JP2013146122A - Drive device, method for driving piezoelectric motor, electronic component transfer device, electronic component inspection device, robot hand, and robot - Google Patents

Abstract

PROBLEM TO BE SOLVED: To provide a drive device that allows a movable member to be manually moved for positioning, and to provide a method for driving a piezoelectric motor, an electronic component transfer device, an electronic component inspection device, a robot hand, and a robot.SOLUTION: A drive device 100 includes a movable member 60, a piezoelectric motor 10, and a driving signal supply section 30. The piezoelectric motor 10 has: a vibrating section 1 that generates longitudinal vibration and bending vibration; and a driven section 5 that is driven by the bending vibration of the vibrating section 1. The piezoelectric motor 10 moves the movable member 60 by the vibrating section 1 driving the driven section 5. The driving signal supply section 30 supplies a driving signal to the vibrating section 1. The drive device 100 can shift from a non-driving state in which a driving signal is not supplied to the vibrating section 1, to a teaching mode in which the vibrating section 1 is made to generate longitudinal vibration.

Description

  The present invention relates to a driving device, a piezoelectric motor driving method, an electronic component transport device, an electronic component inspection device, a robot hand, and a robot.

  2. Description of the Related Art A piezoelectric motor that drives a vibration generated in a vibration part including a piezoelectric element by transmitting the vibration to a driven part with a frictional force is known (for example, see Patent Document 1). In the piezoelectric motor, the vibration part remains in contact with the driven part in the non-driven state where the piezoelectric motor is not driven, so that the position of the driven part is maintained by the frictional force between the vibration part and the driven part. . Since the piezoelectric motor has such a holding force, it does not require a brake mechanism for holding the position of the driven part, unlike an electromagnetic motor or a pulse motor.

JP 11-332265 A

  In the case of an apparatus that drives the piezoelectric motor to move the movable part to a predetermined position, such as an electronic component inspection apparatus or a robot, the position of the movable part is held by the holding force described above when the piezoelectric motor is not driven. The However, in the non-driven state of the piezoelectric motor, if it is desired to manually move the movable part to align it with a predetermined position, there is a problem that it is difficult to perform alignment because of the holding force.

  SUMMARY An advantage of some aspects of the invention is to solve at least a part of the problems described above, and the invention can be implemented as the following forms or application examples.

  Application Example 1 A driving apparatus according to this application example includes a movable part, a vibration part that generates longitudinal vibration and bending vibration, and a driven part that is driven by the bending vibration of the vibration part. A piezoelectric motor that moves the movable part by driving the driven part, and a drive signal supply part that supplies a drive signal to the vibration part, and does not supply the drive signal to the vibration part. It is possible to shift from a driving state to a first state in which the longitudinal vibration is generated in the vibration unit.

  According to this configuration, the driving device can shift from a non-driving state in which a driving signal is not supplied to the vibrating portion of the piezoelectric motor to a first state in which longitudinal vibration is generated in the vibrating portion. In the first state, the vibration part is vibrated longitudinally, whereby contact between the vibration part and the driven part becomes intermittent. For this reason, in the first state, the holding force for holding the position of the driven portion is lower than in the non-driven state, so that the movable portion is easily moved when an external force is applied to the movable portion. As a result, it is possible to provide a drive device that can be easily positioned by manually moving the movable part.

  Application Example 2 In the driving device according to the application example, the drive signal supply unit supplies the drive signal having a first voltage value to the vibration unit in the first state, and The voltage value is preferably lower than a second voltage value that is a voltage value of the drive signal that drives and starts the movement of the driven part in the second state in which the vibration part generates the bending vibration.

  According to this configuration, in the drive device, the first voltage value of the drive signal supplied to the vibration part by the drive signal supply unit when the drive signal is shifted to the first state is the second voltage value that causes the vibration part to generate bending vibration. It is lower than the second voltage value at which the driven part is driven and starts moving in the state. Therefore, even if the driven part is driven and moved when the voltage value of the drive signal is increased in the first state, the voltage value of the drive signal is set to the first voltage value lower than the second voltage value. Thus, the movement of the driven part can be suppressed. Thereby, alignment of a movable part can be performed more reliably.

  Application Example 3 The driving apparatus according to the application example described above, further including a first detection unit that detects an external force applied to the movable unit, and the first detection unit is the movable unit in the non-driven state. It is preferable to shift to the first state when an external force applied to is detected.

  According to this configuration, when the first detection unit detects an external force applied to the movable unit in the non-driving state, the driving device shifts to the first state and decreases the holding force. Therefore, for example, when an operator who performs alignment applies a force to move the movable portion, the movable portion can be manually moved to be switched to a state where the alignment can be performed.

  Application Example 4 The driving apparatus according to the application example described above, further including a second detection unit that detects an external force applied to the driven unit, and in the first state, the second detection unit is When an external force applied to the driven part is detected, it is preferable that the voltage value of the drive signal is higher than the voltage value when the first signal is shifted to the first state.

  According to this configuration, when the second detection unit detects an external force applied to the movable unit in the first state, the drive device sets the voltage value of the drive signal more than when the state transitions to the first state. Increase to decrease retention. Therefore, even with weak force, the movable part can be easily moved for alignment.

  Application Example 5 In the driving apparatus according to the application example described above, a first detection unit that detects an external force applied to the movable unit and a second detection that detects an external force applied to the driven unit. And when the first detection unit detects an external force applied to the movable unit in the non-driven state, the second state shifts to the first state. When the detection unit detects an external force applied to the driven portion, it is preferable that the voltage value of the drive signal is higher than the voltage value when the first state is shifted to.

  According to this configuration, when the first detection unit detects an external force in the non-driving state, the driving device shifts to the first state and decreases the holding force, and the second detection unit in the first state. When the external force is detected, the holding force is further reduced as compared with the case of shifting to the first state. Therefore, the holding force does not need to be reduced in advance, and the holding force can be reduced in two stages by detecting the external force with each of the two detection units. Thereby, the movement of the movable part due to inadvertent contact or erroneous operation can be suppressed, and the movable part can be aligned reliably and easily. In addition, power consumption during standby until the shift to the first state can be suppressed.

  Application Example 6 In the driving device according to the application example described above, when the external state applied to the movable part in the non-driving state is detected, the first state is changed, and the first state is detected. In the case where the voltage value of the driving signal is made higher than the voltage value when the driving signal is shifted to the first state by detecting the external force applied to the driven portion in the non-driving state, By detecting the applied external force, the state shifts to the first state, and in the first state, the external force applied to the driven part is detected, and the voltage value of the drive signal is set to the first state. A switching unit that switches to one of a case where the voltage value is higher than the voltage value at the time of transition to the state and a case where the external force applied to the movable portion and the external force applied to the driven portion are not detected. Is preferred.

  According to this configuration, the external force is detected by one of the two detection units and the holding force is reduced in one step, and the external force is detected by both the two detection units and the holding force is reduced in two steps. The case where the external force is not detected by either of the two detection units can be switched. Therefore, the alignment work can be appropriately performed corresponding to various situations by appropriately switching according to the configuration of the movable part, the purpose and contents of the alignment work. Further, when the alignment operation is not performed, it is possible to prevent the shift to the first state even when an external force is applied.

  Application Example 7 A driving method of a piezoelectric motor according to this application example includes a movable part, a vibration part that generates longitudinal vibration and bending vibration, and a driven part that is driven by the bending vibration of the vibration part. A vibration motor that drives the driven part to move the movable part; a drive signal supply part that supplies a drive signal to the vibration part; and an external force applied to the movable part. A piezoelectric motor driving method comprising: a first detection unit, wherein the first detection unit detects an external force applied to the movable unit in a non-driving state in which the drive signal is not supplied to the vibration unit. In this case, a transition is made to a first state in which the vibration unit generates the longitudinal vibration.

  According to this method, in addition to the state in which the bending part is generated in the vibration part of the piezoelectric motor to drive the driven part and the movable part is moved, the transition to the first state in which the vibration part generates longitudinal vibration is performed. Can do. In the first state, the vibration part is vibrated longitudinally, whereby contact between the vibration part and the driven part becomes intermittent. For this reason, in the first state, the holding force for holding the position of the driven portion is lower than in the non-driven state, so that the movable portion is easily moved when an external force is applied to the movable portion. Thereby, the drive method of the piezoelectric motor which can move a movable part manually and can perform alignment easily can be provided. In addition, since the first detection unit detects an external force applied to the movable part, the first state is shifted, so that, for example, an operator who performs positioning applies a force to move the movable part, It is possible to switch to a state where the movable part can be manually moved and aligned.

