JP2008047723A - Surface-mounted electronic device, adjusting prober and adjusting method of surface-mounted electronic device - Google Patents

Surface-mounted electronic device, adjusting prober and adjusting method of surface-mounted electronic device Download PDF

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Publication number
JP2008047723A
JP2008047723A JP2006222283A JP2006222283A JP2008047723A JP 2008047723 A JP2008047723 A JP 2008047723A JP 2006222283 A JP2006222283 A JP 2006222283A JP 2006222283 A JP2006222283 A JP 2006222283A JP 2008047723 A JP2008047723 A JP 2008047723A
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Japan
Prior art keywords
adjustment
terminal
electronic device
mounting
contact
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JP2006222283A
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Japanese (ja)
Inventor
Tomohiro Tamura
智博 田村
Kozo Shibata
孝三 柴田
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Miyazaki Epson Corp
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Miyazaki Epson Corp
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Priority to JP2006222283A priority Critical patent/JP2008047723A/en
Publication of JP2008047723A publication Critical patent/JP2008047723A/en
Withdrawn legal-status Critical Current

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Abstract

<P>PROBLEM TO BE SOLVED: To provide an adjusting prober having electrodes mounted on a package bottom and adjusting terminals on its sides, which stably contacts contact members to ensure the conduction even for a reduced area of the adjusting terminals due to the miniaturization of the package, and eliminates the need of replacing the prober body by replacing only the contact member when its durability deteriorates, thereby improving the productivity and reducing the product cost, and also to provide a method of adjusting the surface-mounted electronic device. <P>SOLUTION: The device comprises: a surface mounting insulation package P having mounting terminals 30 on the outer bottom and elements 7 mounted therein; and adjusting terminals 32 disposed conductively with the elements on the sides of the insulation package for measuring and adjusting the characteristics of the elements. The adjusting elements are disposed on inward down inclined taper surfaces 31 formed on the two opposed sides of the insulation package. <P>COPYRIGHT: (C)2008,JPO&INPIT

Description

本発明は、例えばプローブ装置を用いた電子デバイスの特性調整作業に伴う不利不便、
例えば圧電発振器の周波数調整作業における種々の不便さを解消した調整用プローブ装置
、及び表面実装型電子デバイスの調整方法に関する。
The present invention is, for example, disadvantageous or inconvenient with the characteristic adjustment work of an electronic device using a probe device,
For example, the present invention relates to an adjustment probe device that eliminates various inconveniences in the frequency adjustment operation of a piezoelectric oscillator and a method for adjusting a surface-mount electronic device.

移動体通信市場においては、各種電装部品の実装性、保守・取扱性、装置間での部品の
共通性等を考慮して、各機能毎に部品群のモジュール化を推進するメーカーが増えている
。また、モジュール化に伴って、小型化、低コスト化も強く求められている。
特に、基準発振回路、PLL回路、及びシンセサイザー回路等、機能及びハード構成が
確立し、且つ高安定性、高性能化が要求される回路部品に関してモジュール化への傾向が
強まっている。更に、これらの部品群をモジュールとしてパッケージ化することによりシ
ールド構造を確立しやすくなるという利点がある。
複数の関連部品をモジュール化、パッケージ化することにより構築される表面実装用の
電子デバイスとしては、例えば圧電振動子、圧電発振器、SAWデバイス等を例示するこ
とができるが、これらの機能を高く維持しつつ、更なる小型化を図るために、例えは図4
に示した如き二階建て構造のモジュールが採用されている。
In the mobile communications market, an increasing number of manufacturers are promoting modularization of parts groups for each function, taking into account the mounting properties, maintenance and handling characteristics of various electrical components, and the commonality of parts between devices. . Further, along with modularization, there is a strong demand for downsizing and cost reduction.
In particular, there is an increasing tendency toward modularization of circuit components that have established functions and hardware configurations, such as a reference oscillation circuit, a PLL circuit, and a synthesizer circuit, and that require high stability and high performance. Furthermore, there is an advantage that a shield structure can be easily established by packaging these parts as a module.
Examples of surface mount electronic devices constructed by modularizing and packaging a plurality of related parts include piezoelectric vibrators, piezoelectric oscillators, SAW devices, etc., but these functions are maintained at a high level. However, for further miniaturization, for example, FIG.
The module of the two-story structure as shown in is adopted.

即ち、図4(a)乃至(d)は二階建て構造型(H型)モジュールとしての表面実装型
圧電デバイス(水晶発振器)の従来構成を示す底面側斜視図、平面図、正面図、底面図で
ある。
この水晶発振器Aは、セラミック製の容器本体101と金属リッド102からなる上側
容器の空所(上面側凹所)内に設けた図示しない素子搭載用パッド上に導電性接着剤によ
り水晶振動素子を接続した水晶振動子100と、水晶基板の表裏両面に夫々励振電極を形
成した水晶振動素子と、水晶振動子100の底面に接合される下側容器105の空所(下
面側凹所)105a内の天井面に設けたIC部品搭載用パッドに発振回路、温度補償回路
などを構成するIC部品106をベアチップ実装した底部構造体(IC部品ユニット)1
07と、を備えている。この水晶発振器Aをプリント基板上に実装する際には、容器10
5の底面に設けた実装端子105bを用いた半田付けが行われる(例えば、特許文献1)
4A to 4D are a bottom perspective view, a plan view, a front view, and a bottom view showing a conventional configuration of a surface-mount type piezoelectric device (crystal oscillator) as a two-story structure type (H type) module. It is.
This crystal oscillator A has a crystal resonator element formed on a pad for mounting an element (not shown) provided in a space (upper side recess) of an upper container made of a ceramic container body 101 and a metal lid 102 by a conductive adhesive. In the crystal resonator 100 connected, the crystal resonator element in which excitation electrodes are formed on both the front and back surfaces of the crystal substrate, and the space (lower surface side recess) 105a of the lower container 105 joined to the bottom surface of the crystal resonator 100 Bottom structure (IC component unit) 1 in which an IC component 106 constituting an oscillation circuit, a temperature compensation circuit, etc. is bare-chip mounted on an IC component mounting pad provided on the ceiling surface of
07. When this crystal oscillator A is mounted on a printed circuit board, the container 10
Soldering is performed using mounting terminals 105b provided on the bottom surface of No. 5 (for example, Patent Document 1).
.

この水晶発振器Aにあっては、水晶振動素子の特性をチェックしながら水晶振動素子の
周波数調整を行うための2つの調整端子110が、図4(a)(d)に示すように容器1
05の底面に配置されている(底面コンタクトタイプ。特許文献2、3)。調整作業にお
いては、図5(a)(b)に示すように、IC部品搭載前に各実装端子105bと各実装
端子110に対して、夫々プローブピン(コンタクト部材)120を当接させて通電する
ことにより水晶振動素子を励振させて出力される周波数を確認し、狙いの周波数と実際の
周波数との間に誤差がある場合には水晶振動素子上の励振電極膜厚を増減させる等の手法
によって調整していた。
しかし、実装端子については実装時に十分な接合強度を確保するためにその面積を大き
くする必要がある一方で、調整時にしか使用しない調整端子については可能な限り小面積
化されている。特に、縦横寸法が十数mm程度の小型発振器に形成される調整端子の面積
は更に微小とならざるを得ないため、フローブピンを当接させての調整作業は極めて煩雑
、且つ効率の悪い作業となる。
In this crystal oscillator A, two adjustment terminals 110 for adjusting the frequency of the crystal resonator element while checking the characteristics of the crystal resonator element are provided in the container 1 as shown in FIGS.
It is arrange | positioned at the bottom face of 05 (bottom contact type. Patent documents 2, 3). In the adjustment work, as shown in FIGS. 5A and 5B, the probe pin (contact member) 120 is brought into contact with each mounting terminal 105b and each mounting terminal 110 before the IC component is mounted. By checking the frequency output by exciting the crystal resonator element, if there is an error between the target frequency and the actual frequency, the method of increasing or decreasing the excitation electrode film thickness on the crystal resonator element, etc. It was adjusted by.
However, while it is necessary to increase the area of the mounting terminal in order to ensure sufficient bonding strength at the time of mounting, the adjustment terminal used only at the time of adjustment is made as small as possible. In particular, since the area of the adjustment terminal formed on a small oscillator having a vertical and horizontal dimension of about a few tens of millimeters must be even smaller, the adjustment work with the contact of the flow pin is extremely complicated and inefficient. Become.

このように従来のH型構造の水晶発振器にあっては、容器105の底面に実装端子10
5bとIC部品搭載用パッドと調整端子110とを並置させていたために、容器の小型化
の進展に伴って調整端子の設置スペース確保が困難となり、調整端子を小面積化せざるを
得ず、プローブピンを当接させての周波数測定作業に際しての作業性の低下、測定に際し
ての信頼性の低下(コンタクトミスの発生)といった不具合をもたらしていた。更に、実
装端子と調整端子とが近接配置されているため、水晶発振器をマザープリント基板上に半
田接続する際に、実装端子と調整端子との間で半田ブリッジが形成される懸念があった。
また、実装後に半田ブリッジによる短絡発生の有無を目視確認することが困難であった。
このようなところから特許文献4に開示されているように調整端子を容器側面に設けた
サイドキャビティ内に露出配置する構成(サイドコンタクトタイプ)が提案されている。
これによれば、実装端子面積を大きく確保できるばかりでなく、実装端子と調整端子とが
離間しているために半田ブリッジが発生しにくく、万が一半田ブリッジが発生している場
合には外観からの目視確認が容易になる。
As described above, in the conventional H-type crystal oscillator, the mounting terminal 10 is provided on the bottom surface of the container 105.
5b, the IC component mounting pad and the adjustment terminal 110 are juxtaposed, so that it becomes difficult to secure the installation space of the adjustment terminal with the progress of miniaturization of the container, and the adjustment terminal has to be reduced in area, There have been inconveniences such as a decrease in workability at the time of frequency measurement work with the probe pin in contact and a decrease in reliability at the time of measurement (occurrence of contact mistake). Further, since the mounting terminal and the adjustment terminal are arranged close to each other, there is a concern that a solder bridge is formed between the mounting terminal and the adjustment terminal when the crystal oscillator is soldered on the mother printed board.
In addition, it is difficult to visually check whether a short circuit occurs due to a solder bridge after mounting.
From such a point, a configuration (side contact type) has been proposed in which an adjustment terminal is exposed in a side cavity provided on the side of a container as disclosed in Patent Document 4.
According to this, not only can the mounting terminal area be ensured, but also the mounting terminal and the adjustment terminal are separated from each other, so that a solder bridge is not easily generated. Visual confirmation becomes easy.

