JPH11256362A - Production of plate having metal faces with one face etched - Google Patents

Production of plate having metal faces with one face etched

Info

Publication number
JPH11256362A
JPH11256362A JP6372998A JP6372998A JPH11256362A JP H11256362 A JPH11256362 A JP H11256362A JP 6372998 A JP6372998 A JP 6372998A JP 6372998 A JP6372998 A JP 6372998A JP H11256362 A JPH11256362 A JP H11256362A
Authority
JP
Japan
Prior art keywords
laminated
etching
sheets
plates
copper foil
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Pending
Application number
JP6372998A
Other languages
Japanese (ja)
Inventor
Yutaka Mizuno
裕 水野
Shigeru Taguchi
茂 田口
Shunya Yokozawa
舜哉 横沢
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Showa Denko Materials Co Ltd
Original Assignee
Hitachi Chemical Co Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Hitachi Chemical Co Ltd filed Critical Hitachi Chemical Co Ltd
Priority to JP6372998A priority Critical patent/JPH11256362A/en
Publication of JPH11256362A publication Critical patent/JPH11256362A/en
Pending legal-status Critical Current

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  • Manufacturing Of Printed Circuit Boards (AREA)
  • ing And Chemical Polishing (AREA)

Abstract

PROBLEM TO BE SOLVED: To prevent warpage or curling caused in an etching process by laminating two plates each having metal faces on its surfaces with a thermoplastic resin layer into one body, etching the surfaces of the laminated body, and then dividing the laminated body into two plates. SOLUTION: For example, roughened surfaces of two sheets of electrolytic copper foil are subjected to release treatment, the roughened surfaces are faced to each other and laminated with a polyethylene film interposed, and further, the laminated sheets are inserted between two stainless plates, heated and pressed at a specified temp. and pressure for a specified time to produce a joined body of the two electrolytic copper foil sheets. Then photosensitive resist films are laminated on both surfaces of the joined body, which is then successively exposed, developed with a sodium carbonate aq. soln., etched with an etching liquid comprising copper (II) chloride and hydrochloric acid, and treated with a sodium hydroxide aq. soln. to remove the resist films. Finally, the joined body is divided into two sheets. Each separated electrolytic copper foil is in a normal state without warpage.

Description

【発明の詳細な説明】DETAILED DESCRIPTION OF THE INVENTION

【0001】[0001]

【発明の属する技術分野】本発明は、片面をエッチング
加工された金属面を有する板の製造方法に関するもので
ある。本発明は、両面銅張積層板の片面側にエッチング
による回路を形成し、他面は全面銅はく両面プリント配
線板を製造するときに有用である。なお、本発明におい
て、板とは、通常、「はく」といわれているような薄い
ものも含む。
BACKGROUND OF THE INVENTION 1. Field of the Invention The present invention relates to a method for manufacturing a plate having a metal surface having one surface etched. INDUSTRIAL APPLICABILITY The present invention is useful when a circuit is formed on one side of a double-sided copper-clad laminate by etching and the other side is entirely copper-coated and a double-sided printed wiring board is manufactured. In the present invention, the term “plate” also includes a thin plate which is generally called “foil”.

【0002】[0002]

【従来の技術】両面プリント配線板において、片面を接
地層としたり、放熱層としたりする目的から、片面のみ
をエッチングして回路を形成し、他の面に銅はくを全面
に残すことがある。また、装飾などの目的で、金属板の
片面側だけにエッチングを行うこともある。なお、本発
明において、金属はくのように薄いものも含めて板とい
う。
2. Description of the Related Art In a double-sided printed wiring board, it is necessary to form a circuit by etching only one side and leave copper foil on the other side for the purpose of using one side as a ground layer or a heat radiation layer. is there. In addition, etching may be performed only on one side of the metal plate for the purpose of decoration or the like. In the present invention, a plate including a thin metal foil is also referred to as a plate.

【0003】[0003]

【発明が解決しようとする課題】このような場合、エッ
チングしない面に保護層を形成して1枚ずつエッチング
するようにしている。ところが、板が薄くなると、エッ
チングにより加工した面と加工を施さない面と不均等と
なるため、エッチング終了後洗浄して乾燥する程度の加
熱でもそりやカールが発生することがあった。本発明
は、片面のみをエッチングする際に発生するそりやカー
ルを防止することを目的とするものである。
In such a case, a protective layer is formed on a surface which is not to be etched, and etching is performed one by one. However, when the thickness of the plate is reduced, the surface processed by etching and the surface not processed become uneven, so that warping or curling may occur even if the substrate is washed and dried after completion of etching. SUMMARY OF THE INVENTION It is an object of the present invention to prevent warpage and curl generated when only one side is etched.

【0004】[0004]

【課題を解決するための手段】本発明は、両面に金属面
を有する板2枚を、熱可塑性樹脂層を介して密着一体化
した2枚合わせ体とし、この2枚合わせ体の両表面にエ
ッチング加工を行い、その後2枚に分離することを特徴
とする、片面をエッチング加工された金属面を有する板
の製造方法である。
According to the present invention, two plates each having a metal surface on both sides are formed into a two-piece laminated body that is closely adhered and integrated via a thermoplastic resin layer. A method for producing a plate having a metal surface having one surface etched, characterized by performing etching and then separating into two pieces.

【0005】[0005]

【発明の実施の形態】両面に金属面を有する板2枚を、
熱可塑性樹脂層を介して密着一体化した2枚合わせ体と
する方法としては、両面に金属面を有する板2枚の間に
熱可塑性樹脂フィルムを挟み込み、加熱加圧する方法、
エッチングしない金属面に粘着フィルムを貼り付け、粘
着フィルムが2枚の板の間に位置するようにして重ね、
加熱加圧する方法、溶剤に溶解した熱可塑性樹脂をエッ
チングしない金属面に塗布して2枚の板を密着一体化さ
せる方法などが挙げられる。両面に金属面を有する板と
しては、両面銅張積層板、銅はく等が挙げられる。作業
性の点から、熱可塑性樹脂フィルムを挟み込み、加熱加
圧する方法が好ましい。加圧する方法としてはプレスに
よる方法、加圧ロールによる方法等いずれでも差し支え
ない。熱可塑性樹脂層の厚さは、10〜500μmでと
するが好ましく、30〜200μmとするのがより好ま
しい。10μm未満であると密着力が劣ってくる傾向に
あり、また、500μmを超える必要はなく、原価が高
くなる傾向にある。
DETAILED DESCRIPTION OF THE INVENTION Two plates having metal surfaces on both sides
As a method of forming a two-piece laminated body that is closely adhered and integrated via a thermoplastic resin layer, a method of sandwiching a thermoplastic resin film between two plates having metal surfaces on both sides, and heating and pressing,
Paste the adhesive film on the metal surface that is not to be etched, and place it so that the adhesive film is located between the two plates,
A method of applying heat and pressure, a method of applying a thermoplastic resin dissolved in a solvent to a metal surface to be etched and bringing the two plates into close contact and integration, and the like can be given. Examples of the plate having a metal surface on both sides include a double-sided copper-clad laminate, a copper foil and the like. From the viewpoint of workability, a method in which a thermoplastic resin film is sandwiched and heated and pressed is preferable. As a method of applying pressure, any of a method using a press, a method using a pressure roll, and the like may be used. The thickness of the thermoplastic resin layer is preferably from 10 to 500 μm, and more preferably from 30 to 200 μm. If it is less than 10 μm, the adhesion tends to be inferior, and it is not necessary to exceed 500 μm, and the cost tends to be high.

【0006】本発明で使用される熱可塑樹脂としては、
通常、融点が20〜250℃程度のものが使用できる
が、経済性、作業性、取扱性などの観点から、融点が5
0〜150℃のものが好ましい。具体的には、ポリオレ
フィン系樹脂、ポリスチレン系樹脂、ポリ系塩化ビニル
系樹脂、ポリ塩化ビニリデン系樹脂、ポリ酢酸ビニル系
樹脂、アクリル系樹脂、アクリルニトリル系樹脂、メタ
クリル酸エステル系樹脂、ポリアミド系樹脂、ポリエー
テル系樹脂、ポリエーテル系樹脂、フッ素系樹脂、ポリ
カーボネート系樹脂、ポリエステル系樹脂、ポリウレタ
ン系樹脂、ゴム系樹脂、ポリフェニレンオキサイド系樹
脂などが、単独品、変成品、混合品、複合品などとして
使用できる。エッチング終了後の分離作業を容易にする
ことから、金属面から剥がれやすく安価なポリエチレン
がもっとも好ましい材料である。エッチング終了後の分
離作業を容易にすることから、エッチングしない金属面
には離型処理を施しておくのが好ましい。
The thermoplastic resin used in the present invention includes:
Usually, a material having a melting point of about 20 to 250 ° C. can be used, but from the viewpoints of economy, workability, handleability, etc.
The thing of 0-150 ° C is preferred. Specifically, polyolefin resin, polystyrene resin, polyvinyl chloride resin, polyvinylidene chloride resin, polyvinyl acetate resin, acrylic resin, acrylonitrile resin, methacrylate resin, polyamide resin , Polyether-based resin, polyether-based resin, fluorine-based resin, polycarbonate-based resin, polyester-based resin, polyurethane-based resin, rubber-based resin, polyphenylene oxide-based resin, etc., alone, modified, mixed, composite, etc. Can be used as Inexpensive polyethylene, which is easy to peel off from the metal surface, is the most preferable material because it facilitates the separation operation after the completion of etching. In order to facilitate the separation operation after the end of the etching, it is preferable to perform a mold release treatment on the metal surface that is not etched.

【0007】[0007]

【実施例】実施例1 厚さ105μmの電解銅はく2枚を粗化面に離型処理を
施し、この粗化面を対向させ、かつ、その間に、ポリエ
チレンフィルム(厚さ100μm、融点95〜105
℃)を1枚挿んで重ね、これを2枚のステンレス板の間
に挿入して、温度130℃、圧力3MPaで10分間加
熱加圧して、電解銅はくの2枚合わせ体を作製した。作
製した電解銅はく2枚合わせ体の両面に感光性レジスト
フィルム(日立化成工業株式会社製、フォテック(商品
名)を使用、以下同じ)をラミネートし、両面の露光、
炭酸ナトリウム水溶液による現像、塩化第二銅と塩酸か
らなるエッチング液によるエッチング(エッチング深
さ:約50μm)、水酸化ナトリウム水溶液によるレジ
ストフィルム除去の工程をこの順に行い、最後に電解銅
はく2枚合わせ体を2枚に分離した。分離した電解銅は
くにはそりがなく正常であった。
EXAMPLE 1 Two pieces of electrolytic copper foil having a thickness of 105 μm were subjected to a mold release treatment on the roughened surface, and the roughened surfaces were opposed to each other, and a polyethylene film (thickness of 100 μm, melting point of 95 mm) was interposed therebetween. ~ 105
C) was inserted between two stainless steel plates, which were inserted between two stainless steel plates, and heated and pressed at a temperature of 130 ° C. and a pressure of 3 MPa for 10 minutes to produce a two-piece body of electrolytic copper foil. Photosensitive resist films (made by Hitachi Chemical Co., Ltd., using PHOTEC (trade name), the same applies hereinafter) are laminated on both sides of the prepared two-piece electrolytic copper foil, and both sides are exposed,
The steps of developing with an aqueous solution of sodium carbonate, etching with an etching solution containing cupric chloride and hydrochloric acid (etching depth: about 50 μm), and removing the resist film with an aqueous solution of sodium hydroxide are performed in this order. The combined product was separated into two pieces. The separated electrolytic copper was normal without warp.

【0008】実施例2 絶縁層の厚さ0.06mm、銅はく厚さ12μmのガラ
ス布基材エポキシ樹脂両面銅張積層板(日立化成工業株
式会社製、MCL−E−67(商品名)を使用)の片面
に離型処理を施し、この面にポリエチレン粘着フィルム
(片面粘着層、ベースフィルムの厚さ30μm、融点9
5〜105℃、日立化成工業株式会社製、ヒタレックス
フィルム(商品名)を使用)を貼り付けた。ポリエチレ
ン粘着フィルムを貼り付けた両面銅張積層板2枚をポリ
エチレン粘着フィルムが対向するようにして重ね、これ
を2枚のステンレス板の間に挿入して、温度130℃、
圧力3MPaで10分間加熱加圧して、両面銅張積層板
2枚合わせ体を作製した。両面銅張積層板2枚合わせ体
の両面に感光性レジストフィルムをラミネートし、両面
の露光、炭酸ナトリウム水溶液による現像、塩化第二銅
と塩酸からなるエッチング液によるエッチング(エッチ
ング深さ:12μm)、水酸化ナトリウム水溶液による
レジストフィルム除去の工程をこの順に行い、最後に両
面銅張積層板2枚合わせ体を2枚に分離した。両面銅張
積層板にはそりがなく正常であった。
Example 2 An epoxy resin double-sided copper-clad laminate of 0.06 mm in thickness of an insulating layer and 12 μm of copper foil (MCL-E-67 (trade name) manufactured by Hitachi Chemical Co., Ltd.) On one side of the film, a polyethylene adhesive film (one-sided adhesive layer, base film thickness 30 μm, melting point 9)
At 5 to 105 ° C, Hitachi Chemical Co., Ltd., Hitalex film (trade name) was used. Two double-sided copper-clad laminates on which a polyethylene pressure-sensitive adhesive film is adhered are overlapped so that the polyethylene pressure-sensitive adhesive film faces each other, and this is inserted between the two stainless steel plates at a temperature of 130 ° C.
It was heated and pressed at a pressure of 3 MPa for 10 minutes to produce a double-sided copper-clad laminate. Laminating a photosensitive resist film on both sides of the two-sided copper-clad laminate, exposing both sides, developing with an aqueous solution of sodium carbonate, etching with an etching solution containing cupric chloride and hydrochloric acid (etching depth: 12 μm), The steps of removing the resist film using an aqueous sodium hydroxide solution were performed in this order, and finally, the double-sided copper-clad laminate was separated into two sheets. The double-sided copper-clad laminate was normal without warpage.

【0009】比較例1 実施例1で使用した電解銅はくの両面に感光性レジスト
フィルムをラミネートし、平滑面のみに露光し、炭酸ナ
トリウム水溶液による現像、塩化第二銅と塩酸からなる
エッチング液によるエッチング(エッチング深さ:約5
0μm)、水酸化ナトリウム水溶液によるレジストフィ
ルム除去の工程をこの順に行った。電解銅はく100枚
中8枚にカールが発生した。
Comparative Example 1 A photosensitive resist film was laminated on both sides of the electrolytic copper foil used in Example 1, exposed only on the smooth surface, developed with an aqueous solution of sodium carbonate, and an etching solution composed of cupric chloride and hydrochloric acid. Etching (etching depth: about 5
0 μm), and a step of removing the resist film with an aqueous sodium hydroxide solution was performed in this order. Eight out of 100 electrolytic copper foils were curled.

【0010】比較例2 実施例2で使用した両面銅張積層板の両面に感光性レジ
ストフィルムをラミネートし、平滑面のみ露光、炭酸ナ
トリウム水溶液による現像、塩化第二銅と塩酸からなる
エッチング液によるエッチング(エッチング深さ:12
μm)、水酸化ナトリウム水溶液によるレジストフィル
ム除去の工程をこの順に行った。両面銅張積層板のそり
をJIS C−6481のつりさげ法により測定した。
その結果、そりは、10%であった。
Comparative Example 2 A photosensitive resist film was laminated on both surfaces of the double-sided copper-clad laminate used in Example 2, exposed only on the smooth surface, developed with an aqueous solution of sodium carbonate, and etched with an etching solution containing cupric chloride and hydrochloric acid. Etching (etching depth: 12
μm), the step of removing the resist film with an aqueous sodium hydroxide solution was performed in this order. The warpage of the double-sided copper-clad laminate was measured by the hanging method of JIS C-6481.
As a result, the warpage was 10%.

【0011】[0011]

【発明の効果】本発明によれば、片面をエッチング加工
され、両面に金属面を有する板を製造するとき、エッチ
ング加工された面とエッチング加工されない面の不均等
によるそりやカールを解消することができる。
According to the present invention, when manufacturing a plate having one surface etched and a metal surface on both surfaces, it is possible to eliminate warpage and curl due to unevenness of the etched surface and the non-etched surface. Can be.

Claims (1)

【特許請求の範囲】[Claims] 【請求項1】 両面に金属面を有する板2枚を、熱可塑
性樹脂層を介して密着一体化した2枚合わせ体とし、こ
の2枚合わせ体の両表面にエッチング加工を行い、その
後2枚に分離することを特徴とする、片面をエッチング
加工された金属面を有する板の製造方法。
1. A two-piece laminated body in which two plates having metal surfaces on both sides are tightly integrated with a thermoplastic resin layer interposed therebetween, and both surfaces of the two-piece laminated body are subjected to an etching process. A method for producing a plate having a metal surface with one surface etched.
JP6372998A 1998-03-13 1998-03-13 Production of plate having metal faces with one face etched Pending JPH11256362A (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP6372998A JPH11256362A (en) 1998-03-13 1998-03-13 Production of plate having metal faces with one face etched

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP6372998A JPH11256362A (en) 1998-03-13 1998-03-13 Production of plate having metal faces with one face etched

Publications (1)

Publication Number Publication Date
JPH11256362A true JPH11256362A (en) 1999-09-21

Family

ID=13237794

Family Applications (1)

Application Number Title Priority Date Filing Date
JP6372998A Pending JPH11256362A (en) 1998-03-13 1998-03-13 Production of plate having metal faces with one face etched

Country Status (1)

Country Link
JP (1) JPH11256362A (en)

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2009253219A (en) * 2008-04-10 2009-10-29 Denka Agsp Kk Method of manufacturing wiring board

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2009253219A (en) * 2008-04-10 2009-10-29 Denka Agsp Kk Method of manufacturing wiring board

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