JPH11260164A - Manufacture of anisotropic conductive sheet and manufacturing device therefor - Google Patents

Abstract

PROBLEM TO BE SOLVED: To provide a manufacturing device for an anisotropic conductive sheet capable of preventing an insulation fault from arising between conducting parts of the anisotropic conductive sheet. SOLUTION: A backing sheet 38 is printed with liquid silicone rubber 12, this is heated and hardened by a hardening heater 20 first to form an insulating sheet, and nextly paste 22 including nickel particles is printed on the insulating sheet. The nickel particles are magnetically oriented by an electromagnet 30 to form conducting parts. That is, the insulating sheet and the conducting parts are dividedly formed.

Description

DETAILED DESCRIPTION OF THE INVENTION

[0001]

The present invention relates to an electric circuit component,
The present invention relates to a method for manufacturing an anisotropic conductive sheet electrically connected to terminals of an electric circuit board or the like and an apparatus for manufacturing the same.

[0002]

2. Description of the Related Art FIG. 7 is a perspective view of an anisotropic conductive sheet, and FIG. 8 is a cross-sectional view of the anisotropic conductive sheet shown in FIG. The anisotropic conductive sheet will be described with reference to FIGS. Anisotropic conductive sheet 120
Is an insulating sheet 122 made of, for example, silicone rubber.
In addition, a conductive portion 124 formed by laminating conductive magnetic particles such as nickel particles is locally formed. Examples of uses of the anisotropic conductive sheet include the following uses. When inspecting the electrical characteristics of semiconductor products that use solder balls as electrodes, if the probe for inspection is brought into direct contact with the solder balls, the solder balls will be chipped or dented, causing mounting problems There are cases. Therefore, by using an anisotropic conductive sheet instead of the probe and making contact with the solder ball, damage and deformation of the electrode are prevented. Conventional manufacturing method of anisotropic conductive sheet,
This will be described with reference to FIG. On the main surface of the mold 126, the mold magnetic pole portions 136 and the non-magnetic material portions 138 are provided alternately, and similarly on the main surface of the mold 128, the mold magnetic pole portions 13 are provided.
7 and non-magnetic portions 139 are provided alternately. The molds 126 and 128 are arranged so that the main surface of the mold 126 and the main surface of the mold 128 face each other, and the molding space 140 is formed by disposing the spacer 134 around the molds 126 and 128. For example, a molding material in which nickel particles are dispersed in liquid silicone rubber is put into the molding space 140. Then, the flat electromagnet 1 is sandwiched between the molds 126 and 128.
30 and 132 are arranged, a magnetic field is applied to the molding space 140,
The nickel particles 142 are formed by the mold magnetic pole 136 and the mold magnetic pole 1
37, the nickel particles 142 are oriented so that the molding material is heated and cured in this state to produce an anisotropic conductive sheet.

[0003]

The orientation of the nickel particles 142 is mainly determined by the magnetic field gradient between the mold pole 136 and the mold pole 137. Mold magnetic pole part 136, 1
If the pitch indicated by P of 37 becomes small, the magnetic field gradient becomes small, and the nickel particles 142 cannot be oriented well. Conventionally, a magnetic field was applied to the molding space 140, the nickel particles 142 in the molding material were oriented, and the molding material was heated and cured in that state to produce, that is, the insulating sheet and the conductive portion were simultaneously formed. Mold pole 13
6 and 137, if the pitch of P is small and the orientation of the nickel particles 142 is not properly performed, a large number of nickel particles 142 exist between the conductive portions 124a and 124b as shown in FIG. The resulting anisotropic conductive sheet 120 is obtained. When the anisotropic conductive sheet is used, since both surfaces are pressed, such an anisotropic conductive sheet,
The conduction portion 124a and the conduction portion 124b are electrically connected,
Insulation failure occurs between the conduction part 124a and the conduction part 124b.

The present invention has been made in order to solve such a conventional problem, and provides a method of manufacturing an anisotropic conductive sheet and an apparatus for manufacturing the anisotropic conductive sheet which can prevent occurrence of insulation failure between conductive portions. That is.

[0005]

One aspect of the present invention is directed to an anisotropic conductive sheet having an insulating sheet and a conductive portion locally formed on the insulating sheet and serving as an electrical contact. A manufacturing apparatus comprising a filling unit and a first orientation unit. The filling means is a means for filling a curable flowable material containing conductive magnetic particles into an insulating sheet having a hole for forming a conductive portion. The first orienting means is means for orienting the conductive magnetic material particles in the hole by a magnetic field to form a conductive portion. In one aspect of the present invention, a curable flowable material containing conductive magnetic particles is filled in an insulating sheet having a hole for forming a conductive portion, by a filling means. ing. That is, by forming a conductive portion later on the already formed insulating sheet, the insulating sheet and the conductive portion are divided and formed. Therefore, it is possible to prevent occurrence of insulation failure between the conductive portions of the anisotropic conductive sheet.

