JPS60115125A - Manufacture of electrode of flat type display device - Google Patents

Abstract

PURPOSE:To improve accuracy of position of the electrodes by arranging a elongation adjusting rod having a specific surface roughness contiguous to the non-expanding electrode, and inclined at some angle with respect to the direction of the thermal expansion of the expanding electrode. CONSTITUTION:A spacer 20 is inserted between an electrode 18 which has rigidity in the direction indicated by the arrow X and an electrode 19 which does not have rigidity in the same direction. Joining layers 21 for fixing the electrodes 18, 19 and spacer 20 are applied on both sides of the spacer 20. Elongation adjusting rods 22 are finished with surface roughness less than RmaX1mum. The rods 22 are arranged so that they will be continuous to the electrode 19 and they will be inclined at am angle theta deg. with respect to the direction indicated by the arrow X. The spacer 20, electrodes 28, 19 and elongation adjusting rods 22 are heated under pressure in order to melt and recrystalize the joining layer 21 and also in order to bake and fix the spacer 20 and the electrodes 18, 19. By changing the inclination angle theta, the elongation of the electrode 19 which does not have rigidity in the direction indicated by the arrow X can be adjusted.

Description

[Detailed description of the invention] Industrial applications The present invention relates to a method for manufacturing electrodes for flat panel display devices.

Configuration of Conventional Example and its Problems First, the configuration of a flat display device manufactured by the manufacturing method of the present invention will be briefly described. An outline of a flat display device is shown in FIGS. 1 to 5. In FIG. 1, 1 is a phosphor surface, 2 is a cathode, 3 is a coupling spacer, and 4 is an electrode. The electron beam emitted from the cathode 2 is horizontally and vertically deflected and intensity-modulated by various electrodes 4, and is then directed to the phosphor surface 1.
and make it emit light.

The electrodes 4 can be classified into electrodes 5 that are rigid in the direction of the arrow X and electrodes 6 that are not rigid, as shown in FIG. 2, depending on their performance. Each electrode is insulated and bonded and fixed at a constant distance via a spacer 7 coated with glass and coated with a bonding frit as shown in Fig. 4.This electrode firing method is shown in Fig. 5. As shown in the figure, a spacer 11 is inserted between an electrode 9 that is rigid in the direction of arrow The spacer 13'f for elongation adjustment is placed adjacent to the electrode 10 which has no rigidity in the direction of the arrow X, and pressure is applied from the direction of the arrow Z by the stand bar 14 to melt the adhesive frit applied to the surface of the spacer 11 in the bath. The spacer 11 and the electrodes 9 and 10 are bonded together by heating to a temperature of The electrode 9 follows the thermal expansion coefficient of the 42-6 alloy that is its material in the X direction. Due to the force of expansion, the electrode 10, which has no rigidity in the direction of the arrow X, hardly expands in the X direction. After firing, a position shift occurs in the X direction between the electrode 9 that is rigid in the direction of the arrow X and the electrode 10 that is not rigid in the direction of the arrow X. As a measure to prevent this position shift, The elongation adjustment spacer 13 is placed adjacent to the electrode 10 that has no rigidity, and when the plagiarism spacer 13 is heated and thermally expands, the electrode 10 that has no rigidity in the direction of the arrow X is expanded in the X direction VC by frictional force. .By such a mechanism, the position in the X direction of the electrode fF9 which is rigid in the X direction and the electrode 10 which is not rigid in the X direction is aligned.Therefore, the electrode 10 which is not rigid in the direction of the arrow X The amount of thermal expansion of the elongation adjustment spacer 13 is related to the amount of thermal expansion of the elongation adjustment spacer 13, and it is necessary to adjust the thermal expansion coefficient of the elongation adjustment spacer to a predetermined value.One way to do this is as shown in FIG. 42-6 alloy material 16 Glass layer 1 on the surface
7, and by adjusting the thickness of the glass layer 17, the coefficient of thermal expansion of the elongation adjusting spacer is set to a predetermined value. The surface roughness of the elongation adjustment spacer with the glass layer 17 formed on its surface is Rmaχ1oμm or more. Therefore, as shown in FIG. Since the spacers 13 are placed adjacent to each other and pressure is applied from the two directions of the arrows using the stamper 14, there is no rigidity in the direction of the arrow X. 1k10 is not rigid in the direction of the arrow X because it follows the surface roughness of the adjacent spacer 13 for elongation adjustment. A step in the direction of arrow Z occurs in the electrode 10 which has no rigidity. For this reason, it has been difficult to eliminate the positional deviation between the electrodes and at the same time eliminate the step difference in the direction of the arrow Z of the electrode 10, which has no rigidity with respect to the direction of the arrow X.

