JPH1111570A - Carrier for base board - Google Patents

Abstract

PROBLEM TO BE SOLVED: To realize a new carrier structure in which even if the carrier is for a base board constituted to install a large-sized base board, processing liquid is hardly immersed into the carrier and further the carrier itself can be made small in size and light in weight. SOLUTION: This is comprised of a pair of side plates 10, four connecting shafts 20 for use in connecting the side plates 10 from each other and an assembling frame 30 connecting the side plates at the bottom part of it. The side plate 10 is made of anti-acid resin 12 in which metallic plates 11 made of titanium are embedded into an upper part, an intermediate part and a lower part, respectively. The connecting shaft 20 is also comprised of a shaft-like core member 21 and an anti-corrosion resin 22 covering the core member. The end part of the connecting shaft 20 is formed with a protrusion part 21a of the core member and inserted into a through-pass hole 10a formed in the side plate 10. The side plate 10 and the anti-corrosion resin of the connecting shaft 20 are integrally assembled by welding so as to perform a complete sealing of the inner metallic material and the core material.

Description

DETAILED DESCRIPTION OF THE INVENTION

[0001]

BACKGROUND OF THE INVENTION 1. Field of the Invention The present invention relates to a carrier for a substrate, and more particularly to a structure of a carrier for a substrate suitable for use in processes such as cleaning and etching for manufacturing a semiconductor device or a liquid crystal display device.

[0002]

2. Description of the Related Art Conventionally, in a manufacturing process of a semiconductor device, a liquid crystal display device, or the like, a carrier for a substrate made of a corrosion-resistant resin is often used in a process of cleaning and etching a substrate. The shape and structure of the substrate carrier vary depending on the shape and number of substrates to be mounted, the structure of the device for setting the carrier, and the like.In general, a small substrate carrier is formed by injection molding of a corrosion-resistant resin. Many are integrally molded. For example, a large substrate carrier for a large liquid crystal substrate has a box-like or frame-like structure in which parts made of a corrosion-resistant resin are assembled.

[0003]

In a large substrate carrier, a plurality of parts, for example, a plate-like body or a shaft-like body is assembled by screw connection or the like. Processing liquid permeates into the joint of
There is a problem that the treatment liquid permeates in the next step or the next operation and adheres to the substrate to cause corrosion, forms stains, or adheres to other equipment to cause corrosion.

Further, when a large-sized substrate carrier is formed, the weight of the substrate also increases, and it is necessary to increase the overall rigidity. Therefore, each part made of a corrosion-resistant resin is also thickened. However, there is a problem that the carrier itself becomes large and the weight increases.

Accordingly, the present invention has been made to solve the above-mentioned problems, and an object of the present invention is to prevent a processing liquid from infiltrating even with a substrate carrier configured to mount a large-sized substrate. In addition, it is an object of the present invention to realize a novel carrier structure capable of reducing the size and weight of the carrier itself.

[0006]

In order to solve the above-mentioned problems, the present invention takes measures to cover a core material with a corrosion-resistant resin in a substrate carrier for mounting, processing and transporting the substrate. A framed structure formed by assembling a plurality of frame members formed as described above, and at a joint between the frame members, one of the frame members has a protruding portion in which the core material protrudes from the corrosion resistant resin. The other frame member is formed in a shape corresponding to the protruding portion, and a concave portion or a through hole reaching the core material from the corrosion resistant resin is provided, and the protruding portion is formed in the concave portion or the through hole. After engaging with the core material in,
A carrier for a substrate, wherein a contact portion between the corrosion-resistant resin of one frame material and the corrosion-resistant resin of the other frame material is sealed.

According to this means, the rigidity of the carrier for the substrate can be ensured without increasing the thickness of the carrier because the frame is formed by joining the frame material in which the core material is coated with the corrosion resistant resin. In addition to the fact that the contact portion of the corrosion-resistant resin is sealed at the joint portion, penetration and seepage of the processing liquid are less likely to occur,
It is possible to prevent the occurrence of corrosion or seepage on the substrate or equipment.

