JP2009267863A - Piezoelectric oscillator - Google Patents

Piezoelectric oscillator Download PDF

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JP2009267863A
JP2009267863A JP2008116363A JP2008116363A JP2009267863A JP 2009267863 A JP2009267863 A JP 2009267863A JP 2008116363 A JP2008116363 A JP 2008116363A JP 2008116363 A JP2008116363 A JP 2008116363A JP 2009267863 A JP2009267863 A JP 2009267863A
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integrated circuit
circuit element
recess
container body
piezoelectric
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Ryoma Sasagawa
亮磨 笹川
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Kyocera Crystal Device Corp
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Kyocera Crystal Device Corp
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Abstract

<P>PROBLEM TO BE SOLVED: To provide a piezoelectric oscillator which prevents from shorting out without providing a resin agent in a recessed portion where an integrated circuit element is mounted, and adaptive to size reduction. <P>SOLUTION: The piezoelectric oscillator is characterized in that one container body 110 has two recessed portions 111 and 112 to mount a piezoelectric vibration element 120 in the first recessed portion 111 and the integrated circuit element 130 at least having an oscillation circuit in the second recessed portion 112, and the interval size A between an outer peripheral side surface of the integrated circuit element 130 and an inner side surface of the second recessed portion 112 which is opposed to the outer peripheral side surface is ≥20 μm and ≤100 μm. <P>COPYRIGHT: (C)2010,JPO&INPIT

Description

本発明は、電子機器に用いられる圧電発振器に関するものである。   The present invention relates to a piezoelectric oscillator used in an electronic device.

従来、携帯用通信機器等の電子機器には、電子部品の一つである圧電発振器が搭載される。この圧電発振器は例えば基準信号発生源又はクロック信号発生源などとして用いられている。   2. Description of the Related Art Conventionally, a piezoelectric oscillator that is one of electronic components is mounted on an electronic device such as a portable communication device. This piezoelectric oscillator is used as a reference signal generation source or a clock signal generation source, for example.

図5は、従来の圧電発振器の一形態を示す分解斜視図である。
圧電発振器500は、第一の容器体502、圧電振動素子(不図示)及び蓋体503により主に構成される圧電振動子部501と、第二の容器体511と集積回路素子512により主に構成されている回路部510とから構成されている。
FIG. 5 is an exploded perspective view showing one embodiment of a conventional piezoelectric oscillator.
The piezoelectric oscillator 500 mainly includes a piezoelectric vibrator portion 501 mainly composed of a first container body 502, a piezoelectric vibration element (not shown) and a lid body 503, a second container body 511 and an integrated circuit element 512. It is comprised from the circuit part 510 comprised.

回路部510を構成する第二の容器体511の外側下面には、外部接続電極端子513が設けられている。第二の容器体511には上面側に開口部を有する凹部514が設けられており、その凹部514内底面には複数個の集積回路素子接続用電極パッドが設けられている。この集積回路素子接続用電極パッドに集積回路素子512が超音波接合法により搭載されている。また、凹部514を囲う側壁部の一部には切欠部515が設けられている。更に凹部514を囲う側壁部の頂面の角部には、後述する圧電振動子部501と機械的及び電気的接続をとるための圧電振動子部接続用端子516が設けられ、第二の容器体の内部や表面に設けた導配線により、外部接続電極端子513,集積回路素子512及び圧電振動子部接続用端子516が電気的に接続されている。   External connection electrode terminals 513 are provided on the outer lower surface of the second container body 511 constituting the circuit unit 510. The second container body 511 is provided with a recess 514 having an opening on the upper surface side, and a plurality of integrated circuit element connection electrode pads are provided on the bottom surface of the recess 514. An integrated circuit element 512 is mounted on the electrode pad for connecting the integrated circuit element by an ultrasonic bonding method. Further, a notch 515 is provided in a part of the side wall that surrounds the recess 514. Furthermore, a piezoelectric vibrator portion connection terminal 516 for mechanically and electrically connecting to a piezoelectric vibrator portion 501 described later is provided at the corner of the top surface of the side wall portion surrounding the concave portion 514, and the second container The external connection electrode terminal 513, the integrated circuit element 512, and the piezoelectric vibrator portion connection terminal 516 are electrically connected by a conductive wiring provided inside or on the surface of the body.

また、凹部514内に搭載された集積回路素子512と凹部514の内面との間には、アンダーフィルとして絶縁性の樹脂剤517(以下、樹脂剤という)が切欠部515を通って充填されている。この樹脂剤517を設けることにより、外部より侵入した半田屑が集積回路素子512の回路形成面や集積回路素子接続用電極パッドに接触し、集積回路内や電極パッド間でショートを起こさないように回路形成面及びその周囲を保護する。これらの構成要素により回路部510が構成されている。尚、半田屑は、外部の電子基板に圧電発振器を含む電子部品を半田により実装した際に、半田からその一部分が分離してしまうことにより発生し、最小径100μm以上の立体構造となっている。   In addition, an insulating resin agent 517 (hereinafter referred to as a resin agent) is filled as an underfill between the integrated circuit element 512 mounted in the recess 514 and the inner surface of the recess 514 through the notch 515. Yes. By providing this resin agent 517, solder scraps that have entered from the outside come into contact with the circuit forming surface of the integrated circuit element 512 and the electrode pads for connecting the integrated circuit elements, so that no short circuit occurs in the integrated circuit or between the electrode pads. Protect the circuit forming surface and its surroundings. A circuit unit 510 is configured by these components. Solder scrap is generated when a part of the electronic component including the piezoelectric oscillator is separated from the solder when the electronic component is mounted on the external electronic substrate by solder, and has a three-dimensional structure with a minimum diameter of 100 μm or more. .

