JPH1090158A - Apparatus for measuring concentration and grain size of air-borne particles - Google Patents
Apparatus for measuring concentration and grain size of air-borne particlesInfo
- Publication number
- JPH1090158A JPH1090158A JP8271635A JP27163596A JPH1090158A JP H1090158 A JPH1090158 A JP H1090158A JP 8271635 A JP8271635 A JP 8271635A JP 27163596 A JP27163596 A JP 27163596A JP H1090158 A JPH1090158 A JP H1090158A
- Authority
- JP
- Japan
- Prior art keywords
- laser beam
- measured
- light
- sheet
- concentration
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
- 239000002245 particle Substances 0.000 title claims abstract description 83
- 238000005259 measurement Methods 0.000 claims description 4
- 230000003287 optical effect Effects 0.000 claims description 3
- 230000001678 irradiating effect Effects 0.000 abstract description 7
- 230000004907 flux Effects 0.000 abstract description 5
- 239000007921 spray Substances 0.000 description 11
- 230000007246 mechanism Effects 0.000 description 5
- 238000010586 diagram Methods 0.000 description 4
- 238000006243 chemical reaction Methods 0.000 description 3
- 238000000034 method Methods 0.000 description 3
- 230000003247 decreasing effect Effects 0.000 description 2
- 230000000694 effects Effects 0.000 description 2
- 239000000446 fuel Substances 0.000 description 2
- 230000007480 spreading Effects 0.000 description 2
- 241000405965 Scomberomorus brasiliensis Species 0.000 description 1
- 230000009471 action Effects 0.000 description 1
- 238000010276 construction Methods 0.000 description 1
- 238000011156 evaluation Methods 0.000 description 1
- 238000002347 injection Methods 0.000 description 1
- 239000007924 injection Substances 0.000 description 1
- 239000007788 liquid Substances 0.000 description 1
- 230000008569 process Effects 0.000 description 1
- 238000005507 spraying Methods 0.000 description 1
Landscapes
- Investigating Or Analysing Materials By Optical Means (AREA)
Abstract
Description
【０００１】[0001]
【発明の属する技術分野】本発明はレーザー光を用いた
浮遊粒子群の濃度及び粒度の測定装置に関し、空間に噴
霧された燃料粒子群やその他の粒子群の濃度や粒度分布
を測定する装置に関する。BACKGROUND OF THE INVENTION 1. Field of the Invention The present invention relates to an apparatus for measuring the concentration and particle size of suspended particles using a laser beam, and more particularly to an apparatus for measuring the concentration and particle size distribution of fuel particles and other particles sprayed in a space. .
【０００２】[0002]
【従来の技術】レーザー光を被測定粒子群に照射し、前
方の散乱光の強度パターンからその濃度分布や粒度分布
を測定する装置として、従来、特公平３−55780 号公報
に記載の装置や特開平７−209169号公報に記載の装置が
提供されている。2. Description of the Related Art As an apparatus for irradiating a particle group to be measured with a laser beam and measuring its concentration distribution and particle size distribution from an intensity pattern of scattered light in front, an apparatus described in Japanese Patent Publication No. 3-55780, An apparatus described in JP-A-7-209169 is provided.
