JPH11235063A - Stage utilizing ultrasonic motor and electronic apparatus and printer employing the stage - Google Patents

Abstract

PROBLEM TO BE SOLVED: To improve the positioning precision of a moving unit, simplify the mechanism, reduce the size of the mechanism and, further, enable application under an environment in which magnetization must be avoided. SOLUTION: A stage utilizing an ultrasonic motor has a movable moving unit 1, a 1st vibrator 2 which is brought into contact with the moving unit 1 and applies friction in one direction to the moving unit 1 by a combined vibration obtained by combining an expansion/contraction vibration and a bending vibration and a 2nd vibrator 3 which is brought into contact with the moving unit 1 and applies friction in the other direction to the moving unit 1 by a combined vibration obtained by combining an expansion/contraction vibration and a bending vibration. The moving unit 1 can be movable in a plane consisting of the one direction and the other direction in accordance with the friction applied by at leas one of the 1st vibrator 2 and the 2nd vibrator 3.

Description

DETAILED DESCRIPTION OF THE INVENTION

[0001]

BACKGROUND OF THE INVENTION 1. Field of the Invention The present invention relates to a stage using an ultrasonic motor movable on a plane, and to an electronic apparatus and a printing apparatus using the stage.

2. Description of the Related Art In recent years, to measure or process a two-dimensional object, an XY stage in which uniaxial tables are vertically overlapped with each other at 90 ° intersection with each other is often used.
Generally, a method of converting the rotation of an electromagnetic motor into linear motion by a feed screw in each of the X and Y axis directions, or
A system in which linear driving is performed by an electromagnetic linear motor in each of the X and Y axis directions is adopted (JSPE-57-10, '
91-10-1726).

[0002]

However, in the case of a system in which a motor and a feed screw are combined, positioning accuracy is reduced due to backlash of the screw portion or thermal expansion of the screw portion. Further, it is necessary to provide the screw portion over the entire desired feed amount, and the mechanism becomes complicated and large. Also,
In the case of an electromagnetic linear motor, the positioning accuracy is limited by the relationship between the poles of the permanent magnet and the coil that generates the magnetic field. That is, the coil tends to stop near the pole of the permanent magnet, and the XY stage is hard to stop at a predetermined position.
Further, it is necessary to provide a coil or a permanent magnet over the entire desired feed amount, and the mechanism is complicated and large. Also,
In the above method, there is a problem that components around the stage are magnetized by electromagnetic noise and cannot be used in an environment where magnetization is avoided.

On the other hand, in the field of micromotors, an ultrasonic motor utilizing the piezoelectric effect of a piezoelectric element has been receiving attention. In particular, an ultrasonic motor using a vibrator (dual-mode vibrator) that performs stretching vibration and bending vibration causes an object to move in a linear motion, a rotational motion, and the like by a combined vibration obtained by combining the two vibrations. It is used for applications (see JP-A-7-184382).

The present invention has been made to solve the above technical problems, and an object of the present invention is to improve the positioning accuracy, to have a simple and compact mechanism and to avoid magnetization. An object of the present invention is to provide a stage using an ultrasonic motor that can be used even in an environment, and an electronic apparatus and a printing apparatus using the same.

[0005]

In order to solve the above-mentioned problems, a means for solving the above-mentioned problems is a stage using an ultrasonic motor, wherein the movable body and the movable body are movable. And a first vibrator that applies a frictional force to the moving body in one direction by a combined vibration obtained by combining the stretching vibration and the bending vibration; A second vibrator that applies a frictional force to the moving body in another direction different from the one direction by synthetic vibration obtained by combining vibrations, wherein the first vibrator or the second vibrator is provided. Wherein the movable body is movable on a plane composed of one direction and another direction based on a frictional force applied by at least one of the two.

[0006] In the above solution, the first and second
Is a type in which a portion subjected to a predetermined polarization process is excited to generate stretching vibration and bending vibration, and the abutting portion performs an elliptical motion by a combined vibration obtained by combining the two vibrations. The material of the vibrator includes barium titanate, lead zirconate titanate, lithium niobate, lithium tantalate, and the like. Further, the vibrator includes both a single-layer type and a laminated type, and also includes a case in which a single vibrator is brought into contact with the moving body and a case in which a plurality of vibrators are brought into contact. The one direction and the other direction may be appropriately selected, but from the viewpoint of efficiently vibrating the vibrator, it is preferable that the one direction and the other direction are orthogonal to each other. Further, a vibrator that can move the moving body in one direction and another direction different from the other direction may be provided.

According to this, when an excitation signal is input to the first vibrator, the contact portion of the first vibrator performs an elliptical motion by a combined vibration obtained by combining the stretching vibration and the bending vibration.
A frictional force is directly applied to the moving body periodically to move the moving body in one direction. On the other hand, when the excitation signal is input to the second vibrator, the contact portion of the second vibrator moves the moving body in another direction different from one direction. In addition, the first oscillator and the second oscillator
When an excitation signal is input to the oscillators at the same time, the first oscillator and the second oscillator move the moving body in an intermediate direction between the one direction and the other direction. The magnitude of the excitation signal input to is adjusted. As described above, the moving body is movable on a plane formed in one direction and another direction.

That is, since each vibrator is brought into contact with the moving body to directly apply a frictional force, there is no need to provide a driving force transmission mechanism between the moving body and the vibrator, and the apparatus configuration is simple and simple. Become smaller. Also, there is no backlash or error due to the installation of the driving force transmission mechanism. When the input of the excitation signal is stopped, the vibrator naturally stops at a position where the vibration is attenuated, and does not stop at a specific position. Therefore, the positioning accuracy of the moving body is improved. Further, since no electromagnetic noise is generated, it can be used in an environment where magnetization is avoided.

