JPH11271480A - Stage utilizing ultrasonic motor and electronic equipment and printing device using it - Google Patents

Abstract

PROBLEM TO BE SOLVED: To use a stage even under environment for avoiding magnetization by improving positioning accuracy, simplifying mechanism, and miniaturizing the stage. SOLUTION: A stage is provided with a first traveling body 2 that can freely travel in one direction freely and a second traveling body 3 that can freely travel in another direction that differs from the above direction. The stage is further provided with a first ultrasonic motor 14 that is brought into contact with the above first traveling body 2 and moves the traveling body 2 in the above one direction and a second ultrasonic motor 16 that is brought into contact with the above second traveling body 3 and moves the traveling body 3 in the above another direction.

Description

DETAILED DESCRIPTION OF THE INVENTION

[0001]

BACKGROUND OF THE INVENTION 1. Field of the Invention The present invention relates to a stage using a piezoelectric actuator or an ultrasonic motor movable on a two-dimensional plane, and to an electronic apparatus and a printing apparatus using the stage.

[0002]

2. Description of the Related Art Recently, to measure and process a two-dimensional object, an XY stage in which uniaxial tables intersect at 90 degrees with each other and are vertically stacked is often used. Generally, a method of converting the rotation of an electromagnetic motor into linear motion by a feed screw in each of the X and Y axis directions, or
A system in which linear driving is performed by an electromagnetic linear motor in each of the Y-axis directions is adopted (JSPE-57-10, '91).
-10-1726).

[0003]

However, in the case of a system in which a motor and a feed screw are combined, positioning accuracy is reduced due to backlash of the screw portion or thermal expansion of the screw portion. Further, it is necessary to provide the screw portion over the entire desired feed amount, and the mechanism becomes complicated and large. Also,
In the case of an electromagnetic linear motor, the positioning accuracy is limited by the relationship between the poles of the permanent magnet and the coil that generates the magnetic field. That is, the coil tends to stop near the pole of the permanent magnet, and the XY stage is hard to stop at a predetermined position. Further, it is necessary to provide a coil or a permanent magnet over the entire desired feed amount, and the mechanism is complicated and large. Further, in the above-mentioned method, components around the stage are magnetized by electromagnetic force, and circuits around the stage are affected by electromagnetic noise, so that there is a problem that they cannot be used in an environment avoiding magnetization.

The present invention has been made to solve the above technical problems, and an object of the present invention is to improve the positioning accuracy, to have a simple and compact mechanism and to avoid magnetization. An object of the present invention is to provide a stage using an ultrasonic motor that can be used even in an environment, and an electronic apparatus and a printing apparatus using the same.

[0005]

In order to solve the above-mentioned problems, a first moving body movable in one direction and a first moving body which can move in one direction are provided. A second moving body that is moved in one direction along with the movement, and is movable in another direction different from the one direction, in contact with the first moving body. A first piezoelectric actuator or an ultrasonic motor that moves in the one direction, and a second piezoelectric actuator or an ultrasonic motor that moves in the other direction by contacting the second moving body. It is characterized by having.

In the above solution, the piezoelectric actuator or the ultrasonic motor has a method of obtaining an elliptical vibration at an intermediate position between a node and an antinode of a bending vibration wave, a second bending vibration having a phase different from that of the first bending vibration wave. Any of a method of generating a traveling wave by a vibration wave, a method of obtaining an elliptical vibration by a stretching vibration wave and a bending vibration wave, and a method of obtaining an elliptical vibration by a stretching vibration wave and a torsional vibration wave are included. The material of the piezoelectric element used for the piezoelectric actuator or the ultrasonic motor includes barium titanate, lead zirconate titanate, lithium niobate,
Lithium tantalate and the like are included. In addition, a piezoelectric actuator or an ultrasonic motor for moving each moving body is
Both singular and plural are included. The one direction and the other direction may be appropriately selected, but from the viewpoint of efficiently moving the second moving body, it is preferable that the one direction and the other direction are orthogonal to each other.

According to this, the first piezoelectric actuator or the ultrasonic motor abuts on the first moving body and applies a frictional force in one direction to move the first moving body in one direction, With the movement of the first moving body, the second moving body is also moved in one direction. The second piezoelectric actuator or the ultrasonic motor contacts the second moving body and applies a frictional force in another direction to move the second moving body in another direction. Then, the second moving body freely moves on a plane including one direction and another direction.

That is, since each piezoelectric actuator or ultrasonic motor is brought into contact with the moving body to directly apply a frictional force, there is no need to provide a driving force transmission mechanism between the moving body and the vibrator. The configuration is simple and small. Also, there is no backlash or error due to the installation of the driving force transmission mechanism. Further, since the piezoelectric actuator and the ultrasonic motor do not stop at a specific position due to factors such as magnetic force unlike the electromagnetic motor, the positioning accuracy of the moving body is improved. Further, since no electromagnetic noise is generated, it can be used in an environment where magnetization is avoided.