OBJECTS OF THE INVENTION The present invention solves the above-mentioned conventional drawbacks and improves the positional accuracy of electrodes. Electrode and heat 1 that thermally expands in a certain direction due to the structure between the light body
A plurality of non-expandable electrodes are provided via bonding spacers, and when these are fired and fixed, wires having a surface roughness Rma' Since the direction of thermal expansion of the wire rod and the direction of thermal expansion of the thermally expanding electrode are arranged at a predetermined slope, the amount of thermal expansion of the electrodes can be made equal, improving electrode precision. It is something that can be measured.

EXAMPLE 11 Hereinafter, an example of the present invention will be explained based on FIGS. 7 to 9. FIG. 7 shows a manufacturing method of an example of the present invention. Keep multiple electrodes at a predetermined distance.
When fixing, 18 is an electrode that is rigid in the direction of the arrow X, 19 is an electrode that is not rigid in the direction of the arrow X, and a spacer 20 is inserted between them. 21 is a bonding layer for bonding and fixing the electrodes 18 and 19 and the spacer 2Q, and is coated on the front and back surfaces of the spacer. 22 is a wire rod for elongation adjustment, and the surface roughness is finished to Rmax 1 μm or less. The elongation adjusting wire 22 is adjacent to the electrode 19 having no rigidity in the direction of the arrow X, and is arranged at an angle of θ degrees with respect to the direction of the arrow X.

The bonding layer 21 is melted and recrystallized, and in order to fix the spacer 20 and the electrodes 18 and 19 by firing, it is stretched in a direction perpendicular to the plane of the paper from the adjustment spacer 22 side to the electrode 19 side on one plane of the stamper, from the electrode 18 side to the electrode 19 side. The material is pressurized and heated on the plane of the firing jig, and the rigidity in the direction of arrow X is 18, which is the coefficient of thermal expansion of the material in the direction of X, which is 42.
Expands with the thermal expansion coefficient α of -6 alloy. When the electrode 19, which has no rigidity in the direction of the arrow X, cannot expand by itself in the X direction when heated, it is affected by the thermal expansion of the elongation adjustment wire 22 adjacent to it, and the elongation adjustment wire It expands in the X direction due to the frictional force generated between it and 22. Since the elongation adjusting wire 22 is arranged at an angle of θ with respect to the direction of arrow Expand. Due to the stiffness, the amount of expansion of the elongation adjusting wire in the direction of arrow X is L=l@T·α′·cosθ, where l is the unit length in the direction of arrow X' and T is the heating temperature. This means that the coefficient of thermal expansion is α in the direction of arrow X.
This is the same as placing the elongation adjustment wire rods of ′・cos θ adjacent to each other, and by changing the thermal expansion coefficient α′ of the elongation adjustment wire rod and the inclination θ with respect to the arrow X direction, the heat in the X direction of the elongation adjustment wire rod can be adjusted. The amount of expansion can be adjusted. In order to see the influence of the elongation adjustment of the electrode 19 which is not rigid in the direction of the arrow X of the inclination θ of the elongation adjustment wire 22 with respect to the direction of the arrow X, the electrode 18 which is rigid in the direction of the arrow As a material for the electrode 19 which has no rigidity, 42 Ni-
Using a 6Or-Fe alloy, a 42Ni-6Or-F'e alloy was used as the material for the elongation adjusting wire 22, and the electrode was fixed by firing by changing the inclination θ of the elongation adjusting wire 22 with respect to the arrow X direction. When the electrode 18 is rigid in the direction of the arrow X, the elongation result of the electrode 19 which is not rigid in the direction of the arrow We used 42N1-ecr-Fe alloy as the material for the 0 electrode, which was found to be able to adjust the elongation of electrodes with no rigidity in the X direction, and 42Ni-6Or as the material for the elongation adjustment wire.
- When P'e alloy is used, the inclination θ of the elongation adjusting wire with respect to the arrow X direction is set to 16 degrees, so that the arrow
It was possible to make the elongation of the electrode 18 which is rigid in the direction and the electrode 19 which is not rigid in the direction of the arrow X the same.

