JPH11144817A - Connector and probe card using it - Google Patents

Abstract

PROBLEM TO BE SOLVED: To provide a structure in which many contacts are shielded by appropriate potential such as earth potential without increasing contacts. SOLUTION: In a male connector 38, plural male side contacts 60 and a male side conductor 62 of a plate shape extending in an arrangement direction of the male side contacts are arranged on a male side base 58. In a female connector 34, a recessed part 64 to receive the male side contacts 60 is at least provided on a female base 52, at least a part of plural female contacts 54 being brought into contact with the male side contacts is arranged in parallel with the recessed part 64 and a female conductor 56 of a plate shape being brought into contact with the male side conductor 62 is arranged on the female base 52.

Description

DETAILED DESCRIPTION OF THE INVENTION

[0001]

BACKGROUND OF THE INVENTION 1. Field of the Invention The present invention relates to a connector and a probe card using the same, and more particularly, to a connector suitable for conducting an electrical test of a flat test object such as an integrated circuit and a probe card using the same.

[0002]

2. Description of the Related Art Generally, a current test for an IC chip formed on a semiconductor wafer is performed using a probe card. Many conventional probe cards merely dispose a plurality of probes radially on a disc-shaped wiring board, so that they can only inspect several IC chips on a semiconductor wafer at the same time. Therefore, many I
It takes a lot of time to inspect one semiconductor wafer on which the C chip is formed.

In view of the above, a plurality of probe units having a plurality of probes arranged at the lower edge of a flat support extending in the horizontal direction are used, and these probe units are arranged so that the supports are parallel to each other. A probe card assembled on a wiring board has been proposed (Japanese Patent Laid-Open No. 7-1995).
2019935).

In a conventional probe card, current is supplied between a wiring board and a probe by a plurality of flat cables in which a plurality of coaxial cable portions are arranged in one direction. The flat cable is electrically connected to the probe unit at one end, and is electrically connected to the wiring board by a connector at the other end.

Therefore, in the conventional probe card, as shown in FIG. 11, a wiring board and a flat cable 110 are connected by a male connector 112 provided on the flat cable 110 and a female connector 114 provided on the wiring board. Electrically connected.

The male connector 112 has a plurality of pin-shaped male contacts 116 arranged in a row on a male base 118 made of an electrically insulating material. In contrast, female connector 1
Reference numeral 14 denotes a plurality of cylindrical female contacts 120 for inserting the male contacts 116 into the female base 12 made of an electrically insulating material.
2 are arranged in parallel in a line.

The shield wire of the coaxial cable portion is electrically connected to the male contacts at both ends, and the core wire of the coaxial cable portion is electrically contacted with the remaining male contacts. Male connector 11
2 and the female connector 114 are connected to each other, the male and female contacts at both ends are connected to the ground potential shield wire of the coaxial cable portion, and the remaining male and female contacts are connected to the coaxial cable portion. Receive signals from the core wire.

However, the conventional connector only uses the male and female contacts at both ends for grounding. Therefore, noise is increased in the connector portion, current hardly flows, and furthermore, impedance matching is performed. Is bad. As a result, good frequency characteristics cannot be obtained with the conventional connector.

If the number of contacts used for the ground potential is increased in order to solve the above-mentioned problems, the more contacts required, the more complicated and large the connector becomes and the more expensive it becomes.

[0010]

Therefore, it is important for the connector to have a structure in which many contacts are shielded by an appropriate potential such as a ground potential without increasing the number of contacts.

[0011]

The connector of the present invention includes a male connector and a female connector that are joined together. The male connector includes an electrically insulating male base, a plurality of male contacts arranged in parallel with the male base, and male contacts that are arranged on the male base and contact side portions of the male contacts. And a plate-shaped male conductor extending in the arrangement direction of the daughters.

The female connector is in contact with an electrically insulating female base having a recess extending in the direction of arrangement of the male contacts to receive at least the male contact, and the male contact received in the recess. And a plurality of female contacts arranged at least partially in parallel in the recess, and a female connector arranged on the female base so as to contact the male conductor when the male connector and the female connector are coupled. And a plate-like female conductor extending along the side of the side contact in the direction in which the female contacts are arranged.

In the connector, the shield wire of the coaxial cable portion can be connected to the male conductor, and the core wire of the coaxial cable portion can be connected to the male contact. As a result, the test signals supplied to the contacts are shielded on their sides by the potential supplied to the two conductors extending in the direction of their arrangement, so that the number of contacts is increased without increasing the number of contacts. Low noise, easy current flow, and high impedance matching, resulting in good frequency characteristics.