  Application Example 8 An electronic component transport apparatus according to this application example is an electronic component transport apparatus that moves an electronic component to a predetermined position, and includes a movable unit that can hold and move the electronic component, longitudinal vibration, and A piezoelectric motor that has a vibration part that generates bending vibration and a driven part that is driven by the bending vibration of the vibration part, and the vibration part moves the movable part by driving the driven part; A drive signal supply unit that supplies a drive signal to the vibration unit, and shifts from a non-drive state in which the drive signal is not supplied to the vibration unit to a first state in which the vibration unit generates the longitudinal vibration It is possible to do this.

  According to this configuration, the electronic component transport device includes the piezoelectric motor capable of performing the alignment by manually moving the movable portion. Therefore, it is possible to provide an electronic component transport apparatus that can manually move the movable portion that holds the electronic component and align it with a predetermined position.

  Application Example 9 An electronic component inspection apparatus according to this application example is an electronic component inspection apparatus that performs electrical inspection of the electronic component by moving the electronic component to a predetermined position and inspects the electronic component. An inspection unit that is movable, a movable unit that is movable while holding the electronic component, a vibration unit that generates longitudinal vibration and bending vibration, and a driven unit that is driven by the bending vibration of the vibration unit, A piezoelectric motor includes a piezoelectric motor that moves the movable part by driving the driven part, and a drive signal supply part that supplies a drive signal to the vibration part, and the drive signal is not supplied to the vibration part. It is possible to shift from a non-driving state to a first state in which the longitudinal vibration is generated in the vibrating portion.

  According to this configuration, the electronic component inspection apparatus includes the piezoelectric motor that can be easily positioned by manually moving the movable part. Therefore, it is possible to provide an electronic component inspection apparatus capable of manually moving the movable part holding the electronic component and aligning it with a predetermined position for performing an electrical inspection of the electronic component.

  Application Example 10 A robot hand according to this application example includes a movable part, a vibration part that generates longitudinal vibration and bending vibration, and a driven part that is driven by the bending vibration of the vibration part, and the vibration A piezoelectric motor that moves the movable part by driving the driven part, and a drive signal supply part that supplies a drive signal to the vibration part, and does not supply the drive signal to the vibration part. It is possible to shift from a driving state to a first state in which the longitudinal vibration is generated in the vibration unit.

  According to this configuration, the robot hand includes the piezoelectric motor that can move the movable portion manually to perform alignment. Therefore, it is possible to provide a robot hand that can be moved to a predetermined position by manually moving the movable part.

  Application Example 11 A robot according to this application example includes a movable part, a vibration part that generates longitudinal vibration and bending vibration, and a driven part that is driven by the bending vibration of the vibration part, and the vibration part Comprises a piezoelectric motor that moves the movable part by driving the driven part, and a drive signal supply part that supplies a drive signal to the vibration part, and does not supply the drive signal to the vibration part. It is possible to shift from a state to a first state in which the longitudinal vibration is generated in the vibration unit.

  According to this configuration, the robot includes the piezoelectric motor that can be easily aligned by manually moving the movable part. Therefore, it is possible to provide a robot capable of manually moving the movable part and aligning it with a predetermined position.

The schematic diagram which shows schematic structure of the drive device which concerns on 1st Embodiment. The schematic diagram which shows the structure and operation | movement of a piezoelectric motor which concern on 1st Embodiment. The figure which shows typically the relationship between the drive voltage of a piezoelectric motor, rotation speed, and holding power. The block diagram which shows schematic structure of the drive signal supply part which concerns on 1st Embodiment. The block diagram which shows the principal part of the drive signal supply part which concerns on 1st Embodiment. The flowchart which shows the drive method of the piezoelectric motor in teaching work. The block diagram which shows the principal part of the drive signal supply part which concerns on 2nd Embodiment. The schematic diagram which shows the structure and operation | movement of the piezoelectric motor which concerns on 2nd Embodiment. The schematic perspective view which shows the structure of the electronic component conveying apparatus and electronic component inspection apparatus which concern on 3rd Embodiment. The schematic diagram which shows the structure of the robot hand and robot which concern on 4th Embodiment.

  Embodiments of the present invention will be described below with reference to the drawings. In each drawing referred to, in order to show the configuration in an easy-to-understand manner, the dimensional ratio, angle, and the like of each component may be different.

(First embodiment)
<Drive device>
The schematic configuration of the drive device according to the first embodiment will be described with reference to the drawings. FIG. 1 is a schematic diagram illustrating a schematic configuration of the drive device according to the first embodiment.

  As shown in FIG. 1, the drive device 100 according to the first embodiment includes a piezoelectric motor 10, a drive signal supply unit 30 that drives the piezoelectric motor 10, a movable unit 60 that moves by the operation of the piezoelectric motor 10, A force sensor 50 as a first detection unit, an encoder 11 as a second detection unit, and a switch 12 (see FIG. 5) are provided.

  In addition, the driving device 100 according to the first embodiment has, as its operating state, a normal driving mode as a second state in which the piezoelectric motor 10 is driven to move the movable portion 60, and the piezoelectric motor 10 is not driven. And a teaching mode as a first state in which the movable portion 60 is manually moved. The state in which the piezoelectric motor 10 is driven refers to a state in which the driven unit 5 is driven by generating bending vibration in the vibration unit 1 described later.

  In the teaching mode, when the piezoelectric motor 10 is driven in the normal driving mode and the movable unit 60 is moved to a predetermined position, for example, the operator operating the driving device 100 manually moves the movable unit 60 in advance. It is used for an operation of moving and aligning at a predetermined position (hereinafter, this operation is referred to as a teaching operation). The position aligned by the teaching work is stored in the drive signal supply unit 30 as position information such as coordinates, for example.

<Piezoelectric motor>
First, the configuration of the piezoelectric motor 10 according to the first embodiment will be described. FIG. 2 is a schematic diagram illustrating the configuration and operation of the piezoelectric motor according to the first embodiment. Specifically, FIG. 2A is a plan view of the piezoelectric motor, FIG. 2B is a diagram for explaining the vibration behavior of the vibration part of the piezoelectric motor in the normal drive mode, and FIG. 2C is a teaching mode. It is a figure explaining the vibration behavior of the vibration part of the piezoelectric motor in FIG. FIG. 3 is a diagram schematically illustrating the relationship between the driving voltage, the rotation speed, and the holding force of the piezoelectric motor.

  As shown in FIG. 2A, the piezoelectric motor 10 according to the first embodiment includes a vibrating unit 1, a driven unit 5, a holding member 8, a biasing spring 6, and a base 7. I have. The vibration unit 1, the driven unit 5, the holding member 8, and the biasing spring 6 are installed on the base 7. Here, a case where the driven part 5 is a rotor that is rotationally driven will be described as an example.

  In the plan view shown in FIG. 2A, the vibration part 1 has a substantially rectangular shape having a short side 1a and a long side 1b. In the following description, the direction along the short side 1a is referred to as the short direction, and the direction along the long side 1b is referred to as the long direction. The vibration unit 1 is configured by, for example, a piezoelectric element formed in a plate shape, but may be a stacked body in which a piezoelectric element and a vibration plate are stacked.

The piezoelectric element is made of a piezoelectric material exhibiting an electromechanical conversion action, and is formed using, for example, a metal oxide having a perovskite structure represented by a general formula ABO ₃ . Examples of such metal oxides include lead zirconate titanate (Pb (Zr, Ti) O ₃ : PZT), lithium niobate (LiNbO ₃ ), and the like.

  An electrode 3 made of a conductive metal such as Ni, Au, or Ag is provided on the surface of the vibration unit 1. The electrode 3 is divided into approximately four equal parts by a groove portion formed in the central portion in the short direction of the vibrating portion 1 and the central portion in the longitudinal direction. Thus, the electrode 3 is divided into four electrode portions 3a, 3b, 3c, and 3d that are electrically isolated from each other as individual electrodes. A common electrode 9 (see FIG. 5) is provided on the surface on the opposite side of the vibration unit 1.

  Of the four electrode portions of the electrode 3, the electrode portions 3a and 3d that are arranged diagonally to each other and form a pair function as first bending vibration electrodes. Further, the electrode portions 3b and 3c that are arranged to form a diagonal crossing the electrode portions 3a and 3d and function as a pair function as second bending vibration electrodes. The region where the electrode portions 3a and 3d are disposed and the region where the electrode portions 3b and 3c are disposed are bending vibration excitation regions that excite bending vibration bending with respect to the longitudinal direction of the vibration portion 1, respectively.

