JPH11245497A - Method for forming pattern and patterned substrate - Google Patents

Abstract

PROBLEM TO BE SOLVED: To form fine patterns of enameled pottery, fluorescent display devices, gas discharge panels, printed wirings, hybrid integrated circuits, etc., thick and finely to substrates by using an intaglio and filling different kinds of ink in the intaglio by screen printing. SOLUTION: A screen printing plate having patterns of the same shape is used to print an ink 20 to an intaglio 10. Similarly, different kinds of ink 20 are printed, thereby forming a design. A fluorescent ink pattern of red, blue and green is filled in the intaglio 10. The intaglio 10 is united with an intermediate transfer body 30 having a melting adhesive 40 applied on a surface, heated and pressured under a reduced pressure thereby being bonded. After cooled, the intermediate transfer body 30 is separated from the intaglio 10. An ink 50 is further printed and applied to the whole pattern on the ink 20, etc., on the transfer body 30, on which an adhesive 80 of a thermosetting resin is printed and applied. The transfer body is united with a substrate 70 and, an electrode pattern 60 is registered at a predetermined position and heated and bonded. Thereafter, the transfer body 30 is separated from the substrate 70 after heated. so that the ink 20, etc., are transferred to the substrate 70.

Description

DETAILED DESCRIPTION OF THE INVENTION

[0001]

BACKGROUND OF THE INVENTION 1. Field of the Invention The present invention relates to a method of forming a fine pattern for producing electronic industrial parts such as a ceramic element, a fluorescent display device, a gas discharge panel, a printed wiring board, and a resistance element in a hybrid integrated circuit. A method of forming a fine pattern for forming a thick film pattern such as an electrode or a barrier rib in a plasma display or a plasma addressed liquid crystal which is required to have a large area and a high definition at the same time, which relates to a substrate on which a pattern is formed, and It relates to a substrate on which a pattern is formed.

[0002]

2. Description of the Related Art The so-called casting method and molding method are widely used in many industrial fields, and the screen printing method is the same, and is widely used in the graphic printing and electronics fields.

For example, a screen printing method is used to form a thick film pattern such as a barrier rib in a plasma display or a plasma addressed liquid crystal display, and a pattern is formed by repeating the application of a photosensitive paste, followed by drying and exposure. It has also been done.
Further, there is a method using a photosensitive sheet, that is, a green sheet, instead of the photosensitive paste. There is also a method in which a photosensitive dry film on a substrate is preliminarily formed into a pattern, and a paste is embedded in a concave portion of the pattern to obtain a desired paste pattern.

The characteristics required for these patterns include:
It is fine and the pattern thickness is about 100 μm or more, especially the pattern width is narrow and the pattern thickness is thick, etc., and the pattern-formed paste is baked at high temperature to fuse with the glass substrate or powder It is desirable to deposit on a glass substrate.

[0005] The recent application of screen printing to the electronics industry, especially in the process of manufacturing plasma display panels and plasma addressed liquid crystal displays, involves printing fine electrode patterns and barrier rib pastes on large-area glass substrates. Advanced printing technology with In forming an electrode pattern and a barrier rib pattern, these multiple times of printing are repeated and then fired to obtain a desired pattern. In the formation of the phosphor, a paste containing the phosphor is poured into the formed ribs by a screen printing method, and the paste is baked.

However, the conventional screen printing method has the following disadvantages. At least 2 for electrode paste
In the printing of the barrier rib pattern, many steps such as printing six to several tens of times are required, and the pattern is distorted or disconnected due to a variation in the printing position accuracy or a defect due to dust or the like. . In other words, the screen printing method basically has a tendency to generate a defect, and performing the printing overlapping means repeating the uncertain processing, and due to these, a sufficient yield cannot be secured. In.

In forming the phosphor pattern, screen printing is performed once for each color of RGB, and a phosphor paste is poured between the barrier rib patterns, and dried for each printing. However, when forming the barrier rib pattern, there is a manufacturing process of baking, and the glass substrate having a large area slightly shrinks. On the other hand, in screen printing, a deviation between the plate and the print pattern, that is, distortion of the print pattern occurs, and cannot be completely prevented. The distortion and the shrinkage result in a value exceeding a manufacturing tolerance in manufacturing a fine pattern of a plasma display panel or a plasma addressed liquid crystal display. That is, color unevenness and color shift are defective. Although such distortion and the shrinkage are predicted in advance, a method of scaling a screen printing plate or an original plate, that is, producing and using a plate whose dimensions are corrected is also used, but it is still impossible to obtain a perfect pattern match. .