The male contact and the male conductor can be integrally formed with an electrically insulating spacer therebetween, and the female conductor can be arranged in the recess at a distance from the female contact. . Thus, the male and female contacts can be electrically connected by inserting the integrated male contact and male conductor into the recesses of the female connector, and the male and female conductors can be electrically connected. Can be connected.

The female conductor has a contact portion located in the recess, a through portion extending from the lower end of the contact portion to the lower surface of the female base, and a female extending along the lower surface of the female base from the lower end of the through portion. It may have a side contact and an extension extending to the opposite side. Thus, the female conductor can be connected to the wiring board at the extension, so that the work of connecting the female conductor to the wiring board becomes easy.

Each female contact may have a female contact portion located in the recess and an extension projecting below the female base from the lower end of the female contact portion. This also allows the female contact to be connected to the wiring board at the extension, thereby facilitating the work of connecting the female contact to the wiring board.

The male conductor has a mounting portion attached to the male base, and a male contact portion extending downward from the mounting portion along the side of the male base and projecting downward from the male base. The female conductor may be disposed on a side of the female base. Thus, by inserting the male contact into the recess of the female connector so that the side wall of the female base is received between the male contact and the male conductor, the male and female contacts are electrically connected. They can be connected, and both male and female conductors can be electrically connected.

The female conductor may have a female contact located on a side of the female base and an extension extending from the lower end of the female contact to the side opposite to the female contact. . This also allows the female conductor to be connected to the wiring board at the extension, thereby facilitating the work of connecting the female conductor to the wiring board.

A probe card according to the present invention comprises: a wiring board;
One or more probe assemblies supported by the wiring board, one or more flat cables in which a plurality of coaxial cable portions are arranged in one direction, and a flat cable connected to the probe assemblies; And one or more connectors.

The male connector is arranged on a flat cable, and the female connector is arranged on a wiring board. In the male connector, the male contact is connected to the core wire of the coaxial cable portion of the flat cable, and the male conductor is connected to the shield of the coaxial cable portion. In the male connector, at least the male contact is inserted into the female connector. This allows
Both male and female contacts and both male and female conductors are electrically connected.

Even with the probe card, the number of contacts is increased because the test signals supplied to the contacts are shielded on the sides of the contacts by the potential supplied to the conductors extending in the direction of their arrangement. In addition, in the connector portion, noise is small, current easily flows, and impedance matching is increased, resulting in good frequency characteristics.

The wiring board can have a plurality of wiring portions connected to the female contacts and one or more wiring layers connected to the female conductor.

[0023]

1 to 3, a probe card 10 includes a plurality of IC chips (integrated circuit chips).
It is used for a conduction test of a flat test object 12 in which a large number of terminals (electrodes) are arranged at a minute pitch like a semiconductor wafer having the following. The object to be inspected 12 is the inspection stage 1
4 is held on the chuck top 16 by vacuum suction.

The probe card 10 includes a disk-shaped wiring board 20 and a rectangular mounting frame 2 mounted on the wiring board.
2, a plurality of probe units 24 arranged in parallel with the mounting frame, a plurality of flexible flat cables 26 extending from each probe unit 24, and a plate-like member arranged in parallel with the mounting frame 22. 28.

The probe card 10 is attached to an inspection device (not shown) so that the thickness direction of the wiring board 20 is vertical. FIG. 1 shows a state where the flat cable 26 is removed.

The wiring board 20 has a rectangular opening 30 extending in the left-right direction at the center, a plurality of tester lands 32 electrically connected to an external tester on the outer periphery, and a flat cable 26 connected thereto. A plurality of female connectors 34 are provided at an intermediate portion in the front-rear direction, and a plurality of power lands 36 electrically connected to the plate member 28 are provided on both sides in the longitudinal direction of the opening 30.

The wiring board 20 can be manufactured by a printed wiring technique. The opening 30 is a through hole that penetrates the wiring board 20 in the thickness direction. The female connector 34 will be described later with reference to FIGS.

The mounting frame 22 is fitted in the opening 30 and is provided with a plurality of screw members or an adhesive.
It is attached to 0 so that it cannot be displaced. The mounting frame 22 functions as one member of the wiring board 20. However, mounting plate 2
2 may not be provided.

Each probe unit 24 has an elongated flat plate shape, and is detachably attached to the attachment frame 22 by screw members at both ends.