【０００３】[0003]
【発明が解決しようとする課題】ところが上記した従来
の特公平３−55780 号公報に記載の装置においては、粒
子群を照射するレーザービームは、従来のビームエクス
パンダでも噴霧全体をカバーするに十分大きくすること
はできる。しかし、断面が円形或いは楕円形で、しかも
断面における照射光の強度が一様でないために、噴霧全
体を一様に評価することが出来ないという基本的な問題
がある。また、例えばノズルなどから噴射された粒子群
を測定対象とする場合、従来のビーム光を照射する測定
では、噴霧の一部分の情報を得るにすぎず、その噴霧全
体を代表するものであると言えない。従って、噴霧の全
体的な特徴を把握するためには、少なくとも、十分な幅
を有する平行レーザーシートを照射し、その断面での測
定を行う必要がある。一方、特開平７−209169号公報に
記載の装置は、集光レンズと回転反射鏡と入射レンズと
を用いて、レーザー光を被測定粒子群に対する照射方向
と垂直方向に走査し、これによって互いに平行なレーザ
ー光を時系列的に被測定粒子群に照射し、被測定粒子群
の広範囲における濃度と粒度の分布を得るものである
が、集光レンズや回転反射鏡を用いたレーザー光の走査
機構が非常に高価となり、且つ高速とはいえ走査に時間
を要することから、瞬時には粒子群のある断面での濃度
や粒度の分布得ることができなかった。However, in the apparatus described in the above-mentioned conventional Japanese Patent Publication No. 3-55780, the laser beam for irradiating the particle group is sufficient for the conventional beam expander to cover the whole spray. You can make it bigger. However, since the cross section is circular or elliptical and the intensity of the irradiation light in the cross section is not uniform, there is a fundamental problem that the entire spray cannot be uniformly evaluated. In addition, for example, in a case where a group of particles ejected from a nozzle or the like is to be measured, the conventional measurement of irradiating a light beam only obtains information on a part of the spray and can be said to be representative of the entire spray. Absent. Therefore, in order to grasp the overall characteristics of the spray, it is necessary to irradiate at least a parallel laser sheet having a sufficient width and measure the cross section thereof. On the other hand, the apparatus described in Japanese Patent Application Laid-Open No. 7-209169 uses a condenser lens, a rotary reflecting mirror, and an incident lens to scan laser light in a direction perpendicular to an irradiation direction on a group of particles to be measured. Parallel laser light is applied to the particle group to be measured in time series to obtain the concentration and particle size distribution over a wide range of the particle group to be measured. Since the mechanism is very expensive and scanning requires a long time even though the scanning speed is high, it is not possible to instantaneously obtain the distribution of the concentration and the particle size in a cross section having a particle group.
【０００４】そこで本発明は、上記従来装置の問題を解
消し、被測定粒子群のある断面における濃度と粒度の分
布を簡単な設備で容易に測定できる浮遊粒子群の濃度及
び粒度の測定装置の提供を課題とする。例えば、本発明
によれば、ノズル等から噴射された粒子群を測定対象と
する場合、噴射軸に垂直な断面での計測を行えば、その
噴霧の全体的な特徴を把握できる。Accordingly, the present invention solves the above-mentioned problems of the conventional apparatus, and provides an apparatus for measuring the concentration and particle size of a suspended particle group which can easily measure the distribution of concentration and particle size at a certain cross section of the particle group to be measured with simple equipment. Providing is an issue. For example, according to the present invention, when a group of particles ejected from a nozzle or the like is to be measured, if the measurement is performed on a cross section perpendicular to the ejection axis, the overall characteristics of the spray can be grasped.
【０００５】[0005]
【課題を解決するための手段】上記課題を達成するた
め、本発明の浮遊粒子群の濃度及び粒度の測定装置は、
照射されたレーザー光束を被測定浮遊粒子群に投光し、
被測定浮遊粒子群からの散乱光を前方においた集光レン
ズで集光すると共に集光面に配置した光ディテクタで検
出し、検出された散乱光の強度パターンから前記被測定
浮遊粒子群の濃度と粒度を測定する装置であって、レー
ザー光照射装置と被測定浮遊粒子群との間に、円筒面レ
ンズの組み合わせからなり、レーザー光照射装置からの
レーザー光束を平行光からなるシート状レーザー光束に
調整して出力するレーザー光束シート状化手段を配置し
たことを第１の特徴としている。また本発明の浮遊粒子
群の濃度及び粒度の測定装置は、上記第１の特徴に加え
て、レーザー光の断面での光強度分布を一様にするフィ
ルターを加えたことを第２の特徴としている。Means for Solving the Problems To achieve the above object, an apparatus for measuring the concentration and particle size of suspended particles according to the present invention comprises:
The irradiated laser beam is projected on the suspended particle group to be measured,
The scattered light from the measured suspended particle group is condensed by a condensing lens placed in front and detected by a light detector arranged on the condensing surface, and the concentration of the measured suspended particle group is determined from the detected intensity pattern of the scattered light. A sheet-like laser beam consisting of a combination of cylindrical lenses between the laser beam irradiation device and the group of suspended particles to be measured, and the laser beam from the laser beam irradiation device consisting of parallel light. The first feature is that a laser beam sheet forming means for adjusting and outputting the laser beam is arranged. A second feature of the apparatus for measuring the concentration and particle size of suspended particles according to the present invention is that a filter for uniformizing the light intensity distribution in a cross section of laser light is added in addition to the first feature. I have.