  When a common signal is supplied from the drive signal supply unit 30 (see FIG. 1) to the common electrode 9, and a drive signal is supplied to the electrode portions 3a and 3d that are the first bending vibration electrodes, the vibration unit 1, the first bending vibration is excited. On the other hand, when a common signal is supplied from the drive signal supply unit 30 to the common electrode 9 and a drive signal is supplied to the electrode portions 3b and 3c that are the second bending vibration electrodes, A second bending vibration having a direction different from that of the first bending vibration is excited.

  The vibration part 1 has a tip part 4 that extends so as to protrude toward the driven part 5 and abuts against a side surface (circumferential surface) of the driven part 5. Moreover, the vibration part 1 has a pair of arm part 1c extended toward the outer side of the transversal direction. The arm portion 1c is provided with a through hole penetrating in the thickness direction, and the arm portion 1c is fixed to the holding member 8 via a screw inserted through the through hole. Thereby, the vibration part 1 is hold | maintained with respect to the holding member 8 in the state in which a bending vibration is possible from the arm part 1c.

  The driven part 5 has a disk shape and is arranged on the side where the tip part 4 of the vibration part 1 is provided. The driven portion 5 is rotatably held around a rod-shaped shaft 5a erected on the base 7 as a rotation center.

  The base 7 has a pair of slide portions 7 a disposed so as to extend along the longitudinal direction on both outer sides of the vibration portion 1 in the short direction. The holding member 8 is supported by the base 7 so as to be slidable along the slide portion 7a.

  A biasing spring 6 is installed between the side of the holding member 8 opposite to the driven portion 5 and the base 7. The urging spring 6 urges the vibrating part 1 toward the driven part 5 via the holding member 8, and the tip part 4 comes into contact with the driven part 5 with a predetermined force by this urging force. The biasing force of the biasing spring 6 is appropriately set so that an appropriate frictional force is generated between the driven portion 5 and the tip portion 4. Thereby, the vibration of the vibration part 1 is efficiently transmitted to the driven part 5 via the tip part 4.

  Next, the operation of the piezoelectric motor 10 will be described. First, the operation in the normal drive mode as the second state will be described. In the normal drive mode, as shown in FIG. 2B, the driven part 5 is driven by generating a bending vibration by exciting either the first bending vibration or the second bending vibration in the vibration part 1. . In FIG. 2B, the vibration state of the vibration part 1 when the first bending vibration is excited is indicated by a broken line, and the vibration state of the vibration part 1 when the second bending vibration is excited is indicated by a two-dot chain line. .

  As shown by a broken line in FIG. 2B, when the first bending vibration is excited in the vibration part 1, the tip part 4 moves so as to draw a clockwise elliptical orbit R1. Thereby, the driven part 5 is rotationally driven in the counterclockwise direction of the arrow shown in FIG. Further, as shown by a two-dot chain line in FIG. 2B, when the second bending vibration is excited in the vibration part 1, the tip part 4 moves so as to draw a counterclockwise elliptical orbit R2. Thereby, the driven part 5 is rotationally driven in the clockwise direction opposite to the arrow shown in FIG.

  In the normal drive mode, when a drive signal is supplied from the drive signal supply unit 30 between the common electrode 9 and the electrode units 3a, 3b, 3c, 3d, the first bending vibration electrodes (electrode units 3a, 3d), Alternatively, one of the second bending vibration electrodes (electrode portions 3b and 3c) is selected. By switching between the case where the first bending vibration electrode is selected and the case where the second bending vibration electrode is selected, the driven portion 5 can be rotated counterclockwise and clockwise.

  By the way, in the state where the voltage (hereinafter referred to as drive voltage) of the drive signal supplied from the drive signal supply unit 30 is zero (0), that is, in the non-drive state where the drive signal is not supplied to the vibration unit 1, the distal end portion 4. Is in contact with the driven part 5, a frictional force acts between the tip part 4 and the driven part 5. Therefore, if a force exceeding the frictional force is not applied to the driven part 5, the driven part 5 is held without moving (rotating) the position. The piezoelectric motor 10 does not require a brake mechanism for holding the position of the driven part 5 unlike the electromagnetic motor or the pulse motor because of the holding force.

  In FIG. 3, the change in the number of rotations of the driven part 5 with the increase in the driving voltage is indicated by a solid line. When bending vibration is generated in the vibration part 1 from the non-driving state and the drive voltage is increased, the elliptical orbit of the tip part 4 increases as the bending vibration increases, and the driven part 5 is driven by the tip part 4. The driving force to be increased is increased. However, as shown by a solid line in FIG. 3, while the drive voltage is lower than the voltage value V3 as the second voltage value, the driven unit 5 does not start rotating.

  The voltage value V3 is a voltage value at which the driven portion 5 starts to rotate when the driving force by the tip portion 4 exceeds the frictional force, and the vibration characteristics of the vibrating portion 1 and between the tip portion 4 and the driven portion 5 are. It depends on the frictional force. When the drive voltage reaches the voltage value V3, the driven unit 5 starts rotating, and the rotational speed of the driven unit 5 increases as the drive voltage increases. The relationship between the driving voltage and the rotational speed is the same in the driving state by the first bending vibration and the driving state by the second bending vibration.

  The drive device 100 can move the movable portion 60 by generating bending vibration in the vibration portion 1 in the normal drive mode and rotating the driven portion 5 with a drive voltage equal to or higher than the voltage value V3. . Note that the relationship between the driving voltage and the rotation speed in the driving device 100 varies depending on the vibration characteristics of the vibration unit 1, the frictional force between the tip portion 4 and the driven portion 5, and the linear relationship as shown in FIG. 3. It may not be.

  Next, the operation of the piezoelectric motor 10 in the teaching mode as the first state will be described. In the teaching mode, as shown in FIG. 2C, longitudinal vibration is generated in the vibration unit 1. In FIG.2 (c), the state which the vibration part 1 is generating the longitudinal vibration is shown with a broken line and a dashed-two dotted line. For the longitudinal vibration, a common signal is supplied from the drive signal supply unit 30 to the common electrode 9, and the first bending vibration electrode (electrode portions 3a and 3d) and the second bending vibration electrode (electrode portions 3b and 3c). This occurs when a drive signal is supplied to both of these.

  When a drive signal is supplied to both the first bending vibration electrode and the second bending vibration electrode, two bending vibrations of the first bending vibration and the second bending vibration having different directions are excited in the vibration unit 1. Is done. Then, the excited first bending vibration and second bending vibration are combined, and longitudinal vibration that expands and contracts along the longitudinal direction is generated in the vibration unit 1. When longitudinal vibration occurs in the vibration part 1, the tip part 4 reciprocates along the longitudinal direction as indicated by an arrow in FIG. Note that the tip 4 may move so that the long axis draws an elliptical orbit along the longitudinal direction.

  When the tip portion 4 reciprocates along the longitudinal direction in this way, the contact between the tip portion 4 and the driven portion 5 becomes intermittent. That is, the state in which the distal end portion 4 is in contact with the driven portion 5 and the state in which the distal end portion 4 is separated from the driven portion 5 are repeated, and the distal end portion 4 does not remain in contact with the driven portion 5. As a result, the holding force is reduced compared to the non-driven state. At this time, if the reciprocating direction of the tip portion 4 is the direction toward the rotation center of the driven portion 5, the driven portion 5 does not rotate even if the drive voltage is increased.

  In FIG. 3, a change in holding force when a longitudinal vibration is generated in the vibration unit 1 to increase the drive voltage is indicated by a broken line. The holding force is a force for holding the driven unit 5 against the external force when the driven unit 5 is moved (rotated) by an external force. The holding force in the non-driven state, that is, the maximum value (Max) of the holding force is determined by the frictional force between the tip portion 4 and the driven portion 5.

  When longitudinal vibration is generated in the vibration unit 1 from the non-driving state and the drive voltage is increased, the holding force does not change while the drive voltage is lower than the voltage value V0, but the longitudinal vibration of the vibration unit 1 increases. When the driving voltage reaches the voltage value V0 at which the tip portion 4 starts to reciprocate, it starts to decrease. And since the stroke of the reciprocating motion of the front-end | tip part 4 becomes large with a raise of a drive voltage, holding force continues decreasing until it reaches the minimum value (Min).

  The voltage value V0 is determined by the vibration characteristics of the vibration part 1, the frictional force between the tip part 4 and the driven part 5, and the like, and is smaller than the voltage value V3. Further, the relationship between the driving voltage and the holding force varies depending on the vibration characteristics of the vibrating portion 1 and the frictional force between the tip portion 4 and the driven portion 5, and does not have a linear relationship as shown in FIG. There is.