In addition, since the surface roughness of the elongation adjusting wire 220 is Rmax1 μm or less, as shown in FIG. In Fig. 7, 42Ni-Fe alloy and 5ONi-Fe alloy are used as materials for the electrode 18 that is rigid in the direction of the arrow X and the electrode 19 that is not rigid in the direction of the arrow X. , a 2
Using Ni-6Cr-Fe alloy, 42 Ni-6C; r-Fe alloy,
In order to equalize the elongation of the electrode 18 that is rigid in the direction of the arrow X and the electrode 19 that is not rigid in the direction of the arrow X in each case using 5US430, the elongation adjustment wire 22 is made in the direction of the arrow X. The experimental results for the slope θ are shown in FIG. In this way, it has been found that even if the materials of the electrodes are different, the elongation of the electrode 19, which has no rigidity in the direction of the arrow X, can be adjusted by making the inclination θ of the elongation adjustment wire rod in the X direction monocarbon. did.

Effects of the Invention As described above, the method for manufacturing electrodes for a flat panel display device of the present invention has two types of electrodes: electrodes that expand in a certain direction due to the thermal expansion coefficient of the material itself when heated, and electrodes that do not expand when fixed by firing. Finished with a surface roughness R of 1 μm or less.The elongation adjustment wires are placed adjacent to each other and are arranged at an angle with respect to the thermal expansion direction of the expanding electrode, and depending on the degree of inclination) the non-expanding electrode The elongation can be adjusted. Therefore, it was possible to reduce the positional deviation between the electrodes to 30 μm or less for a length of 180 mm. Also, the surface roughness of the elongation adjustment line side 'iRma''
Since X is 1 μm or less, the flatness of the adjacent non-expanding electrode can be maintained at 5 μm or less. This has improved the accuracy of electron beam landing, making it possible to make a significant contribution to improving the image quality of flat panel display devices.

[Brief explanation of the drawing]

FIG. 1 is a side view showing the configuration of a flat display device, FIG.
FIG. 3 is a plan view of a rigid electrode and a small electrode used in the device, No. 41 is a plan view of a coupling spacer used in the device, and FIG. 5 is a side view of the flat display device in the baking process. Fig. 6 is a sectional view of the spacer, Fig. 7 is a partially cutaway plan view of the electrode and spacer obtained according to an embodiment of the present invention, and Fig. 8 is the inclination of the elongation adjustment line and the positional accuracy of the electrode. FIG. 9 is a characteristic table showing the experimental results when the electrode thickness and the length of the elongation adjusting wire are changed. 1... Fluorescent body, 2... Cathode, 3...
...Coupling spacer, 4...Electrode, 18.
... Electrode rigid in the direction of arrow X, 19.
... Electrode with no rigidity in the direction of arrow X, 20.
... Spacer, 21 ... Bonding layer, 22.
...Extension 1. l Adjustment wire rod. Name of agent: Patent attorney Toshio Nakao and 1 other person12
Figure〈-m-÷X Figure 3 ←→× Figure 4 ←→X Prefecture 7 Figure 5 /ρ ? σ 9 diagram

Claims (1)

[Claims] A plurality of electrodes that thermally expand in a certain direction and electrodes that do not thermally expand in a certain direction are provided between the cathode and the phosphor via bonding spacers, and when they are fired to be fixed, the surface roughening is applied to the non-thermal expanding electrodes. A flat display in which Rma-containing 1st batch μm or less materials are arranged in parallel and adjacent to each other in a certain direction, and arranged so that the thermal expansion direction of the wire rod and the thermal expansion direction of the thermally expanding electrode have a predetermined inclination. Method for manufacturing electrodes of the device.