JP3379916B2 - High melting point material melt bonding equipment - Google Patents

Description

Detailed Description of the Invention

[0001]

BACKGROUND OF THE INVENTION 1. Field of the Invention The present invention relates to melting and joining high melting point materials such as quartz glass and ceramic materials using a laser beam, and more specifically, melting a container made of the high melting point material. The present invention relates to a fusion bonding method and an apparatus for airtightly hermetically sealing.

[0002]

2. Description of the Related Art Usually, when melting a material having a high melting point such as a glass material or a ceramic material and welding the materials having a high melting point or different materials such as a metal or vacuum sealing, A gas welding method using propane / oxygen, hydrogen / oxygen, Ar (argon) arc or the like as a heat source is used. In particular, in the case of manufacturing a quartz glass lamp or the like, in order to seal the W (tungsten) / Mo (molybdenum) material, which is an electrode of the lamp, in a quartz glass container (lamp) in a vacuum-sealed state, quartz is used. It is necessary to partially heat and melt the glass container with a gas burner.

However, it is difficult to sharply narrow down the flame of the gas burner, and the portion around the desired heating portion that does not need to be heated is heated. Furthermore, although the flame can be sharply narrowed down, high melting point materials such as ceramics have high thermal conductivity, and quartz glass with low thermal conductivity requires direct heating if fine precision processing is required. When the section reaches a desired temperature, the surrounding indirect heating section is indirectly heated due to heat conduction and the temperature is significantly raised. As described above, in the heating by the gas burner, the temperature distribution change of the direct heating portion and its peripheral portion becomes slow, and it is very difficult to locally heat and melt only a desired portion of the high melting point material. is there.

For example, in the manufacture of small high-pressure mercury lamps, metal halide lamps and the like, it is necessary to vacuum seal mercury with a high vapor pressure in a glass tube. In this case, in order to prevent the evaporation of mercury due to the heat of the indirect heating part, it is necessary to locally make a difference in temperature of the heating target part. For that purpose, it is sufficient to cool the periphery of the heating portion directly, but there are serious problems in terms of manufacturing cost and workability. Further, if the heating by the gas burner is refrained from in order to suppress the temperature rise of the indirect heating part, not only the desired part for melting cannot be heated sufficiently, but also it takes more time to raise the temperature and the temperature difference locally rises and falls in the part to be heated. It becomes very difficult to attach. As described above, in the heating by the gas burner, the temperature controllable range of the heating target portion and its peripheral portion is small, and the sealing process itself becomes very difficult. As a result, there is a problem that the yield of lamp production cannot be secured.

In FIG. 20, in order to solve the problem caused by using such a gas burner, Japanese Patent Laid-Open No. 55-24327 has been proposed.
1 schematically shows a fusion bonding apparatus proposed in, which uses a laser beam as a heating means to melt a frit. In the figure, WLC is in a vacuum-tight container,
It is a fusion-bonding device for irradiating a melting object installed so as to be surrounded by a reflection plate with a laser beam to melt a frit to manufacture a discharge lamp such as a high-pressure sodium lamp.

The laser fusion bonding apparatus WLC has a vent hole 10
The airtight container 101 is assembled by air-tightly attaching the substrate 103 having 2 to the container body 104 via the packing 105. The laser device 1 is provided outside the laser transmission window 106 provided in a part of the outer periphery of the upper portion of the closed casing 101.
07 is installed. A pressure gauge 108 for measuring the atmospheric pressure inside the closed container 101 is provided above the closed container 101. The ventilation port 102 is provided with a ventilation pipe 109. Branch pipe 10 branched from the middle of the ventilation pipe 109
A vacuum pump 110 is connected to 9a via an on-off valve 111, and an inert gas such as Ne (neon) is supplied to a branch pipe 109b by a gas cylinder 112 via a valve device 113.

The object to be sealed 115 has a heating and melting sealing material 119 such as a glass solder interposed between the closing body 118a having the electrode 117a and the upper end of the arc tube 116. Similarly, the closing body 1 having the electrode 117b
A heating and melting sealing material 119 is also interposed between 18b and the lower end of the arc tube 116.

By means of a bifurcated holding member 114, which is rotatably and slidably mounted on the central axis of the substrate 103, the sealed object 115 as a discharge lamp is heated and melted.
19 is detachably held so that it is located on the optical path of the laser transmission window 106. An arcuate reflector 121 having a gap 120 is provided inside the closed container 101 so as to surround the object 115 to be sealed from the outside along the laser optical path position, and the reflector 121 is supported. It is provided so as to be lifted and lowered by a member 122.

After the object 115 to be sealed is sandwiched by the sandwiching member 114, the opening / closing valve 111 is opened and the vacuum pump 110 is driven to exhaust the air in the closed container 101. Pressure gauge 10
8, the inside of the closed container 101 is about 0.0001 Tor
After confirming that the degree of vacuum reaches about r to 0.000001 Torr, the on-off valve 111 is closed and the driving of the vacuum pump 110 is stopped. In this way, the inside of the sealed object 115 is evacuated. Next, laser transmission window 1
The heating and melting sealing material 119 of the same sealed object 115 is irradiated with laser light through the gap 06 and the gap 120 to heat and melt the heating and melting sealing material 119, and first, the upper part of the arc tube 116 and the closing body 118a are sealed. Stop.

At this time, the thermal energy of the laser light heats the object to be sealed 115, and the radiant energy generated at this time is reflected by the reflecting plate 121 to synergistically heat the object to be sealed 115. At the same time, the sandwiching member 114 is slowly rotated to evenly heat-weld the object to be sealed 115 and the hot-melt sealing material 119 to hermetically seal the upper end side.

Next, the object 1 to be sealed whose upper end has been sealed.
15 is inverted and the heat-melting sealing material 119 at the lower end is positioned on the laser optical path. Then, the on-off valve 111 is closed, the valve device 113 is opened, the instruction of the pressure gauge 108 is confirmed, and the above-mentioned inert gas (filled gas) is supplied at about 25 Torr.
To the extent introduced, it is introduced into the closed container 101. When the introduction of the enclosed gas is completed, the object to be sealed 1 is irradiated with the laser light of the laser device 107, similarly to the above-described hermetic sealing of the upper end side.
The fusing / sealing material 119 of 15 is melted and the lower end side is hermetically sealed to complete the discharge lamp.

Further, as the above-mentioned heating means, a fusion bonding apparatus for melting a frit by using a laser beam is proposed in Japanese Patent Application Nos. 55-64338 and 56-42940, respectively. These devices have a structure in which a pressing means for pressing a frit melted by laser irradiation is added to the fusion bonding device proposed in JP-A-55-24327.

[0013]

However, in the laser heating and melting apparatus proposed in the above-mentioned Japanese Patent Laid-Open No. 55-24327, about 0.0001 Torr to 0.000001T.
It is necessary to fill the sealed gas up to about 25 Torr in a closed container maintained at a vacuum degree of about orr. Further, the heat melting and sealing material is melted, and the closing body 118 and the object to be sealed 11 are sealed.
5 is welded to the end portion to hermetically seal it, but the hot-melt sealing material 119 and the closing body 118 are simply placed on the end portion of the adherend 115.

That is, the heating and melting sealing material 119 is thus formed.
Further, since only the self-weight of the closing body 118 works, the heating and melting sealing material 119 is deformed and droops by its own weight when melted, while the closing body 118 does not melt and therefore does not deform. Therefore, both members cannot be welded without a gap between the heat-melt sealing material 119 and the closing body 118. In order to prevent this, even if the closing body 118 is melted at the same time as the heat melting sealing material 119,
It is very difficult to weld the two without gaps only by their own weight, and the yield cannot be secured. Further, when the closing body 118 and the object to be sealed 115 are made of a low thermoplastic material such as ceramic, it is substantially impossible to weld both members without a gap.

Further, since the material to be sealed 115 and the blocker 118 are sealed under a vacuum condition at room temperature regardless of whether they are ceramic materials or quartz materials, the internal pressure after sealing should be higher than normal pressure. It is impossible to hermetically seal the sealing material 115.

Further, when the laser irradiation is performed in the vacuum container, it is necessary to fill the vacuum container with the enclosed gas. If the object to be vacuum-tightly sealed is a quartz glass tube, it is very difficult to completely seal it unless there is a pressure difference between the inside and outside of the tube. You have to go through the process of doing. further,
Even with a ceramic or quartz glass tube, it is very difficult to make the internal pressure of the tube higher than normal pressure and to perform vacuum sealing.

Further, for welding or vacuum-sealing the cermet used for connecting the ceramic tube material and the electrode material, the ceramic tube material or cermet is melted by high-frequency induction heating and then welded or vacuum-sealed. Is being done. In such high frequency induction heating, it is improved to provide a sharp local temperature gradient in the heating target portion. However, it is very difficult to weld ceramic tubing materials and cermets to each other only by melting them. Furthermore, it is virtually impossible to perform vacuum sealing. On the other hand, the devices proposed in Japanese Patent Application No. 55-64338 and Japanese Patent Application No. 56-42940 are suitable for sealing by pressing a closed body against the open end of the material to be sealed, but without using a separate closed body. However, it is practically impossible to seal the object to be sealed itself.