  In the driving device 100, since the vibration unit 1 generates longitudinal vibration in the teaching mode as described above, the holding force is reduced. Then, by appropriately setting the drive voltage and controlling the holding force of the driven part 5, it is possible to easily move the movable part 60 manually for alignment.

  In the driving device 100, the driven part 5 is not limited to the above-described rotor that is rotationally driven. The driven unit 5 may be a linear driven unit that is linearly driven, and the driving direction of the driven unit 5 can be arbitrarily configured. When the driven portion 5 is a linear driven portion, the driven portion 5 is switched by switching between the first bending vibration electrodes (electrode portions 3a and 3d) and the second bending vibration electrodes (electrode portions 3b and 3c). Can be switched between the forward direction and the reverse direction.

  Further, the driving device 100 may further include a speed increasing / decreasing mechanism that transmits the rotational speed of the driven part 5 to be rotated and increased or decreased. When the speed increasing / decreasing mechanism is provided, the rotational speed of the driven portion 5 can be increased or decreased to easily obtain a desired rotational speed.

  Returning to FIG. 1, the movable portion 60 moves when the driven portion 5 (see FIG. 2A) of the piezoelectric motor 10 is driven. The movable part 60 may be directly fixed to the driven part 5, or may be connected to the driven part 5 via an acceleration / deceleration mechanism such as a gear train, a roller, a belt and a pulley, or a transmission mechanism. .

  The force sensor 50 is provided in the movable part 60. The force sensor 50 detects an external force applied to the movable unit 60 and feeds back a signal based on the detected result to the sub-control unit 22 of the drive signal supply unit 30 described later. The force sensor 50 is composed of, for example, a pressure sensor or a strain gauge.

  The encoder 11 is provided at a position close to the driven part 5 of the piezoelectric motor 10. The encoder 11 detects the position of the driven unit 5 and feeds back an encoder signal based on the detected result to the sub-control unit 22. Based on the detection of the position of the driven part 5 by the encoder 11, it is possible to detect that the driven part 5 has been moved (rotated) by an external force, and the rotational state such as the moving amount and the rotational speed. The encoder 11 is composed of, for example, an optical or magnetic rotary encoder such as a photo reflector, a photo interrupter, or an MR sensor.

<Drive signal supply unit>
Next, the configuration of the drive signal supply unit 30 will be described with reference to FIGS. 4 and 5. FIG. 4 is a block diagram illustrating a schematic configuration of the drive signal supply unit according to the first embodiment. FIG. 5 is a block diagram illustrating a main part of the drive signal supply unit according to the first embodiment.

  As shown in FIG. 4, the drive signal supply unit 30 includes a main control unit 21, a sub control unit 22, an oscillator 31, a gain amplifier 32, a PWM unit 33, a digital amplifier 34, a matching circuit 40, It has.

  The main control unit 21 is composed of a CPU (Central Processing Unit). The main control unit 21 is connected to a control device (not shown) that controls the entire system including the drive device 100 via a CAN (Controller Area Network). The main control unit 21 performs overall control of the drive device 100, for example, instructing the sub-control unit 22 with a command value of the drive voltage.

  The sub-control unit 22 is configured by a logic IC, an FPGA (Field Programmable Gate Array), or the like. The sub-control unit 22 is connected to the main control unit 21 via an SPI (Serial Peripheral Interface). The sub control unit 22 controls the frequency of the signal generated by the oscillator 31, the output (amplification factor) of the gain amplifier 32, switching of the switch 12 (see FIG. 5), and the like based on the instruction from the main control unit 21.

  The sub control unit 22 detects that an external force is applied to the movable unit 60 based on the signal fed back from the force sensor 50. The sub-control unit 22 detects that an external force is applied to the driven unit 5 of the piezoelectric motor 10 based on the encoder signal fed back from the encoder 11. Based on the encoder signal fed back from the encoder 11, the sub-control unit 22 detects that the driven unit 5 has been moved (rotated) by an external force, and the rotation state such as the moving amount and the rotation speed.

  The oscillator 31 is configured by a DDS (Direct Digital Synthesizer) or the like. The oscillator 31 generates a signal that is a source of a drive signal supplied to the vibration unit 1 of the piezoelectric motor 10. The signal generated by the oscillator 31 is converted into an analog signal by a DA converter. Further, the oscillator 31 adjusts the frequency of the drive signal based on an instruction from the sub-control unit 22.

  The gain amplifier 32 is composed of, for example, a digital potentiometer and an operational amplifier. The gain amplifier 32 amplifies the analog signal from the oscillator 31 by digital control. The output level of the gain amplifier 32 is controlled (increased or decreased) based on an instruction from the sub-control unit 22. By increasing or decreasing the output level of the gain amplifier 32, the voltage (drive voltage) of the drive signal changes.

  The PWM unit 33 is configured by a PWM (Pulse Width Modulation) circuit. The PWM unit 33 performs equivalent analog control by changing the duty ratio of the pulse in the input signal from the gain amplifier 32.

  As shown in FIG. 5, the digital amplifier 34 is composed of a MOS transistor H-bridge circuit, and functions as a digital amplifier in combination with the PWM unit 33. The digital amplifier 34 performs switching by amplifying the power of the signal from the PWM unit 33. When there is a “Sleep” instruction (see FIG. 4) from the main control unit 21, the function of amplifying power in the digital amplifier 34 and performing switching is turned off.

  The matching circuit 40 is connected between the digital amplifier 34 and the piezoelectric motor 10. The matching circuit 40 plays a role of matching the impedance of the digital amplifier 34 and the impedance of the piezoelectric motor 10 and boosting the output voltage to the piezoelectric motor 10. The matching circuit 40 is an LC matching circuit composed of inductors 41 and 42 such as coils and a capacitor 43 such as a capacitor.

  The digital amplifier 34 outputs drive signals to the first bending vibration electrodes (electrode portions 3a and 3d) and the second bending vibration electrodes (electrode portions 3b and 3c) of the piezoelectric motor 10 via the matching circuit 40, A common signal is output to the common electrode 9. A switch 12 is connected to the first stage of the first bending vibration electrode and the second bending vibration electrode of the piezoelectric motor 10.

  The switch 12 operates based on an instruction from the sub-control unit 22 (see FIG. 4), and the first bending vibration electrode and the second bending vibration electrode and the digital amplifier 34 are electrically connected via the matching circuit 40. Switch to a disconnected or electrically disconnected state. The switch 12 is composed of a mechanical relay such as an electromagnetic relay or an electronic relay such as a photo moss relay. Note that a manual toggle switch may be used as the switch 12.

  FIG. 5 shows the state of the switch 12 in the teaching mode. In the teaching mode, by connecting both the first bending vibration electrode and the second bending vibration electrode with the digital amplifier 34 by the switch 12, the vibration unit 1 enters a state of generating longitudinal vibration. In the normal drive mode, the switch 12 selects either the first bending vibration electrode or the second bending vibration electrode and connects it to the digital amplifier 34, whereby the vibration unit 1 generates bending vibration. It becomes. Then, by switching the switch 12, the rotation direction of the driven part 5 can be switched between counterclockwise and clockwise.

<Piezoelectric motor drive method>
Next, with reference to FIG. 6, a method for driving the piezoelectric motor when performing the teaching work in the driving device 100 according to the first embodiment will be described. FIG. 6 is a flowchart showing a method of driving the piezoelectric motor in teaching work. As described above, when performing the teaching work, longitudinal vibration is generated in the vibration unit 1 of the piezoelectric motor 10 to enter the teaching mode.

  When starting the teaching work, the sub-control unit 22 sets the drive voltage from the drive signal supply unit 30 to zero (0) and puts the piezoelectric motor 10 in a non-driven state. In this state, since the holding force is the maximum value, for example, even if the operator who performs the teaching work tries to move the movable unit 60 manually, the holding force for holding the position of the driven unit 5 is large. It is difficult to make it. However, the force applied to the movable unit 60 to manually move the movable unit 60 is detected by the force sensor 50.

  As shown in FIG. 6, the driving device 100 stands by in a non-driven state until it is detected that an external force has been applied to the movable portion 60. When the force sensor 50 detects an external force applied to the movable unit 60, the sub-control unit 22 detects that an external force has been applied to the movable unit 60 based on a signal fed back from the force sensor 50 (step S1). .