Here, the contact portion is preferably sealed by welding and integrating the corrosion resistant resins.

According to this means, since the contact portion is sealed by welding the corrosion-resistant resins, it is possible to completely prevent seepage or seepage of the treatment liquid.

Preferably, the core is made of Ti or a Ti alloy mainly composed of Ti.

According to this means, by using Ti or a Ti alloy for the core material, the rigidity can be increased and the weight can be reduced, and corrosion can be prevented even if the processing liquid or the like touches the core material. it can.

Further, the frame member is engaged with a side end of the substrate in a horizontal direction and has a pair of plate-like bodies provided with one or a plurality of engagement grooves extending in a substantially vertical direction; A connecting member for connecting the plate-like members in a state where they face each other, and a supporting member for supporting the substrate, which is crossed substantially horizontally across the connecting member at the bottom. Preferably.

According to this means, the plate-like body is used as the side plate, and the side end of the substrate is held by engaging the engagement groove, and the substrate is supported by the support member. Since the liquid drainage property can be improved, it is possible to prevent the liquid remaining on the substrate and the occurrence of bleeding.

Further, in a substrate carrier for mounting, processing, transporting, and the like, a substrate is provided with a structure in which a pair of plate-like bodies are connected to each other by a plurality of connecting members so as to face each other. The plate-like body and the connection member each have a core material coated with a corrosion-resistant resin, and the corrosion-resistant resin covering the plate-like body and the corrosion-resistant resin covering the connection member are integrated. It is characterized by having been done.

[0015]

Next, an embodiment according to the present invention will be described with reference to the accompanying drawings. FIG. 1 is a perspective view showing an overall configuration of an embodiment of a substrate carrier according to the present invention. This substrate carrier is configured so that a plurality of large glass substrates for a liquid crystal display device are mounted in a vertical position, and a pair of side plates 10 and four connection plates for connecting the side plates 10 to each other. It is composed of a shaft 20 and a frame assembly 30 that connects the side plates at the bottom.

The side plate 10 is made of three Ti having a thickness of about 3 mm.
Made of a corrosion-resistant resin 12, for example, a fluorine resin, in which a metal plate 11 made of metal is embedded in the upper, middle and lower portions, respectively. As the material of the metal plate 11, various materials having high rigidity can be used, and materials having high rigidity, light weight, and high corrosion resistance are particularly preferable. For example, pure Ti or a Ti alloy containing Ti as a main composition is desirable. As the corrosion-resistant resin 12, a fluorine resin, a fluorinated rubber, or the like is preferable, and examples thereof include polytetrafluoroethylene, polychlorotrifluoroethylene, polyvinyl difluoride, and polyvinylidene fluoride. Among them, weldable polyvinyl difluoride (PVDF) exhibiting thermoplasticity is most preferable for the reasons described below. The side plate 10 can be manufactured by an injection molding method or the like of a corrosion resistant resin using the above metal plate as an insert.

On the inner surface of the side plate 10, a vertically extending V-shaped engaging groove 12a for engaging a substrate is formed by resin molding or cutting after molding. In addition, a handle 14 is formed in the upper portion of the outer surface for use during transportation and for holding the inside of the liquid tank. Further, the side plate 10 is formed by cutting in a state where it penetrates through the metal plate 11 in which through holes 10a are buried therein at two places near both upper ends, two places near both ends of the middle part, and two places near both lower ends. Have been.

The connecting shaft 20 for connecting the side plates 10 is
As shown in FIG. 2, Ti extends in the axial direction at the center.
Alternatively, it is formed in a round bar shape composed of a core material 21 made of a Ti alloy and a corrosion-resistant resin 22 covering the core material 21. The core material 21 and the corrosion-resistant resin 22 are the same materials as the metal plate 11 and the corrosion-resistant resin 12, respectively. At both ends of the connecting shaft 20, there are provided protrusions 21 a formed so that the core 21 protrudes from the end of the corrosion-resistant resin 22.

