JPH0949920A - Apparatus and method for producing color filter and color filter - Google Patents

Abstract

PROBLEM TO BE SOLVED: To inexpensively produce a color filter having good characteristics such as resolution with good reliability, by easily aligning the hit positions of ink jets of three colors with good accuracy. SOLUTION: This apparatus for producing the color filter includes at least one set of plotting heads 6a to 6c which respectively discharge the ink jets of the three colors, R, B, B, a moving means for mounting and moving a substrate having the color filters formed by the plotting with the ink jet and an aligning means for aligning the substrate mounted at the moving means and the plotting heads 6a to 6c. The plotting heads 6a to 6c of the three colors are previously mounted at a head mounting jig and are relatively aligned. After the plotting heads are mounted together with the head mounting jigs at the device, a dummy substrate is mounted at the moving means and the height and tilt of the head mounting jigs relative to this dummy substrate are so adjusted that the spacings between the dummy substrate and the respective plotting heads attain prescribed values.

Description

Detailed Description of the Invention

[0001]

BACKGROUND OF THE INVENTION 1. Field of the Invention The present invention relates to a technique for manufacturing a color filter of a color liquid crystal display used in a color television, a personal computer and the like, and more particularly to a technique utilizing an ink jet recording technique.

[0002]

2. Description of the Related Art Conventionally, as a method of manufacturing a color filter, there are a dyeing method, a pigment dispersion method, an electrodeposition method, a printing method and the like.

The dyeing method is to form a layer of a water-soluble polymer material, which is a material for dyeing, on a glass substrate, form this into a desired pattern by photolithography, and place this glass substrate in a dyeing tank. A color filter is formed by repeating the step of dipping to obtain a colored pattern three times for each of R, G, and B colors.

The pigment dispersion method is a process in which a photosensitive resin layer in which a pigment is dispersed is formed on a glass substrate, and a pattern of the photosensitive resin layer is patterned to obtain a monochrome pattern by repeating three times for R, G, and B colors. A color filter is formed.

The electrodeposition method is a process in which a transparent electrode pattern is formed on a glass substrate, and the glass substrate is immersed in an electrodeposition coating solution containing a pigment, a resin, an electrolytic solution and the like to electrodeposit a single color. , G, B are repeated three times for each of the three colors and fired to form a color filter.

The printing method is a method in which printing is performed three times using a thermosetting resin in which a pigment is dispersed to paint R, G, and B colors separately, and then the resin is thermoset. is there.

Common to these four methods is R,
It is necessary to repeat the same process three times for coloring G and B three colors, and the number of processes is large, so that the yield is reduced and the cost is increased.

Furthermore, the electrodeposition method is difficult to apply to TFTs because the shape of the pattern that can be formed is limited.
Further, the printing method has drawbacks such as poor resolution and difficulty in addressing pattern miniaturization.

Therefore, in order to compensate for these drawbacks, a technique has been proposed in which an ink jet is ejected onto a glass substrate to form a filter pattern (Japanese Patent Laid-Open No. 59-75).
205, JP-A-63-235901, JP-A-1-217.
320 etc.).

However, in the technique using this ink jet, the function for carrying out production is insufficient. That is, the landing position of the ink is measured in advance, and when the glass substrate is mounted on the manufacturing apparatus, the glass substrate is aligned with the drawing head (or the drawing head with respect to the glass substrate) in the direction of 6 degrees of freedom. Since there is no function such as performing the drawing and then drawing while keeping the gap between the drawing head and the glass substrate constant,
High-precision drawing cannot be performed. Also, productivity is not taken into consideration.

Therefore, the inventors of the present invention first conducted R, G, B3
At least one each producing a color inkjet
A set of drawing heads, a moving unit that mounts and moves a substrate on which a color filter is formed by ink jet drawing, a displacement detecting unit that detects a relative displacement between the substrate and the drawing head, and an inkjet that is ejected from the drawing head. And means for detecting the landing position on the substrate of
A color filter manufacturing apparatus and method for performing alignment between the substrate and the drawing head based on the detection result of the landing position and the relative displacement detection result have been devised.
Filed as No. 940 (hereinafter referred to as the prior application).

[0012]

However, the device and method of this prior application are still insufficient in terms of device performance and the like for stable production of color filters. For example, there is a problem that it may be difficult to properly align the landing positions of the three-color ink jets.

An object of the present invention is to solve the above problems and to provide an inexpensive and highly reliable color filter manufacturing apparatus which satisfies the characteristics of the conventional method such as the resolution and utilizes the characteristics of the ink jet system. And a method and a color filter. More specifically, 3
It is possible to more easily and better align the landing positions of the color ink jets.