On the other hand, in the method of forming a pattern by repeating the application, drying and exposure using a photosensitive paste, a problem arises in that the number of production facilities and processing steps is increased and the productivity is low due to the repetition of a large number of times. . In this method, it has been studied to increase the thickness of the paste applied at one time in order to reduce repetition. However, there is a basic defect that scattered light from the exposed portion wraps around the portion that should be an unexposed portion at the time of exposure, causing the pattern of the exposed portion to become fat. Therefore, a fine pattern cannot be easily obtained when these exposed laminates are developed.

A method using a photosensitive sheet, that is, a green sheet, is the same as described above.

The method of forming a pattern on a photosensitive dry film on a substrate in advance and embedding a paste in a concave portion of the pattern to obtain a desired paste pattern has a drawback of using a relatively expensive dry film. In addition, when embedding the paste in the concave portions of the pattern, bubbles are easily mixed into the paste, which often causes defects in the pattern, and a step of removing the paste applied on the dry film is also necessary. It is not easy to remove. Further, it is not easy to remove the dry film without destroying the paste pattern.

In addition to these electronic industrial parts, several methods are used for painting ceramics and the like. A method of directly applying a glaze containing a coloring pigment with a brush, painting a water-soluble transfer paper or the like in advance on a flexible paper by screen printing or offset method, pasting the transfer paper on a calcined ceramic, etc. There is a method of firing and forming at a high temperature. However, with the method of direct application with a brush, fine painting can be partially performed, but it is impossible to completely apply a large painting to a predetermined position, and mass production is also impossible. In addition, in the transfer method, painting can be performed with considerable accuracy, and mass production is also possible. However, the method of forming transfer paper, that is, the screen printing method has a limit of forming a line width of about 100 μm, and the thickness of the painting is about 20 μm before baking, and the painting must be thicker. Is impossible. In addition, in the method of forming the transfer paper by using the offset printing method, fine painting can be performed by devising, for example, increasing the pigment concentration with a thin print film thickness. However, the thickness of the painting is thinner than the method using transfer paper formed by the screen printing method, so that a deep painting is impossible.

[0012]

SUMMARY OF THE INVENTION The present invention has been made in view of the above-mentioned problems, and includes painting of ceramics, fluorescent display devices, gas discharge panels, printed wiring boards, hybrid integrated circuits, and the like. It is an object of the present invention to provide a method for forming a fine and fine pattern on a substrate or the like in a method for forming a fine pattern for producing an electronic industrial component such as a resistance element.

[0013]

SUMMARY OF THE INVENTION In order to solve the above-mentioned problems, the present invention is directed to the invention of claim 1, wherein a ceramic painting, a fluorescent display device, a gas discharge panel, a printed wiring board, a hybrid integrated circuit are provided. And the like. In the method of forming a fine pattern in the above method, an intaglio plate is used, and the intaglio plate is filled with a different type of ink by a screen printing method.

According to the second aspect of the present invention, a step of using an intaglio, filling the intaglio with ink by a screen printing method, a step of transferring the intaglio ink to an intermediate transfer member after the ink is cured, A step of applying an adhesive to a body or a substrate, a step of bonding an intermediate transfer body to the substrate as a formation target via the adhesive, and a step of peeling off the intermediate transfer body. ,

According to a third aspect of the present invention, in the step of using an intaglio and filling the intaglio with ink by screen printing, different types of ink are filled in the intaglio. A pattern forming method according to claim 2.

According to a fourth aspect of the present invention, there is provided the pattern forming method according to the second aspect, wherein an ink obtained by kneading a silicone resin or a general-purpose resin with an extender for pattern formation is used as the ink. It is what it was.

According to a fifth aspect of the present invention, in the step of transferring the ink to the intermediate transfer member after the ink of the intaglio has been cured, a hot-melt adhesive is applied to the intaglio or the intermediate transfer member. 3. The pattern forming method according to claim 2, wherein the pattern is transferred to an intermediate transfer member by a molten adhesive.

Further, in the invention according to claim 6, in the step of applying an adhesive to the intermediate transfer member or the substrate, a thermosetting resin obtained by kneading an extender with the adhesive is used. Forming method.