According to a second aspect of the present invention, in the stage using the piezoelectric actuator or the ultrasonic motor according to the first aspect, the first piezoelectric actuator or the ultrasonic motor is applied to the first moving body. And a second pressure mechanism for pressing the second piezoelectric actuator or the ultrasonic motor to the second moving body.

In the above means, the pressing mechanism includes
For example, a mechanism for applying pressure using an elastic member is included. The elastic members include coil springs, leaf springs, other springs, rubber, and the like.

According to this, the first pressurizing mechanism presses the first piezoelectric actuator or the ultrasonic motor to the first moving body, and makes the first piezoelectric actuator or the ultrasonic motor and the first moving unit press each other. The second pressure mechanism generates an appropriate frictional force between the second moving body and the second piezoelectric actuator or the ultrasonic motor. And an appropriate frictional force is generated between the first moving body and the second moving body. Therefore, the first
And the second moving body move at an appropriate speed.

According to a third aspect of the present invention, in the stage using the ultrasonic motor according to the first aspect, at least one of the first ultrasonic motor and the second ultrasonic motor is an elastic body. And a piezoelectric element that generates a first bending vibration wave and a second bending vibration wave out of phase with the first bending vibration wave on the elastic body. An elliptical vibration is generated in the elastic body by the second bending vibration wave, and a frictional force is applied to the moving body based on the elliptical vibration.

In the above means, when only the first piezoelectric actuator or the ultrasonic motor is provided with an elastic body, or when only the second piezoelectric actuator or the ultrasonic motor is provided with an elastic body, the first piezoelectric actuator or the ultrasonic motor is provided with the first piezoelectric actuator. Both cases where the actuator or the ultrasonic motor and the second piezoelectric actuator or the ultrasonic motor are provided with an elastic body or the like are included.

According to this, the ultrasonic motor generates the first bending vibration wave and the second bending vibration wave in the elastic body by the piezoelectric element, and the first bending vibration wave and the second bending vibration wave. Then, an elliptical vibration is generated, and a frictional force is applied to the moving body based on the elliptical vibration to move the moving body in a predetermined direction.

According to a sixth aspect of the present invention, in the stage using the piezoelectric actuator according to the first aspect, at least one of the first piezoelectric actuator and the second piezoelectric actuator generates a stretching vibration wave. A first piezoelectric vibrator to be bent and a second piezoelectric vibrator joined to the first piezoelectric vibrator to generate a bending vibration wave, wherein an elliptical vibration is generated by the expansion and contraction vibration wave and the bending vibration wave. And generating a frictional force on the moving body based on the elliptical vibration.

In the above means, when only the first piezoelectric actuator is provided with the first piezoelectric vibrator, etc., when only the second piezoelectric actuator is provided with the first piezoelectric vibrator, etc., the first piezoelectric actuator is provided. Both cases where the actuator and the second piezoelectric actuator include the first piezoelectric vibrator and the like are included.

According to this, the piezoelectric actuator generates an elliptical vibration by the stretching vibration wave generated by the first piezoelectric vibrator and the bending vibration wave generated by the second piezoelectric vibrator. The frictional force is applied to the moving body based on the above.

According to a seventh aspect of the present invention, in the stage using the ultrasonic motor according to the third aspect, the first bending vibration wave or the second bending vibration wave is applied to the elastic body. To produce only one or the first
Characterized in that both the bending vibration wave and the second bending vibration wave are temporally generated in the same phase.

According to this, a frictional force is not applied to the moving body in the moving direction, but a force is applied only in a direction perpendicular to the moving direction, and the moving body comes to a standstill at that position. Then, the moving body is moved in the moving direction by another driving method or manually.

According to a ninth aspect of the present invention, in the stage using the ultrasonic motor according to the sixth aspect, only the stretching vibration wave is generated by the first piezoelectric vibrator.

According to this, only the stretching vibration wave is generated by the first piezoelectric vibrator, and a frictional force is not applied to the moving body in the moving direction, but a force is applied only in a direction perpendicular to the moving direction. The body becomes static at that location. Then, the moving body is moved in the moving direction by another driving method or manually.

According to a tenth aspect of the present invention, in the stage using the ultrasonic motor according to the first aspect,
An optical axis correcting lens for correcting an optical axis error of light is provided on the second moving body. According to this, the optical axis correction lens is moved together with the moving body to correct the optical axis error of light.

According to an eleventh aspect of the present invention, there is provided a printing apparatus, comprising: a stage using the ultrasonic motor according to the seventh aspect, wherein an optical axis error of laser light is corrected. Here, the printing device includes a laser printer and a laser copy. According to this, the optical axis correction lens is moved together with the moving body of the printing apparatus, and the optical axis error of the laser light is corrected.

According to a twelfth aspect of the present invention, there is provided an electronic apparatus, wherein a stage using the ultrasonic motor according to any one of the first to tenth aspects is used. Here, the electronic device includes a measuring device, a processing device, a magnetic recording device and the like, and the stage is used for a moving stage of the measuring device, a moving stage of a workpiece of the processing device, a movement of a magnetic recording medium, and the like. According to this, an electronic device using a stage using a piezoelectric actuator or an ultrasonic motor is realized.