図6(a)乃至(d)は容器側面に調整端子を備えたタイプのH型構造の水晶発振器の
底部斜視図、平面図、正面図、及び底面図である。図4の水晶発振器と同一部分には同一
符号を付して説明する。
この水晶発振器Bにあっては、容器105の側面に設けたサイドキャビティ125内に
調整端子126を設けることにより、周辺部品と調整端子との接触を回避するように配慮
している。
この水晶発振器Bにあっては、調整端子126を構成する導体膜が容器側面に形成され
ているため、底面に設けた実装端子105bの面積を十分に大きく確保することができる
。また、マザープリント基板上への実装後の短絡の有無も容易に視認できる。しかし、容
器側面に設けられた凹所であるサイドキャビティ125内(内側面は垂直面)に調整端子
126を形成するため、底面コンタクトタイプの調整端子よりも更に小さい面積とならざ
るを得ない。更に、プローブピンをこの調整端子126に当接させる際にプローブピンが
振動子の金属リッド102に接触しないように調整する必要があるために、プロービング
に際しての位置精度が厳しくなり、調整端子面積よりも十分に小さい先端部を備えたプロ
ーブピンを用意する必要がある。
6A to 6D are a bottom perspective view, a plan view, a front view, and a bottom view of an H-type crystal oscillator of the type having an adjustment terminal on the side of the container. The same parts as those of the crystal oscillator of FIG.
In this crystal oscillator B, consideration is given to avoid contact between the peripheral component and the adjustment terminal by providing the adjustment terminal 126 in the side cavity 125 provided on the side surface of the container 105.
In the crystal oscillator B, since the conductor film constituting the adjustment terminal 126 is formed on the side surface of the container, a sufficiently large area of the mounting terminal 105b provided on the bottom surface can be secured. In addition, the presence or absence of a short circuit after mounting on the mother printed circuit board can be easily visually confirmed. However, since the adjustment terminal 126 is formed in the side cavity 125 which is a recess provided on the side surface of the container (the inner surface is a vertical surface), the area must be smaller than that of the bottom contact type adjustment terminal. Further, since it is necessary to make adjustment so that the probe pin does not contact the metal lid 102 of the vibrator when the probe pin is brought into contact with the adjustment terminal 126, the positional accuracy during probing becomes severe, and the adjustment pin area However, it is necessary to prepare a probe pin having a sufficiently small tip.

図7は図6の水晶発振器に対するプロービング状態を示す図であり、実装端子用のプロ
ーブピン130は容器105の底面側から当接させる必要がある一方で、調整端子用のプ
ローブピン131は側面方向から当接させる必要があり、プローブ装置の構成、動作が複
雑化する。即ち、実装端子用プローブピン130は上下運動するように構成される一方で
、調整端子用プローブピン131は図示しない押圧手段によって横方向へ動作するように
構成する必要があり、装置構成が複雑化する。
また、調整端子用プローブピン131の先端部はリッド102との接触を回避するため
にピン状とする必要があり、小面積化された調整端子126とのコンタクトが困難化する
原因となっている。また、セラミックシートを積層することにより形成されている容器1
05はセラミックシート間の積層ずれがあると、調整端子パターンが横方向(X方向)に
位置ずれを起こしていることがあり、この場合には2つのプローブピン131の一方が偏
当りを起こし、適正にコンタクトができなくなることがある。このような不具合は、発振
器が小型化すればする程、顕著化する。
FIG. 7 is a diagram showing a probing state with respect to the crystal oscillator of FIG. 6, while the probe pin 130 for mounting terminal needs to be brought into contact with the bottom surface side of the container 105, while the probe pin 131 for adjustment terminal is in the lateral direction Therefore, the configuration and operation of the probe device are complicated. That is, while the mounting terminal probe pin 130 is configured to move up and down, the adjustment terminal probe pin 131 needs to be configured to move laterally by pressing means (not shown), resulting in a complicated apparatus configuration. To do.
In addition, the tip of the adjustment terminal probe pin 131 needs to be pin-shaped in order to avoid contact with the lid 102, which makes it difficult to make contact with the adjustment terminal 126 having a reduced area. . Moreover, the container 1 formed by laminating ceramic sheets
05, if there is a stacking deviation between the ceramic sheets, the adjustment terminal pattern may be displaced in the lateral direction (X direction). In this case, one of the two probe pins 131 causes an offset, Proper contact may not be possible. Such a problem becomes more prominent as the oscillator becomes smaller.

図8は図6に示したサイドコンタクトタイプの水晶発振器B用のプローブ装置の構成及
び動作を示す断面図である。
このプローブ装置140は、水晶発振器Bを上面に載置するベース(ソケット台)14
1と、ベース141の両サイドに設けた回動軸142によって図示した閉止位置から矢印
方向へ開閉自在に軸支された開閉部材(ソケット蓋)150と、ベース141の上面に設
けた穴141a内に配置されて弾性部材130aによって上方へ付勢された実装端子用プ
ローブピン130と、ベース141に設けた他の穴141b内に中間部を挿通支持される
と共に湾曲した上端部をベース141の上方に突出させた調整端子用プローブピン131
と、を備えている。
FIG. 8 is a cross-sectional view showing the configuration and operation of the probe device for the side contact type crystal oscillator B shown in FIG.
The probe device 140 includes a base (socket base) 14 on which the crystal oscillator B is mounted.
1, an opening / closing member (socket lid) 150 that is pivotally supported by a pivot shaft 142 provided on both sides of the base 141 so as to be opened and closed in the direction of the arrow from the illustrated closed position, and a hole 141 a provided on the upper surface of the base 141. And the mounting terminal probe pin 130 urged upward by the elastic member 130a and the other end 141b provided in the base 141 are inserted and supported in the middle portion, and the curved upper end is disposed above the base 141. Probe pin 131 for adjustment terminal
And.

このプローブ装置140を用いたプリービングに際しては両開閉部材150を開放させ
ることによりベース141の上面を開放しておき、各実装端子用プローブピン130が発
振器の容器底面の各実装端子105bと一対一にて接触するように発振器をベース上面に
載置する。この時、調整端子用プローブピン131は、発振器をベース上面に載置する作
業を邪魔しないように側方へ退避している。次いで、回動軸142を中心として両開閉部
材150を閉止させることにより図示のように各調整端子用プローブピン131を内側へ
押圧してその先端部を容器両側面の調整端子126に当接させる。この状態で各プローブ
ピンに対して通電することにより周波数測定が行われる。
このプローブ装置140にあっては、容器105の外形バラツキによって調整端子12
6の横方向位置にバラツキがあったとしても、調整端子用プローブピン131のバネ性に
よって調整端子126との間である程度は安定した導通を確保することができる。しかし
、プローブ装置の使用頻度が増大することにより、プローブピン131の先端部が摩耗し
て調整端子126との接触性が低下する虞がある。更に、調整端子用プローブピン131
はプローブ装置毎に設けられているため、プローブピンのみを交換することはできず、プ
ローブピンが損耗した場合にはプローブ装置自体を交換する必要が生じる。これは、生産
性の低下、製品コストアップの原因となっている。
When probing using the probe device 140, the upper surface of the base 141 is opened by opening both the opening and closing members 150, and each mounting terminal probe pin 130 is in a one-to-one relationship with each mounting terminal 105b on the bottom surface of the container of the oscillator. Place the oscillator on the top surface of the base so that At this time, the adjustment terminal probe pin 131 is retracted to the side so as not to disturb the work of placing the oscillator on the upper surface of the base. Next, by closing both opening and closing members 150 around the rotation shaft 142, each adjustment terminal probe pin 131 is pressed inward as shown in the figure, and the tip thereof is brought into contact with the adjustment terminals 126 on both sides of the container. . In this state, frequency measurement is performed by energizing each probe pin.
In the probe device 140, the adjustment terminal 12 is caused by variation in the outer shape of the container 105.
Even if there is a variation in the horizontal position 6, a certain degree of stable conduction with the adjustment terminal 126 can be ensured by the spring property of the adjustment terminal probe pin 131. However, as the frequency of use of the probe device increases, the tip of the probe pin 131 may be worn and the contact with the adjustment terminal 126 may be reduced. Further, the probe pin 131 for adjustment terminal
Is provided for each probe device, it is not possible to replace only the probe pin. When the probe pin is worn out, it is necessary to replace the probe device itself. This causes a decrease in productivity and an increase in product cost.

