JPH11231019A - Ic positioning device - Google Patents

Ic positioning device

Info

Publication number
JPH11231019A
JPH11231019A JP10031006A JP3100698A JPH11231019A JP H11231019 A JPH11231019 A JP H11231019A JP 10031006 A JP10031006 A JP 10031006A JP 3100698 A JP3100698 A JP 3100698A JP H11231019 A JPH11231019 A JP H11231019A
Authority
JP
Japan
Prior art keywords
positioning device
guide
ics
mounting portion
tray
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Withdrawn
Application number
JP10031006A
Other languages
Japanese (ja)
Inventor
Shigeyuki Hisatomi
茂幸 久富
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Advantest Corp
Original Assignee
Advantest Corp
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Advantest Corp filed Critical Advantest Corp
Priority to JP10031006A priority Critical patent/JPH11231019A/en
Publication of JPH11231019A publication Critical patent/JPH11231019A/en
Withdrawn legal-status Critical Current

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  • Control Of Position Or Direction (AREA)
  • Testing Of Individual Semiconductor Devices (AREA)
  • Tests Of Electronic Circuits (AREA)

Abstract

PROBLEM TO BE SOLVED: To provide an IC positioning device which can execute positioning of ICs of a plurality of different shapes and dimensions by common members having shapes corresponding to the shapes of the IC. SOLUTION: This IC positioning device is provided with an IC loading part 11 projected from a base plate face 12A, and IC guides 13 movably arranged opposite to the four sides of the IC loading part 11. The IC guide 13 is provided with a slotted hole 13C extending in the direction perpendicular to the each opposed side of the IC loading part, a screw 14 is inserted through the slotted hole 13C, and the IC guide 13 is fastened and fixed with the base plate face 12A by the screw 14. By freely selecting the fixed positions so as to constitute the positioning device of ICs having a variety of different dimensions.

Description

【発明の詳細な説明】DETAILED DESCRIPTION OF THE INVENTION

【0001】[0001]

【発明の属する技術分野】この発明は例えばIC試験装
置の分野で利用することができるIC位置決装置に関す
る。
[0001] 1. Field of the Invention [0002] The present invention relates to an IC positioning device which can be used, for example, in the field of an IC test device.

【0002】[0002]

【従来の技術】図6にIC試験装置の一例を示す。この
IC試験装置はベースとなる架台1の一辺側1Aに沿っ
てICを格納するためのトレイ群2が配置される。トレ
イ群2Aはローダ部に積み重ねられて配置されたトレイ
群を示す。ローダ部に積み重ねられて配置されたトレイ
群2Aにはこれから試験しようとするICが格納されて
いる。
2. Description of the Related Art FIG. 6 shows an example of an IC test apparatus. In this IC test apparatus, a tray group 2 for storing ICs is arranged along one side 1A of a base 1 serving as a base. The tray group 2A indicates a tray group stacked and arranged on the loader unit. The ICs to be tested are stored in the tray group 2A stacked on the loader unit.

【0003】トレイ群2Aの最上段のトレイからX−Y
搬送アーム3が真空吸着ヘッドによりICを1個ずつ搬
出し、位置決装置4でICの位置を規定してソークステ
ージと呼ばれるターンテーブル5に搬送する。ターンテ
ーブル5にはICを受け取るために、正方形の4辺が上
向きの傾斜面で囲まれたIC収納部6が等角間隔に形成
され、ターンテーブル5が例えば図の例では時計廻り方
向にIC収納部6の配列ピッチずつ回動するごとに、X
−Y搬送アーム3は各IC収納部6にICを1個ずつ落
とし込む。
[0003] XY from the uppermost tray of the tray group 2A
The transfer arm 3 carries out the ICs one by one by a vacuum suction head, defines the position of the IC by a positioning device 4, and transfers the IC to a turntable 5 called a soak stage. In order to receive the IC, the turntable 5 is formed with equiangular intervals at four sides of a square surrounded by upwardly inclined surfaces. The turntable 5 is, for example, clockwise in the example shown in FIG. Each time the storage unit 6 rotates by the arrangement pitch, X
-The Y transfer arm 3 drops one IC into each IC storage part 6 one by one.