  When it is detected that an external force is applied to the movable part 60 (step S1: YES), the sub-control part 22 switches the switch 12 to switch both the first bending vibration electrode and the second bending vibration electrode. Connect to digital amplifier 34. Then, the sub control unit 22 sets the drive voltage supplied to the vibration unit 1 to a voltage value V1 that is equal to or higher than the voltage value V0 at which the holding force starts to decrease (step S2). As a result, the driving apparatus 100 shifts to a teaching mode in which the vibration unit 1 generates longitudinal vibration.

  In step S2, the vibration unit 1 generates longitudinal vibration, and the holding voltage of the driven unit 5 is reduced by setting the driving voltage to the voltage value V1, so that the driven unit 5 is easily moved (rotated) by an external force. It becomes possible to make it. That is, it is possible to perform alignment by manually moving the movable part 60. After setting in step S2, the process proceeds to step S3.

  In this embodiment, as shown in FIG. 3, the voltage value V1 of the driving voltage in the teaching mode is equal to or higher than the voltage value V0 at which the holding force starts to decrease, and the driven part 5 rotates in the normal driving mode. The voltage value is lower than the voltage value V3 for starting the operation. The reason why the voltage value V1 is set lower than the voltage value V3 is as follows.

  When the vibration part 1 vibrates longitudinally, the driven part 5 does not rotate if the reciprocating direction of the tip part 4 is directed toward the center of rotation of the driven part 5, but the reciprocating direction of the tip part 4 is When the driving unit 5 is deviated from the direction toward the rotation center, the driven unit 5 may be rotated. Even in such a case, the driven portion 5 can be prevented from rotating due to the reciprocating motion of the tip portion 4 by setting the driving voltage to the voltage value V1 lower than the voltage value V3.

  Next, in step S3 shown in FIG. 6, it is detected whether or not the driven portion 5 has been moved (rotated) by an external force within a predetermined time after the setting of the voltage value of the driving voltage is changed. If the movable part 60 is manually moved after the setting in step S2, the applied force is transmitted through the movable part 60 and the driven part 5 moves (rotates), so that the driven part 5 is driven by the encoder 11. 5 movement (rotation) is detected. Then, based on the encoder signal fed back from the encoder 11, the sub-control unit 22 has applied an external force to the driven unit 5 (the force applied to the movable unit 60 has been transmitted to the driven unit 5). Is detected.

  When it is detected that an external force has been transmitted to the driven unit 5 within a predetermined time after the setting of the voltage value of the driving voltage is changed (step S3: YES), the sub control unit 22 In the state where the vertical vibration is applied, the drive voltage is set to the voltage value V2 and is set higher than the voltage value when the mode is shifted to the teaching mode (step S4). The teaching work is performed in the state of step S4. If a predetermined time has elapsed after setting in step S4, the process returns to step S3.

  As shown in FIG. 3, the voltage value V2 set in step S4 is higher than the voltage value V1 set in step S2 and lower than the voltage value V3. As a result, the holding force of the driven portion 5 is further reduced as compared with the case where the driving voltage is the voltage value V1, so that the movable portion 60 can be easily moved even with a weak force, and can be moved to a predetermined position with higher accuracy. Alignment can be performed. The voltage values V1 and V2 are appropriately set according to the magnitude of the holding force of the piezoelectric motor 10, the value of the voltage value V3, and the like.

  On the other hand, when it is not detected that an external force is transmitted to the driven part 5 within a predetermined time after the setting of the voltage value of the driving voltage is changed (step S3: NO), the process proceeds to step S5. Then, the operation in the teaching mode is finished. In step S5, the drive voltage is set to zero (0) to enter a non-drive state. As a result, the holding force becomes the maximum value, so that the driven portion 5 is held at the position where the alignment is performed. After step S5, the process proceeds to step S6.

  In step S6, it is determined whether or not the teaching work has been completed. When the teaching work is completed, a signal indicating that the teaching work is completed is input to the main control unit 21 based on an instruction from the operator. If the teaching work has not been completed (step S6: NO), the process returns to step S1. When the teaching work is finished (step S6: YES), all the processes are finished.

  As described above, the driving method of the piezoelectric motor in the teaching work has been described. However, the driving device may have only one of the force sensor 50 and the encoder 11. That is, it is also possible to perform only one of the processes of step S2 when an external force is detected by the force sensor 50 or step S4 when an external force is detected by the encoder 11.

  However, when an external force is detected by the force sensor 50, if step S2 is performed to reduce the holding force by one step, if the driving voltage (voltage value V1) in step S2 is low, the holding force is increased and alignment is difficult to perform. there is a possibility.

  Further, when the external force is detected by the encoder 11, when the holding force is reduced by one step by performing step S4, the driven portion 5 must be moved in advance by the external force, so that the teaching work is started. Therefore, it is necessary to set the drive voltage higher than the voltage value V0 and wait in a state where the holding force is reduced. Therefore, there is a possibility that the movable part 60 may be moved by mistake due to careless contact or erroneous operation, or power consumption during standby may be increased.

  On the other hand, in the configuration and the driving method of the driving device of the present embodiment, the external force is detected by both the force sensor 50 and the encoder 11, and the holding force is reduced in two steps, Step S2 and Step S4. . That is, at the start of teaching work, the mobile unit 60 stands by in an undriven state in which it is difficult to move the movable unit 60 with an external force. Is possible. Then, when an external force is continuously applied to the movable part 60, it is determined that the external force applied to the movable part 60 is intentionally applied, not due to inadvertent contact or erroneous operation. The movable unit 60 can be moved more easily. Thereby, it is possible to reliably perform teaching work while suppressing erroneous operations. In addition, power consumption during standby until the mode is changed to the teaching mode can be suppressed.

  As described above, according to the configuration of the driving apparatus 100 according to the first embodiment and the driving method thereof, the following effects can be obtained.

  (1) In the driving device 100, the teaching mode in which the vibration unit 1 generates longitudinal vibration can be shifted from a non-driving state in which no driving signal is supplied to the vibration unit 1 of the piezoelectric motor 10. In the teaching mode, the vibration part 1 is vibrated longitudinally, so that the contact between the vibration part 1 and the driven part 5 becomes intermittent. Therefore, in the teaching mode, the holding force for holding the position of the driven unit 5 is reduced as compared with the non-driving state in which the driving signal is not supplied from the driving signal supply unit 30 to the vibrating unit 1, so that external force is applied to the movable unit 60. When added, the movable part 60 becomes easy to move. Therefore, it is possible to provide the drive device 100 that can be easily aligned by moving the movable part 60 manually.

  (2) In the driving device 100, the voltage value V1 of the drive signal supplied to the vibration unit 1 by the drive signal supply unit 30 in the teaching mode is driven by the driven unit 5 in the normal drive mode in which the vibration unit 1 generates bending vibration. Is lower than the voltage value V3 at which rotation starts. Therefore, even if the driven unit 5 is driven and rotated when the driving voltage is increased in the teaching mode, the driven unit 5 is set to the voltage value V1 lower than the voltage value V3 by setting the voltage value of the driving signal to be lower. Rotation can be suppressed. Thereby, alignment of the movable part 60 can be performed more reliably.

  (3) In the driving device 100, when the force sensor 50 detects an external force applied to the movable portion 60 in the non-driving state, the driving device 100 shifts to the teaching mode and decreases the holding force. Therefore, for example, when an operator who performs the teaching work applies a force to move the movable portion 60, the movable portion 60 can be manually moved and switched to a state where alignment is possible.

  (4) In the driving device 100, when the encoder 11 detects an external force applied to the movable portion 60 in the teaching mode, the voltage value V2 of the driving signal is higher than the voltage value V1 when the teaching mode is selected. Set to lower the holding power. Therefore, even with a weak force, the movable unit 60 can be easily moved for alignment.

  (5) In the driving device 100, when the force sensor 50 detects an external force in the non-driving state, the driving mode is changed to the teaching mode and the holding force is reduced, and when the encoder 11 detects the external force in the teaching mode, the driving mode is changed to the teaching mode. The holding power is further reduced than when the transition is made. Therefore, the holding force need not be reduced in advance, and the holding force can be reduced in two stages by detecting the external force with each of the force sensor 50 and the encoder 11. Thereby, the movement of the movable part 60 due to inadvertent contact or erroneous operation can be suppressed, and the movable part 60 can be positioned reliably and easily. In addition, power consumption during standby until the mode is changed to the teaching mode can be suppressed.