The frame body 30 is formed by combining four round rod-shaped shaft members similar to the connecting shaft 20.
A pair of connecting portions 30A extending in parallel with 0;
And a pair of support portions 30B attached so as to connect them. The frame 30 including the connecting portion 30A and the supporting portion 30B is a core material 3 made of Ti or a Ti alloy.
1 and a corrosion-resistant resin 32 covering the core material 31. The core material 31 and the corrosion-resistant resin 32 are made of the same material as the metal plate 11 and the corrosion-resistant resin 12, respectively, and are formed by the same method. Connecting part 30 of frame assembly 30
At both ends of A, protruding portions 31 a are formed so that the core material 31 protrudes from the end of the corrosion-resistant resin 32.

As shown in FIG. 3, the connecting shaft 20 has a projecting portion 21a inserted into the through hole 10a and a plug member 15 made of a corrosion-resistant resin separately from the side opposite to the projecting portion 21a. By fitting, as shown in FIG. 2, it is attached in an inserted state. In this way, as shown in FIG. 4, the end of the corrosion-resistant resin 21 of the connecting shaft 20 comes into contact with the surface of the corrosion-resistant resin 12 of the side plate 10 exactly.

Here, by welding the end portion of the corrosion resistant resin 21 and the corrosion resistant resin 12 by the welding device 50, the side plate 10 and the connecting shaft 20 are integrated, and the metal inside is completely sealed. You. In this case, it is desirable that the projection 21a and the metal plate 11 existing inside the through hole 10a be fixed by welding or bonding before the plug member 15 is fitted. Alternatively, a female screw may be formed in the through hole of the metal plate 11 and a male screw may be formed in the protrusion 21a, so that the metal plate 11 and the protrusion 21a are screwed together.

Further, the plug member 15 is also fixed to the corrosion-resistant resin 12 by welding in the same manner as described above, and is sealed.

The protruding portion 31a of the frame assembly 30 and the side plate 10 are attached and fixed in the same manner as the relationship between the protruding portion 21a and the side plate 10. That is, the protrusion 31a
Is inserted through a through-hole 10a formed in the lower part of the side plate 10, and the plug member 15 is fitted from the opposite side.
2 and the plug member 15 and the corrosion-resistant resin 12 are welded and sealed.

In the substrate carrier thus formed, as shown in FIG. 1, both ends of a liquid crystal glass substrate 40 are engaged with the engagement grooves 12, and the bottom of the glass substrate 40 is The plurality of glass substrates 40 can be mounted in a state where the glass substrates 40 are supported by the support portion 30B of the body 30.

According to the above-described embodiment, since the core material is covered with the corrosion-resistant resin, the rigidity can be increased without increasing the thickness even when a large substrate is mounted. The size of the carrier can be reduced. In addition, even if it is constituted by assembling a plurality of parts, it is difficult for seepage and bleeding of the processing liquid to occur,
It is possible to prevent corrosion and bleeding of substrates and equipment.

Further, in the present embodiment, since Ti or Ti alloy is used for the core material, it is possible to reduce the weight while securing rigidity. Further, even if there is a defect in the welded portion of the corrosion resistant resin, corrosion of the core material hardly occurs.

In the above embodiment, the side plate, the connecting shaft, and the frame member are formed and then joined to each other.
After the core material is formed as an integral frame, a coating treatment with a corrosion-resistant resin can be performed. Alternatively, the carrier may be completed by configuring each part in a state where any part is cut and assembling the parts. .

In the above embodiment, the board is held vertically by the engagement groove 12a formed in the side plate 10, and the board is provided by the shaft-shaped support section provided at the bottom and intersecting with the connecting shaft 20. , The drainage of the liquid from the substrate can be facilitated, and the liquid residue at the substrate, particularly at the bottom of the substrate, can be reduced. In this case, in particular, it is preferable that a portion (upper surface side) of the support portion that comes into contact with the substrate bottom has a convex shape that is as sharp as possible such as an arc shape or a mountain shape so as to reduce the contact area. However, in order to facilitate the manufacture, it is desirable that the support portion is formed in a round bar shape.