[0025]

DETAILED DESCRIPTION OF THE PREFERRED EMBODIMENTS An embodiment to which the present invention is applied will be described below in detail with reference to FIGS. Embodiment 1 FIG. 1 is a diagram showing a stage using a piezoelectric actuator according to Embodiment 1 of the present invention. FIG. 2 shows a piezoelectric vibrator of a piezoelectric actuator,
(A) shows the perspective structure of the piezoelectric vibrator, (b) shows the planar structure of the first piezoelectric vibrator, and (c) and (d) show the structure of the second piezoelectric vibrator. FIG. 3 shows a modification of the piezoelectric vibrator,
(A) shows a perspective structure of the piezoelectric vibrator, and (b) shows a planar structure of the piezoelectric vibrator. 4 and 5 show examples of circuit connection of the piezoelectric actuator. The stage, as shown in Figure 1,
A support 1, a first moving body 2 placed on the support 1,
A second moving body 3 placed on the first moving body 2 and a first piezoelectric actuator 4 in contact with a side surface of the first moving body 2
A first elastic member 5 in pressure contact with the first piezoelectric actuator 4, a second piezoelectric actuator 6 in contact with the side surface of the second moving body 3, and a second piezoelectric actuator 6.
And a second elastic member 7 pressed against the second elastic member 7.

Here, the support base 1 is provided with two guide rails 1a, 1a for guiding the first moving body 2 in the X direction in the figure at the center of the upper surface of the rectangular body, and a part of the outer edge is provided with a second guide rail 1a. An installation groove 1b for installing one ultrasonic motor 4 is provided. The first moving body 2 has two guide grooves 2a, 2a corresponding to the guide rails 1a, 1a of the support base 1 on the lower surface of the rectangular body.
Is provided on the upper surface of the rectangular body.
Guide rails 2b, 2b for guiding the second moving body 3 in the direction
Is provided. An installation groove 2c for installing the second ultrasonic motor 6 is provided in a part of the outer edge. The second moving body 3 has two guide grooves 3a, 3a provided on the lower surface of the rectangular body corresponding to the guide rails 2b, 2b of the first moving body 2.

The piezoelectric actuator 4 includes a piezoelectric vibrator 4
1, an output take-out member 42 provided at the longitudinal end of the piezoelectric vibrator 41, and a support member 43 that supports a node of a later-described stretching vibration wave A of the piezoelectric vibrator 41. For details,
As shown in FIG. 2A, the piezoelectric vibrator 41 has a rectangular first piezoelectric vibrator 44 and a second piezoelectric vibrator 45 joined to each other. The first piezoelectric vibrator 44 is made of, for example, barium titanate, lead zirconate titanate, or the like, as shown in FIG. Also, over the whole area,
An electric field is applied by applying an electric field in which the stacking surface is negative and the surface facing the stacking surface is positive, and a driving electrode 46 is formed on the surface facing the stacking surface, and a counter electrode is formed on the stacking surface. Then, the first piezoelectric vibrator 44 is excited by applying a drive signal to the electrodes on both surfaces, and generates a stretching vibration wave A shown by a thick line in FIG.

As shown in FIG. 3C, the second piezoelectric element 45 is divided into four parts by connecting the midpoints of the opposing sides to form a first polarization part 45a, a second polarization part 45b, and a third polarization part 45b. Polarizing part 45
c, the fourth polarization part 45d, and all the polarization parts are subjected to polarization processing by applying an electric field in which the lamination surface is negative and the surface facing the lamination surface is positive. Further, each polarization part 45a, 45
The first drive electrode 47a, the second drive electrode 47b, the third drive electrode 47c, and the fourth drive made of, for example, gold or copper are formed on the surface facing the stacked surface of b, 45c, and 45d by, for example, vapor deposition. An electrode 47d is formed, and each polarized portion 45a, 45b, 45
A counter electrode is formed on the laminated surface of c and 45d. The first drive electrode 47a and the second drive electrode 47b are connected by a conductive pattern or a lead wire, and the third drive electrode 47c and the fourth drive electrode 47c are connected to the fourth drive electrode 47b.
Is connected to the drive electrode 47d by a conductive pattern or a lead wire.

When, for example, a drive signal is input to one of the first and second obliquely polarized portions 45a and 45b, each of the polarized portions 45a and 45b excites, and the second piezoelectric vibration The child 45 generates a stretching vibration wave B1 indicated by a solid line in the figure as a whole. On the other hand, the third polarized portion 45c and the fourth
When the drive signal is input to the polarization section 45d, the second piezoelectric vibrator 45 causes the bending vibration wave B1 to move as shown in FIG.
And a bending vibration wave B2 having a phase difference of 180 ° is generated.

As shown in FIG. 3, the second piezoelectric vibrator 45 may be used alone as a piezoelectric vibrator. This is because the excitation of the second piezoelectric vibrator 45 generates a bending vibration wave B1 and also generates a stretching vibration wave. Therefore, the piezoelectric vibrator may be constituted only by the second piezoelectric vibrator 45, or the piezoelectric vibrators 44 and 45 may be stacked to increase the output. Further, the vibrator may be formed by joining with an elastic member such as a metal.

