JPH11260706A5 - - Google Patents

Info

Publication number
JPH11260706A5
JPH11260706A5 JP1998074861A JP7486198A JPH11260706A5 JP H11260706 A5 JPH11260706 A5 JP H11260706A5 JP 1998074861 A JP1998074861 A JP 1998074861A JP 7486198 A JP7486198 A JP 7486198A JP H11260706 A5 JPH11260706 A5 JP H11260706A5
Authority
JP
Japan
Prior art keywords
illuminance
substrate
optical system
detection unit
meter
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
JP1998074861A
Other languages
English (en)
Japanese (ja)
Other versions
JPH11260706A (ja
JP3968862B2 (ja
Filing date
Publication date
Application filed filed Critical
Priority to JP07486198A priority Critical patent/JP3968862B2/ja
Priority claimed from JP07486198A external-priority patent/JP3968862B2/ja
Publication of JPH11260706A publication Critical patent/JPH11260706A/ja
Publication of JPH11260706A5 publication Critical patent/JPH11260706A5/ja
Application granted granted Critical
Publication of JP3968862B2 publication Critical patent/JP3968862B2/ja
Anticipated expiration legal-status Critical
Expired - Lifetime legal-status Critical Current

Links

JP07486198A 1998-03-09 1998-03-09 照度計、照度計測方法及び露光装置 Expired - Lifetime JP3968862B2 (ja)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP07486198A JP3968862B2 (ja) 1998-03-09 1998-03-09 照度計、照度計測方法及び露光装置

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP07486198A JP3968862B2 (ja) 1998-03-09 1998-03-09 照度計、照度計測方法及び露光装置

Publications (3)

Publication Number Publication Date
JPH11260706A JPH11260706A (ja) 1999-09-24
JPH11260706A5 true JPH11260706A5 (enExample) 2005-10-20
JP3968862B2 JP3968862B2 (ja) 2007-08-29

Family

ID=13559541

Family Applications (1)

Application Number Title Priority Date Filing Date
JP07486198A Expired - Lifetime JP3968862B2 (ja) 1998-03-09 1998-03-09 照度計、照度計測方法及び露光装置

Country Status (1)

Country Link
JP (1) JP3968862B2 (enExample)

Families Citing this family (9)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US6549277B1 (en) 1999-09-28 2003-04-15 Nikon Corporation Illuminance meter, illuminance measuring method and exposure apparatus
JP2001338868A (ja) * 2000-03-24 2001-12-07 Nikon Corp 照度計測装置及び露光装置
US7289230B2 (en) * 2002-02-06 2007-10-30 Cyberoptics Semiconductors, Inc. Wireless substrate-like sensor
US7151366B2 (en) * 2002-12-03 2006-12-19 Sensarray Corporation Integrated process condition sensing wafer and data analysis system
US7135852B2 (en) 2002-12-03 2006-11-14 Sensarray Corporation Integrated process condition sensing wafer and data analysis system
JP2007528611A (ja) * 2004-03-09 2007-10-11 サイバーオプティクス セミコンダクタ インコーポレイテッド 改良型の基板状無線センサ
JP4622568B2 (ja) * 2005-02-14 2011-02-02 株式会社ニコン 露光方法、露光装置、反射板、反射率計測センサの校正方法及びマイクロデバイスの製造方法
US7924416B2 (en) 2005-06-22 2011-04-12 Nikon Corporation Measurement apparatus, exposure apparatus, and device manufacturing method
TWI439813B (zh) 2006-05-10 2014-06-01 尼康股份有限公司 A method of manufacturing an exposure apparatus and an element

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