JPH11197577A - Coater - Google Patents

Abstract

PROBLEM TO BE SOLVED: To change the position to stop the opening of a valve element in the coater with the volume of a coating soln. passage increased when the valve element is closed and to fix the stop position with high precision by providing the valve element in the middle of the coating soln. passage with a slit discharge port formed at its end. SOLUTION: A wide coating soln. passage 23 is formed in a die main body 17, a discharge port 23a is formed at the end of the passage 23, a part of the passage 23 is formed between the main body 17 and a movable valve element 18 extended over the whole width of the passage 23, a valve seat 32 where the valve element 18 is separated from or attached to the main body 17 is extended over the whole width of the passage 23, the valve element 18 is so arranged that the volume of the passage 23C on the downstream side of the valve seat 32 is increased as the valve is closed, and a driving device 19 for reciprocating the valve element 18 between the valve opening stopping. position and valve closing stopping position is provided to constitute the coater. Further, the driving device 19 is provided with a stop position adjuster 34 for changing the valve opening stopping position of the valve element 18.

Description

DETAILED DESCRIPTION OF THE INVENTION

[0001]

BACKGROUND OF THE INVENTION 1. Field of the Invention The present invention relates to a method for intermittently discharging a coating liquid from an elongated discharge port toward a base material. The present invention relates to an improvement of a coating apparatus capable of reliably running out of a working liquid.

[0002]

2. Description of the Related Art As a coating apparatus for ensuring the running out of liquid when coating is stopped, a patent application of the present applicant (Japanese Patent Application No. Hei 8-2158) is available.
No. 53). This coating device 71
As shown in FIGS. 11 and 12, the base material transport path 72 is formed at the end of the coating liquid path 85 formed inside the die body 74.
An elongated (slit-shaped) discharge port 86 is formed to face the fixed part of the die body 74 and the movable valve body 8 provided in the die body 74.
0, a part of the coating liquid passage 85 is formed, and a discharge port 86 is formed by a front end edge 74a of a fixed portion of the die body 74 and a front end edge 80a-1 of the movable valve body 80. A valve seat 81 on which the valve body 80 is detached and seated is provided along a transverse direction of the coating liquid passage 85 at a portion of the fixed portion of the main body 74 facing the coating liquid passage 85. As the coating fluid moves from the valve opening stop position (see FIG. 11) for opening the passage 85 for the coating fluid to the valve closing stop position (see FIG. 12) for closing the passage 85 for the coating fluid, the coating fluid downstream of the valve seat 81 is moved. The valve body 80 is arranged so as to increase the volume of the passage 85c, and a valve body driving device 88 for moving the valve body 80 between a valve opening stop position and a valve closing stop position is provided.

[0003] The coating device 71 comprises a valve body driving device 88.
When the valve body 80 is moved to the valve opening stop position, the coating liquid passage 85 is opened to discharge the coating liquid from the discharge port 86 toward the base material W, and the coating film C is formed on the surface of the base material W. Conversely, when the valve element 80 is promptly moved to the valve closing stop position by the valve element driving device 88, the coating liquid passage 85 is closed and the coating liquid downstream of the valve seat 81 is coated. Liquid passage 85c
The volume of the coating liquid increases, and the coating liquid near the discharge port is supplied to the coating liquid passage 8.
The liquid is sucked up to the decompressed inside of 5c, and the discharge of the coating liquid at the discharge port 86 can be stopped instantaneously.

[0004]

By the way, the valve body driving device 88 has a driving source composed of a solenoid or the like,
The valve element 80 is moved forward and backward by the movement stroke of the output shaft of the drive source. However, since the drive source has a constant moving stroke of the output shaft, the gap size between the coating liquid passage 85c and the discharge port 86 formed by the valve body 80 in the closed state is constant, and the film of the coating film C is formed. Sometimes the thickness cannot be changed. Further, in the valve element driving device 88, it is difficult to make the reproducibility of the stop position at both ends of the movement stroke of the output shaft of the driving source high in accuracy, and the reliability may be low. Therefore, in the coating apparatus 71, the gap dimensional accuracy of the discharge port 86 formed by the valve body 80 stopped at the valve-opening stop position is poor, and the thickness accuracy of the coating film C may not be increased. Although not shown, even in the case of a coating apparatus in which the discharge port is formed by a fixed lip member and a movable valve element is provided upstream of the discharge port, the accuracy of the valve opening stop position of the valve element is not limited. Is poor, the gap dimensional accuracy of the coating liquid passage formed by the valve element in the closed state is also deteriorated, and it may not be possible to increase the film thickness accuracy of the coating film C. In view of the above, an object of the present invention is to provide a coating apparatus capable of changing a valve opening stop position of a valve body and achieving a high accuracy of the stop position in order to solve the above problem.

