JPH11179439A - Press working method, die and metal made parts used in it - Google Patents

Abstract

PROBLEM TO BE SOLVED: To provide a press forming method for a holder for an integrated circuit element necessitating high precision and a die used in it. SOLUTION: A pressure which is advanced toward the outside by a first abutting part and projected part of an upper die is imparted to a part which becomes wall surfaces 34, 36 of a recessed part 26 equivalent to the projected part of the upper die, on one side surface 25 of a metal plate to be worked, and a part equivalent to a projected line in the other side surface 48 of the metal plate to be worked is plastically deformed in the plate thickness direction by the projected line of a lower die. A part to be wall surfaces 34, 36 of the recessed part 26 in the metal plate is deformed, by a part of volume equivalent to the volume of a plastically deformed part 49 formed by a plastic deformation, in the direction advancing toward the inside of the recessed part 26, and wall surfaces 34, 36 of the recessed part 26 become perpendicular to one side surface 25, an intermediate step surface 28 and a bottom part 31 of the recessed part 26.

Description

DETAILED DESCRIPTION OF THE INVENTION

[0001]

BACKGROUND OF THE INVENTION 1. Field of the Invention The present invention relates to a method for manufacturing a metal part such as a holder for an integrated circuit element or a ring-shaped spacer by press working, a mold used for the method, and a metal part to be manufactured.

[0002]

2. Description of the Related Art When a rectangular plate-shaped integrated circuit device sliced from a silicon wafer is incorporated in an electronic device, a holder (hereinafter, holder) 1 for the integrated circuit device as shown in FIGS. 7 and 8 is used. Can be This holder 1 has a thickness t
In this example, two-stage recesses 3 and 4 are formed as an example of housing the integrated circuit element 2 shown by a two-dot chain line in FIG. The recesses 3 and 4 are formed to have substantially the same outer shape as the integrated circuit element 2 in order to accommodate the integrated circuit element 2 without any gap. Therefore, the recess 3,
4 and the bottom 6 and the bottom 6 with which the bottom 5 of the integrated circuit element 2 contacts.
The flatness of the upper middle surface 7 and the parallelism of the bottom 6, the middle surface 7 and the holder surface 8 each have a tolerance of 0.01 m.
It must be formed with extremely high precision, such as about m. Such high precision is required in order to eliminate a gap between the integrated circuit element 2 and the holder 1 as described above. This is because the presence of this gap increases the possibility that the performance of the integrated circuit element 2 is degraded due to the invasion of water vapor or foreign matter, or that a connection failure occurs during bonding or the like.

[0003]

Conventionally, when manufacturing such a holder 1, the above three or four concave portions are formed by cutting a metal plate as a material. In such manufacturing by cutting, the holder 1 is basically manufactured by processing the holders one by one, and there is a problem that productivity is low.

In order to improve the productivity, the holder 1
Can be conceived by press working using a die. When manufactured by press working, multiple holders 1 at a time
Is expected to be able to be manufactured, and variations in the accuracy of the shape of the holder 1 can be reduced.

However, when such a holder 1 is manufactured by the press working of the existing technology, the bottom 6
The wall surface 9 between the inner surface 7 and the middle surface 7 and the wall surface 10 between the middle surface 7 and the holder surface 8 are pressed by upper and lower molds as shown in FIG.
As shown in (2), it is deformed outward and becomes inclined. Further, due to the outward deformation of the wall surfaces 9 and 10, as shown in FIG. 7, the corners 11 and 12 of the bottom portion 6 and the middle step surface 7 have an arc shape having a relatively large radius.

Therefore, there arises a problem that the above-mentioned gap is generated between the holder 1 and the integrated circuit element 2 accommodated therein.

SUMMARY OF THE INVENTION The present invention has been made to solve the above problems, and an object of the present invention is to form a portion to be processed on a surface of a metal plate along a shape of the processed portion when the metal plate is processed by press working. Press working method that can significantly improve the precision of the metal parts to be manufactured,
It is an object of the present invention to provide a metal part with a significantly improved mold and shape accuracy.

[0008]

According to a first aspect of the present invention, there is provided a press working method comprising pressing a metal plate between one mold and another mold. At this time, the metal plate is processed by the one-side processing portion to form a processed portion. On the other side of the metal plate, on the side opposite to the one side mold, the vicinity of a portion corresponding to the portion to be processed is plastically deformed in a thickness direction of the other mold.

