JPH11118357A - Heating treatment method of object body, and device therefor - Google Patents

Abstract

PROBLEM TO BE SOLVED: To improve the utilization efficiency of the thermal energy by heating an object in a condition where the object is levitated by blowing the gas from a lower part of the object in a heating space against the object. SOLUTION: A plurality of levitation members 20 are arranged on the inner side of a heating space 10 along the carrying direction of an object P with intervals. The levitation members 20 are long in the perpendicular direction to the moving direction of the object, and slightly wider than the object P. An exhaust member 27 is arranged between adjacent levitation members 20, and a suction stopping means 30 is arranged on one of adjacent exhaust members 27. Slits or a plurality of air-blow ports are provided in the width direction of the object, the object is levitated by blowing the gas from the air-blow ports against the object P. The levitation members 20 are provided with a rows of combustion ports in their center, and a flame (f) is generated to heat the object.

Description

DETAILED DESCRIPTION OF THE INVENTION

[0001]

BACKGROUND OF THE INVENTION 1. Field of the Invention The present invention relates to a method and an apparatus for heat treatment, and more particularly to a method and an apparatus for subjecting a raw material, an intermediate product or a final product to heat treatment in the production or processing of various products.

[0002]

2. Description of the Related Art Various heat treatments are used in the production of various products. Specifically, many effects achieved by heat treatments such as drying, dehydration, firing, reaction promotion, and surface modification are known. In order to improve the efficiency of the heat treatment, a heat treatment is performed by passing an object to be subjected to the heat treatment through a dome-shaped or tunnel-shaped heating space while conveying the object by a conveyor or the like.

[0003] An apparatus for performing such a heat treatment includes a heating zone and a heating zone for heating the target object to a temperature at which the heat treatment should be started along the moving (or transporting) direction of the target object. A heat treatment zone for exposing the object to a predetermined thermal environment (for example, maintaining the raised temperature for a predetermined time or subjecting the target object to a predetermined temperature change from the raised temperature); May not be obvious. In this specification, the heat treatment includes both such a temperature increase and a heat treatment. Further, the apparatus for performing the above-described heat treatment is:
Generally, after the heat treatment, a cooling zone for lowering the temperature of the target object to a predetermined temperature is provided after the heat treatment zone. The target object sequentially passes through these zones.

[0004]

However, in the above-described heat treatment method, the proportion of the heat energy supplied to the heat treatment apparatus, which is consumed by the heat treatment itself of the target object, is small. There is a problem that most of the energy is wasted and the efficiency of using heat energy is low, which causes a high cost of the heat treatment.

[0005] In the conventional heat treatment method, the reason why the heat energy utilization efficiency is low can be considered, for example, as follows: In a tunnel-shaped heat treatment space where a conveyor for moving an object moves in and out, an entrance is always open. Therefore, a part of the thermal energy supplied to the heating device is released from the entrance. It is said that the release of heat energy from such an entrance is about 30% of the heat energy supplied to the heating device. In the heat treatment space, the conveyor is heated in addition to the target object, so that a large amount of heat energy is required to heat a moving mechanism such as the conveyor. A moving mechanism such as a conveyor is complicated and has a large heat capacity, and a large amount of heat energy is required to heat such a conveyor. Since the conveyor moves the target object from before heating to after heating, when the conveyor exits the heating space, the heat energy supplied to the conveyor in the heating furnace is released to the outside and is wasted. Each time the conveyor circulates through the heat treatment space and enters and exits, a large amount of thermal energy is supplied to the conveyor and released to the outside without using the supplied thermal energy. It is said that the heat energy taken out by such a conveyor is about 20% of the supplied heat energy.

Further, in the conventional heat treatment apparatus, the amount of heat energy released to the outside from the wall constituting the heat treatment space is large, and about 45% of the supplied heat energy is released from the wall of the heat treatment space. It is said to be done. As a result, in the conventional heat treatment method, it is said that, out of the supplied heat energy, only 5% or less of the total heat energy that can be actually used for the heat treatment of the target object. Therefore, an object of the present invention is to solve the problems of the conventional heat treatment method and improve the utilization efficiency of heat energy.

[0007]

SUMMARY OF THE INVENTION The present invention provides a method for heat treating a target object, the method comprising levitation by blowing gas from below the target object toward the target object in a heat treatment space. The method is characterized in that the target object is heated in a predetermined state in a state where the object is heated.

[0008] In the present invention, the heat treatment may be any treatment for applying heat to the target object. By this heat treatment, at least one property (for example,
The moisture retention, electrical resistance, transmittance, formed film thickness or its uniformity, stress, etc.) change as predetermined. For example, the heating process includes a process of raising the temperature of the target object to a predetermined temperature for a predetermined time, a process of maintaining the temperature of the target object at a predetermined temperature for a predetermined time, and / or a process of exposing the target object to a predetermined temperature change condition. Including. The heat treatment is a treatment for applying heat as described above, but it is not always necessary to always apply heat during the heat treatment, and there may be a case where heat is not applied, in which case, heat radiation or the like Alternatively, the heat treatment temperature may decrease.

The target object is an object to be subjected to a heat treatment. The target object may be in any form and, therefore, may be in a complex form. In general, the target object has a plate-like, sheet-like or film-like form as a whole (these may be a continuous form such as a long strip-like form or a form divided into fixed lengths). Preferably, it has a dimension in the horizontal direction (or dimension) that is considerably larger than the dimension in the direction perpendicular to it (ie, thickness). In addition, in this specification, the horizontal direction means a direction in which a main surface defining a sheet-shaped target object spreads. It is preferable that the target object as a whole be in a sheet-like form, even if the target object has an uneven portion on one or both main surfaces.

The material constituting the target object is not particularly limited. For example, the target object may be made of ceramic, glass, metal, resin, other structural materials, or any combination thereof. 1 of the present invention
In one aspect, the target object may be formed by combining at least two target objects as described above. In this case, the target object formed by the combination may have a more complex shape even in a sheet-like form. It may be in a form. Specifically, for example, drying, dehydration,
Includes baking, reaction, reaction promotion, surface modification, sintering, thermosetting, heat melting, bonding, and the like. The target object in such processing includes, for example, a semiconductor substrate, a PDP (plasma display
anel) substrate, solar cell substrate, liquid crystal substrate, CRT (television cathode ray tube) and the like.

In the method of the present invention, levitating the target object by blowing the gas onto the target object means that the target object is floated in the gas. The force (dynamic or static pressure of the gas) that pushes the target object upward due to the gas colliding with the target object by blowing the gas from below the target object causes the gravitational force acting on the target object and By balancing, the target object is levitated in the surrounding gas. Normally, gas is ejected from an air supply port from below the target object to the lower surface (bottom surface) of the target object and perpendicular to the lower surface (bottom surface) of the target object to lift the target object. It is also possible to adjust the posture of the target object by blowing gas toward the upper surface and / or the side surface of the target object in addition to the lower surface of the target object.

Furthermore, if the direction in which the gas hits the lower surface of the target object is not perpendicular to the lower surface but is inclined, the gas can exert a force that can be divided into a horizontal component and a vertical component by the target object. Works. When the target object is stopped, the horizontal component force moves the target object in the direction of the component force, and when the target object is already moving, it depends on the direction of the component force. It acts to accelerate or decelerate the moving speed of the target object. For example, when gas is blown to a moving target object so as to exert a component force in a direction opposite to the moving direction, the movement of the target object can be reduced or stopped. The vertical component force is used to levitate the target object.

The gas is blown onto the target object by supplying the gas to the target object through an opening serving as an air supply port. Usually, in the heat treatment space, a plurality of, below the place where the target object is located and below the place where the target object is to be located (that is, on the moving path of the target object)
Preferably, a plurality of air inlets are provided, and the gas may be applied to the target object from the same direction or from different directions. In such a case, when the resultant force acting to push the target object by the gas supplied through the air supply port has a horizontal component force, the target object moves in the direction of the component force.

Specifically, an air supply port may be provided in the heat treatment space so as to blow gas vertically and upwardly at a plurality of locations on the lower surface of the target object. An air supply port may be provided in the heat treatment space so that gas is blown vertically and upward to a portion, and gas is blown diagonally and upward to another portion. How the gas is blown (and therefore how the vents are provided) depends on how the object is levitated and moved as required, depending on the person skilled in the art. Then, it can be easily selected based on the disclosure of the present specification.

Therefore, in the heat treatment method of the present invention,
The target object may move in a levitating state as described above during the heat treatment, or may stop in the levitating state. Further, the stop and the movement may be combined in the floating state. For example, the heat treatment method may include a sequence of performing a heat treatment by stopping in a floating state and then performing a further heat treatment while moving in a floating state, or a reverse sequence. Whether to stop or move the levitated target object can be selected according to the type of heat treatment required for the target object.

In the present invention, the movement and the stop relate to the presence or absence of a movement of the target object by a substantial distance along the horizontal direction. Stopping means a state where the target object does not move at least in the horizontal direction (hence, it may or may not move in the vertical direction). The movement means a state where the target object moves at least in the horizontal direction (hence, it may or may not move in the vertical direction).

In the case where the predetermined heat treatment is performed for a long time, it is preferable that the target object is levitated in a stopped state at a predetermined position and heat-treated, and then the target object is moved. Help me. In the case of a short-time heat treatment, it is preferable to perform the heat treatment while continuously moving (preferably at a constant speed) in a floating state in the heat treatment space, thereby increasing the treatment efficiency. It is also possible to combine these two methods, that is, heat treatment in a stopped state and heat treatment in a moving state.

In another method, the target object is moved by the gas in a state where the target object is levitated by the gas in the heating space, and the heat treatment itself is performed in a state where the target object is not levitated (for example,
(Mechanically supported in the vertical direction). In one preferred embodiment, the movement of the target object may be performed by mechanically applying a force to the target object while the target object is levitated by the gas in the heating space.
The heat treatment may be performed while the target object is moving or stopped, or at any one of these times.

The gas used to levitate the target object may be any gas that does not adversely affect the heat treatment of the target object or promotes heating. Generally, air, a gas for forming a heating atmosphere, for example, an inert gas such as nitrogen, a reactive gas, or a mixture thereof can be used. It is preferable that these gases are appropriately heated in accordance with the temperature of the heat treatment. In this case, both the heat treatment and the floating of the gas can be performed simultaneously. Combustion gas, which is a hot gas, can also be used if it does not adversely affect the target object.