FIGS. 4 and 5 are diagrams showing circuit connections of the ultrasonic motor. For example, as shown in FIG.
6 is connected to an output terminal, a drive signal generation source 48 that has generated a drive signal, and one end is connected to the other output terminal of the drive signal generation source 48, and the second drive electrode 47b or the fourth drive electrode 47 is connected.
It comprises a switch 49 for switching to d. Then, the drive signal generation source 48 generates a drive signal. The drive signal is input to the drive electrode 46 of the first piezoelectric vibrating body 44 and is switched to the second drive electrode 47b by the switch 49, so that the second It is input to the second drive electrode 47b of the piezoelectric vibrator 45. In addition, as shown in FIG. 5, the switch 49 switches to the fourth drive electrode 47d, and a drive signal is input to the fourth drive electrode 47d. The drive signal source 48
Instead of generating the drive signal by using the above, a drive signal may be generated by configuring a self-excited oscillation circuit.

The output take-out member 42 takes out the displacement at the time of the transfer, enlarges the elliptical vibration synthesized by the stretching vibration wave A and the bending vibration wave B1, and increases the frictional force with the first moving body 2. The support member 43 supports the piezoelectric vibrator 41 at the node of the bending vibration wave B1, and enters the installation groove 1b of the support base 1 and slides in the Y direction.

The second piezoelectric actuator 6, like the first piezoelectric actuator 4, comprises a piezoelectric vibrator 61, an output take-out member 62, and a support member 63. The above-described piezoelectric vibrator 41, output take-out member 42, and support Member 43
This is the same configuration as. In addition, it enters into the installation groove 2c and X
Slide in the direction.

The first elastic member 5 and the second elastic member 7 are, for example, leaf springs. Then, the first elastic member 5 is provided on the first moving body 2 with the first piezoelectric actuator 4.
, And the second elastic member 7 applies the second
Is pressed. Thereby, the first
A suitable frictional force is applied to the moving body 2 and the second moving body 3,
The first moving body 2 and the second moving body 3 are moved at an appropriate speed.

According to the above construction, each of the piezoelectric actuators 4, 6 is brought into contact with each of the moving bodies 2, 3 to directly apply a frictional force. There is no need to provide a driving force transmission mechanism between the driving force and the driving force. Also, there is no backlash or error due to the installation of the driving force transmission mechanism. In addition, since no magnetic components such as electromagnets are used, no electromagnetic noise is generated.

Next, a method of using a stage using an ultrasonic motor will be described with reference to FIGS. In FIG. 4, when a switch (not shown) of a stage is turned on, a drive signal generation source 48 generates a drive signal in an ultrasonic range, and one of the drive signals is supplied to the first piezoelectric vibrator 4.
4 and the other drive signal is input to the second drive electrode 47b by switching the switch 49.

The polarization portion 44a of the first piezoelectric vibrator 44
When the second piezoelectric vibrator 4 is excited,
The first polarization part 45a and the second polarization part 45b are excited to generate a bending vibration wave B1. Then, the piezoelectric vibrator 41 generates an elliptical vibration C1 in the clockwise direction shown in the figure by combining the stretching vibration wave A and the bending vibration wave B1. This elliptical vibration C1 is expanded by the output extraction member 42,
The frictional force is applied by periodically contacting the first moving body 2. At this time, the first elastic member 5 presses the first piezoelectric actuator 4 against the first moving body 2 and outputs the output take-out member 42.
A suitable frictional force is generated between the first moving body 2 and the first moving body 2.
Then, the first moving body 2 moves the guide rail 1 at an appropriate speed.
a, is moved in the X direction by being guided by the first moving body 2
The upper second moving body 3 moves in the X direction together with the first moving body 2.

As shown in FIG. 5, when the first moving body 2 is moved in the direction opposite to the X direction, the drive signal source 48 and the fourth drive electrode 4 are switched by switching the switch 49.
7d may be connected. At this time, the third polarization part 45c and the fourth polarization part 45d of the second piezoelectric vibrator 45
When the second piezoelectric vibrator 45 is excited and the bending vibration wave B1 is 1
A bending vibration wave B2 having a phase difference of 80 ° is generated, and the piezoelectric vibrator 41 generates an elliptical vibration C2 in the first moving body 2 in the first moving body 2 in the counterclockwise direction. This elliptical vibration C2 is expanded by the output take-out member 42, and the first moving body 2
In the direction opposite to the X direction.

On the other hand, the second piezoelectric actuator 6 is
The second moving body 3 is moved in the Y direction and the opposite direction by the same operation as the piezoelectric actuator 4 described above. From the above,
The second moving body 3 freely moves on the XY plane.