According to a seventh aspect of the present invention, an intaglio is used, and the intaglio is filled with an ink obtained by kneading a silicone resin or a general-purpose resin and a pattern-forming extender by a screen printing method. After the ink has been cured, a hot-melt adhesive is applied to the intaglio or intermediate transfer body, and the hot-melt adhesive is used to transfer to the intermediate transfer body. A step of applying an adhesive using a method, a step of bonding an intermediate transfer body to the substrate as a formation target via the adhesive, a step of heating the intermediate transfer body and the substrate, and peeling off the intermediate transfer body. A pattern forming method.

Further, according to the invention of claim 8, there is provided a substrate on which a fine pattern is formed, and the pattern is formed on the substrate via an adhesive using a thermosetting resin kneaded with an extender pigment. This pattern is a substrate on which a pattern is formed, which is made of an ink obtained by kneading a silicone resin or a general-purpose resin and an extender for forming a pattern.

[0021]

Embodiments of the present invention will be described below in detail. The pattern forming method of the present invention is characterized in that the intaglio is filled with ink or the like by a screen printing method and cured, and by using a large number of screen printing plates or inks, a multicolor ink pattern is formed on the intaglio. Can be formed. That is, by repeatedly filling a color ink in a part of the intaglio with the screen ink by a screen printing method and filling another part of the intaglio with a color ink different from this ink, a color-coded pattern can be formed on the intaglio. The inks and the like may be used alone or in combination with a general-purpose resin such as a silicone resin, polystyrene, or epoxy.If necessary, a medium diluted with an appropriate solvent may be mixed with a phosphor, a coloring pigment, a low-melting glass, or the like. It is preferable that the resin can be cured quickly after printing and does not crack.

The pattern forming method of the present invention is characterized in that the ink or the like filled in the intaglio is cured and then transferred. First, a hot-melt resin, a so-called hot melt adhesive, is applied to the intermediate transfer body, and the intermediate transfer body is laminated with a hot roll while pressing the applied surface against the intaglio. In this case, a stainless plate or an invar plate can be used as the intermediate transfer member, and the intermediate transfer member can be laminated while applying a hot-melt resin. It is also possible to use a flat press instead of a hot roll. When the intermediate transfer member adhered by these methods is peeled off from the intaglio, the ink adheres to the hot-melt resin, peels off from the intaglio, and transfers to the intermediate transfer member. In this case, the ink is different from common printing,
All of the ink in the intaglio can be transferred.

The pattern forming method of the present invention is characterized in that an adhesive obtained by kneading an extender is applied to the intermediate transfer member and transferred. A coloring pigment, a low-melting glass, or the like can be kneaded with a resin such as epoxy or silicone that cures at heating or at room temperature as an adhesive. The intermediate transfer body and a substrate such as glass as a pattern forming body are bonded together by a flat press machine or a roll laminating press machine to cure the adhesive. Further, when the intermediate transfer member is heated to a temperature higher than the melting temperature of the hot melt adhesive, the intermediate transfer member can be easily peeled off from a substrate such as glass. By firing the resulting substrate or the like at a high temperature, fine patterns such as pottery painting and electronic industrial parts can be formed.

According to the method of the present invention, a thick pattern having a fine pattern, that is, a width of about 50 μm, and a pattern height, that is, a thickness of ink or the like of about 150 μm, can be formed. In addition, the pattern can be arbitrarily color-coded, and a fine pattern comparable to a general color print can be formed on a glass substrate or the like.

According to the method of the present invention, a fine pattern can be formed because the intaglio printing and the screen printing method are used for pattern formation. Dimensional changes due to intermediate temperatures can be prevented, and accurate painting can be performed. Further, by firing these painted substrates at a high temperature, it becomes possible to accurately form ceramic painting, a fluorescent display device, and a substrate for a gas discharge panel.

[0026]

<Embodiment 1> A process for forming a pattern according to the present invention is shown in FIG. FIG. 1 (a) is a cross-sectional view of an intaglio plate, having a depth of 200 μm, a top width of 50 μm, and a width of 800 × 600 m.
900 × 75 size with m stripe pattern
It is an intaglio of 0 × 4.5 mm. As a material for the plate, a resin such as polycarbonate or acrylic, preferably a 42 alloy having the same coefficient of thermal expansion as that of the glass substrate is used. Alternatively, an intaglio in which these resins are formed into a film on the surface of a 42 alloy and the above-mentioned stripe pattern is disposed on the surface of the resin may be used.