[0018]

Means for Solving the Problems and Effects of the Invention In order to solve the above-mentioned problems, the fusion bonding apparatus of the present invention is an airtight glove box shut off from the outside, and quartz glass and ceramics in the glove box. The object made of any of the materials, the laser device and the dust collecting means installed outside the glove box, and the first pressure that is the internal pressure of the object is the internal pressure in the glove box. An internal pressure control means for maintaining a reduced pressure lower than a second pressure, and an arbitrary portion of the object heated and melted by the laser light emitted from the laser device outside the glove box is the first pressure. in those with the deflated welded by the differential pressure of the second pressure and remove the dirt and dust generated during the shrinkage melt in the dust collecting means, prior Wherein a predetermined portion of the object laser
Laser light emitted from the laser device between the device and
Further includes a susceptor provided to block the
Septa is a ring that contains the object inside,
The thermal energy of the laser light received at the circumference is
Radiates toward a predetermined part of the object, and the object
It is rotated around the object and more
It is characterized by being heated uniformly .

In addition, the fusion bonding apparatus is equipped with a
Dense glove box and existing inside the glove box
Depending on the quartz glass and ceramic material
On the outside of the glove box with the configured object
The installed laser device and dust collecting means, and the object
The first pressure, which is the internal pressure, is applied to the inside of the glove box.
Internal pressure control hand that keeps pressure lower than the second pressure, which is the pressure
The laser outside the glove box, comprising a step and
The above is heated and melted by the laser beam emitted from the device.
Any part of the object may be the first pressure and the second pressure.
Shrink welding due to the pressure difference of force, and at the time of shrink melting
In those that remove the generated dust and dirt with dust collecting means,
Further comprising cooling means for partially cooling the object,
The cooling means is either cold air, cold water, or liquid nitrogen.
Refrigerant means for storing some refrigerant, and refrigerant from the refrigerant means
Is introduced into the refrigerant means after winding around the object.
It further comprises a refrigerant circulating means for circulating.

In addition, the fusion bonding apparatus is equipped with a
Dense glove box and existing inside the glove box
Depending on the quartz glass and ceramic material
On the outside of the glove box with the configured object
The installed laser device and dust collecting means, and the object
The first pressure, which is the internal pressure, is applied to the inside of the glove box.
Internal pressure control hand that keeps pressure lower than the second pressure, which is the pressure
The laser outside the glove box, comprising a step and
The above is heated and melted by the laser beam emitted from the device.
Any part of the object may be the first pressure and the second pressure.
Shrink welding due to the pressure difference of force, and at the time of shrink melting
In those that remove the generated dust and dirt with dust collecting means,
Focus near a given part of the object to be heated and melted
Further comprising a reflecting mirror having an integrating sphere.
And a predetermined part of the object is held inside.
And the object is inserted inside the reflector.
A first opening for entering and a second opening for entering the laser light.
At least one opening is provided, and from the second opening
The incident laser light is inside the reflecting mirror which is an integrating sphere.
The object reflected and inserted through the first opening
It is characterized in that a predetermined portion of is uniformly heated by irradiation.
According to this, it is necessary to provide an opening in the reflecting mirror that is an integrating sphere.
By holding the object inside the reflector,
The held object can be irradiated with laser light.

In addition, the fusion bonding apparatus is equipped with a
Dense glove box and existing inside the glove box
Depending on the quartz glass and ceramic material
On the outside of the glove box with the configured object
The installed laser device and dust collecting means, and the object
The first pressure, which is the internal pressure, is applied to the inside of the glove box.
Internal pressure control hand that keeps pressure lower than the second pressure, which is the pressure
The laser outside the glove box, comprising a step and
The above is heated and melted by the laser beam emitted from the device.
Any part of the object may be the first pressure and the second pressure.
Shrink welding due to the pressure difference of force, and at the time of shrink melting
In those that remove the generated dust and dirt with dust collecting means,
Focus near a given part of the object to be heated and melted
Further comprising a reflecting mirror having an integrating sphere.
And a predetermined part of the object is held inside.
And the reflector is further provided with a datum inside the reflector.
An opening is provided for sucking the strike.
To do. According to this, the opening provided for dust suction
Dust inside the reflector can be sucked out from the mouth.
Wear.

In addition, the fusion bonding apparatus is equipped with a
Dense glove box and existing inside the glove box
Depending on the quartz glass and ceramic material
On the outside of the glove box with the configured object
The installed laser device and dust collecting means, and the object
The first pressure, which is the internal pressure, is applied to the inside of the glove box.
Internal pressure control hand that keeps pressure lower than the second pressure, which is the pressure
The laser outside the glove box, comprising a step and
The above is heated and melted by the laser beam emitted from the device.
Any part of the object may be the first pressure and the second pressure.
Shrink welding due to the pressure difference of force, and at the time of shrink melting
In those that remove the generated dust and dirt with dust collecting means,
Focus near a given part of the object to be heated and melted
Further comprising a reflecting mirror having an integrating sphere.
And a predetermined part of the object is held inside.
And further equipped with cooling means on the outer peripheral side of the reflecting mirror.
It is characterized in that the reflecting mirror is cooled. This
For example, the cooler provided on the outer peripheral side of the reflecting mirror
By cooling the
From the high temperature generated when the object is illuminated by the laser light,
The reflector can be protected without interfering with the laser light.

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DETAILED DESCRIPTION OF THE PREFERRED EMBODIMENTS A fusion bonding method and apparatus therefor according to the present invention will be described below with reference to the drawings.

(First Embodiment) A fusion bonding apparatus according to the first embodiment of the present invention will be described with reference to the block diagram shown in FIG. In the figure, the fusion welding device W
An example is shown in which a vacuum container 3 made of a quartz glass material or a ceramic material that is fusion-bonded or hermetically sealed is installed inside the LP1. The fusion bonding apparatus WLP1 has an airtight glove box 1 that blocks outside air. The glove box 1 has a vacuum pump 1
A gas cylinder 11 in which an inert gas such as nitrogen gas or a rare gas is stored is hermetically connected via 0, and the inert gas is injected into the glove box 1 at a predetermined pressure.
A pressure regulating valve 28 is provided in the glove box 1 so that the pressure P2 in the glove box 1 is maintained in a range slightly higher than the outside air pressure P3 (P3 <P2 <P3 + ΔP <P4). In addition, ΔP is a pressure of several cm Water, and P4 is a withstand pressure of the glove box 1. In this way, the vacuum pump 10, the gas cylinder 11, and the pressure regulating valve 28 form the glove box internal pressure regulating mechanism GPR.

The glove box 1 is provided with a purifier 30 for purifying the inert gas. The atmosphere gas purifier 30 is hermetically connected to the inside of the glove box 1 by the intake pipe Pi and the return pipe Pr. The atmospheric gas purifier 30 takes in the atmospheric gas in the glove box 1 through the intake pipe Pi, removes impurities such as moisture contained in the taken-in atmospheric gas with a moisture adsorbent, and then through the return pipe Pr. Circulate in the glove box 1. As a result, the atmospheric gas in the glove box 1 is kept in a low dew point state in which the water content is very small. In this way, the atmosphere gas refiner 3
The glove box atmosphere refining mechanism GAR is formed by 0, the intake pipe Pi, and the return pipe Pr.

The laser device 2 is installed outside the glove box 1 so that the optical axis of the laser light L is substantially perpendicular to the side surface of the vacuum container 3 in which it is installed. As the laser device 2, a YAG laser, an excimer laser or a CO ₂ laser is usually used. A laser light window 5 is provided on the side surface of the glove box 1 so as to block the optical axis of the laser light L so that the laser beam L emitted from the laser device 2 can be condensed on the side surface of the vacuum container 3 by the condenser lens 6. It is provided. As the constituent materials of the condenser lens 6 and the laser light window 5, depending on the wavelength of the laser light L,
A substance that transmits the laser beam L well is appropriately selected.

As an example, in the YAG laser and the excimer laser, since the laser wavelength is around 1.06 μm, quartz glass can be used as the material of the laser light window 5. On the other hand, the wavelength of CO ₂ laser is 1
Since the thickness is 0.6 μm, most substances absorb the light energy, so that the material of the laser light window 5 is limited to ZnSe (zinc selenide), Ge (germanium), or the like.
On the other hand, since the vacuum container 3 is preferably made of a material that absorbs the laser light L well, when a YAG laser or an excimer laser is used, it is not a quartz glass material that transmits the laser light L but a ceramic material that absorbs the laser light L or It goes without saying that it must be made of a metallic material. Further, in the case of a CO ₂ laser, it can be composed of almost any material other than ZnSe and Ge. However, practically, a material having ZnSe (zinc selenide) as a main component that constitutes the condenser lens 6 is selected as the material of the laser light window 5. Ge
(Germanium) can also be used as a material for the laser light window 5, but since it is highly toxic and does not transmit visible light,
ZnSe material is preferred.