【０００６】上記本発明の第１の特徴によれば、レーザ
ー光照射装置から照射せられた平行なレーザー光からな
るレーザー光束は、円筒面レンズの組み合わせからなる
レーザー光束シート状化手段に入り、該レーザー光束シ
ート状化手段によって伝播方向に垂直な面の一方向に十
分に広げられた平行光線からなるシート状のレーザー光
束に調整される。このシート状のレーザー光束が被測定
浮遊粒子群に投光されることで、レーザー光束の伝播方
向と直角な断面のある一方向からは、被測定浮遊粒子群
の径に匹敵するような十分に長い寸法範囲でのレーザー
光照射に対する散乱光を得ることができる。即ち、レー
ザー光束を被測定浮遊粒子群の直径に相当する寸法を持
つシート状レーザー光束とすることで、被測定浮遊粒子
群のある断面における被測定浮遊粒子群の濃度分布や粒
度分布を一度に得ることが可能となる。そして設備につ
いても、レーザー光の走査機構や時系列的演算機構等の
他の複雑な設備を必要とすることなく、簡単で安価に得
ることができる。上記本発明の第２の特徴によれば、上
記第１の特徴による作用、効果に加えて、レーザー光の
断面での光強度分布を一様にするフィルターを加えたの
で、被測定浮遊粒子群の濃度分布や粒度分布の測定を一
層正確に行うことができる。According to the first feature of the present invention, a laser beam composed of parallel laser beams emitted from a laser beam irradiator enters a laser beam sheet-forming means composed of a combination of cylindrical lenses. The laser beam is formed into a sheet-like laser beam composed of parallel rays sufficiently spread in one direction in a plane perpendicular to the propagation direction by the laser beam sheet forming means. By projecting this sheet-shaped laser beam onto the floating particle group to be measured, from one direction having a cross section perpendicular to the propagation direction of the laser beam, it is sufficient to be equivalent to the diameter of the floating particle group to be measured. Scattered light with respect to laser light irradiation in a long dimension range can be obtained. That is, by making the laser beam into a sheet-like laser beam having a dimension corresponding to the diameter of the measured suspended particle group, the concentration distribution and the particle size distribution of the measured suspended particle group at a certain cross section of the measured suspended particle group can be measured at once. It is possible to obtain. The equipment can be obtained simply and inexpensively without requiring other complicated equipment such as a laser beam scanning mechanism and a time-series operation mechanism. According to the second aspect of the present invention, in addition to the action and effect of the first aspect, a filter for uniformizing the light intensity distribution in the cross section of the laser beam is added, so that the measured suspended particle group Can be measured more accurately.
【０００７】[0007]
【発明の実施の形態】図１は本発明の実施の形態例に係
る浮遊粒子群の濃度及び粒度の測定装置の全体を示す平
面図、図２は図１におけるレーザー光束シート状化手段
の斜視図、図３はレーザー光束シート状化手段の他の例
を示す図で、（Ａ）は平面図、（Ｂ）は側面図である。
図４は噴射ノズルによってコーン状に形成された浮遊粒
子群に対するシート状レーザー光束の照射の仕方の例を
示す図である。1 is a plan view showing an entire apparatus for measuring the concentration and particle size of suspended particles according to an embodiment of the present invention, and FIG. 2 is a perspective view of a laser beam sheet forming means in FIG. FIG. 3 and FIG. 3 are diagrams showing another example of the laser beam sheet forming means. FIG. 3A is a plan view, and FIG. 3B is a side view.
FIG. 4 is a diagram showing an example of a method of irradiating a sheet-like laser beam to a floating particle group formed in a cone shape by an ejection nozzle.