圧電振動子部501を構成する第一の容器体502の外側下面には、回路部510と機械的及び電気的接続をとるための回路部接続用端子504が設けられている。第一の容器体502には上面側に開口部を有する凹部(不図示)が設けられており、その凹部内には圧電振動素子が搭載されている。この凹部は、凹部を囲う第一の容器体502の側壁部頂面に凹部開口部を覆うように配置し接合された蓋体503により気密封止されている。これらの構成要素により圧電振動子部501が構成されている。   A circuit unit connection terminal 504 for mechanically and electrically connecting to the circuit unit 510 is provided on the outer lower surface of the first container body 502 constituting the piezoelectric vibrator unit 501. The first container body 502 is provided with a recess (not shown) having an opening on the upper surface side, and a piezoelectric vibration element is mounted in the recess. The concave portion is hermetically sealed by a lid body 503 that is disposed and bonded to the top surface of the side wall portion of the first container body 502 surrounding the concave portion so as to cover the concave portion opening. A piezoelectric vibrator portion 501 is constituted by these components.

圧電発振器500は、回路部510の上に圧電振動子部501を重ねて配置し、回路部510の圧電振動子部接続用端子516と圧電振動子部501の回路部接続用端子504を機械的及び電気的に接続することにより構成されている(例えば、特許文献1参照)。   In the piezoelectric oscillator 500, the piezoelectric vibrator unit 501 is placed on the circuit unit 510 so that the piezoelectric vibrator unit connection terminal 516 of the circuit unit 510 and the circuit unit connection terminal 504 of the piezoelectric vibrator unit 501 are mechanically connected. And it is comprised by connecting electrically (for example, refer patent document 1).

又、他の形態の従来の圧電発振器としては、容器体において、第一の凹部が容器体の一方の主面に開口部が有するように設けられており、且つ第二の凹部が容器体の他方の主面に開口部を有するように設けられている圧電発振器がある。第一の凹部は、その内部に圧電振動子が搭載され、蓋体により気密封止されている。第二の凹部内には集積回路素子が搭載されており、その集積回路素子と第二の凹部内面との間に、アンダーフィルとなる保護用の樹脂剤が注入されている。(例えば、特許文献2参照)。   As another conventional piezoelectric oscillator, in the container body, the first recess is provided so that the opening is provided on one main surface of the container body, and the second recess is the container body. There is a piezoelectric oscillator provided with an opening on the other main surface. The first recess has a piezoelectric vibrator mounted therein and is hermetically sealed by a lid. An integrated circuit element is mounted in the second recess, and a protective resin agent serving as an underfill is injected between the integrated circuit element and the inner surface of the second recess. (For example, refer to Patent Document 2).

特開2006−211065号公報JP 2006-211065 A 特開2005−6171号公報JP 2005-6171 A

しかしながら、上述した従来の圧電発振器では、集積回路素子の回路形成面や集積回路素子接続用電極パッドに半田屑が接触しないように保護するため樹脂剤を設ける必要があった。そのためには、樹脂剤を集積回路素子と集積回路素子が搭載されている容器体の凹部との間に注入する工程が必要となる。また、樹脂剤を注入するためには、従来の圧電発振器のように、集積回路素子と集積回路素子が搭載されている容器体の凹部との間等に、樹脂剤を注入することができる空間や構造を容器体に別途設けなくてはならず、容器体の剛性の低下や、容器体の小型化を阻害する恐れがある。   However, in the conventional piezoelectric oscillator described above, it is necessary to provide a resin agent in order to protect the solder scraps from coming into contact with the circuit forming surface of the integrated circuit element and the electrode pad for connecting the integrated circuit element. For that purpose, the process which inject | pours a resin agent between the recessed part of the container body in which an integrated circuit element and an integrated circuit element are mounted is needed. Further, in order to inject the resin agent, a space in which the resin agent can be injected between the integrated circuit element and the concave portion of the container body on which the integrated circuit element is mounted, as in a conventional piezoelectric oscillator. And a structure must be separately provided in the container body, which may reduce the rigidity of the container body and hinder downsizing of the container body.

そこで本発明では、前記した問題を解決し、集積回路素子が搭載される凹部内に樹脂剤を設けることなくショートを防ぎ、且つ小型化にも対応可能な圧電発振器を提供することを目的とする。   SUMMARY OF THE INVENTION Accordingly, an object of the present invention is to provide a piezoelectric oscillator that solves the above-described problems, prevents a short circuit without providing a resin agent in a recess in which an integrated circuit element is mounted, and can cope with downsizing. .