Each flat cable 26 is a flexible strip-shaped wiring member having a plurality of coaxial cable portions, and the male connector 3 coupled to the female connector 34 of the wiring board 20.
8 at one end. In the illustrated example, a plurality of flat cables 26 are provided for each probe unit 24. The male connector 38 will be described later with reference to FIGS.

Each plate-like member 28 is a T-shaped printed wiring circuit board having a plurality of conductive wiring portions formed by a printed wiring technique, and as shown in FIG. Has a plurality of lands 40. Each wiring portion of each plate member 28 is electrically connected to the land 40. In the illustrated example, one plate member 28 is provided for one probe unit 24.

Each land 40 of each plate member 28 is connected to the conductor 4
2 is connected to the power supply land 36 of the wiring board 20.
One or more lands 36 of the power supply lands 36 of the wiring board 20 are connected to the ground, and the remaining lands 36 are connected to terminals having a positive or negative potential of the power supply. For this reason,
One or more wiring portions of the wiring portions of each plate member 28 function as a part of the ground line, and the remaining wiring portions function as a part of a power supply line, that is, a part of a power supply line.

Each probe unit 24 includes a support 44 having an elongated rectangular parallelepiped shape, and a plurality of probes 4 arranged at the lower end of the support at intervals in the longitudinal direction.
6 is included. The plate member 28 is provided for each probe unit 24 as one member of the probe unit 24. However, the plate member 28 need not be provided.

The support body 44 is in the form of a thick plate having a substantially rectangular cross section, and is attached to the mounting frame 22 by a screw member at a plate-like mounting portion projecting in the longitudinal direction from the upper end of each end surface. Installed. The plate member 28 is supported by a support 44.

Each probe 46 is formed from a conductive thin metal wire. The probe 46 is attached to the lower surface of the support body 44 by mounting means made of an electrically insulating material such as a synthetic resin or an adhesive such that the tips of the probes 46 of the same probe unit 24 are on the same side and extend in parallel with each other. ing.

The probe unit 24 is manufactured so that the tip of the probe 46 is located on the same plane. The rear ends of the plurality of probes 46 are electrically connected to wiring portions of the corresponding plate-like members 28 by soldering or the like. The rear ends of the remaining probes 46 are electrically connected to the core wires of the corresponding flat cable 26 by soldering or the like.

The number and positions of the probes connected to the wiring portion of the plate-like member 28 differ depending on the number of test objects to be tested at one time by one probe unit. In the illustrated example, since the number of test objects to be inspected at one time by one probe unit 24 is one, the rear ends of the plurality of probes 46 located at both ends in the arrangement direction are the corresponding plate-like members. 28 are electrically connected to each other by soldering or the like.

At the time of the energization test of the flat test object, each probe 46 presses the needle tip against the terminal portion of the test object 12 by raising the test object 12 toward the probe card 10 by the stage 14. In this state, a predetermined voltage is applied.

Referring to FIG. 4 to FIG.
Uses a female connector 34 and a male connector 38.

The female connector 34 includes an elongated plate-like female base 52 made of an electrically insulating material such as resin, a plurality of female contacts 54 arranged in parallel with the female base, and a female base 54. 52, and a plate-shaped female-side conductor 56 disposed at the position 52. On the other hand, the male connector 38 has an elongated plate-shaped male base 58 made of an electrically insulating material such as resin, a plurality of male contacts 60 arranged in parallel with the male base, And a plate-shaped male-side conductor 62 disposed on the base 58.

Each female contact 54 is made of a pin having a square cross section. Each female contact 54 is
A female contact portion 54a located in a recess 64 formed in the female base 52, and an extension portion 54 extending from the lower end of the female contact portion and protruding below the female base 52.
b. The female contacts 54 are spaced apart in the longitudinal direction of the recess 64 (the arrangement direction of the female contacts 54). Grooves 66 extending in the vertical direction may be formed on the side wall of the recess 64 at a constant pitch in the longitudinal direction of the recess 64, and the contact portion 54a may be arranged in each groove 66.

The female conductor 56 includes a female contact portion 56a located in the recess 64, a through portion 56b extending from the lower end of the female contact portion to the lower surface of the female base 52, and a lower end of the through portion. And an extension 56c extending from the female side base 52 to the side opposite to the female side contact 54 along the lower surface of the female side base 52.

The male contact 60 is made of a pin having a square cross section, and the male base 58 is formed so that a surface corresponding to one side of the square is a common surface.
Female contact 54 with an electrically insulating material made of
Are arranged in a line at the same pitch as.