The ink 20 is screen-printed on the intaglio 10 shown in FIG. 1A by using a screen printing plate having a pattern of the same shape corresponding to a part of the pattern of the intaglio. It is preferable to apply a release agent; Daifree GA6310 manufactured by Daikin Industries, Ltd. to the surface of the intaglio 10 before screen printing. Further, a different type of ink 21 or the like is printed on the intaglio using the same method to form a picture. The ink used here can be prepared by mixing a phosphor emitting light by ultraviolet rays with a silicone resin or the like. In addition, by selecting the type of phosphor, an ink for forming a phosphor pattern of each color of red, blue and green can be manufactured. Further, instead of the silicone resin, a resin such as acryl, urethane, polystyrene, epoxy or the like or an appropriate solvent can be added thereto, and an addition polymerization type silicone resin is preferable. For example, a mixture of 50 parts of TSE3450 manufactured by Toshiba Silicone Co., Ltd. and 50 parts of phosphor powder is preferable.

FIG. 1B shows a state in which the intaglio 10 is filled with these three color phosphor ink patterns. Further, the pattern may be printed by a screen printing method so as to overlap the top 11 of the intaglio pattern. It is preferable that this ink becomes a glass melt after firing and turns black. A metal oxide pigment containing copper iron chromium or the like as a component of the ink,
It can be manufactured by mixing the powder of the low melting point glass and the above-mentioned resin.

The intaglio plate 10 is brought into contact with the intermediate transfer body 30 shown in FIG. 1C, and the two are pressurized and heated under reduced pressure. A hot-melt adhesive 40 of an adhesive layer is applied and formed on the surface of the intermediate transfer member 30, and the ink 20 and the like and the intermediate transfer member 30 are heated and heated under pressure.
Glue through 0. The intermediate transfer member 30 can be made of 42 alloy or Invar. When a soda glass substrate is used for the transfer object, it is preferable to use 42 alloy, and the plate thickness is 0.1 to 0.5 mm. The thickness which can be bent in the range of is preferable.

The bonded intermediate transfer member 30 is peeled off from the intaglio 10. That is, the intermediate transfer body 30 is peeled off while being bent from the corner of the surface to which the intermediate transfer body 30 is bonded. Then, an ink pattern can be formed on the intermediate transfer body 30 shown in FIG.

Further, an ink 50 is printed and applied to the entire pattern such as the ink 20 on the intermediate transfer member 30 by a screen printing method. This ink 50 is composed of 5 to 10 parts of a white metal oxide pigment such as titanium oxide, and 8 to 8 of a low melting glass powder.
0 to 40 parts of a medium portion of a curable resin such as silicone, epoxy acrylate, urethane acrylate, etc., which are sufficiently filled in the concave portions corresponding to the convex portions of the intaglio plate 10. After heating and curing the film of the ink 50, the same ink may be further applied by a screen printing method to form a film. Further, when an adhesive 80 of a thermosetting resin is printed and applied on the film of the ink 50 by a clean printing method, FIG.
(E). The adhesive 80 is made of low melting glass powder 4
0 to 80 parts, 2 to 2 parts of metal oxide pigment such as alumina
0 parts, 20 to 60 parts of epoxy resin. As this epoxy resin, Bisphenol A type Epicoat 828 or Bisphenol F type Epicoat 807 manufactured by Yuka Shell Epoxy Co., Ltd. can be used, and those having a low viscosity are preferable. Also, a resin to which a reactive diluent has been added can be used. Further, a curing agent is added to the adhesive immediately before use in screen printing. As the curing agent, a curing agent capable of securing the required working time by screen printing can be used. In the case of Epomate B-002, an amine-based curing agent manufactured by Yuka Shell Epoxy, 100 parts of epoxy resin is cured. 40 to 60 parts of agent are used.

The intermediate transfer body 30 on which the ink 50 and the adhesive 80 are formed and the glass substrate 70 face each other.
The pattern of the ink 20 on the substrate 0 and the electrode pattern 60 formed in advance on the glass substrate 70 are heat-pressed in accordance with a predetermined position. The film of the ink 50 is cured while being adhered to the glass substrate 70 by the adhesive 80, and the intermediate transfer body 30 and the glass substrate 70 are adhered to each other, as shown in FIG. For this heat compression bonding, a vacuum flat press machine with an alignment device is suitable, but it is also possible to temporarily fix the intermediate transfer body 30 and the glass substrate 70 at the time of alignment, press them with a roll press machine, and then heat them.

FIG. 1 (g) shows a diagram in which the intermediate transfer member 30 is peeled off from the glass substrate 70. By heating the hot-melt adhesive 40 on the intermediate transfer member 30, the adhesive force is extremely weakened, and the film of the hot-melt adhesive 40 splits while being attached to both the ink 20 and the like and the 42-alloy intermediate transfer member 30, The intermediate transfer body 30 can be peeled off from the glass substrate 70, and as a result, the ink 20 and the like are transferred to the glass substrate 70.