なお、上記の如き問題は、水晶発振器等の圧電発振器のみならず、容器の底面に実装端
子を備えると共に側面に調整端子を備えた表面実装型電子デバイス、例えば表面実装型水
晶振動子においても発生する。
特開2000−278047公報 特許第3406845号 特許第3451018号 特開2004−135000公報
The above-described problems occur not only in piezoelectric oscillators such as crystal oscillators, but also in surface-mounted electronic devices that have mounting terminals on the bottom surface of the container and adjustment terminals on the side surfaces, such as surface-mounting crystal resonators. To do.
JP 2000-278047 A Japanese Patent No. 3406845 Japanese Patent No. 3451018 JP 2004-135000 A

本発明は上記に鑑みてなされたものであり、容器底面に実装端子を備えると共に、側面
に調整端子を備えた表面実装型電子デバイスにおいて、容器の小型化によって調整端子が
小面積化したとしても、コンタクト部材を常に安定して当接して導通を確保することがで
きるばかりでなく、コンタクト部材の耐久性が低下して交換する場合においてもコンタク
ト部材のみを交換し、プローブ装置本体を交換する必要をなくして、生産性の向上、製品
コストダウンを図った調整用プローブ装置、及び表面実装型電子デバイスの調整方法を提
供することを目的としている。
The present invention has been made in view of the above, and in a surface-mounted electronic device having a mounting terminal on the bottom surface of the container and an adjusting terminal on the side surface, even if the adjustment terminal has a small area due to the miniaturization of the container. In addition to being able to secure contact by always contacting the contact member stably, it is necessary to replace only the contact member and replace the probe device body even when the contact member is deteriorated and replaced. An object of the present invention is to provide an adjustment probe device and a method for adjusting a surface-mount type electronic device that improve productivity and reduce product cost.

上記課題を解決するため、本発明に係る表面実装型電子デバイスは、外底部に実装端子
を備え且つ素子を搭載した表面実装用の絶縁容器と、該素子と導通し該素子の特性を測定
、調整するために該絶縁容器の側面に配置された調整端子と、を備え、前記調整端子は、
前記絶縁容器の対向する2つの側面に夫々内側下向きに傾斜して設けられたテーパー面に
配置されていることを特徴とする。
絶縁容器の略垂直な2つの側面に対して、下部が内側へ向けて傾斜したテーパー面(テ
ーパー状凹所)を設けると共に、このテーパー面に素子と導通する導体膜を形成して調整
端子としたので、略垂直な側面と平行な面に導体膜を形成していた従来の調整端子に比し
て面積を大きくすることができる。また、素子の特性を測定、調整するためにコンタクト
部材を調整端子に当接させる際の確実性、安定性を確保できる。また、絶縁容器底面の実
装端子との離隔距離を確保し易いためプリント基板上に実装した際の半田によるブリッジ
形成を防止できる。
In order to solve the above problems, a surface-mount electronic device according to the present invention includes a surface-mount insulating container having a mounting terminal on the outer bottom portion and mounted with an element, and is electrically connected to the element to measure the characteristics of the element. An adjustment terminal disposed on a side surface of the insulating container for adjustment, the adjustment terminal comprising:
It is characterized by being disposed on two opposing side surfaces of the insulating container on tapered surfaces that are inclined inward and downward, respectively.
A tapered surface (tapered recess) whose lower portion is inclined inward is provided on two substantially vertical side surfaces of the insulating container, and a conductor film that is electrically connected to the element is formed on the tapered surface to form an adjustment terminal. Therefore, the area can be increased as compared with a conventional adjustment terminal in which a conductor film is formed on a surface parallel to a substantially vertical side surface. Further, certainty and stability can be ensured when the contact member is brought into contact with the adjustment terminal in order to measure and adjust the characteristics of the element. In addition, since it is easy to ensure a separation distance from the mounting terminal on the bottom surface of the insulating container, bridge formation by solder when mounted on the printed circuit board can be prevented.

また本発明は、前記各側面に形成された前記各調整端子は対向する位置関係に配置され
ていることを特徴とする。
調整端子を対向配置することにより、各コンタクト部材による当接安定性を確保すると
共に、各コンタクト部材によって電子デバイスを保持することが可能となる。
Moreover, the present invention is characterized in that the respective adjustment terminals formed on the respective side surfaces are arranged in an opposing positional relationship.
By arranging the adjustment terminals so as to face each other, it is possible to secure the contact stability by each contact member and to hold the electronic device by each contact member.

また本発明は、前記調整端子は、前記絶縁容器側面の底部角部に切欠き形成したテーパ
ー面に形成されていることを特徴とする。
調整端子が絶縁容器側面の上部に偏位していると、電子デバイスの上部に設けた導体部
分(例えば金属リッド)とコンタクト部材が接触する虞がある。そこで、絶縁容器の底部
角部を切り欠いたテーパー面に調整端子を形成すればそのような虞が解消される。
In the invention, it is preferable that the adjustment terminal is formed on a tapered surface which is formed by cutting out at a bottom corner of the side surface of the insulating container.
If the adjustment terminal is displaced to the upper part of the side surface of the insulating container, there is a possibility that a contact portion (for example, a metal lid) provided on the upper part of the electronic device comes into contact with the contact member. Thus, if the adjustment terminal is formed on the tapered surface where the bottom corner portion of the insulating container is cut away, such a fear is eliminated.

また本発明は、前記各調整端子は、前記絶縁容器底部に設けた実装端子に対して横方向
位置をずらして配置されていることを特徴とする。
これによれば、プリント基板上に実装した際の半田ブリッジによる端子間のショートを
防止できる。
Further, the present invention is characterized in that each of the adjustment terminals is arranged with a lateral position shifted with respect to a mounting terminal provided at the bottom of the insulating container.
According to this, it is possible to prevent a short circuit between terminals due to a solder bridge when mounted on a printed circuit board.

また本発明は、前記表面実装型電子デバイスは、表面実装型圧電デバイスであることを
特徴とする。
本発明を適用可能な電子デバイスは実装端子を底面に有すると共に、側面に調整端子を
備えた表面実装型の電子デバイスであればどのようなものであってもよい。従って、例え
ば圧電デバイス(圧電発振器、圧電振動子、SAW共振子)であってもよい。
In the invention, it is preferable that the surface-mount type electronic device is a surface-mount type piezoelectric device.
The electronic device to which the present invention can be applied may be any surface mounting type electronic device having a mounting terminal on the bottom surface and an adjustment terminal on the side surface. Therefore, for example, a piezoelectric device (piezoelectric oscillator, piezoelectric vibrator, SAW resonator) may be used.

また本発明は、前記表面実装型圧電デバイスは、表面実装型圧電振動子、或いは表面実
装型圧電発振器であることを特徴とする。
According to the present invention, the surface-mounted piezoelectric device is a surface-mounted piezoelectric vibrator or a surface-mounted piezoelectric oscillator.

また本発明に係る調整用プローブ装置は、前記表面実装型電子デバイスを構成する前記
実装端子と前記調整端子に対して、夫々当接するコンタクト部材を備えた調整用プローブ
装置であって、前記表面実装型電子デバイスを載置した際に前記実装端子と当接する実装
端子用コンタクト部材を備えたベース部と、該実装端子用コンタクト部材の両側において
該ベース部によって内外方向へ回動自在に軸支され閉止位置にあるときに前記ベース部上
に搭載された前記表面実装型電子デバイスの両側面に近接する開閉部材と、を備え、前記
調整端子用コンタクト部材は、前記ベース部上面に対して昇降自在に構成されており、下
降時に該ベース部上面に搭載された前記表面実装型電子デバイスの前記調整端子に近接し
、閉止位置にある前記開閉部材によって押圧されて前記各調整端子と弾性的に当接するよ
うに構成されていることを特徴とする。
これによれば、予めベース部上に電子デバイスを載置してから開閉部材を閉じ位置に移
動させることにより調整端子用コンタクト部材を電子デバイス側面に設けた調整端子に圧
接させる測定方法が可能となる。
The adjustment probe device according to the present invention is an adjustment probe device including contact members that respectively contact the mounting terminal and the adjustment terminal constituting the surface-mount electronic device, the surface mounting electronic device And a base portion provided with a mounting terminal contact member that comes into contact with the mounting terminal when the electronic device is placed, and is pivotally supported by the base portion on both sides of the mounting terminal contact member so as to be rotatable inward and outward. An open / close member adjacent to both side surfaces of the surface mount electronic device mounted on the base portion when in the closed position, and the adjustment terminal contact member is movable up and down with respect to the upper surface of the base portion. The opening / closing member that is in the closed position close to the adjustment terminal of the surface-mount type electronic device mounted on the upper surface of the base portion when lowered Accordingly, characterized in that it is configured to pressed to abut said that each adjusting pin and resiliently.
According to this, it is possible to perform a measurement method in which the contact member for the adjustment terminal is pressed against the adjustment terminal provided on the side surface of the electronic device by placing the electronic device on the base portion in advance and then moving the opening / closing member to the closed position. Become.

また本発明は、前記各調整端子用コンタクト部材は、昇降自在な保持部材によって保持
されており、下降時に前記表面実装型電子デバイスの両側面に位置する前記各調整端子に
弾性的に圧接することにより、該表面実装型電子デバイスを保持しつつ昇降するように構
成されていることを特徴とする。
これによれば、調整端子用コンタクト部材によって電子デバイスの両側面(調整端子部
分)を挟圧保持して昇降させることが可能となる。
Further, according to the present invention, the contact member for each adjustment terminal is held by a vertically movable holding member and elastically presses against each adjustment terminal located on both side surfaces of the surface mount electronic device when lowered. Therefore, it is configured to move up and down while holding the surface-mount type electronic device.
According to this, it becomes possible to raise / lower while holding the both side surfaces (adjustment terminal portions) of the electronic device with the contact member for adjustment terminal.

また本発明は、前記調整端子用コンタクト部材は弾性変形可能な構成を有し、その先端
は円筒状、或いは球状に構成されていることを特徴とする。
これによれば、コンタクト部材と調整端子との間の機械的保持力のみならず、電気的接
続性も確保することができる。
According to the present invention, the adjustment terminal contact member has a configuration that can be elastically deformed, and a tip thereof is configured in a cylindrical shape or a spherical shape.
According to this, not only the mechanical holding force between the contact member and the adjustment terminal but also electrical connectivity can be ensured.