According to a second aspect of the present invention, in the stage using the ultrasonic motor according to the first aspect, at least three of the first vibrator and the second vibrator are provided. It is characterized by. Where, for example,
The case where three oscillators are provided, the case where one first oscillator is used and the number of second oscillators is two, and the case where two first oscillators and one second oscillator are used, are included. . According to this, the first
Since the frictional force is applied while supporting the moving body at three or more places in combination with the vibrator and the second vibrator, the moving body can be stably moved.

According to a third aspect of the present invention, in the stage using the ultrasonic motor according to the first aspect, the movable body is movable by one of the first vibrator and the second vibrator. In this case, the other vibrator performs only stretching vibration. According to this, while one of the vibrators is moving the moving body by the synthetic vibration,
The other vibrator performs only stretching vibration and periodically contacts the moving body, so that the contact time between the moving body and the other vibrator is greatly reduced. Therefore, the braking force applied to the moving body is significantly reduced.

According to a fourth aspect of the present invention, in the stage using the ultrasonic motor according to the first aspect, at least one of the first vibrator and the second vibrator has a first vibrating vibration. Piezoelectric element and the second
Characterized in that the piezoelectric element and the piezoelectric element are integrally laminated.

According to this, the vibrator performs a larger combined vibration obtained by combining the expansion and contraction vibration by the first piezoelectric element and the bending vibration by the second piezoelectric element, and applies a larger frictional force to the moving body. Therefore, the moving body is moved at a high speed with a large force.

According to a fifth aspect of the present invention, in the stage using the ultrasonic motor according to the first aspect, the second vibrator moves the moving body to the first direction in a direction opposite to the one direction. A friction force of the same magnitude as the friction force of the vibrator is applied to rotate the moving body. According to this, the frictional force in one direction of the first vibrator and the
The frictional force of the vibrator in the opposite direction forms a couple. Therefore, the moving body is rotated.

According to a sixth aspect of the present invention, in the stage using an ultrasonic motor, a movable body and a cylindrical end surface are brought into contact with the movable body, and are arranged along the circumferential direction. A first polarization processing unit that generates a first combined vibration obtained by combining a stretching vibration and a bending vibration in a radial direction; and a second polarization processing unit that generates a second combined vibration similar to the first combined vibration. And a columnar vibrator having a polarization processing unit, wherein at least one of the first polarization processing unit and the second polarization processing unit is excited to make the movable body movable on a plane. It is characterized by. Here, the columnar vibrator includes, in addition to the columnar shape, a cylindrical shape in which the center of the columnar shape is hollow.

According to this, by inputting and exciting the excitation signal to the first polarization processing section, the first combined vibration is generated by combining the stretching vibration and the bending vibration with the columnar vibrator. The first combined vibration causes the end face of the columnar vibrator to perform an elliptical motion and apply a frictional force to the moving body in one radial direction to move the moving body. Also, by inputting and exciting an excitation signal to the second polarization processing unit, a second combined vibration is generated in the columnar vibrator. The end surface of the columnar vibrator performs an elliptical motion by the second combined vibration and applies a frictional force to the moving body in another radial direction to move the moving body. On the other hand, the excitation signal is input to the first polarization processing unit and the second polarization processing unit at the same time, and the first polarization processing unit and the second polarization processing unit are excited.
A frictional force is applied to the moving body in another radial direction to move the moving body. Further, by adjusting the magnitude of the excitation signal input to the first polarization processing unit and the second polarization processing unit, the direction of the frictional force applied to the moving body is adjusted.

According to a seventh aspect of the present invention, in a stage using an ultrasonic motor, a movable body and a cylindrical end surface are brought into contact with the movable body, and are arranged along a circumferential direction. A first polarization processing unit that generates a first bending vibration in the circumferential direction;
A second polarization processing unit for simultaneously generating bending vibrations, and a columnar vibrator having the second polarization processing unit. The first bending vibration and the second bending vibration are synthesized, and a circumferential direction is applied to an end face of the columnar vibrator. The moving body is rotated based on the traveling wave.

According to this, the first polarization processing section and the second polarization processing section are simultaneously excited in different phases, and the first bending vibration and the second bending vibration in the circumferential direction are applied to the columnar vibrator. Cause. The end surface of the columnar vibrator is synthesized from the first bending vibration and the second bending vibration on the end face of the columnar vibrator to generate a traveling wave traveling in the circumferential direction. To apply a frictional force to rotate the moving body.

According to an eighth aspect of the present invention, in the stage using the ultrasonic motor according to any one of the first to fifth aspects, at least one of the first vibrator and the second vibrator is provided. One is characterized in that a DC voltage is applied to finely move the moving body. According to this, a DC voltage is applied to the first vibrator or the second vibrator,
The first vibrator or the second vibrator is statically distorted to slightly move the moving body. Therefore, the position of the moving body is finely adjusted.

According to a ninth aspect of the present invention, there is provided an electronic apparatus, wherein a stage using the ultrasonic motor according to any one of the first to eighth aspects is used. Here, the electronic device includes a measuring device, a processing device, a magnetic recording device and the like, and the stage is used for a moving stage of the measuring device, a moving stage of a workpiece of the processing device, a movement of a magnetic recording medium, and the like. According to this, an electronic device using a stage using an ultrasonic motor is realized.

According to a tenth aspect, in the stage using the ultrasonic motor according to any one of the first to eighth aspects, a lens is provided on the movable body. According to this, the lens is moved together with the moving body, and the traveling direction of light is changed.