According to a second aspect of the present invention, there is provided a press working mold, wherein one of the molds has a working portion for working a metal plate.
The other mold of the mold has a configuration in which the vicinity of a portion corresponding to the portion to be processed on the side opposite to the one mold of the metal plate is plastically deformed in the sheet thickness direction. When a metal plate is pressed by such a mold, a region of the metal plate corresponding to a plastically deformed portion of the metal plate moves to the processed portion side, and the processed portion of the metal plate is moved one side. The processed portion is formed in a shape following the shape of the processed portion of the one mold.

According to a third aspect of the present invention, there is provided a pressing die according to the second aspect of the present invention, wherein the processing portion includes at least one outer peripheral wall surface having a closed curved cross section and at least a part of a tip of the outer peripheral wall surface. At least one flat portion that covers the outer peripheral wall surface, and the deformation action portion is formed in a shape substantially along the outer peripheral wall surface at the other type portion on either the inner side or the outer side of the outer peripheral wall surface. If you are.

In a fourth aspect of the present invention, there is provided a pressing die according to the third aspect, wherein an outer peripheral wall surface of the processing portion and the flat portion are formed perpendicular to each other.

According to a fifth aspect of the present invention, there is provided a metal part having, on one surface, a portion to be worked which is deformed into a concave or convex shape by pressing on one surface, and the portion to be processed is a die. Pressing is performed by the processing part of the one mold, and the vicinity of the part corresponding to the part to be processed of the metal part is plastically deformed in the thickness direction by the deformation acting part of the other mold on the side opposite to the one die, and the processing part is formed. It is formed in a shape substantially in close contact with the substrate.

According to a sixth aspect of the present invention, there is provided a metal part.
In the invention, the processed portion is formed as a recess on the one surface, and the recess has a closed curved wall surface in cross section with respect to the one surface, and a flat portion that at least partially covers a tip of the wall surface. And the cross-sectional shape of the ridge at the boundary between the wall surface and the plane portion is formed to have a radius of 0.2 mm or less.

According to a seventh aspect of the present invention, there is provided a metal part.
In the invention according to the first aspect, each corner of the recess has a radius of 0. 0 in plan view.
This is a case where it is formed in a polygonal shape having a radius of curvature of 2 mm or less.

[0015]

According to the press working method of the first aspect of the present invention, when a metal plate is sandwiched between one mold and the other mold and pressed, the processed part of the metal plate is processed by the processed part of the one mold. To form Further, the other portion of the deforming portion is plastically deformed in the thickness direction in the vicinity of a portion corresponding to the portion to be processed of the metal plate. At this time, an outward pressure is applied to the processed portion by the processed portion. On the other hand, the area of the metal plate corresponding to the plastically deformed portion is moved to the processed portion side by the other type of deformation acting portion, and only a part of the volume of the plastically deformed volume is reduced by the volume of the metal plate. The workpiece is deformed in a direction toward the one-side workpiece. Therefore, by appropriately selecting the shape of the deformation acting portion, the processed portion of the metal plate after the press working has a shape conforming to the shape of the processed portion. As a result, the shape accuracy of the manufactured metal part can be remarkably improved.

At this time, the plan view shape and the cross-sectional shape of the processed portion do not require any limitation in realizing the above-mentioned operation, and the precision of the shape is remarkably improved by using the processed portion having an arbitrary shape. Metal parts can be manufactured. In addition, the one mold and the other mold can be implemented in any combination as an upper mold and a lower mold in an actual mold. Furthermore, since the shape accuracy of the metal part can be remarkably improved, if the shape accuracy of the one mold and the other mold is made high, the flatness and parallelism of each flat part in the obtained metal part will be remarkable. Can be improved.

By using the pressing die according to the second aspect of the present invention for pressing a metal plate, the same operation as that described in the first embodiment of the present invention is realized.
The same functions and effects as those described above are realized.

According to a third aspect of the present invention, there is provided a press die having a processing portion having the outer peripheral wall surface and a flat surface portion of one die, and an inner or outer side of the outer peripheral wall surface. In any one of the other mold portions, the portion to be processed of the metal plate to be pressed with the deformation acting portion formed substantially along the outer peripheral wall surface is formed in a shape corresponding to the processed portion.

At this time, if the processing portion is convex toward the other mold, the deformation acting portion is formed outside the outer peripheral wall surface,
If the outer peripheral wall is concave toward the other mold, the deformation acting portion is formed inside the outer peripheral wall. This is because if the processed part is convex, a concave part to be processed is formed on the metal plate, and in order to make the processed part conform to the shape of the processed part, the inner periphery of the concave part of the metal plate is required. This is because the surface must be plastically deformed from the outside toward the processed portion. If the processed part is concave, a convex processed part is formed on the metal plate. To make the processed part conform to the shape of the processed part, the convex processed part of the metal plate is required. This is because it is necessary to plastically deform the outer peripheral surface from inside toward the processed portion.