[0006] As a filling means, a curable fluid material containing conductive magnetic particles is printed on an insulating sheet having holes for forming conductive portions, for example, by a cylindrical drum. There are means. By using such means, the conductive magnetic particles can be continuously inserted into the holes of the insulating sheet, and the productivity of the anisotropic conductive sheet can be improved. As the first orientation means, for example, there are a permanent magnet and an electromagnet.

[0007] The insulating sheet having holes for forming the conductive portion may be manufactured in advance by another device, but the insulating sheet and the conductive portion are continuously formed by the same device. May be. For example, a sheet-like support (hereinafter, referred to as
It is called a base sheet. ) Is coated with a curable fluid insulating material, which is cured to form an insulating sheet. Next, the insulating sheet is provided with holes in a pattern of conducting portions, and the conductive magnetic particles are filled by the filling means. The hole is filled with a curable flowable material containing the material, and the conductive magnetic particles in the hole are oriented by a magnetic field by the first orientation means to form a conductive portion.

[0008] The curable flowable insulating material used for preparing the insulating sheet and the curable flowable material used for preparing the conductive portion may be the same or different. When different materials are used, the most suitable material can be used for each of the insulating sheet and the conductive portion. For example, since the conductive portion contacts the solder ball electrode, the conductive portion may serve as a cushion, and the conductive portion preferably contains an elastic material such as rubber. On the other hand, the insulating sheet is
It is not necessary to have elasticity enough to serve as a cushion.

Another embodiment of the present invention provides an insulating sheet,
An anisotropic conductive sheet manufacturing apparatus, comprising: a conductive portion locally formed on an insulating sheet and serving as an electrical contact; and a coating device is provided. The application means applies a curable fluid insulating material to the pattern sheet in which the conductive portions are patterned on the sheet and the conductive portions are detachably attached from the sheet so that the conductive portions are exposed. It is a means to do. In another aspect of the present invention, the conductive portion is divided and formed by applying a fluid insulating material on the patterned sheet to form an insulating sheet. ing. Therefore, it is possible to prevent occurrence of insulation failure between the conductive portions of the anisotropic conductive sheet.

As an application means, for example, there is a means for printing a curable fluid insulating material on a cylindrical drum so that the conductive portion is exposed on the pattern sheet. By using such a means, a curable fluid insulating material can be applied so that conductive portions are continuously exposed on the pattern sheet, and the productivity of the anisotropic conductive sheet can be improved. it can. Note that the conductive sheet is patterned on the sheet, and the pattern sheet to which the conductive part is releasably adhered from the sheet may be manufactured in advance by another device. The insulating sheet may be manufactured continuously. For example, a curable fluid material containing conductive magnetic particles is applied to a base sheet in a pattern of conductive portions, and the conductive magnetic particles are magnetically oriented by an electromagnet or the like, and the fluid material is cured in this state. Then, a conductive portion is formed. Next, a curable fluid insulating material is applied to the base sheet so that the conductive portion is exposed by the applying means, and the base sheet is cured to form an insulating sheet. In another embodiment of the present invention, the curable fluid insulating material used for producing the insulating sheet and the curable fluid material used for producing the conductive portion may be the same or different. The effect of using different materials is as described above.

Still another aspect of the present invention is an apparatus for producing an anisotropic conductive sheet, comprising: an insulating sheet; and a conductive portion locally formed on the insulating sheet and serving as an electrical contact. , A material supporting member, a transfer unit, and a second alignment unit. The material support member is a member to which a curable fluid insulating material is transferred. The transfer means is means for attaching the conductive magnetic particles to the pattern of the conductive portion and transferring the conductive magnetic particles to the material supporting member. The second orientation means is a means for orienting the conductive magnetic particles by a magnetic field to form a conductive portion. In still another embodiment of the present invention, the insulating sheet and the conductive portion are formed separately. Therefore, it is possible to prevent occurrence of insulation failure between the conductive portions of the anisotropic conductive sheet. In addition, since the conductive magnetic particles and the curable fluid insulating material are transferred to the material supporting member to produce the anisotropic conductive sheet, it is possible to continuously produce the anisotropic conductive sheet, The productivity of the anisotropic conductive sheet can be improved.

The curable fluid insulating material may be transferred to the material supporting member first, and the conductive magnetic particles may be transferred to the material supporting member later, or the material may be transferred to the material supporting member first. Alternatively, the conductive magnetic particles may be transferred, and the fluid insulating material curable later may be transferred to the material supporting member. As an example of the transfer means, an electrostatic member charged with a pattern of a conductive portion and conductive magnetic particles adhered so as to form a pattern, or a magnet arranged in a pattern of a conductive portion, the conductive magnetic particles being patterned There are members attached to form
As the material supporting member, for example, there is a cylindrical drum. In this case, the conductive magnetic particles and the curable fluid insulating material transferred to the cylindrical surface of the drum are further transferred to a base sheet, and the conductive magnetic particles are oriented by the second orientation means. It is preferred that As the second orientation means, for example, there are a permanent magnet and an electromagnet.