At the position on the opposite side of the laser beam window 5 of the glove box 1, a laser absorber 2d is provided so as to block the optical axis of the laser beam L, like the laser beam window 5. A cooling device (not shown) provided outside the glove box 1 is connected to the laser absorber 2d for cooling.
Usually, the cooling device is configured to flow cooling water through a copper cooling pipe provided inside. The laser absorber 2
As shown in FIG. 4, d is formed in a triangular gutter shape so as to effectively absorb the leaked laser light L ′.

The laser light L emitted from the laser device 2 is
It is focused on the focus of a condenser lens 6 provided in front of the laser beam window 5, and thereafter the beam diameter is expanded. Therefore, by moving the condenser lens 6 along the optical axis for defocusing, the laser light L for melting the vacuum container 3 is generated.
The size of the portion 4 for irradiating can be adjusted arbitrarily.

Further, the glove box 1 is hermetically connected to the vacuum pump 20 provided outside through a vacuum exhaust pipe 7. One end of the vacuum container 3 installed in the glove box 1 is airtightly connected to the vacuum exhaust pipe 7 and sucked by a vacuum pump 20 driven by a pressure control device 21. Internal pressure P of the vacuum container 3
1 is reduced to a predetermined pressure equal to or lower than the internal pressure P2 of the glove box 1, the pressure control device 21 operates the vacuum pump 20.
To stop. As described above, the vacuum exhaust pipe 7, the vacuum pump 20, and the pressure control device 21 form the pressure reducing mechanism VPR of the vacuum container.

Melt joining apparatus WLP prepared as described above
1, the laser light L is emitted from the laser device 2 into the vacuum chamber 3
When irradiated to, the irradiation part 4 is instantly heated to reach the melting point. Since the internal pressure P1 of the vacuum container 3 is smaller than the pressure P2 of the glove box 1, the fusion zone 4 is shrunk (reduced) by the pressing force P2-P1 exerted from the periphery of the fusion zone 4 toward the center by laser irradiation. As a result, the melting portions 4 are joined to each other in the central portion, and the end portion of the vacuum container 3 is hermetically sealed. In this case, as shown in FIG. 1, when the vacuum container 3 is a lamp or the like, the electrodes are hermetically sealed by melting the side wall around the electrode rod 8 inserted therein. You can

A part L ′ of the laser light L emitted from the laser device 2 is not used for melting the vacuum container 3 and leaks toward the glove box 1 on the opposite side of the laser light window 5. The leaked laser light L'is absorbed by the absorber 2d as heat energy, and the heat energy is discharged to the outside of the glove box 1 by the cooling device. In this way, it is possible to prevent the glove box 1 itself from being damaged by the extra laser light L ′ that has not been used for fusion bonding of the vacuum container 3.

FIG. 2 shows the fusion bonding apparatus WLP shown in FIG.
A modification of No. 1 will be described. The melt-bonding apparatus WLP1 ′ in this example has substantially the same configuration as the melt-bonding apparatus WLP1 shown in FIG. 1, but further includes a sandwiching device 40 that sandwiches the vacuum container 3 rotatably along the rotation axis and a sandwiching device. Four
A rotary motor 41 for rotating 0 is preferably provided in the glove box 1. When the laser light L is irradiated to heat and melt the vacuum container 3, the vacuum container 3 is irradiated with the laser light L in order to make the heat distribution of the laser irradiation portion 4 uniform.
Rotate along an axis perpendicular to the optical axis of. Thus, the clamp 40 and the rotation motor 41 form the rotation mechanism VR of the vacuum container 3. For simplicity,
Glove box internal pressure adjusting mechanism GPR, glove box atmosphere refining mechanism GAR, and vacuum container pressure reducing mechanism VP
R is not shown.

Hereinafter, with reference to FIG. 3, an airtightness holding structure between the vacuum exhaust pipe 7 and the glove box 1 in the above-described fusion bonding apparatus WLP1 'will be described. The sliding O-ring 33 provided between the periphery of the vacuum exhaust pipe 7 and the inner peripheral portion of the glove box 1 maintains airtightness in the rotary sliding portion of the vacuum exhaust pipe 7 and the glove box 1. Further, in order to assist the rotation of the vacuum exhaust pipe 7, there is provided a roller bearing 46 having a male screw portion 45 that fits into a female screw portion 44 provided on the lower portion of the inner peripheral wall of the glove box 1. In addition, as described above, the inert gas is introduced and exhausted by the glove box internal pressure adjusting means, and the inside of the glove box 1 is maintained at the predetermined pressure P2. In addition, in the example shown in FIG.
In 1 ', the rotating means of the vacuum container 3 is provided in the glove box 1 to rotate the vacuum container 3, but it is provided outside the glove box 1 to rotate the vacuum exhaust pipe 7. Is also good.

(Second Embodiment) FIG. 5 shows a second embodiment of the present invention.
1 shows a fusion bonding apparatus according to an embodiment. The fusion bonding apparatus WLP2 in this example is the fusion bonding apparatus WL shown in FIG.
It has the same structure as P1. Also in this figure, the glove box internal pressure adjusting mechanism GPR and the glove box atmosphere refining mechanism GAR are not shown for simplification. However, instead of the vacuum vessel pressure reducing mechanism VPR, both lathes 50 having chucks C1 and C2 facing each other
Is provided in the glove box 1. Chuck C
1 and C2 are respectively free to move in the directions opposite to each other indicated by the arrow Dp. Further, the chuck C1
Since C2 and C2 can freely rotate in the circumferential direction with the Dp direction as the rotation axis as indicated by the arrow Dr, they also have the same function as the vacuum container rotation mechanism VR described in FIG. The joints 3C1 and 3C2 are attached to the chucks C1 and C2, respectively, with an intermediate frit 9 which is an adhesive material sandwiched therebetween.

[0124] The fusion bonding apparatus WLP having the above-mentioned configuration
2, in the same manner as in the first embodiment, the laser light L is applied to the joints with the joints 3C1 and 3C2 that are rotating or stationary, and the chucks C1 and C2 are removed when the intermediate frit 9 melts. The joints 3C1 and 3C2 are pressed against each other by moving them so as to approach each other in the Dp direction, and welded and joined by the melted intermediate frit 9.

As described above, in this embodiment, both lathes 50 are
Are joined together by pressing the separate joints 3C1 and 3C2 against the molten intermediate frit 9, which is suitable when the joints 3C1 and 3C2 are made of a low thermoplastic material such as a ceramic material. .

When the ceramic materials are joined together, the intermediate frit 9 is made of CaO--Al ₂ O ₃ or CaO--Al ₂ O ₃ --S.
It is preferably formed of iO ₂ , MgO—Al ₂ O ₃ —SiO _2, or the like. Since these intermediate frits 9 can be melted at about 1000 to 1500 ° C., they are heated to a predetermined melting temperature within a few seconds after receiving the laser beam L. As mentioned above,
By appropriately selecting the wavelength of the laser light L, the energy of the laser light L can be absorbed by only the intermediate frit 9 without adding a metal in the frit 9 as in the conventional case. It can also be used as 9.

Further, as the joints 3C1 and 3C2,
It goes without saying that the vacuum container 3 made of the quartz glass material used in the first embodiment can be used, and quartz glass can be used as the intermediate frit 9 to melt-bond them.

(Third Embodiment) FIG. 6 shows a third embodiment of the present invention.
1 shows a fusion bonding apparatus according to an embodiment. The fusion bonding apparatus WLP3 in this example is the fusion bonding apparatus WL shown in FIG.
It has the same structure as P1. Also in the figure, for simplification, the glove box internal pressure adjusting mechanism GPR, the glove box atmosphere refining mechanism GAR, and the vacuum container depressurizing mechanism VPR are not shown. However, a cooling device 13 for cooling the end portion of the vacuum container 3 is newly provided.
The cooling device 13 is connected to a refrigerant tank (not shown) that is provided outside the glove box 1 and stores a refrigerant RF such as cold air, cooling water, or liquid nitrogen.
A cooling pipe 13P for flowing the air is provided around the end of the vacuum container 3.

The fusion bonding apparatus WLP configured as described above
In the same manner as in the first embodiment, the internal pressures of the vacuum container 3 and the glove box 1 are irradiated with the laser light L on the rotating or stationary vacuum container 3 and the irradiation part 4 melts. Due to the difference P2-P1, the fusion zone 4 shrinks and is hermetically sealed. In this case, even if the heat of the melting part 4 is conducted to the end of the vacuum container 3, it is sufficiently cooled by the cooling device 13, so that the high vapor pressure material 14 such as mercury sealed in the end of the vacuum container 3 is used. Without evaporating
The vacuum container 3 can be hermetically sealed.