本発明に係る圧電発振器は上記課題を解決するためになされたものであり、1つの容器体に2つの凹部が設けられており、第一の凹部内には圧電振動素子が搭載され、第二の凹部内に発振回路を少なくとも内蔵する集積回路素子が搭載されている圧電発振器であって、この集積回路素子の外周側面と、この外周側面に対向する第二の凹部の内側面とのとの間隔の寸法が、20μm以上100μm未満であることを特徴とする。   The piezoelectric oscillator according to the present invention has been made to solve the above-described problem. One container body is provided with two recesses, a piezoelectric vibration element is mounted in the first recess, and the second A piezoelectric oscillator in which an integrated circuit element including at least an oscillation circuit is mounted in the recess of the integrated circuit element, and an outer peripheral side surface of the integrated circuit element and an inner side surface of the second recess facing the outer peripheral side surface. The distance dimension is 20 μm or more and less than 100 μm.

又、本発明に係る圧電発振器は、2つの容器体にはそれぞれ凹部が設けられており、第一の容器体の凹部内には圧電振動素子が搭載され、第二の容器体の凹部内には発振回路を少なくとも内蔵する半導体素子が搭載され、第一の容器体と第二の容器体が重ねて機械的且つ電気的に接続されている圧電発振器であって、この集積回路素子の外周側面と、この外周側面と対向する第二の容器体の凹部の内側面との間隔の寸法が、20μm以上100μm未満であることを特徴とする。   In the piezoelectric oscillator according to the present invention, the two container bodies each have a recess, and the piezoelectric vibration element is mounted in the recess of the first container body, and in the recess of the second container body. Is a piezoelectric oscillator in which a semiconductor element having at least a built-in oscillation circuit is mounted and the first container body and the second container body are overlapped and mechanically and electrically connected to each other. And the dimension of the space | interval with the inner surface of the recessed part of the 2nd container body facing this outer peripheral side surface is 20 micrometers or more and less than 100 micrometers.

本発明に係る圧電発振器では、集積回路素子の外周側面と、この外周側面と対向する集積回路素子を搭載する凹部の内側面との間隔の寸法が、20μm以上100μm未満である。このような構造により、最小径100μm以上で立体構造である半田屑は、集積回路素子が搭載されている凹部の内側面と、集積回路素子の外周側面との間の隙間に入り込み、集積回路素子の回路形成面や集積回路素子接続用電極パッドに接触することができず、集積回路内や集積回路素子接続用電極パッド間でショートは発生しない。よって、集積回路素子の回路形成面や集積回路素子接続用電極パッドに半田屑が接触しないよう保護するため設けられていた樹脂剤は必要がなく、樹脂剤を注入する工程も必要無いため、圧電発振器の製造工程の短縮が可能となる。又、この樹脂剤を注入するために容器体に別途設ける必要があった空間や構造も必要なくなり、容器体の剛性を低下させることがなく、容器体の小型化も可能となる。   In the piezoelectric oscillator according to the present invention, the distance between the outer peripheral side surface of the integrated circuit element and the inner side surface of the concave portion on which the integrated circuit element facing the outer peripheral side surface is 20 μm or more and less than 100 μm. With such a structure, the solder scrap which is a three-dimensional structure with a minimum diameter of 100 μm or more enters the gap between the inner side surface of the recess in which the integrated circuit element is mounted and the outer peripheral side surface of the integrated circuit element, and the integrated circuit element The circuit forming surface and the electrode pad for connecting the integrated circuit element cannot be contacted, and a short circuit does not occur in the integrated circuit or between the electrode pads for connecting the integrated circuit element. Therefore, there is no need for the resin agent provided to protect the scraps from coming into contact with the circuit forming surface of the integrated circuit element and the electrode pad for connecting the integrated circuit element, and there is no need for the step of injecting the resin agent. The manufacturing process of the oscillator can be shortened. Further, a space and a structure that need to be separately provided in the container body for injecting the resin agent are not required, the rigidity of the container body is not lowered, and the container body can be downsized.

更に、集積回路素子が搭載されている凹部の内側面と、集積回路素子の外周側面との間隔の寸法の下限が20μmであることから、集積回路素子の搭載工程中に、集積回路素子を搭載する凹部を囲う枠体に集積回路素子が接触し、集積回路素子に割れ、欠け又は搭載ズレが生じることが無く、集積回路素子を確実に搭載することが可能となる。   Furthermore, since the lower limit of the distance between the inner side surface of the recess in which the integrated circuit element is mounted and the outer peripheral side surface of the integrated circuit element is 20 μm, the integrated circuit element is mounted during the integrated circuit element mounting process. The integrated circuit element comes into contact with the frame surrounding the concave portion to be formed, and the integrated circuit element is not cracked, chipped or mounted, and the integrated circuit element can be reliably mounted.