The gas is ejected toward the target object through the air supply port as described above, and the air supply port can supply the gas so that a predetermined pressure can be applied to the target object in a predetermined direction. If so, there is no particular limitation. The air supply port may be in the form of, for example, a nozzle, a slit, a mesh, or the like, and the cross-sectional shape is not particularly limited, and may be, for example, a circle, an ellipse, a rectangle, or the like. Usually, a plurality of, preferably many, air supply ports are provided along a path in the heat treatment space in which the target object moves in a levitated state, so that the target object can pass through the heat treatment space in a levitated state. ing.

Generally, the air supply ports are provided in rows and / or columns (ie, in a row along and / or perpendicular to the path of movement) in the path of movement of a large number of objects. For example, an air supply port may be provided in a lattice shape. The number and arrangement of the air inlets depends on the heat treatment space, especially the path (length, width, etc.) through which the target object passes, and the weight (particularly per unit bottom area) depending on the target object to be processed. Weight) and width, and the height to be levitated, and the like. The height to be levitated (that is, the distance between the target object and the air supply port) may be any height as long as the target object can move smoothly.
It may be about 1 to 20 mm, and is usually about 0.5 to 3 mm in consideration of cost reduction accompanying consumption of the floating gas and enhancement of the reliability of the transport process due to thermal deformation of the target object. Good.

As described above, when using the method of levitating a target object by gas (gas levitating method), it is only necessary to substantially arrange an air supply port and a conduit reaching it in the heat treatment space. Gas supply mechanisms (eg, pumps, valves, control systems, etc.) can be located outside the heat treatment space, thus greatly simplifying equipment within the heat treatment chamber. As a result, the number of failures associated with the heat treatment apparatus is reduced, and maintenance is facilitated. In other words, the use of the gas levitation method has an advantage that it is not necessary to dispose a complicated mechanical operation mechanism in the high-temperature heat treatment space. Note that, as described above, levitating and moving a target object using gas itself is disclosed in, for example, JP-A-61-267394,
It is disclosed in JP-A-2-76242, JP-A-5-29238, and the like, and the disclosures of these patent documents constitute a part of this specification by this citation.

In one preferred embodiment of the present invention, as described above, the movement of the levitated target object is performed by using mechanical means (or force) instead of blowing the gas. When the heat treatment temperature is high, the density of the gas decreases, and in order to perform the movement using the gas in addition to the levitation of the target object, it may be necessary to provide a means for supplying a very large amount of gas. is there. In such a case, only the levitating of the target object is performed by gas, and the horizontal movement is performed by using mechanical force.

For example, when a mechanical force is instantaneously applied (for example, simply pressed) to a levitated object in the direction in which the object moves, the object tends to move in the direction of the applied force. At this time, when gas is sequentially ejected from the air supply port along the path along which the target object moves toward the moving target object, the gas sequentially supports the target object. Since the target object only floats in contact with the gas, the frictional force between the target object and the gas is small, and the gas blown from below acts as a kind of bearing under the target object, The target object can be moved at least some distance depending on the conditions at that time with substantially only the initial pressing force. Usually, the speed of the moving target object gradually decreases and eventually stops. Stopping the moving target object halfway can be performed, for example, by colliding with an obstacle existing on an extension of the moving direction and absorbing the kinetic energy of the target object into the obstacle.

Incidentally, by changing the magnitude of the pushing force, the moving speed and / or the moving distance can be changed. In this way, the structure and operation of the means used to push and stop the target object are relatively simple (for example, a simple structure may be used), and the acting force may be small.

Alternatively, at least one abutment element (or a stopper element) that moves in the heat treatment space in the same direction as the predetermined direction in which the target object is to be moved is provided in the heat treatment space, and the moving contact element floats. Abuts on a part of the target object in the depressed state and constrains it, so that the contact element keeps pushing the target object in a predetermined direction to move the target object. Since the target object is restricted by the contact element, the movement of the target object can be stopped by stopping the movement of the contact element. Also, by changing the moving speed of the contact element, the moving speed of the target object in the heat treatment space can be controlled. Such an abutment element is provided on a driving unit that moves on at least one side of the movement path of the target object in the heat treatment space, preferably on both sides of the movement path. Preferably, it is fastened to a continuous drive means such as a moving chain or belt, and the contact means moves / stops in response to operation / stop of such drive means, so that the target object is Move / stop.

In still another embodiment, when processing the object continuously, a plurality of support elements (for example, a carrier tray) which are arranged adjacent to each other in the heat treatment space and which can be levitated by gas are provided. Preparing, arranging the target object on each of the support elements, arranging the first support element at the entrance of the heat treatment space, then bringing the second support element into contact with the first support element, Applying a force and transmitting the force to an adjacent first support element to move and push the first support element into the heat treatment space, while placing the second support element at the heat treatment space inlet. Next, as before, the third
By disposing the support element at the entrance of the heat treatment space and abutting the second support element and disposing the third support element at the entrance of the heat treatment space, the second support element and the third support element that have already entered the heat treatment space can be inserted. The first supporting element is further advanced in the direction of movement. By repeating such an operation, the preceding support element is pushed by the subsequent support element and moves in the heat treatment space. in this case,
The support element is in a floating state in the heat treatment space by the gas blown from below. This method can be referred to as a plug flow method (or a tocorotene method (extrusion method) or a push method), in which a subsequent supporting element mechanically pushes a preceding supporting element. In this way, the support element with the target object moves intermittently.
That is, the levitating support element moves when a subsequent support element is pushed in and stops when the push-in is completed.

As described above, in order to stop the moving target object (or the carrier element including the same) in various ways, suction stopping means is used separately or in addition to the above-described stopping method. The moving target object (or the carrier element containing it) can be stopped. The suction stopping means is provided at a position where the levitating target object should be stopped, and the target object is drawn toward the suction stopping means (therefore, the target object stops in a levitated state at a certain position). In some cases, the target object is adsorbed by the suction stopping means. For example, a suction port for sucking gas from the atmosphere in which the target object floats, particularly from below the target object, may be provided, and this may be used as suction stop means.

More specifically, a gas suction port is arranged at a predetermined position on the movement path of the target object, and the gas around the target object is suctioned from the suction port so as to pass over the suction port. The target object is drawn toward the suction port, and the movement of the target object can be stopped. A device such as a pump for sucking gas can be connected to the suction port. At this time, if the suction force is large and is superior to the pressure of the gas from the air supply port that intends to levitate the target object,
The levitation state of the target object cannot be maintained. Therefore, when sucking gas while maintaining the floating state,
It is necessary to increase the amount of gas blown out from the air supply port. In this case, when the movement of the target object stops, it is necessary to stop the suction of gas and to reduce the amount of gas blown out from the air supply port.

As an example of such a suction stopping means, a so-called ejector-type suction stopping means having a main body and a sliding member described below can be employed. The pressurized gas path from which pressurized gas is supplied from one end and the pressurized gas is discharged from the other end, and the main body branches off from the middle of the pressurized gas path and opens toward the movement path of the target object. It has a suction path having a suction port. The sliding member covers an end of the main body portion where the suction port is opened, and is slidably fitted in a direction from the main body portion toward the target object.

In the suction stopping means, when the pressurized gas passes through the pressurized gas path, a suction force is generated in the suction path by the dynamic pressure, and the gas is sucked from the suction port of the sliding member. When the target object approaches the suction port of the sliding member, the space between the target object and the sliding member has a low pressure, and the sliding member is drawn to the target object. Then, the space between the target object and the sliding member becomes smaller and smaller. As a result, the pressure in this space is further reduced, and the sliding member is attracted to the target object. As a result, the movement of the target object is stopped by the main body to which the sliding member is attached. Thereafter, when the supply of the pressurized gas to the pressurizing path is stopped, the sliding member returns to the main body side, and the target object can move freely. In such a suction stopping means, if the supply of the pressurized gas is stopped immediately before the target object is attracted to the sliding member, the target object remains substantially in a floating state without contact between the target object and the sliding member. Can be stopped temporarily.

In the present invention, the target object is heated while the above-mentioned levitation and necessary movement are performed in the heat treatment space. In general, following the heat treatment, a temperature lowering operation for lowering the temperature of the target object from the heat treatment temperature to a lower temperature is performed. It is needless to say that the above-described method of floating and moving the target object can also be adopted in such a temperature lowering operation as necessary.

Accordingly, the heat treatment apparatus of the present invention has a heat treatment space having a temperature raising zone and a heat treatment zone, and optionally has a temperature lowering zone. The heating zone is an area where the temperature of the target object is raised from the initial temperature to a predetermined heat treatment start temperature, preferably for a predetermined time, and the heat treatment zone is a target object heated to a predetermined heat treatment start temperature. Preferably, it is an area which is maintained under a predetermined temperature condition for a predetermined time. Even if the predetermined condition is a constant temperature, the temperature changes as predetermined (including a case where the temperature decreases as a result of reducing the amount of heating or stopping the heating or as a result of heat loss). There may be. The temperature drop zone is an area where the temperature of the target object is lowered from the heat treatment temperature to a predetermined temperature, preferably for a predetermined time.

The heat treatment space in which the temperature of the target object is increased and the heat treatment is performed during the passage of the target object may have the same structure as the heat treatment space employed in the ordinary heat treatment apparatus. Generally, the heat treatment space has a dome shape or a tunnel shape surrounded by a heat insulating wall material, and a target object is arranged at an entrance of the heat treatment space, and thereafter, the target object passes through the heat treatment space. The target object is levitated by blowing gas at the entrance of the heat treatment space. The subsequent movement and stop of the target object
Any of the above methods may be applied. For example, gas may be blown obliquely onto the lower surface of the levitating target object to move the target object, the target object may be moved by mechanical force, or on a carrier element on which the target object can be placed. The target object may be placed and moved by the push method, or these may be combined.

In the heat treatment space, appropriate heating means are provided in the temperature raising zone and the heat treatment zone along the transfer path of the target object. The heating means may be any suitable conventional means that can be used for heating the object. The number and arrangement of the heating means can be appropriately selected according to the size of the heating space, the type of the heat treatment, and the like. The heating means may all be of the same type or different types depending on the purpose of the heat treatment. The heat insulation structure in the heat treatment space may be the same or different in the temperature raising zone and the heat treatment zone. Shielding means may be provided at the entrance to the heat treatment space and at the exit therefrom in order to suppress the transfer of atmospheric gas and heat in the heat treatment space between the inside of the space and its surroundings. For example, as the shielding means, an air curtain can be employed in addition to a door device that opens and closes mechanically.

