JPH11135252A - Heating device with microwave and joining method of joining object using thereof - Google Patents

Abstract

PROBLEM TO BE SOLVED: To provide a heating device using microwaves capable of raising the temp. of a material which is transparent in terms of microwaves and establish a joining method for object using the device. SOLUTION: A susceptor 10 is installed in the specified position in an applicator 2, and in the penetrating part of the susceptor 10, two ceramic materials 13 and an intermediate frit material 14 are arranged in such a way that the latter 14 is interposed between the former 13. The distance between a reflector plate 12 equipped with adjusting rod and a magnetron oscillator part is adjusted so that the microwaves given by the magnetron oscillator part are put in resonance in the position where the susceptor 10 is installed. In this condition, the susceptor 10 absorbs the microwaves from the magnetron oscillator part and emits the radiation heat on the basis of the energy of the absorbed microwaves so that the intermediate frit material 14 is turned in high temp. and fused, and the two ceramic members 13 are joined together with this frit member 14 allowed to serve as adhesives.

Description

DETAILED DESCRIPTION OF THE INVENTION

[0001]

BACKGROUND OF THE INVENTION 1. Field of the Invention The present invention relates to a heating apparatus using microwaves and a method for joining objects to be joined by the heating apparatus.

[0002]

2. Description of the Related Art Conventionally, molten glass is melted in an electric furnace,
A method of joining the molten glass and the metal or a method of heating the molten glass and the metal with a burner and joining the molten glass and the metal are generally used.

As a special joining method, in joining ceramic materials, an intermediate ceramic seal is sandwiched between two ceramic materials, and the intermediate ceramic seal is directly heated by microwaves, so that the intermediate ceramic seal is bonded. There is a method of joining two ceramic materials by using them as an adhesive material.
4).

[0004] In some cases, metal and ceramic materials are bonded in an Ar gas atmosphere in order to prevent oxidation of the metal. In that case, the molten glass as an intermediate material is sandwiched between the metal and the ceramic material, and the metal is heated by an Ar arc, high frequency heating, or the like to melt the molten glass, and the melted molten glass is used as an adhesive material. Often, metal and ceramic materials are joined.

Similarly, when an encapsulating material such as a metal is put in a glass tube having one end sealed in advance, and the glass tube is sealed at a predetermined position, the glass is sealed to prevent oxidation of the encapsulating material. In some cases, an operation of putting a sealing material in a tube and sealing the glass tube is performed in an Ar gas atmosphere.

[0006]

However, when the ceramic materials are joined together as described above, the two ceramic materials are joined with an intermediate ceramic seal interposed therebetween. Because it is transparent to microwaves, the temperature of the intermediate ceramic seal does not rise sufficiently even if the intermediate ceramic seal is heated using microwaves unless a high-resistance coupling material is inserted in the intermediate ceramic seal. Inability to join two ceramic materials.

Further, when the metal does not intervene in the joint, such as when the two objects to be joined are not metals, as in the case of joining the ceramic materials described above, the joint is micro-sized. Heating by wave-induced dielectric heating cannot join two objects to be joined.

Further, when an encapsulating material such as metal is put into a glass tube having one end sealed in advance, and the operation of sealing the glass tube is performed at a predetermined location in an Ar gas atmosphere, the glass tube is made of borosilicate glass. If it is a glass tube with a low melting point such as lead or lead glass, it is possible to melt the glass tube with a low melting point in an electric furnace and seal it, but the glass tube has a high melting point like quartz glass For glass tubes, about 2
Unless it is heated to 000 ° C. or higher, a glass tube having a high melting point does not melt. Therefore, a special electric furnace that can heat the glass tube to about 2000 ° C. or higher is required. Therefore, in order to put the sealing material in a glass tube having a high melting point and seal the glass tube by using an electric furnace, a special electric furnace is provided, and the special electric furnace is set to A.
Equipment that can be installed in an r gas atmosphere is required, and such equipment becomes large-scale.

Further, when a high melting point ceramic material is melted, the ceramic material is melted by about 2 mm, similarly to the case where a high melting point glass tube such as the above-mentioned quartz glass tube is melted.
A special electric furnace that can be heated to 000 ° C. or higher is required.