よって本発明は、集積回路素子が搭載される凹部内に樹脂剤を設けることなくショートを防ぎ、且つ小型化にも対応可能な圧電発振器を提供できる効果を奏する。   Therefore, the present invention has an effect that it is possible to provide a piezoelectric oscillator that can prevent a short circuit without being provided with a resin agent in a recess in which an integrated circuit element is mounted, and that can cope with downsizing.

以下、本発明を添付図面に基づいて詳細に説明する。尚、各図では、説明を明りょうにするため構成要素の一部を図示せず、また図示した構成要素の寸法も一部誇張して示している。   Hereinafter, the present invention will be described in detail with reference to the accompanying drawings. In each drawing, for clarity of explanation, some of the components are not shown, and the dimensions of the components shown are also exaggerated.

(第一の実施形態)
図1は、本発明の第一の実施形態に係る圧電発振器を示した概略断面図である。図2は本発明の第一の実施形態に係る圧電発振器を実装側から示した平面図である。
図1に示すように、本発明の第一の実施形態に係る圧電発振器100は、容器体110と、圧電振動素子120と、集積回路素子130と、蓋体140とにより主に構成されている。
(First embodiment)
FIG. 1 is a schematic cross-sectional view showing a piezoelectric oscillator according to a first embodiment of the present invention. FIG. 2 is a plan view showing the piezoelectric oscillator according to the first embodiment of the present invention from the mounting side.
As shown in FIG. 1, the piezoelectric oscillator 100 according to the first embodiment of the present invention is mainly configured by a container body 110, a piezoelectric vibration element 120, an integrated circuit element 130, and a lid body 140. .

容器体110は、平面視矩形状の基板110aの一方の主面上に枠体110bが設けられ、且つ基板110aの他方の主面上には枠体110cが設けられることにより構成される。これにより、基板110a一方の主面上には第一の凹部111が形成され、基板110aの他方の主面上には第二の凹部112が形成されている。尚、この基板110a、枠体110b及び110cは、例えば、ガラス−セラミック、アルミナセラミックス等のセラミック材料から成る。   The container body 110 is configured by providing a frame body 110b on one main surface of a substrate 110a having a rectangular shape in plan view and providing a frame body 110c on the other main surface of the substrate 110a. As a result, a first recess 111 is formed on one main surface of the substrate 110a, and a second recess 112 is formed on the other main surface of the substrate 110a. The substrate 110a and the frames 110b and 110c are made of a ceramic material such as glass-ceramic or alumina ceramic.

又、第一の凹部111内に露出した基板110aの一方の主面上には、2個一対の圧電振動素子接続用電極パッド113が設けられており、第二の凹部112内に露出した基板110aの他方の主面上には、複数個の集積回路素子接続用電極パッド114が設けられている。更に、枠体110cの第二の凹部112囲う側頂面の四隅には、圧電発振器100を実装する際に外部の電子基板と導通固着する外部接続用電極端子115が設けられている。   Further, two pairs of piezoelectric vibration element connection electrode pads 113 are provided on one main surface of the substrate 110 a exposed in the first recess 111, and the substrate exposed in the second recess 112. On the other main surface of 110a, a plurality of integrated circuit element connection electrode pads 114 are provided. Furthermore, external connection electrode terminals 115 that are conductively fixed to an external electronic substrate when the piezoelectric oscillator 100 is mounted are provided at the four corners of the side surface surrounding the second recess 112 of the frame 110c.

圧電振動素子120は、平面視矩形状の圧電素板と、その圧電素板の両主面中央部に設けられた励振用電極(不図示)と、その励振用電極から圧電素板の一方の短辺端部にまで延設された引出電極(不図示)とにより主に構成されている。このような構成の圧電振動素子120は、引出電極と圧電振動素子接続用電極パッド113とを、導電性接着剤121により導通固着することにより第一の凹部111内に搭載されている。   The piezoelectric vibration element 120 includes a piezoelectric element plate having a rectangular shape in plan view, an excitation electrode (not shown) provided at the center of both main surfaces of the piezoelectric element plate, and one of the piezoelectric element plates from the excitation electrode. It is mainly composed of an extraction electrode (not shown) extending to the short side end. The piezoelectric vibration element 120 having such a configuration is mounted in the first recess 111 by electrically connecting and fixing the extraction electrode and the piezoelectric vibration element connecting electrode pad 113 with the conductive adhesive 121.

蓋体140は、42アロイ、コバール又はリン青銅等の金属から成る平板であり、枠体110bの第一の凹部111開口側頂面上に第一の凹部111の開口部を覆う形態で配置し、枠体110bに接合されている。この蓋体140により第一の凹部111内は気密封止されている。   The lid 140 is a flat plate made of a metal such as 42 alloy, Kovar, or phosphor bronze, and is arranged on the top surface of the frame 110b on the opening side of the first recess 111 so as to cover the opening of the first recess 111. Are joined to the frame 110b. The lid 140 is hermetically sealed in the first recess 111.