【０００８】図１、２を参照して、装置はレーザー光照
射装置10と、レーザー光束シート状化手段20と、集光レ
ンズ30と、光ディテクタ40と、信号処理器50からなる。
前記レーザー光照射装置10は、伝播方向に垂直な断面が
例えば円形や楕円形からなる単色平行光束を発振する装
置であり、一般的によく使用される通常のレーザー光照
射装置と言えるものである。前記レーザー光束シート状
化手段20は、少なくとも２枚の円筒面レンズ21、22、ま
たはそれ以上の円筒面レンズを組み合わせてなる光学系
からなる。そしてレーザー光照射装置10に近い円筒面レ
ンズ21は、レーザー光照射装置10から照射されたレーザ
ー光束をその伝播方向に垂直な断面における一方向にレ
ーザー光束を広げるためのレンズとされる。本例におい
ては、レーザー光照射装置10に近い方のレンズを凹円筒
面レンズ21としている。他方の円筒面レンズ22は、前記
前方の円筒面レンズ21で一方向に広がりながら入射せら
れるレーザー光束をレンズの軸に平行な方向に向くよう
に調整するレンズである。本例においては、円筒面レン
ズ22に凸円筒面レンズ22を用いている。このように円筒
面レンズを組み合わせることで、相互に平行なレーザー
光からなるシート状レーザー光束Ｌにして被測定浮遊粒
子群Ｇに投光することができる。即ち、シート状レーザ
ー光束Ｌは、十分に大寸法の幅Ｌ1 と適当な厚みＬ2 を
持つ相互に平行なレーザー光の集まりである。シート状
レーザー光束Ｌは、図１の紙面に垂直な面においては、
円筒面レンズ21、22を使用しているため、光線の平行度
は失われることなく、また紙面に平行な面においては、
円筒面レンズの焦点距離の組み合わせによって平行度を
保持することが可能である。前記レーザー光照射装置10
からのレーザー光束は、レーザー光の強度がその半径方
向にある分布を持つことになるが、本発明でのレーザー
光束シート状化手段20では、前記レーザー光照射装置10
からのレーザー光束のうちの中心付近の狭い領域に属す
るレーザー光だけが凹円筒面レンズ21と凸円筒面レンズ
22との両方のレンズを通って十分に大きな幅Ｌ1 と適当
な厚みＬ2 を持つ平行なシート状レーザー光束Ｌに調節
されるので、よって被測定浮遊粒子群Ｇに投光せられる
シート状レーザー光束Ｌの光強度はある程度均質に保持
される。よって後述する散乱光の評価に対する影響を無
くし、或いは十分に少なくすることができる。前記円筒
面レンズ21、22は市販のものを用いてでも十分に平行な
シート状レーザー光束Ｌを得ることができ、安価であ
る。Referring to FIGS. 1 and 2, the apparatus includes a laser beam irradiation device 10, a laser beam sheet forming means 20, a condenser lens 30, a light detector 40, and a signal processor 50.
The laser light irradiation device 10 is a device that oscillates a monochromatic parallel light beam whose cross section perpendicular to the propagation direction has, for example, a circular or elliptical shape, and can be said to be a commonly used ordinary laser light irradiation device. . The laser beam sheet forming means 20 comprises an optical system formed by combining at least two cylindrical lenses 21, 22 or more cylindrical lenses. The cylindrical lens 21 close to the laser light irradiation device 10 is a lens for spreading the laser light beam emitted from the laser light irradiation device 10 in one direction in a cross section perpendicular to the propagation direction. In this example, the lens closer to the laser beam irradiation device 10 is a concave cylindrical lens 21. The other cylindrical lens 22 is a lens that adjusts a laser beam that is incident on the front cylindrical lens 21 while spreading in one direction so as to be directed in a direction parallel to the axis of the lens. In this example, a convex cylindrical lens 22 is used as the cylindrical lens 22. By combining the cylindrical lenses in this manner, a sheet-like laser beam L composed of laser beams parallel to each other can be projected onto the floating particle group G to be measured. That is, the sheet-like laser beam L is a collection of mutually parallel laser beams having a sufficiently large width L 1 and an appropriate thickness L 2 . The sheet-like laser beam L has a plane perpendicular to the plane of FIG.
Since the cylindrical lenses 21 and 22 are used, the parallelism of light rays is not lost, and in the plane parallel to the paper,
Parallelism can be maintained by a combination of the focal lengths of the cylindrical lenses. The laser beam irradiation device 10
The laser beam from the laser beam has a distribution in which the intensity of the laser beam is in the radial direction. In the laser beam sheet forming means 20 of the present invention, the laser beam irradiating device 10 is used.
Only the laser light belonging to the narrow area near the center of the laser beam from the lens is concave cylindrical lens 21 and convex cylindrical lens
Since is adjusted to parallel sheet laser beam L having through both lenses with large width L 1 sufficiently appropriate thickness L 2 of the 22, thus sheet to Serra projection to be measured airborne particles G The light intensity of the laser beam L is maintained to some extent homogeneous. Therefore, the influence on the evaluation of the scattered light described later can be eliminated or sufficiently reduced. Even if a commercially available cylindrical lens 21 or 22 is used, a sufficiently parallel sheet-like laser beam L can be obtained, and it is inexpensive.