また本発明は、前記実装端子用コンタクト部材は、前記ベース部上面に設けた穴内に収
容され、弾性的に上方へ突出付勢されていることを特徴とする。
これによれば、実装端子用コンタクト部材と電子デバイス底面の実装端子との接続安定
性を高めることができる。
In the invention, it is preferable that the mounting terminal contact member is accommodated in a hole provided in the upper surface of the base portion and elastically protruded and biased upward.
According to this, the connection stability of the contact member for mounting terminals and the mounting terminal on the bottom surface of the electronic device can be improved.

また本発明は、前記コンタクト部材は、プローブピン、又はタングステンプローブであ
ることを特徴とする。
タングステンプローブのように弾性材料から構成すると、電子デバイスのセット角度が
多少変わっても調整端子との間の当接状態がよくなる。
In the invention, it is preferable that the contact member is a probe pin or a tungsten probe.
When it is made of an elastic material such as a tungsten probe, the contact state with the adjustment terminal is improved even if the set angle of the electronic device changes slightly.

また本発明に係る表面実装型電子デバイスの調整方法は、前記調整用プローブ装置を用
いた表面実装型電子デバイスの周波数測定方法であって、前記開閉部材を開放状態に保持
する工程と、前記ベース部に配置した複数の前記実装端子用コンタクト部材に対して、前
記表面実装型電子デバイス底部に設けた各実装端子が一対一で当接するように、前記表面
実装型電子デバイスを前記ベース部上面に位置決め載置する工程と、前記各調整端子用コ
ンタクト部材を下降させてその先端部を前記表面実装型圧電デバイスの両側面の各調整端
子に近接させる工程と、前記開閉部材を閉止位置に回動させることにより前記各調整端子
用コンタクト部材を前記各調整端子に圧接させる工程と、前記各コンタクト部材に通電す
ることにより前記素子の特性を測定、或いは調整する工程と、前記開閉部材を開放させる
工程と、前記調整端子用コンタクト部材を前記各調整端子に圧接させた状態で前記保持部
材を上昇させて前記表面実装型電子デバイスを前記ベース部上面から離脱させる工程と、
を備えていることを特徴とする。
これによれば、予めベース部上に電子デバイスを載置してから開閉部材を閉じ位置に移
動させることにより調整端子用コンタクト部材を電子デバイス側面に設けた調整端子に圧
接させた上で測定することが可能となる。
The method for adjusting a surface-mounted electronic device according to the present invention is a method for measuring a frequency of a surface-mounted electronic device using the adjustment probe device, the step of holding the opening / closing member in an open state, and the base The surface-mount electronic device is placed on the upper surface of the base portion so that the mounting terminals provided on the bottom of the surface-mount electronic device are in a one-to-one contact with the plurality of contact members for mounting terminals arranged in the portion. A step of positioning and mounting, a step of lowering the contact members for each adjustment terminal to bring their tip portions close to the adjustment terminals on both side surfaces of the surface-mount type piezoelectric device, and a rotation of the opening / closing member to the closed position The step of bringing the contact members for each adjustment terminal into pressure contact with each of the adjustment terminals, and energizing each contact member to change the characteristics of the element. Adjusting or adjusting, opening the opening / closing member, and raising the holding member in a state where the adjustment terminal contact member is in pressure contact with the adjustment terminals, thereby mounting the surface mount electronic device to the base Removing from the top surface of the part;
It is characterized by having.
According to this, after placing the electronic device on the base portion in advance, by moving the opening / closing member to the closed position, the adjustment terminal contact member is brought into pressure contact with the adjustment terminal provided on the side of the electronic device, and the measurement is performed. It becomes possible.

また本発明に係る表面実装型電子デバイスの調整方法は、前記調整用プローブ装置を用
いた表面実装型電子デバイスの周波数測定方法であって、前記開閉部材を開放状態に保持
する工程と、前記保持部材から延びる複数の前記調整端子用コンタクト部材を前記表面実
装型電子デバイスの前記各調整端子に圧接させて保持する工程と、前記保持部材を下降さ
せて、前記ベース部に配置した複数の前記実装端子用コンタクト部材に対して前記実装端
子が一対一で当接するように、前記表面実装型電子デバイスを前記ベース部上面に位置決
め載置する工程と、前記開閉部材を閉止位置に回動させることにより前記各調整端子用コ
ンタクト部材を前記各調整端子に圧接させる工程と、前記各コンタクト部材に通電するこ
とにより前記素子の特性を測定、或いは調整する工程と、前記開閉部材を開放させる工程
と、前記保持部材を上昇させて前記表面実装型電子デバイスを前記ベース部上面から離脱
させる工程と、を備えていることを特徴とする。
これによれば、調整端子用コンタクト部材によって電子デバイスの両側面(調整端子部
分)を挟圧保持して昇降させるので、格別に電子デバイスを取り出すための工程、装置を
設ける必要がなくなり、生産性を高めることができる。
The method for adjusting a surface-mounted electronic device according to the present invention is a method for measuring a frequency of a surface-mounted electronic device using the adjustment probe device, the step of holding the opening / closing member in an open state, and the holding A step of holding the plurality of adjustment terminal contact members extending from the member in pressure contact with the respective adjustment terminals of the surface mount electronic device; and a plurality of the mountings disposed on the base portion by lowering the holding member A step of positioning and mounting the surface-mount type electronic device on the upper surface of the base portion so that the mounting terminals abut one-to-one on the contact member for terminals, and by rotating the opening / closing member to a closed position Measuring the characteristics of the element by energizing each contact member, and a step of pressing each adjustment terminal contact member against each adjustment terminal Or a step of adjusting, the step of opening the closing member, characterized in that the surface mount electronic device is raised to the holding member and a, and a step of separating from the base upper surface.
According to this, both side surfaces (adjustment terminal portions) of the electronic device are clamped and held by the adjustment terminal contact member, so that it is not necessary to provide a process and an apparatus for taking out the electronic device, and productivity is improved. Can be increased.

また本発明に係る調整用プローブ装置は、前記表面実装型電子デバイスを構成する前記
実装端子と前記調整端子に対して、夫々当接するコンタクト部材を備えた調整用プローブ
装置であって、前記実装端子と当接する実装端子用コンタクト部材と、前記調整端子と当
接する調整端子用コンタクト部材と、を備え、前記実装端子用コンタクト部材と前記調整
端子用コンタクト部材は、同一方向を向いて配置されていることを特徴とする。
各コンタクト部材が同一方向を向いているので、プローブ装置の構成、動作が簡単とな
り、装置をコストダウンし、生産性を高めることも可能となる。
The adjustment probe apparatus according to the present invention is an adjustment probe apparatus comprising contact members that respectively contact the mounting terminal and the adjustment terminal that constitute the surface-mount type electronic device, and the mounting terminal A mounting terminal contact member that comes into contact with the adjustment terminal, and an adjustment terminal contact member that comes into contact with the adjustment terminal, and the mounting terminal contact member and the adjustment terminal contact member are arranged in the same direction. It is characterized by that.
Since each contact member faces the same direction, the configuration and operation of the probe device are simplified, the cost of the device can be reduced, and the productivity can be increased.

また本発明は、前記表面実装型電子デバイスの底面を上面に載置した際に前記実装端子
と当接する実装端子用コンタクト部材を上向きに支持したベース部と、前記調整端子と当
接する先端部を前記ベース部によって上向きに支持された前記調整端子用コンタクト部材
と、を備えたことを特徴とする。
The present invention also includes a base portion that supports a mounting terminal contact member that contacts the mounting terminal when the bottom surface of the surface mount electronic device is placed on the top surface, and a tip portion that contacts the adjustment terminal. And an adjustment terminal contact member supported upward by the base portion.