For example, the first mobile unit 2 is manually moved to X
When the user wants to move in the direction, the switch 49 is set to a neutral state, and only the first piezoelectric vibrator 44 of the first ultrasonic motor 4 generates the stretching vibration wave A. At this time, the piezoelectric vibrator 41 vibrates in the longitudinal direction, and the output take-out member 42
Only applies a force to the first moving body 2 in a direction perpendicular to the X direction, does not apply a frictional force to the first moving body 2 in the X direction, and the first moving body 2 is in a floating state. And the friction coefficient apparently decreases. Therefore, the first moving body 2 can be pushed and moved in the X direction or the opposite direction by hand. Here, even if a drive signal is applied to all four polarized portions of the piezoelectric vibrator 45, a stretching vibration wave A is generated and the same effect can be obtained.

Finally, when the use of the stage is ended, the switch of the stage may be turned off. At this time, the drive signal generation source 48 stops generating the drive signal, and the output extraction members 42 and 62 of the ultrasonic motors 4 and 6
Vibration naturally attenuates and stops, and does not stop at a specific position due to magnetic force or the like.

As described above, according to the present embodiment, the ultrasonic motors 4 and 6 are brought into contact with the moving bodies 2 and 3 so as to directly apply a frictional force. Since it is not necessary to provide a driving force transmission mechanism between the sonic motors 4 and 6, the apparatus configuration is simple and small, and
There is no backlash or error associated with the installation of the driving force transmission mechanism. When the input of the drive signal is stopped, the ultrasonic motors 4 and 6 stop at a position where the vibration is naturally attenuated, and do not stop at a specific position due to a magnetic force or the like.
Positioning accuracy is improved.

Also, since no electromagnetic noise is generated without using magnetic parts such as electromagnets, it can be used even in an environment where magnetization is avoided. In addition, since an appropriate frictional force is generated between each of the ultrasonic motors 4 and 6 and each of the moving bodies 2 and 3 by applying pressure by each of the pressing members 5 and 7, Move 3 at an appropriate speed.
Further, the stretching vibration wave A by the first piezoelectric vibrator 44 and the second
Elliptical vibration C1 is generated in the piezoelectric vibrators 41 and 61 by the bending vibration wave B1 by the piezoelectric vibrator 45 of FIG.
Each moving body 2, by the output take-out members 42, 62
3 is moved in the X and Y directions.
Of the moving body 3 moves freely on the XY plane.

Second Embodiment FIG. 6 shows a perspective structure of a stage using ultrasonic waves according to a second embodiment of the present invention. FIG. 7 shows a structure in which a part of the ultrasonic motor is broken. The stage includes a support 11, a first movable body 12 placed on the upper surface of the support 11, a second movable body 13 placed on the upper surface of the first movable body 12, and a first movable body 12. A first ultrasonic motor 14 in contact with the first ultrasonic motor 14, a first elastic member 15 as a first pressurizing mechanism of the present invention provided on the back surface of the first ultrasonic motor 14, and a second moving body The second ultrasonic motor 16 is in contact with the second ultrasonic motor 16, and the second elastic member 17 is provided on the back surface of the second ultrasonic motor 16 as a second pressing mechanism of the present invention.

Here, the support base 11 guides the first moving body 12 along the X direction in the figure at the center of the upper surface of the rectangular body.
An installation groove 1 for installing two guide rails 11a, 11a and installing the first ultrasonic motor 14 at a part of the outer edge.
1b, a window 11c is provided between the guide rails 11a, 11a.
Is provided.

The first moving body 12 is provided with two guide grooves 12b, 12b corresponding to the guide rails 11a, 11a of the support base 11 on the lower surface of the rectangular body. Guide rails 12b, 12b for guiding the second moving body 13 along the Y direction orthogonal to the direction are provided. An installation groove 12c for installing the second ultrasonic motor 16 is provided in a part of the outer edge, and a window 12d is provided between the guide rails 12a. The second moving body 13 is provided on the lower surface of the rectangular body with the guide rails 12b, 12b of the first moving body 12.
Two guide grooves 13a, 13a are provided corresponding to b, and an optical axis correction lens 131 is provided on the upper part. The optical axis correction lens 131 refracts the incident light to correct an optical axis error of the light.

As shown in FIG. 7, the first ultrasonic motor 14 includes a plate 141, a central shaft 142 provided at the center of the plate 141, and an elastic body 1 fixed to the central shaft 142.
43 and a piezoelectric element 144 joined to the lower surface of the elastic body 143
A rotor 145 abutting on a protrusion 143 a provided on the elastic body 143, and a bearing 1 provided at the center of the rotor 145.
46, a spring 147 pressed against the upper surface of the bearing 146, a screw 148 for holding the spring 147,
It comprises a lead wire 149 connected to the piezoelectric element 144.