集積回路素子130は、第二の凹部112内に露出した基板110aの他方の主面上に設けられた複数個の集積回路素子接続用電極パッド114上に搭載されている。この集積回路素子130内には、発振回路や温度補償回路等により構成される電子回路が設けられている。この電子回路は、圧電振動素子120及び容器体110に設けられた外部接続用電極端子115と電気的に接続されている。   The integrated circuit element 130 is mounted on a plurality of integrated circuit element connection electrode pads 114 provided on the other main surface of the substrate 110 a exposed in the second recess 112. In the integrated circuit element 130, an electronic circuit including an oscillation circuit, a temperature compensation circuit, and the like is provided. The electronic circuit is electrically connected to the piezoelectric vibration element 120 and the external connection electrode terminal 115 provided on the container body 110.

集積回路素子130を第二の凹部112内に搭載した際、集積回路素子130の外周側面と、その外周側面と対向する第二の凹部112の内側面との間の間隔Aは、20μm以上100μm未満となる。このような構造により、最小径100μm以上で立体構造の半田屑は、集積回路素子130の外周側面とその外周側面と対向する第二の凹部112の内側面との間の隙間に入り込めないため、集積回路素子130の回路形成面や集積回路素子接続用電極パッド114に接触することができず、集積回路内や集積回路素子接続用電極パッド114の間でショートを発生させない。よって、集積回路素子130の回路形成面に半田屑等が接触しないように保護するために従来設けられていた樹脂剤(アンダーフィル)は必要がなく、樹脂剤を注入する工程も必要無なくなる。これにより、圧電発振器の製造工程の短縮が可能となる。又、従来の圧電発振器のように、この樹脂剤を注入するために容器体に設ける必要があった空間や構造も必要なくなり、容器体の剛性の低下もなく、容器体の小型化も可能となる。   When the integrated circuit element 130 is mounted in the second recess 112, the interval A between the outer peripheral side surface of the integrated circuit element 130 and the inner side surface of the second recess 112 facing the outer peripheral side surface is 20 μm or more and 100 μm. Less than. With such a structure, the three-dimensional structure solder scrap having a minimum diameter of 100 μm or more cannot enter the gap between the outer peripheral side surface of the integrated circuit element 130 and the inner side surface of the second recess 112 facing the outer peripheral side surface. Therefore, the circuit formation surface of the integrated circuit element 130 and the electrode pad 114 for connecting the integrated circuit element cannot be contacted, and a short circuit does not occur in the integrated circuit or between the electrode pads 114 for connecting the integrated circuit element. Therefore, the resin agent (underfill) conventionally provided for protecting the integrated circuit element 130 from being contacted with solder scraps is not necessary, and the step of injecting the resin agent is not necessary. Thereby, the manufacturing process of the piezoelectric oscillator can be shortened. In addition, unlike the conventional piezoelectric oscillator, there is no need for a space or a structure that must be provided in the container body for injecting the resin agent, and there is no reduction in the rigidity of the container body, and the container body can be downsized. Become.

又、集積回路素子130の外周側面とその外周側面と対向する第二の凹部112の内側面との間隔Aの下限寸法が20μmであることから、集積回路素子130の搭載工程中に、集積回路素子130を搭載する第二の凹部112を囲う枠体110cに集積回路素子130が接触し、集積回路素子130に割れ、欠け又は搭載ズレが生じることが無く、集積回路素子130を確実に容器体110に搭載することが可能となる。   In addition, since the lower limit dimension of the distance A between the outer peripheral side surface of the integrated circuit element 130 and the inner side surface of the second recess 112 facing the outer peripheral side surface is 20 μm, the integrated circuit The integrated circuit element 130 comes into contact with the frame 110c surrounding the second recess 112 for mounting the element 130, and the integrated circuit element 130 is reliably broken without being cracked, chipped, or mounted. 110 can be mounted.

(第二の実施形態)
図3は、本発明の第二の実施形態に係る圧電発振器を示す概略断面図である。図4は、本発明の第二の実施形態に係る圧電発振器を構成する回路部を、圧電振動子部側から示した平面図である。
本発明の第二の実施形態に係る圧電発振器は、圧電振動素子や集積回路素子を搭載する容器体の構造が、第一の実施形態とは異なる。
(Second embodiment)
FIG. 3 is a schematic cross-sectional view showing a piezoelectric oscillator according to the second embodiment of the present invention. FIG. 4 is a plan view showing a circuit unit constituting the piezoelectric oscillator according to the second embodiment of the present invention from the piezoelectric vibrator unit side.
The piezoelectric oscillator according to the second embodiment of the present invention is different from the first embodiment in the structure of the container body on which the piezoelectric vibration element and the integrated circuit element are mounted.

図3に示すように、本発明の第二の実施形態に係る圧電発振器300は、第一の容器体302、圧電振動素子120及び蓋体140により主に構成される圧電振動子部301と、第二の容器体311と集積回路素子130により主に構成されている回路部310とから構成されている。従って、圧電振動素子120と集積回路素子130を異なる容器体に搭載している点で第一の実施形態と異なる。   As shown in FIG. 3, the piezoelectric oscillator 300 according to the second embodiment of the present invention includes a piezoelectric vibrator section 301 mainly composed of a first container body 302, a piezoelectric vibration element 120, and a lid body 140, It is composed of a second container body 311 and a circuit unit 310 mainly composed of the integrated circuit element 130. Therefore, it differs from the first embodiment in that the piezoelectric vibration element 120 and the integrated circuit element 130 are mounted in different container bodies.

