JPH11162342A - Manufacture of multiple electrodes - Google Patents

Abstract

PROBLEM TO BE SOLVED: To provide the manufacturing method of multiple electrodes, with which electrodes can be accurately arranged at a high density. SOLUTION: Manufacturing method of multiple electrodes is formed of a first process for arranging plural electrode wires 12 on a metal frame 10 with an equal space, a second process for pinchedly arranging the metal frame 10 provided with the electrode wires 12 between a first glass plate 14 and a second glass plate 16, a third process for pressing and fusing the first glass plate 14 and the second glass plate 16 at a working temperature equal to or less than a transition point of the glass forming the first glass and equal to or more a deformation temperature of the glass forming the second glass, and a fourth process for polishing the end face of the fused glass plate for finishing.

Description

DETAILED DESCRIPTION OF THE INVENTION

[0001]

[0001] The present invention relates to, for example, MCP (Mic
The present invention relates to a method for manufacturing a multi-electrode used as a read multi-anode of a ro-channel plate.

[0002]

2. Description of the Related Art A multi-electrode in which electrodes are arranged one-dimensionally or two-dimensionally is used, for example, as a multi-anode for reading out an MCP (Micro Channel Plate). This is because, by using a multi-electrode, compared to the case of using a single electrode, electrons output from each position of the MCP can be simultaneously detected and read out in parallel.

[0003] As a method of manufacturing this multi-electrode, the following manufacturing method is known. That is, the substrate is provided with one-dimensionally or two-dimensionally arranged holes for inserting electrode rods, and after inserting electrode rods made of a conductive material into each hole, a hole is formed in the hole, that is, a gap between the electrode rod and the inner wall of the hole. This is a method of fixing the electrode rod by pouring softened glass. According to this method, a multi-electrode in which electrodes are arranged one-dimensionally or two-dimensionally can be manufactured.

A multi-electrode is an MCP (Micro Chann
el plate), it is used not only in the readout multi-anode but also in various fields (for example, JP-A-61-1219).
No. 61).

[0005]

According to the above manufacturing method,
It is possible to manufacture a multi-electrode in which electrodes are arranged one-dimensionally or two-dimensionally. However, the above manufacturing method includes
There are the following problems.

That is, in the above method, after the electrode rod is inserted into the hole, the electrode rod is fixed by pouring the softened glass, so that the electrode rod is fixed until the softened glass is solidified. I have to put it.
Therefore, the rigidity of the electrode rod must be maintained even at the temperature at which the glass softens, and the electrode rod must necessarily have a certain thickness. As a result, it becomes impossible to arrange the electrodes at high density.

Further, in the above method, it is necessary to provide one-dimensionally or two-dimensionally arranged holes for inserting electrode rods in the substrate. If the hole diameter is reduced, high positional accuracy is maintained due to a problem in processing accuracy. In this state, the electrodes cannot be arranged.

[0008] Accordingly, the present invention provides a method for positioning with high accuracy.
An object is to provide a method for manufacturing a multi-electrode in which electrodes can be arranged at high density.

[0009]

In order to solve the above-mentioned problems, a method of manufacturing a multi-electrode according to the present invention comprises the steps of arranging a plurality of substantially linear conductive members and forming the first conductive member into a first conductive member. A method for manufacturing a multi-electrode in which a first glass plate and a second glass plate are sandwiched between a glass plate and a second glass plate, and the first glass plate and the second glass plate are pressure-fused at a predetermined processing temperature to form the first glass plate. The transition point of the glass is equal to or higher than the transition point of the glass forming the second glass plate, the processing temperature is equal to or lower than the melting point of the conductive member, and equal to or lower than the transition point of the glass forming the first glass plate. And at least the transition point of the glass forming the second glass plate.

In the above method, a plurality of substantially linear conductive members are arranged, and the arranged conductive members are connected to a first glass plate and a second glass member.
Since the multi-electrode is manufactured by sandwiching the first glass plate and the second glass plate at a predetermined processing temperature under pressure and sandwiching them between the glass plates, there is no need to perform a process of opening a hole for electrode insertion in the substrate. Become.

[0011] Further, since the processing temperature at the time of pressure fusion is equal to or lower than the transition point of the glass forming the first glass plate,
The deformation of the first glass plate during pressure welding is small, and the arrangement of the conductive members is less likely to collapse. On the other hand, since the processing temperature during pressure fusion is equal to or higher than the transition point of the glass forming the second glass sheet, the glass forming the second glass sheet is deformed and enters the gap between the conductive members. Therefore, each conductive member is fixed between the first glass plate and the second glass plate.

