JPH11248419A5 - - Google Patents
Info
- Publication number
- JPH11248419A5 JPH11248419A5 JP1998073148A JP7314898A JPH11248419A5 JP H11248419 A5 JPH11248419 A5 JP H11248419A5 JP 1998073148 A JP1998073148 A JP 1998073148A JP 7314898 A JP7314898 A JP 7314898A JP H11248419 A5 JPH11248419 A5 JP H11248419A5
- Authority
- JP
- Japan
- Prior art keywords
- light
- interferometer
- measurement
- photoelectric detector
- mask
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP10073148A JPH11248419A (ja) | 1998-03-06 | 1998-03-06 | 干渉計及びそれを備えた露光装置 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP10073148A JPH11248419A (ja) | 1998-03-06 | 1998-03-06 | 干渉計及びそれを備えた露光装置 |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| JPH11248419A JPH11248419A (ja) | 1999-09-17 |
| JPH11248419A5 true JPH11248419A5 (enExample) | 2005-10-20 |
Family
ID=13509827
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP10073148A Pending JPH11248419A (ja) | 1998-03-06 | 1998-03-06 | 干渉計及びそれを備えた露光装置 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPH11248419A (enExample) |
Families Citing this family (6)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPWO2004012245A1 (ja) * | 2002-07-31 | 2005-11-24 | 株式会社ニコン | 位置計測方法、位置制御方法、露光方法及び露光装置、並びにデバイス製造方法 |
| JP4609257B2 (ja) * | 2005-09-16 | 2011-01-12 | パナソニック株式会社 | 界面の位置測定方法及び位置測定装置 |
| JP5370106B2 (ja) * | 2009-11-30 | 2013-12-18 | 株式会社ニコン | 干渉計システム、ステージ装置及び露光装置 |
| JP5787483B2 (ja) * | 2010-01-16 | 2015-09-30 | キヤノン株式会社 | 計測装置及び露光装置 |
| CN102374844A (zh) * | 2010-08-20 | 2012-03-14 | 上海微电子装备有限公司 | 一种测量工件台垂向位置的装置 |
| NL2018737A (en) * | 2016-05-09 | 2017-11-15 | Asml Netherlands Bv | Position measurement system, calibration method, lithographic apparatus and device manufacturing method |
-
1998
- 1998-03-06 JP JP10073148A patent/JPH11248419A/ja active Pending
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