[0014]

In order to achieve the above object, the color filter manufacturing apparatus of the present invention is provided with R, G, B
At least one that ejects each of the three color inkjets
A set of drawing heads, a head mounting jig to which these three-color drawing heads are mounted and fixed by aligning their inkjet ejection surfaces and ejection ports relative to each other; means for mounting the head mounting jig; A moving unit that mounts and moves a substrate on which a color filter is formed by drawing with an inkjet device, and at least three different distances between the substrate mounted on the moving unit and the three-color drawing head with respect to the position of the drawing head. , A means for adjusting the height and inclination of the head mounting jig with respect to the reference drawing surface by the inkjet, and a positioning means for aligning the drawing head with the substrate mounted on the moving means. It is characterized by having and.

In a preferred embodiment of the present invention, the alignment means detects a displacement detection means for detecting a relative displacement between the substrate and the drawing head, and a landing position of an ink jet ejected from the drawing head on the substrate. Means for adjusting the position of the substrate and the drawing head based on the detection result of the landing position and the detection result of the relative displacement. Further, relative displacement detection and alignment of the substrate and the drawing head are in the direction of 6 degrees of freedom.

Further, in the method for manufacturing a color filter of the present invention, at least one set of drawing heads for ejecting R, G, and B color ink jets, respectively, and the drawing heads for these three colors are attached, and the ink jet ejection surfaces thereof are attached. And a head mounting jig in which the ejection ports are fixed relative to each other, moving means for mounting and moving a substrate on which a color filter is formed by drawing with the inkjet, and alignment between the substrate and the drawing head. When a color filter is formed by performing drawing on the substrate by the drawing head while moving the substrate using a color filter manufacturing apparatus including a positioning means for performing the above, prior to drawing on the substrate, A dummy substrate with uniform thickness is mounted on the moving means, and the gap sensor is used to While measuring at least three different places and over a substrate a gap of the three colors of the drawing head, characterized in that to match the clearance by adjusting the height and inclination of the head mounting jig to a predetermined value.

[0017]

As a method for producing an ink jet, for example, US Pat. Nos. 4,723,129 and 4,740,796.
There is known a so-called bubble jet method, as disclosed in Japanese Patent No. 3,968,698, in which nucleate boiling of ink is performed to form bubbles and the ink is ejected. In the currently realized type of drawing head, the ink jet direction is about 10 with respect to the normal line of the ink jet ejection surface of the drawing head.
Being inclined. Therefore, if the gap between the substrate and the drawing head changes, the ink landing (adhesion) position changes.

According to the present invention, the three-color drawing head is attached to the head mounting jig in advance, and the ink jet ejection surface and the ejection port of the three-color drawing head are aligned on the head alignment device. The three-color drawing heads thus aligned are mounted on the color filter manufacturing apparatus together with the head mounting jig. Then, a dummy substrate having no thickness unevenness is mounted on the moving means, and the gap between the dummy substrate and the drawing heads of the three colors is measured by a gap sensor at at least three places around the drawing head, and these gaps are kept constant. Adjust the height and inclination of the head mounting jig so that the values become the values.

Therefore, according to the present invention, the positional relationship of the ejection ports of the three color drawing heads is adjusted in advance,
After mounting on the color filter manufacturing device, the height and tilt of these three-color drawing heads and the head mounting jig were adjusted as a whole to adjust the height and tilt. The landing position on the drawing surface can be easily aligned with high accuracy, and at the time of drawing, the substrate is mounted on the moving unit and then the substrate and the drawing head are aligned with high accuracy by the alignment unit. If so, high-precision drawing can be performed.

[0020]

Embodiment 1 FIGS. 1 to 4 show a color filter manufacturing apparatus according to a first embodiment of the present invention. FIG. 1 is an external view (perspective view) of the apparatus, FIG. 2 is a detailed view around the stage, FIG. 3 is a layout view of a drawing head and an optical system, and FIG. 4 is a view showing an image of ink ejection.

In these figures, 1 is a platen for mounting the apparatus, 2 is a vibration isolation table for supporting the platen 1 and for isolating external vibrations, 3 is provided on the platen 1, and a large stroke is moved. The XY stage, 4 is θ mounted on the XY stage 3, Z-tilt stage for Z-tilt alignment alignment, 5 is the glass substrate mounted on θ, Z-tilt stage 4, and 6a to 6c are respectively. A drawing head for ejecting a plurality of ink jets in a line, a drawing head unit 6 in which the R, G, B drawing heads 6a to 6c are aligned with each other and fixed, and 7 is an alignment of the substrate 5 in the X, Y, and θ directions. A detection optical system, 8 (8a to 8c) is a Z detection optical system as a gap sensor, and 9 is an optical system for detecting the landing position of ink ejected by the drawing heads 6a to 6c.