Further, the method for manufacturing a multi-electrode according to the present invention comprises:
The transition point of the glass forming the first glass sheet is not lower than the yield point of the glass forming the second glass sheet, and the processing temperature is not lower than the yield point of the glass forming the second glass sheet. It is preferable to have the feature.

Since the processing temperature at the time of pressure fusion is higher than the yield point of the glass forming the second glass sheet, the glass forming the second glass sheet is extremely flexibly deformed, and each conductive member is deformed. Each conductive member is easily fixed between the first glass plate and the second glass plate.

Further, the method of manufacturing a multi-electrode according to the present invention further comprises the steps of:
The difference in the coefficient of thermal expansion of the glass forming the second glass plate is 6
Preferably, the temperature is not higher than × 10 ^-7 ° C ^-1 .

Since the difference between the coefficient of thermal expansion of the glass forming the first glass plate and the coefficient of thermal expansion of the glass forming the second glass plate is not more than 6 × 10 ⁻⁷ ° C. ⁻¹ , In the joint surface between the glass plate and the second glass plate, stress due to a difference in thermal expansion coefficient can be prevented.

Further, the method for manufacturing a multi-electrode according to the present invention may be characterized in that the substantially linear conductive member is a substantially linear electric conductive portion formed on the first glass plate. The substantially linear electric conduction portion can be easily formed on the first glass plate by an etching method or the like.

[0017]

DETAILED DESCRIPTION OF THE PREFERRED EMBODIMENTS A method for manufacturing a multi-electrode according to a first embodiment of the present invention (hereinafter referred to as a first manufacturing method) will be described with reference to the drawings. First, a specific procedure of the first manufacturing method will be described. The first manufacturing method is roughly divided into a first step of arranging conductive electrode wires used as electrodes at equal intervals and a second step of arranging the arranged electrode wires between two glass plates. A second step, a third step in which the two glass plates are pressure-fused at a predetermined temperature, and a fourth step, in which an end surface of the fused glass plate is polished and finished.
Process.

The first step is a step of arranging conductive electrode wires used as electrodes at equal intervals. In this step, as shown in FIG.
A plurality of 0 μm electrode wires 12 are arranged on the metal frame 10 at equal intervals. At this time, the interval at which the electrode wires 12 are arranged may be arbitrarily determined according to the situation where the multi-electrode is used. In order to fix each electrode wire 12 to the metal frame 10, both ends of the electrode wire 12 may be fixed to the metal frame 10 with an adhesive or the like while the electrode wire 12 is in tension.

The second step is a step of arranging the arranged electrode wires between two glass plates. In this step, as shown in FIG. 1, the metal frame 10 in which the electrode wires 12 are arranged in the first step is connected to the first glass plate 1.
The mold release material 18 is placed on the second glass plate 16, and the weight 20 is further placed thereon.

The first glass plate 14 is made of BaO—La ₂ O ₃ -based glass, and the second glass plate 16 is made of Pb
It is formed from O-SiO ₂ based glass. The thermal expansion coefficient, transition point, and sagging point of these glasses are as shown in Table 1.

[0021]

[Table 1]

Here, the transition point is the temperature corresponding to the intersection of the extension of the linear portion between the low temperature range and the high temperature range in the thermal expansion curve of the glass, and the yield point is the temperature in the thermal expansion curve of the glass. The temperature at which expansion stops. Further, as can be seen from Table 1, the transition point (510 ° C.) of the glass forming the first glass plate 14 is higher than the sag point (461 ° C.) of the glass forming the second glass plate 16. , First
Coefficient of thermal expansion of the glass forming the glass plate 14
The difference in the coefficient of thermal expansion of the glass forming the glass plate 16 is 2
× 10 ^-7 ° C ^-1 .

Here, the release material 18 is used to prevent the second glass plate 16 and the weight 20 from fusing together during heating, and is formed of mica. Further, as the weight 20, a material having a sufficient mass to press-weld the first glass plate 14 and the second glass plate 16 may be used.

The third step is a step in which the two glass plates are pressure-fused at a predetermined temperature. In this step, a stack of a first glass plate 14, a metal frame 10 on which electrode wires 12 are arranged, a second glass plate 16, a release material 18, and a weight 20 (hereinafter referred to as a work) is inserted into an electric furnace. After that, the processing temperature of 500 ° C. is maintained for one hour, and the first glass plate 14 and the second glass plate 16 are pressure-fused. On this occasion,
The first glass plate 14 and the second glass plate 16 have a weight 2
0 implies a pressure of 500 g / cm ² .

