部を有
する表面保護層を安価に形成できる。
According to the present invention, it is possible to stably provide a circuit board in which a difference between a design value and an opening to be formed in a surface protective layer can be provided. Compared with the method of forming the opening of the protective layer or the method of forming the opening using the photosensitive cover material, the surface protective layer having the accurate opening can be formed at low cost.

【0031】そして、本発明を採用することにより、1
つの回路基板に多数実装するためのチップ部品用ランド
やコネクタ−用ランドとして、表面保護層に多数の開口
部を有する回路基板を高品質且つ低価格で製作し提供で
きるので、総加工費で安価で極めて優れたコストパフォ
−マンスを有する回路基板を安定的に提供できる。
By adopting the present invention, 1
Circuit boards with many openings in the surface protection layer can be manufactured and provided at high quality and at low cost as land for chip parts and land for connectors for mounting a large number on one circuit board. Thus, a circuit board having extremely excellent cost performance can be stably provided.

【図面の簡単な説明】[Brief description of the drawings]

【図1】(1)〜(7)は本発明の一実施例による製造
工程図である。
1 (1) to 1 (7) are manufacturing process diagrams according to an embodiment of the present invention.

【符号の説明】[Explanation of symbols]

1 可撓性絶縁べ−ス材 2 銅箔 2A 回路配線パタ−ン 3 感光性レジスト層 3B マスクとしての半露光部 4 露光マスク 5 ポリイミドワニス層 6 開口部 7 表面保護層 DESCRIPTION OF SYMBOLS 1 Flexible insulating base material 2 Copper foil 2A Circuit wiring pattern 3 Photosensitive resist layer 3B Semi-exposure part as a mask 4 Exposure mask 5 Polyimide varnish layer 6 Opening 7 Surface protective layer

Claims (4)

【特許請求の範囲】[Claims] 【請求項1】回路基板を製造する際、回路配線パタ−ン
を形成する為に使用するレジスト層の一部を前記回路配
線パタ−ンの為の表面保護層の開口部用のマスクに転用
しながら回路基板の表面保護層を形成することを特徴と
する回路基板に於ける表面保護層の形成法。
When manufacturing a circuit board, a part of a resist layer used for forming a circuit wiring pattern is diverted to a mask for an opening of a surface protection layer for the circuit wiring pattern. Forming a surface protection layer on the circuit board while forming the surface protection layer on the circuit board.
【請求項2】前記レジスト層に感光性レジストを用い、
また、前記表面保護層にポリイミドワニスを使用するこ
とを特徴とする請求項1の回路基板に於ける表面保護層
の形成法。
2. A photosensitive resist is used for the resist layer,
2. The method for forming a surface protective layer on a circuit board according to claim 1, wherein a polyimide varnish is used for the surface protective layer.
【請求項3】前記レジスト層を露光する為の露光マスク
には、前記表面保護層の開口部に相当する部分の光透過
率と、回路配線パタ−ンに相当する部分との光透過率と
が異なるものを用いることにより、所定のレジスト剥離
条件下に於いて前記表面保護層の開口部に相当する部位
に前記レジスト層の一部をマスクとして残すことを特徴
とする請求項1又は2に記載の回路基板に於ける表面保
護層の形成法。
3. An exposure mask for exposing said resist layer has a light transmittance of a portion corresponding to an opening of said surface protective layer and a light transmittance of a portion corresponding to a circuit wiring pattern. Wherein a part of the resist layer is left as a mask at a portion corresponding to an opening of the surface protective layer under a predetermined resist stripping condition by using a different resist. The method for forming a surface protective layer on the circuit board according to the above.
【請求項4】前記レジスト層を露光する為の露光マスク
は、前記表面保護層の開口部に相当する部分の光透過率
と、回路配線パタ−ンに相当する部分との光透過率とが
異なるように形成された回路基板に於ける表面保護層を
形成する為の露光マスク。
4. An exposure mask for exposing the resist layer has a light transmittance of a portion corresponding to an opening of the surface protective layer and a light transmittance of a portion corresponding to a circuit wiring pattern. An exposure mask for forming a surface protective layer on a differently formed circuit board.
JP10867398A 1998-04-03 1998-04-03 Surface protection layer forming method for circuit substrate Pending JPH11289151A (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP10867398A JPH11289151A (en) 1998-04-03 1998-04-03 Surface protection layer forming method for circuit substrate

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP10867398A JPH11289151A (en) 1998-04-03 1998-04-03 Surface protection layer forming method for circuit substrate

Publications (1)

Publication Number Publication Date
JPH11289151A true JPH11289151A (en) 1999-10-19

Family

ID=14490785

Family Applications (1)

Application Number Title Priority Date Filing Date
JP10867398A Pending JPH11289151A (en) 1998-04-03 1998-04-03 Surface protection layer forming method for circuit substrate

Country Status (1)

Country Link
JP (1) JPH11289151A (en)

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CN103533758A (en) * 2013-10-21 2014-01-22 无锡博一光电科技有限公司 Manufacturing method for flexible circuit board

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CN103533758A (en) * 2013-10-21 2014-01-22 无锡博一光电科技有限公司 Manufacturing method for flexible circuit board

Similar Documents

Publication Publication Date Title
JP4607612B2 (en) Wiring circuit board and manufacturing method thereof
US20060180346A1 (en) High aspect ratio plated through holes in a printed circuit board
US8633392B2 (en) Circuit board with high-density circuit patterns
KR20000047653A (en) Two signal one power plane circuit board
US20150053457A1 (en) Printed circuit board and method of manufacturing the same
JP3624423B2 (en) Printed wiring board and manufacturing method thereof
US20060096780A1 (en) Thin film circuit integrating thick film resistors thereon
KR100351923B1 (en) method for fabricating PCB
JPH11289151A (en) Surface protection layer forming method for circuit substrate
JP2005175185A (en) Flexible wiring board
US20190289723A1 (en) Circuit board
US6274291B1 (en) Method of reducing defects in I/C card and resulting card
KR20060066971A (en) Manufacturing method for double side flexible printed circuit board
CN114641136B (en) Manufacturing method of copper layer boss of circuit board and circuit board
JP2910261B2 (en) Printed wiring board and its manufacturing method
JP2897365B2 (en) Manufacturing method of wiring board
JP2001111203A (en) Method and apparatus for forming surface protection layer of circuit board
JP2004281608A (en) Method for manufacturing circuit substrate
JPH07123178B2 (en) Flexible wiring board and manufacturing method thereof
JPH118465A (en) Manufacture of printed wiring board through additive method
KR20050109653A (en) Preparation of semiconductor substrate by build up technology
JP2002344120A (en) Flexible circuit board and its manufacturing method
JP2833315B2 (en) TAB tape carrier
JP3648753B2 (en) Wiring board manufacturing method
JPH03225894A (en) Manufacture of printed wiring board

Legal Events

Date Code Title Description
A621 Written request for application examination

Free format text: JAPANESE INTERMEDIATE CODE: A621

Effective date: 20050209

A131 Notification of reasons for refusal

Free format text: JAPANESE INTERMEDIATE CODE: A131

Effective date: 20070529

A02 Decision of refusal

Free format text: JAPANESE INTERMEDIATE CODE: A02

Effective date: 20071009