FIG. 2 shows that the glass substrate 70 is
The result of baking at ℃ is shown. While the electrode pattern 60 and the dielectric 62 previously formed on the glass substrate 70 remain as they are, a glass melted and solidified at a predetermined position with respect to the electrode pattern 60 is formed as a barrier rib 64, during which red, green and blue light is emitted. The phosphor layers are formed separately.
The shape of the barrier rib is 170 μm in depth and 45 mm in width at the top.
It is a stripe pattern having a width of 800 μm and a width of 800 × 600 mm. With these, a barrier rib and a phosphor could be formed, and the respective patterns were fine and there was no misalignment between them, and a pattern suitable for a back substrate in a plasma display was obtained.

[0035]

According to the pattern forming method of the present invention, it is possible to provide a method of forming a thick and fine pattern on a glass substrate or the like, and the ratio of the width and thickness of the obtained pattern is extremely large. No need to repeat the process of
By simultaneously forming the phosphor layer and the barrier rib layer, the substrate can be fired only once, which can contribute to an improvement in productivity.

[Brief description of the drawings]

FIGS. 1A to 1G are explanatory views showing cross sections showing steps of a pattern forming method of the present invention.

FIG. 2 is a cross-sectional view of a back substrate of a gas discharge panel manufactured by a method according to an embodiment of the present invention.

[Explanation of symbols]

 10 Intaglio 11 Top of pattern 20 Ink 21 Ink 22 Ink 30 Intermediate transfer 40 Adhesive (hot melt) 50 Ink 60 Electrode pattern 62 Dielectric Body 64 ‥‥ Barrier rib 70 ‥‥ (Glass with electrodes) Substrate 80 ‥‥ (Thermosetting) Adhesive

 ────────────────────────────────────────────────── ─── Continued on the front page (72) Inventor Ryuichi Nakamura 1-5-1, Taito, Taito-ku, Tokyo Letterpress Printing Co., Ltd.

Claims (8)

[Claims] 1. A method for forming a fine pattern in ceramic painting, a fluorescent display device, a gas discharge panel, a printed wiring board, a hybrid integrated circuit, etc., wherein an intaglio is used, and different types of intaglio are used. A pattern forming method characterized by filling the ink by a screen printing method. 2. A step of using an intaglio plate and filling the intaglio plate with ink by a screen printing method, a step of curing the intaglio ink and transferring it to an intermediate transfer member, and a step of applying an adhesive to the intermediate transfer member or substrate. A pattern forming method, comprising: a step of bonding an intermediate transfer member to a substrate as a formation target via the adhesive; and a step of peeling off the intermediate transfer member. 3. The pattern forming method according to claim 2, wherein in the step of using the intaglio and filling the ink with the intaglio by a screen printing method, different types of ink are filled in the intaglio. 4. The pattern forming method according to claim 2, wherein an ink obtained by kneading a silicone resin or a general-purpose resin with an extender for pattern formation is used as the ink. 5. In the step of transferring to the intermediate transfer member after the ink of the intaglio has been cured, a hot-melt adhesive is applied to the intaglio or the intermediate transfer member, and transferred to the intermediate transfer member by the hot-melt adhesive. 3. The pattern forming method according to claim 2, wherein: 6. The pattern forming method according to claim 2, wherein in the step of applying an adhesive to the intermediate transfer member or the substrate, a thermosetting resin obtained by kneading an extender with the adhesive is used. 7. A step of using an intaglio, filling the intaglio with an ink obtained by kneading a silicone resin or a general-purpose resin and an extender for forming a pattern by a screen printing method. After the intaglio ink is cured, the intaglio or intermediate A step of applying a hot-melt adhesive to the transfer body and transferring the hot-melt adhesive to an intermediate transfer body, a step of applying an adhesive using a thermosetting resin obtained by kneading an extender to the intermediate transfer body or the substrate, A method for forming a pattern, comprising: a step of bonding an intermediate transfer member to a substrate, which is an object, via the adhesive, a step of heating the intermediate transfer member and the substrate and the like, and peeling off the intermediate transfer member. 8. A substrate on which a fine pattern is formed, wherein a pattern is formed on the substrate via an adhesive using a thermosetting resin kneaded with an extender pigment, and the pattern is formed of a silicone resin or A pattern-formed substrate comprising an ink obtained by kneading a general-purpose resin and an extender for forming a pattern.