[0005]

According to the first aspect of the present invention, a wide coating liquid passage is provided inside the die body so that the valve stop position of the valve body can be changed. And forming a discharge port at the end of the coating liquid passage,
A part of the coating liquid passage is formed between the movable valve element extending over the entire width of the coating liquid passage and the die body, and a valve seat is provided on the die body for the valve element to be separated and seated. The valve body is arranged so as to extend over the entire width of the working liquid passage, and to increase the volume of the coating liquid passage downstream of the valve seat as the valve is closed, and the valve body is stopped at the valve opening stop position. And a valve body drive device for moving the valve body back and forth from a valve closing stop position, wherein the valve body drive device adjusts a stop position for changing a valve opening stop position of the valve body. A coating apparatus comprising the apparatus. According to the present invention, the valve opening stop position of the valve element can be changed by the stop position adjusting device for changing the valve opening stop position.

The book according to claim 2, wherein the valve closing position of the valve body can be changed so that the amount of increase in the volume of the coating liquid passage downstream of the valve seat when the valve is closed can be adjusted. Means adopted by the invention is such that the valve element is arranged so as to be able to move in the reciprocating direction while maintaining the valve closed state, and the valve element driving device changes the valve closing stop position of the valve element. The coating device according to claim 1, further comprising a stop position adjusting device for stopping. According to the present invention, by changing the valve closing stop position of the valve body with the stop position adjusting device for changing the valve closing stop position, the coating liquid passage downstream of the valve seat at the time of valve closing is changed. The amount of volume increase can be adjusted.

According to a third aspect of the present invention, in which the stop position of the valve element is adjusted with high precision, the stop position adjusting device connects the valve element with an output shaft of a drive source that moves forward and backward. A connection shaft, a support portion connected to the die main body, and a stopper disposed between the connection shaft and the support portion for adjusting a stop position, wherein a stop portion of the connection shaft and the stopper is provided. 3. The coating device according to claim 1, wherein each center line of the connection shaft and the output shaft of the drive source passes through the center. According to the present invention, when the connecting shaft and the stopper come into contact with each other, the center lines of the connecting shaft and the output shaft of the drive source do not deviate with respect to the center of the contact point between the connecting shaft and the stopper. The push-pull force of the drive source can be transmitted without generating a moment.

According to a fourth aspect of the present invention, the stop position adjusting device detects the stop position of the valve element in order to correct the stop error of the valve element to make the stop position highly accurate. 4. The coating apparatus according to claim 3, further comprising a detector, and an operation tool for moving the stopper so as to eliminate a deviation amount between a detection position of the detector and a set position. 5. The operating tool may move the stopper by a movement amount necessary to eliminate the deviation amount based on the relationship between the movement amount of the valve body and the movement amount of the stopper. According to the present invention, when the valve body does not stop at the set position, the valve body can be stopped at the set position by moving the stopper with the operating tool.

[0009]

DETAILED DESCRIPTION OF THE PREFERRED EMBODIMENTS A coating apparatus according to the present invention (hereinafter referred to as "the apparatus of the present invention") will be described below based on an embodiment shown in the drawings.

(First Embodiment) FIGS. 1 to 5 show a first embodiment of the apparatus of the present invention, and FIG. 1 is a left side showing the entire coating equipment equipped with the apparatus of the present invention. Area view, FIG. 2
FIG. 3 is a left side view showing an enlarged cross section of a main part of the apparatus of the present invention, FIG. 3 is a cross-sectional view taken along line AA of FIG. 2, and FIG. FIG. 5 is a flow sheet showing the piping for the coating liquid.

