JPH11142643A - Device and method for manufacture of color filter and color filter - Google Patents

Abstract

PROBLEM TO BE SOLVED: To provide a device and a method for manufacture of a color filter which makes good use of characteristics of an ink jet system, is inexpensive and high in reliability and to provide a color filter. SOLUTION: Against at least one set of a drawing head which spouts respectively, separately and independently ink jets of three colors R, G and B, a substrate where a color filter is formed by the drawing through the ink jets is moved in a plane crossing the ink jet spouting direction of the drawing head to draw plural colors at the same time by the drawing head unit. In this case, a gap and a tilt between the substrate and the drawing head are detected and the drawing is carried out while the position and the tilt of the substrate are controlled so that the differences between the detection results and target values are minimized.

Description

DETAILED DESCRIPTION OF THE INVENTION

[0001]

BACKGROUND OF THE INVENTION 1. Field of the Invention The present invention relates to an apparatus and a method for manufacturing a color filter of a color liquid crystal display used for a color television, a personal computer and the like, and more particularly to a technique for manufacturing a liquid crystal color filter using an ink jet recording technique. It is about.

[0002]

2. Description of the Related Art Conventional color filter manufacturing methods include:
Dyeing methods, pigment dispersion methods, electrodeposition methods, printing methods and the like are known. In the dyeing method, a water-soluble polymer material, which is a material for dyeing, is formed on a glass substrate, formed into a desired pattern by a photolithography process, and then the pattern is immersed in a dyeing tank to form a colored pattern. The process of obtaining R, G, B3
This is a method of forming a color filter by repeating the process a number of times. The pigment dispersion method is a method that is replacing the dyeing method, and includes a step of forming a photosensitive resin layer in which a pigment is dispersed on a glass substrate and patterning the same to obtain a monochromatic pattern by R, G, and B three times. This is a method of forming a color filter by repeating.

In the electrodeposition method, a process of patterning a transparent electrode on a glass substrate and immersing it in an electrodeposition coating solution containing a pigment, a resin, an electrolytic solution and the like to electrodeposit a single color is performed three times for R, G, and B. This is a method in which a color filter is formed by repeating the process, and finally baked. The printing method is a method in which a pigment is dispersed in a thermosetting resin, and the printing is repeated three times to separately apply R, G, and B, and then the resin is thermoset.

By the way, these methods have in common that the same process needs to be repeated three times in order to color R, G and B colors. (1) The cost is high. (2) There are drawbacks such as a low yield due to a large number of steps.

Further, the electrodeposition method limits the shape of a pattern that can be formed, so that it is difficult to apply the method to a TFT. The printing method has poor resolution and is difficult to cope with pattern miniaturization. There are drawbacks.

In order to make up for these drawbacks, Japanese Patent Application Laid-Open No.
75205, JP-A-63-235901, JP-A-1-2
No. 17320 has been filed. Furthermore, Japanese Patent Publication No. 6-4317 has been proposed as a high-precision drawing method using ink jet.

[0007]

However, the conventional examples described in the above publications do not consider (1) an appropriate method of drawing with a plurality of nozzles in order to increase productivity. (2) A method for drawing (producing) with high accuracy by a plurality of nozzles is not considered. (3) Degradation of landing position accuracy due to head mounting error or flatness of the substrate is not taken into account. (4) Measurement between head and substrate is only one point,
Since the position of the head is controlled to maintain the distance between the substrate and the head, it is difficult to draw a plurality of colors at the same time like a color filter.

An object of the present invention is to provide an inexpensive and highly reliable apparatus and method for manufacturing a color filter which satisfies the characteristics such as the resolution of the above-mentioned conventional method and which makes use of the characteristics of an ink jet system. To provide.

[0009]

In order to achieve the above object, a color filter manufacturing apparatus according to the present invention comprises:
At least one set of drawing heads for separately and independently ejecting color ink jets, and a substrate on which a color filter is formed by drawing by the ink jets are mounted. A liquid crystal color filter manufacturing apparatus, comprising: a moving unit for moving, and simultaneously drawing a plurality of colors by the drawing head unit, provided at at least three places to detect a gap and a tilt between the substrate and the drawing head. And a means for controlling the position and inclination of the substrate so as to minimize the difference between the target value and the detection result of the gap and inclination between the substrate and the writing head during writing. I do.