Still another aspect of the present invention is a method of manufacturing an anisotropic conductive sheet including an insulating sheet and a conductive portion locally formed on the insulating sheet and serving as an electrical contact. The method is characterized in that the formation of the insulating sheet and the formation of the conductive portion are performed in different steps. Therefore, it is possible to prevent occurrence of insulation failure between the conductive portions of the anisotropic conductive sheet.

As the base sheet, for example, there is a sheet obtained by winding a sheet into a roll. In this case, the thickness of the base sheet is 1 mm or less, preferably 0.3 mm or less, more preferably 0.2 mm or less. This is because the thinner the base sheet, the easier it is to wind up in a roll shape, and the easier it is to conduct magnetism during magnetic field orientation. Curable flowable materials and curable flowable insulating materials include, for example, thermosetting materials. In this case, it is preferable that a heating means such as a heater is further provided to thermally cure the thermosetting material. When a heating means is used, the base sheet is preferably a sheet containing a polymer material such as a fluororesin, for example, Teflon (trade name), or a sheet containing a metal foil made of a nonmagnetic metal. This is because these have heat resistance and the properties of the base sheet do not change when the thermosetting material is thermoset.

As the curable fluid material and the curable fluid insulating material used in the present invention, an insulator having elasticity is preferable. As such an insulator having elasticity, a rubber-like polymer is preferable. Examples of rubbery polymers include polybutadiene, natural rubber, polyisoprene, and S
Conjugated diene rubbers such as BR and NBR and hydrogenated products thereof, block copolymers such as styrene butadiene diene block copolymer, styrene isoprene block copolymer and hydrogenated products thereof, chloroprene,
Examples include urethane rubber, polyester rubber, epichlorohydrin rubber, silicone rubber, ethylene propylene copolymer, and ethylene propylene diene copolymer. When weather resistance is required, a rubber-like polymer other than a conjugated diene rubber is preferred, and silicone rubber is particularly preferred in terms of moldability and electrical properties.

Here, the silicone rubber will be described in more detail. As the silicone rubber, one obtained by crosslinking or condensing a liquid silicone rubber is preferable. The liquid silicone rubber preferably has a viscosity of 10 ⁵ poise or less at a strain rate of 10 ⁻¹ sec, and may be any of a condensation type, an addition type, and a type containing a vinyl group or a hydroxyl group. Specific examples include dimethyl silicone raw rubber, methyl vinyl silicone raw rubber, and methylphenyl vinyl silicone raw rubber. Among these, as the vinyl group-containing silicone rubber, usually, dimethyldichlorosilane or dimethyldialkoxysilane is subjected to hydrolysis and condensation reaction in the presence of dimethylvinylchlorosilane or dimethylvinylalkoxysilane. By performing the separation by

Further, those having a vinyl group at both ends are anionically polymerized with a cyclic siloxane such as octamethylcyclotetrasiloxane in the presence of a catalyst, and the polymerization is terminated by using a terminal terminator to form a polymer. When obtaining, it can be obtained by using, for example, dimethyldivinylsiloxane as a terminal stopper, and appropriately selecting reaction conditions (eg, the amount of the cyclic siloxane and the amount of the terminal stopper). Here, examples of the catalyst include alkalis such as tetramethylammonium hydroxide and n-butylphosphonium hydroxide or silanolate solutions thereof, and the like.
The reaction temperature is, for example, 80 to 130 ° C. Further, the hydroxyl group-containing silicone rubber is usually subjected to hydrolysis and condensation reaction of dimethyldichlorosilane or dimethyldialkoxysilane in the presence of a hydrosilane compound such as dimethylhydrochlorosilane, methyldihydrochlorosilane or dimethylhydroalkoxysilane, for example, Subsequently, it can be obtained by performing fractionation by repeating dissolution-precipitation. Also ,
When the cyclic siloxane is anionically polymerized in the presence of a catalyst and the polymerization is terminated using a terminal stopper to obtain a polymer, reaction conditions (for example, the amount of the cyclic siloxane and the amount of the terminal stopper) are selected. It can be obtained by using dimethylhydrochlorosilane, methyldihydrochlorosilane or dimethylhydroalkoxysilane as a terminator. Here, examples of the catalyst include alkalis such as tetramethylammonium hydroxide and n-butylphosphonium hydroxide and silanolate solutions thereof, and the reaction temperature is, for example, 80 to 130 ° C.