According to an eleventh aspect of the present invention, there is provided a printing apparatus, wherein the stage using an ultrasonic wave according to the tenth aspect is used, and the optical axis of the laser beam is adjusted by a lens provided on the moving body. It is characterized by being adjusted. here,
Printing devices include laser printers and laser copies. According to this, the optical axis of the laser beam of the printing apparatus is adjusted by moving the lens provided on the moving body.

According to a twelfth aspect of the present invention, in the stage using the ultrasonic motor according to the sixth or seventh aspect, at least one of the first polarization processing unit and the second polarization processing unit. Is characterized in that a DC voltage is applied to finely move the moving body. According to this, for example, a DC voltage is applied to the first polarization processing unit and the second polarization processing unit, and the cylindrical vibrator is statically distorted.
Move the moving object slightly. Therefore, the position of the moving body is finely adjusted.

[0023]

DETAILED DESCRIPTION OF THE PREFERRED EMBODIMENTS An embodiment to which the present invention is applied will be described below in detail with reference to FIGS. Embodiment 1 FIG. 1 shows Embodiment 1 in which the present invention is applied to a stage using an ultrasonic motor. FIG. 1A shows a planar structure, and FIG. 1B shows a side structure. Is shown.
In the present embodiment, as shown in FIG. 1, a moving plate 1 as a moving body of the present invention, a first vibrator 2 abutting on a lower surface of the moving plate 1, and a first vibrator 2 A second vibrator 3 which comes into contact with the moving plate 1 while being rotated 90 ° counterclockwise;
A third vibrator 4 in contact with the moving plate 1 in a state parallel to the first vibrator 2 and a fourth vibration in contact with the moving plate 1 in a state parallel to the second vibrator 3 It is composed of a child 5 and pressure mechanisms 6 and 7 that come into contact with the upper surface of the moving plate 1. The first vibrator and the second vibrator of the present invention can be appropriately selected from the vibrators 2, 3, 4, and 5. For example, the first vibrator 2 is the first vibrator of the present invention. In addition, the second vibrator 3 and the fourth vibrator 5 are the second vibrators of the present invention. The third vibrator 4 corresponds to the first vibrator of the present invention when applying a frictional force in the positive direction of the X-axis, and corresponds to the second vibrator of the present invention when applying a frictional force in the reverse direction of the X-axis. Corresponds to a vibrator.

Here, the moving plate 1 is a rectangular flat plate and is made of a rigid material. The first vibrator 2 presses and holds a vibrator main body 21, a projection 22 for vibration enlargement fixed to a tip of the vibrator main body 21, and a position corresponding to a node of the bending vibration of the vibrator main body 21. It is composed of pressure members 23,23.

FIG. 2 is a view showing the structure of the vibrating body 21. The vibrating body 21 includes a plate-shaped first piezoelectric element 211 and a second piezoelectric element 212 integrally laminated on the first piezoelectric element 211 as shown in FIG. The first piezoelectric element 211 includes, for example, as shown in FIG.
It is manufactured using barium titanate, lead zirconate titanate, or the like. Also, over the entire surface, a polarization treatment is performed by applying an electric field in which the lamination surface is positive and the surface facing the lamination surface is negative, and further, for example, gold, copper And the like are formed. And
The first piezoelectric element 211 is excited by applying an excitation signal to the electrodes on both surfaces, and performs a stretching vibration A shown by a thick line in FIG.

As shown in FIG. 3C, the second piezoelectric element 212 is provided with divisions 212a, 212b, 212c and 212d which are divided into four by connecting the midpoints of the opposite sides.
The divisions 212a, 212b, 212c, and 212d apply polarization by applying an electric field in which the lamination surface is positive and the surface opposite to the lamination surface is negative.
An electrode made of, for example, gold, copper, or the like is formed on the laminated surface of b, 212c, and 212d and the opposing surface by means such as evaporation.

Then, for example, when an excitation signal is input to one of the divided portions 212a and 212c which are in a diagonally opposite positional relationship, each of the divided portions 212a and 212c excites and expands and contracts, and the second piezoelectric element 212 Performs the stretching vibration as a whole and the bending vibration B1 shown by the thick line. On the other hand, when an excitation signal is input to the divisions 212b and 212d, the second piezoelectric element 212 performs a bending vibration B2 having a 180 ° phase difference from the bending vibration B1 shown in FIG.

When the stretching vibration A of the first piezoelectric element 211 and the bending vibration B1 of the second piezoelectric element 212 are combined as described above, the projection 22 of the first vibrator 2 becomes elliptical due to the combined vibration. The moving plate 1 is moved and periodically abuts against the moving plate 1 to apply a frictional force in the direction of the arrow in FIG. At this time, the protrusion 22 is connected to the second piezoelectric element 2.
12 performs an enlarged elliptical motion compared to when an excitation signal is input, and applies a larger frictional force to the moving plate 1.
The moving plate 1 is moved at a higher speed. On the other hand, when the stretching vibration A of the first piezoelectric element 211 and the bending vibration B2 are combined with the second piezoelectric element 212, the projection 22 performs an elliptical motion in a direction opposite to the above-described elliptical motion, and moves the movable plate 1 in the opposite direction. Move. In addition, as shown in FIG. 2E, the first vibrator 2 may be composed of only the second piezoelectric element 212.