As described above, according to the present invention, even when a concave or convex portion to be processed is formed on the metal plate, the portion to be processed is shaped to follow the shape of the one-sided processed portion. be able to.

According to the fourth aspect of the present invention, the outer peripheral wall surface of the processed portion of the one die and the flat portion are formed perpendicular to each other. Therefore, based on the above-described operation, a wall portion corresponding to the outer peripheral wall surface of the processed portion and a flat portion corresponding to the flat surface portion are formed in the processed portion of the metal plate. Here, since the processed part can be formed in a shape following the shape of the processed part, the shape accuracy of the metal part obtained by press working is remarkably improved.

Can be improved.

According to this, when the processed portion has a rectangular plate-like concave shape, for example, when a rectangular plate-like article such as an integrated circuit element is stored in the concave portion of the metal part, for example,
It is possible to prevent a gap from being formed between the recess and the article, and water vapor or a foreign substance may enter the gap to cause a problem such as a decrease in the performance of the integrated circuit element or a poor connection in bonding or the like. For example, it is possible to prevent deterioration of the properties of the stored articles. Further, even when the processed portion has a convex shape, the mutual perpendicularity between the wall portion and the flat portion and the flatness of the flat portion are significantly improved, so that the use of the obtained metal product is improved. It is enlarged.

The processed part of the metal part according to the fifth aspect of the present invention is formed into a shape substantially in close contact with the one-side processed part by the operation described in the embodiment of the first aspect of the present invention. Is done. Therefore, the shape accuracy of the metal part can be remarkably improved. At this time, the plan view shape and the cross-sectional shape of the portion to be processed do not require any limitation when realizing the above-described action, and the metal whose shape accuracy is remarkably improved by using the processed portion of an arbitrary shape Parts are realized. In addition, since the shape accuracy of the metal part can be remarkably improved, if the shape accuracy of the one mold and the other mold is made high, the flatness and parallelism of each flat portion in the obtained metal part can be remarkably increased. Can be improved.

According to a sixth aspect of the present invention, the portion to be processed of the metal part is formed as a recess, and a cross-sectional shape of a ridge at a boundary between a wall surface and a flat portion of the recess has a radius of 0.2 mm or less. Is formed as an angled edge. Therefore, when a rectangular plate-shaped article such as an integrated circuit element is stored in the recess, for example, a gap can be prevented from being formed between the recess and the article. In this way, it is possible to prevent a situation in which the performance of the integrated circuit element is deteriorated or a failure such as a connection failure due to bonding or the like is caused, thereby lowering the characteristics of the stored articles.

According to the seventh aspect of the present invention, since each corner in plan view is formed as a substantially angled edge having a radius of curvature of 0.2 mm or less, the recess of the metal part according to the present invention has For example, even when storing an article including a corner portion in a plan view shape such as an integrated circuit element, it is possible to prevent a gap from being formed between the recess and the article, and to increase the height of the article relative to the recess. Accurate positioning can be realized, and the above-described deterioration of the characteristics of the article due to the gap can be prevented.

[0027]

DESCRIPTION OF THE PREFERRED EMBODIMENTS The present invention will be described below with reference to embodiments. 1 to 8 show one embodiment of the present invention. FIG. 1 is a plan view of an integrated circuit element holder (hereinafter, holder) 21 which is a metal part according to an embodiment of the present invention, and FIG. 2 is a cross-sectional view taken along a section line X2-X2 in FIG. FIG. 3 shows the holder 21
FIG. 4 is a plan view of an upper mold 22 used for manufacturing the mold, FIG. 4 is a cross-sectional view of the upper mold 22 as viewed from a section line X4-X4 in FIG. 3, and FIG. 5 is a lower mold of the mold. 23 is a plan view of FIG.
FIG. 6 is a cross-sectional view of the lower mold 23 taken along the line X6-X6 in FIG. 5, and FIG. 7 is a metal part 5 according to another embodiment of the present invention.
FIG. 8 is a plan view of FIG. 4, and FIG. 8 is a cross-sectional view taken along line X8-X8 of FIG.

Hereinafter, the holder 21 of this embodiment will be described with reference to FIGS. Holder 21 of the present embodiment
Is used as an example in which a rectangular plate-shaped integrated circuit element 24 sliced from a silicon wafer is housed and connected to connection terminals by wire bonding or the like and incorporated in an electronic device. This holder 21
As an example, a metal material having a relatively high malleability such as copper, a copper alloy, aluminum or an aluminum alloy having a plate thickness t = 2 mm or the like has a side length L1 as described later.
= 50.8 mm square, and the integrated circuit element 24 indicated by a two-dot chain line in FIG. 2 is housed in a recess 26 formed on one surface 25 of the holder 21.