【０００９】前記集光レンズ30は、シート状レーザー光
束Ｌの前記被測定浮遊粒子群Ｇに当たらなかった平行レ
ーザー光（非散乱光）を集光して焦点に集めるレンズで
あり、被測定浮遊粒子群Ｇに当たって散乱した散乱光を
集光するためのレンズである。該集光レンズ30の焦点面
に光ディテクタ40を配置することで、前記被測定浮遊粒
子群Ｇに当たって散乱した散乱光を検出することができ
る。前記光ディテクタ40は、例えば環状光ディテクタと
し、光電変換素子を多数配列した多重光電変換素子で構
成することができる。光ディテクタ40の各光電変換素子
で検出された出力は、信号処理器50に入力される。信号
処理器50には、前記光ディテクタの検出した出力から粒
度分布と濃度を決定するための装置、即ち、入力したデ
ータを解析し、シート状レーザー光束Ｌが投光された領
域での被測定浮遊粒子群Ｇの濃度と分布を算出する過程
を実行する演算部、散乱強度データと結果を格納する記
憶部、それらを出力する表示部が備えられている。The condensing lens 30 is a lens that converges and focuses the parallel laser light (non-scattered light) of the sheet-like laser beam L that did not hit the floating particle group G to be measured. It is a lens for collecting the scattered light scattered on the particle group G. By arranging the light detector 40 on the focal plane of the condenser lens 30, it is possible to detect the scattered light scattered on the suspended particle group G to be measured. The photodetector 40 is, for example, an annular photodetector, and can be configured by a multiplex photoelectric conversion element in which a large number of photoelectric conversion elements are arranged. The output detected by each photoelectric conversion element of the light detector 40 is input to the signal processor 50. The signal processor 50 is a device for determining the particle size distribution and density from the output detected by the photodetector, that is, the input data is analyzed, and the measured data is measured in the area where the sheet-like laser beam L is projected. An arithmetic unit for executing a process of calculating the concentration and distribution of the suspended particle group G, a storage unit for storing scattering intensity data and results, and a display unit for outputting them are provided.
【００１０】今、レーザー光照射装置10からのレーザー
光束はレーザー光束シート状化手段20によってシート状
レーザー光束Ｌとされ、十分な幅Ｌ1 と適当な厚みＬ2
を持って、被測定浮遊粒子群Ｇに投光される。そして被
測定浮遊粒子群Ｇからの散乱光は集光レンズ30を介して
光ディテクタ40で検出され、その散乱光のパターンから
前記被測定浮遊粒子群Ｇの前記シート状レーザー光束Ｌ
の伝播方向と直角な断面における濃度と粒度の分布が前
記幅Ｌ1 と厚みＬ2 からなる範囲で同時的に一挙に測定
することができる。よって前記幅Ｌ1 を十分に大きくす
ることで、被測定浮遊粒子群Ｇのある方向での濃度や粒
度の分布については同時的に一挙に知ることが可能とな
る。[0010] Now, a laser beam from a laser beam irradiation device 10 is a sheet-like laser beam L by a laser beam sheet means 20, sufficient width L 1 with an appropriate thickness L 2
And the light is projected onto the suspended particle group G to be measured. The scattered light from the measured suspended particle group G is detected by the light detector 40 via the condenser lens 30, and the sheet-like laser beam L of the measured suspended particle group G is determined based on the scattered light pattern.
Can be distributed in the density and particle size in the propagation direction perpendicular to the cross section of the measures to simultaneously once a range consisting of the width L 1 and the thickness L 2. Therefore, by sufficiently large the width L 1, it is possible to know simultaneously once for the distribution of concentration and particle size in the direction of the measured airborne particles G.