The second vibrator 3, the third vibrator 4, and the fourth vibrator 5 include a vibrating body 31 similar to the first vibrator 2.
41, 51, projections 32, 42, 52, support members 33, 5
Each of the vibrators 3, 4, and 5 receives the excitation signal in the same manner as the first vibrator 2, and when the excitation signal is input, the moving plate 1 moves in the direction of the arrow in FIG. Apply frictional force to
The moving plate 1 is moved in the same direction. As described above, since the frictional force is applied while being supported at the four positions of the vibrators 2, 3, 4, and 5, the movable plate 1 is stably moved.

The pressing mechanisms 6 and 7 include elastic members 6a and 7a
And spherical spherical bodies 6b and 7b fixed to the tips of the elastic members 6a and 7a. The elastic members 6a and 7a include a coil spring, a leaf spring, rubber, and the like. Then, the moving plate 1 is pressed against the vibrators 2, 3, 4, and 5.

According to the above configuration, each of the oscillators 2
Since the friction plates 3, 4, 5 are brought into contact with the moving plate 1 to directly apply a frictional force, there is no need to provide a driving force transmission mechanism between the moving plate 1 and the vibrators 2, 3, 4, 5. . Also, there is no backlash or error due to the installation of the driving force transmission mechanism. When the input of the excitation signal is stopped,
3, 4, and 5 stop at the position where the vibration is attenuated, and do not stop at a specific position. In addition, since no magnetic components such as electromagnets are used, no electromagnetic noise is generated.

Next, a method of using a stage using an ultrasonic motor will be described with reference to FIGS. First, when the moving plate 1 is moved in the positive direction of the X axis in FIG. 1A, the electrodes of the first piezoelectric elements 211 and 411 of the first vibrator 2 and the third vibrator 4 and the second Piezoelectric element 212,
412 divided parts 212a, 212c, 412a, 412
An excitation signal may be applied to the electrode c, and the excitation signal may be input only to the electrodes of the first piezoelectric elements 411 and 511 of the second vibrator 3 and the fourth vibrator 5. At this time, the first vibrator 2 and the third vibrator 4 simultaneously perform combined vibration by stretching vibration and bending vibration. The projections 22 and 42 perform an elliptical motion in the clockwise direction to apply a frictional force in the direction of the arrow in FIG.
The moving plate 1 is moved in the positive direction of the X axis. Here, the second vibrator 3 and the fourth vibrator 5 perform only stretching vibration,
The protrusions 32 and 52 periodically contact the moving plate 1. Therefore, the braking force is significantly reduced as compared with the case where the second vibrator 3 and the fourth vibrator 5 are stopped and the projections 32 and 52 are constantly in contact with the movable plate 1.

When the movable plate 1 is moved in the direction opposite to the X axis, the electrodes of the first piezoelectric elements 211 and 411 of the first vibrator 2 and the third vibrator 4 and the second piezoelectric element 21
2,412 division units 212b, 212d, 412b, 4
An excitation signal may be applied to the 12d electrode. At this time,
The protrusions 22 of the first vibrator 2 and the protrusions 42 of the third vibrator 4 make an elliptical motion in the counterclockwise direction, and apply a frictional force to the moving plate 1 in the opposite direction of the X axis. Move in the direction.

On the other hand, when the moving plate 1 is moved in the positive direction of the Y axis in FIG. 1A, the electrodes of the first piezoelectric elements 311 and 511 of the second vibrator 3 and the fourth vibrator 5 And division portions 312a and 312 of second piezoelectric elements 312 and 512
An excitation signal may be applied to the electrodes c, 512a, and 512c, and the excitation signal may be input only to the first piezoelectric elements 211 and 511 of the first vibrator 2 and the fourth vibrator 5.

Next, when the movable plate 1 is moved in the intermediate direction between the positive direction of the X axis and the positive direction of the Y axis in FIG. 1 piezoelectric element 2
An excitation signal is applied to the electrode of 11411 and the electrodes of the divided portions 212a, 212c, 412a, and 412c of the second piezoelectric elements 212 and 412, and the first of the second vibrator 3 and the fourth vibrator 5 are applied. Electrodes of piezoelectric elements 311 and 511, second
Division portions 312a and 312 of the piezoelectric elements 312 and 512
An excitation signal may be applied to the electrodes c, 512a, and 512c. At this time, the first vibrator 2 and the third vibrator 4
Applies a frictional force to the moving plate 1 in the positive X-axis direction, and the second vibrator 3 and the fourth vibrator 5 apply a frictional force to the moving plate 1 in the positive Y-axis direction. . And moving plate 1
Is moved in an intermediate direction between the positive direction of the X axis and the positive direction of the Y axis by the resultant force of the transducers 2, 3, 4, and 5.

Further, the magnitudes of the excitation signals input to the first vibrator 2 and the third vibrator 4 and the second vibrator 3 and the fourth vibrator 5 are adjusted so that the friction in the X-axis direction is adjusted. By changing the force and the frictional force in the Y-axis direction, the intermediate direction can be adjusted. Further, the frictional force in the X-axis direction of the first vibrator 2 and the third vibrator 4 and the second Vibrator 3
If the forward direction or the reverse direction is selected for the frictional force of the fourth vibrator 5 in the Y-axis direction, the moving plate 1 is moved in all directions.

Next, when rotating the movable plate 1, the first vibrator 2 applies a frictional force in the positive direction of the X axis, and the second vibrator 3 applies a frictional force in the positive direction of the Y axis. , The third vibrator 4
A friction force having the same magnitude as that of the first vibrator 2 is applied in a direction opposite to the X axis, and the fourth vibrator 5 is moved in a direction opposite to the Y axis.
What is necessary is just to apply the friction force of the same magnitude as. At this time, the frictional force applied by the first vibrator 2 and the third vibrator 4 forms a couple, and the frictional force applied by the second vibrator 3 and the fourth vibrator 5 forms a couple. The moving plate 1 is rotated counterclockwise. If the directions of the frictional forces applied by the vibrators 2, 3, 4, and 5 are reversed, the movable plate 1 is rotated clockwise.