The recess 26 has, for example, a depth D1 = 0.5 mm from one surface 25 and a side length L2 = 2 in plan view.
5.4 mm square upper recess 27, upper recess 27
From the middle step surface 28, which is the bottom portion, for example, a depth D2 = 0.
5 m, it is formed in a two-stage structure including a lower recess 29 having a side length L3 of 17.8 mm in plan view. This recess 27, 2
Reference numeral 9 is formed to have substantially the same outer shape as the integrated circuit element 24 in order to accommodate the integrated circuit element 24 without any gap. That is, the bottom 31 or the upper middle surface 2 of the bottom 31 that contacts the bottom 30 of the integrated circuit element 24 in the recesses 27 and 29.
8 and the parallelism between the bottom 31 and the middle surface 28 and between the middle surface 28 and the one surface 25 of the holder 21 are each formed with high precision to a tolerance of about 0.01 mm, The corners 32, 33 of the recesses 27, 29 are formed with extremely high precision, for example, are formed in a substantially right-angled shape having a radius of curvature of 0.2 mm or less in plan view.

The recess 27 is formed in a straight cylindrical wall surface 3 having a square cross section with respect to one surface 25 of the holder 21.
The recess 29 has a straight cylindrical wall surface 36 having a square cross section with respect to the one surface 25. The concave ridge 35 forming the boundary between the wall surface 34 and the middle surface 28 and the concave ridge 37 forming the boundary between the wall surface 36 and the bottom 31 have a cross section of a radius of 0.1 to 0.2 mm, respectively, and are substantially Are formed so as to be at a right angle to the right side. The reason why such high precision is required for the shape of the holder 21 is to eliminate a gap between the integrated circuit element 24 and the holder 21. As described in the section of the related art, the presence of this gap increases the possibility that the performance of the integrated circuit element 24 is degraded due to the invasion of water vapor or foreign matter, or that a connection failure occurs during bonding or the like.

On the other hand, the one surface 25 of the holder 21
The other surface 48 on the opposite side is formed by being plastically deformed in the plate thickness direction by a mold as described later,
Is formed in the shape of a closed curved plastic deformation part 49 enclosing.

Hereinafter, a mold used for manufacturing the holder 21 by press working will be described with reference to FIGS. The mold 50 of the present embodiment includes the upper mold 22 shown in FIGS. 3 and 4 and the lower mold 23 shown in FIGS. 5 and 6. The upper die 22 is formed with a planar first contact portion 38 that contacts the one surface 25 of the holder 21.
A convex portion 39 is erected perpendicularly to the first contact portion 38. The projection 39 is upright with respect to the first contact portion 38, and has a square cross section and a shape corresponding to the first recess 27 of the holder 21. And an upright second contact portion 41.

The first contact portion 38, the middle step surface 42 which is the top of the first projection 40, and the top surface 43 of the second projection 41 are formed parallel to each other, and the first projection 40 is The outer peripheral wall surface 44 has a rectangular cylindrical shape, and the outer peripheral wall surface 44 and the middle step surface 42 are formed perpendicular to each other. The second convex portion 41 has an outer peripheral wall surface 45 in the shape of a square tube, and the outer peripheral wall surface 45 and the top surface 43 are formed perpendicular to each other. Further, a ridge 46 that forms a boundary between the outer peripheral wall surface 44 and the middle step surface 42 and a ridge 47 that forms a boundary between the outer peripheral wall surface 47 and the top surface 43 are formed by the ridge portions 35 of the holder 21,
37 are formed at right angles.

The length L4 of one side of the planar shape of the first convex portion 40 is set to a length corresponding to the length L2 of one side of the first concave portion 27 of the holder 21, and the height H1 is the depth of the first concave portion 27. It is formed to have a length corresponding to D1. Further, one side length L5 of the planar shape of the first convex portion 41 is one side length L3 of the second concave portion 29 of the holder 21.
, And the height H2 of the second recess 2
It is formed to a length corresponding to 79 depth D2.