Hereinafter, referring to FIG. 7, a fusion bonding method and apparatus for hermetically sealing the vacuum container 3 in which Xe (xenon) gas is sealed at a high pressure (above atmospheric pressure) will be described. Explained. The same figure shows a modification of the fusion bonding apparatus WLP3 according to the third embodiment. In the fusion bonding apparatus WLP3 ′ in this example, the cooling device 13 is provided with a cooling tank 13T that stores a refrigerant so as to cover the periphery of the end portion of the vacuum container 3, instead of the cooling pipe 13P. This cooling tank 13T has an introduction port 1
8 is also connected via an externally provided valve 19 to a refrigerant tank (not shown) also provided externally.

The fusion bonding apparatus WLP configured as described above
In 3 ', liquid nitrogen is stored as a refrigerant in the cooling tank 13T, the end of the vacuum container 3 is immersed in the liquid nitrogen for cooling, and the rotating or stationary vacuum container 3 is irradiated with laser light L. , The irradiation part 4 is melted and hermetically sealed. The melting point of xenon is -111.9 ° C, and the boiling point thereof is -108.1 ° C. On the other hand, the melting point of nitrogen-2
It is 09.86 ° C and its boiling point is -195.8 ° C. Therefore, the end of the vacuum container 3 has a cooling tank 13T.
Since it is cooled to −209.86 ° C. by the liquid nitrogen stored in, the sealed xenon gas is liquefied or solidified at the end of the vacuum container 3 and the vapor pressure can be made almost zero. Therefore, since the inside of the quartz glass tube 3 is in a depressurized state, when the quartz glass 3 is melted by the laser light L, the quartz glass 3 shrinks inward and can be hermetically sealed.

As shown in FIG. 7, liquid nitrogen RF is introduced from the outside of the glove box 1 and filled in the cooling tank 13T. Then, instead of immersing the portion 15 having the substance 16 having a high vapor pressure in the molten sample 3 such as quartz glass, the refrigerant RF such as liquid nitrogen is sprayed on the portion to which heat is not directly applied. You may provide a nozzle in.

The inlet port 18 to the inside of the glove box 1 is normally provided with a valve 19 so as to be shielded from the outside air. Further, as in the case shown in FIG. 1, the glove box 1 is provided with the pressure regulating valve 28 for maintaining the set pressure, so that the internal pressure does not rise. In addition, the inside of the glove box 1 is kept in a state where the dew point is as low as possible by removing water, but by flowing the liquid nitrogen RF as described above, the outside air and the atmosphere inside the glove box 1 do not come into contact with each other, The dew point in the glove box 1 does not deteriorate. Rather, since liquid nitrogen or the like is a cryogenic refrigerant RF, the water inside the glove box 1 solidifies, and the glove box atmosphere purification mechanism GA
It is discharged to the outside by circulation refining by R, and the dew point in the glove box 1 is improved.

If a sealing step for hermetically sealing is performed by the above-described fusion bonding method and apparatus using laser light, mixing of water is basically eliminated, and life characteristics of a lamp or the like is greatly improved. .

(Fourth Embodiment) FIG. 8 shows a fourth embodiment of the present invention.
1 shows a fusion bonding apparatus according to an embodiment. The fusion bonding apparatus WLP4 in this example has the same structure as the apparatus WLP1 shown in FIG. In the present embodiment, the glove box 1 is airtightly divided by the partition wall 35 and the vacuum O-ring 39 into the vacuum exhaust part 34 and the original glove box part 1 ′. Although not shown in the figure for simplification, the glove box internal pressure adjusting mechanism GP is shown.
R and the glove box atmosphere purification mechanism GAR are connected to the original glove box 1 '. Partition wall 35
Is provided with a gas introduction port 32, and an inert gas can be introduced into the vacuum exhaust section 34 from the glove box section 1 ′.

In the vacuum exhaust unit 34, the condenser lens 6 is provided on the side wall of the glove box 1 of the vacuum exhaust unit 34 so as to block the optical axis of the laser device 2 provided outside. A reflecting mirror 37 extends in the optical axis direction of the laser beam L from the condenser lens 6 toward the inside so that the laser beam L emitted from the laser device 2 is reflected and focused on the focal point. The vacuum container 3 made of a ceramic material is fixed so that the intermediate frit 9 of the sealing portion is substantially positioned on the focal point of the condenser lens 6. In addition, as the sealing portion, a lid 3L made of a ceramic material is placed on an end portion of the vacuum container 3 via an intermediate frit 9 made of ceramic.

Further, the vacuum exhaust unit 34 is connected to the vacuum pump 36 via the exhaust valve 43, and the vacuum exhaust unit 34 is further connected.
A vacuum gauge 38 is provided to measure the internal pressure of the. In this way, the exhaust valve 43, the vacuum exhaust unit 34, the vacuum pump 36, and the vacuum gauge 38 constitute the above-described vacuum container depressurization mechanism VPR.

[0138] The fusion-bonding apparatus WLP having the above structure
4, the exhaust valve 43 is first opened to open the vacuum pump 36.
Is driven to evacuate the gas in the vacuum evacuation portion 34.
After that, the exhaust valve 43 is closed and the gas introduction port 32 is opened to introduce the inert gas in the glove box part 1 ′ into the vacuum exhaust part 34 while checking the gas pressure with the vacuum gauge 38. When the gas pressure in the vacuum exhaust unit 34 reaches the predetermined pressure P1, the vacuum pump 36 is closed. In addition, in this example, the inert gas in the glove box part 1 ′ is introduced into the vacuum exhaust part 34. However, when a different gas from the inert gas needs to be introduced, a different gas corresponding to the glove box internal pressure adjusting mechanism GPR is introduced. It suffices to connect the supply source to the vacuum exhaust unit 34.

Next, the laser beam L expanded and reduced to a predetermined beam width from the laser device 2 is applied to the reflecting mirror 37 via the condenser lens 6. The melting portion installed at the focal point of the reflecting mirror 37 uniformly melts the sealing portion that receives the heat energy, that is, the vacuum container 3 including the intermediate frit 9 and the portion formed by the lid 3L made of ceramic material. It will be possible. At this time, in order to ensure hermetic welding without a gap, the lathe 50 shown in FIG. 5 is used to pressurize the vacuum vessel 3 in the axial direction of the ceramic tube 3 while rotating it.

(Fifth Embodiment) FIG. 9 shows a fusion bonding apparatus according to the fifth embodiment of the present invention. The fusion bonding apparatus WLP5 in this example is the fusion bonding apparatus WLP1 shown in FIG.
Although it has the same configuration as the above, a dust collection chamber 25 for housing the dust collector 25a is further provided outside the glove box 1. In the dust collection chamber 25, an intake pipe 22i and an exhaust pipe 2 that are airtightly connected to the inside of the glove box 1 are provided.
2o are respectively connected. The end portion of the intake pipe 22i is the melting portion 4 of the vacuum container 3 in the glove box 1.
The exhaust pipe 22o has an end located at an arbitrary position in the glove box 1. A circulation pump 23 provided in the dust collecting chamber 25 in the middle of the suction pipe 22i sucks the atmospheric gas in the vicinity of the melting portion 4 and sends it to the dust collector 25a.

Filter 2 provided in dust collector 25a
By 4, substances such as dust and dust contained in the sucked atmospheric gas are removed, and clean atmospheric gas is returned into the glove box 1 through the exhaust pipe 22o. In this way, when the article to be joined 3 such as quartz glass is heated to the melting temperature level, a small silica-like powder evaporates E.
occurs as v, and the inside of the glove box 1 becomes extremely dirty, and further, the laser light window 5 becomes dirty by the evaporated material Ev. However, according to the above configuration, the problem that the energy of the laser light L reaching the vacuum container 3 is attenuated can be improved. Further, since the dust collection chamber 25 is isolated from the glove box 1, the filter 24 can be replaced without exposing the glove box 1 to the air.

(Sixth Embodiment) FIG. 10 shows a sixth embodiment of the present invention.
1 shows a fusion bonding apparatus according to an embodiment. The fusion bonding apparatus WLP6 in this example is the fusion bonding apparatus WLP shown in FIG.
1 has the same configuration as that of the first embodiment, but a movable condenser lens 6M is provided in place of the laser light window 5 and the condenser lens 6, and an output monitor 26 is further provided on the surface of the laser absorber 2d. It is provided.

That is, in the first embodiment, the condenser lens 6 is installed outside the glove box 1, but
The laser beam window 5 provided in the glove box 1 also needs to use the same material as the condenser lens. In consideration of this point, the motor 27 causes the condenser lens 6 to move the laser beam L
The movable condenser lens 6M is configured to move in an airtight manner with respect to the glove box 1 in the DL direction along the optical axis of and is also used as the window material 5. further,
An output monitor 26 is installed on the laser absorber 2d on the opposite side to which the laser is incident, and a monitor signal for monitoring the output of the leaked laser light L'is supplied to the laser input power source 2b or the drive motor 27 for the movable condenser lens 6M. To the object 3 under stable melting conditions,
Yield is also improved.