回路部310を構成する第二の容器体311の外側下面には、外部接続用電極端子313が設けられている。第二の容器体311には上面側に開口部を有する凹部314が設けられており、その凹部314内底面には複数個の集積回路素子接続用電極パッド315が設けられている。この集積回路素子接続用電極パッド315上に集積回路素子130が搭載されている。更に凹部314を囲う側壁部の頂面の角部には、後述する圧電振動子部301と機械的及び電気的接続をとるための圧電振動子部接続用端子316が設けられ、第二の容器体311の内部や表面に設けた導配線により、外部接続用電極端子313,集積回路素子130及び圧電振動子部接続用電極端子316が電気的に接続されている。   An external connection electrode terminal 313 is provided on the outer lower surface of the second container body 311 constituting the circuit unit 310. The second container body 311 is provided with a recess 314 having an opening on the upper surface side, and a plurality of integrated circuit element connection electrode pads 315 are provided on the inner bottom surface of the recess 314. An integrated circuit element 130 is mounted on the electrode pad 315 for connecting the integrated circuit element. Furthermore, a piezoelectric vibrator portion connection terminal 316 for mechanically and electrically connecting a piezoelectric vibrator portion 301 to be described later is provided at the corner of the top surface of the side wall portion surrounding the concave portion 314, and the second container The external connection electrode terminal 313, the integrated circuit element 130, and the piezoelectric vibrator portion connection electrode terminal 316 are electrically connected by a conductive wiring provided inside or on the surface of the body 311.

圧電振動子部301を構成する第一の容器体302の外側下面には、回路部310と機械的及び電気的接続をとるための回路部接続用電極端子305が設けられている。又、第一の容器体302には上面側に開口部を有する凹部306が設けられている。更に、凹部306内底面上には、2個一対の圧電振動素子接続用電極パッド303が設けられており、圧電振動素子120が、導電性接着剤121により圧電振動素子接続用電極パッド303上に搭載されている。この凹部306は、凹部306を囲う側壁部頂面に凹部306開口部を覆うように配置し接合された蓋体140により気密封止されている。これらの構成要素により圧電振動子部301が構成されている。   A circuit unit connection electrode terminal 305 for mechanically and electrically connecting to the circuit unit 310 is provided on the outer lower surface of the first container body 302 constituting the piezoelectric vibrator unit 301. The first container body 302 is provided with a recess 306 having an opening on the upper surface side. Further, two pairs of piezoelectric vibration element connection electrode pads 303 are provided on the bottom surface of the recess 306, and the piezoelectric vibration element 120 is placed on the piezoelectric vibration element connection electrode pad 303 by the conductive adhesive 121. It is installed. The recess 306 is hermetically sealed by a lid 140 that is arranged and bonded to the top surface of the side wall that surrounds the recess 306 so as to cover the opening of the recess 306. The piezoelectric vibrator unit 301 is configured by these components.

圧電発振器300は、回路部310の上に圧電振動子部301を重ねて配置し、回路部310の圧電振動子部接続用電極端子316と圧電振動子部301の回路部接続用電極端子305を機械的及び電気的に接続することにより構成されている。   In the piezoelectric oscillator 300, the piezoelectric vibrator unit 301 is disposed on the circuit unit 310, and the piezoelectric vibrator unit connection electrode terminal 316 of the circuit unit 310 and the circuit unit connection electrode terminal 305 of the piezoelectric vibrator unit 301 are arranged. It is configured by connecting mechanically and electrically.

圧電発振器300においては、集積回路素子130を第二の容器体311内に搭載した際、集積回路素子130の外周側面と、その外周側面と対向する凹部314の内側面との間の間隔Bが、20μm以上100μm未満となる。このような構造にすることにより、第一の実施形態における圧電発振器100と同様に、最小径100μm以上の立体構造の半田屑は、集積回路素子130の外周側面と、その外周側面と対向する凹部314の内側面との間の隙間には入り込むことができず、集積回路素子130の回路形成面や集積回路素子接続用電極パッド315に半田屑が接触することがない。よって、集積回路素子130の回路形成面や集積回路素子接続用電極パッド315に半田屑等が接触しないように保護するために従来設けられていた樹脂剤は必要がなく、この樹脂剤を注入する工程も必要無いため、圧電発振器の製造工程の短縮が可能となる。又、従来の圧電発振器のように、樹脂剤を注入するために容器体に設ける必要があった空間や構造も必要なくなり、容器体の剛性の低下もなく、容器体の小型化も可能となる。   In the piezoelectric oscillator 300, when the integrated circuit element 130 is mounted in the second container body 311, the distance B between the outer peripheral side surface of the integrated circuit element 130 and the inner side surface of the recess 314 facing the outer peripheral side surface is set. 20 μm or more and less than 100 μm. By adopting such a structure, like the piezoelectric oscillator 100 in the first embodiment, the three-dimensional structure solder scrap having a minimum diameter of 100 μm or more is formed on the outer peripheral side surface of the integrated circuit element 130 and the concave portion facing the outer peripheral side surface. It is impossible to enter the gap between the inner surface of 314 and solder scraps do not come into contact with the circuit forming surface of the integrated circuit element 130 or the electrode pad 315 for connecting the integrated circuit element. Therefore, there is no need for a resin agent that has been conventionally provided to protect the circuit formation surface of the integrated circuit element 130 or the electrode pad 315 for connecting the integrated circuit element from contact with solder scraps, and this resin agent is injected. Since no process is required, the manufacturing process of the piezoelectric oscillator can be shortened. In addition, unlike the conventional piezoelectric oscillator, there is no need for a space or a structure that needs to be provided in the container body for injecting the resin agent, the rigidity of the container body is not reduced, and the container body can be downsized. .