When a tungsten heater or a carbon heater is used as a heat source as an alternative to the above-described special electric furnace, even if the heat source can heat and locally melt a local part such as a glass tube, Since the heat source generates a large amount of heat, it is necessary to cool the heat source. However, the heat generated by the heat source is so large that cooling thereof is very difficult. In addition, since the energy loss generated during the cooling becomes large, the energy efficiency becomes extremely poor when a tungsten heater or a carbon heater is used as a heat source.

When an object to be joined and / or an intermediate material or the like is heated using an Ar arc or a burner, the temperature around the heated portion increases significantly.
Therefore, an encapsulating material such as metal is put in a glass tube whose one end is sealed in advance, and the operation of sealing the glass tube is performed by using a glove box or the like filled with Ar gas in order to prevent oxidation of the encapsulating material. When the glass tube is heated by an Ar arc or the like when heated in a closed container, the temperature in the closed container rises significantly, so it is necessary to control the temperature or pressure in the closed container.

The present invention has been made in consideration of the problem that a material transparent to microwaves cannot be heated to a high temperature by such a conventional heating apparatus using microwaves and a bonding method of a bonding object by the apparatus. An object of the present invention is to provide a heating device using a microwave capable of raising a material transparent to waves to a high temperature, and a bonding method of a bonding target by the device.

The present invention also provides a heating apparatus using a microwave capable of raising the temperature of a material transparent to the microwave in a rare gas atmosphere such as an Ar gas or substantially in a vacuum, and an object to be joined by the apparatus. It is an object of the present invention to provide a joining method.

[0014]

A heating device according to the present invention is provided with a microwave generating means for generating a microwave, and a microwave generating means for substantially covering a predetermined place. And a heat generating means for generating heat based on the absorbed microwaves.

[0015] The bonding method of the present invention uses the heating device using the microwave, and arranges a bonding target at a position at a predetermined distance from the heat generating means of the device or at a position covered by the heat generating means. A method for joining objects to be joined by a heating device using microwaves, wherein the objects to be joined are joined by utilizing heat from the heat generating means.

[0016]

Embodiments of the present invention will be described below with reference to the drawings.

(Embodiment 1) First, the configuration of a heating device using a microwave according to Embodiment 1 of the present invention will be described.

FIG. 1 shows a side view of a heating device using a microwave according to the first embodiment of the present invention. FIG. 2 shows a side view of a glove box 1 of a heating device using microwaves to supplement FIG.

Reference numeral 1 denotes a substantially sealed tank, which is a glove box that substantially blocks the entry of outside air. In the first embodiment, the glove box 1 is filled with a predetermined amount of Ar gas. Ar filled in the glove box 1
The gas is circulated in the purifier to remove moisture as much as possible and keep the dew point low. Reference numeral 2 denotes a portion mostly disposed inside the glove box 1 for the purpose of introducing microwaves from a magnetron oscillating section 3 described later into the glove box 1 via a waveguide 8 described later, and resonating the microwaves. , And an applicator for standing the standing wave of the microwave. Reference numeral 3 denotes a magnetron oscillation unit that generates a microwave. Reference numeral 4 denotes a power supply unit that supplies power to the magnetron oscillation unit 3. Reference numeral 5 denotes an isolator that prevents the microwave from the magnetron oscillating unit 3 from being reflected by the reflecting plate 12 with an adjusting rod, which will be described later, and from returning to the magnetron oscillating unit 3. Reference numeral 6 denotes a stub matching unit that performs tuning for efficiently supplying the microwave generated by the magnetron oscillation unit 3 to the applicator 2 as energy. Reference numeral 7 denotes a detector that detects the input energy to the applicator 2 and the reflected energy to the magnetron oscillating unit 3 side. The magnetron oscillator 3, power supply 4,
Isolator 5, stub matching device 6, and detection device 7
Is installed outside the glove box 1. Reference numeral 8 denotes a waveguide for guiding the microwave from the magnetron oscillation unit 3 to the applicator 2. 9 is the applicator 2 of the waveguide 8
It is a microwave transmission window of a high-purity alumina plate that is provided in the opening on the side and transmits microwaves from the magnetron oscillation unit 3. The waveguide 8 is connected to the applicator 2 through the microwave transmission window 9, and the microwave transmission window 9 at the connection portion is formed by using a packing material of a Teflon gasket. The microwave passage from the magnetron oscillating unit 3 is shut off from the outside air. As shown in FIG. 2, a cylindrical portion 10 is provided at a place where microwaves resonate inside the applicator 2 in the glove box 1 and partially penetrates so as to substantially cover a predetermined place. It is a susceptor (microwave absorbing material) that absorbs microwaves from the magnetron oscillating unit 3 and emits radiant heat (radiant heat) based on the energy of the absorbed microwaves. The susceptor 10 is made of silicon carbide (Si)
C). Numeral 11 is a zirconia heat insulating material that is disposed around the susceptor 10 inside the applicator 2 in the glove box 1 and heats the susceptor 10, as shown in FIG. Further, an alumina block was also provided as the heat insulating material 11 for the purpose of keeping the susceptor 10 warm so as to cover the zirconia heat insulating material 11. 12 is an applicator 2 as shown in FIG.
, That is, a reflection plate with an adjustment rod that is provided at the end of the applicator 2 opposite to the magnetron oscillation unit 3 and adjusts the distance from the magnetron oscillation unit 3. When the reflector 12 with the adjustment rod moves, the reflector 1 with the adjustment rod is moved.
The distance between the magnetron oscillating unit 3 and the magnetron oscillating unit 3 changes, and the microwave becomes a standing wave in the applicator 2, and the energy of the microwave from the magnetron oscillating unit 3 is concentrated on the susceptor 10.