As described above, by adjusting the input power of the laser device 2, the irradiation time or the position of the condenser lens 6, the vacuum container 3 is melt-bonded and hermetically sealed in a short time of a few seconds. Is possible. Therefore, since the heat welding work is performed inside the glove box 1 in an inert atmosphere such as a rare gas or a nitrogen gas, a metal halide having a high vapor pressure is hermetically sealed in the quartz glass tube 3 or a material which is extremely reluctant to oxidize. Thus, the quartz glass tube 3 can be easily hermetically sealed.

Although the joining of a high melting point dielectric material such as quartz glass or ceramic has been described as the vacuum container 3, it is needless to say that it is also useful for joining a metal (for example, Mo, W, etc.) that does not like oxidation. . Further, in order to prevent oxidation, melt bonding can be performed not only in an inert gas atmosphere but also in vacuum.

Moreover, by moving the focal position of the condenser lens 6M to defocus the laser light L and adjusting the size of the irradiated portion, it is possible to melt the melted target portions of various sizes. is there. Further, since the laser light L has a good condensing property, a temperature gradient can be provided in a narrow region of the portion of the melting target object irradiated with the laser light L. Therefore, it is possible to locally heat only the welded portion without distinguishing the metal or the dielectric, and it is possible to suppress the thermal influence on the portion which is not desired to be melted as much as possible.

Further, unlike the electric furnace, a high temperature can be instantly obtained by laser light irradiation, so that thermal damage to a portion other than the molten portion can be minimized. Further, there is no need to worry about adjusting the temperature of the inert atmosphere in the glove box 1. further,
Since the main body of the laser device that supplies light energy is installed outside the glove box, the need for remodeling the glove box itself can be reduced.

(Seventh Embodiment) A fusion bonding apparatus according to the seventh embodiment of the present invention will be described below with reference to FIG. In the fusion-bonding device WLP7, the laser device 2 has an optical axis of the laser beam L of the quartz glass tube 20.
1 is installed substantially perpendicular to the longitudinal direction Dv. As shown in the figure, the quartz glass tube 201 has a longitudinal direction D
It has a shape that is substantially symmetrical with respect to v. Further, the quartz glass tube 201 has a shape that is substantially symmetrical with respect to a plane perpendicular to the longitudinal direction Dv at the center thereof. Then, the quartz glass tube 201 has two discharge electrodes 203a and 20a in a spherical bulb portion 212 at the center thereof.
3b by a known method along the longitudinal direction Dv,
They are held opposite each other.

In the quartz glass tube 201, the first electrode portion 208 is provided by the bulb portion 212 in the longitudinal direction Dv.
a and a second electrode portion 208b. First electrode part 20
In 8a, Mo (molybdenum) foil 204 for vacuum sealing
a is connected to the discharge electrode 203a, and the external electrode connecting terminal 205a is connected to the Mo foil 204a. Similarly,
In the second electrode portion 208b, a vacuum sealing Mo (molybdenum) foil 204b is connected to the discharge electrode 203b, and an external electrode connecting terminal 205b is connected to the Mo foil 204b.

In the figure, the first electrode portion 208
In a, vacuum sealing has already been performed, and an example in which the second electrode portion 208b on the open end side is sealed is shown. However, the present invention is similarly effective when the both ends of the first electrode portion 208a and the second electrode portion 208b are opened by the method described below.

Further, as described above, regarding each component, if it is the electrode portion 208, reference numeral 208 representing the electrode portion, such as the first electrode portion 208a and the second electrode portion 208b.
Is suffixed with a suffix a or b for individually identifying whether it is the first or second electrode portion. further,
The discharge electrode 203, the Mo foil 204, and the external electrode connecting terminal 205 belonging to each of the first electrode portion 208a and the second electrode portion 208b are also suffixed with a or b, so that the first electrode portion 208a is attached to each of them. It is discriminated whether it belongs or belongs to the second electrode portion 208b.

However, if it is not necessary to make a distinction, hereinafter, for example, simply 20 will be used without adding a suffix.
Only 8, 203, 204, and 205 shall be represented. In addition to these, in each of the above-mentioned and later-described elements identified by adding a suffix in the present specification, similarly, when expressed without adding a suffix, the individual suffixes are omitted. It means that no distinction is made.

The fusion bonding apparatus WLP7 is a quartz glass tube 2
A vacuum exhaust pipe 206 is airtightly connected to the open end of 01. A gas cylinder 301 storing rare gas is connected to the vacuum exhaust pipe 206 via an open / close valve 305, a vacuum pump 303 is connected to the vacuum exhaust pipe 206 via an open / close valve 306, and a pressure regulating valve 308 is connected to the vacuum exhaust pipe 206. In this way, the vacuum exhaust pipe 2
06, gas cylinder 301, vacuum pump 303, open / close valve 3
05, the opening / closing valve 306, and the pressure regulating valve 308, the pressure reducing mechanism VPR ′ similar to the pressure reducing mechanism VPR shown in FIG.
Is configured.

The fusion-bonding apparatus WLP7 is further provided with an irradiation section 20 which is irradiated with the laser light L of the quartz glass tube 201.
An optical pyrometer 250 for measuring the temperature of 7 is provided.
The optical pyrometer 250 generates a temperature signal St indicating the measured temperature and feeds it back to the laser device 2. The laser device 2 determines the quartz glass tube 201 based on the temperature signal St.
The irradiation part 207 is irradiated with the laser beam L and heated until the temperature reaches the predetermined temperature Tp.

The sealing operation of the quartz glass tube 201 in the fusion bonding apparatus WLP7 will be described below. First, the open end of the second electrode portion 208b of the quartz glass tube 201 is hermetically connected to the vacuum exhaust pipe 206 of the pressure reducing mechanism VPR ′.
Next, the on-off valve 306 is opened and the vacuum pump 303 is operated to change the internal pressure P5 of the pressure reducing mechanism VPR ′ to the external pressure P3.
When the lower first predetermined pressure P5a is reached, the opening / closing valve 306 is closed and the vacuum pump 303 is stopped. Needless to say, the internal pressure of the quartz glass tube 201 that is airtightly connected to the pressure reducing mechanism VPR ′ by the vacuum exhaust tube 206 is also P5.

Next, the opening / closing valve 305 is opened, the gas cylinder 301 is opened, and a rare gas is injected into the pressure reducing mechanism VPR ′, so that the internal pressure P5 of the pressure reducing mechanism VPR ′ is lower than the external pressure P3. When P5b is reached, the on-off valve 30
Close 5 The internal pressure P5 of the pressure reducing mechanism VPR ′ is monitored by the pressure regulating valve 308, and based on the monitoring result, the gas cylinder 301, the vacuum pump 303, the open / close valve 3
05 and the opening / closing valve 306 are controlled to control the first predetermined pressure P5a and the second predetermined pressure P5b, respectively.
It can be set to (P5a <P5b <P5).

As described above, the second electrode portion 208 of the quartz glass tube 201 in which the rare gas is injected at the second predetermined pressure P5b.
In order to seal b, the laser device 2 is moved in the longitudinal direction Dv to irradiate the irradiation section 207 with the laser light L, and the heating temperature of the irradiation section is monitored by the optical pyrometer 250.
Then, a predetermined temperature Tp at which the quartz glass tube 201 melts
The irradiation unit 207 is heated up to. Instead of moving the laser device 2 in the longitudinal direction Dv, the quartz glass tube 201
May be exercised.

When the irradiation section 207 reaches the melting temperature Tp,
The internal pressure P5 of the quartz glass tube 201 becomes a pressure P5b ′ higher than the second predetermined pressure P5b by heating, but it is still significantly reduced compared to the external pressure P3. for that reason,
When the irradiation unit 207 is melted and softened by the heat of the laser, the wall portion forming the irradiation unit 207 of the quartz glass tube 201 is shrunk inward due to the differential pressure (P3-P5b ′) from the atmospheric pressure P3. Pressed against each other. Then, the walls of the irradiation portion 207 that have melted over time are melt-bonded to each other, and the discharge electrode 203b and the Mo foil 20 are interposed therebetween.
The quartz glass tube 201 is hermetically sealed in a vacuum state with 4b and the external electrode connection terminal 205b sandwiched therebetween.

When melting quartz glass, a CO ₂ laser having a wavelength of 10.6 μm is suitable for the laser device 202. That is, if the laser has a wavelength of 10.6 μm, even quartz glass can absorb energy, and irradiation of 300 W of CO ₂ laser for several seconds to 1 minute is sufficient to melt 1 cc of quartz glass. In the case of ordinary soda glass and borosilicate glass, the wavelength is 808 nm, 9
The system can be further simplified by using a small object such as a high output (500 W or less) semiconductor laser such as 15 nm.

With reference to FIG. 12, fusion welding apparatus WLP7
A modified example will be described. In the fusion bonding apparatus WLP7 ′, the laser light L is emitted while the quartz glass tube 201 and the laser device 202 are relatively moved in the longitudinal direction Dv. However, the irradiation part 20 of the quartz glass tube 201
In order to melt 7 uniformly, the glass tube should be placed in the longitudinal direction D
When the laser light L is irradiated while rotating in the Dr direction along v, uniform heating can be performed in the radial direction, and the shape can be accurately sealed. For this purpose, the fusion bonding apparatus WLP7 ′ according to the present modified example is provided inside the vacuum exhaust pipe 206 of the pressure reducing mechanism VPR ′ (not shown for visibility) inside the open end side.
The lathe 209 is hermetically connected via the sliding O-ring 210. The open end of the quartz glass tube 201 is hermetically connected to the single-sided lathe 209 instead of the vacuum exhaust tube 206.

As described above, except that the laser beam L is applied to the irradiation section 207 while the quartz glass tube 201 is rotated in the Dr direction by the single-sided lathe 209, the fusion bonding apparatus WL is used.
The operation in P7 ′ is the same as the operation in the above-described fusion bonding device WLP7, and thus the description thereof will be omitted. However, the irradiation width of the laser light L is set wider than the diameter of the glass tube 201 so that the irradiation can be performed as uniformly as possible. If the rotation speed is too slow, the degree of soaking will be poor, but if it is too fast, the glass tube will be twisted, so it is necessary to set appropriate rotation conditions according to the weight of the glass tube.

In this example, the quartz glass tube 201 is rotated by using the one-sided lathe 209, but there is basically no problem even if both the lathes are used. Furthermore, although an example is shown in which the second electrode portion 208b is temporarily sealed in advance and the inside of the glass tube is depressurized, the laser melting step of the main sealing is started and the second electrode is shown. The Mo foil portion 204b may be sealed.

Next, referring to FIGS. 13 and 14, the laser beam L is used to adjust the outer shape of the quartz glass tube 201 and to strengthen the sealing adhesion between the Mo foil 204 and the quartz glass tube 201. An example will be described in which the irradiation part 207 is melted and then the melting part is pressure-shaped by a shaping mold.

FIG. 13 shows a fusion bonding apparatus WL in the same example.
The side view of P7a is shown. In addition, the fusion bonding apparatus WLP7a
Is the fusion bonding apparatus WLP7 shown in FIGS. 11 and 12.
Further, the fusion bonding device WLP7 'has a configuration in which a shaping device (not shown) including a pair of shaping molds 211 and 211' is newly provided. Therefore, for visibility,
In FIG. 13, the pressure reducing mechanism VPR ′ and the optical pyrometer 2 are shown.
50 is omitted. Further, for drawing reasons, the laser device 2 is shown as being installed obliquely with respect to the quartz glass tube 201, but the laser device 2 is arranged with respect to the longitudinal direction Dv of the quartz glass tube 201. It is installed almost vertically.

FIG. 14 shows a plan view of the fusion bonding apparatus WLP7a whose side surface is shown in FIG. The quartz glass tube 201 is installed so that the Mo foil 204 is substantially parallel to the pressing surfaces of the pair of shaping molds 211 and 211 '.
Therefore, since the laser light L is not blocked by the shaping molds 211 and 211 ′, only the reflection of the laser light L needs to be taken into consideration. For that purpose, for example, the irradiation of the laser beam L is stopped at the time of entering the press contacting process, and the shaping molds 211 and 21 are
It suffices that the laser light L is not reflected by 1'or the like and does not affect the operator or the like.

The electrodes 203 of a discharge lamp or a halogen lamp, which are usually made of quartz glass, are vacuum sealed and sealed by pressure welding of the Mo foil 204 and the quartz glass tube 201. Metal (discharge electrode 203 and external connection terminal 20
The coefficient of thermal expansion of 5) is significantly larger than the coefficient of thermal expansion of quartz (quartz glass tube 201). Therefore, when the completed lamp becomes hot during use, the discharge electrode 203a and the discharge electrode 203b having a large thermal expansion fixed by the quartz glass tube 201 having a small thermal expansion expand toward each other. Is relaxed by utilizing the plastic deformation of the thin Mo foil 204. As shown in FIGS. 13 and 14, shaping molds 211 and 211 ′ for irradiating the laser beam L from one direction and making pressure contact are installed on both sides of the quartz glass tube 201. A pair of shaping molds 211 and 21
1'moves toward each other in the Dc direction and presses the sealing portion (irradiation portion 207) of the electrode portion 208 of the quartz glass tube 201 placed between them to press-contact each other.

When the conventional gas burner is used, the burner head for melting needs to be installed in the vicinity of the melting portion, so that the burner needs to be moved once when the process of pressure welding is started. However, when the laser light L is used as in the present embodiment, it is not necessary to move the laser device 2 which is the heat source portion from the vicinity of the quartz glass tube 201, so that the pressure welding process can be easily performed. Therefore, the system of the movable part can be simplified.

(Eighth Embodiment) With reference to FIG. 15, a fusion bonding apparatus according to an eighth embodiment of the present invention will be described. The fusion bonding apparatus WLP8 according to the present embodiment is
Suitable for welding ceramics or vacuum sealing.
The fusion bonding apparatus WLP8 is a vacuum container 2 that is hermetically connected to the above-described pressure reducing mechanism VPR ′ (not shown for visibility).
Including 14. A laser beam window 218 is provided in the vacuum vessel 214, and the laser beam L emitted from the laser device 2 provided outside the vacuum vessel 214 and condensed by the condensing lens 6 passes through the laser beam window 218 to the inside. It is configured to irradiate the melt placed in the.

Ceramic tube 2 provided with discharge electrode 203
The ceramic tube 213 is positioned at a position where the laser beam L passing through the laser beam window 218 illuminates the sealing part in a state where the melting frit 215 for bonding is previously inserted in the sealing part between the cermet part 216 and the cermet part 216. And cermet parts 216
Is installed in the vacuum container 214. It should be noted that an annular susceptor 217 extending over the outer periphery of the sealed portion is provided outside the sealed portion.
Is installed. Further, a direction D parallel to the longitudinal direction Dv of the ceramic tube 213 is applied from both sides of the molten frit 215.
A pressure contactor 219 that moves to c is provided. The susceptor 217 is provided on the outer peripheral portion of the sealing portion, receives the laser light L radiated toward the sealing portion at the outer peripheral portion thereof, absorbs its thermal energy, and then seals from the inner peripheral portion thereof. The heat utilization efficiency of the laser light L is increased by radiating the heat toward the portion.

The susceptor 217 may be made of steel or stainless steel. Further, in order to raise the temperature to around 2000 ° C., it may be made of C (carbon) or SiC (silicon carbide). Basically, in order to prevent oxidation,
You will be working in a rare gas atmosphere. In such a state, the ceramic tube 213 and the cermet component 216 are installed and prepared, and then the vacuum hermetic sealing work is performed in the steps described below.

Step 1. With parts such as the ceramic tube 213 installed in the vacuum container 214, first, vacuum exhaust is performed.

Step 2. Next, the vacuum container 214 is filled with a rare gas or the like so as to have a predetermined pressure. At this time, at least the inside of the ceramic tube 213 is kept at a pressure lower than the atmospheric pressure P3 (internal pressure P5). When the atmospheric pressure is P3 or higher at room temperature, or when the atmospheric pressure is P3 or higher when heated,
A cooling trap (not shown) is provided to cool the gas or the like in the vacuum container 214 and reduce its volume, so that the atmospheric pressure P
A reduced pressure condition is applied to No. 3.

Step 3. In the state described above, the vacuum container 214
The laser light L is applied to the susceptor 217 through the laser light window 218 installed in the susceptor 217 to absorb the heat and heat the susceptor 217, and the radiant heat melts the melting frit 215 located on the inner peripheral side of the susceptor 217. Usually, frit 21
Since No. 5 melts at about 500 to 600 ° C., the melting frit 215 is melted as compared with the case of melting and joining quartz glass or ceramic itself, which must be heated to a high temperature of 1500 to 2000 ° C. to melt. It goes without saying that it is more efficient to bond the ceramic tube 213 and the cermet component 216 together.

Step 4. In the above-mentioned state, the cermet part 216 and the ceramic tube 213 are pressure-welded from both sides by the pressure-contacting device 219.

By the process as described above, vacuum hermetic sealing can be realized in a state where the electrodes and the like are inserted in the ceramic tube. Since the melting portion is defined by the susceptor 217 for absorbing heat from the laser, it is possible to efficiently melt and heat only a predetermined position. Moreover, in step 2, by using a cooling trap, a substance having a high vapor pressure, such as mercury, metal halide, etc., can be stored in the ceramic tube 213.
It enables the encapsulation of the chemicals required for the lamp.

In this case, a YAG laser is used as the laser light source,
An excimer laser or a semiconductor laser may be used. Quartz glass may be used as the material of the laser light window 218. For more uniform heating, the ceramic tube 213 may be rotated or the susceptor 217 may be rotated.

If a material having a high thermal conductivity is used for the susceptor 217, soaking property is also improved. Carbon and tungsten have about 10 to 100 times the conductivity of glass materials. Further, when SiC is used, sublimation can be suppressed as compared with carbon, and the heating temperature can be raised to a high temperature. Further, for low temperature heating at 1000 ° C. or lower, stainless steel, steel, etc. may be used.

Further, in order to improve the soaking property, the susceptor 2
It suffices to increase the thickness of 17 to increase the heat capacity. In some cases, if a heat insulating material such as alumina is provided around the susceptor 217, the heat insulating property can be further improved. Furthermore, if you change the shape of the susceptor,
Since the melted portion can be designed so as to have a desired temperature distribution, it is possible to design heat according to the shape of the portion to be melted.

FIG. 16 shows another modification of the fusion bonding apparatus WLP8 described with reference to FIG. 15 as another method for sealing the ceramic tube 213. in this way,
As shown in FIG. 16, the exhaust pipe 220 is provided directly on the ceramic pipe 213. Then, in the fusion bonding apparatus WLP8,
The entire vacuum device 214 is evacuated and the whole is filled with gas. However, the fusion bonding apparatus WLP8 ′ according to the present modification example
In the above, in the fusion bonding apparatus WLP7 and the fusion bonding apparatus WLP7 ′ described above, vacuum sealing is performed by the same process as performed for the quartz glass tube 201. When manufacturing a ceramic lamp or the like, the discharge electrode 20 is previously prepared.
3 is sintered.

As shown in FIG. 16, the ceramic exhaust pipe 2
Through the vacuum exhaust pipe 206 connected to the pressure reducing mechanism V.
After exhausting the inside of the ceramic tube 213 by PR '(not shown) and enclosing a chemical material such as a buffer gas, the frit (2
15) or the sealing member 221 such as ceramics to the exhaust port 2
It is installed at 22. In this state, since the ceramic tube 213 is not hermetically sealed in a vacuum, the sealed portion is irradiated and melted with the laser light L for melting, and the solidified portion is baked and solidified.
Complete the vacuum seal.

When this method is used, the vacuum vessel 214 shown in FIG. 15 is not required, and the same method as the sealing of the quartz glass tube is adopted, and the ceramic tube 213 itself is used as an exhaust device. P3 and ceramic tube 213
Vacuum sealing can be performed with a pressure difference from the internal pressure P5. Furthermore, if only the ceramic material is used for sealing, there are few substances that react with the lamp encapsulating material and the constituent substances of the lamp, so that it is possible to create a long-life lamp.

(Ninth Embodiment) With reference to FIG. 17, a fusion bonding apparatus according to a ninth embodiment of the present invention will be described. The fusion bonding apparatuses WLP7, WLP7 ', WLP7a, WLP according to the above-mentioned seventh and eighth embodiments.
8 and WLP8 'were based on one-way laser irradiation. However, when irradiating and melting the sealed portion, soaking irradiation is desirable as much as possible. In order to realize the object, the fusion bonding apparatus WLP9 according to the present example uses a plurality of laser light sources to irradiate the ceramic or quartz glass, which is the object 224, with laser light from the circumferential direction to perform fusion bonding. Is.

The fusion-bonding device WLP9 includes four laser devices 2a, 2b, 2c and 2d, and four laser beams La from four laser light sources, each of which is composed of condensing lenses 6a, 6b, 6c and 6d. Lb, L
The object 224 is irradiated with c and Ld. It is needless to say that this fusion bonding apparatus WLP9 can also be configured by combining the pressure reducing mechanism VPR ′ and the optical pyrometer 250, like the fusion bonding apparatuses WLP7 to WLP8 shown in FIGS. 11 to 16.

By using this device, not only can the object be heated uniformly, but the power of each laser itself can be reduced, and a small laser device can be used. That is, in the laser device, as the power increases, the length of the oscillation tube becomes longer and longer, and the device itself becomes larger. On the other hand, when the power is reduced, the laser device can be downsized accordingly. In terms of cost, it is advantageous to use a plurality of small lasers.

FIG. 18 shows a fusion bonding apparatus W shown in FIG.
As a modified example of the LP9, there is shown a fusion-bonding device WLP9 ′ for branching the output of one laser device 2 using an optical fiber 225 and irradiating it from the periphery of an object. Since the output decreases when the optical path length is long, it is necessary to adjust the fiber at the far portion of the irradiation to be thick, and for the irradiation at the near portion to use a thin fiber so that the output is as uniform as possible.

(Tenth Embodiment) Referring to FIG.
A fusion bonding apparatus according to the tenth embodiment of the present invention will be described. The fusion bonding apparatus WLP10 according to this example is
The second electrode portion 208 of the silica glass tube 201 of the fusion bonding apparatus WLP7 or WLP7 ′ shown in FIG. 11 or 12.
It has basically the same structure as the case where the reflecting mirror 225 is provided around b.

The reflecting mirror 225 is preferably formed into an integrating sphere, and a hole 226 into which the quartz glass tube 201 is inserted and a hole 227 into which the laser light L is incident are provided inside the reflecting mirror 225. When the quartz glass tube 201 is installed in the insertion hole 226 and laser is emitted from the irradiation hole 227, the laser light is reflected inside the reflecting mirror 225 which is an integrating sphere, and the welded or sealed portion is uniformly heated.

Although the reflecting mirror 225 has an integrating sphere shape, any shape may be used as long as it can accurately irradiate the irradiated portion.
Further, since silica is evaporated when the quartz glass is melted, if a small exhaust nozzle is prepared in the vicinity of the insertion hole 226 of the reflecting mirror and exhaust is performed from there, there is no fear of dust.
If there is no problem with the light converging property, a hole may be made somewhere in the reflecting mirror 225 to exhaust dust. Further, when using a plurality of lasers or combining them with fibers, the number of holes 227 for incidence may be increased. Since the sample is covered with the reflecting mirror in this manner, the stray light that the laser light goes around hardly adversely affects the operator or the like.

Moreover, in order to prevent the reflecting mirror from being heated and damaged, it suffices to cool the outside of the reflecting mirror by passing wind or water. Further, in the case where a substance that easily evaporates is enclosed in the object to be melted, if the substance is placed outside the reflecting mirror 225, the material can be welded and sealed without evaporating.

As described above, by welding or vacuum-sealing quartz glass, ceramics, etc. using the laser beam L, welding can be performed with higher accuracy than in the conventional case. In particular, when a chemical substance that easily evaporates is enclosed in the object to be melted, it can be sealed particularly accurately. In particular, when the size of the object to be melted is being reduced, it becomes possible to perform welding on a place other than necessary without giving a heat effect. In addition, when shaping the molten part, the relationship of the arrangement of the equipment is simplified, so the process stability,
Maintainability is also improved.

[Brief description of drawings]

FIG. 1 is a block diagram showing a configuration of a fusion bonding apparatus according to a first embodiment of the present invention.

FIG. 2 is a block diagram showing a modified example of the fusion bonding apparatus of FIG.

3 is a schematic diagram showing an airtight structure of a sliding portion between a vacuum exhaust pipe and a glove box in the fusion bonding apparatus of FIG.

FIG. 4 is a schematic diagram showing the structure of a laser absorber used in the fusion bonding apparatus of FIG.

FIG. 5 is a block diagram showing a configuration of a fusion bonding apparatus according to a second embodiment of the present invention.

FIG. 6 is a block diagram showing a configuration of a fusion bonding apparatus according to a third embodiment of the present invention.

FIG. 7 is a block diagram showing a modified example of the fusion bonding apparatus shown in FIG.

FIG. 8 is a block diagram showing a configuration of a fusion bonding apparatus according to a fourth embodiment of the present invention.

FIG. 9 is a block diagram showing a configuration of a fusion bonding apparatus according to a fifth embodiment of the present invention.

FIG. 10 is a block diagram showing a configuration of a fusion bonding apparatus according to a sixth embodiment of the present invention.

FIG. 11 is a block diagram showing a configuration of a fusion bonding apparatus according to a seventh embodiment of the present invention.

12 is a block diagram showing a modified example of the fusion bonding apparatus shown in FIG.

13 is a block diagram showing an embodiment of the fusion bonding apparatus shown in FIG.

FIG. 14 is a conceptual plan view of a shaping portion of the fusion bonding apparatus shown in FIG.

FIG. 15 is a block diagram showing a fusion bonding apparatus according to an eighth embodiment of the present invention.

16 is a block diagram showing a modified example of the fusion bonding apparatus shown in FIG.

FIG. 17 is a block diagram showing a fusion bonding apparatus according to a ninth embodiment of the present invention.

18 is a block diagram showing a modified example of the fusion bonding apparatus shown in FIG.

FIG. 19 is a block diagram showing a fusion bonding apparatus according to a tenth embodiment of the present invention.

FIG. 20 is a block diagram showing a conventional fusion bonding apparatus using a laser beam in the related art.

[Explanation of symbols]

WLP1 to WLP10 Melt joining apparatus according to the embodiment of the present invention GPR Glove box internal pressure adjusting mechanism GAR Glove box atmosphere refining mechanism VPR, VPR ′ Pressure reducing mechanism VR Vacuum container rotating mechanism 1 Glove box 2 Laser device 2b Laser input power source L ′ Leakage laser Light 2d Laser absorber 3 Molten object 3L Lid 4 Irradiation part 5 Laser light window 6 Condenser lens 7 Vacuum exhaust tube 8 Lamp electrode 9 Intermediate frit 10 Vacuum pump 11 Gas cylinder 11 High vapor pressure substance RF Refrigerant 13 Cooling device 13P Cooling pipe 13T Cooling tank 14 High vapor pressure material 15 End part of a vacuum container 16 in which a substance having a high vapor pressure is stored Liquefied or solidified Xe 18 Introduction port 19 Valve 20 Vacuum pump Ev Evaporated substance 21 Pressure control device 22i Intake pipe 22o Exhaust pipe 23 Circulation pump 24 Filter 25 Dust Collection Chamber 25a Dust Collector 26 Laser Output Monitor 26 27 Condenser Lens Drive Motor 28 Pressure Control Valve 30 Atmospheric Gas Purifier 32 Gas Inlet Port 33 Sliding O-Ring 34 Vacuum Evacuation Unit 35 Partition 36 Vacuum Pump 37 Reflection Mirror 38 Vacuum gauge 39 Vacuum O-ring 40 Clamping device 41 Rotating motor 43 Exhaust valve 44 Female screw part 45 Male screw part 46 Roller bearing 50 Double lathe WLC Conventional laser heating / melting joining device 101 Sealed container 102 Vent 103 Substrate 104 Container body 105 Packing 106 Laser transmission window 107 Laser device 108 Pressure gauge 109 Vent pipes 109a, 109b Branch pipe 110 Vacuum pump 111 Open / close valve 112 Gas cylinder 113 Valve device 114 Clamping member 115 Encapsulant 116 Light emitting tubes 117a, 117b Electrodes 118a, 118b Closing body 1 19 Heat Melt Sealant 120 Gap 121 Reflector 201 Quartz Glass Tubes 203a, 203b Discharge Electrodes 204a, 204b Mo Foil 204 'Mo Mo for Sealing 206 on Second Electrode Side 206 Vacuum Exhaust Pipe 207 Irradiation Part 208a First Electrode Part 208b 2nd electrode part 209 One-sided lathe 210 Sliding O-ring 211, 211 'Shaping type 212 Valve part 213 Ceramic tube 214 Vacuum container 215 Melting frit 216 Cermet 217 Susceptor 218 Laser light window 219 Pressure contactor 220 Ceramic exhaust pipe 221 Sealing part 222 Exhaust Port 223 Laser irradiation target 224 Optical fiber 225 Reflector 226 Sample insertion port 227 Laser irradiation port

─────────────────────────────────────────────────── ─── Continuation of the front page (72) Inventor Meguro Satoshi 1006 Kadoma, Kadoma City, Osaka Prefecture Matsushita Electric Industrial Co., Ltd. (72) Inventor Sozo Sakuta 1006 Kadoma, Kadoma City, Osaka Matsushita Electric Industrial (56) References JP-A-8-17346 (JP, A) JP-A-53-67272 (JP, A) JP-A-4-339587 (JP, A) JP-A-63-175315 (JP, A) JP-A-6-349410 (JP, A) JP-A-55-24327 (JP, A) JP-A-6-150825 (JP, A) (58) Fields investigated (Int.Cl. ⁷ , DB name) ) B23K 26/00 310 B23K 26/12 H01J 9/40

Claims (5)

(57) [Claims] 1. An airtight glove box that is shielded from the outside, an object made of either quartz glass or a ceramic material contained in the glove box, a laser device and a collector installed outside the glove box. The laser device provided outside the glove box, comprising: dust means and internal pressure control means for keeping the first pressure, which is the internal pressure of the object, lower than the second pressure, which is the internal pressure in the glove box. Any part of the object heated and melted by the laser beam emitted from is contracted and welded by the pressure difference between the first pressure and the second pressure, and dust and dust generated during the contraction and melting are removed. In the fusion bonding apparatus for removing by dust collecting means, between the predetermined portion of the object and the laser device,
Provided to block the laser light emitted from the laser device
Further provided with a susceptor, the susceptor having an annular shape including the object therein.
The heat energy of the laser light received at the outer circumference
Radiates toward a predetermined part of the object from
The laser beam is rotated about the target object and
Ri, characterized in that it is more uniformly heated, melt bonding device. 2. An airtight glove box with an outside shut off.
And quartz glass in the glove box and
Objects composed of any of the ceramic materials
And a laser device installed outside the glove box.
Setting and dust collecting means, and a first pressure which is an internal pressure of the object.
The force is the second pressure which is the internal pressure in the glove box.
It is equipped with internal pressure control means for maintaining a smaller decompression,
Emitted from the laser device outside the box
Any part of the object heated and melted by laser light
Is reduced by the pressure difference between the first pressure and the second pressure.
Dust and dust generated by shrinkage welding and shrink fusion
The fusion bonding apparatus for removing with a dust collecting means further comprises a cooling means for partially cooling the object, wherein the cooling means is any of cold air, cold water, liquid nitrogen, etc.
Refrigerant means for storing some refrigerant, and refrigerant from the refrigerant means
Is introduced into the refrigerant means after winding around the object.
A melt-bonding device, further comprising: a coolant circulating means for circulating the liquid.
Place 3. An airtight glove box that shuts off the outside.
And quartz glass in the glove box and
Objects composed of any of the ceramic materials
And a laser device installed outside the glove box.
Setting and dust collecting means, and a first pressure which is an internal pressure of the object.
The force is the second pressure which is the internal pressure in the glove box.
It is equipped with internal pressure control means for maintaining a smaller decompression,
Emitted from the laser device outside the box
Any part of the object heated and melted by laser light
Is reduced by the pressure difference between the first pressure and the second pressure.
Dust and dust generated by shrinkage welding and shrink fusion
In the fusion welding device that removes by dust collecting means, focus on the vicinity of a predetermined portion of the object to be heated and fused.
Further comprising a reflecting mirror, which is an integrating sphere and has the pair inside thereof.
A predetermined portion of the elephant is held, and the reflecting mirror is
A first opening into which the object is inserted, and
At least one second opening through which laser light is incident is provided
And the laser light incident from the second opening is integrated.
The first opening is reflected inside the reflecting mirror, which is a sphere.
Evenly irradiate the specified part of the object inserted from
A fusion bonding device characterized by heating. 4. An airtight glove box that shuts off the outside.
And quartz glass in the glove box and
Objects composed of any of the ceramic materials
And a laser device installed outside the glove box.
Setting and dust collecting means, and a first pressure which is an internal pressure of the object.
The force is the second pressure which is the internal pressure in the glove box.
It is equipped with internal pressure control means for maintaining a smaller decompression,
Emitted from the laser device outside the box
Any part of the object heated and melted by laser light
Is reduced by the pressure difference between the first pressure and the second pressure.
Dust and dust generated by shrinkage welding and shrink fusion
In the fusion welding device that removes by dust collecting means, focus on the vicinity of a predetermined portion of the object to be heated and fused.
Further comprising a reflecting mirror, which is an integrating sphere and has the pair inside thereof.
Predetermined portion of the elephant product is retained, and the reflector,
Further, an opening for sucking dust inside the reflecting mirror
The fusion bonding apparatus is characterized by being provided with. 5. An airtight glove box with an exterior shut off.
And quartz glass in the glove box and
Objects composed of any of the ceramic materials
And a laser device installed outside the glove box.
Setting and dust collecting means, and a first pressure which is an internal pressure of the object.
The force is the second pressure which is the internal pressure in the glove box.
It is equipped with internal pressure control means for maintaining a smaller decompression,
Emitted from the laser device outside the box
Any part of the object heated and melted by laser light
Is reduced by the pressure difference between the first pressure and the second pressure.
Dust and dust generated by shrinkage welding and shrink fusion
In the fusion welding device that removes by dust collecting means, focus on the vicinity of a predetermined portion of the object to be heated and fused.
Further comprising a reflecting mirror, which is an integrating sphere and has the pair inside thereof.
A predetermined part of the elephant is held and the outer circumference of the reflecting mirror
On the side, further comprising cooling means, to cool the reflecting mirror
A fusion bonding device characterized by the following.