Here, the processing temperature (500 ° C.)
Transition point of glass forming the first glass plate (510 ° C)
And is above the yield point (461 ° C.) of the glass forming the second glass plate. This relationship is conceptually shown in FIG.

The fourth step is a step of polishing and finishing the end face of the fused glass plate. After the pressure welding in the third step, the naturally cooled work is taken out of the electric furnace,
The weight 20, the release member 18, and the metal frame 10 are removed. Then, when the end surfaces of the first glass plate 14 and the second glass plate 16 which are pressure-fused with the electrode wire 12 interposed therebetween are polished, a multi-electrode 22 in which a plurality of electrodes are embedded inside the glass member is formed. Is done. FIG. 4 is an enlarged view of the end face of the multi-electrode 22. The electrode wires 12 are arranged at equal intervals on the main surface of the first glass plate 14, and the glass forming the second glass plate 16 melted in the pressure fusing process penetrates into the gap between the electrode wires 12. To solidify the electrode wire 12
Has been fixed.

Next, the operation and effects of the first manufacturing method will be described. First, in the first manufacturing method, the electrode wires 12 are arranged at equal intervals, and the first glass plate 14 and the second glass plate 16 are pressed and fused with the arranged electrode wires 12 interposed therebetween. Thus, since the multi-electrode 22 is manufactured, it is not necessary to form a hole for inserting an electrode in the substrate as in the related art.
As a result, the manufacture of the multi-electrode 22 is facilitated, the positioning error of the perforation is eliminated, and the multi-electrode 22 in which the electrodes are arranged with high positional accuracy can be formed.

Second, the first manufacturing method uses the electrode wire 1
2 are arranged at equal intervals, and the first glass plate 14 and the second glass plate 16 are pressed and fused by sandwiching the arranged electrode wires 12 to produce a multi-electrode 22. After the electrodes are inserted into the holes, it is not necessary to fix the electrode rods while pouring the softened glass to fix the electrodes. As a result, it is possible to make the electrodes thin enough to lose the rigidity, and it is possible to arrange the electrodes with high density.

Third, in the first manufacturing method, since the processing temperature at the time of press-fitting is lower than the transition point of the glass forming the first glass plate 14, the first manufacturing method uses The deformation of the first glass plate 14 is small, and the arrangement of the electrode wires 12 is less likely to collapse. Further, since the processing temperature at the time of pressure fusion is equal to or higher than the yield point of the glass forming the second glass plate 16, the second glass plate 1 is pressed at the time of pressure fusion.
6 is deformed very flexibly and easily penetrates into the gaps between the electrode wires 12, so that the electrode wires 12
Are easily fixed between the first glass plate 14 and the second glass plate 16. As a result, it is possible to fix the electrode wires 12 between the two glass plates while maintaining the positional accuracy of the arranged plurality of electrode wires 12, and to form the multi-electrode 22 in which the electrodes are arranged with high positional accuracy. it can.

Fourth, in the first manufacturing method, the difference between the coefficient of thermal expansion of the glass forming the first glass plate 14 and the coefficient of thermal expansion of the glass forming the second glass plate 16 is 2 × 10 ^-7
Since the temperature is extremely low at ⁻¹ ° C., it is possible to prevent the occurrence of stress due to the difference in thermal expansion coefficient at the joint surface between the first glass plate and the second glass plate. As a result, it is possible to form the multi-electrode 22 in which the electrodes are arranged with high accuracy without distortion.

Next, a method for manufacturing a multi-electrode according to a second embodiment of the present invention (hereinafter, referred to as a second manufacturing method) will be described with reference to the drawings. The second manufacturing method is the first
The difference from the first manufacturing method is that, in the first step of the first manufacturing method, a plurality of electrode wires 12 used as electrodes are arranged on the metal frame 10 at equal intervals.
In the manufacturing method, a plurality of linear electric conduction portions 24 used as electrodes are formed on the first glass plate 14 by using an etching method.