Next, the operation of the heating device using microwaves according to the first embodiment of the present invention will be described.

In the first embodiment, the operation of the heating device using microwaves in joining the ceramic materials 13 in the glove box 1 replaced with a predetermined amount of Ar gas will be described.

When the ceramic materials 13 are joined together,
As shown in FIG. 2, at a portion where the susceptor 10 penetrates,
The two ceramic materials 13 are arranged so as to be in a direction substantially perpendicular to a straight line connecting the susceptor 10 and the magnetron oscillating unit 3 and to cover the joint between the ceramic materials 13 with the susceptor 10. . Further, an intermediate frit material 14 for bonding the two ceramic materials 13 is arranged between the two ceramic materials 13. That is, two ceramic materials 1
The ceramic material 13 and the intermediate frit material 14 are arranged such that the 3 sandwiches the intermediate frit material 14. In addition, as the intermediate frit material 14, 1000 to 1500 ° C.
In about the temperature, using the CaO-Al ₂ O ₃ to melt.

Then, the magnetron oscillating unit 3 generates a microwave having a predetermined energy, and the microwave is
The light passes through the waveguide 8, passes through the microwave transmission window 9, is guided to the applicator 2, and is absorbed by two susceptors 10. In addition, the reflector 12 with the adjusting rod is used for the susceptor 10.
Is adjusted so that the microwave resonating portion is located at the position of the susceptor 10, in other words, the energy of the microwave is maximized at the position of the susceptor 10.

That is, the state of FIG. 5 shows a state before adjustment, and the state of FIG. 6 shows a state in which the reflector 12 adjusts the maximum part of the electric field intensity 100 of the standing wave to the center of the susceptor 10. is there.

Thereafter, the susceptor 10 generates radiant heat (radiant heat) based on the absorbed microwave energy, and the intermediate frit material 14 is generated in a short time of several seconds to several minutes.
Is reached to a predetermined temperature at which the intermediate frit material 14 melts. Then, the intermediate frit material 14 is melted, and the two ceramic materials 13 are joined to each other using the melted intermediate frit material 14 as an adhesive material.

Conventionally, when the microwave is directly absorbed by the intermediate frit material 14 and the intermediate frit material 14 is melted without using the susceptor 10, the intermediate frit material 14 is used to absorb the microwave. It was necessary to include an inorganic coupling agent. In contrast, in the first embodiment, as described above,
Intermediate frit material 14 is a CaO-Al ₂ O _3, does not contain an inorganic coupling agent for absorbing the microwave. However, since the intermediate frit material 14 of the first embodiment absorbs radiation heat (radiation heat) from the susceptor 10, it becomes high temperature and can be melted even without containing an inorganic coupling agent.