Finally, if the moving plate 1 is slightly displaced from the target position after moving the moving plate 1, for example, the first vibrator 2 and the third vibrator 4 are selected, and each vibrator is selected. 2,
4, a DC voltage may be applied to the first piezoelectric element and the second piezoelectric element, for example. At this time, the oscillators 2 and 4 to which the DC voltage is applied are statically distorted, and the movable plate 1 is finely moved by an amount corresponding to the distortion, and the position of the movable plate 1 is finely adjusted.

As described above, according to the present embodiment, the vibrators 2, 3, 4, and 5 are brought into contact with the moving plate 1 to directly apply a frictional force. , 3,4
There is no need to provide a driving force transmission mechanism between the drive units 5, and the device configuration is simple and small. Also, there is no backlash or error due to the installation of the driving force transmission mechanism. Further, when the input of the excitation signal is stopped, the vibrations of the vibrators 2, 3, 4, and 5 are naturally attenuated and are not stopped at a specific position, so that the positioning accuracy of the movable plate 1 is improved. further,
Since it does not generate electromagnetic noise, it can be used in an environment where magnetization is avoided. Further, since the vibrators 2, 3, 4, and 5 have a predetermined laminated structure and apply a large frictional force to the moving plate 1, the moving plate 1 is moved at a higher speed with a large force. Further, since the frictional force is applied while being supported at the four locations of the vibrators 2, 3, 4, and 5, the movable plate 1 is stably moved. Also, while the moving plate 1 is moved by one of the vibrators 2 and 4, the other vibrators 3 and 5 perform only expansion and contraction vibration, and the projections 32 and 52 periodically contact the moving plate 1. Therefore, the braking force based on the other vibrators 3 and 5 is significantly reduced. After the movement of the movable plate 1 is completed, a DC voltage is applied to the vibrators 2, 3, 4, and 5, and
Since the moving plate 1 is finely adjusted by statically distorting the moving plates 4 and 5, the position of the moving plate 1 is finely adjusted.

FIG. 3 shows a modification of a stage using an ultrasonic motor to which the present invention is applied.
(A) shows a planar structure, and (b) shows a side structure. In this modification, the first vibrator 2 and the third vibrator 4 are arranged along the Y-axis direction, and the second vibrator 3 and the fourth vibrator 5 are arranged along the X-axis direction. It is characterized by the following points.

Next, regarding the use of this stage,
explain. First, when the moving plate 1 is moved in the positive direction of the Y axis in FIG. 1A, the electrodes of the first piezoelectric elements 211 and 411 of the first vibrator 2 and the third vibrator 4 and the second Dividing portions 212a, 212c, 41 of piezoelectric elements 212, 412
An excitation signal is applied to the electrodes 2a and 412c, and a frictional force is applied to the moving plate 1 in the direction indicated by the arrow in the figure to move the moving plate 1 in the positive direction of the Y axis. When the moving plate 1 is moved in the positive direction of the X-axis direction in FIG. 1A, the electrodes of the first piezoelectric elements 311 and 511 of the second vibrator 3 and the fourth vibrator 5 and the second piezoelectric Divisions 312a, 312c, 5 of elements 312, 512
An excitation signal is applied to the electrodes 12a and 512c,
Then, the moving plate 1 is moved in the positive direction of the X-axis.

Next, when the movable plate 1 is moved in the intermediate direction between the positive direction of the X-axis and the positive direction of the Y-axis in FIG. 1 (a), the first vibrator 2 and the third vibration The vibrator 4 and the second and third vibrators 3 and 5 may be vibrated simultaneously under the above conditions. At this time, the movable plate 1 is moved in the intermediate direction between the positive direction of the X axis and the positive direction of the Y axis by the resultant force of the vibrators 2, 3, 4, and 5. As described above, even in the arrangement of the transducers 2, 3, 4, and 5, the moving plate 1
It is freely moved in the Y plane.

Embodiment 2 FIGS. 4A and 4B show Embodiment 2 in which the present invention is applied to a stage using an ultrasonic motor. FIG. 4A shows a planar structure, and FIG. 4B shows a side structure. . 5A and 5B show the structure of the columnar vibrator 8 related to the stage. FIG. 5A shows a structure observed from an oblique direction, and FIG. 5B shows a planar structure. This embodiment has substantially the same configuration as that of the first embodiment, and is characterized in that the end face of the columnar vibrator 8 is in contact with the movable plate 1. The description of the same configuration as in the first embodiment is omitted.

Here, the columnar vibrator 8 is
1 and pressurizing members 82, 82, 82, 82 for pressurizing and holding the vibrator body 81 from the side. The vibrator main body 81 has a cylindrical shape with a hollow cylindrical interior,
As shown in FIG. 5B, a first polarization processing unit 81a, a second polarization processing unit 81b, a third polarization processing unit 81c, and a fourth polarization processing unit 81d are provided by equally dividing the circumference into four parts. Each of the polarization processing sections 81a, 81b, 81c, and 81d is subjected to polarization processing by applying an electric field in which the inner peripheral surface shown by the arrow in the drawing is positive and the outer peripheral surface is negative. Further, a common electrode 83 is formed on the inner peripheral surface of the vibrator main body 81, and the polarization processing sections 81a, 81
1b, 81c, and 81d have respective electrodes 84a, 84
b, 84c and 84d are formed. Note that the first polarization processing unit and the second polarization processing unit of the present invention are the polarization processing unit 8.
1a, 81b, 81c, and 81d. For example, when the first polarization processing section 81a is the first polarization processing section of the present invention, the second polarization processing section 81b and the third polarization processing section 81c. , Or the fourth polarization processing unit 81d corresponds to the second polarization processing unit of the present invention.