FIG. 5 is a cross-sectional view schematically showing a process of forming the electric conduction portion 24. In order to form the electric conduction portion 24, first, Cr or a Cr alloy is deposited on one main surface of the first glass plate 14 shown in FIG. 5A as shown in FIG. A base electrode 26 having a thickness of about 0.0001 mm is formed. Here, the base electrode 26 is connected to the electric conduction portion 24 and the first
This is formed to increase the degree of adhesion to the glass plate 14. Thereafter, as shown in FIG. 5 (c), the masks 28 are arranged at equal intervals in portions other than the portions where the electric conduction portions 24 are formed.
To form Thereafter, as shown in FIG. 5D, the electric conduction portion 24 is formed by using a plating method, an evaporation method, or the like. Finally, as shown in FIG. 5E, the mask 28 is removed, and a member in which the plurality of linear electric conduction portions 24 are formed on the first glass plate 14 is completed. Hereinafter, after the second step, the first step
It is the same as the manufacturing method.

FIG. 6 is an enlarged view of the end face of the multi-electrode 30 formed by the second manufacturing method. Multi electrode 3
0 is the multi-electrode 2 formed by the first manufacturing method.
Similarly to the second embodiment, the electric conductive portions 24 are arranged on the main surface of the first glass plate 14 at regular intervals, and the glass forming the second glass plate 16 melted in the pressure fusion process is made of each electric glass. It penetrates into the gap of the conduction part 24 to fill the gap. However, the second
The cross-sectional shape of the electric conduction portion 24 appearing on the end face of the multi-electrode 30 formed by the manufacturing method described above is rectangular because the electric conduction portion 24 is formed by the etching method. Further, since the base electrode 26 is used, the base electrode 26 also appears on the end surface.

The second manufacturing method can also be expected to have the same effect as the first manufacturing method. However, the second manufacturing method forms an electrode wire by forming the electric conduction portion 24 used as an electrode by an etching method. As compared with the first manufacturing method of arranging, the manufacture of the multi-electrode 30 is further facilitated, and the positional accuracy of the formed electric conduction portion 24 is further improved.

In the second manufacturing method, the electric conduction portion 24
May be formed as shown in FIG. That is, first, the base electrode 26 is formed on one main surface of the first glass plate 14 shown in FIG. 7A, as shown in FIG. 7B.
Thereafter, as shown in FIG. 7C, an electric conduction portion 24 is formed on the entire surface of the first glass plate 14 on which the base electrode 26 is formed by using a plating method, an evaporation method, or the like. Then, FIG.
As shown in FIG. 7D, a linear mask 28 was formed in a portion where an electrode was to be formed, and as shown in FIG. 7E, the mask 28 of the electric conduction portion 24 was formed by an etching method. The part other than the part is removed. Finally, as shown in FIG. 7F, the mask 28 is removed, and the first glass plate 14 is removed.
A member having a plurality of linear electric conduction portions 24 formed thereon is completed.

In the second manufacturing method, the formation of the electric conduction portion 24 may be as shown in FIG. That is, first, as shown in FIG. 8B, a metal plate 32 having a thickness of about 50 μm is bonded onto the main surface of the first glass plate 14 shown in FIG. 8A. As shown in FIG. 9, the bonding of the metal plate 32 is performed by sequentially stacking the release material 18, the metal plate 32, the first glass plate 14, the release material 18, and the weight 20 on the base 34 and inserting the release material 18, into the heating furnace. Then, the metal plate 32 and the first glass plate 14 are pressed and fused at a temperature equal to or higher than the yield point of the first glass plate 14. Then, as shown in FIG.
A linear mask 28 is formed in a portion where an electrode is to be formed, and as shown in FIG.
2, a portion other than the portion where the mask 28 is formed is removed to form a linear electric conduction portion 24. Finally, FIG.
As shown in (e), the mask 28 is removed, and a member in which the plurality of linear electric conduction portions 24 are formed on the first glass plate 14 is completed. The end face of the multi-electrode 35 using the member formed by this method is as shown in FIG. It is the same as that shown in FIG. 6 except that the base electrode does not appear on the end face.

Next, a method of manufacturing a multi-electrode according to a third embodiment of the present invention (hereinafter, referred to as a third manufacturing method) will be described with reference to the drawings. The third manufacturing method is the first
The difference from the first manufacturing method is that a plurality of electrode wires 12 used as electrodes are arranged at equal intervals on the metal frame 10 in the first step of the first manufacturing method.
In the manufacturing method of (1), a metal plate 32 is bonded onto the first glass plate 14, and the metal plate 32 is grooved to form a linear electric conduction portion 24.