又、集積回路素子130の外周側面とその外周側面と対向する凹部314の内側面との間隔Bの寸法下限が20μmであることから、集積回路素子130の搭載工程中に、集積回路素子130を搭載する第二の容器体311に集積回路素子130が接触することがないため、集積回路素子130に割れ、欠け又は搭載ズレが生じることが無く、集積回路素子130を確実に第二の容器体311に搭載することが可能となる。   In addition, since the lower limit of the distance B between the outer peripheral side surface of the integrated circuit element 130 and the inner side surface of the recess 314 facing the outer peripheral side surface is 20 μm, the integrated circuit element 130 is mounted during the mounting process of the integrated circuit element 130. Since the integrated circuit element 130 is not in contact with the second container body 311 to be mounted, the integrated circuit element 130 is not cracked, chipped, or mounted, and the integrated circuit element 130 is securely attached to the second container body. 311 can be mounted.

尚、本発明では、集積回路素子の外周側面と、その外周側面と対向する凹部の内側面との間の間隔が100μm未満であるため、集積回路素子の搭載方法として金属バンプのみで接合する超音波接合方法を用いることは難しい。よって、本発明における集積回路素子の搭載方法としては、まず、集積回路素子接続用電極パッドの上に、金バンプ等から成るバンプとこのバンプを覆うように形成された半田を設ける。そしてその半田に集積回路素子の回路形成面に設けられている容器体接続用電極パッドが接触するように集積回路素子を配置する。その後、集積回路素子130が配置された容器体をリフロー手段などにかけて、半田を加熱溶融しその後冷却固化する。この方法により、集積回路素子接続用電極パッドと集積回路素子の容器体接続用電極パッドは半田により電気的、機械的に接続固着され、集積回路素子は凹部内に搭載されることになる。本発明では、前記のような方法により集積回路素子を容器体に搭載している。   In the present invention, since the distance between the outer peripheral side surface of the integrated circuit element and the inner side surface of the recess facing the outer peripheral side surface is less than 100 μm, the integrated circuit element is mounted by using only metal bumps. It is difficult to use a sonic bonding method. Therefore, as a method for mounting an integrated circuit element in the present invention, first, a bump made of a gold bump or the like and solder formed so as to cover the bump are provided on the electrode pad for connecting the integrated circuit element. Then, the integrated circuit element is arranged so that the electrode for connecting the container provided on the circuit forming surface of the integrated circuit element comes into contact with the solder. Thereafter, the container body in which the integrated circuit element 130 is disposed is placed on reflow means or the like to heat and melt the solder, and then solidify by cooling. By this method, the integrated circuit element connection electrode pad and the container body connection electrode pad of the integrated circuit element are electrically and mechanically connected and fixed by solder, and the integrated circuit element is mounted in the recess. In the present invention, the integrated circuit element is mounted on the container body by the method as described above.

なお、前記した実施形態以外にも、本発明の要旨を逸脱しない範囲において種々の変更、改良等が可能である。例えば、前記各実施形態に示した圧電発振器では、内部に搭載する圧電振動素子として、平面視矩形状の圧電素板の表面に励振用電極や引出電極を設けた形態の圧電振動素子を示したが、これに限定することなく、例えば、平面視形状が円形や音叉形の圧電素板に各種電極を設けた形態の圧電振動素子でもよく、又圧電振動素子に変えて弾性表面波素子を用いても構わない。   In addition to the above-described embodiments, various changes and improvements can be made without departing from the scope of the present invention. For example, in the piezoelectric oscillator shown in each of the above embodiments, the piezoelectric vibration element of the form in which the excitation electrode and the extraction electrode are provided on the surface of the piezoelectric element plate having a rectangular shape in plan view is shown as the piezoelectric vibration element mounted inside. However, the present invention is not limited to this, for example, a piezoelectric vibration element in which various electrodes are provided on a piezoelectric base plate having a circular or tuning fork shape in plan view, or a surface acoustic wave element is used instead of the piezoelectric vibration element. It doesn't matter.