(Second Embodiment)
<Drive device>
Next, a schematic configuration of the drive device according to the second embodiment will be described. The driving device according to the second embodiment is different from the first embodiment in that the electrode of the vibration part of the piezoelectric motor is divided into five electrode parts, but the other configurations are substantially the same. It is. Constituent elements common to the first embodiment are denoted by the same reference numerals and description thereof is omitted.

  FIG. 7 is a block diagram illustrating a main part of a drive signal supply unit according to the second embodiment. FIG. 8 is a schematic diagram illustrating the configuration and operation of the piezoelectric motor according to the second embodiment. Specifically, FIG. 8A is a plan view of the piezoelectric motor, FIG. 8B is a diagram for explaining the vibration behavior of the vibration part of the piezoelectric motor in the normal drive mode, and FIG. 8C is a teaching mode. It is a figure explaining the vibration behavior of the vibration part of the piezoelectric motor in FIG.

  As shown in FIG. 7, the drive device 101 according to the second embodiment includes a piezoelectric motor 10 </ b> A, a drive signal supply unit 30, a switch 12 </ b> A, a movable unit 60 (not shown), a force sensor 50, and an encoder 11. It is equipped with.

<Piezoelectric motor>
As shown in FIG. 8A, the piezoelectric motor 10 </ b> A according to the second embodiment includes a vibrating unit 2, a driven unit 5, a holding member 8, a biasing spring 6, and a base 7. I have.

  The surface of the electrode 3 of the vibration part 2 is divided into five, and an electrode part 3e is provided in addition to the electrode parts 3a, 3b, 3c, 3d. The electrode portion 3e is disposed at the center in the short-side direction between the electrode portions 3a and 3b and the electrode portions 3c and 3d, and the combined area of the electrode portions 3a and 3b (the combined area of the electrode portions 3c and 3d) ) And approximately the same area. The electrode portion 3e functions as a longitudinal vibration electrode. By supplying a drive signal to the electrode portion 3e which is an electrode for longitudinal vibration, longitudinal vibration is excited in the vibration portion 2.

  FIG. 7 shows the state of the switch 12A in the teaching mode. As shown in FIG. 7, in the driving device 101 according to the second embodiment, the driving signal is supplied from the driving signal supply unit 30 only to the longitudinal vibration electrode (electrode unit 3e) in the teaching mode. In the normal drive mode, a drive signal is supplied from the drive signal supply unit 30 to the longitudinal vibration electrode (electrode unit 3e), and the first bending vibration electrode (electrode unit) selected by switching the switch 12A is used. 3a, 3d) or the second bending vibration electrode (electrode portions 3b, 3c) is supplied with a drive signal.

  Next, the operation of the piezoelectric motor 10A will be described. In the normal driving mode, the driving signal is supplied to the longitudinal vibration electrode and one of the first bending vibration electrode and the second bending vibration electrode, so that the vibration portion 2 is subjected to the longitudinal vibration and the first bending. Either one of the vibration and the second bending vibration is excited. Then, the vibration unit 2 generates a bending vibration in which the longitudinal vibration and the bending vibration are combined.

  In FIG. 8B, the vibration state of the vibration part 2 when the longitudinal vibration and the first bending vibration are excited is indicated by a broken line, and the vibration part 2 when the longitudinal vibration and the second bending vibration are excited is shown. The vibration state is indicated by a two-dot chain line. As shown by the broken line in FIG. 8B, when the longitudinal vibration and the first bending vibration are excited in the vibration portion 2, the tip portion 4 moves so as to draw a clockwise elliptical trajectory R1. Thereby, the driven part 5 is rotationally driven in the counterclockwise direction of the arrow shown in FIG.

  Further, as shown by a two-dot chain line in FIG. 8B, when longitudinal vibration and second bending vibration are excited in the vibration portion 2, the tip portion 4 draws an anticlockwise elliptical orbit R2. Move. Thereby, the driven part 5 is rotationally driven in the clockwise direction opposite to the arrow shown in FIG. Therefore, also in the piezoelectric motor 10A according to the second embodiment, the driven unit 5 is rotated counterclockwise by switching between the case of selecting the first bending vibration electrode and the case of selecting the second bending vibration electrode. And it is possible to rotate in both directions clockwise.

  On the other hand, in the teaching mode, only the longitudinal vibration is excited in the vibration unit 2 by supplying the drive signal only to the longitudinal vibration electrode, and therefore, as shown by a broken line and a two-dot chain line in FIG. Then, longitudinal vibration is generated in the vibration part 2. Thereby, also in the piezoelectric motor 10A according to the second embodiment, the tip portion 4 reciprocates along the longitudinal direction as indicated by an arrow in FIG. Accordingly, the driven portion 5 does not rotate, and the holding force can be reduced by setting the drive voltage to a voltage value V0 or more at which the holding force starts to decrease.

  As described above, the drive device 101 according to the second embodiment includes the electrode portion 3e for longitudinal vibration in addition to the electrode portions 3a, 3b, 3c, and 3d for bending vibration in which the electrode of the vibration portion 2 is divided into five. Although the piezoelectric motor 10A is provided, it operates in the same manner as in the first embodiment. In other words, according to the configuration of the driving device 101, the movable portion 60 can be moved by driving the piezoelectric motor 10A in the normal drive mode, and the movable portion 60 can be moved manually in the teaching mode. Therefore, since the driving method of the piezoelectric motor according to the first embodiment can be applied, the same effect as that of the driving device 100 according to the first embodiment can be obtained.

  In the teaching mode, the vibration unit 2 may be configured to generate longitudinal vibration by supplying drive signals to both the longitudinal vibration electrode and the first bending vibration electrode and the second bending vibration electrode. Is possible.

(Third embodiment)
<Electronic component conveying device and electronic component inspection device>
Next, an electronic component transport device and an electronic component inspection device according to a third embodiment will be described. The electronic component transport device and the electronic component inspection device according to the third embodiment include the drive device according to the first embodiment or the second embodiment. Hereinafter, the reference numerals of the components in the drive device according to the first embodiment will be given and described, and the reference numerals of the components in the drive device according to the second embodiment will be omitted.

  FIG. 9 is a schematic perspective view illustrating configurations of an electronic component transport device and an electronic component inspection device according to the third embodiment. The electronic component inspection apparatus 200 shown in FIG. 9 includes an electronic component transport apparatus 230 and an inspection apparatus 240 as an inspection unit. The electronic component conveying device 230 has a function of conveying the electronic component 70 to a predetermined place and positioning the electronic component 70 at a predetermined position. The inspection device 240 has a function of inspecting the electrical characteristics of the electronic component 70.

  The electronic component 70 is, for example, a semiconductor chip mounted on a substrate, but may be a semiconductor chip, a display device such as an LCD, a crystal device, various sensors, an inkjet head, or the like.

  As shown in FIG. 9, the electronic component transport device 230 includes a rectangular parallelepiped base 206. The longitudinal direction of the base 206 is the Y direction, and the direction orthogonal to the Y direction on the horizontal plane is the X direction. The vertical direction is taken as the -Z direction.

  On the base 206, a material supply device 207 is installed on the left side in the drawing. A pair of guide rails 208 a and 208 b extending in the Y direction is provided on the upper surface of the material supply device 207 so as to protrude over the entire width of the material supply device 207 in the Y direction. A stage 209 having a linear motion mechanism is attached to the upper side of the pair of guide rails 208a and 208b.

  The linear motion mechanism of the stage 209 is, for example, a linear motion mechanism including a linear motor extending in the Y direction along the guide rails 208a and 208b. When a drive signal corresponding to a predetermined number of steps is input to the linear motion mechanism, the linear motor moves forward or backward, and the stage 209 moves in the Y direction by an amount corresponding to the number of steps. Move or return. The surface of the stage 209 facing the Z direction is a placement surface 209a, and the electronic component 70 to be inspected is placed on the placement surface 209a. A suction type substrate chuck mechanism is installed on the stage 209. The substrate chuck mechanism fixes the electronic component 70 to the mounting surface 209a.

  An imaging unit 210 is installed on the base 206 on the Y direction side of the material supply device 207. The imaging unit 210 includes an electric circuit board on which a CCD (Charge Coupled Devices) element that converts received light into an electric signal, an objective lens including a zoom mechanism, an epi-illumination device, and an automatic focusing mechanism. Thereby, when the electronic component 70 is located at a location facing the imaging unit 210, the imaging unit 210 can image and position the electronic component 70. The imaging unit 210 can shoot an image without blur by shooting after irradiating the electronic component 70 with light and focusing.

  On the base 206, an inspection table 211 provided in the inspection device 240 is installed on the Y direction side of the imaging unit 210. The inspection table 211 is a jig for transmitting and receiving electrical signals when inspecting the electronic component 70. The inspection device 240 includes an inspection table 211, a gripping unit 225, and a control unit (included in the control device 226). A plurality of probes for measuring the electrical characteristics of the electronic component 70 are arranged on the inspection table 211 and the grip portion 225.

  A material removal device 212 is installed on the base 206 on the Y direction side of the inspection table 211. On the upper surface of the material removal device 212, a pair of guide rails 213a and 213b extending in the Y direction are provided so as to protrude over the entire width. A stage 214 having a linear motion mechanism is attached to the upper side of the pair of guide rails 213a and 213b. As the linear motion mechanism of the stage 214, a mechanism similar to the linear motion mechanism provided in the material supply device 207 can be used. The stage 214 moves forward or backward along the guide rails 213a and 213b. The surface of the stage 214 facing the Z direction is a placement surface 214a, and the electronic component 70 that has been inspected is placed on the placement surface 214a.

  A support base 215 having a substantially rectangular parallelepiped shape is installed in the −X direction of the base 206. The support base 215 has a shape that is higher in the Z direction than the base 206. A pair of rails 216 a and 216 b extending in the Y direction is provided on the surface of the support base 215 facing the X direction so as to protrude over the entire width of the support base 215 in the Y direction. On the X direction side of the rails 216a and 216b, a Y stage 217 having a linear motion mechanism that moves along the pair of rails 216a and 216b is attached.

  The linear motion mechanism of the Y stage 217 is configured using the driving device 100 according to the first embodiment or the driving device 101 according to the second embodiment. At least one of the rails 216 a and 216 b corresponds to the driven part 5 of the piezoelectric motor 10. Here, the driven parts 5 (rails 216a and 216b) are linear driven parts that are linearly driven. The vibrating portion 1 (not shown) is provided on the Y stage 217 in contact with at least one of the rails 216a and 216b. When the vibration unit 1 vibrates in the normal driving state, the Y stage 217 moves forward or backward along the rails 216a and 216b relative to the fixed rails 216a and 216b.

  On the surface of the Y stage 217 facing the X direction, a prismatic arm portion 218 extending in the X direction is installed. A pair of rails 219 a and 219 b extending in the X direction is provided on the surface of the arm portion 218 facing the −Y direction so as to protrude over the entire width of the arm portion 218 in the X direction. An X stage 220 having a linear motion mechanism that moves along the rails 219a and 219b is attached to the −Y direction side of the pair of rails 219a and 219b.

  Similar to the linear motion mechanism of the Y stage 217, the linear motion mechanism of the X stage 220 is configured using the drive device 100 according to the first embodiment or the drive device 101 according to the second embodiment. The X stage 220 moves forward along the rails 219a and 219b relative to the rails 219a and 219b, which are the driven parts 5, when the vibration unit 1 provided in the X stage 220 vibrates in the normal driving state. Or return.

  An imaging unit 221 and a Z moving device 222 are installed on the X stage 220. The imaging unit 221 has the same structure and function as the imaging unit 210.

  The Z moving device 222 includes a linear motion mechanism inside, and the linear motion mechanism moves the Z stage up and down. A rotating device 223 is connected to the Z stage. The Z moving device 222 can raise and lower the rotating device 223 in the Z direction. Similarly to the linear motion mechanism of the Y stage 217 and the X stage 220, the linear motion mechanism of the Z moving device 222 uses the drive device 100 according to the first embodiment or the drive device 101 according to the second embodiment. It is configured.

  The rotating device 223 includes a rotating shaft 223a, and a grip portion 225 is connected to the rotating shaft 223a. The gripping unit 225 grips the electronic component 70 to be inspected. The rotating device 223 can rotate the grip portion 225 while gripping the electronic component 70 around the Z direction.

  The rotating device 223 is configured using the driving device 100 according to the first embodiment or the driving device 101 according to the second embodiment, and rotates the rotating shaft 223a to a predetermined angle. Here, the rotational shaft 223 a that is rotationally driven corresponds to the driven portion 5 of the piezoelectric motor 10.

  A movable portion 224 is configured by the Y stage 217, the X stage 220, the Z moving device 222, the rotating device 223, and the like. Each of the Y stage 217, the X stage 220, the Z moving device 222, and the rotating device 223 includes the force sensor 50 of the driving device 100 according to the first embodiment or the driving device 101 according to the second embodiment. An encoder 11 is provided.

  A control device 226 is installed on the X direction side of the base 206. The control device 226 has a function of controlling the operation of the electronic component inspection apparatus 200 including the inspection device 240 that inspects the electronic component 70. The control device 226 includes the drive device 100 according to the first embodiment or the drive signal supply unit 30 of the drive device 101 according to the second embodiment. The control device 226 includes an input device 226a and an output device 226b.

  The input device 226a is a keyboard, an input connector, or the like, and is a device that inputs an operator instruction in addition to signals and data. The output device 226b is an output connector or the like that outputs to a display device or an external device, and outputs signals and data to other devices. The output device 226b is also a device that transmits the status of the electronic component inspection device 200 to the operator.

  In the electronic component inspection apparatus 200, the electronic component 70 to be inspected is gripped by the grip portion 225, transported from the stage 209 to the inspection table 211 by the movable portion 224 of the electronic component transport device 230, and then inspected. The electrical characteristics are inspected. When the inspection of the electrical characteristics is completed, the electronic component 70 is transported to the stage 214 by the movable unit 224 of the electronic component transport device 230.

  In the electronic component inspection apparatus 200 (electronic component transport apparatus 230) according to the third embodiment, the Y stage 217, the X stage 220, the Z moving apparatus 222, and the rotating apparatus 223 that constitute the movable unit 224 are used in the first embodiment. The drive apparatus 100 which concerns on this, or the drive apparatus 101 which concerns on 2nd Embodiment is provided.

  Therefore, when the drive devices 100 and 101 are driven in the normal drive mode and the movable unit 224 is moved to a predetermined position, the movable unit 224 is manually moved in advance and aligned with the predetermined position. The teaching work for storing the position information (coordinates, etc.) in the control device 226 can be easily and reliably performed while suppressing erroneous operations in the teaching mode.

  The electronic component inspection apparatus 200 may have a configuration in which a part of the components of the electronic component transport apparatus 230 described above is provided on the inspection apparatus 240 side.

(Fourth embodiment)
<Robot>
Next, a robot according to a fourth embodiment will be described. The robot according to the fourth embodiment has a robot hand, and the driving device 100 according to the first embodiment or the driving device according to the second embodiment is used as a driving device for fingers and arms of the robot and the robot hand. A driving device 101 is provided. Hereinafter, the reference numerals of the components in the drive device according to the first embodiment will be given and described, and the reference numerals of the components in the drive device according to the second embodiment will be omitted.

  FIG. 10 is a schematic diagram illustrating the structure of a robot hand and a robot according to the fourth embodiment. Specifically, FIG. 10A is a schematic diagram illustrating a structure of a robot hand included in the robot, and FIG. 10B is a schematic diagram illustrating a structure of the robot.

  As shown in FIG. 10A, the robot hand 300 includes a hand main body portion 301, two finger portions 302 as a movable portion, and a control device 307. The two finger portions 302 are installed on the hand main body portion 301.

  The two finger portions 302 are configured by alternately connecting three joint portions 304 and three finger members 303. The three joint portions 304 are respectively provided with the driving device 100 according to the first embodiment or the piezoelectric motor 10 of the driving device 101 according to the second embodiment.

  A drive signal supply unit 30 is arranged in the control device 307. By driving the piezoelectric motor 10 provided in the joint part 304, the joint part 304 can be rotated to deform (move) the finger part 302 into a desired form like a human finger. .

  As shown in FIG. 10B, the robot 310 includes a robot main body 311, two arm portions 312 as movable portions, and a control device 317. The two arm portions 312 are installed on the robot body portion 311.

  The two arm portions 312 are configured by alternately connecting three joint portions 314 and two arm members 313. Each of the three joint portions 314 is provided with the driving device 100 according to the first embodiment or the piezoelectric motor 10 of the driving device 101 according to the second embodiment. One end of the arm 312 is installed on the robot body 311, and the robot hand 300 is installed on the other end. The robot hand 300 has the same configuration as that shown in FIG.

  In the control device 317, the drive device 100 according to the first embodiment or the drive signal supply unit 30 of the drive device 101 according to the second embodiment is arranged. By driving the piezoelectric motor 10 provided in the joint portion 314, the joint portion 314 can be rotated to deform the arm portion 312 into a desired form like a human arm.