As described above, a cooling zone may be provided downstream of the heat treatment space, if necessary. The target object subjected to the heat treatment may be cooled by natural cooling after exiting the heat treatment space in the temperature lowering zone,
The temperature can be forcibly lowered, or both can be combined. In the temperature lowering operation, the temperature of the target object may be lowered to room temperature, or only the temperature may be lowered to a predetermined temperature higher than room temperature.

Gas is blown as forced cooling means. Basically, the temperature of the gas used need only be lower than the temperature of the target object. In a preferred embodiment, the temperature is reduced in a plurality of steps, and the temperature of the gas in each step decreases stepwise, and the temperature of the target object is gradually increased by spraying the gas in order from the gas having the higher temperature. If the temperature is gradually lowered, the temperature can be rapidly lowered without causing any trouble such as thermal distortion in the target object.

In order to reduce the equipment space required for the cooling zone, in the cooling zone, the main surfaces of adjacent target objects are arranged so as to be stacked with a space therebetween (that is, a plurality of target objects are placed adjacent to each other on the main surface). Then, cooling and cooling can be performed while moving (in a state of being overlapped with an interval so that a space exists between them) (that is, moving in a direction perpendicular to the main surface of the target object). . When the target objects are overlapped in this manner, a smaller installation space is required in the temperature lowering zone than in the case where the target objects are arranged in the main surface direction and the temperature is lowered as in the heat treatment.

Therefore, for example, a combination of the above-described horizontal movement of the target object in the heat treatment space and the temperature drop in which the target objects are stacked and moved in the vertical direction and a low-temperature gas is blown in a stepwise manner is combined. it can. If the gas is blown at intervals of the target objects stacked at intervals in the direction perpendicular to the main surface so that the gas passes between the target objects, cooling is quickly performed from both surfaces of the target objects.

In the heat treatment space of the heat treatment apparatus of the present invention, it is particularly preferable to use a soaking sheet. The soaking sheet is a sheet material having good heat conductivity, and particularly preferably a sheet material having anisotropy in heat conduction and good heat conductivity. Such a soaking sheet is a material that tends to make the temperature distribution more uniform throughout the sheet material. Therefore, when the heat equalizing sheet is used in the heat treatment apparatus, uniform heating can be easily achieved as compared with the case where the heat equalizing sheet is not used. As used herein, uniform heating does not mean completely uniform,
This means that the degree of uniformity of heating is relatively improved as compared with the case where the soaking sheet is not used. As the heat equalizing sheet, a material that favorably transmits heat in the direction of the main surface is preferable. Used.

In a particularly preferred embodiment, a graphite sheet is used as the soaking sheet. The graphite sheet has high heat resistance and excellent thermal conductivity. Among the graphite sheets, highly oriented graphite sheets are preferred. This highly oriented graphite sheet is obtained by baking a resin sheet such as a polyimide resin into graphite, has a high orientation, and has a very high thermal conductivity in the plane direction as compared to the thickness direction. It has heat resistance of 3000 ° C. or more. Specifically, what is disclosed in JP-A-3-75211 can be applied as this graphite sheet, and the contents of this patent publication constitute a part of this specification by this citation.

In the heat treatment space of the heat treatment apparatus of the present invention, if a soaking sheet is arranged between the heating means and the object, the heat generated by the heating means is evenly distributed to the whole of the soaking sheet. Thus, the entire target object can be uniformly and quickly heated. Further, if the heat equalizing sheet is arranged outside the heating means, of the heat emitted from the heating means, the heat released toward the outside can be uniformly distributed to the entire surface of the heat equalizing sheet. In addition, the target object existing inside the heat equalizing sheet can be uniformly heated from the entire surface. As a result, the heat that escapes from the heating means to the outside can be used efficiently.

The heat equalizing sheet may be disposed both between the heating means and the object and outside the heating means. The soaking sheet is particularly effective when a heating means that locally generates high heat, such as a flame, is used as the heating means. Further, when the target object is heated and heated in a short time by the heating means that generates high heat, it is effective to prevent heating unevenness and thermal distortion from occurring. In the heat treatment zone,
This is also effective for surely maintaining the entire target object within a predetermined temperature range.

Further, in one preferred embodiment, a heating means which can be entirely heated is arranged outside the heating means which can be locally heated, and a soaking sheet is arranged between these heating means. Specifically, it is effective to arrange an electric heater between the soaking sheet and the target object, and to arrange a heat medium flow pipe outside the soaking sheet. The uniform heat sheet uniformizes the strong thermal energy generated in the heat medium flow pipe, and evenly heats the entire target object. If precise temperature control is performed with an electric heater, the entire target object can be kept constant in the heating processing space. It becomes easy to heat to the temperature. Such a heating mechanism is particularly effective in the heat treatment zone. It is preferable to arrange the heat equalizing sheet so as to surround a path in which the target object is moved in the heat treatment space. With this configuration, heat energy is uniformly supplied to the target object in the inner space of the heat equalizing sheet, so that quick and uniform heating can be performed.

In a more preferred embodiment, if the object is doubly surrounded by a soaking sheet and heating means is disposed between the two soaking sheets, the heat generated by the heating means is efficiently used. The heat is transmitted to the inner and outer heat equalizing sheets, and is uniformly spread over the entire heat equalizing sheet, so that the entire target object can be uniformly heated from the entire heat equalizing sheet. Heat may be supplied to a part of the soaking sheet to transfer heat to the entire surface according to the characteristics of the soaking sheet, thereby heating the target object via the soaking sheet. In this case, it is possible to efficiently supply heat energy to the target object via the heat equalizing sheet without disposing the heating means as a heat supply source on a moving path of the target object or a place close to the target object. it can.

The wall surface of the heat treatment space of the heat treatment apparatus of the present invention is formed using a heat insulating material. The insulation may be formed from commonly used materials,
The structure of the heat insulating material may be the same as that generally used. As the material of the heat insulating material, for example, heat-resistant brick,
Heat-resistant glass, heat-resistant ceramics and the like are used. It is preferable to use a heat insulating material having a high vacuum space inside as the heat insulating material. Since the vacuum space blocks heat transfer, the heat insulation of such a heat insulating material is extremely high.

In one preferred embodiment, among the surfaces constituting the heat insulating material, an infrared reflecting film is formed on the surface facing the moving path of the target object. In this aspect, the thermal energy that is going to pass through the heat insulating material can be efficiently reflected toward the target object by the infrared reflecting film. As the infrared reflective film, for example, a material having a desired reflection wavelength characteristic such as a metal oxide film, a SiO ₂ / TaOx multilayer film, or a ceramic material can be used.

In another preferred embodiment, the heat insulating material is in the form of a heat insulating block that can be connected to each other. Such a block configuration facilitates the design and manufacture of the structure of the heat treatment space. The connection between the insulating blocks may be implemented by a structure in which the blocks themselves fit and / or engage with each other. Alternatively, the connection can be made using another connection fitting. For example, the heat insulating block can be attached to the inner wall surface of the heat treatment space with metal fittings or the like.

A heat equalizing sheet is arranged on the inner side (ie, the side facing the target object) and / or the outer side (ie, the side facing the inner side) of the heat insulating material or the wall constituted thereby. Is preferred. Therefore, when the heat insulating material is constituted by a heat insulating block, a heat insulating block to which a heat equalizing sheet is attached on the inner surface side and / or the outer surface side may be used.

The heat treatment space of the heat treatment apparatus of the present invention is as follows.
It is preferable that the heat insulating material has a muffle structure surrounding the movement path of the target object. As the muffle structure, a structure similar to the muffle in a normal heating device can be applied.

The object to be heated in the heat treatment apparatus of the present invention may be heated by any appropriate means. Generally, as the heating means, a heating means in an ordinary heat treatment apparatus can be adopted. In one aspect,
The combustible gas is burned in the heat treatment space to generate a flame, and the flame can be used for heating. When the flame is generated so as to directly face the target object, the heat of the combustion gas generated by the flame is heated by heat convection and heat conduction in the surrounding atmosphere of the flame, and the heating by the heat radiation from the flame is a heat treatment of the target object. Available to In order to perform heating by a flame, a combustion port for discharging and igniting a combustible gas (for example, a combustible fuel such as hydrogen, city gas, LPG, etc.) may be arranged in the transport path of the target object. For example,
A combustion port is arranged adjacent to a gas inlet for levitation of a target object, and when a flame is generated along the gas inflow direction, heat generated by the flame is used for levitation. The airflow can efficiently supply the target object.

In another embodiment, a high-temperature combustion gas generated by burning a combustible gas in another place may be supplied to the heat treatment space to raise the temperature of the atmosphere therein. Instead of supplying the combustion gas to the atmosphere in the heat treatment space, the temperature of the atmosphere in the heat treatment space may be increased by exchanging heat with the high-temperature combustion gas in the atmosphere gas in the heat treatment space. In still another embodiment, an electric heating means such as an electric heater or an infrared lamp is used as the heating means. The electric heater has an advantage that the amount of heat generated by adjusting the supplied power can be quickly and easily adjusted.

Further, as another heating means, a heat medium flow pipe can be used. The heat medium flow tube circulates a heat medium such as a high-temperature gas or high-temperature oil through the hollow tube, and uses heat released to the outside of the hollow tube for heat treatment. The heat medium flow pipe can generate strong heat energy, and the heat medium does not contact the target object, so that the heat medium does not adversely affect the target object.

[0054]

DESCRIPTION OF THE PREFERRED EMBODIMENTS The present invention will be described more specifically with reference to the accompanying drawings. FIG. 1 is a perspective view schematically showing a heat treatment apparatus 1 used in the heat treatment method of the present invention. The heat treatment apparatus 1 includes a heating zone X, a heat treatment zone Y, and a cooling zone Z, and has a rectangular plate-shaped object P
Is supplied to the temperature raising zone X and discharged from the apparatus through the heat treatment zone Y and the temperature lowering zone Z, as indicated by arrows. The heating zone X and the heat treatment zone Y constitute the heat treatment space 10. As shown in the figure, the interior of the heat treatment space 10 is shielded from the outside by providing an air curtain at the entrance. For example, a film forming material (for example, silver paste, SnO ₂ , ITO (indium-
The apparatus shown in the figure can be used for baking after applying a transparent conductive film such as tin oxide), phosphor, dielectric, insulator, semiconductor). For example, when manufacturing a plasma display panel, various paste materials (for example, silver paste, phosphor (RGB) coloring material) paste applied (for example, squeegee printing) to a substrate at various stages. Can be used to fire dielectric (eg, glass, MgO) paste at various stages.