The male conductor 62 is formed integrally with the male contact 60 with an electrically insulating spacer 68 made of the material of the male base 58 interposed therebetween.
0, and penetrates the male base 58 in the vertical direction.
The integrated male contact 60 and male conductor 62 are received in the recess 64 of the female base 52.

Each female contact 54 and female conductor 56 are
The male contact 60 and the male conductor 62 integrated with the spacer 68 are formed integrally with the female base 52 so as to receive between them. Contact part 54
a and 56a are elastically deformable and curved so as to receive the integrated male contact 60 and male conductor 62 therebetween.

Each female contact 54 is electrically connected to the wiring portion of the wiring board, and the female conductor 56 is electrically connected to the ground wiring portion of the wiring board. Each male contact 60 is connected to a core wire 72 of the coaxial cable part 70, and the male conductor 62 is connected to a shield wire 74 of the coaxial cable part 70.

In the connector 50, the female contact 54
And the female-side conductor 56 are extended portions 54b and 56c, respectively.
Therefore, the work of connecting the female contact 54 and the female conductor 56 to the wiring board is facilitated.

The integrated male contact 60 and male conductor 62 are inserted into the recess 64 of the female connector 34 and sandwiched between the female contacts 54a and 56a. Thus, the male and female contacts 60 and 54 come into contact and are electrically connected, and the male and female conductors 62 and 56 come into contact and are electrically connected.

The test signals supplied to the contacts 54, 60 are shielded on their sides by the ground potential supplied to both conductors 56, 62 extending in their arrangement direction. Thereby, the connector 5 can be connected without increasing the number of contacts.
In the portion of 0, noise is small, current flows easily, and impedance matching is high. As a result, good frequency characteristics are obtained.

Referring to FIGS. 7 to 10, another connector 80 uses a female connector 82 and a male connector 90. Like the connector 50, the female connector 82 includes a female base 84, a plurality of female contacts 86, and a female conductor 88.
The male connector 90 includes a male base 92, a plurality of male contacts 94, and a male conductor 96.

The female contact portion 86 of each female contact 86
a is disposed in the recess 98 of the female base 84, and the extension 86 b extends from the lower end of the female contact 86 a and projects below the female base 84. The female contacts 86 are spaced apart in the longitudinal direction of the recess 98.

The female conductor 88 is a female contact portion 88a immovably arranged on the side surface of the female base 84, and an extension bent from the lower end of the contact portion 88a to the side opposite to the female contact 86. The portion 88b has an L-shape.

Each male contact 94 penetrates the male base 92. The male contacts 94 are spaced apart in the longitudinal direction of the recess 98. Each male conductor 96 is connected to the male base 9.
2 and a male contact portion 96b extending downward from the mounting portion 96a on the side of the male base 92 and projecting downward from the male base 92. .

Each female contact 86 is electrically connected to the wiring portion of the wiring board, and the female conductor 88 is electrically connected to the ground wiring portion of the wiring board. As shown in FIG. 9, each male contact 94 is connected to the core wire 72 of the coaxial cable portion 70, and the male conductor 96 is connected to the shield wire 74 of the coaxial cable portion 70.

Since the connector 80 can also connect the female contact 86 and the female conductor 88 to the wiring board at the extension portions 86b and 88b, respectively, the female contact 86 and the female conductor to the wiring board can be connected. 88 can be easily connected.

The male connector 90 is configured to receive a part of the female base 84 and the contact portion 88a of the female conductor 88 between the male contact 94 and the contact portion 96a of the male conductor 96. The male contact 94 is connected to the female connector 82 by inserting the male contact 94 into the recess 98.

The male contact 94 is inserted into the recess 98 so as to elastically deform the contact portion 86a of the female contact 86. The male conductor 96 connects the part of the female base 84 and the contact portion 88a of the female conductor 88 to the male contact 94.
Elastically deform so as to be received between the contact portion 96b of the male-side conductor 96. As a result, the male and female contacts 94 and 86 come into contact and are electrically connected, and the male and female conductors 96 and 88 come into contact and are electrically connected.

In the connector 80 as well, the test signals supplied to the contacts 86 and 94 are shielded on their sides by the ground potential supplied to the conductors 88 and 96 extending in the direction of their arrangement. Thereby, the noise is small at the connector 80 without increasing the number of contacts,
Current flows easily, and impedance matching is high. As a result, good frequency characteristics can be obtained.

In the above embodiment, the male contacts 60, 9
4 and the male conductors 62 and 96 can be connected to the coaxial cable portion by a conductive adhesive such as solder. Also, instead of applying a ground potential to the conductors 56, 62, 88, 96, another potential is applied to the conductors 56, 62, 88, 9
6 may be applied.