【００１１】前記シート状レーザー光束Ｌの厚みＬ2 に
ついては、レーザー光照射装置10からのレーザー光束の
直径を単レンズを組み合わせることによって増減させる
ことで調整可能である。またシート状レーザー光束Ｌと
なった後にその厚みＬ2 を増減させる場合は、図３の
（Ａ）の平面図と（Ｂ）の側面図で示すように、凸円筒
面レンズ22の後方に、厚みを減らす凸円筒面レンズ23と
光線を平行化する凹円筒面レンズ24を組み合わせて用い
ることで調節することができる。The thickness L 2 of the sheet-like laser beam L can be adjusted by increasing or decreasing the diameter of the laser beam from the laser beam irradiation device 10 by combining a single lens. In the case of increasing or decreasing the thickness L 2 after a sheet-like laser beam flux L, as shown in the side view of the plan view of FIG. 3 (A) (B), and behind the convex cylindrical surface lens 22, It can be adjusted by using a combination of a convex cylindrical lens 23 for reducing the thickness and a concave cylindrical lens 24 for collimating light rays.
【００１２】本発明の装置は、例えば噴霧ノズルから出
る燃料等の噴霧の濃度、粒度分布の計測に適している。
即ち、図４に示すように、液体噴霧ノズルＮから定常的
に噴霧されている被測定浮遊粒子群Ｇ1 に対して、噴霧
の噴射方向に対して垂直な方向からシート状レーザー光
束Ｌを投光し、これによって噴霧の噴射方向に対して垂
直な断面での濃度、粒度分布の計測から、そのノズルの
性能評価等が可能となる。The apparatus of the present invention is suitable for measuring, for example, the concentration and particle size distribution of a spray such as fuel emitted from a spray nozzle.
Projecting That is, as shown in FIG. 4, with respect to constantly sprayed measured suspended particulate group G 1 has a liquid spray nozzle N, the sheet-like laser beam L from a direction perpendicular to the direction of injection spray This makes it possible to evaluate the performance of the nozzle by measuring the concentration and particle size distribution in a cross section perpendicular to the spraying direction of the spray.
【００１３】[0013]
【発明の効果】本発明は以上の構成よりなり、請求項１
に記載の浮遊粒子群の濃度及び粒度の測定装置によれ
ば、レーザー光照射装置と被測定浮遊粒子群との間に、
入射されたレーザー光束を平行光からなるシート状レー
ザー光束に調整して出力するレーザー光束シート状化手
段を配置したので、これによって得られるシート状のレ
ーザー光束を被測定浮遊粒子群に投光することで、被測
定浮遊粒子群のある断面のある方向における被測定浮遊
粒子群の濃度分布や粒度分布を同時的に瞬時に得ること
が可能となる。そして設備についても、レーザー光の走
査機構や時系列的演算機構等の他の複雑な設備を必要と
することなく、簡単な設備で構成することができ、安価
である。また請求項２に記載の浮遊粒子群の濃度及び粒
度の測定装置によれば、上記請求項１に記載の構成によ
る効果に加えて、レーザー光の断面での光強度分布を一
様にするフィルターを加えたので、被測定浮遊粒子群の
濃度分布や粒度分布の測定を一層正確に行うことができ
る。According to the present invention, there is provided the above construction.
According to the concentration and particle size measurement device of the suspended particle group described in the, between the laser light irradiation device and the measured suspended particle group,
Since a laser beam sheet forming means for adjusting the incident laser beam into a sheet laser beam consisting of parallel light and outputting the same is arranged, the sheet laser beam obtained by this is projected onto the floating particle group to be measured. This makes it possible to simultaneously and instantaneously obtain the concentration distribution and the particle size distribution of the measured suspended particle group in a certain direction of a certain cross section of the measured suspended particle group. The equipment can be configured with simple equipment without requiring other complicated equipment such as a laser beam scanning mechanism and a time-series operation mechanism, and is inexpensive. According to the apparatus for measuring the concentration and particle size of suspended particles according to the second aspect, in addition to the effect of the configuration according to the first aspect, a filter for uniformizing the light intensity distribution in the cross section of the laser beam. Is added, the concentration distribution and the particle size distribution of the suspended particle group to be measured can be measured more accurately.
【図１】本発明の実施の形態例に係る浮遊粒子群の濃度
及び粒度の測定装置の全体を示す平面図である。FIG. 1 is a plan view showing an entire apparatus for measuring the concentration and particle size of suspended particles according to an embodiment of the present invention.
【図２】図１におけるレーザー光束シート状化手段の斜
視図である。FIG. 2 is a perspective view of a laser beam forming means in FIG. 1;
【図３】レーザー光束シート状化手段の他の例を示す図
である。FIG. 3 is a diagram showing another example of the laser beam sheet forming means.