以下、本発明を図面に示した実施の形態に基づいて詳細に説明する。
図1(a)(b)(c)及び(d)は本発明の一実施形態に係る表面実装型電子デバイ
スの一例としての表面実装型水晶発振器(圧電発振器)の縦断面図、底面側斜視図、正面
図、及び底面図である。
この水晶発振器1は、セラミック製の上側容器3の空所(上面側凹所)5内に設けた素
子搭載用パッド6上に導電性接着剤8により水晶振動素子7を接続した状態で空所5を金
属リッド4によって気密封止した構造の水晶振動子2と、水晶基板の表裏両面に夫々励振
電極を形成した水晶振動素子(圧電振動素子)7と、水晶振動子2の底面に接合される下
側容器20の空所(下面側凹所)21内の天井面に設けたIC部品搭載用パッド21aに
発振回路、温度補償回路などを構成するIC部品22をベアチップ実装した底部構造体(
IC部品ユニット)25と、を備えている。上側容器3、及び下側容器20は、絶縁容器
Pを構成している。下側容器20の底面には4個の実装端子30が配置されており、これ
ら実装端子30のうちの2個は水晶振動素子7上の2つの励振電極と夫々導通している。
また、絶縁容器Pの側面の適所、この例では下側容器20の対向する2つの側面には、夫
々、内側下向きに傾斜して設けられたテーパー面31が形成されると共に、各テーパー面
31には水晶振動素子7の各励振電極と導通し該素子の特性を測定、調整するための調整
端子32が配置されている。各調整端子32は、対向する各側面の横方向中央部に、対向
する位置関係となるように配置するのが好ましい。この例では、下側容器20の側面から
外底面に掛けて、即ち下側容器の底部角部を斜めに切り欠くように設けたテーパー面31
上に調整端子を構成する導体膜を形成することにより、調整端子の面積を広く確保してい
る。
Hereinafter, the present invention will be described in detail based on embodiments shown in the drawings.
1A, 1B, 1C, and 1D are longitudinal sectional views and bottom side perspective views of a surface-mounted crystal oscillator (piezoelectric oscillator) as an example of a surface-mounted electronic device according to an embodiment of the present invention. It is a figure, a front view, and a bottom view.
This crystal oscillator 1 has a cavity in a state where a crystal vibrating element 7 is connected by a conductive adhesive 8 on an element mounting pad 6 provided in a cavity (upper side recess) 5 of an upper container 3 made of ceramic. 5 is hermetically sealed with a metal lid 4, a crystal resonator element (piezoelectric resonator) 7 having excitation electrodes formed on both front and back surfaces of the crystal substrate, and a bottom surface of the crystal resonator 2. A bottom structure in which an IC component 22 constituting an oscillation circuit, a temperature compensation circuit, etc. is bare-chip mounted on an IC component mounting pad 21a provided on a ceiling surface in a space (lower surface side recess) 21 of the lower container 20
IC component unit) 25. The upper container 3 and the lower container 20 constitute an insulating container P. Four mounting terminals 30 are disposed on the bottom surface of the lower container 20, and two of the mounting terminals 30 are electrically connected to the two excitation electrodes on the crystal resonator element 7.
In addition, a tapered surface 31 that is inclined inward and downward is formed at an appropriate position on the side surface of the insulating container P, in this example, on the two opposing side surfaces of the lower container 20. Are provided with adjustment terminals 32 that are electrically connected to the respective excitation electrodes of the crystal resonator element 7 and measure and adjust the characteristics of the elements. Each adjustment terminal 32 is preferably arranged in a laterally central portion of each opposing side surface so as to have an opposing positional relationship. In this example, a tapered surface 31 is provided so as to extend from the side surface of the lower container 20 to the outer bottom surface, that is, so as to obliquely cut out the bottom corner of the lower container.
By forming a conductor film constituting the adjustment terminal on the upper side, a large area of the adjustment terminal is ensured.

また、各調整端子32の下端縁を下側容器20の下面から離間させているので、実装時
に使用する半田によって実装端子30との間が短絡することが防止される。
更に、各調整端子32は、絶縁容器底部に設けた実装端子30に対して横方向位置をず
らして配置されているため両端子間の距離が十分に離間しており、プリント基板上に実装
端子を半田接続する際の半田ブリッジが発生しにくくなる。また、半田ブリッジが発生し
た場合においても、外観上判別がし易くなる。
周波数調整作業においては、各実装端子30と各調整端子32に対して夫々調整用プロ
ーブ装置から延びるコンタクト部材を当接させた状態で通電することにより、水晶振動素
子7の特性をチェックしながら水晶振動素子の周波数調整を行う。具体的には、水晶振動
素子を励振させて出力される周波数を確認し、狙いの周波数と実際の周波数との間に誤差
がある場合には水晶振動素子上の励振電極膜厚を増減させる等の手法によって調整する。
この水晶発振器1をプリント基板上に実装する際には、絶縁容器Pの底面に設けた実装
端子30を用いた半田付けが行われる。
Moreover, since the lower end edge of each adjustment terminal 32 is separated from the lower surface of the lower container 20, it is possible to prevent a short circuit between the adjustment terminal 32 and the mounting terminal 30 due to the solder used during mounting.
Further, since each adjustment terminal 32 is arranged with its lateral position shifted from the mounting terminal 30 provided at the bottom of the insulating container, the distance between both terminals is sufficiently separated, and the mounting terminal is mounted on the printed circuit board. Solder bridges are less likely to occur when soldering. Further, even when a solder bridge is generated, it is easy to distinguish in appearance.
In the frequency adjustment work, by energizing each mounting terminal 30 and each adjustment terminal 32 with contact members extending from the adjustment probe device in contact with each other, it is possible to check the characteristics of the crystal vibrating element 7 while checking the characteristics. Adjust the frequency of the vibration element. Specifically, the frequency output by exciting the crystal resonator element is confirmed. If there is an error between the target frequency and the actual frequency, the thickness of the excitation electrode on the crystal resonator element is increased or decreased. Adjust according to the method.
When the crystal oscillator 1 is mounted on the printed board, soldering is performed using the mounting terminals 30 provided on the bottom surface of the insulating container P.

次に、図2(a)(b)及び(c)は上記実施形態に係る水晶発振器1の周波数を測定
、調整するために使用する調整用プローブ装置の構成、動作説明図、及び要部構成説明図
である。
この調整用プローブ装置40は、装置本体41と、表面実装型電子デバイスとしての水
晶発振器1の底部に設けた実装端子30と調整端子32に対して、夫々当接するコンタク
ト部材50、60と、を備えている。実装端子用コンタクト部材50は装置本体41によ
って支持され、調整端子用コンタクト部材60は装置本体の上方に昇降自在に配置された
保持部材65によって保持されている。
装置本体41は、水晶発振器1を載置した際に実装端子30と当接する実装端子用コン
タクト部材50を上面に備えたベース部42と、実装端子用コンタクト部材50の両側に
おいてベース部42(回動軸42a)によって内外方向へ回動自在に軸支され閉止位置に
あるときにベース部上に搭載された水晶発振器1の両側面に近接する開閉部材45と、を
備えている。ベース部42の上面に設けた貫通穴42b内には実装端子用コンタクト部材
50が上下動自在に収容されると共に弾性部材50aによって上方へ付勢されている。回
動軸42aには、コイルバネが設けられており、各開閉部材45を閉止方向(内側方向)
へ常時弾性付勢している。
Next, FIGS. 2A, 2B, and 2C are a configuration, an operation explanatory diagram, and a main configuration of an adjustment probe device used for measuring and adjusting the frequency of the crystal oscillator 1 according to the embodiment. It is explanatory drawing.
The adjustment probe device 40 includes an apparatus main body 41, and contact members 50 and 60 that come into contact with the mounting terminal 30 and the adjustment terminal 32 provided on the bottom of the crystal oscillator 1 as a surface-mounted electronic device, respectively. I have. The mounting terminal contact member 50 is supported by the apparatus main body 41, and the adjustment terminal contact member 60 is held by a holding member 65 which is disposed above and below the apparatus main body so as to be movable up and down.
The apparatus main body 41 includes a base portion 42 provided with a mounting terminal contact member 50 that contacts the mounting terminal 30 when the crystal oscillator 1 is placed on the upper surface, and a base portion 42 (turned on both sides of the mounting terminal contact member 50. And an opening / closing member 45 that is pivotally supported in the inner and outer directions by the moving shaft 42a) and is close to both side surfaces of the crystal oscillator 1 mounted on the base portion when in the closed position. A mounting terminal contact member 50 is accommodated in a through hole 42b provided on the upper surface of the base portion 42 so as to be movable up and down and is urged upward by an elastic member 50a. The rotating shaft 42a is provided with a coil spring, and each opening and closing member 45 is closed (inward direction).
Always elastically biased.

保持部材65によって保持された各調整端子用コンタクト部材60は、ベース部上面に
対して昇降(接近離間)自在に構成されており、下降時にベース部上面に搭載された水晶
発振器1の両側面に設けた調整端子32に近接し、図2(b)のように閉止位置に移動し
てきた各開閉部材45によって押圧されて各調整端子32と弾性的に当接し電気的に確実
にコンタクト(導通)するように構成されている。
調整端子用コンタクト部材60は、例えばプローブピン、タングステンプローブ等から
構成する。タングステンプローブのように弾性変形が容易なコンタクト部材を用いること
により、調整端子との接触面積を大きく確保することができ、絶縁容器Pを構成するセラ
ミックシート間の積層ずれに起因して調整端子32の横方向位置にバラツキがあったとし
ても、バラツキ量に追従して弾性変形することができるので、各コンタクト部材60を各
調子端子32に対して確実に当接させることが可能となる。
Each adjustment terminal contact member 60 held by the holding member 65 is configured to be movable up and down (approaching and separating) with respect to the upper surface of the base portion, and on both side surfaces of the crystal oscillator 1 mounted on the upper surface of the base portion when lowered. Close to the provided adjustment terminal 32 and pressed by each opening / closing member 45 that has moved to the closed position as shown in FIG. Is configured to do.
The adjustment terminal contact member 60 is composed of, for example, a probe pin, a tungsten probe, or the like. By using a contact member that is easily elastically deformed, such as a tungsten probe, a large contact area with the adjustment terminal can be secured, and the adjustment terminal 32 is caused by a stacking error between the ceramic sheets constituting the insulating container P. Even if there is a variation in the horizontal direction position, it can be elastically deformed following the variation amount, so that each contact member 60 can be reliably brought into contact with each tone terminal 32.