The molecular weight (weight average molecular weight in terms of standard polystyrene) of the rubbery polymer is preferably 10,000 to 40,000. The molecular weight distribution index of the rubbery polymer component (the ratio of the weight average molecular weight in terms of standard polystyrene to the number average molecular weight in terms of standard polystyrene (hereinafter referred to as “Mw / Mn”))
Is preferably 2.0 or less from the viewpoint of the heat resistance of the obtained anisotropic conductive sheet.

Examples of the conductive magnetic particles include iron,
Known simple conductive metal particles such as copper, zinc, chromium, nickel, silver, cobalt, and aluminum, and alloy conductive metal particles composed of two or more of these metal elements can be exemplified. Among these, simple conductive metal particles such as nickel, iron, and copper are preferable in terms of economy and conductive characteristics, and particularly preferable are nickel particles whose surfaces are coated with gold. When silicone rubber is used as the curable fluid material and the curable fluid insulating material, the coverage of the conductive magnetic material particles with the silane coupling agent is preferably 5% or more, and more preferably. 7
-100%, more preferably 10-100%, particularly preferably 20-100%. The particle diameter of the conductive magnetic particles is preferably 1 to 1000 μm, more preferably 2 to 500 μm, more preferably 5 to 300 μm, and particularly preferably 10 to 200 μm. The particle size distribution (Dw / Dn) of the conductive magnetic particles is preferably 1 to 10, more preferably 1.01 to 7, and more preferably 1.0 to 1.0.
It is 5-5, particularly preferably 1.1-4. The water content of the conductive magnetic particles is preferably 5% or less, more preferably 3% or less, more preferably 2% or less, and particularly preferably 1% or less. According to the conductive magnetic particles having a particle diameter in such a range, sufficient electrical contact between the conductive magnetic particles can be obtained during use in the obtained anisotropic conductive sheet.

The shape of the conductive magnetic particles is not particularly limited, but is preferably spherical or star-shaped in view of the ease of dispersion in the above-mentioned components (a) and (b) or a mixture thereof. . The nickel particles whose surface is preferably coated with gold, which is particularly preferably used as the conductive magnetic particles in the present invention, are obtained by plating the surfaces of the nickel particles with gold by, for example, electroless plating. Thus, the nickel particles having a gold coating on the surface have extremely low contact resistance. When gold is coated by plating, the film thickness is preferably 1000 Å or more. The plating amount is preferably 1% by weight or more of the particles, more preferably 2 to 10%.
%, Particularly preferably 3 to 7% by weight.

The silicone rubber according to the present invention may contain an inorganic filler such as ordinary silica powder, colloidal silica, airgel silica, and alumina, if necessary. By including such an inorganic filler, the thixotropy at the time of uncuring is secured, the viscosity is increased, and the dispersion stability of the conductive magnetic particles is improved, and the strength of the elastomer after curing is improved. I do. The amount of the inorganic filler used is not particularly limited, but an excessively large amount is not preferable because the orientation of the conductive magnetic particles cannot be sufficiently achieved by the magnetic field. The viscosity of the composition for an anisotropic conductive sheet of the present invention is preferably in the range of 10,000 to 1,000,000 cp at a temperature of 25 ° C.

The composition for an anisotropic conductive sheet of the present invention comprises:
Crosslinking or condensation reaction is carried out to form an elastomer having high elasticity, and since the elastomer contains a specific conductive magnetic particle component, it functions as an anisotropic conductive sheet. The composition for an anisotropic conductive sheet of the present invention can use a curing catalyst for curing. Examples of such a curing catalyst include an organic peroxide, a fatty acid azo compound, a hydroxylation catalyst, and radiation. Benzoyl peroxide,
Bisdicyclobenzoyl peroxide, dicumyl peroxide, ditertiary butyl peroxide and the like can be mentioned. Examples of the fatty acid azo compound include azobisisobutyronitrile. Specific examples of the catalyst that can be used as a catalyst for the hydrosilylation reaction include chloroplatinic acid and salts thereof, a platinum-unsaturated group-containing siloxane complex, a complex of vinylsiloxane and platinum, and platinum and 1,3.
And known complexes such as a complex with divinyltetramethyldisiloxane, a complex of triorganophosphine or phosphite and platinum, a chelate of acetylacetonate platinum, and a complex of cyclic diene and platinum. The method of adding the curing catalyst is not particularly limited, but it is preferable that the curing agent be preliminarily mixed with the component (a), which is the main agent, from the viewpoints of storage stability and prevention of uneven distribution of the catalyst when mixing the components. It is preferable to use an appropriate amount of the curing catalyst in consideration of the balance between the actual curing speed and the pot life. Further, a hydrosilylation reaction control agent such as an amino group-containing siloxane or a hydroxy group-containing siloxane, which is usually used for controlling the curing rate and the pot life, can be used in combination.