  The robot hand 300 and the robot 310 according to the fourth embodiment are related to the first embodiment as a device that rotates (joins) the finger unit 302 and the arm unit 312 by rotating the joint unit 304 and the joint unit 314. The driving device 100 or the driving device 101 according to the second embodiment is provided.

  Accordingly, when the driving devices 100 and 101 are driven in the normal driving mode to rotate the joint portions 304 and the joint portions 314 to deform the finger portion 302 and the arm portion 312 into a predetermined form, The teaching operation in which the finger unit 302 and the arm unit 312 are manually moved to be transformed into a predetermined form and the position information (coordinates, etc.) is stored in the control devices 307 and 317 can be easily performed in the teaching mode while suppressing erroneous operations. And it can be done reliably.

  The above-described embodiment is merely an aspect of the present invention, and can be arbitrarily modified and applied within the scope of the present invention. A modification will be described below.

(Modification 1)
In the first embodiment and the second embodiment described above, the driving devices 100 and 101 detect the external force with both the force sensor 50 and the encoder 11, and in steps S1, S2, S3, and S4, The holding power is gradually reduced, but the present invention is not limited to this.

  For example, the state in which the external force can be detected by both the force sensor 50 and the encoder 11 and the holding force is reduced in two stages, and the state in which the external force can be detected only by the force sensor 50 and the holding force is reduced in one stage. And a configuration including a switching unit that switches between a state in which the external force can be detected only by the encoder 11 and the holding force is reduced in one stage and a state in which both the force sensor 50 and the encoder 11 do not detect the external force. Good. According to such a configuration, the teaching work can be appropriately performed corresponding to various situations by selecting or switching the above-described state according to the configuration of the movable part, the purpose, content, etc. of the teaching work. In the case where the teaching work is not performed, the teaching mode can be prevented from shifting even if an external force is applied.

(Modification 2)
In the above-described embodiment, the teaching mode is intended for teaching operation of the driving device, but is not limited to this. For example, the teaching mode may be used as a safety mode for preventing a person from being harmed even if a person such as an operator accidentally touches the apparatus.

  In the case of the safety mode, instead of the force sensor 50 and the encoder 11, or in addition to the force sensor 50 and the encoder 11, a sensor capable of detecting human approach, such as a sensor such as an infrared ray or a laser or a sensor for detecting body temperature. It is preferable to provide. If these sensors detect the approach of a person, the holding force of the piezoelectric motor is reduced, so that even if an operator or other person accidentally touches the device, the movable part can move. Therefore, it is possible to prevent the person from being harmed by contact with the movable part.

(Modification 3)
In the above-described embodiment, the digital amplifier 34 is used for the drive signal supply unit 30. However, the present invention is not limited to this, and an analog amplifier may be used for the drive signal supply unit 30. When an analog amplifier is used for the drive signal supply unit 30, the PWM unit 33 and the matching circuit 40 are deleted.

  DESCRIPTION OF SYMBOLS 1,2 ... Vibration part, 5 ... Driven part, 10, 10A ... Piezoelectric motor, 11 ... Encoder as 2nd detection part, 30 ... Drive signal supply part, 50 ... Force sensor as 1st detection part, DESCRIPTION OF SYMBOLS 60 ... Movable part, 70 ... Electronic component, 100, 101 ... Drive apparatus, 200 ... Electronic component inspection apparatus, 224 ... Movable part, 230 ... Electronic component conveyance apparatus, 240 ... Inspection apparatus as an inspection part, 300 ... Robot hand, 302: Finger part as a movable part, 312 ... Arm part as a movable part, 310 ... Robot.

Claims (11)

Moving parts;
A piezoelectric device having a vibration part that generates longitudinal vibration and bending vibration and a driven part that is driven by the bending vibration of the vibration part, and the movable part moves the movable part by driving the driven part. A motor,
A drive signal supply unit for supplying a drive signal to the vibration unit,
A drive device characterized in that it is possible to shift from a non-drive state in which the drive signal is not supplied to the vibration unit to a first state in which the vibration unit generates the longitudinal vibration. The drive device according to claim 1,
The drive signal supply unit supplies the drive signal having a first voltage value to the vibration unit in the first state;
The first voltage value is lower than a second voltage value that is a voltage value of the drive signal that drives and starts the movement of the driven part in the second state in which the bending part generates the flexural vibration. A drive device characterized by that. The drive device according to claim 1 or 2,
A first detection unit for detecting an external force applied to the movable unit;
The drive device according to claim 1, wherein the first detection unit shifts to the first state when the first detection unit detects an external force applied to the movable unit in the non-drive state. The drive device according to claim 1 or 2,
A second detection unit that detects an external force applied to the driven unit;
When the second detection unit detects an external force applied to the driven unit in the first state, the voltage value of the drive signal is higher than the voltage value when the state is shifted to the first state. A drive device characterized by that. The drive device according to claim 1 or 2,
A first detection unit for detecting an external force applied to the movable unit;
A second detection unit that detects an external force applied to the driven unit,
When the first detection unit detects an external force applied to the movable unit in the non-driven state, transition to the first state,
When the second detection unit detects an external force applied to the driven unit in the first state, the voltage value of the drive signal is higher than the voltage value when the state is shifted to the first state. A drive device characterized by that. The drive device according to any one of claims 3 to 5,
A transition to the first state by detecting an external force applied to the movable part in the non-driven state; and
When the external force applied to the driven part in the first state is detected to make the voltage value of the drive signal higher than the voltage value when transitioning to the first state;
By detecting the external force applied to the movable part in the non-driven state, the state is shifted to the first state, and by detecting the external force applied to the driven part in the first state, A case where the voltage value of the drive signal is set to be higher than the voltage value at the time of transition to the first state;
When not detecting the external force applied to the movable part and the external force applied to the driven part;
A drive unit comprising a switching unit for switching to any of the above. Moving parts;
A piezoelectric device having a vibration part that generates longitudinal vibration and bending vibration and a driven part that is driven by the bending vibration of the vibration part, and the movable part moves the movable part by driving the driven part. A motor,
A drive signal supply unit for supplying a drive signal to the vibration unit;
A first detection unit that detects an external force applied to the movable unit, and a driving method of a piezoelectric motor comprising:
When the first detection unit detects an external force applied to the movable unit in a non-driving state in which the drive signal is not supplied to the vibration unit, the vibration unit generates the longitudinal vibration in the first state. A method for driving a piezoelectric motor, characterized in that a transition is made. An electronic component transport apparatus that moves an electronic component to a predetermined position,
A movable part capable of holding and moving the electronic component;
A piezoelectric device having a vibration part that generates longitudinal vibration and bending vibration and a driven part that is driven by the bending vibration of the vibration part, and the movable part moves the movable part by driving the driven part. A motor,
A drive signal supply unit for supplying a drive signal to the vibration unit,
An electronic component conveying apparatus characterized in that it is possible to shift from a non-driving state in which the driving signal is not supplied to the vibrating unit to a first state in which the vibrating unit generates the longitudinal vibration. An electronic component inspection apparatus that moves and arranges an electronic component at a predetermined position and performs an electrical inspection of the electronic component,
An inspection unit for inspecting the electronic component;
A movable part capable of holding and moving the electronic component;
A piezoelectric device having a vibration part that generates longitudinal vibration and bending vibration and a driven part that is driven by the bending vibration of the vibration part, and the movable part moves the movable part by driving the driven part. A motor,
A drive signal supply unit for supplying a drive signal to the vibration unit,
An electronic component inspection apparatus, wherein a transition from a non-driving state in which the driving signal is not supplied to the vibrating portion to a first state in which the vibrating portion generates the longitudinal vibration is possible. Moving parts;
A piezoelectric device having a vibration part that generates longitudinal vibration and bending vibration and a driven part that is driven by the bending vibration of the vibration part, and the movable part moves the movable part by driving the driven part. A motor,
A drive signal supply unit for supplying a drive signal to the vibration unit,
A robot hand that is capable of shifting from a non-driving state in which the driving signal is not supplied to the vibrating unit to a first state in which the vibrating unit generates the longitudinal vibration. Moving parts;
A piezoelectric device having a vibration part that generates longitudinal vibration and bending vibration and a driven part that is driven by the bending vibration of the vibration part, and the movable part moves the movable part by driving the driven part. A motor,
A drive signal supply unit for supplying a drive signal to the vibration unit,
A robot capable of shifting from a non-driving state in which the driving signal is not supplied to the vibrating unit to a first state in which the vibrating unit generates the longitudinal vibration.

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