次に、本発明に係る調整用プローブ装置を用いた表面実装型電子デバイス(水晶発振器
)の周波数測定方法の第1の実施形態は次の通りである。
即ち、第1の周波数測定方法は、図2(a)のように図示しない開閉部材駆動源を用い
て各開閉部材45を開放状態に保持する工程と、ベース部42の上面に配置した複数の実
装端子用コンタクト部材50に対して、水晶発振器1の底部に設けた各実装端子30が一
対一で当接するように、水晶発振器1をベース部上面に位置決め載置する工程と、図示し
ない駆動源を作動させて保持部材65を下降させて各調整端子用コンタクト部材60の先
端部を水晶発振器1の両側面の各調整端子32に近接させる工程と、各開閉部材45を閉
止位置に回動させることにより各調整端子用コンタクト部材60を各調整端子32に圧接
させる工程と、各コンタクト部材50、60に通電することにより水晶振動子(水晶振動
素子)の特性を測定、或いは調整する工程と、各開閉部材45を開放させる工程と、調整
端子用コンタクト部材60を各調整端子32に圧接させた状態で保持部材65を上昇させ
て水晶発振器1をベース部上面から離脱させる工程と、から構成されている。
Next, a first embodiment of a frequency measurement method for a surface-mount electronic device (crystal oscillator) using the adjustment probe device according to the present invention is as follows.
That is, the first frequency measuring method includes a step of holding each open / close member 45 in an open state using an open / close member drive source (not shown) as shown in FIG. A step of positioning and mounting the crystal oscillator 1 on the upper surface of the base portion so that the mounting terminals 30 provided at the bottom of the crystal oscillator 1 are in one-to-one contact with the mounting terminal contact member 50; Is operated to lower the holding member 65 to bring the tip of each adjustment terminal contact member 60 close to each adjustment terminal 32 on both sides of the crystal oscillator 1 and to rotate each opening / closing member 45 to the closed position. Accordingly, the contact member 60 for each adjustment terminal is pressed against each adjustment terminal 32, and the characteristics of the crystal resonator (crystal resonator element) are measured or adjusted by energizing each contact member 50, 60. A step of opening each open / close member 45, a step of lifting the holding member 65 in a state where the adjustment terminal contact member 60 is pressed against each adjustment terminal 32, and detaching the crystal oscillator 1 from the upper surface of the base portion. , Is composed of.

次に、保持部材65によって保持された各調整端子用コンタクト部材60は、弾性材料
から成る本体61と、本体61の先端部の当接部材62と、を備えている。各調整端子用
コンタクト部材60の間隔を水晶発振器1のサイズに合わせて予め適正に設定しておくこ
とにより、図示のように当接部材62をテーパー面31に設けた調整端子32と圧接させ
ることで水晶発振器1を保持することが可能となる。従って、図2(a)に示すように各
調整端子用コンタクト部材60によって水晶発振器1を保持した状態でベース部42に下
降させてから、図2(b)に示すように開閉部材45を閉止して各コンタクト部材に通電
して周波数測定、調整作業を実施し、その後図2(a)のように開閉部材45を開放して
から水晶発振器1を保持した各調整端子用コンタクト部材60を上昇させることが可能と
なる。
当接部材62は、調整端子32との当接、導通を確保し易くするために、円筒状、或い
は球状に構成するのが好ましい。
Next, each adjustment terminal contact member 60 held by the holding member 65 includes a main body 61 made of an elastic material and an abutting member 62 at the tip of the main body 61. By appropriately setting the interval between the contact members for adjustment terminals 60 in advance according to the size of the crystal oscillator 1, the contact member 62 is brought into pressure contact with the adjustment terminal 32 provided on the tapered surface 31 as shown in the figure. Thus, the crystal oscillator 1 can be held. Accordingly, as shown in FIG. 2 (a), the crystal oscillator 1 is held by the contact members 60 for adjusting terminals and lowered to the base portion 42, and then the opening / closing member 45 is closed as shown in FIG. 2 (b). Then, each contact member is energized to perform frequency measurement and adjustment work. After that, as shown in FIG. 2A, the opening / closing member 45 is opened, and then each adjustment terminal contact member 60 holding the crystal oscillator 1 is lifted. It becomes possible to make it.
The contact member 62 is preferably formed in a cylindrical shape or a spherical shape in order to easily ensure contact and conduction with the adjustment terminal 32.

図2(c)において調整端子用コンタクト部材60が調整端子32を挟圧する力をかけ
る点が力点p1であり、コンタクト部材60の先端部とベース41上面との接触点が支点
p2であり、コンタクト部材60の先端部と調整端子32との接触点が作用点p3となる
ため、テコの原理により水晶発振器1を浮かせることができ、これにより調整端子とコン
タクト部材60の先端部との密着度が高まる。
なお、使用する調整端子用コンタクト部材60の対数は一対以上であってもよい。
In FIG. 2C, the point where the adjustment terminal contact member 60 applies a force to clamp the adjustment terminal 32 is the force point p1, and the contact point between the tip of the contact member 60 and the upper surface of the base 41 is the fulcrum p2. Since the contact point between the tip of the member 60 and the adjustment terminal 32 is the action point p3, the crystal oscillator 1 can be floated by the lever principle, and the degree of adhesion between the adjustment terminal and the tip of the contact member 60 is thereby improved. Rise.
The number of adjustment terminal contact members 60 used may be one or more.

本発明に係る調整用プローブ装置を用いた表面実装型電子デバイス(水晶発振器)の周
波数測定方法の第2の実施形態は以下の通りである。
即ち、第2の周波数測定方法は、図2(a)のように図示しない開閉部材駆動源を用い
て各開閉部材45を開放状態に保持する工程と、保持部材65から延びる複数の調整端子
用コンタクト部材60を水晶発振器1の各調整端子32に圧接させて保持する工程と、保
持部材65を下降させてベース部上面に配置した複数の実装端子用コンタクト部材50に
対して実装端子30が一対一で当接するように、水晶発振器1をベース部上面に位置決め
載置する工程と、開閉部材45を閉止位置に回動させることにより各調整端子用コンタク
ト部材60を各調整端子32に加圧させる工程と、各コンタクト部材50、60に通電す
ることにより水晶振動素子の特性を測定、或いは調整する工程と、開閉部材45を開放さ
せる工程と、保持部材65を上昇させて水晶発振器1をベース部上面から離脱させる工程
と、を備えている。
A second embodiment of the frequency measurement method of the surface mount electronic device (crystal oscillator) using the adjustment probe device according to the present invention is as follows.
That is, the second frequency measuring method includes a step of holding each open / close member 45 in an open state using an open / close member drive source (not shown) as shown in FIG. 2A and a plurality of adjustment terminals extending from the holding member 65. A step of holding the contact member 60 in pressure contact with each adjustment terminal 32 of the crystal oscillator 1 and a pair of mounting terminals 30 with respect to the plurality of mounting terminal contact members 50 disposed on the upper surface of the base portion by lowering the holding member 65. The step of positioning and placing the crystal oscillator 1 on the upper surface of the base portion so as to be in contact with each other, and the adjustment terminal contact member 60 is pressurized to each adjustment terminal 32 by rotating the opening / closing member 45 to the closed position. A step, a step of measuring or adjusting the characteristics of the crystal resonator element by energizing each contact member 50, 60, a step of opening the opening / closing member 45, and an upper portion of the holding member 65. It includes a step of separating the crystal oscillator 1 by the base portion upper surface, a.

このように各調整端子用コンタクト部材60は、昇降自在な保持部材65によって保持
されており、水晶発振器1の両側面に位置する各調整端子32に弾性的に圧接することに
より、水晶発振器を保持しつつ昇降するように構成されているので、調整端子と当接部材
62との電気的コンタクトを常に確実に確保できるばかりでなく、装置本体41上への水
晶発振器のセット、離脱を装置本体41とは別個に設けた保持部材65によって実現する
ことができる。従って、調整端子用コンタクト部材60の退避動作に伴って水晶発振器の
離脱が行われることとなり、格別な離脱工程が不要となり、工程数を削減することができ
る。また、調整端子用コンタクト部材の耐久性が低下した場合には、装置本体41を交換
することなく、調整端子用コンタクト部材だけを交換すればプローブ装置40の継続使用
が可能となる。
As described above, each adjustment terminal contact member 60 is held by the vertically movable holding member 65, and holds the crystal oscillator by elastically press-contacting each adjustment terminal 32 located on both sides of the crystal oscillator 1. In addition, since the electrical contact between the adjustment terminal and the abutting member 62 can always be ensured, the crystal oscillator is set on and detached from the apparatus main body 41. It is realizable by the holding member 65 provided separately. Accordingly, the crystal oscillator is detached along with the retracting operation of the adjustment terminal contact member 60, so that a special separation process is unnecessary, and the number of processes can be reduced. Further, when the durability of the adjustment terminal contact member is lowered, the probe device 40 can be continuously used by replacing only the adjustment terminal contact member without replacing the apparatus main body 41.

次に、図3(a)及び(b)は本発明の他の実施形態に係るプローブ装置の構成と動作
説明図である。
このプローブ装置70は、ベース71と、ベース71に設けた穴72、73から夫々先
端部を上向きに突出させた実装端子用コンタクト部材75、及び調整端子用コンタクト部
材76と、水晶発振器1を吸着保持した状態で昇降する保持部材80と、を備えている。
調整端子用コンタクト部材76は、例えばタングステンプローブ等の弾性変形が容易な
導電材料から構成し、穴73によってその先端部76aを内外方向(図面左右方向)へ変
位可能に支持されている。先端部76aはテーパー面31に設けた調整端子32と同等の
傾斜角度を有した接触面を備えている。
保持部材80は吸引穴81から負圧を導入することによりその下面によって水晶発振器
1のリッド上面を吸着保持し、図3(a)のようにベース71上面に下降して行く。なお
、保持部材80の構成は図示したような真空吸着パッド形式以外であってもよい。
Next, FIGS. 3A and 3B are explanatory views of the configuration and operation of a probe apparatus according to another embodiment of the present invention.
The probe device 70 adsorbs the crystal oscillator 1, the base 71, the mounting terminal contact member 75, the adjustment terminal contact member 76 whose tips are protruded upward from the holes 72 and 73 provided in the base 71, respectively. And a holding member 80 that moves up and down while being held.
The adjustment terminal contact member 76 is made of a conductive material that can be easily elastically deformed, such as a tungsten probe, for example, and is supported by a hole 73 so that its distal end portion 76a can be displaced inward and outward (left and right in the drawing). The distal end portion 76 a includes a contact surface having an inclination angle equivalent to that of the adjustment terminal 32 provided on the tapered surface 31.
The holding member 80 sucks and holds the upper surface of the lid of the crystal oscillator 1 with its lower surface by introducing negative pressure from the suction hole 81 and descends to the upper surface of the base 71 as shown in FIG. The configuration of the holding member 80 may be other than the vacuum suction pad type as illustrated.

図3(b)のように水晶発振器1がベース上面に着座すると、図示しない弾性部材によ
って上向きに弾性付勢された各実装端子用コンタクト部材75の先端部が各実装端子30
と当接する。
調整端子用コンタクト部材76は、図3(a)から(b)の状態に移行する過程で、水
晶発振器の両側面によって押し広げられ、(b)のように水晶発振器がベース上面に着座
した状態ではその先端部76aが調整端子32と密着した状態となる。
この実施形態に係るプローブ装置70においては、両コンタクト部材75、76が同方
向(上方)を向いているため、装置構成及びその動作が簡易化し、両コンタクト部材75
、76と両端子30、32とのコンタクト性が高まり、安定する。
なお、上記実施形態では表面実装型電子デバイスの一例として水晶発振器を例示したが
、本発明の調整用プローブ装置は水晶発振器以外の圧電発振器、圧電振動子、SAWデバ
イス等における周波数調整にも使用することができる。
When the crystal oscillator 1 is seated on the upper surface of the base as shown in FIG. 3B, the tip of each mounting terminal contact member 75 elastically biased upward by an elastic member (not shown) is mounted on each mounting terminal 30.
Abut.
The adjustment terminal contact member 76 is expanded by both side surfaces of the crystal oscillator in the process of shifting from FIG. 3A to FIG. 3B, and the crystal oscillator is seated on the upper surface of the base as shown in FIG. Then, the tip 76a is in close contact with the adjustment terminal 32.
In the probe device 70 according to this embodiment, since both the contact members 75 and 76 are directed in the same direction (upward), the device configuration and its operation are simplified, and both the contact members 75 are arranged.
, 76 and the terminals 30 and 32 are improved in contact and stabilized.
In the above embodiment, the crystal oscillator is illustrated as an example of the surface mount electronic device. However, the adjustment probe apparatus of the present invention is also used for frequency adjustment in a piezoelectric oscillator, a piezoelectric vibrator, a SAW device, etc. other than the crystal oscillator. be able to.

(a)(b)(c)及び(d)は本発明の一実施形態に係る表面実装型電子デバイスの一例としての表面実装型水晶発振器(圧電発振器)の縦断面図、底面側斜視図、正面図、及び底面図である。(A) (b) (c) and (d) are a longitudinal sectional view, a bottom side perspective view of a surface-mounted crystal oscillator (piezoelectric oscillator) as an example of a surface-mounted electronic device according to an embodiment of the present invention, It is a front view and a bottom view. (a)(b)及び(c)は本発明の実施形態に係る水晶発振器の周波数を測定、調整するために使用する調整用プローブ装置の構成図、動作説明図、及び要部構成説明図である。(A) (b) and (c) are a configuration diagram, an operation explanatory diagram, and a main configuration explanatory diagram of an adjustment probe device used for measuring and adjusting the frequency of the crystal oscillator according to the embodiment of the present invention. is there. (a)及び(b)は本発明の他の実施形態に係るプローブ装置の構成と動作説明図である。(A) And (b) is a structure and operation | movement explanatory drawing of the probe apparatus which concerns on other embodiment of this invention. (a)乃至(d) は二階建て構造型(H型)モジュールとしての表面実装型圧電デバイス(水晶発振器)の従来構成を示す底面側斜視図、平面図、正面図、底面図である。(A) thru | or (d) are the bottom side perspective views, top views, front views, and bottom views which show the conventional structure of the surface mount type piezoelectric device (crystal oscillator) as a two-story structure type (H type) module. (a)及び(b)は従来の周波数調整手順の説明図である。(A) And (b) is explanatory drawing of the conventional frequency adjustment procedure. (a)乃至(d)は容器側面に調整端子を備えたタイプのH型構造の水晶発振器の底部斜視図、平面図、正面図、及び底面図である。(A) thru | or (d) are the bottom part perspective views, top views, front views, and bottom views of the crystal oscillator of the H-type structure which provided the adjustment terminal in the container side surface. 図6の水晶発振器に対するプロービング状態を示す図である。It is a figure which shows the probing state with respect to the crystal oscillator of FIG. 図6に示したサイドコンタクトタイプの水晶発振器用のプローブ装置の構成及び動作を示す断面図である。It is sectional drawing which shows the structure and operation | movement of the probe apparatus for side contact type crystal oscillators shown in FIG.

符号の説明Explanation of symbols

1…水晶発振器、2…水晶振動子、3…上側容器、4…金属リッド、5…空所、6…素
子搭載用パッド、7…水晶振動素子、8…導電性接着剤、20…下側容器、21a…IC
部品搭載用パッド、22…IC部品、30…実装端子、31…テーパー面、32…調整端
子、40…プローブ装置、40…調整用プローブ装置、41…装置本体、42…ベース部
、42a…回動軸、42b…貫通穴、45…開閉部材、50…実装端子用コンタクト部材
、50a…弾性部材、60…調整端子用コンタクト部材、61…本体、62…当接部材、
65…保持部材、70…プローブ装置、71…ベース、72、73…穴、75…実装端子
用コンタクト部材、76…調整端子用コンタクト部材、76a…先端部、80…保持部材
、81…吸引穴。
DESCRIPTION OF SYMBOLS 1 ... Crystal oscillator, 2 ... Crystal oscillator, 3 ... Upper container, 4 ... Metal lid, 5 ... Empty space, 6 ... Element mounting pad, 7 ... Crystal oscillation element, 8 ... Conductive adhesive agent, 20 ... Lower side Container, 21a ... IC
Component mounting pad, 22 ... IC component, 30 ... mounting terminal, 31 ... tapered surface, 32 ... adjusting terminal, 40 ... probe device, 40 ... adjusting probe device, 41 ... device main body, 42 ... base portion, 42a ... times Dynamic shaft, 42b ... through hole, 45 ... opening / closing member, 50 ... contact member for mounting terminal, 50a ... elastic member, 60 ... contact member for adjusting terminal, 61 ... main body, 62 ... contact member,
65: holding member, 70: probe device, 71: base, 72, 73 ... hole, 75 ... contact member for mounting terminal, 76 ... contact member for adjusting terminal, 76a ... tip portion, 80 ... holding member, 81 ... suction hole .

Claims (15)

外底部に実装端子を備え且つ素子を搭載した表面実装用の絶縁容器と、該素子と導通し
該素子の特性を測定、調整するために該絶縁容器の側面に配置された調整端子と、を備え

前記調整端子は、前記絶縁容器の対向する2つの側面に夫々内側下向きに傾斜して設け
られたテーパー面に配置されていることを特徴とする表面実装型電子デバイス。
A surface-mounting insulating container having a mounting terminal on the outer bottom and mounting the element, and an adjustment terminal arranged on the side surface of the insulating container to conduct and measure and adjust the characteristics of the element. Prepared,
The surface mount type electronic device, wherein the adjustment terminal is disposed on a tapered surface provided to be inclined inward and downward on two opposing side surfaces of the insulating container.
前記各側面に形成された前記各調整端子は対向する位置関係に配置されていることを特
徴とする請求項1に記載の表面実装型電子デバイス。
The surface-mount type electronic device according to claim 1, wherein the adjustment terminals formed on the side surfaces are arranged in an opposing positional relationship.
前記調整端子は、前記絶縁容器側面の底部角部に切欠き形成したテーパー面に形成され
ていることを特徴とする請求項1又は2に記載の表面実装型電子デバイス。
3. The surface-mount type electronic device according to claim 1, wherein the adjustment terminal is formed on a tapered surface that is notched and formed in a bottom corner of the side surface of the insulating container.
前記各調整端子は、前記絶縁容器底部に設けた実装端子に対して横方向位置をずらして
配置されていることを特徴とする請求項1、2又は3に記載の表面実装型電子デバイス。
4. The surface-mount type electronic device according to claim 1, wherein each of the adjustment terminals is disposed with a lateral position shifted with respect to a mounting terminal provided on a bottom portion of the insulating container.
前記表面実装型電子デバイスは、表面実装型圧電デバイスであることを特徴とする請求
項1、2、3又は4に記載の表面実装型電子デバイス。
The surface-mount type electronic device according to claim 1, wherein the surface-mount type electronic device is a surface-mount type piezoelectric device.
前記表面実装型圧電デバイスは、表面実装型圧電振動子、或いは表面実装型圧電発振器
であることを特徴とする請求項5に記載の表面実装型電子デバイス。
6. The surface mount electronic device according to claim 5, wherein the surface mount piezoelectric device is a surface mount piezoelectric vibrator or a surface mount piezoelectric oscillator.
請求項1乃至6の何れか一項に記載の表面実装型電子デバイスを構成する前記実装端子
と前記調整端子に対して、夫々当接するコンタクト部材を備えた調整用プローブ装置であ
って、
前記表面実装型電子デバイスを載置した際に前記実装端子と当接する実装端子用コンタ
クト部材を備えたベース部と、該実装端子用コンタクト部材の両側において該ベース部に
よって内外方向へ回動自在に軸支され閉止位置にあるときに前記ベース部上に搭載された
前記表面実装型電子デバイスの両側面に近接する開閉部材と、を備え、
前記調整端子用コンタクト部材は、前記ベース部上面に対して昇降自在に構成されてお
り、下降時に該ベース部上面に搭載された前記表面実装型電子デバイスの前記調整端子に
近接し、閉止位置にある前記開閉部材によって押圧されて前記各調整端子と弾性的に当接
するように構成されていることを特徴とする調整用プローブ装置。
An adjustment probe apparatus comprising contact members that respectively contact the mounting terminal and the adjustment terminal constituting the surface-mount electronic device according to claim 1,
A base portion provided with a contact member for a mounting terminal that comes into contact with the mounting terminal when the surface-mount type electronic device is placed, and can be rotated inward and outward by the base portion on both sides of the contact member for the mounting terminal. An opening / closing member that is pivotally supported and close to both side surfaces of the surface-mount electronic device mounted on the base portion when in the closed position;
The contact member for the adjustment terminal is configured to be movable up and down with respect to the upper surface of the base portion, and closes to the adjustment terminal of the surface mount electronic device mounted on the upper surface of the base portion when lowered, and is in a closed position. An adjustment probe device, wherein the adjustment probe device is configured to be pressed by a certain opening / closing member to elastically contact each adjustment terminal.
前記各調整端子用コンタクト部材は、昇降自在な保持部材によって保持されており、前
記表面実装型電子デバイスの両側面に位置する前記各調整端子に弾性的に圧接することに
より、該表面実装型電子デバイスを保持しつつ昇降するように構成されていることを特徴
とする請求項7に記載の調整用プローブ装置。
Each adjustment terminal contact member is held by a vertically movable holding member, and elastically presses against each adjustment terminal located on both side surfaces of the surface mount electronic device, whereby the surface mount electronic The adjustment probe apparatus according to claim 7, wherein the adjustment probe apparatus is configured to move up and down while holding the device.
前記調整端子用コンタクト部材は弾性変形可能な構成を有し、その先端は円筒状、或い
は球状に構成されていることを特徴とする請求項7又は8に記載の調整用プローブ装置。
The adjustment probe device according to claim 7 or 8, wherein the adjustment terminal contact member has a configuration that can be elastically deformed, and has a tip that is cylindrical or spherical.
前記実装端子用コンタクト部材は、前記ベース部上面に設けた穴内に収容され、弾性的
に上方へ突出付勢されていることを特徴とする請求項7、8又は9に記載の調整用プロー
ブ装置。
The adjustment probe device according to claim 7, wherein the mounting terminal contact member is accommodated in a hole provided on the upper surface of the base portion and elastically protruded and biased upward. .
前記コンタクト部材は、プローブピン、又はタングステンプローブであることを特徴と
する請求項7乃至10の何れか一項に記載の調整用プローブ装置。
The adjustment probe device according to claim 7, wherein the contact member is a probe pin or a tungsten probe.
請求項7乃至11の何れか一項に記載された調整用プローブ装置を用いた表面実装型電
子デバイスの周波数測定方法であって、
前記開閉部材を開放状態に保持する工程と、
前記ベース部に配置した複数の前記実装端子用コンタクト部材に対して、前記表面実装
型電子デバイス底部に設けた各実装端子が一対一で当接するように、前記表面実装型電子
デバイスを前記ベース部上面に位置決め載置する工程と、
前記各調整端子用コンタクト部材を下降させてその先端部を前記表面実装型圧電デバイ
スの両側面の各調整端子に近接させる工程と、
前記開閉部材を閉止位置に回動させることにより前記各調整端子用コンタクト部材を前
記各調整端子に圧接させる工程と、
前記各コンタクト部材に通電することにより前記素子の特性を測定、或いは調整する工
程と、
前記開閉部材を開放させる工程と、
前記調整端子用コンタクト部材を前記各調整端子に圧接させた状態で前記保持部材を上
昇させて前記表面実装型電子デバイスを前記ベース部上面から離脱させる工程と、
を備えていることを特徴とする表面実装型電子デバイスの調整方法。
A method for measuring a frequency of a surface mount electronic device using the adjustment probe device according to any one of claims 7 to 11,
Holding the open / close member in an open state;
The surface-mount type electronic device is placed on the base portion so that each of the mounting terminals provided on the bottom surface of the surface-mount type electronic device is in a one-to-one contact with the plurality of contact members for mounting terminals arranged on the base portion. A step of positioning and mounting on the upper surface;
Lowering the contact member for each adjustment terminal and bringing its tip portion close to each adjustment terminal on both side surfaces of the surface mount piezoelectric device;
Pressing each adjustment terminal contact member against each adjustment terminal by rotating the opening and closing member to a closed position; and
Measuring or adjusting the characteristics of the element by energizing each contact member; and
Opening the opening and closing member;
A step of raising the holding member in a state where the contact member for adjustment terminal is in pressure contact with each adjustment terminal to separate the surface mount electronic device from the upper surface of the base part;
A method for adjusting a surface-mount type electronic device, comprising:
請求項7乃至11の何れか一項に記載された調整用プローブ装置を用いた表面実装型電
子デバイスの周波数測定方法であって、
前記開閉部材を開放状態に保持する工程と、
前記保持部材から延びる複数の前記調整端子用コンタクト部材を前記表面実装型電子デ
バイスの前記各調整端子に圧接させて保持する工程と、
前記保持部材を下降させて、前記ベース部に配置した複数の前記実装端子用コンタクト
部材に対して前記実装端子が一対一で当接するように、前記表面実装型電子デバイスを前
記ベース部上面に位置決め載置する工程と、
前記開閉部材を閉止位置に回動させることにより前記各調整端子用コンタクト部材を前
記各調整端子に圧接させる工程と、
前記各コンタクト部材に通電することにより前記素子の特性を測定、或いは調整する工
程と、
前記開閉部材を開放させる工程と、
前記保持部材を上昇させて前記表面実装型電子デバイスを前記ベース部上面から離脱さ
せる工程と、
を備えていることを特徴とする表面実装型電子デバイスの調整方法。
A method for measuring a frequency of a surface mount electronic device using the adjustment probe device according to any one of claims 7 to 11,
Holding the open / close member in an open state;
A step of holding the plurality of adjustment terminal contact members extending from the holding member in pressure contact with the respective adjustment terminals of the surface mount electronic device; and
The surface mounting type electronic device is positioned on the upper surface of the base portion by lowering the holding member so that the mounting terminals abut one-to-one against the plurality of mounting terminal contact members arranged on the base portion. A process of placing;
Pressing each adjustment terminal contact member against each adjustment terminal by rotating the opening and closing member to a closed position; and
Measuring or adjusting the characteristics of the element by energizing each contact member; and
Opening the opening and closing member;
Raising the holding member to separate the surface mount electronic device from the upper surface of the base part;
A method for adjusting a surface-mount type electronic device, comprising:
請求項1乃至6の何れか一項に記載の表面実装型電子デバイスを構成する前記実装端子
と前記調整端子に対して、夫々当接するコンタクト部材を備えた調整用プローブ装置であ
って、
前記実装端子と当接する実装端子用コンタクト部材と、前記調整端子と当接する調整端
子用コンタクト部材と、を備え、
前記実装端子用コンタクト部材と前記調整端子用コンタクト部材は、同一方向を向いて
配置されていることを特徴とする調整用プローブ装置。
An adjustment probe apparatus comprising contact members that respectively contact the mounting terminal and the adjustment terminal constituting the surface-mount electronic device according to claim 1,
A mounting terminal contact member that contacts the mounting terminal; and an adjustment terminal contact member that contacts the adjustment terminal;
The adjustment probe device, wherein the mounting terminal contact member and the adjustment terminal contact member are arranged in the same direction.
前記表面実装型電子デバイスの底面を上面に載置した際に前記実装端子と当接する実装
端子用コンタクト部材を上向きに支持したベース部と、
前記調整端子と当接する先端部を前記ベース部によって上向きに支持された前記調整端
子用コンタクト部材と、を備えたことを特徴とする請求項14に記載の調整用プローブ装
置。
A base portion that supports a mounting terminal contact member that contacts the mounting terminal when the bottom surface of the surface mount electronic device is placed on the upper surface;
The adjustment probe device according to claim 14, further comprising: an adjustment terminal contact member in which a tip portion in contact with the adjustment terminal is supported upward by the base portion.
JP2006222283A 2006-08-17 2006-08-17 Surface-mounted electronic device, adjusting prober and adjusting method of surface-mounted electronic device Withdrawn JP2008047723A (en)

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Cited By (6)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2009267863A (en) * 2008-04-25 2009-11-12 Kyocera Kinseki Corp Piezoelectric oscillator
JP2010157932A (en) * 2008-12-27 2010-07-15 Kyocera Kinseki Corp Piezoelectric oscillator and method for manufacturing the same
JP2010171475A (en) * 2009-01-20 2010-08-05 Nippon Dempa Kogyo Co Ltd Crystal oscillator for surface mounting
JP2010223664A (en) * 2009-03-23 2010-10-07 Seiko Epson Corp Inspection method for electrical characteristic of electronic device and tool for electronic device inspection
CN102882488A (en) * 2011-07-15 2013-01-16 台湾晶技股份有限公司 Crystal oscillator with layout structure for miniaturization size
JP2018137534A (en) * 2017-02-20 2018-08-30 京セラ株式会社 Electronic component housing package, electronic device and electronic module

Cited By (6)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2009267863A (en) * 2008-04-25 2009-11-12 Kyocera Kinseki Corp Piezoelectric oscillator
JP2010157932A (en) * 2008-12-27 2010-07-15 Kyocera Kinseki Corp Piezoelectric oscillator and method for manufacturing the same
JP2010171475A (en) * 2009-01-20 2010-08-05 Nippon Dempa Kogyo Co Ltd Crystal oscillator for surface mounting
JP2010223664A (en) * 2009-03-23 2010-10-07 Seiko Epson Corp Inspection method for electrical characteristic of electronic device and tool for electronic device inspection
CN102882488A (en) * 2011-07-15 2013-01-16 台湾晶技股份有限公司 Crystal oscillator with layout structure for miniaturization size
JP2018137534A (en) * 2017-02-20 2018-08-30 京セラ株式会社 Electronic component housing package, electronic device and electronic module

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