本発明の第一の実施形態に係る圧電発振器を示した概略断面図である。1 is a schematic cross-sectional view showing a piezoelectric oscillator according to a first embodiment of the present invention. 本発明の第一の実施形態に係る圧電発振器を実装側から示した平面図である。It is the top view which showed the piezoelectric oscillator which concerns on 1st embodiment of this invention from the mounting side. 本発明の第二の実施形態に係る圧電発振器を示す概略断面図である。It is a schematic sectional drawing which shows the piezoelectric oscillator which concerns on 2nd embodiment of this invention. 本発明の第二の実施形態に係る圧電発振器を構成する回路部を、圧電振動子部接合側から示した平面図である。It is the top view which showed the circuit part which comprises the piezoelectric oscillator which concerns on 2nd embodiment of this invention from the piezoelectric vibrator part joining side. 従来の圧電発振器の一形態を示す分解斜視図である。It is a disassembled perspective view which shows one form of the conventional piezoelectric oscillator.

符号の説明Explanation of symbols

100,300・・・圧電発振器
110・・・容器体
110a・・・基板
110b,110c・・・枠部
111・・・第一の凹部
112・・・第二の凹部
113,303・・・圧電振動素子接続用電極パッド
114,315・・・集積回路素子接続用電極パッド
115,313・・・外部接続用電極端子
120・・・圧電振動素子
121・・・導電性接着剤
130・・・集積回路素子
140・・・蓋体
301・・・圧電振動子部
302・・・第一の容器体
305・・・回路部接続用電極端子
306,314・・・凹部
310・・・回路部
311・・・第二の容器体
316・・・圧電振動子部接続用電極端子
A,B・・・集積回路素子の外周側面とその外周側面と対向する凹部の内側面との間隔
DESCRIPTION OF SYMBOLS 100,300 ... Piezoelectric oscillator 110 ... Container body 110a ... Board | substrate 110b, 110c ... Frame part 111 ... 1st recessed part 112 ... 2nd recessed part 113, 303 ... Piezoelectric Electrode pads for connection of vibration elements 114, 315 ... Electrode pads for connection of integrated circuit elements 115, 313 ... Electrode terminals for external connection 120 ... Piezoelectric vibration elements 121 ... Conductive adhesive 130 ... Integration Circuit element 140: Lid 301: Piezoelectric vibrator unit 302 ... First container body 305 ... Circuit unit connection electrode terminal 306, 314 ... Concave part 310 ... Circuit unit 311 ..Second container body 316: Electrode terminal for connecting piezoelectric vibrator part A, B: Distance between the outer peripheral side surface of the integrated circuit element and the inner side surface of the concave portion facing the outer peripheral side surface

Claims (2)

1つの容器体に2つの凹部が設けられており、第一の凹部内には圧電振動素子が搭載され、第二の凹部内には発振回路を少なくとも内蔵する集積回路素子が搭載されている圧電発振器であって、
前記集積回路素子の外周側面と、前記外周側面に対向する前記第二の凹部の内側面との間隔の寸法が、20μm以上100μm未満であることを特徴とする圧電発振器。
Two recesses are provided in one container body, a piezoelectric vibration element is mounted in the first recess, and a piezoelectric circuit in which an integrated circuit element containing at least an oscillation circuit is mounted in the second recess. An oscillator,
A piezoelectric oscillator, wherein a distance between an outer peripheral side surface of the integrated circuit element and an inner side surface of the second recess facing the outer peripheral side surface is 20 μm or more and less than 100 μm.
2つの容器体にはそれぞれ凹部が設けられており、第一の容器体の凹部内には圧電振動素子が搭載され、第二の容器体の凹部内には発振回路を少なくとも内蔵する集積回路素子が搭載され、前記第一の容器体と前記第二の容器体が重ねて機械的且つ電気的に接続されている圧電発振器であって、
前記集積回路素子の外周側面と、前記外周側面と対向する前記第二の容器体の凹部の内側面との間隔の寸法が、20μm以上100μm未満であることを特徴とする圧電発振器。
Each of the two container bodies is provided with a recess, a piezoelectric vibration element is mounted in the recess of the first container body, and an integrated circuit element including at least an oscillation circuit in the recess of the second container body A piezoelectric oscillator in which the first container body and the second container body are stacked and mechanically and electrically connected,
The piezoelectric oscillator, wherein a distance between the outer peripheral side surface of the integrated circuit element and the inner side surface of the concave portion of the second container body facing the outer peripheral side surface is 20 μm or more and less than 100 μm.
JP2008116363A 2008-04-25 2008-04-25 Piezoelectric oscillator Pending JP2009267863A (en)

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* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPH11179439A (en) * 1997-12-17 1999-07-06 Sanwa Packing Kogyo Co Ltd Press working method, die and metal made parts used in it
JP2004064337A (en) * 2002-07-26 2004-02-26 Toyo Commun Equip Co Ltd Manufacturing method of crystal oscillator
JP2005318436A (en) * 2004-04-30 2005-11-10 Toyo Commun Equip Co Ltd Ic part for oscillation circuit and piezoelectric oscillator
JP2007013572A (en) * 2005-06-30 2007-01-18 Kyocera Kinseki Corp Piezoelectric oscillator
JP2007104075A (en) * 2005-09-30 2007-04-19 Nippon Dempa Kogyo Co Ltd Surface mount crystal oscillator
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