Further, in the method of manufacturing a color filter according to the present invention, a color filter is formed on at least one set of drawing heads for independently and independently ejecting R, G, and B color ink jets by the ink jet. A method of manufacturing a color filter for a liquid crystal, comprising: moving a substrate in a plane intersecting the ink jet direction of the drawing head and simultaneously drawing a plurality of colors by the drawing head unit. And the inclination is detected, and the drawing is performed while controlling the position and the inclination of the substrate so as to minimize the difference between the detection result and the target value.

[0011]

DETAILED DESCRIPTION OF THE PREFERRED EMBODIMENTS A manufacturing apparatus for manufacturing a color filter for a liquid crystal by an ink jet method according to an embodiment of the present invention has a glass substrate mounted thereon and is moved in a plane parallel to a drawing head. A moving device, a device for detecting a relative displacement between the glass substrate and the drawing head, a means for detecting a landing position of ink ejected from the drawing head, and a glass substrate based on the detection result of the landing position and the relative displacement detection result. An apparatus for performing alignment of a drawing head, wherein a plurality of colors are simultaneously drawn by the drawing head unit. In a color filter manufacturing apparatus, means for detecting a distance between a substrate and a head are provided in at least three places. And drawing while controlling the position and inclination of the substrate so as to minimize the difference between the detection result and the target value.

Here, it is preferable that the distance detecting means between the substrate and the head measures at least three points in front of a drawing position by the drawing head. Therefore, when drawing is performed by reciprocating the substrate back and forth with respect to the drawing head, the distance detecting means between the substrate and the head is provided at least three points in front of the drawing head and at least three points behind the drawing head.
The position of the substrate is controlled so that the difference from the target value of the three forward measurement points is minimized when the substrate advances, and the difference from the target value of the three rear measurement results is reduced when the substrate retreats. It is preferable to draw while controlling the position of the substrate so as to minimize it.

According to another embodiment of the present invention, there is provided a manufacturing method for manufacturing a color filter for liquid crystal by an ink jet system, comprising: a moving device for mounting a glass substrate and moving in a plane parallel to a drawing head; A device for detecting a relative displacement between the substrate and the drawing head; a means for detecting a landing position of ink ejected from the drawing head; and a detection device for the glass substrate and the drawing head based on the detection result of the landing position and the relative displacement detection result. When a plurality of colors are simultaneously drawn by the drawing head unit using a device for performing positioning,
The distance between the substrate and the head is detected in at least three places, and drawing is performed while controlling the position and inclination of the substrate so as to minimize the difference between the detection result and a target value.

[0014]

In order to manufacture a color filter for a liquid crystal by an ink jet method, a color filter of three colors of R, G, and B is formed on a glass substrate on which a black matrix is drawn. The three units are simultaneously drawn by the selected unit. At this time, if there is an error in mounting the R, G, and B heads, the gap between the set gap between the head and the substrate at the time of head alignment and the gap or posture between the substrate and the head at the time of actual drawing is determined. A difference occurs, and a change occurs in the landing position at the time of drawing.

For example, as shown in FIG. 8A, head position adjustment is performed in a state where the head G has an inclination of α and B has an inclination of β, and when the values of the focus sensors 31 to 33 are d1 to d3, the heads R, G, It is assumed that the position of the head is adjusted so that the distance between B becomes a predetermined value L. In this state, if the glass surface when actually drawing has an inclination as shown in FIG. 8B (the value of the focus sensor 32 is d2 'and the value of 33 is d3'),
The distance between R and G is δ ≒ (d2′−d2) × α, and the distance between G and B is Δ ≒ (d3′−d3) × β− (d2′−d2).
A position error of × α occurs. Also, even if the entire glass surface shifts by h as shown in FIG.
A position error of α, an error between G and B Δ ≒ (β−α) × h occurs.

Therefore, in the present invention, the distance between the head and the substrate is measured at at least three points at both ends of the head, and the gap between the nozzle of the head and the substrate is set in the same manner as when the heads of three colors are aligned. The position of the substrate is aligned so as to be in the state shown in FIG. As a result, even if there is a mounting error in the head perpendicular to the substrate, the error in the landing position can be reduced by controlling the position of the substrate to match the average of the inclination of the head and the inclination of the substrate. Can be. The surface accuracy of the substrate holding material can be reduced, resulting in cost reduction.