As shown in FIG. 1, the coating apparatus 11 of the present invention comprises:
It is arranged above the transport device 12 that transports the substrate W to be coated, and forms a coating facility together with the transport device 12. The transfer device 12 includes a holder 1 that holds the base material W flat.
3 and a guide 14 for guiding the holder 13 movably back and forth.
And a drive device (not shown) for driving the holder 13 back and forth so that the base material W passes through a coating position below the coating device 11. The holder 13 has a plurality of suction ports opened on the upper surface, and is configured to detachably hold and hold a substrate W made of a glass plate, a thick film sheet, or the like. The coating device 11 is supported by a support frame 15 and is advanced and retracted (elevated) by a lifting operation tool 16 from a lower coating position to an upper standby position.

As shown in FIGS. 2 and 3, the coating apparatus 11 includes a die body 17, a movable valve element 18 which can be moved forward and backward in the die body 17, and a valve element drive for moving the valve element 18 forward and backward. Devices 19, 19. The die body 17 is composed of a plurality of blocks 20
1 and 22, and bolt connections 26, 26.
And FIG. 3), and a coating liquid passage 23 is formed therein. The passage 23 for the coating liquid is
Where blocks 21 and 22 meet and blocks 20 and 2
2 are formed so as to be wider in the left-right direction (the direction crossing the base material W). An elongated slit-like discharge port 23a provided over the entire width of the terminal end of the coating liquid passage 23 has two lip members 2 constituting the die body 17.
7 and 28 are formed. Two lip members 27,
28 is formed integrally with the block 20 or 22, or is formed separately (not shown) and the block 20 or 2
2 may be replaced with a bolt or the like.
The two lip members 27 and 28 are formed such that the tips thereof are formed at an acute single-sided inclined state so that the liquid can be easily drained, and the coating liquid does not adhere to the tip of the inclined outer surface. The block 20 has a concave groove 29 extending in the left-right direction on the front side near the lower end, and a plurality of lip opening adjusting bolts 53 penetrating the concave groove 29, and pushing and pulling each bolt 53. The thickness of the discharge port 23a (the lip members 27 and 2).
The opening of the lip, which is a gap with the rim 8, can be adjusted over the entire width in the left-right direction. Incidentally, the bolt 53 may be disposed so as to be movable in the left-right direction (Japanese Patent Laid-Open No. 8-215).
No. 631).

The valve element 18 is formed so as to extend over the entire area of the coating liquid passage 23 in the width direction, and blocks 21 and 22 are provided.
The rear end side is slidably fitted in a concave groove 22a provided in the block 22. Valve element 18
Is provided with sealing materials 50, 50 over the entire width so that the coating liquid M does not leak from between the groove 22a. The valve body 18 has two connecting shafts 30, 30 extending in parallel from the rear end side, and two through holes 22b, 22 provided in the block 22.
The connection shaft 30 penetrates through b. The block 22 pivotally supports the connecting shaft 30 via a bearing 31 fitted in each through hole 22b, and moves the valve element 18 in the direction of the arrow B which is in the reciprocating direction.
It is designed to be movably guided in the direction. Valve element 18
The coating liquid passage 23 is formed between the die body 17 and the fixing portions (blocks 20 and 21) of the die body 17. The valve element 18 is provided with a valve portion 18a in the middle of the area where the coating liquid passage 23 is formed, and the volume adjustment surface 18b extending over the entire width direction of the coating liquid passage 23 is moved in the valve element moving direction (arrow). B direction). Volume adjustment surface 18b
As the valve element 18 moves in the arrow D direction which is the seating direction (valve closing direction), the valve element 18 separates from the coating liquid passage forming surface 20a of the facing die body 17 and is downstream from the valve seat 32. On the other hand, as the valve element 18 moves in the direction of the arrow E that is the unseating direction (valve opening direction), the coating liquid passage forming surface 20a is increased. Approaching the valve seat 32
The volume of the coating liquid passage 23 on the further downstream side is reduced.

The fixing portion of the die body 17 (block 2)
In 1), a valve seat 32 is provided in a portion facing the coating liquid passage 23 over the entire width of the coating liquid passage 23, and the valve portion 18a of the valve body 18 is detached and seated. When the valve portion 18a is seated on the valve seat 32 from a valve opening stop position (see FIG. 2) where the valve portion 18a separates from the valve seat 32 to open the coating liquid passage 23 (see FIG. 2). The valve drive device 19 moves quickly until the valve closing stop position (see FIG. 4) is closed. As the valve element 18 retreats in the direction of arrow D from the valve-opening stop position to the valve-closing stop position, an upright coating liquid passage forming surface 20a of a block 20 forming a coating liquid passage 23 is formed. Volume adjustment surface 1 so as to separate from
8b is retracted, and the coating liquid passage 23 downstream of the valve seat 32 is
Increase the volume of c. Valve part 32 of valve seat 32 and valve element 18
4a, as shown in FIG. 4, both seating surface portions can be slidably contacted with each other. It can be further moved in the direction of arrow D, which is the same direction, so that the amount of increase in the volume of the coating liquid passage 23c can be adjusted.