Next, a method of using this stage will be described with reference to FIGS. 4 (a), 6 and 7. FIG.
Shows the operation of the columnar vibrator 8 when the moving plate 1 is moved linearly, and FIG. 7 is a diagram showing the relationship between the polarization processing unit to which the excitation signal is input and the moving direction of the moving plate 1. 2A shows a case where the moving plate 1 is moved in a straight line, and FIG. 2B shows a case where the moving plate 1 is rotated. First, when the moving plate 1 is moved in the radial direction of 315 ° counterclockwise with respect to the positive direction of the X-axis, the excitation signal, V0 = Asinωt, is input to the first polarization processing unit 81a, and the first polarization is performed. What is necessary is just to excite the processing part 81a. At this time, the columnar vibrator 8
6A shows bending vibration C in the radial direction shown in FIG.
A synthetic vibration E shown in FIG. 6C is performed as a whole by the stretching vibration D shown in FIG. The upper end surface of the columnar vibrator 8 applies a frictional force to the movable plate 1 in the radial direction of 315 ° to move the movable plate 1 in the same direction.

Similarly, when moving the moving plate 1 in the radial direction of 225 °, the excitation signal V0 is supplied to the second polarization processing section 81b.
Is input in the radial direction of 135 °, the excitation signal V0 is input to the third polarization processing unit 81c. In the case of movement in the radial direction of 45 °, the excitation signal V0 is input to the fourth polarization processing unit 81d. To generate the second, third, and fourth combined vibrations.

When moving the moving plate 1 in the radial direction of 0 ° with respect to the X axis, the excitation signal V0 may be input to the first polarization processing section 81a and the fourth polarization processing section 81d. At this time, the columnar vibrator 8 is
A vibration is generated by synthesizing the first combined vibration based on the excitation of 1a and the fourth combined vibration based on the excitation of the fourth polarization processing unit 81d, and the moving plate 1 has a radial direction of 0 ° with respect to the X axis. To move the movable plate 1 in the same direction. Similarly, the second polarization processing unit 81b and the third polarization processing unit 8
When the excitation signal V0 is input to 1c, the movable plate 1 is moved in the radial direction of 180 ° with respect to the X axis. When the excitation signal V0 is input to the third polarization processing unit 81c and the fourth polarization processing unit 81d, the moving plate 1 moves 9 degrees with respect to the X axis.
It is moved in the radial direction of 0 °. When the excitation signal V0 is input to the first polarization processing unit 81a and the second polarization processing unit 81b, the moving plate 1 is moved in a radial direction of 270 ° with respect to the X axis.

On the other hand, when the movable plate 1 is rotated clockwise, the first excitation signal, V0 =
Asinωt, the second excitation signal, V1 = Asin (ωt + ψ), may be input to the second polarization processing unit 81b. Here, ψ can be appropriately selected from 0 ° to 180 °,
From the viewpoint of generating an ideal traveling wave, for example, 90 ° is selected. At this time, on the upper end surface of the columnar vibrator 8,
Counterclockwise by the first bending vibration in the circumferential direction based on the excitation of the first polarization processing unit 81a and the second bending vibration in the circumferential direction having a different phase from the first bending vibration based on the excitation of the polarization processing unit 81b. While a traveling wave is generated, the mass point on the upper end surface performs a clockwise elliptical motion to apply a frictional force to the moving plate 1 in the circumferential direction, thereby rotating the moving plate 1 clockwise. further,
By inputting the excitation signal -V0 to the third polarization processing unit 81c and the excitation signal -V1 to the fourth polarization processing unit 81d, the stretching vibration based on the first and second polarization processing units 81a and 81b is reduced. The traveling waves of the same height are obtained by being offset, and the moving plate 1
Is rotated smoothly.

Similarly, when the first excitation signal V0 is input to the second polarization processing unit 81b and the excitation signal V1 is input to the third polarization processing unit 81c, the first excitation signal is input to the third polarization processing unit 81c. V0, when the excitation signal V1 is input to the fourth polarization processing unit 81d, the first excitation signal V is supplied to the fourth polarization processing unit 81d.
0, when the excitation signal V1 is input to the first polarization processing unit 81a, the movable plate 1 is rotated clockwise.

When the movable plate 1 is rotated counterclockwise, the excitation signal V1 may be input to the first polarization processing unit 81a, and the excitation signal V0 may be input to the second polarization processing unit 81b. At this time, the first end face of the cylindrical vibrator 8 is
While the second bending vibration in the circumferential direction based on the excitation of the polarization processing unit 81a and the first bending vibration in the circumferential direction based on the excitation of the second polarization processing unit 81b generate a clockwise traveling wave, Each mass on the end face performs a counterclockwise elliptical motion to apply a frictional force to the moving plate 1 to rotate the moving plate 1 counterclockwise.

Similarly, when the excitation signal V1 is input to the second polarization processing unit 81b and the excitation signal V0 is input to the third polarization processing unit 81c, the excitation signal V1, the fourth signal and the fourth signal are input to the third polarization processing unit 81c.
When the excitation signal V0 is input to the polarization processing unit 81d, the excitation signal V1 is input to the fourth polarization processing unit 81d, and the excitation signal V0 is input to the first polarization processing unit 81a. Rotate.