The lower die 23 of the mold 50 is formed with a second planar contact portion 51 which is in contact with the other surface 48 of the holder 21. Further, the convex portion of the upper die 22 of the second contact portion 51 is formed. A ridge 52 having a height H1 and a width W1 is formed at a position surrounding the portion 39 so as to deform the metal plate of the material to be pressed in the thickness direction. The ridge 52 has a closed rounded shape with rounded corners in plan view. The height H1 of the ridge 52,
The width W1 and its cross-sectional shape are appropriately set according to the shape of the recess 39 manufactured in the holder 21 and the material of the metal plate, and the cross-sectional shape is a semicircular arc shape or a rectangular shape as shown in FIG. And a shape in which the inner surface of the rectangular shape is inclined by a predetermined angle with respect to the other surface 48, and the position of this surface in plan view is appropriately determined with respect to the recess 26. is there. However, the essential condition that the shape of the ridge 52 should have is shown in the following description of the pressing process of the present embodiment.

Hereinafter, the pressing process of this embodiment will be described with reference to the drawings. In the present embodiment, the holder 21
In order to solve the problems described in the section of the prior art, in the present embodiment, the plastic deformation portion 49 is formed on a metal plate made of a material by using the lower mold 23. ing.

In the pressing step of this embodiment, a metal plate made of a material is pressed between the upper die 22 and the lower die 23 and pressed. At this time, the first contact portion 38 of the upper mold 22 of the mold 50 contacts one surface 25 of the metal plate made of the material, and the convex portion 39 of the upper mold 22 plastically deforms the metal plate to form the recess 26. I do. On the other hand, in the lower mold 23 of the mold 50, the second contact portion 51 contacts the other surface 48 of the metal plate, and the ridge 52 plastically deforms the corresponding portion of the metal plate in the plate thickness direction. At this time, the one surface 2 of the metal plate
In 5, the first abutting portion 38 and the projections 40, 41 serve as outer portions of the recesses 26 corresponding to the outer wall surfaces 44, 45 of the projections 40, 41 of the upper mold 22. Pressure is applied in the direction.

On the other hand, the protrusions 52 of the lower mold 23
A portion corresponding to the ridge 52 of the other surface 48 of the metal plate is plastically deformed in the thickness direction. As a result, the portions of the metal plate that should become the wall surfaces 34 and 36 of the recess 26 toward the inside of the recess 26 are directed toward the inside of the recess 26 by a part of the volume of the plastic deformation portion 49 formed by plastic deformation. Deformed in the direction
The wall surfaces 34 and 36 of the recess 26 are perpendicular to the one surface 25 of the holder 21, the middle surface 28 and the bottom 31 of the recess 26.

Further, it is possible to prevent the metal plate portions near the corners 32 and 33 of the holder 21 from being deformed outward due to the plastic deformation action of the metal plate due to the formation of the plastic deformation portion 49 as described above. And the recesses 27 and 29 are
2 and 33 can be formed in a very high precision square shape in plan view, each of which is formed in a substantially right angle shape with a radius of curvature of 0.2 mm or less in plan view.

Further, due to the plastic deformation action, the holder 2
The flatness of the one surface 25, the middle surface 28, and the bottom 31 which are the respective flat portions is also remarkably improved. That is, the upper mold 50
If the first contact portion 38, the middle step surface 42, and the top surface 43 are formed by polishing with high flatness, each flat portion of the holder 21 also has the first contact portion 38, the middle step surface Since the shape is along the top surface 42 and the top surface 43, the surface 25, the middle surface 28, and the bottom 31 can be formed with high flatness.

Therefore, an essential condition required for the shape of the ridge 52 as described above is that the shape of the wall surfaces 34, 36 of the recess 26 of the holder 21 after the press working is determined based on the plastic deformation action described above. One surface 25 of holder 21, middle surface 2
8 and perpendicular to the bottom 31 of the recess 26. The present inventor has confirmed through experiments and trial manufacture of a mold that such essential conditions may exist.

As described above, in this embodiment, the holder 21
Can be significantly improved in shape accuracy. Thereby, when the integrated circuit element 24 is stored in the recess 26 of the holder 21 as described above, the recess 26 and the integrated circuit element 24
To prevent a situation in which water vapor or foreign matter enters the gap to cause a problem such as a decrease in the performance of the integrated circuit element 24 or a connection failure in bonding or the like. Can be.

In the above embodiment, the concave portion 26 is formed in the holder 21 and its shape in a plan view is a square shape. However, such a shape is not essential to the present invention, and is not limited to the metal of the present invention. Only an example of a case where the component is a holder 21 for accommodating a rectangular plate-shaped integrated circuit element 24 therein is shown. The present invention is not limited to the example of the holder 21 of the above-described embodiment, and includes an example in which even when a recess is formed in a metal plate, the shape of the recess in a plan view is an arc or an arbitrary closed curve. The plan view shape of such a recess is appropriately selected in accordance with the shape of the article stored therein.