As shown in FIGS. 2 and 3, each of the valve body driving devices 19 includes a drive source 33 in which an output shaft 33a is connected to a connection shaft 30 extending from the valve body 18, and a valve body 18. And a stop position adjusting device 34 for stopping at a position. The stop position adjusting device 34 includes a stopper 35 for changing a valve opening stop position of the valve element 18 moving forward and a stopper 3 for changing a valve closing stop position of the valve element 18 moving backward.
6 and a supporting portion 3 for supporting the stoppers 35 and 36.
7 and an advancing / retreating operating tool 38 for advancing and retracting the stoppers 35 and 36 individually. These Stoppers 3
The reference numerals 5 and 36 are arranged so as to penetrate through the through-hole 39 provided in the connecting shaft 30, and come into contact with contact portions 39 a and 39 b formed in the through-hole 39 of the connecting shaft 30. As the drive source 33, a solenoid type, a linear motor type, a giant magnetostrictive actuator type, a pneumatic cylinder type, or the like is used. As the advance / retreat operating tool 38, a stepping type servomotor or the like is used. The support portion 37 is attached and fixed to the die body 17 with bolts or the like.

The stop position adjusting device 34 includes a driving source 33.
When the connecting shaft 30 retreats in the direction of arrow D (the valve closing direction of the valve body 18), the contact portion 39b abuts on the stopper 36 to stop the retreating of the valve body 18 and the driving source 33 causes the connecting shaft 30 to move backward. When the valve body 18 advances in the direction of the arrow E (the valve opening direction of the valve element 18), the abutting portion 39a abuts on the stopper 35 to stop the advance of the valve element 18. The stopper 35 is in the form of a cutter in which the contact surface of the contact portion 39a is inclined, and is moved and adjusted by an advance / retreat operating tool 38 in the arrow F direction perpendicular to the arrow B direction which is the advance / retreat direction of the valve element 18. By doing so, the contact position of the contact portion 39a is changed, and the forward stop position of the valve element 18 is adjusted. Similarly, the stopper 36 is in the form of a cutter in which the contact surface of the contact portion 39b is inclined, and the stopper 36 is moved and adjusted in the direction of the arrow F by the advance / retreat operating tool 38 so that the contact position of the contact portion 39b is adjusted. To change
The retraction stop position of the valve element 18 is adjusted. The contact portions 39a and 39b have their centers located on the respective center lines of the connecting shaft 30 and the output shaft 33a, and when they come into contact with the respective stoppers 35 or 36, no bending moment is generated on these center lines. It is like that. The stop position adjusting device 34 can stop the valve element 18 without causing the connecting shaft 30 to generate a bending momentum that causes a rattling that lowers the accuracy, so that the stop accuracy can be improved. In addition, stoppers 35 and 36
Although not shown, it is also possible to select a screw type in which the contact surfaces of the contact portions 39a and 39b are screw tip surfaces.

Although not shown, the stop position adjusting device 34 has a detector for detecting the stop position of the valve element 18 and a stopper 35 or a stopper 35 for eliminating the deviation between the detected position of the detector and the set position. An operation tool 38 for automatically moving the 36 in the direction of the arrow F may be provided. The operating tool 38 obtains in advance the relationship between the movement amount of the valve element 18 and the movement amount of the stopper 35 or 36, and based on this relationship, controls the stopper 35 or 36 by the movement amount necessary to eliminate the deviation amount. Sometimes they are moved. The detector is the valve 1
8, either the connecting shaft 30 or the output shaft 33a and the supporting portion 3
7 to detect a valve opening stop position and a valve closing stop position of the valve element 18. The coating apparatus 11 including such a stop position adjusting device 34 can automatically correct the stop error of the valve element 18, and therefore, increases the accuracy of the stop position of the valve element 18, and increases the accuracy of the coating film C described later. Can be improved in film thickness accuracy. The stop position adjusting device 34 is
Depending on the coating liquid and the conditions of the coating, only the valve opening stop position of the valve body 18 that moves forward may be detected to move the stopper 35 by the operating tool 38, or the valve body 18 that moves backward may be closed. Only the valve stop position is detected and the stopper 36 is operated by the operating tool 3.
It is also possible to configure so as to move at 8.