【0004】7はターンテーブル5で運ばれて来たIC
をテスト部8に送り込むコンタクトアームを示す。コン
タクトアーム7はターンテーブル5に設けた各IC収納
部6からICを1個ずつ吸着して取り出し、そのICを
テスト部8に搬送する。コンタクトアーム7は3つのア
ームを有し、その3つのアームを回転して順次ICをテ
スト部8に送り込む動作と、テスト部8でテストが終了
したICを出口側の搬送アーム9に引き渡す動作を行
う。なお、ターンテーブル5とコンタクトアーム7及び
テスト部8はチャンバ10内に収納され、チャンバ10
内が高温または低温の適当な温度に制御され、被試験I
Cに熱ストレスを加えることができる構造とされる。
[0004] 7 is an IC carried on the turntable 5
Shows a contact arm for sending the contact arm to the test section 8. The contact arm 7 picks up ICs one by one from each IC storage section 6 provided on the turntable 5 and takes out the ICs, and transports the ICs to the test section 8. The contact arm 7 has three arms, and performs an operation of rotating the three arms to sequentially send ICs to the test unit 8 and an operation of delivering the ICs that have been tested by the test unit 8 to the transfer arm 9 on the exit side. Do. The turntable 5, the contact arm 7, and the test section 8 are housed in the chamber 10,
Is controlled to a suitable high or low temperature.
The structure is such that heat stress can be applied to C.

【0005】出口側の搬送アーム9によって取り出され
たICは、試験の結果に応じてX−Y搬送アーム11に
よってトレイ群2C,2D,2Eのいずれかに分別され
て格納される。例えば不良のICはトレイ群2Eのトレ
イに格納し、良品のICはトレイ群2Dのトレイに格納
し、再試験が必要なICはトレイ群2Cのトレイに格納
する。これらの分別はキャリアアーム10が行う。な
お、トレイ群2Bはローダ部で空になったトレイを収納
するバッファ部に積み重ねられた空のトレイ群を示す。
この空のトレイ群はトレイ群2C,2D,2Eに積み重
ねられたトレイの最上段のトレイが満杯になると、その
トレイ群の上に運ばれてICの格納に利用される。
[0005] The IC taken out by the transfer arm 9 on the exit side is sorted and stored by the XY transfer arm 11 into one of the tray groups 2C, 2D and 2E according to the result of the test. For example, defective ICs are stored in the trays of the tray group 2E, non-defective ICs are stored in the trays of the tray group 2D, and ICs requiring retesting are stored in the trays of the tray group 2C. These separations are performed by the carrier arm 10. Note that the tray group 2B indicates an empty tray group stacked in the buffer unit that stores the empty tray in the loader unit.
When the uppermost tray of the trays stacked in the tray groups 2C, 2D, and 2E becomes full, the empty tray group is carried on the tray group and used for storing ICs.

【0006】ところで、この種のIC試験装置では上述
したようにトレイ群2Aからターンテーブル5の上に形
成したIC収納部6にICを搬入する前に、ICを位置
決装置4によってICの位置を規定し、位置を規定した
状態でターンテーブル5に設けたIC収納部6にICを
搬入している。位置決装置4を設ける理由は以下の如く
である。
By the way, in this type of IC testing apparatus, before the IC is carried from the tray group 2A into the IC storage section 6 formed on the turntable 5 as described above, the position of the IC is determined by the positioning device 4. The IC is loaded into the IC storage section 6 provided on the turntable 5 in a state where the position is defined. The reason for providing the positioning device 4 is as follows.

【0007】トレイ群2Aに積まれているトレイはIC
製造会社の社内でICを流通させるためのトレイとして
用いられる。このため、トレイ内の各IC収納部分の形
状は各ICの形状に対してかなり余裕を持たせて仕切等
が形成される。このためX−Y搬送アーム3に装着され
ている真空吸着ヘッドがトレイに格納されているICを
吸着しても、そのICは真空吸着ヘッドに対して所定の
関係に吸着されていない場合が多い。つまりICの平面
上における中心と真空吸着ヘッドの軸芯とが一致して吸
着されていない率が多い。この状態のままターンテーブ
ル5上のIC収納部6にICを搬送してしまうと、IC
を正確にIC収納部6の中に落とし込めない事故が起こ
る可能性が高い。
The tray stacked on the tray group 2A is an IC
It is used as a tray for distributing ICs in the manufacturing company. For this reason, the shape of each IC storage portion in the tray is formed with a sufficient margin for the shape of each IC to form a partition or the like. Therefore, even if the vacuum suction head mounted on the XY transfer arm 3 suctions the IC stored in the tray, the IC is often not suctioned in a predetermined relationship with the vacuum suction head. . That is, there is a high rate that the center on the plane of the IC and the axis of the vacuum suction head are not aligned and sucked. If the IC is transported to the IC storage section 6 on the turntable 5 in this state, the IC
There is a high possibility that an accident that cannot be accurately dropped into the IC storage section 6 will occur.