The present invention relates to the integrated circuit device 24 of the above embodiment.
The present invention is not limited to the metal part 54 described above, but is widely practiced in connection with a metal part that stores an article having a predetermined shape with high precision positioning. As an example, the present invention includes an embodiment in which a convex portion is formed on a metal plate. Such an embodiment is shown in FIGS. Hereinafter, the metal part 54 of the present embodiment will be described. The metal part 54 of the present embodiment is, for example, a rectangular plate-shaped metal plate made of a relatively malleable metal material such as copper, copper alloy, aluminum or aluminum alloy having a predetermined plate thickness t1. The outer peripheral portion is pressed and compressed in the thickness direction, and as shown in FIGS. 7 and 8, the first convex portion 5 having a height H4 is formed.
5 and a second convex portion 57 having a height H5 on the first convex portion 55 are relatively formed. At this time, the plastic deformation portion 58 having a concave shape as described in the above embodiment is provided in a range corresponding to the inner side of the second convex portion 56 on the surface opposite to the convex portion 57 of the metal part 54. The portion 57 is formed in a shape conforming to the shape in plan view.

Here, the convex portion 57 is formed by the upper die 61 having the first convex portion 59 and the second convex portion 60 on the metal plate, and the plastic deformation portion 58 is formed by the ridge 63 of the lower die 62. As a result, the inner peripheral wall surfaces 6 of the protrusions 59 and 60 of the upper die 61 are formed on one surface facing the upper die 61 of the metal plate.
Inward pressure is applied to the portions that become the wall surfaces 66, 67 of the convex portions 57 corresponding to 4, 65 by the convex portions 59, 60.

On the other hand, by the ridge 63 of the lower mold 62,
A portion of the metal plate corresponding to the ridge 63 is plastically deformed in the plate thickness direction. As a result, the portions of the metal plate which should become the wall surfaces 66 and 67 of the convex portion 57 in the direction toward the outside of the convex portion 57 by a part of the volume of the plastic deformation portion 58 formed by plastic deformation. And the wall surfaces 66 and 67 of the convex portion 57
Are formed along the inner peripheral wall surfaces 64, 65 of the convex portions 59, 60 of the upper die 61. That is, the flat part 6 of the metal part 54 pressed on the top surface 59a of the convex part 59 of the upper die 61
9, a metal part 5 pressed on the top surface 60a of the projection 60
The top part 71 of the metal part 54 pressed by the middle part 70 of the 4 and the bottom part 72 of the upper die 61 is formed to have a high flatness and a high degree of parallelism with each other. It is greatly improved.

The wall surfaces 66 and 67 between the flat part 69, the middle part 70 and the top part 71 are formed perpendicular to the flat part 69, the middle part 70 and the top part 71. Further, a ridge 73 between the flat portion 69 and the wall surface 66, the wall surface 66
Ridge 74 between the inner surface 70 and the middle surface 70, the flow bullet surface 70 and the wall surface 67
And the ridge 76 between the wall surface 67 and the top 71 are substantially equal to each other, such as a radius of curvature of about 0.1 to 0.2 mm as described in the first embodiment. At the corners. The same applies to the shape of the projection 57 in a plan view.
The corners 78 of the four corners of the projection 7 and the convex portion 56 are also formed so as to be substantially the corners of the curvature radius, and in this respect also, the shape accuracy of the metal part 54 is improved.

The essential condition required for the shape of the ridge 63 in the present embodiment is that the outer shape of the convex portion 57 of the metal part 54 after the press working is determined based on the plastic deformation action described above. The present inventor has confirmed through experiments and trial production of a mold that the shape conforms to the shape and that such an essential condition can exist as in the case of the first embodiment.

Further, the flatness of each flat portion 69, the middle step portion 70 and the top portion 71, which are the flat portions of the metallic component 54, will be described in detail in the first embodiment accompanying the formation of the plastic deformation portion 58. By the same action as the plastic deformation action described above, it is possible to remarkably improve. Modifications in which the shape and function of the upper mold and the shape and function of the lower mold in each of the above embodiments are interchanged can also be appropriately selected depending on the actual manufacturing process, equipment, shape of the metal product to be manufactured, and the like. And
It belongs to the technical scope of the present invention.

The present invention is not limited to the above-described embodiments and modifications, but includes a wide range of modifications without departing from the spirit of the present invention.