【図４】浮遊粒子群に対するシート状レーザー光束の照
射の仕方の例を示す図である。FIG. 4 is a diagram showing an example of a method of irradiating a suspended particle group with a sheet-like laser beam.
10 レーザー光照射装置 20 レーザー光束シート状化手段 21 凹円筒面レンズ 22 凸円筒面レンズ 30 集光レンズ 40 光ディテクタ 50 信号処理器 Ｌ シート状レーザー光束 Ｇ 被測定浮遊粒子群 10 Laser beam irradiation device 20 Laser beam sheet forming means 21 Concave cylindrical lens 22 Convex cylindrical lens 30 Condensing lens 40 Optical detector 50 Signal processor L Sheet laser beam G Gathered suspended particles
Claims (2)
子群に投光し、被測定浮遊粒子群からの散乱光を前方に
おいた集光レンズで集光すると共に集光面に配置した光
ディテクタで検出し、検出された散乱光の強度パターン
から前記被測定浮遊粒子群の濃度と粒度を測定する装置
であって、レーザー光照射装置と被測定浮遊粒子群との
間に、円筒面レンズの組み合わせからなり、レーザー光
照射装置からのレーザー光束を平行光からなるシート状
レーザー光束に調整して出力するレーザー光束シート状
化手段を配置したことを特徴とする浮遊粒子群の濃度及
び粒度の測定装置。1. An optical detector in which an irradiated laser beam is projected onto a group of floating particles to be measured, and scattered light from the group of floating particles to be measured is condensed by a condensing lens disposed in front and arranged on a condensing surface. In the apparatus for measuring the concentration and particle size of the suspended particle group to be measured from the intensity pattern of the detected scattered light, between the laser light irradiation device and the suspended particle group to be measured, the cylindrical lens The measurement of the concentration and particle size of the suspended particle group, wherein a laser beam from the laser beam irradiation device is adjusted to a sheet-like laser beam consisting of parallel light, and a laser beam sheet-forming means is provided. apparatus.
にするフィルターを加えたことを特徴とする請求項１に
記載の浮遊粒子群の濃度及び粒度の測定装置。2. The apparatus for measuring the concentration and particle size of a suspended particle group according to claim 1, further comprising a filter for making the light intensity distribution in a cross section of the laser light uniform.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP8271635A JPH1090158A (en) | 1996-09-19 | 1996-09-19 | Apparatus for measuring concentration and grain size of air-borne particles |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP8271635A JPH1090158A (en) | 1996-09-19 | 1996-09-19 | Apparatus for measuring concentration and grain size of air-borne particles |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| JPH1090158A true JPH1090158A (en) | 1998-04-10 |
Family
ID=17502819
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP8271635A Pending JPH1090158A (en) | 1996-09-19 | 1996-09-19 | Apparatus for measuring concentration and grain size of air-borne particles |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPH1090158A (en) |
Cited By (4)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JP2006145347A (en) * | 2004-11-18 | 2006-06-08 | Topcon Corp | Air particle monitor device and vacuum treatment apparatus |
| JP2006247200A (en) * | 2005-03-11 | 2006-09-21 | Hiroshima Univ | Method for detecting thrombus and thrombus observation device using thereof |
| CN104833620A (en) * | 2015-04-20 | 2015-08-12 | 江苏苏净集团有限公司 | Atmospheric particulate matter concentration monitoring device |
| CN110160741A (en) * | 2019-06-14 | 2019-08-23 | 丹东百特仪器有限公司 | A kind of light scattering method droplet drift value test device |
-
1996
- 1996-09-19 JP JP8271635A patent/JPH1090158A/en active Pending
Cited By (4)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JP2006145347A (en) * | 2004-11-18 | 2006-06-08 | Topcon Corp | Air particle monitor device and vacuum treatment apparatus |
| JP2006247200A (en) * | 2005-03-11 | 2006-09-21 | Hiroshima Univ | Method for detecting thrombus and thrombus observation device using thereof |
| CN104833620A (en) * | 2015-04-20 | 2015-08-12 | 江苏苏净集团有限公司 | Atmospheric particulate matter concentration monitoring device |
| CN110160741A (en) * | 2019-06-14 | 2019-08-23 | 丹东百特仪器有限公司 | A kind of light scattering method droplet drift value test device |
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