FIG. 5 is a top view of the drawing head unit 6. The R, G, and B drawing heads 6a to 6c are fixed to the arms 51a to 51c, and the arms 51a to 51c are fixed to the adjusting plates 52a to 52c, respectively.
52c are fixed to each other via fixing blocks 53a and 53c. Reference numeral 54a is a micrometer for aligning the drawing head 6a in a direction (Y direction) orthogonal to the drawing direction (X direction) with reference to the drawing head 6b, and 55a is a drawing head 6a with reference to the drawing head 6b. A micrometer for performing alignment in the rotation direction (ω _Z ) in a plane parallel to the drawing surface (XY plane),
56a is a lock screw for fixing the relative position of the drawing head 6a in the Y direction with respect to the drawing head 6b after the alignment in the Y direction, and 57a is a drawing for the drawing head 6b after the alignment in the ω _Z direction. A lock screw for fixing the relative position of the head 6a in the ω _Z direction. Although not shown in FIG. 5, the drawing head 6c
Also, the same micrometer, lock screw, and the like as those for the drawing head 6a are prepared. Arm 5 above
The 1a to 51c, the adjusting plates 52a to 52c, the fixed blocks 53a and 53c, and the like constitute a head mounting jig that is a feature of the present invention.

In the above structure, the drawing head unit 6 is provided on the device for mounting the heads, and the drawing heads 6a to 6c are provided.
5 is aligned, that is, the ink jet ejection surfaces of the drawing heads 6a to 6c are aligned on the same plane, and assembled in the state of FIG. Next, regarding the drawing head 6a,
After performing the position adjustment in the Y direction with the drawing head 6b as a reference by the above-described micrometer 54a, the lock screw 5
6a is tightened, and the position of the drawing head 6b is adjusted with the micrometer 55a in the ω _Z direction, and then the lock screw 57a is tightened. Further, the drawing head 6c is similarly aligned in the Y and ω _Z directions and fixed by a lock screw. As a result, the drawing head 6
The inkjet heads a to 6c (Z direction) and the ejection ports (Y and ω _Z directions) are aligned, and the drawing head 6 is aligned.
The drawing head unit 6 in which a to 6c and the head mounting jig are integrated is completed.

This drawing head unit 6 is shown in FIGS.
It is mounted on the color filter manufacturing apparatus shown in. That is, the head mounting jig is fixed to the head mounting means (not shown) mounted on the head stage 10. The head mounting means includes means (not shown) for adjusting the height (Z) and the tilt (ω _X , ω _Y ) of the head mounting jig. Further, the gap sensors 8a to 8c are fixed to a head mounting jig. The head stage 10 is rigidly mounted on the surface plate 1 by four pillars 11.

In the color filter manufacturing apparatus shown in FIGS. 1 to 4, a dummy glass substrate (not shown) whose unevenness in thickness is suppressed as much as possible at the time of assembling and adjusting the apparatus is used for the θ, Z-tilt stage 4 on the XY stage 3. Mounted on the dummy glass substrate and the drawing head 6 by the gap sensors 8a to 8c.
The gaps a to 6c are measured, and the height (Z) of the head mounting jig with respect to the dummy glass substrate and the tilt (ω _X , ω) so that these gaps have predetermined values (for example, 0.1 mm).
Adjust _Y ). Thereby, the three-color drawing heads 6a to
6c can be accurately aligned with the dummy glass substrate (reference drawing surface).

Subsequently, the alignment detection system 7 performs alignment in the X, Y and θ directions of the substrate, and the drawing head 6
A pattern for evaluation is drawn with a to 6c. Furthermore, XY
The stage 3 is moved, and the landing position detection system 9 measures the landing position. As a result, the coordinates of the alignment detection system 7 and the coordinates of the landing positions of the drawing heads 6a to 6c can be accurately measured. This coordinate value does not change even if another board is mounted, so it may be set when the system parameters change, such as when the apparatus is assembled or when the drawing head is replaced. The landing position may be measured by another device and the measured value may be reproduced by the color filter manufacturing device.

When the drawing glass substrate 5 is mounted on the θ, Z-tilt stage 4 when the color filter is manufactured,
The alignment detection system 7 detects the amount of deviation between the glass substrate 5 and the drawing heads 6a to 6c in the X, Y, and θ3 directions.
Based on this detection result, the deviation of the θ component is corrected by the θ, Z-tilt stage 4, and the deviation in the X direction is corrected by aligning the X position of the XY stage 3. The deviation in the Y direction (print scanning direction) is performed by adjusting the Y position of the XY stage 3 or controlling the ejection timing from the drawing heads 6a to 6c. Further, as shown in FIG. 4, when the gap between the glass substrate 5 and the drawing heads 6a to 6c changes, the landing position also changes. Therefore, the gaps and inclinations between them are obtained by the gap sensors 8a to 8c, and drawing is performed by the drawing heads 6a to 6c while controlling the θ, Z-tilt stage 4 so that the gap becomes constant. Depending on the accuracy, measurement and correction may be performed when the glass substrate is mounted, and fixed during drawing.

It is preferable that the height (Z) and tilt (ω _X , ω _Y ) of the head mounting jig be adjusted at a plurality of positions by moving the XY stage 3. When performing at a plurality of locations, for example, first, height (Z) and tilt (ω
_X , ω _Y ) is fixed, the XY stage 3 is moved to measure the gap at each position, and the tilt of the θ, Z-tilt stage 4 is controlled so that the outputs of the gap sensors 8a to 8c are equalized. Adjust the height and tilt of the head mounting jig and perform the gap measurement again. If the difference between the gap measurement values at each location does not fall within the predetermined allowable value, θ, Z
-Tilt Control of Tilt Stage 4 The following processing may be repeated.

[0029]

As described above, according to the present invention, 3
The color drawing heads are attached to the head mounting jigs in advance, and the relative positions of the three color drawing heads are adjusted, and the unit composed of these drawing heads and head mounting jigs is mounted on the color filter manufacturing device as a unit. Since the alignment is performed with respect to the reference drawing surface, the landing positions of the three color ink jets can be aligned easily and with high accuracy, and a color filter having excellent characteristics such as resolution can be inexpensively and reliably provided. It can be manufactured.

[Brief description of drawings]

FIG. 1 is an external view (perspective view) of a device according to a first embodiment of the present invention.

FIG. 2 is a detailed view of the stage of the apparatus shown in FIG.

FIG. 3 is a layout diagram of a head and an optical system of the apparatus of FIG.

FIG. 4 is an image of ink ejection of the apparatus of FIG.

5 is a front view of the drawing head unit of the apparatus of FIG. 1. FIG.

[Explanation of symbols]

1: Surface plate, 2: Vibration isolation table, 3: XY stage, 4: θ, Z
-Tilt stage, 5: glass substrate, 6: drawing head unit, 6a to 6c: R, G, B drawing head, 7: alignment detection (X, Y, θ detection) system, 8a to 8c: Z detection system, 9 : Landing position measurement system, 10: head stage, 1
1: pillar, 51a to 51c: arm, 52a to 52c: adjusting plate, 53a, 53c: fixed block, 54a, 55
a: micrometer, 56a, 57a: lock screw.

Claims (6)

[Claims] 1. At least one set of drawing heads for respectively ejecting R, G, B three-color ink jets, and said three-color drawing heads are attached and fixed by aligning their ink jet ejection surfaces and ejection ports. A head mounting jig, means for mounting the head mounting jig, moving means for mounting and moving a substrate on which a color filter is formed by drawing with the inkjet, substrate mounted on the moving means, and Gap sensors that detect the distances to the drawing heads of three colors at at least three different positions with respect to the positions of the drawing heads, and means for adjusting the height and inclination of the head mounting jig with respect to the reference drawing surface by the inkjet. A positioning means for positioning the substrate and the drawing head mounted on the moving means, Color filter manufacturing equipment. 2. The alignment means includes displacement detection means for detecting relative displacement between the substrate and the drawing head, and means for detecting a landing position of an ink jet ejected from the drawing head on the substrate. The color filter manufacturing apparatus according to claim 1, wherein the alignment between the substrate and the drawing head is performed based on the detection result of the landing position and the detection result of the relative displacement. 3. The color filter manufacturing apparatus according to claim 2, wherein relative displacement detection and alignment of the substrate and the drawing head are in a 6-DOF direction. 4. At least one set of drawing heads for respectively ejecting R, G, B color ink jets, and these three heads.
A head mounting jig to which color drawing heads are attached and whose ink jet ejection surfaces and ejection ports are aligned relative to each other and fixed, and a substrate on which a color filter is formed by the ink jet drawing are mounted and moved. By using a color filter manufacturing apparatus including a moving unit and an alignment unit that aligns the substrate and the drawing head, a color filter is created by moving the substrate and drawing on the substrate by the drawing head. Before forming on the substrate, a dummy substrate having no thickness unevenness is mounted on the moving means, and the distance between the dummy substrate and the drawing heads of the three colors is different at least at three positions. While measuring with
A method of manufacturing a color filter, wherein the height and the inclination of the head mounting jig with respect to a reference drawing surface by the inkjet are adjusted to adjust the gap to a predetermined value. 5. A color filter manufactured using the apparatus according to any one of claims 1 to 3. 6. A color filter manufactured by the method according to claim 4.