[0051]

As described above, according to the press working method of the first aspect of the present invention, when a metal plate is sandwiched between one mold and the other mold and pressed, the processed part of the metal plate is processed by the one mold. To form Further, the other portion of the deforming portion is plastically deformed in the thickness direction in the vicinity of a portion corresponding to the portion to be processed of the metal plate. At this time, an outward pressure is applied to the processed portion by the processed portion. On the other hand, the area of the metal plate corresponding to the plastically deformed portion is moved to the processed portion side by the other type of deformation acting portion, and only a part of the volume of the plastically deformed volume is reduced by the volume of the metal plate. The workpiece is deformed in a direction toward the one-side workpiece. Therefore, by appropriately selecting the shape of the deformation acting portion, the processed portion of the metal plate after the press working has a shape conforming to the shape of the processed portion. As a result, the shape accuracy of the manufactured metal part can be remarkably improved.

At this time, the plan view shape and the cross-sectional shape of the processed portion do not require any limitation in realizing the above-mentioned action, and the precision of the shape is remarkably improved by using the processed portion having an arbitrary shape. Metal parts can be manufactured. In addition, the one mold and the other mold can be implemented in any combination as an upper mold and a lower mold in an actual mold. Furthermore, since the shape accuracy of the metal part can be remarkably improved, if the shape accuracy of the one mold and the other mold is made high, the flatness and parallelism of each flat part in the obtained metal part will be remarkable. Can be improved.

By using the pressing die according to the second aspect of the present invention for pressing a metal plate, the same operation as that described in the first embodiment of the present invention is realized.
The same functions and effects as those described above are realized. According to the press working die of the invention of claim 3, one of the molds includes a processing portion having the outer peripheral wall surface and a flat surface portion, and one of an inner side and an outer side of the outer peripheral wall surface. In the other mold portion, the portion to be processed of the metal plate that is pressed with the deformation acting portion formed substantially along the outer peripheral wall surface is formed in a shape corresponding to the processed portion.

At this time, if the processing portion is convex toward the other mold, the deformation acting portion is formed outside the outer peripheral wall surface,
If the outer peripheral wall is concave toward the other mold, the deformation acting portion is formed inside the outer peripheral wall. This is because if the processed part is convex, a concave part to be processed is formed on the metal plate, and in order to make the processed part conform to the shape of the processed part, the inner periphery of the concave part of the metal plate is required. This is because the surface must be plastically deformed from the outside toward the processed portion. If the processed part is concave, a convex processed part is formed on the metal plate. To make the processed part conform to the shape of the processed part, the convex processed part of the metal plate is required. This is because it is necessary to plastically deform the outer peripheral surface from inside toward the processed portion.

As described above, according to the present invention, regardless of whether a concave or convex portion is formed on the metal plate, the portion to be processed is shaped to conform to the shape of the one-sided portion. be able to.

According to the fourth aspect of the present invention, the outer peripheral wall surface of the processed portion of the one die and the flat portion are formed perpendicular to each other. Therefore, based on the above-described operation, a wall portion corresponding to the outer peripheral wall surface of the processed portion and a flat portion corresponding to the flat surface portion are formed in the processed portion of the metal plate. Here, since the processed portion can be formed in a shape following the shape of the processed portion, the shape accuracy of the metal part obtained by the press working can be remarkably improved.

Thus, when the processed portion has a rectangular plate-like concave shape, for example, when a rectangular plate-like article such as an integrated circuit element is stored in the concave portion of the metal part, for example,
It is possible to prevent a gap from being formed between the recess and the article, and water vapor or a foreign substance may enter the gap to cause a problem such as a decrease in the performance of the integrated circuit element or a poor connection in bonding or the like. For example, it is possible to prevent deterioration of the properties of the stored articles. Further, even when the processed portion has a convex shape, the mutual perpendicularity between the wall portion and the flat portion and the flatness of the flat portion are significantly improved, so that the use of the obtained metal product is improved. It is enlarged.

The processed part of the metal part according to the fifth aspect of the present invention is formed into a shape substantially in close contact with the one-side processed part by the operation as described in the embodiment of the first aspect of the present invention. Is done. Therefore, the shape accuracy of the metal part can be remarkably improved. At this time, the plan view shape and the cross-sectional shape of the portion to be processed do not require any limitation when realizing the above-described action, and the metal whose shape accuracy is remarkably improved by using the processed portion of an arbitrary shape Parts are realized. In addition, since the shape accuracy of the metal part can be remarkably improved, if the shape accuracy of the one mold and the other mold is made high, the flatness and parallelism of each flat portion in the obtained metal part can be remarkably increased. Can be improved.