In particular, the distance between the head and the substrate is measured at least at three points near the head, and drawing is performed while controlling the position of the substrate so as to minimize the inclination error. Further, since the measurement is performed in the vicinity of the head, highly accurate drawing can be performed. When the substrate is advanced, the gap between the substrate and the head is measured at three points in front of the drawing of the head, and the position of the substrate is controlled so that errors in the gap between the surface formed by the three points and the head and the inclination are minimized. When the substrate is moved backward, the gap between the substrate and the head is measured at three points behind the drawing of the head, and the position of the substrate is controlled so that errors in the gap between the surface formed by the three points and the head and the inclination are minimized. , The drawing accuracy can be further improved. Productivity can be further increased.

As an example in which at least three gap sensors are used to measure the distance between the substrate and the head, Japanese Patent Application Laid-Open No. 8-292317 discloses a method for detecting the landing position of ink ejected from a head. Japanese Patent Application Laid-Open No. 9-49920 discloses a device for adjusting the relative position (in the direction of six degrees of freedom) between the substrate and the head by using at least three gap sensors to control the height and inclination of the head jig. A method of adjusting the jig to be combined has been proposed.

However, at the time of alignment,
Alternatively, a gap sensor is used to detect the relative position between the substrate and the head at the time of jig adjustment. There is no suggestion to perform high-precision drawing by adjusting the gap and inclination between heads in real time (during drawing).

[0020]

First Embodiment An embodiment of the present invention will be described below with reference to the drawings. FIG. 1 shows an overall configuration of an apparatus according to a first embodiment of the present invention. In the figure, 1 is a glass substrate, 2 is a drawing head unit, 21 is a head adjustment mechanism, and 3 (31 to 31).
33) is a distance (Z-tilt) measuring device between head substrates,
Reference numeral 4 denotes a head-substrate alignment (XYθ) detecting device, 5 denotes a head unit cleaning device, 6 denotes an XY plane moving stage, 7 denotes a θ-Z tilt stage, and 9 denotes a substrate transfer robot.

FIG. 2 is a detailed view of the stages 6 and 7. In the figure, reference numeral 8 (81 to 83) denotes a Z-tilt driving actuator. 3 shows the arrangement of the distance measuring devices 31 to 33 between the head unit 2 and the substrate 4, FIG. 4 shows the substrate drawing sequence, and FIG. 5 shows the configuration of the drawing machine control device. In FIG. 5, reference numeral 100 denotes an XY position detector;
Are image processing devices for Z-tilt and XYθ measurement, 10
2 is an inkjet driver, 103 is a control device, 10
4 is a memory.

Next, the operation of the apparatus shown in FIG. 1 will be described. In the above configuration, the glass substrate 1 is moved by the robot 9 in θ-Z
It is mounted on the tilt stage 7. During this time, the head unit 2 is cleaned by the cleaning device 5.

When the mounting of the substrate 1 is completed, the XY stage 6 moves to a distance measuring position between the head and the substrate while detecting and controlling the position of the substrate 1 with the XY position detector 100, and the Z-tilt measuring device 3 ( The distance between the head and the substrate is measured by 31-33), and the substrate is aligned by the Z-tilt driving actuator 8 so that the measured value becomes a predetermined value (target value). Subsequently, the substrate is moved to a relative displacement (XYθ) detection position in the plane, the alignment mark existing on the substrate 1 is measured by the alignment detecting device 4, and the relative displacement between the substrate 1 and the head unit 2 is calculated by the image processing 101. XY stage 6 and θ-
Positioning is performed by the Z tilt stage 7. Thereafter, the cleaning device 5 is retracted to the standby position, the substrate 1 is moved to the drawing start position by the XY stage 6, and the XY stage 6
While the substrate 1 is being moved, a command is given to the inkjet driver 102 at a predetermined position based on the result of the XY position detector 100, and the R, G, and B patterns are drawn by the head unit 2. During the writing, the distance between the head and the substrate is measured by the Z-tilt measuring device 3 (31 to 33), and the control device is controlled so that the difference between the measured value and the target value stored in the memory 104 is reduced. The 103 drives the θ-Z tilt stage 7 (real-time Z tilt). When the drawing is completed, the substrate 1 is moved to the substrate discharge position by the XY stage 6, and the cleaning device 5 is moved below the head unit 2 to start cleaning the head unit 2. At the substrate discharge position, the glass substrate 1 on the θ-Z tilt stage 7 is discharged by the robot 9.