The temperature conditions in the heat treatment of the present invention may include any appropriate temperature change. For example, as shown in FIG. 2, in the heat treatment space (that is, the temperature increase zone X and the heat treatment zone Y), first, the temperature of the target object P is rapidly increased from room temperature to a predetermined heating temperature T0 in the temperature increase zone X. (For example, at a predetermined time t1), and thereafter, in the heat treatment zone Y, the raised temperature T0 is maintained (for example, during a predetermined time t2). When the heating process is completed, in the temperature drop zone Z, the target object P that has completed the heating process
Is discharged from the apparatus after the temperature is lowered stepwise (for example, at a predetermined time t3) as shown in the figure.

FIG. 3 is a perspective view schematically showing a part of the heat treatment space 10 used in the heat treatment method of the present invention so that the inside thereof can be understood. The illustrated embodiment is particularly preferably used in a heating zone. Heating space 10
Has an opening 14 with a width that is sufficient for inserting the target object P, but not so wide (the same applies to the height of the opening 14). Inside the heat treatment space 10, a plurality, preferably a large number, of the floating members 20 are arranged at intervals along the transport direction of the target object P (indicated by an arrow). Each levitating member 20 is elongated along a direction perpendicular to the moving direction of the target object, and its width (that is, the length in the longitudinal direction of the levitating member 20) is the width of the target object P (W, Length in the direction perpendicular to the direction). The exhaust members 27 are arranged between the adjacent floating members 20. Therefore, the floating members 20 and the exhaust members 27 are alternately arranged in parallel, and one of the exhaust members 27 adjacent to the floating member 20 is provided with the suction stopping means 30. Are located. The suction stopping means 30 are arranged near both ends in the width direction of the target object P, but the number and arrangement of the suction stopping means may be appropriately selected as necessary. The exhaust member 27 has the same width as the floating member 20 and communicates with an exhaust pipe 28 disposed below. The levitation member 20 is provided with a slit or a plurality of air supply ports as shown in the drawing along the width direction (arrow W) of the target object, and blows gas toward the target object P from the air supply port. Levitate the object.

The levitation member 20 shown in FIG. 3 has a row of combustion ports at its center, as described later, from which the flame f
Occurs. The exhaust member 27 is provided with a plurality of exhaust ports along the width direction of the target object, and a predetermined condition in the heat processing space (for example, Pressure or the amount of gas therein) is maintained as predetermined. The suction stopping means 30 can stop the moving target object as described later.

FIG. 4 schematically shows a cross section of the levitating member 20 (a cross section perpendicular to the main surface of the target object and along the moving direction of the target object). The floating member 20 is
A combustion port 24 is provided at the center, and air supply ports 22 are arranged on both sides thereof. As shown in the drawing, the gas that has passed through the air supply conduit 23 passes through the air supply port 22 and the target object
It is sprayed toward. The air supply conduit 23 is connected to an air supply pipe 26 installed outside the heat treatment space 10 (see FIG. 3). The air supply pipe 26 preferably supplies a preheated gas, for example, air. The heating of the gas may be performed by heat exchange with the gas discharged from the heat treatment space 10, and the heat energy can be effectively used. Alternatively, the gas exhausted from the heat treatment space 10 may be reused as it is via the air supply pipe 26.

In the embodiment shown in FIG. 4, the pair of air supply ports 22 blows gas obliquely toward the center of the levitation member 20, and the gas hitting the target object P flows outward along the target object P. The target object P is levitated by the levitating force generated at that time. A combustible gas is supplied to the combustion port 24 from outside the heat treatment space 10 through a conduit 25. This combustible gas is burned at the combustion port 24 to generate a flame f. The flame f extends substantially straight toward the target object P between the airflows from the left and right air supply ports 22, 22.
The flame f heats the surrounding gas, and the heated gas comes into contact with the target object P to heat the target object, and the function of heating the target object P directly by the heat rays radiated from the flame f. In both cases, the target object P is heated and rapidly raised to a predetermined temperature, or the predetermined temperature of the target object is maintained.
Note that the flame f also has a function of heating the airflow blown out from the air supply ports 22.

In the embodiment shown in FIGS. 3 and 4, the target object P sent from the opening of the
Is levitated by the air blown from the levitating member 20 and is heated by the flame from the combustion port 24. As shown in FIG. 3, the gas blown out from the floating member 20 and the combustion port 2
The combustion gas in 4 is exhausted outside through the exhaust port of the exhaust member 27 and the exhaust pipe 28. The thermal energy contained in the exhaust gas is recovered, and can be used to raise the temperature of the gas for levitating the target object P or to heat the gas used in the temperature lowering section Z as described later. In the illustrated embodiment, the levitating member 20 only levitates the target object P and does not have a transport function for moving or stopping in the horizontal direction.

In order to explain the method of moving the levitated target object in the heat treatment method of the present invention, FIG. 5 shows a state viewed from a lateral direction perpendicular to the moving direction of the target object. In the illustrated embodiment, the target object P moves from right to left. At the right end of the movement path of the target object P, a push arm 48 that can rotate around the axis is arranged. The push arm 48 is supported by a turning shaft 46 that is supported across the heat treatment space 10. Target object P
When the push arm 48 turns clockwise from a horizontal state (indicated by a two-dot chain line) in a state where is present at the right end of the movement path (the target object P shown on the right side of the figure), the tip of the arm is moved to the edge of the target object P. It is arranged at a position in contact with the part. Target object P
When the arm 48 in contact with the edge of the object is further turned, the arm 48 pushes the target object P leftward, whereby the target object moves from right to left in FIG. The target object P in the levitating state is moved by simply pushing the object 48 lightly. The pushing force of the arm 48 can be changed by adjusting the rotation speed of the rotating shaft according to the moving distance and speed. For example, the shaft 46 may be rotated so that the arm 48 collides with the target object, or the shaft 46 may be rotated so as to gently push the target object.

In FIG. 5, a stop arm (stopping element) 49 is disposed on the turning shaft 47 at the left end of the transfer path of the target object so that the stop arm 49 can rotate around the axis. When the target object P is moving, the arm 49 is in a vertical state as shown in the figure, and the moving target object collides with the arm 49 and cannot move any more, and stops. When the moving speed of the target object is high, the arm 4
When the object 9 absorbs the kinetic energy of the moving target object and rotates clockwise, it is possible to prevent the target object from being bounced back by the collision reaction.
By appropriately combining the operations of the arms 48 and 49 as described above, it is possible to easily move the target object P in a predetermined direction, change the moving speed, or stop.

Further, in another embodiment, as schematically shown in FIG. 6, in the heat treatment method of the present invention, the levitated target object is moved by using a mechanical force. FIG.
FIG. 6A is a perspective view, and FIG. 6B is a plan view. In FIG. 6, driving means 200 such as a chain or a belt that moves in the moving direction (arrow) of the target object P is disposed on both sides of the moving path 202 of the target object P, and the member 204 that contacts the levitated target object P is moved. Fastening to such driving means. When the driving means moves in the direction in which the target object should move, the contact element 204 pushes the target object P, whereby the target object moves. Drive means 20
When 0 is stopped, the contact element 204 stops and, therefore, does not press the target object P, so that the target object stops in a levitated state. Such a driving means is arranged in the heat treatment space 10. The contact element is arranged behind the target object so as to push the target object in the direction to move the target object, but may be arranged as an additional contact element 206 in front of the target object, By doing so, the target object can be reliably stopped. The purpose can be achieved by providing at least one contact element, but the number can be increased or the structure of the contact element itself can be appropriately changed depending on the object to be processed. Typically, the trailing edge 208 of the target object
6 are preferably abutted near both ends of FIG.
As shown in (a), it is preferable to use two contact elements. When the width of the target object is large, a contact element may be provided near the center of the trailing edge 208, or the right and left contact elements 204 may be connected.

When such a driving means is arranged in the heat treatment space, it is sufficient to dispose a simple driving means such as a chain or a belt provided on the side of the movement path of the object in the heat treatment space. A complex device that applies power to the drive means can be placed outside the heat treatment space.Compared to when the target object is moved using gas and the moving target object is stopped using suction stop means. Thus, there is an advantage that the movement and stop of the target object can be surely performed without using gas.

In still another embodiment, the object is placed in a support element that can be levitated by gas and that can support the object, and the support element is moved in the heat treatment space to perform the heat treatment. This method is shown in FIG. 7 in a schematic sectional view of the heat treatment space. For example, as shown, a plurality of support elements 210, which may be in the form of a carrier tray, are arranged adjacent to and in contact with each other, in which the object P to be heat-treated is placed.
Place. The support element has a dimension (or depth) that is sufficiently larger than the thickness of the target object along a direction perpendicular to the direction in which the target object is to move, and the target object is located at the end of the adjacent support element. When a force is applied in the direction to be moved, the force is transmitted from the last supporting element to the preceding supporting element adjacent thereto, and further from that supporting element to the further preceding supporting element, and so on. Are transmitted in order. Thus, by pushing the last support element forward, all preceding support elements can be moved. Such a moving mechanism is a push method (or a plug flow method).
When this is arranged in the heat treatment space 10, the target objects arranged on the support elements sequentially move in the heat treatment space, and are heat-treated during that time. Since the support element itself is levitated by the gas blown from the underlying air inlet, less force is required to move the support element. In the embodiment described with reference to FIG. 6, when the target object is displaced in the vertical direction or when the thickness of the contact element is not sufficient, the contact element may not easily contact the target object. In contrast, in the embodiment of FIG. 7, the adjacent support elements have a sufficiently large vertical dimension, so that a force can be reliably transmitted between the support elements, so that there is no such problem. This is particularly effective because the object can be reliably moved.

In another embodiment, the stopping of the moving target object may be performed by the suction stopping means 30 shown in FIG. FIG. 8 schematically shows a cross-sectional view of the suction stopping means 30 (a cross-sectional view in a direction perpendicular to the target object in the moving direction of the target object) for explaining the operation of the suction stopping means 30. The suction stopping means 30 is composed of, for example, a cylindrical main body 31 and a cylindrical cap-shaped sliding member 40 disposed at the end thereof, and the sliding member 40 is vertically moved at the front end of the main body 31 as shown by arrows. It is slidably mounted in the direction. The main body portion 31 has a pressurized gas passage 33 penetrating in a horizontal direction below the main body portion. A conduit 53 is connected to one end of the pressurized gas path 33, and a control valve 54 and a pump 52 are connected to the conduit 53. Pump 52 and control valve 5
4 is arranged outside the heat treatment space 10. Pump 5
By the operation of 2, the pressurized gas (for example, air) is sent into the pressurized gas passage 33. At the other end of the pressurized gas path 33, there is a discharge port 34 opened to the outside, and the gas sent into the pressurized gas path 33 is discharged from the discharge port 34 to the outside. The main body 31 has a suction gas passage 32 at the center thereof. The lower end of the suction gas passage 32 is connected to the pressurized gas passage 33. The upper end of the suction gas passage 32 is open at the tip of the main body 31. Above the upper end of the suction gas passage 32 of the main body 31, a through hole 42 is formed in the center of the sliding member 40.