Although the microwave transmission window 9 is a high-purity alumina plate in the first embodiment, the microwave transmission window 9 may be a high-purity Teflon plate.

In the first embodiment, zirconia is used as the heat insulating material 11 and a block of alumina is also provided. However, in the present invention, zirconia and alumina of the heat insulating material 11 are used as heat insulating means. In the first embodiment, the installation locations may be replaced with each other, or only the zirconia or alumina may be used as the thermal insulation material 11 as the thermal insulation means.

In the first embodiment, CaO—Al ₂ O ₃ is used as the intermediate frit material 14.
In the present invention, CaO—Al ₂ O ₃ —SiO ₂ or MgO—A
such as l ₂ O ₃ -SiO _2, may be used which does not contain inorganic coupling agent.

Further, in the first embodiment, the intermediate frit material 14 is melted by radiant heat (radiant heat) from the susceptor 10 using the intermediate frit material 14, and the melted intermediate frit material 14 is used. Although the ceramic materials 13 arranged so as to sandwich the intermediate frit material 14 are joined together, in the present invention, the joint portion of the two ceramic materials 13 as the joining material is used without using the intermediate frit material 14. Sintering using radiant heat (radiant heat) from the ceramic material 13
You may join together.

(Embodiment 2) A configuration of a heating device using a microwave according to Embodiment 2 of the present invention will be described together with its operation.

The difference between Embodiment 2 and Embodiment 1 is that
This is mainly because the objects to be joined by using the above-described heating device are different, and therefore, in the second embodiment, only differences from the first embodiment will be described.

In the second embodiment, the quartz glass tube 15 sealed on one side and containing a metal halide having a high vapor pressure is placed at a predetermined position in a state where the metal halide is contained. The operation of the heating device using microwaves in the case where the quartz glass tube 15 is hermetically sealed by joining the melted portions and sealing the fused portion will be described.

FIG. 3 is a side view of a glove box 1 of a heating apparatus using microwaves according to a second embodiment of the present invention.

In the heating device using microwaves according to the second embodiment of the present invention, a through hole 16 penetrating vertically in FIG. 3 is provided in a part of the applicator 2. The susceptor 10 is installed such that the penetrating portion of the susceptor 10 overlaps. Further, in the heating device using microwaves according to the second embodiment of the present invention, an exhaust pipe 17 is provided at a predetermined position above the through hole 16.

In the glove box 1 replaced with Ar gas, the metal halide sealed in the quartz glass tube 15 is prevented from being oxidized, and the metal is placed in the quartz glass tube 15 whose one side is sealed in advance. The quartz glass tube 15 is inserted into the through-hole 16 with the halide put therein so that the sealed portion faces down, and the quartz glass tube 15 is to be hermetically sealed with the metal halide put therein. The quartz glass tube 15 is arranged so that a predetermined portion is located at a portion where the susceptor 10 penetrates. Next, the unsealed side of the quartz glass tube 15 is connected to the exhaust tube 17, and the inside of the quartz glass tube 15 is evacuated by a vacuum pump connected to the exhaust tube 17 outside the glove box 1. .

Thereafter, the magnetron oscillation unit 3 generates a microwave having a predetermined energy, and the microwave is
The light passes through the microwave transmission window 9 through the waveguide 8, is guided to the applicator 2, and is absorbed by the susceptor 10.

Then, the susceptor 10 emits radiant heat (radiant heat) based on the energy of the absorbed microwave, softens and melts a predetermined portion of the quartz glass tube 15, and joins the softened and melted portion. The quartz glass tube 15
In the case of softening and melting, the softened and melted portion hangs down by its own weight, so that the microwave energy generated by the magnetron oscillating unit 3 is supplied with appropriate energy and / or the energy supply time to the susceptor 10 is set with appropriate time. It is necessary to As described above, by appropriately controlling the energy of the microwave generated by the magnetron oscillation unit 3 and / or the time for supplying the energy to the susceptor 10, the quartz glass tube 15 can be sealed in a short time.