[0023]

(First Embodiment) FIG. 1 is a schematic view showing a first embodiment of an apparatus for producing an anisotropic conductive sheet according to the present invention. While explaining the operation of the first embodiment of the apparatus for manufacturing an anisotropic conductive sheet according to the present invention, the principle structure of this apparatus will be described. A base sheet 38 is wound around the delivery roll 10 in a roll shape. Delivery sheet 10
Is sent to the silicone rubber print roll 16 first. A base sheet support roll 17 is arranged to face the silicone rubber print roll 16. Silicone rubber printing roll 1
While the base sheet 6 and the base sheet support roll 17 rotate in the direction of the arrow, and sandwich the base sheet 38, the base sheet 38 is sent out in the direction of the arrow A.

Above the silicone rubber print roll 16, a silicone rubber transfer roll 14 is disposed.
Rotate the silicone rubber transfer roll 14 in the direction of the arrow,
Liquid silicone rubber 12 is adhered to the cylindrical surface.
The silicone rubber 12 attached to the silicone rubber transfer roll 14 is transferred to a silicone rubber printing roll 16. The silicone rubber 12 transferred to the silicone rubber printing roll 16 is printed on a base sheet 38 and sent to a place where the curing heater 20 is arranged. Curing heater 2
At 0, the silicone rubber 12 is cured by heating to form an insulating sheet. In the place where the curing heater 20 is arranged, the conductive portion hole forming roll 18 and the underlying sheet support roll 19 are arranged so as to sandwich the underlying sheet 38. On the cylindrical surface of the conductive portion hole forming roll 18, a convex portion corresponding to the pattern of the conductive portion is provided.
8 rotates in the direction of the arrow, so that a hole corresponding to the pattern of the conductive portion is formed in the insulating sheet passing therethrough. The insulating sheet provided with a hole for the conduction portion is a paste printing roll 26 having a cylindrical shape as an example of a filling means.
Is sent to the place where is located. Paste print roll 26
While rotating the base sheet support roll 27 in the direction of the arrow and sandwiching the base sheet 38, the base sheet 38 on which the insulating sheet is printed is sent out in the direction of the arrow A.

A paste transfer roll 24 is disposed above the paste print roll 26. The paste transfer roll 24 is rotated in the direction of the arrow, and a paste 22 obtained by kneading nickel particles and silicone rubber, which is an example of a curable fluid material containing conductive magnetic particles, is adhered to the cylindrical surface. The paste 22 attached to the paste transfer roll 24 is transferred to the paste print roll 26, and the paste print roll 26 rotates in the direction of the arrow,
The paste 22 is printed on an insulating sheet, and the paste is put into a hole for forming a conductive portion. Then, the squeegee 28 scrapes off the paste other than the paste embedded in the holes of the insulating sheet.

Here, the process of forming a hole corresponding to the pattern of the conductive portion in the insulating sheet and applying the paste containing nickel particles to the hole is described in more detail in FIG.
This will be described with reference to FIG. On the cylindrical surface 18a of the conductive portion hole forming roll 18, a convex portion 15 corresponding to the pattern of the conductive portion is formed. When the conductive part hole forming roll 18 rotates in the direction of the arrow, the insulating sheet 36 printed on the base sheet 38 forms the hole 4 corresponding to the conductive part pattern.
0 is formed. Then, the insulating sheet 36 is sent to the paste print roll 26. The paste 22 adheres to the cylindrical surface of the paste print roll 26. The paste 22 is printed on the insulating sheet 36 by rotating the paste print roll 26 in the direction of the arrow, and the paste 22 is Enters. Then, the paste 22 attached to the surface of the insulating sheet 36 is scraped off by the squeegee 28, and the paste 22 is left only in the hole 40.

Referring again to FIG. 1, after the paste 22 is scraped off with the squeegee 28, the insulating sheet is sent to a place where the electromagnet 30 as an example of the first orientation means is arranged. The electromagnet 30 is composed of a pair of electromagnets, is disposed so as to face each other, and an insulating sheet passes between them. A magnetic field is applied to the paste embedded in the holes of the insulating sheet by the electromagnet 30 to orient nickel particles contained in the paste. Then, the paste is sent to a place where the curing heater 32 is arranged, and the paste is heated and cured in a state where the nickel particles in the paste are oriented. As described above, the anisotropic conductive sheet 42 is completed, and the anisotropic conductive sheet 42 is peeled off from the base sheet 38,
Is taken up by a take-up roll 34.

As described above, according to the first embodiment of the present invention, the insulating sheet is formed first, and the conductive portion is formed later, so that the insulating sheet and the conductive portion are formed separately. I have. Therefore, it is possible to prevent occurrence of insulation failure between the conductive portions of the anisotropic conductive sheet. Further, the first aspect of the present invention
In the example, from the step of printing the silicone rubber on the base sheet, the heating and curing of the paste are continuously performed to produce the anisotropic conductive sheet, so that the productivity of the anisotropic conductive sheet can be improved. It becomes possible.