Although the side plate 10 is formed with the through hole 10a, a concave portion or a hole may be formed instead of the through hole, and the protrusion may be fitted therein. Further, the fitting structure or the engaging structure can be formed in an appropriate shape. That is, as a result, the structure is sufficient if rigidity is ensured by the engagement of the core members and the corrosion-resistant resin completely covers the periphery of the core member.

[0030]

As described above, according to the present invention, the following effects can be obtained.

According to the first aspect of the present invention, since the core material is formed by bonding the frame material coated with the corrosion-resistant resin, the rigidity of the substrate carrier can be secured without increasing the thickness. The carrier can be reduced in size, and the contact portion of the corrosion-resistant resin is sealed at the joint portion, so that infiltration and seepage of the processing liquid are less likely to occur,
It is possible to prevent the occurrence of corrosion or seepage on the substrate or equipment.

According to the second aspect, since the contact portion is sealed by welding the corrosion-resistant resins, it is possible to completely prevent the treatment liquid from seeping or seeping out.

According to the third aspect, by using Ti or a Ti alloy for the core material, the rigidity can be increased and the weight can be reduced, and corrosion can be prevented even if the processing liquid or the like touches the core material. Can be.

According to the fourth aspect, the plate-like body is used as the side plate, and the side end of the substrate is held by engaging the engagement groove, and the substrate is supported by the support member. In addition, since the liquid drainage property can be improved, it is possible to prevent the liquid remaining on the substrate and the occurrence of bleeding.

[Brief description of the drawings]

FIG. 1 is a perspective view showing an embodiment of a substrate carrier according to the present invention.

FIG. 2 is an enlarged cross-sectional view showing a joint between a side plate and a connection shaft in the embodiment.

FIG. 3 is an explanatory diagram showing a method of assembling a side plate, a connecting shaft, and a frame body in the embodiment.

FIG. 4 is an explanatory diagram showing a method of assembling the side plate, the connection shaft, and the frame in the embodiment.

[Explanation of symbols]

 DESCRIPTION OF SYMBOLS 10 Side plate 10a Through-hole 11 Metal plate 12 Corrosion-resistant resin 20 Connecting shaft 21 Core material 21a Projection 22 Corrosion-resistant resin 30 Assembly frame 30A Connection part 30B Supporting part 31 Core material 31a Projection 32 Corrosion-resistant resin

Claims (5)

[Claims] 1. A substrate carrier for mounting, processing, transporting, and the like on a substrate, comprising a frame formed by assembling a plurality of frame members each formed by coating a core material with a corrosion-resistant resin, At the joint between the frame members, one of the frame members is provided with a protrusion that projects the core from the corrosion-resistant resin, and the other frame member is formed in a shape corresponding to the protrusion. A recess or a through-hole that reaches the core from the corrosion-resistant resin is provided, and the protrusion is engaged with the core in the recess or the through-hole. A carrier for a substrate, wherein a contact portion between the corrosion-resistant resin and the corrosion-resistant resin of the other frame material is sealed. 2. The substrate carrier according to claim 1, wherein the contact portion is sealed by welding and integrating the corrosion-resistant resins. 3. The method according to claim 1, wherein the core material is Ti,
Alternatively, a substrate carrier formed of a Ti alloy mainly composed of Ti. 4. The pair of plate-like members according to claim 1, wherein the frame member is horizontally engaged with a side end of the substrate and has one or a plurality of engagement grooves extending in a substantially vertical direction. A body, a connecting member for connecting the pair of plate-shaped bodies in a state of facing each other, and a support for supporting the substrate, which is crossed substantially horizontally across the connecting member at a bottom portion. A carrier for a substrate, comprising: a member; 5. A substrate carrier for mounting, processing, transporting, and the like on a substrate, comprising a structure in which a pair of plate-like bodies are connected to each other by a plurality of connecting members so as to face each other, The plate-like body and the connection member each have a core material coated with a corrosion-resistant resin, and the corrosion-resistant resin covering the plate-like body and the corrosion-resistant resin covering the connection member are integrated. A carrier for a substrate, characterized in that it is made.