As shown in FIG. 4, the coating liquid passage 23 is provided with a throttle portion 40 formed of a stepped portion over the entire width on the downstream side of the valve element 18 so that the coating liquid M discharged from the discharge port 23a is formed. The flow rate is adjusted. The step forming the narrowed portion 40 is provided on one or both of the block 22 and the block 20 which are fixed portions of the die body 17. When provided in the block 22, a step is formed on the coating liquid passage forming surface 22d which intersects the arrow B direction which is the direction in which the valve element 18 advances and retreats. When provided in the block 20, the valve 1
A step portion is formed on the coating liquid passage forming surface 20a which intersects the arrow B direction which is the direction of advance / retreat 8. The position of the diaphragm 40 is
The coating liquid M sucked into the coating liquid passage 23c in accordance with the valve closing operation of the valve element 18 is located downstream of the liquid surface Ma formed by the coating liquid M. As a result, the coating liquid M remaining in the coating liquid passage 23 due to the stoppage of the coating increases when the volume of the downstream coating liquid passage 23c increases with the retreat of the valve element 18 (valve closing operation). When the liquid surface Ma at the lower end moves upward (toward the back side) from the throttle portion 40, and conversely, when the valve is opened by rapid advance of the valve body 18 and coating is resumed, the liquid flows toward the discharge port 23a. Sometimes rapid movement is suppressed by being squeezed by the squeezing section 40, so that the liquid can be discharged at a substantially constant flow rate without rapidly discharging from the discharge port 23a. In addition, the valve element 18
Is adjusted so that the front edge 22c-1 of the guide surface 22c of the block 22 for guiding the valve element 18 forms a stepped portion of the constricted portion 40 so as to stop forward while leaving the front edge 22c-1. It is also possible. The adjustment of the advance stop position of the valve element 18 can be performed by the stop position adjusting device 34 (see FIG. 2).

The die body 17 is provided with blocks 20, 2
As shown in FIG. 3, a sealing plate 49 is interposed between the movable valve body 18, the movable valve element 18, and each side plate 24, and the coating liquid M leaks from both left and right sides of the coating liquid passage 23. I try not to.

As shown in FIGS. 2 and 5, the coating liquid passage 23 has a manifold 23b which extends over the entire width at an appropriate position upstream of the valve seat 32. Manifold 2
As shown in FIG. 5, 3b has both ends connected to drainage channels 41, 41 formed in the side plates 24, 24. The die body 17 joins the supply pipe 43 of the coating liquid supply device 42 to the manifold 23b, and
Is connected to the drain passages 41, 41. The supply pipe 43 extends from the coating liquid tank 45, and is provided with a liquid sending pump 46 and a flow control valve 47 in the middle thereof. The reflux pipe 44 is provided with flow control valves 48, 48 in the middle thereof, and the end is connected to a coating liquid tank 45.

Since the coating apparatus 11 discharges a part of the coating liquid from both ends of the manifold 23b to the drain paths 41, 41, a larger amount of coating liquid is applied to the manifold 23b than when there is no drain path 41. A working liquid can be supplied. As a result, even if the coating device 11 opens and closes the valve body 18,
From the manifold 23b of the coating liquid passage 23 to the discharge port 23
The pressure fluctuation of the coating liquid existing up to “a” can be reduced, and the coating liquid can be uniformly discharged from the start to the stop of the coating, so that the thickness of the coating film C can be made uniform.

Next, the coating operation of the coating apparatus 11 according to the present embodiment will be described. The die body 17 moves the valve body 18 backward to the valve closing stop position (see FIG. 4), and
a is kept on standby so that the coating liquid M is not discharged. Next, when the base material W transported by the transport device 12 reaches a predetermined coating start position, the valve element driving device 19 is operated to open the valve element 18 at the valve opening stop position (see FIG. 2). The coating liquid M is discharged from the discharge port 23a promptly to form a coating film C on the substrate W being conveyed. At the time of this valve opening operation, the volume of the coating liquid passage 23c downstream of the valve seat 32 decreases rapidly due to the rapid advance of the valve element 18, so that the coating liquid M is supplied to the coating liquid passage 23c. Discharge port 2 from inside
3a, the squeezing section 4
The rapid movement is suppressed by the resistance when passing through 0,
The coating liquid M is discharged at a constant flow rate from the discharge port 23a.