Suction stopping means 3 having the above structure
The operation of 0 will now be described. As shown in FIG. 8A, when a high-pressure gas passes through the pressurized gas passage 33, the gas in the suction gas passage 32 is sucked by the suction effect of the dynamic pressure.
From the upper end of the suction gas passage 32, a through hole 42 of the sliding member 40 is formed.
The gas in the upper space is sucked through the. As shown in FIG. 8B, when the target object P is located above the suction stopping means 30, the gas between the lower surface of the target object P and the upper surface of the sliding member 40 is sucked into the through-hole 42, and the airflow is reduced. As a result, the pressure in the space between the target object P and the sliding member 40 decreases.
Then, the sliding member 40 that can slide in the vertical direction is sucked up to the target object P side and moves upward. When the sliding member 40 moves upward, the gap between the sliding member 40 and the target object P is further narrowed, and the airflow is fast and the pressure is reduced. As shown in FIG. 8C, when the sliding member 40 comes into contact with the lower surface of the target object P, the airflow sucked into the through hole 42 of the sliding member 40 disappears. However, since the action of sucking the gas on the suction gas path 32 side is continued by the passage of the pressurized gas through the pressurized gas path 33, the sliding member 40 is in a state of being strongly adsorbed to the lower surface of the target object P. . The sliding member 40 attached to the main body 31 cannot move in the horizontal direction.
The movement of the target object P is prevented by the frictional resistance between the zero and the target object P. If the supply of the high-pressure gas to the pressurized gas passage 33 is stopped, the suction operation on the suction gas passage 32 is stopped, and the sliding member 40 moves downward by its own weight. At this time, when gas is blown from the air supply port toward the target object P, the target object P separates from the sliding member 40 and returns to a floating state. In this state, if any force that moves the target object P in the horizontal direction acts on the target object P, the target object P can move in the horizontal direction.

Such a suction stopping means 30 controls the supply and stop of the pressurized gas only, and can quickly and surely control the target object P even if the heating processing space 10 does not have a complicated mechanism. Stop and stop release. If a complicated mechanism does not need to be provided in the heat treatment space, stable operation can be performed even in the high-temperature heat treatment space 10.

In order to explain another mode of moving the target object, a cross-sectional view (a cross-sectional view in a direction perpendicular to the target object in the moving direction of the target object) of an air supply member for controlling the movement of the target object will be described. FIG. 9 schematically shows this. Air supply member 50
Blows gas in an oblique direction with respect to the transport direction of the target object P (in the illustrated embodiment, a direction from right to left as indicated by an arrow) (accordingly, in a direction from lower right to upper left). Specifically, a control valve 56 and a pump 54 are connected to the air supply member 50 via a conduit 52, and the air supply member 50 has a front end provided with an air supply that is directed obliquely to the target object P. It has a mouth 51. When the control valve 56 is opened and gas is blown from the air supply port 51 toward the target object P, the target object P
, A pressure acts in a direction from the lower right to the upper left, and a component of the pressure in a direction parallel to the target object P drives the target object P in the moving direction (left direction). The pressure component in a direction perpendicular to the target object P helps to levitate the target object. When the control valve 56 is closed, the blowing of the gas is stopped, and the movement of the target object P is stopped. However, since the gas having the levitation action is blown out from the levitation members 20 located on both sides of the air supply member 50, the gas is substantially blown. Only the floating state of the target object P is maintained. When the control valve 56 has not only an on / off function but also a function of adjusting the flow rate of the gas passing therethrough, the magnitude of the pressure generated by the airflow blown out from the air supply port 51 can be changed, and thereby the target The force for moving the object P, that is, the magnitude of the driving force can be adjusted.

In another embodiment, the air supply member 50 as described above may be incorporated into the floating member 20. As such, a cross-sectional view similar to that of FIG.
Is shown schematically in FIG. The levitation member 20 has two air supply ports 22 for levitation of the target object P, and an opening between the air supply ports 22 so as to blow gas in an oblique direction (a direction from lower right to upper left). And an air supply port 26 for controlling the movement of the target object. The air supply port 26 opens on the side surface of a concave portion 27 formed at the upper end of the floating member 20. still,
The air supply port 26 may be an opening in the form of a hole (for example, a circular hole) provided in the end face of the columnar object as a whole, or
A series of multiple hole-shaped openings or slits formed in the top surface of an elongate member extending below the target object and across its width along a direction perpendicular and horizontal to the direction of movement of the target object Opening may be used.

Next, a heat insulating structure that can be used in the heat treatment space of the heat treatment apparatus of the present invention will be described. FIG. 11 schematically shows a cross-sectional view (a cross-sectional view perpendicular to the moving direction of the target object) of the heat treatment space of the heat treatment apparatus of the present invention. In one embodiment, the heat treatment space 10 of the heat treatment apparatus of the present invention includes a uniform heat sheet 6 made of a highly oriented graphite sheet over the entire inner surface of a cylindrical outer wall 60 made of a normal outer wall material.
2 is stuck. As the highly oriented graphite sheet, a Panasonic graphite sheet (manufactured by Matsushita Electric Industrial Co., Ltd.) can be used. This highly oriented graphite sheet has a thickness of, for example, 0.1 mm, a heat resistance temperature of 3000 ° C. or more in an oxygen-free state, and a thermal conductivity of 8.0.
W / cm · ° K (value in plane direction; direction perpendicular to plane is 1/100 of plane direction). Tensile strength is about 200 kg / cm ^2. Is also possible. As the outer wall material forming the cylindrical outer wall, a material generally used for a heat treatment space of a conventional heat treatment device can be used, for example, stainless steel,
Inconel, ceramic material, quartz glass and the like can be used. A large number of heat insulating blocks 6 are provided inside the heat equalizing sheet 62.
4 are laid out. The target object P is transferred in a floating state inside the space formed by the heat insulating block 64. Gas is blown from the air supply port provided in the floating member 20 below the target object P, whereby the target object P floats, and the flame f from the combustion port 24 provided in the floating member 20 is discharged Heat P.

FIG. 12 is a perspective view schematically showing an example of the heat insulating block 64. As shown, the insulation block 64
Has a substantially rectangular planar shape as a whole (for example, a shape viewed from above in the illustrated embodiment). This heat insulating block may be, for example, a glass molding. In FIG.
A state in which the heat insulating block of FIG. 12 is attached to the outer wall 60 of the heat treatment space via the heat equalizing sheet is schematically shown in a cross-sectional view. The interior 65 of the heat insulating block 64 is hollow and sealed in a high vacuum state. An infrared reflecting film 68 is formed on the surface of the heat insulating block 64 on the side facing the target object.

Each heat insulating block 64 has a first block portion 70 and a second block portion 66, and these block portions overlap with each other at their edge portions to form an integral heat insulating block 64. When such heat insulation blocks are arranged side by side in the heat treatment space, the second
On the block portion 66, the first of the adjacent insulation blocks
Part of the block portion 70 overlaps, and the second sheet-like portion functions as a spacer. Second block part 6
A small protruding piece 67 is provided at the tip of 6. FIG.
As shown in FIG. 3, after the heat insulating block 64 is disposed between the outer wall 60 and the heat equalizing sheet 62, the bolts b are inserted into the protruding pieces 67 and fastened to the outer wall 60.
4 is fixed to the outer wall 60. In a state where the heat insulating block 64 is spread over the inner surface of the outer wall 60, the second block portion 66, the protruding piece 67 and the bolt b are hidden behind the first block portion 70, and the inner exposed surface of the heat treatment space is insulated. It will be defined only by the infrared reflection film 68 on the block 64.

If the above-described heat insulating structure is adopted, a part of the heat released from the flame f is directly absorbed by the target object P. The remaining heat (and heat that may possibly be emitted from the target object P) is reflected by the infrared reflection film 68 of the heat insulation block 64 disposed therearound to heat the target object P located inside. become. As a result, heat energy can be effectively used to reduce the release of heat energy to the outside. Thermal insulation block 6 having vacuum space 65
4 satisfactorily prevents the release of heat to the outside. However, heat may leak outside through the heat insulating blocks 64 or gaps between the blocks. Further, depending on the arrangement of the flame f and the target object P in the internal space, a large amount of heat energy is supplied to a part of the inner wall formed by the heat insulating block 64, so that the heat passing through the heat insulating block 64 in that part outward. Energy is generated, which can result in localized hot spots outside the insulation block 64.

However, as shown in the figure, when the heat equalizing sheet 62 is disposed outside the heat insulating block 64, the heat passing through the heat insulating block 64 is
Is absorbed by The heat equalizing sheet 62 distributes the absorbed heat evenly over the entire surface, thereby lowering the temperature of the portion of the inner surface of the outer wall 60 that may have been locally heated. The amount of loss of heat energy released to the outside through the outer wall 60 is
Is proportional to the temperature difference between the inside and outside of the
2 prevents the inside of a portion of the outer wall 60 from becoming hot, and reduces the heat energy that passes through the outer wall 60 to the outside from such a location. Further, if the temperature distribution on the inner surface of the outer wall 60 is averaged by the heat equalizing sheet 62, the temperature distribution in the space inside the heat insulating block 64 is easily averaged, and the heating of the target object P is also equalized.

FIG. 14 schematically shows a heat insulating structure using another form of the heat insulating block, similarly to FIG.
The illustrated heat insulating block 164 has a substantially rectangular plate shape as a whole, and is spread inside the outer wall 60 via the heat equalizing sheet 62. The heat insulating block 164 has a high vacuum space 165 therein. An infrared reflective film 168 is formed on the inner surface of the heat insulating block 164. A mounting hole 166 is formed through the heat insulating block 164.
A mounting screw 167 is inserted through the mounting hole 166, and the heat insulating block 164 is fixed to the outer wall 60 by screwing and fixing the mounting screw 167 to the outer wall 60. Mounting screw 167
Is a heat insulating block 16 via a disc-shaped spacer 169.
Contact 4 The spacer 169 is formed of a material such as ceramics having excellent heat insulating properties. In this embodiment, the disc-shaped spacer 169 closes the opening of the mounting hole 166, so that heat can be prevented from being released through the mounting hole 166.

FIG. 15 schematically shows a cross-sectional view (a cross-sectional view perpendicular to the moving direction of a target object) of a heat-treating space in another embodiment of the heat-treating apparatus of the present invention. However, in the illustrated embodiment,
A cylindrical outer wall defining a peripheral portion of the heat treatment space and a wall formed by the heat insulating block are not shown. In the illustrated embodiment, the inner heat equalizing sheet 110 and the outer heat equalizing sheet 112, each having a cylindrical shape, are arranged so as to surround the target object P levitated by the levitating member 20, that is, equalizing in a double-layer structure. A heat sheet is placed around the target object. The outer wall 60 (not shown) exists outside the outer heat equalizing sheet 112. Between the heat equalizing sheets 110 and 112, electric heaters 114 are arranged at two upper and lower locations.
In the mode shown in FIG. 15, the heat generated by electric heater 114 is efficiently transmitted to the whole by heat equalizing sheets 110 and 112 without waste. That is, the heat equalizing sheet 110
And 112 quickly transmit the heat generated by the electric heater 114 to the entire circumference, and the heat radiated from the inner surface of the heat equalizing sheet 110 is uniformed and transmitted to the target object P to heat the target object P. . As a result, the entire target object P is evenly heated.

FIG. 16 schematically shows a cross-sectional view (a cross-sectional view perpendicular to the moving direction of a target object) of a heat-treating space according to another embodiment of the heat-treating apparatus of the present invention. However, in the illustrated embodiment,
A cylindrical outer wall defining a peripheral portion of the heat treatment space and a wall formed by the heat insulating block are not shown. In the illustrated embodiment, the soaking sheet and the muffle structure are combined. At a position surrounding the target object P levitated by the levitating member 20, a muffle structure portion 120 made of SUS metal or the like and formed in a cylindrical shape is arranged. A heat equalizing sheet 122 is disposed outside the muffle structure 120 via a spacer 124 made of a heat insulating material. The outer wall 60 is arranged outside the heat equalizing sheet 122, but is not shown. An electric heater 126 is disposed below and adjacent to the outside of the heat equalizing sheet 122. The heat of the electric heater 126 is transmitted to the heat equalizing sheet 122, and is transmitted to the entire circumference by the heat equalizing sheet 122. Thereafter, heat is transmitted from the heat equalizing sheet 122 to the muffle structure 120 by radiant heat, and the muffle structure 1
20 heats the target object P arranged in the internal space by radiant heat. In the present specification, the muffle structure means a partition structure that separates a heating unit such as an electric heater from a heat treatment space of the target object P. In the illustrated embodiment, the heat equalizing sheet 122 is
However, when the heat equalizing sheet 122 is heated, heat is transmitted only to the heat equalizing sheet 122 having a relatively small heat capacity, and the temperature is rapidly increased. The radiant heat from the heat-equalizing sheet 122 is transmitted to the muffle structure 120 and the muffle structure heats the target object P, so that the target object P is quickly and uniformly heated from the entire circumference.

In the embodiment described with reference to FIGS. 15 and 16, the heating means such as an electric heater is arranged so as to overlap at least a part of the object to be subjected to the heat treatment with a space therebetween. The arrangement of the means may be remote from the target object. Such an embodiment is schematically shown in FIG. In this embodiment, the heat equalizing sheet 130 surrounding the target object P has a flap portion 132 that does not overlap with the target object, and heats this portion. For example, the heat treatment space 10
Inside the (not shown), the heat equalizing sheet 130 is wound in a cylindrical shape so as to surround the space around the target object P (for example, as shown, the heat equalizing sheet 130 P is arranged so as to double surround the space around P), and the end 132 of the heat equalizing sheet 130 is drawn outward away from the space around the target object.

In this embodiment, a gas burner 134 is arranged at a lower position adjacent to the flap 132 of the heat equalizing sheet 130. The gas burner 134 generates a flame f and heats the upper flap 132. The heat supplied to the flap portion 132 is quickly transmitted to the entire surface of the heat equalizing sheet 130, and heats the internal space by radiant heat from the heat equalizing sheet 130. As a result, the target object P transferred in the internal space of the heat equalizing sheet 130 can be uniformly heated from the entire circumference.
The gas burner 134 is supported on a drive shaft 136 via a support arm 135. The drive shaft 136 can rotate and move up and down as indicated by arrows. Drive shaft 13
6, the extension end 1 heated by the gas burner 134
32 can be changed, and the state of heat transfer to the target object P arranged in the internal space of the heat equalizing sheet 130 changes. For example,
By changing the heating position of the gas burner 134 with the movement of the target object P, it becomes possible to heat the specific position of the target object P more strongly. Also, if the drive shaft 136 is moved up and down,
The distance between the gas burner 134 and the flap portion 132 changes, the intensity of the heat energy transmitted from the gas burner 134 to the flap portion 132 can be adjusted, and the heat treatment temperature of the target object P can be easily adjusted. It should be noted that a mechanism for moving the gas burner 134 in parallel along the axial direction of the cylindrical heat equalizing sheet 130 may be provided, or a means other than the gas burner 134 may be used as a heating means. For example, an electric heater may be used. .

In the heat treatment apparatus of the present invention, the structure of the heat insulating wall defining the heat treatment space 10 has been described with reference to FIGS. 11 to 14. You may. In the embodiment shown in FIG. 18, the heat insulating layer 142, the heat equalizing sheet 140, the heat insulating layer 142, the heat equalizing sheet 140, and the muffle structure 144
Are sequentially arranged. The target object P is transported in the space inside the muffle structure 144. A heating unit for the target object P is also separately provided. In the illustrated embodiment, the heat equalizing sheet 14 is used.
Although two pairs of 0 and the heat insulating material layer 142 are arranged, the combination may be one pair or three or more pairs. In this embodiment, when the heat generated in the internal space of the muffle structure 144 is transmitted to the heat equalizing sheet 140 through the muffle structure 144, the heat is quickly transmitted to the entire circumference, and the temperature of the entire circumference is equalized. . The heat insulation layer 142 disposed outside the heat equalizing sheet 140 prevents heat from escaping to the outside.

In general, when a part of the heat insulating wall of the heat treatment space is locally heated to a high temperature, even if the heat insulating wall is present in the part, the temperature difference between the inside and the outside is large. Heat is easily released to the outside. However, in the heat-insulating wall having the above-described structure, the heat equalizing sheet 140 distributes the heat of the locally high-heat portion evenly over the entire circumference, so that a locally high-temperature portion hardly occurs. If a local high temperature does not occur, less heat energy is released to the outside through the heat insulating wall such as the heat insulating material layer 142. As a result, as a whole of the heat treatment chamber, the release of heat to the outside can be reduced, and the thermal energy can be efficiently used.

FIG. 19 is a perspective view schematically showing a part of another embodiment of the heat treatment space 10 used in the heat treatment method of the present invention, as in FIG. . This embodiment is particularly preferably used in a heat treatment zone. FIG. 20 schematically shows a cross-sectional view (a cross-sectional view in the transfer direction of the target object and perpendicular to the target object) of the heat treatment space in the mode of FIG. The heat insulating wall structure of the illustrated embodiment may be the same as that of FIG. In the illustrated embodiment, a levitating / moving mechanism for the target object, which includes the levitating member 20, the suction stopping means 30, and the like, is also provided, but is omitted for simplicity. If a large amount of heat needs to be applied, such as in a heating zone, the floating member 2
0 may be provided with a combustion port 24 as shown in FIG. 4, but when it is not necessary to apply a large amount of heat as in the heat treatment zone, the combustion port 24 may be omitted, and FIG. The structure of the floating member 20 as shown in FIG. 10 may be adopted.

As shown also in FIG. 20, an electric heater 80 having a flat U-shape is provided below the moving path on which the target object P is transferred, and a heat equalizing sheet 100 is arranged below the electric heater 80. , And further below the heat medium flow pipe 90.
Is provided. The heat medium flow pipe 90 has a double structure of an outer pipe 96 and an inner pipe 98 with a hole. As shown in FIG. 19, the inner pipe 98 penetrates the wall surface of the heat treatment chamber 10, is drawn out, and is connected to the ignition section 92. The ignition section 92 is connected to a fuel gas conduit 93 and an exhaust conduit 94. The fuel gas (or combustible gas) supplied from the fuel gas conduit 93 to the ignition section 92 is ignited by the ignition section 92 and burns, and the combustion gas is supplied to the inner pipe 98. The combustion gas enters the outer tube 96 through a hole on the outer periphery of the inner tube 98. The outer pipe 96 is connected to an exhaust pipe 94 via an ignition section 92, and the combustion gas passing through the outer pipe 96 is recovered from the exhaust pipe 94. While the fuel gas flows through the inner tube 98 and the outer tube 96, heat is released from the surface of the outer tube 96 toward the outer periphery.

As shown in FIG. 20, heat released from heat medium flow pipe 90 is absorbed by heat equalizing sheet 100 and spreads evenly over heat equalizing sheet 100, so that heat equalizing sheet 10
It is radiated upward from 0 and heats the target object P above.
Heat is also supplied from the electric heater 80 disposed above the heat equalizing sheet 100 to heat the target object P. In the illustrated embodiment, even if a large amount of heat energy is locally released from the position of the heat medium flow pipe 90, the heat energy is supplied to the target object P after being soaked by the heat equalizing sheet 100. The target object P can be heated evenly. Further, since heat energy is also supplied from the electric heater 80 disposed at a position different from the heat medium flow pipe 90, the electric heater 80 can also achieve uniform heat.

In one preferred embodiment of the heat treatment method of the present invention, the heat treatment temperature of the object P is controlled more precisely by combining two types of heating means, ie, the heat medium flow pipe 90 and the electric heater 80. FIG.
Is the time t when the target object P is heated to the target temperature T0.
2 shows an example of the relationship between the temperature and the ultimate temperature T of the heat treatment space. The reached temperature T is the result of adding the amount of heat (represented by region I) applied by the heat medium flow tube 90 and the amount of heat (represented by region II) applied by the electric heater 80. The polygonal line at the boundary between region I and region II is
This is the temperature rise achieved when the heat medium flow tube 90 is used alone. The temperature adjustment in the case of heating by the heat medium flow pipe 90 is performed by adjusting the supply amount of the fuel gas. The amount of thermal energy released, and thus the heating temperature, does not change quickly, resulting in some time lag. Therefore, it is inevitable that the heating temperature of the heating medium flow tube 90 fluctuates greatly. The electric heater 80 can generate less heat energy than the heat medium flow pipe 90, but the amount of heat energy generated immediately changes when the supplied power is changed. Therefore, the temperature rise by the heat medium flow pipe 90 is set slightly lower than the target temperature T0, and the temperature rise and the target temperature T0 are set.
Is compensated by heating by the electric heater 80, the actual temperature T is quickly reached to the target temperature T0, and thereafter, the temperature T is made to coincide with the target temperature T0 with time. It is easy to put. As a result, it is possible to accurately control the heating temperature of the target object P, and realize a high-quality heat treatment.