(Second Embodiment) FIG. 3 is a schematic view of a second embodiment of the apparatus for manufacturing an anisotropic conductive sheet according to the present invention. Second embodiment of the apparatus for manufacturing an anisotropic conductive sheet according to the present invention
The principle structure of this device will be described while explaining the operation of the embodiment. A base sheet 74 is wound around the delivery roll 50 in a roll shape. The base sheet 74 is sent from the sending roll 50 in the direction of arrow A. Base sheet 74
Is first sent to a place where the paste print roll 56 is arranged. An electromagnet 58 is arranged so as to face the paste print roll 56, and the base sheet 74 advances in the direction of arrow A between the paste print roll 56 and the electromagnet 58. A paste transfer roll 54 is disposed above the paste print roll 56. By rotating the paste transfer roll 54 in the direction of the arrow, its cylindrical surface
A paste 52 in which nickel particles and silicone rubber are kneaded adheres. A concave portion corresponding to the pattern of the conductive portion is provided on the cylindrical surface of the paste print roll 56, and the paste 52 attached to the cylindrical surface of the paste transfer roll 54 is transferred to the concave portion of the paste print roll 56. Then, the paste 52 transferred to the concave portion of the paste print roll 56 is printed on the base sheet 74. The nickel particles in the paste 52 printed on the base sheet 74 are oriented by the electromagnet 58. The electromagnet 5
Reference numeral 8 serves to orient nickel particles contained in the paste 52, and also serves to pull out the paste 52 imprinted in the recess of the paste print roll 56 by magnetic force, thereby ensuring printing on the base sheet 74. .

Paste 52 printed on base sheet 74
Is sent to a place where the curing heater 60 is arranged, and is heated and cured in a state where the nickel particles contained in the paste 52 are oriented, thereby forming a conductive portion. The base sheet on which the conductive portions are printed is an example of a pattern sheet. The base sheet 74 on which the conductive portion is printed is sent to a place where a cylindrical silicone rubber print roll 66 as an example of an application unit is disposed. Silicone rubber printing roll 66
The base sheet support roll 67 is disposed so as to face the base sheet. The silicone rubber print roll 66 and the base sheet support roll 67 rotate in the direction of the arrow, sandwich the base sheet 74, and move the base sheet 74 in the direction of the arrow A. Send to Above the silicone rubber print roll 66, a silicone rubber transfer roll 64 is arranged. By rotating the silicone rubber transfer roll 64 in the direction of the arrow, a liquid silicone rubber 62, which is an example of a flowable insulating material that can be cured, is attached to the cylindrical surface. By rotating the silicone rubber transfer roll 64 to which the silicone rubber 62 has adhered in the direction of the arrow, the silicone rubber 62 is transferred to the cylindrical surface of the silicone rubber printing roll 66. Then, the silicone rubber print roll 66 to which the silicone rubber 62 has been transferred rotates in the direction of the arrow,
The silicone rubber 62 is printed on the base sheet 74 so as to fill the gap between the conductive portions. And by squeegee 68,
Scratch the silicone rubber printed on the conductive part.

Here, the steps from the formation of the conductive portion to the printing of the silicone rubber will be described in more detail with reference to FIG.
A concave portion 82 corresponding to the pattern of the conductive portion is formed on the cylindrical surface 56a of the paste print roll 56.
2, the paste 52 is transferred. The paste 52 transferred to the concave portions 82 is printed on a base sheet 74 and is subjected to magnetic field orientation and heat curing to form conductive portions 76. Then, the base sheet 74 to which the conductive portion 76 has adhered is
It is sent to a silicone rubber printing roll 66. On the cylindrical surface of the silicone rubber printing roll 66, a silicone rubber 62 is provided.
Is transferred, and the silicone rubber 62 is printed on the base sheet 74.

Referring again to FIG. 3, after scraping off excess silicone rubber with a squeegee 68, the base sheet 74 on which the silicone rubber is printed is sent to a place where a curing heater 70 is arranged. Then, the silicone rubber is heated and cured by the curing heater 70 to form an insulating sheet. Thus, the anisotropic conductive sheet 71 is completed. Then, the anisotropic conductive sheet 71 is peeled off from the base sheet 74, and the base sheet 74 is taken up by a take-up roll 72.

In the second embodiment of the present invention, the conductive portion is formed first on the base sheet, and the insulating sheet is formed later, whereby the insulating sheet and the conductive portion are formed separately. . Therefore, it is possible to prevent occurrence of insulation failure between the conductive portions of the anisotropic conductive sheet. The second aspect of the present invention
According to the embodiment, since the process of printing the paste on the base sheet and the formation of the insulating sheet are continuously performed to manufacture the anisotropic conductive sheet, the productivity of the anisotropic conductive sheet can be improved. It is possible.