More specifically, the elastic body 143 has a projection 143a provided on the upper surface of the disk, and is made of an aluminum alloy, brass or the like. The piezoelectric element 144 is made of, for example, barium titanate, lead titanate, lithium niobate, lithium tantalate, or the like, and is formed in a substantially disk shape corresponding to the elastic body 143. This disk body is divided into 12 fan-shaped parts having a width corresponding to a quarter wavelength when, for example, three wavelength bending vibration waves are generated in the circumferential direction.
A first polarized portion and a second polarized portion are provided as a pair of polarized portions. Each polarized portion is polarized so as to be alternately opposite in the thickness direction. Then, the first polarization portion is excited, and the elastic body 143 is moved in the circumferential direction by the first wavelength for three wavelengths.
To generate a bending vibration wave of
A second bending vibration wave having a phase shifted by 90 ° from the first bending vibration wave is generated. A traveling wave is generated in the elastic body 143 by the first bending vibration wave and the second bending vibration wave. The rotor 145 is formed of a substantially cylindrical body, and has a side surface of the first moving body 1.
2

The second ultrasonic motor 16 has the same configuration as the ultrasonic motor 14, and the first elastic member 15 and the second elastic member 17 are the same as the first elastic member 5 of the first embodiment. , The second elastic member 7.

Next, a second embodiment will be described with reference to FIGS.
A method of using a stage using an ultrasonic motor according to the present invention will be described. The first polarization part of the piezoelectric element 144 and the second polarization part
A driving signal having a phase shift of 90 ° is supplied to each of the polarized portions via a lead wire 149. The first polarized portion and the second polarized portion are excited to cause the elastic body 143 to generate a first bending vibration wave and a second bending vibration wave having a phase shifted by 90 ° from the first bending vibration wave. The first bending vibration wave and the second bending vibration wave generate a traveling wave in the elastic body 143 and cause the protrusion 143a of the elastic body 143 to perform elliptical vibration. On the other hand, the spring 147 presses the upper surface of the bearing 146, and the rotor 145 integral with the bearing 146 is pressed against the projection 143 a of the elastic body 143. At this time, the protrusion 143a of the elastic body 143 that is elliptically vibrating applies a frictional force to the rotor 145 in the circumferential direction, and rotates the rotor 145 in a predetermined direction.

On the other hand, the first elastic member 15
Press 41 on the side of the first moving body 12
Press the sides of At this time, a frictional force in the X direction is generated between the side surface of the rotor 145 and the side surface of the first moving body 12, and the first moving body 12 is guided by the guide rails 11a and 11a and moves in the X direction. I do. Further, the second ultrasonic motor 16 moves the second moving body 13 in the Y direction by the same operation.
To move. Thereby, the second mobile unit 13 is moved to the XY
Move freely on a flat surface.

Here, when light enters the optical axis correction lens 131, the optical axis correction lens 131
And refracts the incident light to correct the optical axis error. The corrected light exits through the windows 11c and 12d.

For example, when it is desired to manually move the first moving body 12 in the X direction, the first ultrasonic motor 14
Of the elastic body 14 by exciting only the first polarized portion, for example.
3 only needs to generate the first bending vibration wave. At this time, the protrusion 143a of the elastic body 143 only vibrates in the thickness direction of the elastic body 143 and does not apply a frictional force in the rotational direction to the rotor 145. , Becomes indeterminate with respect to the thickness direction, and the apparent friction coefficient becomes extremely small. Therefore, the first moving body 12 can be moved by manually pushing in the X direction or the opposite direction.

Finally, when the use of the stage is finished, the supply of the drive signal from the lead wire 149 may be stopped. At this time, the rotor 1 of each of the ultrasonic motors 14 and 16
Reference numeral 45 denotes a braking force acting between the projection 45a and the projection 143a of the elastic body 143 to keep the stop at a desired position.

As described above, according to the present embodiment, the first bending vibration wave and the second bending vibration wave are generated in the elastic body 143 by each piezoelectric element 144, and the first bending vibration wave and the second bending vibration wave are generated.
Elliptical vibration of each elastic body 143 by the bending vibration wave of
Each rotor 145 is rotated by applying a frictional force by the projection 143a of each elastic body 143 that vibrates elliptically, and the side surface of each rotor 145 is pressed against the side surface of each of the moving bodies 12 and 13, so that each rotor 145 and each movement are moved. Since a frictional force is generated between the moving body and each moving body in the X direction and the Y direction by the frictional force, the second moving body freely moves on the XY plane.

When the light enters the optical axis correction lens 131, the optical axis correction lens 131 moves with the second moving body 13 to refract the light. Is corrected. Also, by exciting one polarized part,
When one bending vibration wave is generated in the elastic body 143, the protrusion 143a of the elastic body 143 only vibrates in the thickness direction of the elastic body 143, does not apply a frictional force to the rotor 145 in the rotational direction, and the rotor 145 floats. Each mobile 1
2, 13 can be pushed and moved along the guide rails 11a, 12b by hand. It can also be realized by generating two bending standing waves in the same phase in time.

The rotor 145 of each of the ultrasonic motors 14 and 16 is provided with a braking force between the projection 143a of the elastic body 143 and the braking force, which is not affected by the positions of the rotor 145 and the projection 143a. . The present embodiment is not limited to the traveling wave type, but may be applied to a stage using a standing wave type ultrasonic motor. In this case, as the standing wave, two standing waves with phase differences for driving the rotor 145 in the forward and reverse directions can be generated, and when driving, one of the standing waves is generated, and In the case of moving by means of, the same stage as described above can be constituted by generating both standing waves in a dynamic manner.