As described above, the heat treatment apparatus of the present invention may have a temperature lowering zone after the heat treatment space. This cooling zone Z is schematically shown in FIG. 22 in a sectional view together with a part of the heat treatment zone Y. In the cooling zone, a gas having a lower temperature than the target object P is blown onto the target object P to lower the temperature of the target object. In the illustrated embodiment, the extruding section 170 is disposed between the heat treatment zone Y and the temperature lowering zone Z, and the extruding arm 172 provided in the extruding section 170 moves in the horizontal direction, so that the heat treatment zone Y is conveyed. The target object P is sent to the temperature drop zone Z.

In the cooling zone Z, there is provided a conveyor 180 for lowering the sent target objects P from top to bottom in a state of being stacked with a space therebetween. The target objects P gradually move downward in a state where they are arranged at regular intervals in the plane direction. Blowing means 1 having a series of a plurality of blowing nozzles (or blowing slits) in the horizontal direction from above to below on the side of the target object P moving downward.
50 are provided. Each blower 150 is connected to a blower 156 via a heater heater 152 at the back.

In the illustrated embodiment, in the blower 156, gas is sent from an exhaust pipe 158 that collects exhausted gas used for heating in the temperature raising zone X and / or the heat treatment zone Y, and this gas is directly or The gas obtained by exchanging heat with this gas is heated to a predetermined temperature by a heater
From the target object P. If it is desired that a lower temperature gas is blown out from the blowing means 150, the heater heating section 152 may be omitted, and another lower temperature gas may be mixed in some cases.

In the illustrated embodiment, the heater heaters 152 arranged vertically are operated so that the temperature of the gas used for lowering the temperature gradually decreases (downward). For example, cooling air at 350 ° C., 300 ° C., and 200 ° C. is blown from above at the upper and lower three blowing units 150 in FIG. Each blowing means 150 sandwiching the passage path of the target object P
An exhaust unit 153 having an exhaust port is disposed at a position facing the exhaust unit 153, and the exhaust unit 153 is connected to an exhaust pipe 159.

Since the target object P descending in the temperature drop zone Z is often heated to about several hundred degrees Celsius, it is cooled and cooled by blowing, for example, 350 ° C. cooling gas blown from the upper blowing means 150. You. As the target object P moves downward, cooling air having a low temperature is blown in a stepwise manner, so that the temperature of the target object P sequentially decreases. The target object P that has moved to the lower end of the temperature drop zone Z is, for example, 150
It is cooled down to about ° C., and thereafter, is conveyed in the horizontal direction, goes out of the heat treatment apparatus 1, and is collected by the collection conveyor 184. The target object P that has exited the heat treatment device is then cooled to room temperature by natural cooling. In the mode shown in FIG. 22, the temperature lowering zone Z can be set up with only a small installation space slightly larger than the area of the target object P. By passing the cooling air along the front and back surfaces of the target object P, the entire target object P can be efficiently cooled. When the target object P after the heat treatment is rapidly cooled,
There was a problem that cracks and distortions occurred in the middle. This is because, when the target object P is cooled, the cooling progress differs depending on the location of the target object, and a temperature difference occurs. Due to this temperature difference, the cooling shrinkage behavior is not uniform, and distortion and cracking are caused by the stress accompanying the cooling shrinkage behavior. Is thought to occur.

However, in the above embodiment, even if the temperature of the cooling air at each stage is lowered to increase the temperature difference between the target object and the cooling air, and the temperature is rapidly cooled from a high temperature to a low temperature,
In each stage, the cooling air at a constant temperature is efficiently blown over the entire main surface of the target object P, and the entire target object P can be uniformly and rapidly cooled to a certain temperature determined by the temperature of the cooling air. . Therefore, the temperature of the target object P varies depending on the location, that is, the temperature difference hardly occurs. Specifically, the temperature difference depending on the location of the target object P can be suppressed within several degrees Celsius. As a result, the problem of cracking and distortion is improved. For example, when cooling and lowering the temperature of a large glass substrate of 1 m square, rapid cooling can be performed without causing cracks or distortion even for about 1/2 or less of the time as compared with a normal slow cooling method. Further, in the above-described embodiment, since the sensible heat of the exhaust gas generated in the heat treatment space 10 is recovered and used as a heat source for heating the gas used for lowering the temperature, the thermal energy is effectively used.

FIG. 23 shows another embodiment of the method of moving the levitated object in the heat treatment method of the present invention. Here, it is schematically shown in a cross-sectional view perpendicular to the target object along the moving direction of the target object. In the illustrated embodiment, a floating member 20 having the same structure as that shown in FIG. 9 is used. The floating member 20 blows out gas substantially perpendicularly to the target object P. In the state shown in FIG.
Is levitated by the air blown upward from the levitating member 20 and stays at a fixed position in a horizontal state. Next, FIG.
As shown in (b), the pressure of the gas blown out from the levitation member 20x arranged near below the rear edge of the target object P is increased. For example, the gas is blown out at a pressure of 120% as compared with the other floating members 20. Then, the rear edge of the target object P to which the gas is blown at a large pressure is lifted upward as shown in the drawing, and the target object P is inclined at the angle θ.
When the target object P inclines, the action of advancing the target object P in the horizontal direction toward the lower slope is caused by the pressure of the gas applied to the lower surface of the target object P, and the target object starts moving leftward. Note that mechanically, the forward force F (= mg · sin
θ, where m is the mass of the target object, and g is the acceleration of gravity). Therefore, the target object P can be moved in the horizontal direction only by changing the pressure of the gas blown upward from the plurality of floating members 20 disposed on the lower surface of the target object P depending on the location.

As shown in FIG. 23 (c), when the target object P starts to move in the horizontal direction, there is almost no resistance to the movement if it is in a levitating state, so that the object P continues to move in the horizontal direction by the action of inertia. . In the levitation member 20x in which the blowing pressure is increased first, the normal blowing pressure may be restored. Therefore, the pressure may be increased by the levitating member 20 at one end of the target object P for a short time until the target object P starts horizontal movement. Further, if the pressure of the levitation member 20 located below the rear edge of the target object P is sequentially increased with respect to the horizontally moving target object P only while the rear edge of the target object P passes, the air resistance, etc. The forward force can be supplemented to such an extent that the speed does not decrease due to the resistance applied to the target object P. At this time, if you increase the forward force,
The target object P can be sequentially accelerated. Target object P
It is sufficient to detect the passing position, time, and the like with a sensor or the like, and control the blowing pressure of each floating member 20 in accordance with the detected position of the target object P.

If the moving mechanism as described above is used, it is possible to change the speed and moving direction of the target object P, or control the stop of the movement. For example, in FIG. 23B, if the blowing pressure of the floating member 20x is adjusted, the inclination θ of the target object P changes, and the magnitude of the forward moving force F in the horizontal direction, that is, the moving speed changes. In FIG. 23B, if the blowing is strengthened by the floating member 20 near the opposite edge (left end) of the target object P, the target object P is inclined to the opposite side and horizontally moves in the opposite (right) direction. With respect to the horizontally moving target object P, the blowing force is increased by the levitating member 20 located below the front side of the target object P, and the target object P is inclined so that the front side of the target object P can be lifted. The applied force F acts in a direction opposite to the moving direction to become a braking force, and can be stopped.

[0096]

According to the heat treatment method and apparatus of the present invention, the target object is conveyed in a state where the target object is floated by blowing a gas on the target object. There is no need for a mechanical structure to enter and exit the inside of the heat treatment chamber, and heat energy in the heat treatment chamber is not wasted. As a result, it is possible to reduce the heat energy leaking from the heat treatment device to the outside, and to improve the use efficiency of the heat energy. Further, since various mechanical mechanisms existing in the heat treatment space in the conventional heat treatment apparatus are omitted, and only the above-described mechanism for levitating the target object and moving it is provided, the heat treatment can be performed. The number of features present in the space is greatly reduced overall, thus improving the dusting problem caused by the presence of the various features.

[Brief description of the drawings]

FIG. 1 is a perspective view schematically showing a heat treatment apparatus used in a heat treatment method of the present invention.

FIG. 2 is a graph showing an example of a temperature condition in the heat treatment of the present invention.

FIG. 3 is a perspective view schematically showing a part of a heat treatment space used in the heat treatment method of the present invention so that a state therein can be understood.

FIG. 4 schematically shows a cross-sectional view of the floating member 20.

FIG. 5 illustrates a state of a transfer path of the target object when the state of moving the target object is viewed from the side.

FIG. 6 schematically shows a mechanism for moving a levitated target object using mechanical force in the heat treatment method of the present invention.

FIG. 7 schematically shows a mechanism for moving a target object by a push method.

FIG. 8 schematically shows a cross-sectional view of the suction stopping means 30.

FIG. 9 is a schematic cross-sectional view of an air supply member that controls movement of a target object.

FIG. 10 is a schematic cross-sectional view similar to FIG. 9 of a levitation member having an air supply member.

FIG. 11 schematically shows a cross-sectional view of a heat treatment space of the heat treatment apparatus of the present invention.

FIG. 12 schematically shows an example of a heat insulating block 64 in a perspective view.

FIG. 13 is a schematic cross-sectional view showing a state where the heat insulating block of FIG. 12 is attached to an outer wall of a heat treatment space via a heat equalizing sheet.

FIG. 14 schematically shows a heat insulating structure using another form of a heat insulating block.

FIG. 15 schematically shows a cross-sectional view of a heat treatment space of another embodiment of the heat treatment apparatus of the present invention.

FIG. 16 schematically shows a cross-sectional view of a heat treatment space of another embodiment of the heat treatment apparatus of the present invention.

FIG. 17 is a perspective view schematically showing another embodiment of the heating mechanism using the heat equalizing sheet.

FIG. 18 schematically shows another embodiment of the structure of the heat insulating wall that defines the heat treatment space in the heat treatment apparatus of the present invention.