【0008】このために、トレイから取り上げたICを
一旦位置決装置4に落し込み、この位置決装置4でIC
の位置を規定して再び真空吸着ヘッドで吸着し直し、I
Cの中心と真空吸着ヘッドの軸芯とを一致させた状態で
ターンテーブル5上のIC収納部6にICを搬送してい
る。
For this purpose, the IC picked up from the tray is dropped into the positioning device 4 once, and the IC
, And re-adsorb by the vacuum suction head again.
The IC is transported to the IC storage section 6 on the turntable 5 in a state where the center of C and the axis of the vacuum suction head are aligned.

【0009】[0009]

【発明が解決しようとする課題】上述したように、位置
決装置4ではICの位置を正確に位置決するため、IC
の品種毎に形状が合致した位置決装置を用意している。
図7及び図8に従来のIC位置決装置4の一例を示す。
図7は平面図、図8は図7に示したB−B線上の断面図
を示す。図7に示す平面図ではICを省略して示し、図
8ではICをIC載置部に載置した状態を示している。
つまり従来のIC位置決装置は中央に四角形のIC載置
部11を有し、このIC載置部11を取囲んで溝12が
形成される。溝12の外側にIC載置部11より上方に
突出したICガイド13が形成される。ICガイド13
はIC載置部11の高さの位置(搭載されたICの端子
の位置)では溝12の底面12Aから垂直に切り立つ垂
直面とされ、この垂直面13Aの位置によってICの端
子の位置を規定する。
As described above, the positioning device 4 uses an IC to accurately determine the position of the IC.
We have prepared positioning devices that match the shape of each product type.
7 and 8 show an example of a conventional IC positioning device 4.
FIG. 7 is a plan view, and FIG. 8 is a cross-sectional view taken along line BB shown in FIG. In the plan view shown in FIG. 7, the IC is omitted, and in FIG. 8, the IC is mounted on the IC mounting portion.
That is, the conventional IC positioning device has a square IC mounting portion 11 at the center, and a groove 12 is formed around the IC mounting portion 11. An IC guide 13 protruding above the IC mounting portion 11 is formed outside the groove 12. IC guide 13
Is a vertical surface which stands perpendicularly from the bottom surface 12A of the groove 12 at the height of the IC mounting portion 11 (position of the mounted IC terminal), and the position of the IC terminal is defined by the position of the vertical surface 13A. I do.

【0010】垂直面13Aの上側には外向に拡がる傾斜
面13Bを有し、この傾斜面13Bによって上から落さ
れたICの端子をガイドし、ICを所定の位置にガイド
してIC載置部11にICを搭載し、位置決めを行な
う。従来のIC位置決装置は図8に示すように金属ブロ
ック等で一体に形成する構造のため、例えばICの端子
の長さLが異なるか、或はICのパッケージ部分の寸法
が異なるICを位置決するには位置決装置の全部を交換
しなければならない。
On the upper side of the vertical surface 13A, there is provided an inclined surface 13B which spreads outward. The inclined surface 13B guides the terminal of the IC dropped from above, guides the IC to a predetermined position, and places the IC mounting portion. The IC is mounted on 11 and positioning is performed. As shown in FIG. 8, the conventional IC positioning device has a structure integrally formed of a metal block or the like, so that, for example, ICs having different lengths L of the terminals of the ICs or different sizes of IC package portions are located. In order to decide, all of the positioning devices must be replaced.

【0011】このようにICの品種毎にICの形状に合
致するように交換する部品を一般にチェンジキットと呼
んでいる。チェンジキットは位置決装置4だけに限らず
他の部分にも多用されている。従ってICの品種毎に多
くの数のチェンジキットを用意しなければならないため
利用者にとって経済的な負担が大きい。また新種のIC
が製造された場合、この新種のICを試験するにはチェ
ンジキットを予め用意しておかなくてはならない。また
用意が遅れた場合はチェンジキットが完成するまで試験
を行なうことができない不都合も生じる。
[0011] The parts to be exchanged so as to conform to the shape of the IC for each type of IC are generally called a change kit. The change kit is frequently used not only for the positioning device 4 but also for other parts. Accordingly, a large number of change kits must be prepared for each type of IC, which places a large economic burden on the user. Also a new kind of IC
In order to test this new type of IC, a change kit must be prepared in advance. In addition, if the preparation is delayed, there is a disadvantage that the test cannot be performed until the change kit is completed.

【0012】この発明の目的は、ICの形状に対して自
由度を有し、必要に応じて調整を加えることによって所
望の形状のICに対して正確に位置決を行なうことかで
きるIC位置決装置を提供しようとするものである。
SUMMARY OF THE INVENTION An object of the present invention is to provide an IC positioning device which has a degree of freedom with respect to the shape of an IC and which can perform accurate positioning for an IC having a desired shape by making adjustments as necessary. It is intended to provide a device.

【0013】[0013]

【課題を解決するための手段】この発明では位置決すべ
きICを載置するIC載置部と、このIC載置部を取囲
んで形成された溝と、この溝を取囲んでIC載置部より
上方に突出し、上方に向う程漸次外拡がりの傾斜面を持
つICガイドとを具備して構成されるIC位置決装置に
おいて、ICガイドをIC載置部に対して進退自在に移
動できるように構成し、IC載置部に載置されるICの
端子の長さに対応してICガイドの位置を決定し、固定
可能としたIC位置決装置を提案する。
According to the present invention, there is provided an IC mounting portion for mounting an IC to be positioned, a groove formed surrounding the IC mounting portion, and an IC mounting portion surrounding the groove. And an IC guide having an IC guide having a sloping surface that gradually projects outward as it goes upward from the section, so that the IC guide can be moved forward and backward with respect to the IC mounting section. The present invention proposes an IC positioning device that determines the position of the IC guide according to the length of the terminal of the IC mounted on the IC mounting portion and is capable of fixing the IC guide.

【0014】従って、この発明によるIC位置決装置に
よれば、ICガイドの位置を自由に変更し固定すること
ができるから端子の長さが各種異なるICに対しても位
置決装置を構成することができる。この結果、形状が異
なるICに対しても同一の位置決装置によって位置決を
実行することができるため、形状が異なるICの品種が
多くても、各ICの品種毎にチェンジキットを用意しな
くて済むため経済的な負担を軽減することができる。ま
た新しい品種が製造された場合でも、この発明によれば
必要に応じてICガイドの位置を調整すれば直ちに試験
を開始させることができる利点が得られる。
Therefore, according to the IC positioning device of the present invention, the position of the IC guide can be freely changed and fixed, so that the positioning device can be configured for ICs having various terminal lengths. Can be. As a result, the same positioning device can perform positioning for ICs having different shapes. Therefore, even if there are many types of ICs having different shapes, it is not necessary to prepare a change kit for each type of IC. Economic burden can be reduced. Further, according to the present invention, even when a new product is manufactured, the test can be started immediately by adjusting the position of the IC guide as needed.

【0015】[0015]

【発明の実施の形態】図1にこの発明の一実施例を示
す。図7及び図8と対応する部分には同一符号を付して
示す。図中10はこの発明によるIC位置決装置の全体
を示す。11はIC載置部、12はこのIC載置部11
の周囲に形成した溝、13はこの溝12の外側に配置し
たICガイド、13Aは溝12を形成する垂直面、13
BはICガイド13に形成した外拡がりの傾斜面をそれ
ぞれ示す。
FIG. 1 shows an embodiment of the present invention. 7 and 8 are denoted by the same reference numerals. In the drawing, reference numeral 10 denotes the whole IC positioning device according to the present invention. 11 is an IC mounting part, and 12 is this IC mounting part 11.
, 13 are IC guides arranged outside the groove 12, 13A is a vertical surface forming the groove 12, 13
B indicates an outwardly extending inclined surface formed on the IC guide 13.

【0016】この発明ではICガイド13をIC載置部
11に対して進退自在に移動できるように構成する。こ
のためには例えば溝12の底面12Aを基板面とし、こ
の基板面12Aの上に金属ブロックによって構成したI
Cガイド13を装着する。この実施例で用いるICガイ
ド13は平面形状が対向するIC載置部11の辺と平行
する方向に長辺方向を持つ長方形とされ、この長方形の
短辺方向に長孔13Cを形成する。この長孔13Cにネ
ジ14を挿通し、このネジ14を基板面12Aに形成し
たネジ孔にネジ込み、ネジ14を基板面12Aに向って
締付ることによりICガイド13を基板面12Aに固定
することができネジ14を緩めてICガイド13を長孔
13Cの方向に移動させることによりIC載置部11と
ICガイド13との間の間隙を自由に設定することがで
きる。
In the present invention, the IC guide 13 is configured to be able to move forward and backward with respect to the IC mounting portion 11. For this purpose, for example, the bottom surface 12A of the groove 12 is used as a substrate surface, and an I
The C guide 13 is mounted. The IC guide 13 used in this embodiment is a rectangle having a long side direction in a direction parallel to the side of the IC mounting portion 11 whose planar shape is opposed to each other, and forms a long hole 13C in a short side direction of the rectangle. A screw 14 is inserted through the elongated hole 13C, and the screw 14 is screwed into a screw hole formed on the substrate surface 12A. The IC guide 13 is fixed to the substrate surface 12A by tightening the screw 14 toward the substrate surface 12A. By loosening the screw 14 and moving the IC guide 13 in the direction of the long hole 13C, the gap between the IC mounting portion 11 and the IC guide 13 can be set freely.

【0017】従って、各ICの品種毎に図3及び図4に
示す治具15を用意する。この治具15はIC載置部1
1と係合する凹部15Aと、この凹部15Aを取囲んで
ICの端子の長さL(図8参照)と同じ幅を持つ突堤1
5Bを具備する。この治具15を図4に示すようにIC
載置部11に被せ、治具15の周縁にICガイド13の
前端を押し当て、その位置でネジ14を締付ることによ
りその治具15の突堤15Bの寸法Lで決まる端子の長
さを持つICのIC位置決装置として設定することがで
きる。
Accordingly, a jig 15 shown in FIGS. 3 and 4 is prepared for each type of IC. This jig 15 is used for the IC mounting portion 1.
1 and a ridge 1 surrounding the recess 15A and having the same width as the length L of an IC terminal (see FIG. 8).
5B. This jig 15 is mounted on an IC as shown in FIG.
The terminal length determined by the dimension L of the jetty 15B of the jig 15 is set on the mounting portion 11 by pressing the front end of the IC guide 13 against the periphery of the jig 15 and tightening the screw 14 at that position. It can be set as an IC positioning device for the IC that it has.

【0018】[0018]

【発明の効果】以上説明したように、この発明によれば
IC載置部11を取囲んで配置されるICガイド13を
移動できる構成とし、更にこのICガイド13を任意の
位置で固定できる構造としたから、ICガイド13とI
C載置部11との間の間隙を自由に設定することができ
る。よって端子の長さが各種異なるICに対しても自由
にIC位置決装置として設定することができ、チェンジ
キットの数を減らすことができる利点が得られる。
As described above, according to the present invention, the IC guide 13 arranged so as to surround the IC mounting portion 11 can be moved, and the IC guide 13 can be fixed at an arbitrary position. The IC guide 13 and I
The gap with the C mounting part 11 can be set freely. Therefore, it is possible to freely set as an IC positioning device even for ICs having various terminal lengths, thereby obtaining an advantage that the number of change kits can be reduced.

【図面の簡単な説明】[Brief description of the drawings]

【図1】この発明の一実施例を示す断面図。FIG. 1 is a sectional view showing one embodiment of the present invention.

【図2】図1に示した実施例の平面図。FIG. 2 is a plan view of the embodiment shown in FIG.

【図3】この発明に用いる治具の一例を示す平面図。FIG. 3 is a plan view showing an example of a jig used in the present invention.