(Third Embodiment) FIG. 5 is a schematic view of a third embodiment of the apparatus for manufacturing an anisotropic conductive sheet according to the present invention. Third Embodiment of the Anisotropic Conductive Sheet Manufacturing Apparatus According to the Present Invention
The principle structure of this device will be described while explaining the operation of the embodiment. The delivery roll 90 includes a base sheet 116.
Are wound in a roll. The base sheet 116 is delivered from the delivery roll 90 in the direction of arrow A. Base sheet 1
16 is first sent to a place where a cylindrical anisotropic conductive sheet printing roll 106 as an example of a material supporting member is arranged. Silicone rubber and nickel particles are transferred to the cylindrical surface of the anisotropic conductive sheet printing roll 106.
Silicone rubber is an example of a curable fluid insulating material, and nickel particles are an example of conductive magnetic particles. First, the transfer of silicone rubber will be described. A silicone rubber print roll 96 is arranged at the upper right of the anisotropic conductive sheet print roll 106 so as to be in contact with the anisotropic conductive sheet print roll 106. A silicone rubber transfer roll 94 is arranged on the right side of the silicone rubber print roll 96 so as to be in contact with the silicone rubber print roll 96. Silicone rubber transfer roll 94
Is rotated in the direction of the arrow, whereby the liquid silicone rubber 92 adheres to the cylindrical surface. The silicone rubber 92 attached to the silicone rubber transfer roll 94 is transferred to a silicone rubber printing roll 96. Then, the silicone rubber print roll 96 rotates in the direction of the arrow, and the transferred silicone rubber 92 is further transferred to the anisotropic conductive sheet print roll 106.

Next, the transfer of nickel particles will be described. On the upper left of the anisotropic conductive sheet printing roll 106,
To be in contact with the anisotropic conductive sheet printing roll 106,
An electrostatic drum 98, which is an example of a transfer unit, is provided. Around the electrostatic drum 98, a nickel particle supply unit 103 containing nickel particles 104, a charging unit 102, and a charge removing unit 100 are arranged. The charging unit 102 causes the electrostatic drum 9 to correspond to the pattern of the conduction unit.
8 is charged. When the electrostatic drum 98 is rotated in the direction of the arrow, the cylindrical surface of the electrostatic drum 98 charged in the pattern of the conductive portion is in contact with the nickel particle supply unit 1.
The nickel particles 104 are supplied to the electrostatic drum 98 from the nickel particle supply unit 103, and adhere to the charged cylindrical surface. Electrostatic drum 9
8 further rotates in the direction of the arrow, so that the nickel particles 10 on the cylindrical surface of the anisotropic conductive sheet printing roll 106.
Print 4. Since the silicone rubber 92 has already been printed on the cylindrical surface of the anisotropic conductive sheet printing roll 106, the nickel particles 104 are printed on the silicone rubber 92. The electrostatic drum 98 further rotates in the direction of the arrow, and the static elimination unit 100 eliminates static electricity remaining on the cylindrical surface. The operation of the electrostatic drum 98 will be described in more detail with reference to FIG. FIG. 6 is an enlarged schematic diagram of the electrostatic drum 98 and the anisotropic conductive sheet printing roll 106. At the position indicated by the contact portion 107, the charging portion 102 illustrated in FIG. As a result, the cylindrical surface of the electrostatic drum 98 is charged to correspond to the pattern of the conductive portion, and the charged pattern 109 is charged.
Is formed. At the position indicated by the contact portion 105, the nickel supply portion 103 illustrated in FIG. 5 contacts the cylindrical surface of the electrostatic drum 98. Then, nickel particles 104 are supplied from the nickel supply unit 103 to the cylindrical surface of the electrostatic drum 98, and the nickel particles 104 adhere to the charged pattern 109.
The electrostatic drum 98 further rotates in the direction of the arrow, and the anisotropic conductive sheet printing roll 10 on which the silicone rubber 92 is printed.
The nickel particles 104 are printed on the cylindrical surface of No. 6.

Referring again to FIG. 5, the anisotropic conductive sheet printing roll 106 rotates in the direction of the arrow to print the transferred pattern on the base sheet 116. The electromagnet 1 which is an example of a curing heater 110 and a second orientation unit so as to face the anisotropic conductive sheet printing roll 106
08 is arranged. Among the patterns printed on the base sheet 116, the silicone rubber 92 is heated and cured by the curing heater 110 to become an insulating sheet, and the nickel particles 104 are magnetically oriented by the electromagnet 108 and become conductive parts, thereby forming an anisotropic part. Conductive sheet 118
Is completed. The anisotropic conductive sheet 118 is the base sheet 11
6 and the base sheet 116 is
Wound by 14. After printing on the base sheet 116, the silicone rubber and nickel particles remaining on the cylindrical surface of the anisotropic conductive sheet printing roll 106 are:
It is scraped off by the squeegee 112.

Also in the third embodiment, since the insulating sheet and the conductive portion of the anisotropic conductive sheet are formed separately, it is possible to prevent the occurrence of insulation failure between the conductive portions of the anisotropic conductive sheet. Can be. Also, since the process of printing silicone rubber, the magnetic field orientation of nickel particles and the formation of an insulating sheet are continuously performed to produce an anisotropic conductive sheet,
It is possible to improve the productivity of the anisotropic conductive sheet.

[0038]

[Brief description of the drawings]

FIG. 1 is a schematic view of a first embodiment of an apparatus for producing an anisotropic conductive sheet according to the present invention.

FIG. 2 is an enlarged perspective view of a conductive portion hole forming roll and a paste printing roll of the apparatus for manufacturing an anisotropic conductive sheet shown in FIG.

FIG. 3 is a schematic view of a second embodiment of the apparatus for manufacturing an anisotropic conductive sheet according to the present invention.

4 is an enlarged perspective view of a paste printing roll and a silicone rubber printing roll of the apparatus for manufacturing an anisotropic conductive sheet shown in FIG.

FIG. 5 is a schematic view of a third embodiment of the apparatus for manufacturing an anisotropic conductive sheet according to the present invention.

6 is an enlarged perspective view of an electrostatic drum and an anisotropic conductive sheet printing roll of the apparatus for manufacturing an anisotropic conductive sheet shown in FIG.

FIG. 7 is a perspective view of an anisotropic conductive sheet.

FIG. 8 is a cross-sectional view of the anisotropic conductive sheet shown in FIG.

FIG. 9 is a schematic view for explaining a conventional method for producing an anisotropic conductive sheet.

FIG. 10 is a cross-sectional view of an anisotropic conductive sheet in which insulation failure between conductive portions has occurred.

[Explanation of symbols]

 12 Silicone Rubber 14 Silicone Rubber Transfer Roll 16 Silicone Rubber Print Roll 18 Conductive Hole Forming Roll 22 Paste 24 Paste Transfer Roll 26 Paste Print Roll 30 Electromagnet 42 Anisotropic Conductive Sheet 52 Paste 54 Paste Transfer Roll 56 Paste Print Roll 58 Electromagnet 62 Silicone rubber 64 Silicone rubber transfer roll 66 Silicone rubber print roll 71 Anisotropic conductive sheet 92 Silicone rubber 94 Silicone rubber transfer roll 96 Silicone rubber print roll 98 Electrostatic drum 100 Static elimination part 102 Charging part 104 Nickel particle 106 Anisotropic conductivity Sheet printing roll 108 Electromagnet 118 Anisotropic conductive sheet

Claims (5)

[Claims] 1. An anisotropic conductive sheet manufacturing apparatus, comprising: an insulating sheet; and a conductive portion locally formed on the insulating sheet and serving as an electrical contact, wherein the conductive portion is formed. Filling means for filling the hole with a curable fluid material containing the conductive magnetic material particles in the insulating sheet having the hole to be formed; and the conductive magnetic material in the hole. A first orienting means for orienting particles by a magnetic field to serve as the conducting portion; and a device for producing an anisotropic conductive sheet. 2. An anisotropic conductive sheet manufacturing apparatus, comprising: an insulating sheet; and a conductive portion locally formed on the insulating sheet and serving as an electrical contact, wherein the conductive portion is a sheet. On the pattern sheet patterned on the top and the conductive portion is detachably adhered from the sheet, the coating sheet is provided with a coating means for applying a curable fluid insulating material so that the conductive portion is exposed. An apparatus for manufacturing an anisotropic conductive sheet, comprising: 3. An apparatus for manufacturing an anisotropic conductive sheet, comprising: an insulating sheet; and a conductive portion locally formed on the insulating sheet and serving as an electrical contact, wherein the curable fluidity is A material supporting member onto which an insulating material is transferred; a transfer unit for attaching the conductive magnetic particles to the pattern of the conductive portion, and transferring the conductive magnetic particles to the material supporting member; 2. An anisotropic conductive sheet manufacturing apparatus, comprising: a second orientation unit that orients body particles by a magnetic field and serves as the conductive portion. 4. The anisotropic conductive member according to claim 3, wherein the transfer unit includes an electrostatic member charged to a pattern of the conductive portion and having the conductive magnetic particles adhered to form the pattern. Sheet manufacturing equipment. 5. A method of manufacturing an anisotropic conductive sheet comprising: an insulating sheet; and a conductive portion locally formed on the insulating sheet and serving as an electrical contact, the method comprising: A method for producing an anisotropic conductive sheet, wherein the forming and the forming of the conductive portion are performed in different steps.