The processed part of the metal part according to the sixth aspect of the present invention is formed as a recess, and the cross-sectional shape of the ridge at the boundary between the wall surface of the recess and the plane portion is substantially 0.2 mm or less in radius. Is formed as an angled edge. Therefore, when a rectangular plate-shaped article such as an integrated circuit element is stored in the recess, for example, a gap can be prevented from being formed between the recess and the article. In this way, it is possible to prevent a situation in which the performance of the integrated circuit element is deteriorated or a failure such as a connection failure due to bonding or the like is caused, thereby lowering the characteristics of the stored articles.

In the concave part of the metal part according to the seventh aspect, since each corner in plan view is formed as a substantially angled edge having a radius of curvature having a radius of 0.2 mm or less, For example, even when storing an article including a corner portion in a plan view shape such as an integrated circuit element, it is possible to prevent a gap from being formed between the recess and the article, and to increase the height of the article relative to the recess. Accurate positioning can be realized, and the above-described deterioration of the characteristics of the article due to the gap can be prevented.

[Brief description of the drawings]

FIG. 1 is a plan view of a holder 21 according to one embodiment of the present invention.

FIG. 2 is a cross-sectional view taken along a section line X2-X2 in FIG.

FIG. 3 shows one mold 2 of a mold used for manufacturing the holder 21.
FIG. 2 is a plan view of FIG.

FIG. 4 is a cross-sectional view of the upper mold 22 as viewed from a section line X4-X4 in FIG.

FIG. 5 is a plan view of a lower mold 23 of the mold.

FIG. 6 is a cross-sectional view of the lower die 23 taken along a cutting line X6-X6 in FIG.

FIG. 7 is a plan view of a metal part 54 according to another embodiment of the present invention.

FIG. 8 is a cross-sectional view taken along the line X8-X8 of FIG. 7;

FIG. 9 is a plan view of a conventional holder 1. FIG.

FIG. 10 is a sectional view of a conventional holder 1.

[Explanation of symbols]

Reference Signs List 21 Holder 22, 61 Upper die 23, 62 Lower die 24 Integrated circuit element 25 One surface 26 Depression 27 Upper depression 28 Middle depression 29 Lower depression 30 Bottom 31 Bottom 32, 33, 77, 78 Corner 34, 36, 66, 67 wall surface 35, 37, 46, 47, 73, 74, 75, 76 ridge portion 38 first contact portion 39 convex portion 42, 70 middle step surface 43, 71 top surface 44, 45 outer peripheral wall surface 48, other surface 49, 58 Plastic deformation part 50 Mold 51 Second contact part 52, 63 Projection 54 Metal part 57 Convex part 58 Plastic deformation part 69 Flat part

Claims (7)

[Claims] 1. A pressing method for manufacturing a metal part by pressing a metal plate, comprising: a one-sided mold having a processing portion for processing the metal plate; In order to make the processed part have a shape in accordance with the shape of the processed part, a deformation acting part for plastically deforming the vicinity of a part corresponding to the processed part on the side opposite to the one mold of the metal plate in the plate thickness direction. A press working method in which the metal plate is pressed between the other mold and the other mold. 2. A one-sided mold having a processing part for processing a metal plate, and a metal part of the metal plate for forming a part to be processed by the processing part of the metal plate into a shape along the shape of the processing part. And a second mold having a deforming portion for plastically deforming the vicinity of a portion corresponding to a portion to be processed on the opposite side of the one mold in the thickness direction. 3. The processing portion includes at least one outer peripheral wall surface having a closed curved cross section and at least one flat portion that at least partially covers a tip of the outer peripheral wall surface. 3. The press-working die according to claim 2, wherein the other mold portion on either the inner side or the outer side of the outer peripheral wall is formed in a shape substantially along the outer peripheral wall. 4. The press-working die according to claim 3, wherein an outer peripheral wall surface of the deformation acting portion and the plane portion are formed perpendicular to each other. 5. On one surface, there is a processed portion deformed into a concave or convex shape by press working on the one surface, and the processed portion is pressed by a processed portion of one die of a mold. While being processed, the vicinity of the portion corresponding to the processed portion of the metal part is plastically deformed in the plate thickness direction by the deforming action portion of the other type on the side opposite to the one type, and substantially adheres to the processed portion. Metal parts formed in a different shape. 6. The processed portion is formed as a recess in the one surface, and the recess at least partially covers a wall having a closed curved cross section with respect to the one surface and a tip of the wall. The metal part according to claim 5, further comprising a flat portion, wherein a cross-sectional shape of a ridge at a boundary between the wall surface and the flat portion is formed to have a radius of 0.2 mm or less. 7. Each of the recesses has a radius of 0. 0 in plan view.
The metal part according to claim 6, which is formed in a polygonal shape having a radius of curvature of 2 mm or less.