【図4】図3に示すA−A線上の断面図。FIG. 4 is a sectional view taken along line AA shown in FIG. 3;

【図5】図3及び図4に示した治具を用いてIC位置決
装置の設定を行なう方法を説明するための断面図。
FIG. 5 is a sectional view for explaining a method of setting an IC positioning device using the jig shown in FIGS. 3 and 4;

【図6】この発明によるIC位置決装置を適用できるI
C試験装置の一例を説明するための断面図。
FIG. 6 shows an I to which the IC positioning device according to the present invention can be applied;
Sectional drawing for demonstrating an example of a C test apparatus.

【図7】従来のIC位置決装置の構造を説明するための
平面図。
FIG. 7 is a plan view for explaining the structure of a conventional IC positioning device.

【図8】図6に示すB−B線上の断面図。FIG. 8 is a sectional view taken along line BB shown in FIG. 6;

【符号の説明】[Explanation of symbols]

11 IC載置部 12 溝 12A 基板面 13 ICガイド 13A 傾斜面 13B 長孔 14 ネジ 15 治具 15A 凹部 15B 突堤 DESCRIPTION OF SYMBOLS 11 IC mounting part 12 Groove 12A Substrate surface 13 IC guide 13A Inclined surface 13B Slot 14 Screw 15 Jig 15A Recess 15B Jetty

Claims (1)

【特許請求の範囲】[Claims] 【請求項1】 位置決すべきICを載置するIC載置部
と、このIC載置部を取囲んで形成された溝と、この溝
の外周を取囲んで上記IC載置部より上方に突出し、上
部に向う程漸次外拡がりの傾斜面を持つICガイドとを
具備して構成されるIC位置決装置において、 上記ICガイドを上記IC載置部に対して進退自在に移
動できるように構成し、上記IC載置部に載置されるI
Cの端子の長さに対応して上記ICガイドの位置を決定
し、固定可能としたことを特徴とするIC位置決装置。
An IC mounting portion for mounting an IC to be positioned, a groove formed surrounding the IC mounting portion, and an upper portion surrounding the outer periphery of the groove and above the IC mounting portion. An IC positioning device comprising: an IC guide having an inclined surface that protrudes and gradually widens outwardly toward the upper part, wherein the IC guide is configured to be able to move freely with respect to the IC mounting portion. Then, the I mounted on the IC mounting portion is
An IC positioning device characterized in that the position of the IC guide is determined according to the length of the terminal C and can be fixed.
JP10031006A 1998-02-13 1998-02-13 Ic positioning device Withdrawn JPH11231019A (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP10031006A JPH11231019A (en) 1998-02-13 1998-02-13 Ic positioning device

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP10031006A JPH11231019A (en) 1998-02-13 1998-02-13 Ic positioning device

Publications (1)

Publication Number Publication Date
JPH11231019A true JPH11231019A (en) 1999-08-27

Family

ID=12319489

Family Applications (1)

Application Number Title Priority Date Filing Date
JP10031006A Withdrawn JPH11231019A (en) 1998-02-13 1998-02-13 Ic positioning device

Country Status (1)

Country Link
JP (1) JPH11231019A (en)

Cited By (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
WO2007007416A1 (en) * 2005-07-08 2007-01-18 Tohoku Seiki Industries, Ltd. Device aligning table and handler provided with such device aligning table
JP2008185481A (en) * 2007-01-30 2008-08-14 Renesas Technology Corp Manufacturing method of semiconductor device
JP2011191068A (en) * 2010-03-11 2011-09-29 Shinano Electronics:Kk Conveyance device of ic device

Cited By (6)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
WO2007007416A1 (en) * 2005-07-08 2007-01-18 Tohoku Seiki Industries, Ltd. Device aligning table and handler provided with such device aligning table
US8093853B2 (en) 2005-07-08 2012-01-10 Tohoku Seiki Industries, Ltd. Device-positioning pedestal and handler having the device-positioning pedestal
KR101131900B1 (en) 2005-07-08 2012-04-03 도호쿠 세이키 고교 가부시키카이샤 Device aligning table and handler provided with such device aligning table
TWI417558B (en) * 2005-07-08 2013-12-01 Tohoku Seiki Ind Ltd A device support, and a handler including the device support
JP2008185481A (en) * 2007-01-30 2008-08-14 Renesas Technology Corp Manufacturing method of semiconductor device
JP2011191068A (en) * 2010-03-11 2011-09-29 Shinano Electronics:Kk Conveyance device of ic device

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