The susceptor 10 and the quartz glass tube 15
By adjusting the gap, the amount of heat applied to the quartz glass tube 15, in other words, the temperature distribution of the quartz glass tube 15 can be adjusted. For example, the diameter of the through hole 16 provided in the applicator 2 is increased,
If the diameter of the penetrating portion of the susceptor 10 is also increased, the high temperature region of the quartz glass tube 15 is narrowed, and the high temperature region is limited to a part.
5 means that the area where the temperature of the quartz glass tube 15 becomes high becomes wider when the gap between the quartz glass tube 15 and the tube 5 is reduced. Therefore, by adjusting the gap between the susceptor 10 and the quartz glass tube 15, the quartz glass tube 15 can be locally heated, and the thermal effect on portions other than the heating portion can be suppressed.

By the way, conventionally, the A of the glove box 1
In an r gas atmosphere, the quartz glass tube 15 was hermetically sealed by using an Ar burner for blowing an Ar arc. As described above, when the Ar burner is used in the glove box 1, workability is deteriorated, and the temperature of the entire glove box 1 is increased. Needed. Furthermore, when the quartz glass tube 15 is melt-bonded using an Ar burner, a large amount of quartz silica powder and very fine thread-like quartz are generated, and a process for removing these is required. Doing it was extremely difficult.

However, as explained above,
In the heating device using microwaves according to the second embodiment of the present invention, Ar gas is filled in glove box 1 filled with Ar gas.
The hermetic sealing of the quartz glass tube 15 can be easily performed without using a burner.

Therefore, the above-described metal halide having a high vapor pressure can be hermetically sealed in the quartz glass tube 15 by the heating device using the microwave according to the second embodiment of the present invention, and the quartz glass tube 15 and the oxidized metal halide can be oxidized. It is now easy to hermetically seal a material or the like that extremely dislikes in the quartz glass tube 15.

In the second embodiment, the quartz glass tube 1
Although the material hermetically sealed in 5 is metal halide, the material hermetically sealed in quartz glass tube 15 may be mercury, metal and / or metal halide.

(Embodiment 3) The configuration of a heating device using a microwave according to Embodiment 3 of the present invention will be described together with its operation.

The difference between the third embodiment and the first or second embodiment is mainly that the objects to be joined by using the above-described heating device are different. Therefore, in the third embodiment, the first embodiment is different from the first or second embodiment. Or, only the differences from 2 are described.

In the third embodiment, the operation of the heating device using microwaves for sealing the cylindrical metal rod 18 made of Mo, W or the like, which does not like oxidation, and the quartz glass tube 15 will be described.

FIG. 4 shows a micro structure according to the third embodiment of the present invention.
By the heating device using the wave, the metal rod 18 that dislikes oxidation
Quartz glass tube 1 for sealing with quartz glass tube 15
5 shows an arrangement diagram of the metal rod 18 and the inclined glass 19.
Note that the inclined glass 19 is composed of the quartz glass tube 15 and the metal rod 1.
8 is a material for bonding with a material having a thermal expansion coefficient
Stepwise, depending on the side in contact with the quartz glass tube 15
The coefficient of thermal expansion of (1-8) × 10^-7/ ℃, with metal rod 18
The coefficient of thermal expansion of the contacting side is (10-100) × 10 ^-7/ ℃
It is assumed that. FIG. 4A shows the quartz glass described above.
Arrangement of tube 15, metal rod 18 and inclined glass 19 on the side
It is sectional drawing seen from. FIG. 4B shows a quartz glass tube 1.
5, the top view of the arrangement of the metal rod 18 and the inclined glass 19
is there.

First, in the glove box 1 replaced with Ar gas, as shown in FIG. 4, the side having a small coefficient of thermal expansion contacts the quartz glass tube 15 and the side having a large coefficient of thermal expansion contacts the metal rod 18. The inclined glass 19 is arranged in the quartz glass tube 15 together with the metal rod 18. Next, as shown in FIG. 3, a quartz glass tube 1 in which a metal rod 18 and an inclined glass 19 are arranged in a penetrating portion of a susceptor 10 of a heating device using microwaves according to a third embodiment of the present invention.
5 is arranged.