Third Embodiment FIG. 8 is a diagram showing a main structure of a printing apparatus using a stage using a piezoelectric actuator or an ultrasonic motor according to a third embodiment of the present invention. The main parts of the printing apparatus are laser light generators 21 and 22, and laser light generators 21 and 22.
Moving stages 23 and 24 as a second moving body of the present invention, a half mirror 25 disposed downstream of the moving stages 23 and 24, and a polygon scanner disposed downstream of the half mirror 25. 26, an fθ lens 27 disposed downstream of the polygon scanner 26, and an fθ lens 2
7 comprises detection elements 28a and 28b arranged downstream.

Here, the moving stages 23 and 24 are provided with cylindrical lenses 231 and 241 as optical axis correcting lenses of the present invention at the center, and the laser beams D and E are provided by the optical axis correcting lenses 231 and 241. Adjust the optical axis. Then, the cylindrical lenses 231 and 241 are freely moved on a two-dimensional plane by a piezoelectric actuator or an ultrasonic motor (not shown).

Next, a method of using the printing apparatus will be described. The laser beams D and E emitted from the laser beam generators 21 and 22 are transmitted to cylindrical lenses 231 and 2 respectively.
Pass 41. The laser light D passes through the half mirror 25 and enters the polygon scanner 26, and the laser light E is reflected by the half mirror 25 and enters the polygon scanner 26. The laser beams D and E are reflected by the polygon scanner 26 that rotates at a constant speed, and are incident on the fθ lens 27. The laser beams D and E are linearly spaced in the scanning direction by the fθ lens 27, are incident on a photosensitive drum (not shown), and form a latent image on the photosensitive drum.

On the other hand, for example, when an optical axis error occurs between the optical axis of the laser beam D and the laser beam E, the detecting element 28
a and 28b detect this optical axis error and output this detection signal to a control device (not shown). The control device generates optical axis correction information, and the moving stages 23 and 24 are respectively moved in predetermined directions by a piezoelectric actuator or an ultrasonic motor based on the optical axis correction information.
The cylindrical lenses 231 and 241 move along with the moving stages 23 and 24, adjust the traveling directions of the laser beams D and E, and correct optical axis errors.

As described above, according to the present embodiment, the moving stage 2 provided with the cylindrical lenses 231 and 241
Since the actuators 3 and 24 are moved by the piezoelectric actuator or the ultrasonic motor, the optical axis errors of the laser beams F and G are corrected.

<Embodiment 4> A feature of this embodiment resides in that a stage using a piezoelectric actuator or an ultrasonic motor to which the present invention is applied is used in an electronic device. Here, the electronic device includes, for example, a measuring device and a workpiece (for example,
Wafer) manufacturing apparatus, and a magnetic recording apparatus using a medium. The stage of the present invention is used for a moving stage of a measuring instrument, a moving stage of a workpiece, and a moving medium of magnetic recording. As described above, according to the present embodiment, an electronic device using a stage using a piezoelectric actuator or an ultrasonic motor is realized.

[0064]

As described above, according to the first aspect of the present invention, there is no need to provide a driving force transmission mechanism between the ultrasonic motor and the moving body, and the configuration of the apparatus is simple and small. Also, there is no backlash or error due to the installation of the driving force transmission mechanism, and the ultrasonic motor can be stopped anywhere regardless of the position of the moving body due to friction drive, so the positioning accuracy of the moving body is low. high. Further, since no electromagnetic noise is generated, it can be used in an environment where magnetization is avoided.

According to the second aspect of the present invention, the pressurizing mechanism presses the ultrasonic motor against the moving body to generate an appropriate frictional force between the ultrasonic motor and the moving body. And move the moving body at an appropriate speed. According to the third aspect of the present invention, the first bending vibration wave and the second bending vibration wave are generated in the elastic body by the piezoelectric element, and the first bending vibration wave and the second bending vibration wave are generated. Since the elliptical vibration is generated in the elastic body to apply a frictional force to the moving body, the moving body is moved in the moving direction.

According to the fourth aspect of the present invention, an elliptical vibration is generated by the stretching vibration wave and the bending vibration wave, and a frictional force is applied to the moving body based on the elliptical vibration. According to the fifth and sixth aspects of the present invention, no frictional force is applied to the moving body in the moving direction, and only a force is applied to the moving body in a direction perpendicular to the moving direction, thereby bringing the moving body to a stationary state at that location. Thus, the moving body is moved in the moving direction by another driving method or manually.

According to the seventh aspect of the present invention, the optical axis correction lens is moved together with the moving body to correct an optical axis error of light. According to the eighth aspect of the present invention, the optical axis correction lens is moved together with the moving body of the printing apparatus, and the optical axis error of the laser light is corrected. According to the ninth aspect, an electronic device using a stage using an ultrasonic motor is realized.