As described above, according to the present embodiment, the same effect as that of the first embodiment can be obtained, and the movable plate 1 is moved in one radial direction by the first combined vibration. 2
The moving plate 1 is moved in the other radial direction by the combined vibration of the above, the first combined vibration and the second combined vibration are combined, and the moving plate 1 is further moved in another radial direction. Further, a traveling wave traveling in the circumferential direction from the first bending vibration and the second bending vibration in the circumferential direction is generated on the end face of the columnar vibrator 8, and each mass point on the end face is moved around the moving plate 1 by elliptic motion. Since the frictional force is applied in the direction, the moving plate 1 is rotated.

Third Embodiment FIG. 8 is a diagram showing a main structure of a printing apparatus according to a third embodiment using a stage to which the present invention is applied. The main parts of the printing apparatus include vibrators 11a and 11b, moving plates 12a and 12b abutting on the vibrators 11a and 11b, cylindrical lenses 13a and 13b provided at the center of the moving plates 12a and 12b, and a lens. Laser device 14 arranged upstream of 13a, 13b
a and 14b, a half mirror 15 provided downstream of the moving plates 12a and 12b in the traveling direction of the laser beam, a polygon scanner 16 provided downstream of the half mirror 15, and an fθ lens provided downstream of the polygon scanner 16. 17 and
detecting elements 18a and 18b provided downstream of the fθ lens 17
It is composed of

Next, a method of using the printing apparatus will be described. The laser beams F and G emitted from the laser devices 14a and 14b are applied to the cylindrical lenses 13a and 13b.
b. The laser light F passes through the half mirror 15, and the laser light G is reflected by the half mirror 15 and enters the polygon scanner 16. The laser beams F and G are reflected by the polygon scanner 16 rotating at a constant speed, and
7 is incident. The laser beams F and G are transmitted through the fθ lens 17
As a result, the interval in the scanning direction is made linear, and is incident on a photosensitive drum (not shown), whereby a latent image is formed on the photosensitive drum.

On the other hand, when an optical axis error is detected in the laser beams F and G by the detecting elements 18a and 18b, the vibrators 11a and 11b are driven by a control device (not shown). The moving plates 12a and 12b are respectively moved in predetermined directions,
The cylindrical lenses 13a and 13b are also moved with the movement of the moving plates 12a and 12b. Laser light F, G
The traveling direction is adjusted by the cylindrical lenses 13a and 13b, and the optical axis error is corrected.

As described above, according to the present embodiment, the movable plate 12a provided with the cylindrical lenses 13a and 13b,
Since the oscillator 12b is moved by the oscillators 11a and 11b, the optical axis error of the laser beams F and G is corrected.

Embodiment 4 A feature of the present embodiment is that a stage to which the present invention is applied is used for an electronic device. Here, the electronic device includes, for example, a measuring device and a workpiece (for example,
Wafer) manufacturing apparatus, and a magnetic recording apparatus using a medium. The stage of the present invention is used for a moving stage of a measuring instrument, a moving stage of a workpiece, and a moving medium of magnetic recording. As described above, according to the present embodiment, an electronic device using a stage using an ultrasonic motor is realized.

[0058]

As described above, according to the first aspect of the present invention, there is no need to provide a driving force transmission mechanism between the moving body and the vibrator, and the configuration of the apparatus is simple and small. In addition, when the input of the excitation signal is stopped, the vibrator stops at the position where the vibration is attenuated, and does not stop at a specific position. Therefore, the positioning accuracy of the moving body is improved. Further, since no electromagnetic noise is generated, it can be used in an environment where magnetization is avoided.

According to the second aspect of the present invention, since the frictional force is applied while supporting at three or more places, the moving body can be stably moved. According to the invention described in claim 3, while one of the vibrators is moving the moving body by the synthetic vibration,
Since the contact time of the other vibrator with the moving body is greatly reduced, the braking force applied to the moving body is significantly reduced. According to the fourth aspect of the invention, a larger frictional force is applied to the moving body by a larger combined vibration obtained by combining the expansion and contraction vibration by the first piezoelectric element and the bending vibration by the second piezoelectric element. The body is moved at high speed. According to the fifth aspect of the present invention, since the first vibrator and the second vibrator form a couple by the frictional force in one direction and the frictional force in the opposite direction of the second vibrator. It is turned.

According to the sixth aspect of the present invention, the moving body is moved in one radial direction by the first combined vibration, and the moving body is moved in the other radial direction by the second combined vibration. The combined vibration and the second combined vibration are combined to further move the moving body in another radial direction. According to the invention described in claim 7, the first bending vibration and the second bending vibration are applied to the end face of the columnar vibrator.
From the bending vibration of, a traveling wave traveling in the circumferential direction is generated,
Since the end face of the columnar vibrator applies a frictional force to the moving body based on the traveling wave, the moving body is rotated.
According to the invention described in claim 8, the first vibrator or the second vibrator
Since the vibrator is statically distorted to finely move the moving body, the position of the moving body is finely adjusted. According to the ninth aspect, an electronic device using a stage using an ultrasonic motor is realized.

According to the tenth aspect, the lens is moved together with the moving body. According to the eleventh aspect, the optical axis of the laser of the laser printing apparatus is adjusted by moving the lens provided on the moving body. According to the twelfth aspect of the invention, the cylindrical vibrator is statically distorted and the moving body is finely moved, so that the position of the moving body is finely adjusted.

[Brief description of the drawings]

FIGS. 1A and 1B show Embodiment 1 in which the present invention is applied to a stage using an ultrasonic motor. FIG. 1A shows a planar structure, and FIG. 1B shows a side structure.