Then, the microwave having a predetermined energy from the magnetron oscillating unit 3 is absorbed by the susceptor 10, and the susceptor 10 emits radiant heat (radiant heat) based on the energy of the absorbed microwave. Is softened and melted, and the quartz glass tube 15 and the metal rod 18 are joined and sealed using the inclined glass 19 as an adhesive material.

In the third embodiment, the cylindrical metal rod 18 is used as the metal member of the present invention. However, the metal member of the present invention is not limited to the cylindrical metal rod 18 but may be a prismatic metal rod. Or a plate-like metal.

In the present invention, the magnetron oscillating unit 3 as the microwave generating means, the susceptor 10 as the heat generating means, the heat insulating material 11 as the heat insulating means, the glove box 1 as the closed tank, and the molten sealing material in the first embodiment are used. The intermediate frit material 14, the inclined glass 19 in the third embodiment, the two ceramic materials 13 in the first embodiment as a joining target, and the quartz glass tube 1 in the second embodiment
5. In the third embodiment, the quartz glass tube 15 and the metal rod 18 are used.

In the first, second and third embodiments, the glove box 1 is filled with only a predetermined amount of Ar gas. However, in the present invention, the glove box 1 as a closed tank is made of rare gas other than Ar gas. Only a predetermined amount of gas may be charged, or the inside of the glove box 1 may be substantially in a vacuum state.

In the first, second and third embodiments, the two ceramic materials 13 to be joined, the quartz glass tube 15, or the quartz glass tube 15, the metal rod 18, and the inclined glass 19 as the fusion sealing material are used. In the present invention, the user of the heating device using the microwave of the present invention, as a sealed tank, so as to place the object to be joined and / or the molten sealing material at the predetermined position. The gloves of the glove box 1 may be used for fixing by hand. In short, all that is required is that the objects to be joined and / or the molten sealing material be arranged in place.

In the first, second and third embodiments, the susceptor 10 has a cylindrical shape with a part penetrating so as to substantially cover a predetermined place. The shape of the susceptor 10 may be a plate shape or a shape obtained by vertically dividing a tube. In short, the susceptor 10 as the heat generating means of the present invention absorbs the microwave from the magnetron oscillating unit 3 as the microwave generating means, and emits radiant heat (radiant heat) based on the energy of the absorbed microwave. The shape is not particularly limited to a cylindrical shape. However, when the shape of the susceptor 10 as the heat generating means of the present invention is not cylindrical, the object to be joined and / or the molten sealing material can absorb a predetermined heat from the susceptor 10 and a predetermined distance from the susceptor 10. Must be located at

In the first, second and third embodiments, the glove box 1 of the apparatus is filled with Ar gas using the heating device using microwave of the present invention, and the heating is performed in an Ar gas atmosphere. The case where the two ceramic materials 13 are joined, the case where the quartz glass tube 15 is hermetically sealed, and the case where the quartz glass tube 15 and the metal rod 18 are sealed have been described. The heating device used in the present invention is also applicable to a case in which a rare gas such as Ar gas is filled in a glove box 1 serving as a closed tank of the device, and metals such as Mo and W which are not oxidized are bonded in a rare gas atmosphere. Needless to say, can be used. Further, in the present invention, the above-described bonding between metals may be performed with the glove box 1 serving as a closed tank being in a substantially vacuum state. Further, in the present invention, the joining object is not a substance that dislikes oxidation such as a metal,
If there is no need to join in a rare gas atmosphere such as r gas or substantially in a vacuum, it is not necessary to join such a bonding target in a rare gas atmosphere such as Ar gas or in a substantially vacuum. Absent.

Further, in the present invention, by appropriately controlling the energy power of the microwave generated by the magnetron oscillating section 3, the shape of the susceptor 10, and / or the size of the heat insulating material 11, it is possible to appropriately join the objects to be joined. it can.

Further, as another embodiment of the present invention, a method of cooling the susceptor 10 each time one joining object is joined can be considered.

That is, one object to be joined is inserted into the through hole 16 and joined, and after it is pulled out from the through hole 16,
As shown in FIG. 7, by introducing a coolant such as liquid nitrogen into the through-hole 16, the portion heated to a considerably high temperature by the heat retaining material 11 is cooled to a normal temperature, and then another one of the objects to be joined is connected. Insert and join.