[Brief description of the drawings]

FIG. 1 is an explanatory diagram showing a stage using a piezoelectric actuator according to a first embodiment of the present invention.

2A and 2B show a piezoelectric vibrator of the piezoelectric actuator according to FIG. 1, wherein FIG. 2A is a perspective view of the piezoelectric vibrator, and FIG.
(C), (d) is an explanatory view showing a structure of a second piezoelectric vibrator.

3 shows a modification of the piezoelectric vibrator according to FIG. 1,
(A) is an explanatory view showing a perspective structure of the piezoelectric vibrator, and (b) is an explanatory view showing a planar structure of the piezoelectric vibrator.

FIG. 4 is an explanatory diagram showing an example of circuit connection of the piezoelectric actuator according to FIG. 1;

FIG. 5 is an explanatory diagram showing an example of circuit connection of the piezoelectric actuator according to FIG. 1;

FIG. 6 is an explanatory diagram showing a perspective structure of a stage using an ultrasonic motor according to a second embodiment of the present invention.

FIG. 7 is an explanatory view showing a structure in which a part of the ultrasonic motor according to FIG. 6 is broken.

FIG. 8 is an explanatory diagram showing a main structure of a stage printing apparatus using a piezoelectric actuator or an ultrasonic motor according to a third embodiment of the present invention.

[Explanation of symbols]

 DESCRIPTION OF SYMBOLS 1 Support stand 2 1st moving body 3 2nd moving body 4 1st piezoelectric actuator 5 1st elastic member 6 2nd piezoelectric actuator 7 2nd elastic member 11 support base 12 1st moving body 13th 2 moving body 14 1st ultrasonic motor 15 1st elastic member 16 2nd ultrasonic motor 17 2nd elastic member 21,22 laser light generator 23,24 moving stage 25 half mirror 26 polygon scanner 27 fθ Lenses 28a, 28b Detection elements 41, 61 Piezoelectric vibrator 44 First piezoelectric vibrator 45 Second piezoelectric vibrator 131 Optical axis correction lens 143 Elastic body 144 Piezoelectric element 145 Rotor 231 241 Cylindrical lens A Stretching vibration wave B1, B2 Bending vibration wave C1, C2 Bending vibration D Laser light E Laser light

Claims (12)

[Claims] A first movable body movable in one direction;
A second moving body that moves in one direction along with the first moving body and is movable in another direction different from the one direction. A first piezoelectric actuator or an ultrasonic motor that makes contact with the moving body in the one direction, and makes contact with the second moving body to move the moving body in the other direction; A stage comprising: a second piezoelectric actuator or an ultrasonic motor. 2. A first pressing mechanism that presses the first piezoelectric actuator or the ultrasonic motor on the first moving body, and a second pressing mechanism that presses the second piezoelectric actuator or the ultrasonic motor on the second moving body. 2. The stage according to claim 1, further comprising: a second pressurizing mechanism that pressurizes the stage. 3. 3. The motor according to claim 1, wherein at least one of the first ultrasonic motor and the second ultrasonic motor includes an elastic body, a first bending vibration wave in the elastic body, and a phase shift with respect to the bending vibration wave. 2. A stage using an ultrasonic motor according to claim 1, further comprising a piezoelectric element for generating the second bending vibration wave. 4. A stage using an ultrasonic motor according to claim 3, wherein a traveling wave is generated by synthesizing the first bending vibration wave and the second bending vibration wave to drive the moving body. 5. A projection for providing a driving force of the moving body is provided on the elastic body between the antinode and the node of the first bending vibration wave and the second bending vibration wave, and the moving body is provided with one of the bending vibrations. 4. The stage using an ultrasonic motor according to claim 3, wherein the stage is driven by a wave. 6. At least one of the first piezoelectric actuator and the second piezoelectric actuator is connected to a first piezoelectric vibrator for generating a stretching vibration wave, and is connected to the first piezoelectric vibrator for bending vibration. A second piezoelectric vibrator for generating a wave, wherein the expansion and contraction vibration wave and the bending vibration wave generate an elliptical vibration, and a frictional force is applied to the moving body based on the elliptical vibration. Item 4. The stage according to Item 1. 7. The stage using an ultrasonic motor according to claim 4, wherein only one of the first bending vibration wave and the second bending vibration wave is generated in the elastic body. 8. The ultrasonic motor according to claim 4, wherein both the first bending vibration wave and the second bending vibration wave are generated in the elastic body in the same phase with respect to time. Stage. 9. The stage using an ultrasonic motor according to claim 6, wherein only the stretching vibration wave is generated by the first piezoelectric vibrator. 10. The stage using an ultrasonic motor according to claim 1, wherein the second moving body is provided with an optical axis correction lens for correcting an optical axis error of light. 11. A printing apparatus comprising a stage using the piezoelectric actuator or the ultrasonic motor according to claim 10, wherein an optical axis error of laser light is corrected. 12. An electronic device comprising a stage using the piezoelectric actuator or the ultrasonic motor according to claim 1. Description: