JPH11126111A - 移動装置 - Google Patents

移動装置

Info

Publication number
JPH11126111A
JPH11126111A JP9289778A JP28977897A JPH11126111A JP H11126111 A JPH11126111 A JP H11126111A JP 9289778 A JP9289778 A JP 9289778A JP 28977897 A JP28977897 A JP 28977897A JP H11126111 A JPH11126111 A JP H11126111A
Authority
JP
Japan
Prior art keywords
moving object
motion
turning
moving
arm
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Pending
Application number
JP9289778A
Other languages
English (en)
Japanese (ja)
Other versions
JPH11126111A5 (enExample
Inventor
Yoshihiro Kami
喜裕 上
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Olympus Corp
Original Assignee
Olympus Optical Co Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Olympus Optical Co Ltd filed Critical Olympus Optical Co Ltd
Priority to JP9289778A priority Critical patent/JPH11126111A/ja
Publication of JPH11126111A publication Critical patent/JPH11126111A/ja
Publication of JPH11126111A5 publication Critical patent/JPH11126111A5/ja
Pending legal-status Critical Current

Links

Landscapes

  • General Electrical Machinery Utilizing Piezoelectricity, Electrostriction Or Magnetostriction (AREA)
  • Microscoopes, Condenser (AREA)
  • Control Of Position Or Direction (AREA)
JP9289778A 1997-10-22 1997-10-22 移動装置 Pending JPH11126111A (ja)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP9289778A JPH11126111A (ja) 1997-10-22 1997-10-22 移動装置

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP9289778A JPH11126111A (ja) 1997-10-22 1997-10-22 移動装置

Publications (2)

Publication Number Publication Date
JPH11126111A true JPH11126111A (ja) 1999-05-11
JPH11126111A5 JPH11126111A5 (enExample) 2004-12-09

Family

ID=17747647

Family Applications (1)

Application Number Title Priority Date Filing Date
JP9289778A Pending JPH11126111A (ja) 1997-10-22 1997-10-22 移動装置

Country Status (1)

Country Link
JP (1) JPH11126111A (enExample)

Cited By (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2009196060A (ja) * 2008-02-25 2009-09-03 Konica Minolta Opto Inc 駆動機構
JP2012524515A (ja) * 2009-04-17 2012-10-11 シーウェア システムズ 長い移動範囲を有するｍｅｍｓアクチュエータ
CN110323966A (zh) * 2019-08-12 2019-10-11 潍坊聚德电子有限公司 一种压电位移放大机构
CN117348230A (zh) * 2023-10-25 2024-01-05 深圳市汉诺精密科技有限公司 多自由度的纳米级精密定位平台

Cited By (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2009196060A (ja) * 2008-02-25 2009-09-03 Konica Minolta Opto Inc 駆動機構
JP2012524515A (ja) * 2009-04-17 2012-10-11 シーウェア システムズ 長い移動範囲を有するｍｅｍｓアクチュエータ
CN110323966A (zh) * 2019-08-12 2019-10-11 潍坊聚德电子有限公司 一种压电位移放大机构
CN117348230A (zh) * 2023-10-25 2024-01-05 深圳市汉诺精密科技有限公司 多自由度的纳米级精密定位平台

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