2A and 2B are diagrams illustrating a structure of a vibrating body main body according to FIG. 1, wherein FIG. 2A illustrates a structure observed from an oblique direction, FIG. 2B illustrates a planar structure of a first piezoelectric element, and FIG. Shows the planar structure of the second piezoelectric element, (d) shows the principle of the bending vibration B2, and (e) shows the structure of the modification.

3A and 3B show a mode of deformation of a stage using the ultrasonic motor according to FIG. 1, wherein FIG. 3A shows a planar structure and FIG. 3B shows a side structure.

FIG. 4 is a second embodiment in which the present invention is applied to a stage using an ultrasonic motor, wherein (a) shows a planar structure,
(B) shows a side structure.

5 shows the structure of a columnar vibrator according to FIG. 4,
(A) shows a structure observed from an oblique direction, and (b) shows a planar structure.

FIG. 6 shows an operation of the columnar vibrator when the moving plate shown in FIG. 5 is moved linearly.

7A and 7B are diagrams illustrating a relationship between a polarization processing unit to which an excitation signal is input and a moving direction of a moving plate, wherein FIG. 7A illustrates a case where the moving plate is moved linearly, and FIG. Is shown.

FIG. 8 shows a main structure of a printing apparatus according to a third embodiment using a stage to which the present invention is applied.

[Explanation of symbols]

 DESCRIPTION OF SYMBOLS 1 Moving plate 2 1st vibrator 3 2nd vibrator 4 3rd vibrator 5 4th vibrator 6, 7 Pressurizing mechanism 8 Columnar vibrator 11a, 11b Vibrator 12a, 12b Moving plate 13a, 13b Cylindrical lens 14a, 14b Laser device 15 Half mirror 16 Polygon scanner 17 fθ lens 18a, 18b Detection element 21, 31, 41, 51 Vibrator body 22, 32, 42, 52 Projection 23, 33, 53 Pressing member 81 Vibration Child body 81a First polarization processing unit 81b Second polarization processing unit 81c Third polarization processing unit 81d Fourth polarization processing unit 83 Common electrodes 84a, 84b, 84c, 84d Electrodes 211, 311, 411, 511 First Piezoelectric elements 212, 312, 412, 512 of the second piezoelectric element A elastic vibration B1 bending vibration B2 bending vibration C bending vibration D Telescopic vibration E Synthetic vibration F Laser light G Laser light

Continued on the front page (51) Int.Cl. ⁶ Identification symbol FI // B23Q 5/28 B23Q 1/18 A

Claims (12)

[Claims] A first vibration that applies a frictional force to the movable body in one direction by a movable body that is movable and a combined vibration that combines expansion and contraction vibration and bending vibration in contact with the movable body. A second vibrator that abuts against the moving body and applies a frictional force to the moving body in another direction different from the one direction by a combined vibration obtained by combining the stretching vibration and the bending vibration; Wherein the moving body is movable on a plane formed in one direction and another direction based on a frictional force applied by at least one of the first vibrator and the second vibrator. Stage using an ultrasonic motor. 2. A stage using an ultrasonic motor according to claim 1, wherein a total of at least three of said first transducer and said second transducer are provided. 3. The apparatus according to claim 1, wherein when the movable body is moved by one of the first vibrator and the second vibrator, the other vibrator performs only stretching vibration. Stage using ultrasonic motor. 4. At least one of the first vibrator and the second vibrator has a structure in which a first piezoelectric element that expands and contracts and vibrates and a second piezoelectric element that performs bending vibration are integrally laminated. A stage using the ultrasonic motor according to claim 1. 5. The second vibrator applies a frictional force to the moving body in a direction opposite to the one direction and the same magnitude as a frictional force applied by the first vibrator to rotate the moving body. A stage using the ultrasonic motor according to claim 1, wherein the stage is moved. 6. A first combination in which a movable movable body is brought into contact with a cylindrical end surface of the movable body, and stretching vibration and radial bending vibration are combined along a circumferential direction. A columnar vibrator having a first polarization processing unit that generates vibration, and a second polarization processing unit that generates a second composite vibration similar to the first composite vibration;
A stage using an ultrasonic motor, wherein at least one of the first polarization processing unit and the second polarization processing unit is excited to make the movable body movable on a plane. 7. A movable movable body, and a first polarization processing unit that causes a cylindrical end surface to abut on the movable body and generates a first bending vibration in a circumferential direction along a circumferential direction. A second polarization processing unit that simultaneously generates a second bending vibration in the circumferential direction at a phase different from that of the first bending vibration, and a columnar vibrator having the first polarization vibration and the second bending vibration. The ultrasonic motor is characterized in that the bending vibration is synthesized, a traveling wave traveling in the circumferential direction is generated on the end face of the columnar vibrator, and the moving body is rotated based on the traveling wave. Stage. 8. The apparatus according to claim 1, wherein at least one of the first vibrator and the second vibrator finely moves the moving body by applying a DC voltage. A stage using the described ultrasonic motor. 9. An electronic apparatus using a stage using the ultrasonic motor according to claim 1. Description: 10. The stage using an ultrasonic motor according to claim 1, wherein a lens is provided on the moving body. 11. A stage using an ultrasonic wave according to claim 10, wherein a lens provided on the moving body is used for
A printing apparatus characterized in that the optical axis of a laser beam is adjusted. 12. The apparatus according to claim 6, wherein at least one of the first polarization processing section and the second polarization processing section is applied with a DC voltage to slightly move the moving body. Stage using ultrasonic motor.