According to the present embodiment, head cleaning and substrate delivery (→ substrate loading → focusing → alignment alignment, and drawing end → substrate discharging →) are performed in parallel operations, so that tact (substrate removal) is performed. The characteristics of the head can be maintained without prolonging the time from the input to the carry-out. Alignment and drawing are performed so that the gap between the head and the substrate is in the same state as when adjusting the head, so the influence of the flatness of the substrate can be reduced, and the landing position accuracy can be kept high. Is controlled while making the same as the head alignment value, so that even if the flatness of the substrate changes locally, the landing position can be maintained with high accuracy.

[0025]

FIG. 6 shows the arrangement of distance measuring devices 31 to 33 between a head unit 2 and a substrate 4 according to a second embodiment of the present invention. In the present embodiment, the Z-tilt measuring devices 31 to 31
33 is arranged in front of the drawing of the drawing head 4.

Also in this configuration, the substrate 1 is mounted on the stage XY.
The stage 6 is moved to a position for measuring the distance between the head and the substrate, and the distance between the head and the substrate is measured by the Z-tilt measuring device 3 (31 to 33). The substrate is aligned. The relative displacement in the plane moves to the detection position, the alignment mark existing on the substrate 1 is measured by the alignment output device 4, the relative displacement between the substrate 1 and the head unit 2 is calculated, and the XY stage 6 and θ-Z Tilt stage 7
Alignment is performed by Thereafter, the XY stage 6 moves to the drawing start position, and the head unit 2 draws the R, G, and B patterns while moving the substrate 1 on the XY stage 6. At this time, the Z-tilt measuring device 3 (3
The distance between the head and the substrate is always measured according to 1-33),
Drawing is performed while controlling to always have a predetermined value by the Z-tilt driving actuator 8 (8a to 8c).

According to this embodiment, in addition to the features of the first embodiment, the measurement position in the gap direction between the substrate and the head and the measurement position of the displacement in the plane can be arranged close to each other. There are features such as shortening.

[0028]

Third Embodiment FIG. 7 shows an arrangement of distance measuring devices 31 to 33 between a head unit 2 and a substrate 4 according to a third embodiment of the present invention. In the present embodiment, the Z-tilt measuring devices 31 to 31
33 is arranged in front of the drawing of the drawing head 4, and 34 to 36 are arranged behind the drawing of the drawing head 4.

In this configuration, the substrate 1 is moved to the Z-tilt distance measuring position by the stage XY stage 6, and the distance between the head and the substrate is measured by the distance measuring device 3 (31 to 33), and the distance becomes a predetermined value. The substrate is aligned by the Z-root drive actuator 8 (81 to 83). The alignment mark is moved to the detection position by the relative displacement in the plane, and the alignment mark existing on the substrate 1 is detected by the alignment detecting device 4.
, The relative displacement between the substrate 1 and the head unit 2 is calculated, and the XY stage 6 and the θ-Z tilt stage 7 perform positioning. After this, XY stage 6
To the drawing start position, and the XY stage 6 moves the substrate 1
The R, G, and B patterns are drawn by the head unit 2 while moving. At this time, the Z-tilt measuring device 3
The distance between the head and the substrate is always measured by (31-33), and the Z-tilt driving actuator 8 (81-83) is used.
Is drawn while controlling to always have a predetermined value.
Further, when the substrate is moved backward, the Z-tilt measuring device 3 is used.
The gap is measured by (34-36) and the actuator 8
(81-83), drawing is performed while always controlling to a predetermined value.

According to the present embodiment, in addition to the features of the first and second embodiments, since the measurement and control are performed by separate sensors when the substrate is advanced and retracted, the tact is further reduced.

[0031]

As described above, according to the present invention, the gap between the substrate and the head is measured and drawn according to a predetermined value. Also, by controlling the position of the substrate so as to match the average of the inclination of the head and the inclination of the substrate, an error in the landing position can be reduced. High-precision drawing is possible regardless of the flatness of the substrate. The surface precision of the substrate holding member can be reduced, and the cost can be reduced. There is such a feature that high-precision drawing becomes possible without lengthening the tact.

[Brief description of the drawings]

FIG. 1 is an overall view of a color filter manufacturing apparatus according to a first embodiment of the present invention.

FIG. 2 is an overall view of a stage of the apparatus of FIG.

FIG. 3 is a layout view of a substrate-head distance measuring device of the device of FIG. 1;

FIG. 4 is a diagram of a substrate drawing sequence of the apparatus of FIG. 1;

FIG. 5 is a block diagram of a control system of the apparatus of FIG.

FIG. 6 is a layout view of a substrate-head distance measuring apparatus according to a second embodiment of the present invention.

FIG. 7 is a layout view of a substrate-head distance measuring apparatus according to a third embodiment of the present invention.

FIG. 8 is an explanatory diagram of an error generation mechanism due to a tilt between a substrate and a head.

[Description of Signs] 1: Glass substrate, 2: Drawing head unit, 22: Head adjustment mechanism, 3 (31 to 36): Distance measuring device between head substrates, 4: Detecting alignment between head and substrate apparatus,
5: head unit cleaning device, 6: XY plane moving stage, 7: θ-Z tilt stage, 8 (81 to 83):
Z-tilt drive actuator, 9: substrate transport robot, 100: XY position detector, 101: image processing, 1
02: inkjet driver, 103: control device, 1
04: Memory.

Claims (8)

[Claims] At least one set of drawing heads for independently and independently ejecting R, G, and B color ink jets, and a substrate on which a color filter is formed by drawing with the ink jets is mounted on the drawing head. A moving means for moving in a plane intersecting with the inkjet discharge direction of the liquid crystal, and simultaneously drawing a plurality of colors by the drawing head unit. Distance detecting means provided in at least three places to be detected; and controlling the position and inclination of the substrate so as to minimize a difference between a target value and a detection result of a gap and inclination between the substrate and the drawing head during writing. Means for producing a color filter. 2. A relative displacement detecting means for detecting at least a relative displacement in three directions of freedom other than the gap and the inclination out of a relative displacement between six directions of freedom between the substrate and the drawing head, and discharge from the drawing head. Means for detecting the landing position of the ink, the detection result of the landing position,
Means for aligning the substrate and the writing head based on the result of relative displacement detection in the direction of freedom, wherein the position and tilt control means includes a gap between the substrate and the writing head in a state where the alignment is performed by the alignment means. 2. The color filter manufacturing apparatus according to claim 1, wherein the position and the inclination of the substrate are controlled by setting the inclination and the inclination as the target values. 3. A distance detecting means between the substrate and the head,
The color filter manufacturing apparatus according to claim 1, wherein a distance between the substrate and the head is measured at at least three points ahead of a drawing position of the drawing head in a traveling direction of the drawing head. 4. A distance detecting means between the substrate and the head,
The distance between the substrate and the head is measured at at least three points ahead and at least three points behind the drawing head in the direction of travel of the drawing head from the drawing position of the drawing head. Controlling the position and inclination of the substrate such that the difference from the target value of the substrate is minimized, and controlling the position and inclination of the substrate such that the difference from the target value of the rear measurement result is minimized when the substrate is retracted. The color filter manufacturing apparatus according to claim 1 or 2, wherein: 5. A substrate on which a color filter is formed by drawing by the ink jet is applied to at least one set of drawing heads for independently ejecting ink jets of three colors of R, G, and B, respectively. A method for manufacturing a color filter for liquid crystal, in which a plurality of colors are simultaneously drawn by the drawing head unit by moving in a plane intersecting with the ejection direction, detecting a gap and a tilt between the substrate and the drawing head, and detecting the detection result. A method for producing a color filter, wherein the drawing is performed while controlling the position and inclination of the substrate so as to minimize the difference between the substrate and the target value. 6. A method for detecting a landing position of ink ejected from the drawing head at a predetermined detection position,
Detecting relative displacement between the substrate and the drawing head in the six degrees of freedom direction at that time, and performing positioning of the substrate and the drawing head based on the detection results of the impact positions and the relative displacement detection results in the six degrees of freedom direction. Further comprising
6. The color filter manufacturing apparatus according to claim 5, wherein drawing is performed while controlling the position and the inclination of the substrate, using the gap and the inclination between the substrate and the drawing head in the aligned state as the target values. 7. A color filter manufactured using the apparatus according to claim 1. Description: 8. A color filter manufactured by the method according to claim 5 or 6.