FIG. 8 is a diagram showing an example of the cooling method. A pipe 23 is inserted into the through hole 16 at the time of cooling, and
The above-mentioned refrigerant and cold air are passed through 3. Thereby, the susceptor 10 that has become too hot can be cooled. In addition,
In order to send a refrigerant or cold air to the pipe 23, a nozzle 24 is disposed immediately below the pipe 23, and the refrigerant or the like is sent using the sealing valve 20. The glove box 1 is adjusted to have a constant pressure by the rotary pump 22 and the pressure regulating valve 21.

The reason that the susceptor is cooled every time the object to be joined is cooled is that the present susceptor has a very good heat retaining effect. Therefore, when the susceptor is changed from one sample to the next sample, the susceptor is cooled. If the temperature is too high, the replacement work is prevented from becoming difficult.

[0061]

As is apparent from the above description, the present invention provides a heating apparatus using microwaves and a method for joining objects to be joined by the apparatus, which can raise the temperature of a material transparent to microwaves. Can be provided.

The present invention also provides a heating apparatus using microwaves and a bonding apparatus using the same, which can raise the temperature of a material transparent to microwaves in an atmosphere of a rare gas such as Ar gas or substantially in a vacuum. An object joining method can be provided.

As a result, the joining of ceramic materials, the sealing of quartz glass tubes, or the joining of metals having a high melting point, or the joining of metals with ceramic materials or quartz glass tubes, which are liable to be oxidized, can be carried out using Ar gas or the like. This can be easily performed in a rare gas atmosphere or substantially in a vacuum.

[Brief description of the drawings]

FIG. 1 is a side view of a heating device using a microwave of the present invention.

FIG. 2 is a side view of a glove box of the heating device using microwaves according to the first embodiment of the present invention.

FIG. 3 is a side view of a glove box of a heating device using a microwave according to the second embodiment of the present invention.

FIG. 4 is a layout diagram of a quartz glass tube, a metal bar, and an inclined glass when a quartz glass tube and a metal bar are sealed by the heating device using microwaves according to the third embodiment of the present invention.

FIG. 5 is a diagram showing a state where a standing wave generation position is adjusted using a reflector in the embodiment of the present invention.

FIG. 6 is a diagram showing a state where a standing wave generation position is adjusted using a reflector in the embodiment of the present invention.

FIG. 7 is a diagram showing a state in which the susceptor is cooled in the embodiment of the present invention.

FIG. 8 is a diagram showing a state in which the susceptor is being cooled in the embodiment of the present invention.

[Explanation of symbols]

 DESCRIPTION OF SYMBOLS 1 Glove box 2 Applicator 3 Magnetron oscillation part 4 Power supply part 5 Isolator 6 Stub matching device 7 Detector 8 Waveguide 9 Microwave transmission window 10 Susceptor 11 Heat insulating material 12 Reflector with adjusting rod 13 Ceramic material 14 Intermediate frit material 15 Quartz Glass tube 16 Through hole 17 Exhaust tube 18 Metal rod 19 Inclined glass 20 Sealing valve 21 Pressure regulating valve 22 Pump 23 Pipe 24 Nozzle

 ──────────────────────────────────────────────────続 き Continuing from the front page (72) Inventor: Masaru Yachi 1006, Kazuma, Kadoma, Osaka Prefecture Matsushita Electric Industrial Co., Ltd. (72) Inventor: Tozaburo Saji 2-36-3, Shindaka, Yodogawa-ku, Osaka-shi, Osaka Inside Fuji Radio Industry Co., Ltd. (72) Ryozo Sakai 1-15-13 Tenma, Kita-ku, Osaka-shi, Osaka Prefecture Inside Motoyama Co., Ltd. (72) Kenji Yamamoto 2-4-2 Shindaka, Yodogawa-ku, Osaka-shi, Osaka No. 36 Fuji Electric Co., Ltd.