Specifically, as shown in FIG. 11A, a metal plate 32 is pressure-fused to one main surface of the first glass plate 14 (see FIG. 9). Thereafter, as shown in FIG. 11B, the metal plate 3 is cut using a cutter 36 having a rotary blade.
The portion of the electrode 2 where no electrode is formed is scraped off. as a result,
A member in which the plurality of linear electric conduction portions 24 are formed on the first glass plate 14 is completed. Hereinafter, the second and subsequent steps are the same as in the first manufacturing method.

The third manufacturing method can also be expected to have the same effect as the first manufacturing method. However, the third manufacturing method is different from the first manufacturing method in forming the electric conduction portion 24 with a metal. Since there is no need to use a frame, there is an advantage that there is no need to consider a displacement between the metal frame and the first glass plate 14. The cutter 36 may have a multi-blade type blade. By having a multi-blade type blade, it is possible to process multiple grooves at once,
Processing efficiency is improved.

In the above first to third manufacturing methods, FIG.
As shown in FIG. 2, an electrode plate 38 having an area larger than the cross-sectional area of the electrode wire 12 or the electric conduction portion 24 is provided on the exposed portion of the electrode wire 12 or the electric conduction portion 24 on the end face of the multi-electrode 22 or the like. Is also good. The electrode plate 38 can be formed, for example, by depositing a metal on an exposed portion of the electrode wire 12 or the electric conduction portion 24 on the end face of the multi-electrode 22 or the like.

Although the first to third manufacturing methods are for manufacturing a one-dimensional multi-electrode, a two-dimensional multi-electrode as shown in FIG. Is also possible. Two-dimensional multi-electrode 40 shown in FIG.
Is the first glass plate 14 in the second manufacturing method.
And a second member having a plurality of linear electric conduction portions 24 formed thereon.
It is obtained by alternately stacking a plurality of glass plates 16 with each other and pressing and bonding them at a predetermined temperature.

In this case, as shown in FIG.
Between each first glass plate 14 and the first glass plate 14
It is desirable to insert a spacer 42 made of a material having the same thermal characteristics as the glass forming the first glass plate and having a desired thickness in a peripheral portion of the first glass plate. By using the spacers 42, it is possible to make the electrode intervals uniform in the laminating direction of the first glass plates 14.

Further, when a two-dimensional multi-electrode is manufactured by the first manufacturing method, the size of the second-stage frame is set to be large enough to accommodate the first-stage frame, and the thickness of the frame is set to the first-stage. A frame which is thicker by the distance between electrodes (stacking direction) than that of the above frame is used. Similarly, the n-th frame (n is an integer of 2 or more) is set to have a size that can accommodate the (n−1) -th frame, and the thickness of the frame is set to the n-th frame.
The distance between electrodes (stacking direction) compared to the first-stage frame
Use a thicker one. In this manner, by stacking the frames that are sequentially large in size and thick in thickness, it is possible to manufacture a two-dimensional multi-electrode with uniform electrode spacing.

The electric furnace used at the time of the above-mentioned pressure welding is preferably an electric furnace which can be evacuated. By using an electric furnace which can be evacuated, generation of bubbles on the fusion surface can be suppressed.

Before the first glass plate 14 and the second glass plate 16 are fused, each glass plate may be baked at a transition temperature or lower. By baking,
Dirt on the surface of each glass plate evaporates and oxidizes, which has the effect of suppressing the generation of bubbles during fusion. However, in this case, attention must be paid to the oxidized state of the electrode wires 12 and the electric conduction portions 24.

In the first to third manufacturing methods described above, the pressure applied when the first glass plate 14 and the second glass plate 16 were fused under pressure was 500 g / cm ² . 1
Considering the combination of the materials of the glass plate 14 and the second glass plate 16, the processing temperature, etc., 200 g / cm ^{2 to} 300 k
It may be set freely within the range of g / cm ² .

[0047]

According to the method for manufacturing a multi-electrode of the present invention, a plurality of substantially linear conductive members are arranged in an axial direction and a vertical direction.
A multi-electrode is manufactured by sandwiching the arranged conductive members between a first glass plate and a second glass plate and pressing and fusing the first glass plate and the second glass plate at a predetermined processing temperature. Therefore, it is not necessary to form a hole for inserting an electrode in the substrate. Further, since the processing temperature at the time of pressure fusion is equal to or lower than the transition point of the glass forming the first glass plate, the deformation of the first glass plate at the time of pressure fusion is small, and the arrangement of the conductive members is small. Is less likely to collapse. On the other hand, since the processing temperature during pressure fusion is equal to or higher than the transition point of the glass forming the second glass sheet, the glass forming the second glass sheet is deformed and enters the gap between the conductive members. Therefore, each conductive member is fixed between the first glass plate and the second glass plate.

As a result, it becomes easy to manufacture the electrodes, and it is possible to manufacture a multi-electrode in which the electrodes are arranged at high density and with high positional accuracy.

Further, the method for producing a multi-electrode of the present invention comprises:
The coefficient of thermal expansion of the glass forming the first glass plate;
The difference in the coefficient of thermal expansion of the glass forming the glass plate is 6 × 1
Since the temperature is extremely low at 0 ^-7 ° C ^-1 or less, stress due to a difference in thermal expansion coefficient can be prevented at the joint surface between the first glass plate and the second glass plate.

As a result, it is possible to prevent electrode displacement due to distortion.

[Brief description of the drawings]

FIG. 1 is a process chart of a method for manufacturing a multi-electrode according to a first embodiment of the present invention.

FIG. 2 is a perspective view of a metal frame used in the method for manufacturing a multi-electrode according to the first embodiment of the present invention.

FIG. 3 is a diagram showing a relationship between a glass transition point, a yield point, and a processing temperature in the method for manufacturing a multi-electrode according to the first embodiment of the present invention.

FIG. 4 is an enlarged view of an end face of the multi-electrode manufactured by the method for manufacturing a multi-electrode according to the first embodiment of the present invention.

FIG. 5 is a process chart of a method for manufacturing a multi-electrode according to a second embodiment of the present invention.

FIG. 6 is an enlarged view of an end face of a multi-electrode manufactured by a multi-electrode manufacturing method according to a second embodiment of the present invention.

FIG. 7 is a process chart of a method for manufacturing a multi-electrode according to a second embodiment of the present invention.

FIG. 8 is a process chart of a method for manufacturing a multi-electrode according to a second embodiment of the present invention.

FIG. 9 is a process chart of a method for manufacturing a multi-electrode according to the second embodiment of the present invention.

FIG. 10 is an enlarged view of an end face of a multi-electrode manufactured by a method for manufacturing a multi-electrode according to a second embodiment of the present invention.

FIG. 11 is a process chart of a method for manufacturing a multi-electrode according to a third embodiment of the present invention.

FIG. 12 is an enlarged view of a modification of the end face of the multi-electrode manufactured by the method for manufacturing a multi-electrode according to the first embodiment of the present invention.

FIG. 13 is an enlarged view of an end face of a two-dimensional multi-electrode manufactured by the method for manufacturing a multi-electrode according to the second embodiment of the present invention.

FIG. 14 is a process chart in the case of manufacturing a two-dimensional multi-electrode by using the multi-electrode manufacturing method according to the second embodiment of the present invention.

[Explanation of symbols]

DESCRIPTION OF SYMBOLS 10 ... Metal frame, 12 ... Electrode wire, 14 ... 1st glass plate, 16 ... 2nd glass plate, 18 ... Release material, 20
... weights, 22, 30, 35, 40 ... multi-electrodes, 24 ...
Electric conduction part, 26 ... base electrode, 28 ... mask, 32 ... metal plate, 34 ... stand, 36 ... cutter, 38 ... electrode plate, 42 ...
Spacer

Claims (4)

[Claims] 1. A method according to claim 1, further comprising: arranging a plurality of substantially linear conductive members, sandwiching the arranged conductive members between a first glass plate and a second glass plate, and arranging the first glass plate and the second glass plate. A method of manufacturing a multi-electrode, comprising: fusing a glass plate under pressure at a predetermined processing temperature, wherein a transition point of glass forming the first glass plate is a transition point of glass forming the second glass plate. Above the transition point, the processing temperature is below the melting point of the conductive member, and below the transition point of the glass forming the first glass plate, and forming the second glass plate A method for producing a multi-electrode, wherein the temperature is higher than or equal to the transition point of glass. 2. The transition point of the glass forming the first glass sheet is equal to or higher than the sag point of the glass forming the second glass sheet, and the processing temperature is set to form the second glass sheet. The method for producing a multi-electrode according to claim 1, wherein the deformation point is equal to or higher than a yield point of the glass to be formed. 3. The difference between the coefficient of thermal expansion of the glass forming the first glass sheet and the coefficient of thermal expansion of the glass forming the second glass sheet is 6 × 10 ⁻⁷ ° C.- ¹ or less. The method for producing a multi-electrode according to claim 1 or 2, wherein: 4. The substantially linear conductive member is a substantially linear electric conductive portion formed on the first glass plate. 13. The method for producing a multi-electrode according to the above item.