In the above embodiment, four probe units are provided, but the present invention provides a plurality of probe units, preferably 2n units.
(Where n is an integer of 1 or more) can be applied to a probe card provided with a probe unit. The present invention can be applied not only to a probe card in which probes are arranged in one layer but also to a probe card in which probes are arranged in two or more layers.

The present invention is not limited to the above embodiment. For example, the present invention can be applied not only to an IC chip formed on a semiconductor wafer, but also to a connector and a probe card used for testing other flat test objects such as a cut IC chip and a liquid crystal display panel. it can.

[Brief description of the drawings]

FIG. 1 is a plan view showing one embodiment of a probe card of the present invention.

FIG. 2 is a sectional view taken along line 2-2 in FIG.

FIG. 3 is a sectional view taken along line 3-3 in FIG. 1;

FIG. 4 is a perspective view of one embodiment of the connector of the present invention as viewed from one direction.

FIG. 5 is a perspective view showing the connector shown in FIG. 4 from another direction.

6 is an enlarged cross-sectional view of the connector shown in FIG. 4 in which a female connector and a male connector are connected.

FIG. 7 is a perspective view of another embodiment of the connector as viewed from one direction.

8 is a perspective view showing the connector shown in FIG. 7 from another direction.

FIG. 9 is a perspective view showing a connection state between the male connector and the coaxial cable portion.

FIG. 10 is an enlarged cross-sectional view of the connector shown in FIG. 7 in which a female connector and a male connector are connected.

FIG. 11 is a perspective view of a conventional connector.

[Explanation of symbols]

 DESCRIPTION OF SYMBOLS 10 Probe card 12 Inspection object 20 Wiring board 22 Mounting frame 24 Probe unit 26 Flat cable 28 Plate member 30 Opening (through hole) 46 Probe 50, 80 Connector 34, 82 Female connector 38, 90 Male connector 52, 84 Female side Base 54, 86 Female contact 56, 88 Female conductor 58, 92 Male base 60, 94 Male contact 62, 96 Male conductor 64, 98 recess

Claims (8)

[Claims] 1. A male connector and a female connector coupled to each other, the male connector comprising: an electrically insulating male base; and a plurality of male contacts arranged in parallel with the male base. A male conductor that is disposed on the male base and extends a side portion of the male contact in the arrangement direction of the male contacts.The female connector includes at least the male contact. An electrically insulating female base having a recess extending in the arrangement direction of the male contacts for receiving, and at least a portion in the recess so as to contact the male contact received in the recess; A plurality of female contacts arranged in parallel, and a plate-like female conductive member arranged on the female base so as to contact the male conductor when the male connector and the female connector are connected. Body and the side of the female contact And a plate-shaped female conductor extending in the array direction of the side contacts, connectors. 2. The male contact and the male conductor are integrally formed with an electrically insulating spacer therebetween, and the female conductor is spaced from the female contact. The connector of claim 1, wherein the connector is located within the recess. 3. The female conductor includes a contact portion located in the recess, a through portion extending from a lower end of the contact portion to a lower surface of the female base, and a female base from a lower end of the through portion. 3. The connector according to claim 2, further comprising an extension extending along a lower surface of the female contact to a side opposite to the female contact. 4. Each female contact has a female contact portion located in the recess, and an extension projecting below the female base from a lower end of the female contact portion. Or the connector according to 3. 5. The male conductor has a mounting portion mounted on the male base, and a male extending downward from the mounting portion on a side of the male base and protruding downward from the male base. The connector according to claim 1, further comprising: a side contact portion, wherein the female conductor is disposed on a side portion of the female base. 6. The female conductor includes a female contact portion located on a side of the female base, and an extension extending from a lower end of the female contact portion to a side opposite to the female contact. The connector according to claim 5, comprising: 7. A flat cable having a wiring board, a probe assembly supported by the wiring board, and a plurality of coaxial cable portions arranged in one direction, the flat cable being connected to the probe assembly. 7. The connector according to any one of items 6 to 6, wherein a male connector of the connector is arranged on the flat cable, a female connector of the connector is arranged on the wiring board, and a contact of the male connector is A probe card which is connected to a core wire of the coaxial cable portion and a conductor of the male connector is connected to a shield wire of the coaxial cable portion. 8. The wiring board has a plurality of wiring portions connected to female contacts of the female connector, and one or more wiring layers connected to female conductors of the female connector.
The probe card according to claim 7.