JPH11248419A - 干渉計及びそれを備えた露光装置 - Google Patents

干渉計及びそれを備えた露光装置

Info

Publication number
JPH11248419A
JPH11248419A JP10073148A JP7314898A JPH11248419A JP H11248419 A JPH11248419 A JP H11248419A JP 10073148 A JP10073148 A JP 10073148A JP 7314898 A JP7314898 A JP 7314898A JP H11248419 A JPH11248419 A JP H11248419A
Authority
JP
Japan
Prior art keywords
light
interferometer
measurement
photoelectric detector
aberration
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Pending
Application number
JP10073148A
Other languages
English (en)
Japanese (ja)
Other versions
JPH11248419A5 (enExample
Inventor
Masahiro Nakagawa
正弘 中川
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Nikon Corp
Original Assignee
Nikon Corp
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Nikon Corp filed Critical Nikon Corp
Priority to JP10073148A priority Critical patent/JPH11248419A/ja
Publication of JPH11248419A publication Critical patent/JPH11248419A/ja
Publication of JPH11248419A5 publication Critical patent/JPH11248419A5/ja
Pending legal-status Critical Current

Links

Landscapes

  • Exposure Of Semiconductors, Excluding Electron Or Ion Beam Exposure (AREA)
  • Instruments For Measurement Of Length By Optical Means (AREA)
  • Length Measuring Devices By Optical Means (AREA)
  • Exposure And Positioning Against Photoresist Photosensitive Materials (AREA)
JP10073148A 1998-03-06 1998-03-06 干渉計及びそれを備えた露光装置 Pending JPH11248419A (ja)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP10073148A JPH11248419A (ja) 1998-03-06 1998-03-06 干渉計及びそれを備えた露光装置

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP10073148A JPH11248419A (ja) 1998-03-06 1998-03-06 干渉計及びそれを備えた露光装置

Publications (2)

Publication Number Publication Date
JPH11248419A true JPH11248419A (ja) 1999-09-17
JPH11248419A5 JPH11248419A5 (enExample) 2005-10-20

Family

ID=13509827

Family Applications (1)

Application Number Title Priority Date Filing Date
JP10073148A Pending JPH11248419A (ja) 1998-03-06 1998-03-06 干渉計及びそれを備えた露光装置

Country Status (1)

Country Link
JP (1) JPH11248419A (enExample)

Cited By (6)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
WO2004012245A1 (ja) * 2002-07-31 2004-02-05 Nikon Corporation 位置計測方法、位置制御方法、露光方法及び露光装置、並びにデバイス製造方法
JP2007078605A (ja) * 2005-09-16 2007-03-29 Matsushita Electric Ind Co Ltd 界面の位置測定方法及び位置測定装置
JP2011119303A (ja) * 2009-11-30 2011-06-16 Nikon Corp 干渉計システム、ステージ装置及び露光装置
JP2011145232A (ja) * 2010-01-16 2011-07-28 Canon Inc 計測装置及び露光装置
CN102374844A (zh) * 2010-08-20 2012-03-14 上海微电子装备有限公司 一种测量工件台垂向位置的装置
JP2019516133A (ja) * 2016-05-09 2019-06-13 エーエスエムエル ネザーランズ ビー．ブイ． 位置測定システム、較正方法、リソグラフィ装置及びデバイス製造方法

Cited By (6)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
WO2004012245A1 (ja) * 2002-07-31 2004-02-05 Nikon Corporation 位置計測方法、位置制御方法、露光方法及び露光装置、並びにデバイス製造方法
JP2007078605A (ja) * 2005-09-16 2007-03-29 Matsushita Electric Ind Co Ltd 界面の位置測定方法及び位置測定装置
JP2011119303A (ja) * 2009-11-30 2011-06-16 Nikon Corp 干渉計システム、ステージ装置及び露光装置
JP2011145232A (ja) * 2010-01-16 2011-07-28 Canon Inc 計測装置及び露光装置
CN102374844A (zh) * 2010-08-20 2012-03-14 上海微电子装备有限公司 一种测量工件台垂向位置的装置
JP2019516133A (ja) * 2016-05-09 2019-06-13 エーエスエムエル ネザーランズ ビー．ブイ． 位置測定システム、較正方法、リソグラフィ装置及びデバイス製造方法

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