19 is a perspective view schematically showing a part of another embodiment of the heat treatment space used in the heat treatment method of the present invention, similarly to FIG. 3, so that the state therein can be understood. .

FIG. 20 schematically shows a cross-sectional view of the heat treatment space in the mode of FIG.

FIG. 21 shows an example of the relationship between the time when the target object P is heated to the target temperature T0 and the attained temperature T.

FIG. 22 shows that the temperature lowering zone Z is changed to the heat treatment zone Y.
Is schematically shown in a cross-sectional view together with a part of the above.

FIG. 23 schematically shows another mode of a method of moving a levitated target object in the heat treatment method of the present invention.

[Description of Signs] 10: heat treatment apparatus, 14: opening, 20: floating member,
24: combustion port, 27: exhaust member, 30: suction stop member,
31 ... body part, 32 ... suction gas path, 33 ... pressurized gas path,
40 sliding member, 46, 47 rotating shaft, 48 push arm, 49 stop arm, 50 air supply member, 60
... outer wall, 62 ... heat equalizing sheet, 64 ... heat insulation block, 80
... electric heater, 90 ... heat medium flow pipe, 100 ... heat equalizing sheet, 114 ... electric heater, 126 ... electric heater, 130
... heat equalizing sheet, 132 ... flap part, 134 ... gas burner, 140 ... heat equalizing sheet, 144 ... muffle structure part, 1
50: blower means, 152: heater heating section, 153: exhaust means, 156: blower, 158: exhaust pipe, 164 ... heat insulating block, 170: extruder, 172: pusher arm, 18
0: conveyor, 200: driving means, 202: moving path,
204: contact element, 210: support element, f: flame, P ...
Target object, X: heating zone, Y: heat treatment zone, Z: cooling zone.

──────────────────────────────────────────────────の Continuing on the front page (51) Int.Cl. ⁶ Identification code FI F27B 9/30 F27B 9/30 (72) Inventor Naomi Nishiki 1006 Ojidoma, Kadoma City, Osaka Prefecture Matsushita Electric Industrial Co., Ltd. (72) Inventor Hiroaki Ishio 1006 Kazuma Kadoma, Kadoma, Osaka Prefecture Matsushita Electric Industrial Co., Ltd.

Claims (46)

[Claims] 1. A method for heat-treating a target object, wherein the gas is blown toward the target object from below in the heat-treatment space to heat the target object in a levitated state in a predetermined manner. how to. 2. The method according to claim 1, wherein the levitated target object is moved horizontally in the heat treatment space to perform the heat treatment. 3. The method according to claim 2, wherein the horizontal movement of the target object is performed by blowing gas onto the target object so that a force in the same direction as the moving direction of the target object acts on the target object. 4. The method according to claim 3, wherein the target object is moved in a horizontal direction by blowing gas onto the target object from obliquely below. 5. The target object is moved in a horizontal direction by blowing gas from below the target object such that the rear part of the target object is lifted with respect to the front part with respect to the moving direction and the target object is tilted. The described method. 6. The method according to claim 2, wherein the horizontal movement of the target object is performed by applying a mechanical force to the target object. 7. The method according to claim 6, wherein a force acting in a direction in which the target object is to be moved is applied by mechanical means to push the levitated target object to move the target object. 8. A driving unit disposed on at least one side of the moving path of the target object in the heat treatment space, and a contact element attached to the driving unit and moving along the moving path. The contact element is arranged in the heat treatment space, the contact element contacts the target object, applies a mechanical force to the target object, pushes and moves the target object, and stops the driving means to stop the contact element. The method of claim 6, whereby the movement of the target object is stopped. 9. Support elements, which are levitated by the gas blown toward the object and are capable of supporting the object, are arranged directly adjacent to one another in the heat treatment space, with the last support element preceding the support element preceding it. When pressed into the heat treatment space next to each other, the mechanical force required for the pressing acting on the last supporting element is transmitted to the foremost supporting element in order through the supporting element preceding the last supporting element. 7. The method according to claim 6, wherein all the supporting elements move in the heat treatment space, so that the object supported by the supporting elements moves. 10. The method according to claim 2, wherein the movement of the target object is stopped in the heat treatment space. 11. The movement of the target object is stopped by blowing gas onto the target object so that a force in a direction opposite to the moving direction of the target object acts on the target object.
The described method. 12. The target object is stopped by blowing a gas onto the target object from obliquely below.
The method of claim 1. 13. The method according to claim 11, wherein the target object is stopped by blowing gas from below the target object so that the front part of the target object is lifted and inclined with respect to the rear part in the moving direction. 14. The method according to claim 10, wherein the target object is stopped by suction stop means for drawing the target object toward the suction port by sucking gas from a suction port located below the moving target object. 15. The method according to claim 10, further comprising the step of disposing the blocking means in front of the direction in which the target object moves, and stopping the movement of the target object when the moving target object collides with the blocking means. 16. The method according to any one of claims 1 to 15, wherein a flame is generated which is blown out in a direction in which a gas for levitating the target object is blown, and the target object is heated by the flame. 17. The method according to claim 1, wherein after the heat treatment, a gas having a temperature lower than the heat treatment temperature is blown to the target object to lower the temperature of the target object. 18. The method according to claim 1, wherein main surfaces of the target objects are parallel to each other, and a space exists between the target objects.
18. The method according to claim 17, wherein the temperature of the target object is reduced by blowing gas with the target objects stacked adjacent to each other. 19. In the heat treatment space, the target object is surrounded by the soaking sheet, heating a part of the soaking sheet, and transferring the applied heat to another part of the soaking sheet surrounding the target object. 2. The target object is heated by the method.
The method according to any one of claims 18 to 18. 20. The method according to claim 1, wherein the target object is a plasma display panel, and the paste material applied to the panel is heated by a heat treatment. 21. A heat treatment apparatus for heat-treating a target object, comprising: a heat-treating space; means for levitating the target object by blowing gas from below toward the target object; An apparatus comprising: means for moving the device in the horizontal direction; and heating means. 22. The means for moving the target object is an air supply port for blowing gas to the target object so that a force in the same direction as the moving direction of the target object acts on the target object.
An apparatus according to claim 1. 23. The apparatus according to claim 22, wherein the air supply port moves the target object by blowing gas onto the target object from obliquely below. 24. The air supply port moves the target object by blowing gas from below the target object so that the rear part of the target object is lifted and inclined with respect to the front part in the moving direction. Equipment. 25. The means for moving the target object in the horizontal direction is means for applying a mechanical force to the target object.
An apparatus according to claim 1. 26. The means for moving the target object in the horizontal direction is a mechanical member for applying a force acting in the direction in which the target object is to be moved, and the applied force pushes out the levitated target object to move the target object. 26. The device of claim 25, wherein the device is moved. 27. A means for moving the target object in the horizontal direction, the driving means being disposed on at least one of its sides along the movement path of the target object in the heat treatment space, and being attached to the driving means. A contact element that moves along the movement path, the contact element contacts the target object, applies a mechanical force to the target object, pushes and moves the target object, and stops when the driving means stops. The contact element stops,
26. The apparatus according to claim 25, whereby the movement of the target object is stopped. 28. A support element which is levitated by a gas blown toward the target object and can support the target object,
Placed directly adjacent to each other in the heat treatment space,
The means for moving the target object in the horizontal direction is the last support element, and when the last support element is pushed into the heat treatment space adjacent to the preceding support element, the force required for pushing the last support element is obtained. 26. The apparatus according to claim 25, wherein all the support elements move in the heat treatment space, being transmitted in sequence through the support elements preceding the last support element to the earliest support element. 29. The apparatus according to claim 21, further comprising means for stopping the movement of the target object in the heat treatment space. 30. A means for stopping movement of the target object, comprising: blowing a gas to the target object so that a force in a direction opposite to the moving direction of the target object acts on the target object; 30. The device of claim 29, wherein the device is a vent. 31. The apparatus according to claim 30, wherein the air supply port stops the target object by blowing a gas from obliquely below the target object. 32. The air supply port stops the target object by blowing gas from below the target object such that the front part of the target object is lifted and inclined with respect to the rear part with respect to the moving direction. Equipment. 33. A means for stopping the movement of the target object, wherein the suction is performed by sucking the gas from the suction port located below the moving target object, thereby drawing the target object toward the suction port and stopping the target object. 30. The device according to claim 29, wherein the device is a stopping means. 34. The means for stopping the movement of the target object is a blocking means located in front of the moving direction of the target object, and the movement of the target object is stopped when the moving target object collides with the blocking means. 30. The device of claim 29, wherein 35. A combustion apparatus according to claim 2, further comprising a combustion port for generating a flame which is ejected along a direction in which a gas for levitating the target object is blown, wherein the flame heats the target object.
An apparatus according to any one of claims 1 to 34. 36. The method according to claim 21, further comprising, after the heat treatment, a temperature lowering zone for lowering the temperature of the target object by blowing a gas having a temperature lower than the heat treatment temperature onto the target object. apparatus. 37. In the cooling zone, the main surfaces of the target objects are arranged in parallel with each other, and gas is blown in a state where the target objects are stacked adjacent to each other so that a space exists between the target objects. 37. The device of claim 36. 38. The apparatus according to claim 37, wherein a plurality of gas streams are sequentially blown to the target object in the cooling zone, and the temperatures of the gas streams gradually decrease toward an outlet of the heat treatment apparatus. 39. The apparatus according to claim 21, wherein the heat treatment space has a heat equalizing sheet surrounding the target object. 40. The heating means in the heat treatment space,
40. The device of claim 39, wherein the device is located outside the soaking sheet. 41. The heating means in the heat treatment space,
40. The apparatus according to claim 39, wherein the apparatus is disposed between the object to be heated and the heat equalizing sheet. 42. A heating means disposed between the target object to be heated and the heat equalizing sheet is an electric heater,
42. The apparatus according to claim 41, further comprising another heating means outside the heat equalizing sheet, wherein the another heating means is a conduit through which the heating medium passes. 43. The apparatus according to claim 39, wherein the soaking sheet is a highly oriented graphite sheet. 44. The apparatus according to claim 39, wherein the heat equalizing sheet has a flap portion extending from a portion surrounding the target object, and the heating means heats the flap portion. 45. The apparatus according to claim 21, wherein the heat treatment space has a wall formed by a heat insulating material block, and the heat insulating material block has a high vacuum space therein. 46. The apparatus according to claim 21, wherein the target object is a plasma display panel, and the paste material applied to the panel is baked by a heat treatment.