Claims (17)

[Claims] 1. A microwave generating means for generating microwaves, wherein the microwave generating means is arranged to substantially cover a predetermined place, absorbs microwaves from the microwave generating means, and is configured based on the absorbed microwaves. And a heat generating means for generating heat. 2. A heating device using microwave according to claim 1, wherein said heat generating means has a cylindrical shape. 3. The heating device using microwave according to claim 1, further comprising a heat retaining means arranged around the heat generating means and keeping the heat generating means warm. 4. The micro-micrometer according to claim 1, further comprising a sealed tank for substantially blocking entry of outside air, wherein the sealed tank has the heat generating means and the heat retaining means. A heating device using waves. 5. The heating device using microwave according to claim 1, wherein said heat generating means is SiC. 6. A heating apparatus using microwave according to claim 3, wherein said heat retaining means is zirconia and / or alumina. 7. A heating device using a microwave according to any one of claims 1 to 6, which is joined to a position at a predetermined distance from a heat generating means of the device or a position covered by the heat generating means. A method for joining objects to be joined by a heating device using microwaves, wherein the objects are arranged and the objects to be joined are joined using heat from the heat generating means. 8. A heating device using a microwave according to any one of claims 1 to 6, wherein the heating device is melted at a position at a predetermined distance from the heat generating means or at a position covered by the heat generating means. The sealing material is arranged, and the joining object is arranged so as to sandwich the molten sealing material, using the heat from the heat generating means, the molten sealing material is melted, and the melted sealing material is used. And joining the objects to be joined by a heating device using microwaves. 9. A heating apparatus using a microwave according to any one of claims 4 to 6, wherein a closed tank of the apparatus is filled with a predetermined amount of a rare gas or is substantially evacuated. In the closed vessel, a joining target is arranged at a position at a predetermined distance from the heat generating means of the heating device or at a position covered by the heat generating means, and utilizing the heat from the heat generating means, A method for joining objects to be joined by a heating device using microwaves, wherein the objects are joined. 10. A heating device using a microwave according to any one of claims 4 to 6, wherein a closed tank of the device is filled with a predetermined amount of a rare gas or is substantially evacuated.
In the closed vessel, the molten sealing material is arranged at a position at a predetermined distance from the heat generating means of the heating device or at a position covered by the heat generating means, and the objects to be joined are sandwiched by the molten sealing material. Heating using microwaves, wherein the heating is performed by using the heat from the heat generating means to melt the molten sealing material, and joining the objects to be joined by using the molten sealing material. The joining method of the joining object by the device. 11. The object to be joined is a glass tube having a predetermined object sealed on one side and containing a predetermined object. The glass tube is disposed at a distance of or a position covered with the heat generating means, the glass tube is melted at a predetermined position, and the melted portion is joined to hermetically seal the glass tube. The method for joining objects to be joined by a heating device using microwave according to claim 9. 12. The apparatus according to claim 1, wherein said predetermined substance is mercury, a metal and / or a metal halide.
A method for joining objects to be joined by a heating device using microwaves according to claim 1. 13. The fused object is a quartz glass tube and a metal member, and the molten sealing material is a graded material having a coefficient of thermal expansion that varies stepwise depending on the location, and the side having the smaller coefficient of thermal expansion is the quartz glass tube. 11. The microwave according to claim 10, wherein the metal member and the inclined material are arranged in the quartz glass tube such that a side having a large thermal expansion coefficient contacts the metal member. A method of joining objects to be joined by a heating device. 14. The gradient material has a thermal expansion coefficient of (1-8) × 10 ^-7 / ° C. on the side in contact with the quartz glass tube and a thermal expansion coefficient of (10-100) on the side in contact with the metal member. × 1
^{14. The} method for joining objects to be joined by a heating device using microwave according to claim 13, wherein the glass is inclined glass having a temperature of 0 ^-7 / ° C. 15. The semiconductor device according to claim 7, wherein said object to be joined is made of a material having a property of transmitting microwaves.
14. A method for joining objects to be joined by a heating device using microwaves according to any one of 14. 16. The heating device using microwave according to claim 7, wherein said object to be joined is made of a material having a melting point lower than the melting point of said heat generating means. Method of joining the objects to be joined. 17. The heat generating means is cooled every time one of the objects to be joined is joined.
A method for joining objects to be joined by a heating device using a microwave according to any one of the above.