Subsequently, when the conveyed base material W reaches a predetermined coating end position, the valve body driving device 19 is operated to quickly move the valve body 18 to the valve closing stop position (see FIG. 4). To stop the discharge of the coating liquid M from the discharge port 23a. At the time of this retreat, the volume of the coating liquid passage 23c downstream of the valve seat 32 increases, and the liquid enters the suction state, so that the coating liquid in the vicinity of the discharge port 23a moves to the inner side of the coating liquid passage 23c. As a result, the discharge of the coating liquid can be stopped instantaneously and the liquid can be reliably drained.

The reason why the coating liquid near the discharge port 23a is sucked is as follows. In the valve closing operation, the valve section 18
As “a” approaches the valve seat 32, the gap formed between the valve portion 18a and the valve seat 32 gradually narrows and the passage resistance becomes very large, so that the coating liquid passage 23 is substantially closed. Between the state where the passage resistance is large and the time when the valve portion 18a further moves toward the seating position and is seated, the coating liquid passage 23 is substantially closed and the downstream side of the valve seat 32 is located. This is because the volume of the coating liquid passage 23c increases and the pressure of the coating liquid near the discharge port 23a is reduced.

As shown in FIG. 4, when the valve element 18 can be further retracted in the direction of arrow D while maintaining the seated state, when the coating liquid passage 23 is completely closed,
By further increasing the volume of the coating liquid passage 23c downstream of the valve seat 32, the coating liquid near the discharge port can be reliably drained.

As described above, in the coating apparatus 11, the valve element 18 is quickly moved back and forth by the valve element driving devices 19, 19, and the coating liquid passage 23 is instantaneously opened and closed to open the valve. Sometimes, the coating liquid M is discharged from the discharge port 23a at a constant flow rate, and the coating liquid near the discharge port 23a is sucked into the coating liquid passage 23 to reliably drain the liquid during the valve closing operation. In addition, a coating film C having a uniform film thickness from the coating start end to the coating end can be formed at a predetermined coating position on the base material W. Further, since the coating apparatus 11 opens and closes the coating liquid passage 23 and increases the volume of the coating liquid passage 23c on the downstream side with a single valve element 18, the structure becomes simpler than in the past, and the handling is simplified. It will be easy.

Further, the coating device 11 changes the valve opening stop position of the valve element 18 by the stop position adjusting device 34,
The thickness of the coating film C can be finely adjusted by changing the gap size of the coating liquid passage 23c formed by the valve element 18 in the closed state. Further, the coating device 11 changes the valve closing stop position of the valve element 18 by the stop position adjusting device 34, and adjusts the volume increase amount of the coating liquid passage 23c when the valve is closed according to the characteristics of the coating liquid M. With this adjustment, the coating liquid in the vicinity of the discharge port 23a can be surely sucked up to the inside of the reduced-pressure coating liquid passage 23c, and the discharge of the coating liquid at the discharge port 23a can be reliably stopped.

(Second Embodiment) FIG. 6 shows a second embodiment of the apparatus of the present invention, and is an enlarged cross-sectional left side view of a main part in a state where the discharge of the coating liquid is stopped. is there. This embodiment is different from the first embodiment in that the valve 1
8 is that a seal member 51 molded from an elastic material such as rubber is attached to the valve portion 18a. Other than this configuration, it is substantially the same as the first embodiment, and the same reference numerals indicate the same components.

In this embodiment, the valve portion 18a immediately after sitting on the valve seat 32 is replaced with the sealing material 5 made of an elastic material.
1 is further moved in the seating direction (the direction of arrow D) while compressively deforming, so that the coating liquid passage 2 downstream of the valve seat 32 is provided in a state where the coating liquid passage 23 is completely closed.
By increasing the volume of 3c, the pressure of the coating liquid in the vicinity of the discharge port 23a can be reduced and the liquid can be surely drained. The present embodiment is provided with a stop position adjusting device 34 (see FIG. 2) for changing the valve opening stop position and the valve closing stop position of the valve element 18.

The place where the sealing material 51 formed of an elastic material such as rubber is mounted is not limited to the valve portion 18a of the valve body 18 and is not shown in the drawing. Forming the seating surface with the material 51 can be performed by the valve portion 1.
It is also possible to mount both of the seat 8a and the valve seat 32 to form both seating surfaces with a sealing material.

(Third Embodiment) FIG. 7 shows a third embodiment of the apparatus of the present invention, and is an enlarged cross-sectional left side view of a main part in a state where the discharge of the coating liquid is stopped. is there. The point that this embodiment is significantly different from the first embodiment is as follows.
The valve portion 18a of the valve element 18 is provided on the step portion 32a forming the valve seat 32.
Is formed in such a manner that the stepped portion 18a-1 forming the contact is abutted in a liquid-tight manner to close the valve. Other than this configuration, it is substantially the same as the first embodiment, and the same reference numerals indicate the same components. The present embodiment includes a stop position adjusting device 34 (see FIG. 2) for changing the valve opening stop position of the valve element 18.

(Fourth Embodiment) FIGS. 8 and 9 show a fourth embodiment of the apparatus of the present invention. FIG. 8 is an enlarged left side view of a main part. FIG. 5 is a left side view showing a further enlarged main part. The difference between the coating apparatus 61 of the present embodiment and the first embodiment is that the discharge port 23 a is formed at the tip 68 b of the movable valve body 68. Other than this configuration, it is substantially the same as the first embodiment, and the same reference numerals indicate the same components.

The valve body 68 is provided with a valve portion 6 which is detachably seated on the valve seat 32.
8a. The valve element 68 has a coating liquid passage forming surface (volume adjusting surface) 68c that forms a part of the coating liquid passage 23c downstream of the valve seat 32 whose volume increases with the valve closing operation of the valve element 68. A throttle portion 40 having a step portion is provided on a plane intersecting the arrow B direction which is the direction in which the valve body 68 advances and retreats.
The position of the throttle portion 40 is set to be on the downstream side from the liquid surface Ma formed by the coating liquid M sucked into the coating liquid passage 23c with the valve closing operation of the valve body 68. The step forming the narrowed portion 40 may be provided on the coating liquid passage forming surface 20 a of the block 20 which is the fixing portion of the die body 17, or may be provided on both the block 20 and the valve body 68.

The coating device 61 is provided with a stop position adjusting device 34 for changing the valve opening stop position and the valve closing stop position of the valve element 68, and the coating liquid formed by the valve element 68 in the closed state. The thickness of the coating film C can be changed by changing the size of each gap between the use passage 23c and the discharge port 23a.

(Fifth Embodiment) FIG. 10 shows a fifth embodiment of the apparatus of the present invention, and is a left side view showing the entire coating equipment provided with the apparatus of the present invention. This embodiment is different from the first or fourth embodiment in that the transport device 52 is formed by a back-up roll, and the coating device 11 (or 61) is disposed above the transport device 52. . Except for this configuration, it is substantially the same as the first or fourth embodiment, and the same reference numerals indicate the same components.

Transport device 52 composed of a back-up roll
Can convey a continuous sheet-shaped substrate W, and the coating device 1
1 is an uncoated area G on the entire upper surface of the base material W in the cross direction of the base material.
. Can be applied intermittently.

(Other Embodiments) The transport device for transporting the base material is not limited to the above-described embodiment.
It may be a belt conveyor, an endless steal belt conveyor, or the like. Coating device 11 (or 61)
In addition to disposing the coating liquid on the side of the transport device, the coating liquid can be discharged from the discharge port 23a toward the base material W in a horizontal state or an inclined state by disposing the coating liquid on the side of the transport device. By disposing the coating liquid below the apparatus, the coating liquid can be discharged upward from the discharge port 23a.

A coating apparatus 11 (or 61) for a single-wafer substrate W
When the coating is performed, the substrate W can be stopped and the coating apparatus 11 can be run to perform intermittent coating.

[0039]

According to the first aspect of the present invention, the valve opening stop position of the valve body is changed by a stop position adjusting device.
The thickness of the coating film can be changed by changing the gap size of the coating liquid passage formed by the valve element in the open state. Furthermore,
When the discharge port is formed by a valve body, the apparatus of the present invention changes the thickness of the coating film by changing the gap size between the coating liquid passage and the discharge port formed by the valve body in the open state. Can be. According to the second aspect of the present invention, the valve closing stop position of the valve body is changed by the stop position adjusting device, and the volume increase amount of the coating liquid passage downstream of the valve seat when the valve is closed is determined by the coating liquid. By adjusting according to the characteristics of the above, the coating liquid near the discharge port can be surely sucked up to the inside of the reduced-pressure coating liquid passage, and the discharge of the coating liquid at the discharge port can be reliably stopped. .

According to the third aspect of the present invention, the push-pull force of the drive source can be transmitted without generating a bending moment which causes the connection shaft to rattle.
By increasing the accuracy of the stop position of the valve element, the accuracy of the thickness of the coating film can be increased. Since the stop error of the valve body can be automatically corrected, the accuracy of the stop position of the valve body can be increased, and the accuracy of the thickness of the coating film can be increased.

[Brief description of the drawings]

FIG. 1 is a left side view of a first embodiment of the present invention, showing the entirety of a coating facility provided with the present invention.

FIG. 2 is a left side view showing the same embodiment and is an enlarged cross-sectional view of a main part of the device of the present invention.

FIG. 3 is a cross-sectional view taken along line AA of FIG.

FIG. 4 is a left side view showing the same embodiment, and is a further enlarged cross-sectional view of a main part in a state where the discharge of the coating liquid is stopped.

FIG. 5 is a flow sheet showing the same embodiment and showing a pipe for a coating liquid.

FIG. 6 is a left side view showing a second embodiment of the apparatus of the present invention, and is an enlarged cross-sectional view of a main part in a state where the discharge of the coating liquid is stopped.

FIG. 7 is a left side view showing a third embodiment of the device of the present invention, and is an enlarged cross-sectional view of a main part in a state where the discharge of the coating liquid is stopped.

FIG. 8 is a left side view showing a fourth embodiment of the device of the present invention, and is an enlarged sectional view of a main part.

9 shows the same embodiment, and is a left side view in which a main part in a state where the discharge of the coating liquid is stopped is further enlarged in cross section. FIG.

FIG. 10 shows a fifth embodiment of the present invention, and is a left side view showing the entirety of a coating facility provided with the present invention.

FIG. 11 shows an unknown conventional coating apparatus;
It is a side view which expands and shows the principal part of a coating state.

FIG. 12 is a view showing an unknown conventional coating apparatus;
It is a side view which expands and shows the principal part in the state which stopped discharge of the coating liquid.

[Explanation of symbols]

17: die body, 18 (68): valve element, 19: valve element driving device, 23: coating liquid passage, 23a: discharge port, 30 ...
Connection shaft, 32: valve seat, 33: drive source, 33a: output shaft,
34 ... stop position adjusting device, 35, 36 ... stopper

Claims (4)

[Claims] 1. A movable coating liquid passage is formed inside a die body, a discharge port is formed at an end of the coating liquid passage, and the discharge port is extended over the entire width of the coating liquid passage. A part of the coating liquid passage is formed between the valve body and the die body, and a valve seat for allowing the valve body to be separated from and seated on the die body is extended over the entire width of the coating liquid passage, and the valve is closed. For the valve element that arranges the valve element so as to increase the volume of the coating liquid passage downstream from the valve seat as it operates, and moves the valve element between the valve opening stop position and the valve closing stop position. A coating device provided with a driving device, wherein the valve element driving device includes a stop position adjusting device for changing a valve opening stop position of the valve element. 2. The valve body is arranged so as to be able to move in an advancing and retreating direction while maintaining a valve closed state, and the valve body driving device is configured to change a valve closing stop position of the valve body. The coating device according to claim 1, further comprising a stop position adjusting device. 3. The stop position adjusting device according to claim 1, further comprising: a connecting shaft connecting the valve body and an output shaft of a driving source moving forward and backward; a supporting portion connecting to the die body; And a stopper for adjusting a stop position, wherein each centerline of the output shaft of the drive shaft and the connection shaft passes through the center of the contact point between the connection shaft and the stopper.
Or the coating device of 2. 4. A stop position adjusting device, comprising: a detector for detecting a stop position of the valve body; and an operating tool for moving the stopper so as to eliminate a deviation amount between a detection position of the detector and a set position. The coating device according to claim 3, further comprising: